Contamination shield for mechanically insulating device

Abstract

An apparatus includes: a mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange and defining a bellows passage extending in an axial direction between an opening of the first flange and the second flange; a rigid inner sleeve attached to or supported by the first flange and extending in the axial direction along the bellows passage; and a baffle device. The rigid inner sleeve has an outer diameter smaller than an inner diameter of the flexible bellows. The baffle device is at least partially fixed to or supported by the second flange and defines an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve. The baffle device is configured to block particles from entering a region between the flexible bellows and the rigid inner sleeve.

Description

Technical Field

[0001] The subject matter disclosed pertains to a device for shielding mechanical insulation devices, such as a flexible corrugated pipe made of a material that is not desirable to us. Prior Technology

[0002] Fluid materials (such as liquids, gases, or portions of liquids) moving within a system may collide with surfaces (impact surfaces) within the system. Collisions with impact surfaces can cause material splashing, deposition, and / or dispersion, which can contaminate the impact surface and objects in its vicinity. Contamination can be, for example, small pieces of material ejected from the material due to the impact. Contamination of objects can degrade the performance of the objects and / or the entire system.

[0003] For example, the system may include optical elements such as mirrors, and contamination of the mirrors may alter their reflective properties. The mirrors may be mirrors in extreme ultraviolet (EUV) light sources, and contamination may result in a reduction in the amount of EUV light output by the EUV light source.

[0004] EUV light, such as electromagnetic radiation with wavelengths of 100 nanometers (nm) or less (sometimes referred to as soft X-rays) and including light with wavelengths of, for example, 20 nm or less, between 5 and 20 nm, or between 13 and 14 nm, can be used in photolithography processes to create minute features in a substrate (e.g., a silicon wafer) by initiating polymerization in a resist layer. Methods for generating EUV light include, but are not limited to, converting materials containing elements such as xenon, lithium, or tin into a plasma state using emission spectra in the EUV range. In one such method, often referred to as laser-generated plasma ("LPP"), the desired plasma is generated by irradiating a target material (e.g., in the form of droplets, plates, strips, streams, or clusters) with an amplified beam of light. For this process, the plasma is typically generated in a sealed container, such as a vacuum cavity, and various types of metrological devices are used to monitor the plasma.

[0005] During operation, the EUV light source utilizes and generates gases, liquids, and some liquids (such as plasma effluents), which are transferred between components and through various mechanical connections that provide conduits for fluid flow between components. Summary of the Invention

[0006] In some general embodiments, an apparatus includes: a mechanical insulating device having a flexible bellows extending between a first flange and a second flange; a rigid inner sleeve; and a baffle device. The flexible bellows defines a bellows passage extending in an axial direction between the openings of the first flange and the second flange. The rigid inner sleeve is attached to or supported by the first flange and extends along the bellows passage in the axial direction. The rigid inner sleeve has an outer diameter smaller than an inner diameter of the flexible bellows. The baffle device is at least partially fixed to or supported by the second flange and defines an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve. The baffle device is configured to allow relative movement between the first flange and the second flange, the relative movement including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0007] The implementation may include one or more of the following features. For example, the baffle device may extend into the bellows passage.

[0008] The distance between the inner diameter of the flexible bellows and the outer diameter of the rigid inner sleeve may be greater than about 10% of the inner diameter of the flexible bellows, greater than about 20% of the inner diameter of the flexible bellows, or greater than about 30% of the inner diameter of the flexible bellows.

[0009] The baffle assembly may include one or more disks extending in a direction not parallel to the axial direction. The direction in which the one or more disks extend may be perpendicular to the axial direction. The one or more disks may include a plurality of disks. The outer diameter of at least one disk may differ from the outer diameter of each of the other disks, and the inner diameter of at least one disk may differ from the inner diameter of each of the other disks. The outer diameter of at least one disk may be equal to the outer diameter of another disk, and the inner diameter of at least one disk may be equal to the inner diameter of another disk. Each disk may be restricted from movement in the axial direction and may be freely movable in a direction not parallel to the axial direction. Each disk may be defined by a thickness along the axial direction, which allows each disk to be mounted adjacent to the second flange. Each of the one or more disks may include a slot extending from one outer diameter of the disk to one inner diameter of the disk, the slot allowing each disk to be mounted adjacent to the second flange. The baffle assembly may also include a disk housing configured to hold one or more disks. The disk housing may be defined by an inner diameter equal to the inner diameter of the flexible bellows. At least one of the one or more disks may have an outer diameter greater than the inner diameter of the disk housing. The one or more disks may include a plurality of disks. If any of the disks is a small disk having an outer diameter less than the sum of the inner diameter and the annular radius of the disk housing, then the small disk may be sandwiched between two disks, each of which has an outer diameter greater than the sum of the inner diameter and the annular radius of the disk housing.

[0010] Each disk can be defined by a thickness along the axial direction, so that one or more disks can be housed within the disk housing.

[0011] The baffle device can be configured to at least partially or almost completely cover a region between the flexible bellows and the rigid inner sleeve, thereby preventing particles from entering this region. Such particles may include one or more of solid particles, fluid particles, and splashes.

[0012] The flexible bellows may include folds that can be configured to fold and unfold to achieve the relative movement between the first flange and the second flange.

[0013] The shielding device may be made of a metal including a coating configured to prevent particulate contamination of the shielding device. These particulates may include one or more of solid particles, fluid particles, and splashes. Furthermore, the shielding device coating may be configured to: repel fluid particles thereby preventing their accumulation on the shielding device; and prevent solid particles cured on the shielding device from adhering to the shielding device. The shielding device coating may be further configured to prevent corrosion of one of the outer surfaces of the shielding device caused by contamination from these particulates. The metal may be stainless steel, and the shielding device coating may be a metal nitride or a metal oxide.

[0014] The rigid inner sleeve may be made of a metal. The metal may have a high thermal conductivity. The rigid inner sleeve may be made of molybdenum, aluminum, copper, alumina, diamond, or graphite. The rigid inner sleeve may include a coating configured to prevent particulate contamination of one or more of the baffle device and the rigid inner sleeve. These particulates may include one or more of the following: solid particles, fluid particles, and splashes. The rigid inner sleeve coating may be configured to: repel fluid particles to prevent their accumulation on the baffle device; and prevent solid particles cured on the baffle device from adhering to the baffle device. The rigid inner sleeve coating may be configured to repel fluid particles in a direction parallel to the axial direction or away from the baffle device, such that when a fluid propagates through the rigid inner sleeve, the fluid detaches from the rigid inner sleeve having a propagation direction parallel to the axial direction or away from the baffle device. The rigid inner sleeve coating can be further configured to prevent corrosion of one of the outer surfaces of the shielding device caused by particulate contamination. The rigid inner sleeve coating can be a metal nitride, a metal oxide, or a silicon nitride.

[0015] The device may also include a heating device configured to adjust the temperature of one of the rigid inner sleeves. The heating device may be in direct thermal communication with the outer surface of one of the rigid inner sleeves to adjust the temperature of the rigid inner sleeve by heat conduction. Alternatively, the heating device may be configured not to be in direct thermal communication with the flexible bellows.

[0016] The first flange and the second flange can be vacuum flanges.

[0017] The device may also include an internal protective element extending above one or more of the following openings: the first flange and the second flange. The internal protective element may be made of a metal including a protective coating configured to prevent particulate contamination of the internal protective element. The distance between the internal protective element and the respective flanges may be sufficiently small to reduce the amount of particulate matter contaminating the respective flanges. The distance between the internal protective element and the respective flanges may be configured to reduce the amount of particulate matter contaminating the respective flanges, at least in part, due to particle repulsion against the surfaces of the internal protective element and the respective flanges. These particulates may include one or more of solid particles, fluid particles, and sputterings. The coating may be configured to: repel fluid particles to prevent their accumulation on the internal protective element; and prevent solid particles from adhering to the internal protective element. The protective coating may be a metal nitride.

[0018] The rigid inner sleeve and the baffle device can be configured such that the rigid inner sleeve is configured to penetrate the opening of the baffle device.

[0019] The flexible bellows can be coupled or fixed to the first flange at a first end and coupled or fixed to the second flange at a second end. The rigid inner sleeve can be directly attached to the first flange or attached to a first end of the flexible bellows fixed to the first flange.

[0020] In other general embodiments, an extreme ultraviolet (EUV) light source includes: a cavity comprising a cavity wall defining a fluid inlet; and a device held at the cavity wall. The device includes: a mechanically insulating device comprising a flexible bellows extending between a first flange and a second flange; a rigid inner sleeve; and a baffle device. The flexible bellows defines a bellows passage extending in an axial direction between openings in the first and second flanges, these openings being in fluid communication with the fluid inlet. The rigid inner sleeve is attached to or supported by the first flange and extends in the axial direction along the bellows passage. The inner sleeve has an outer diameter smaller than an inner diameter of the flexible bellows. The baffle device is at least partially fixed to or supported by the second flange and defines an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve. The baffle device is configured to achieve relative movement between the first flange and the second flange caused by the movement of the cavity wall. The relative movement includes translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0021] The implementation may include one or more of the following features. For example, the first flange may be fixed to the cavity wall, and the second flange may be fixed to a second wall of a second cavity. The EUV light source may further include a target material supply system including a droplet generator configured to generate a stream of targets. These targets include target materials that emit EUV light when in a plasma state. The EUV light source may also include a structure defining a structural passage configured to receive target material traveling along a target material path. The first flange may be fixed to a wall of the structure. The second flange may be fixed to a wall of a container configured to receive target material from the structural passage. The first flange and the second flange may be vacuum flanges, the first flange being fixed to the wall of the structure by a vacuum seal, and the second flange being fixed to the wall of the container by another vacuum seal. The EUV light source may further include a first internal protective member extending above the opening of the first flange, and a second internal protective member extending above the opening of the second flange. Each of the first and second internal protective members may be configured to: block the target material from contacting the respective vacuum seal; and prevent the target material from solidifying at the location of the vacuum seal between the respective flange and the structural wall, thereby forming an undesirable bond between the respective flange and the structural wall. The structure may be positioned at a location in the cavity opposite the droplet generator. The structural passage may be aligned with a direction of gravity, and the flow direction of the target material may be at least partially aligned with the direction of gravity.

[0022] The device can be implemented as a gravity-driven drain pipe configured to transfer or capture target material traveling within the cavity.

[0023] In other general embodiments, a device includes: a mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange; a rigid inner sleeve; and a baffle device. The flexible bellows defines a bellows passage extending in an axial direction between the openings of the first flange and the second flange. The rigid inner sleeve is attached to or supported by the first flange and extends in the axial direction along the bellows passage. The inner sleeve has an outer diameter smaller than an inner diameter of the flexible bellows. The baffle device is at least partially fixed to or supported by the second flange and defines an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve. The baffle device is configured to at least partially or substantially cover a region between the flexible bellows and the rigid inner sleeve, such that the baffle device prevents particles from entering this region.

[0024] Implementations may include one or more of the following features. For example, the baffle device may include one or more movable disks supported by a disk housing fixed to one of the second flanges, each disk defining a size large enough to accommodate an opening of the rigid inner sleeve. Each disk may have an inner diameter smaller than the inner diameter of the flexible bellows. The one or more movable disks may be configured to allow relative movement between the first flange and the second flange, including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0025] In other general embodiments, an apparatus includes: a structure comprising a structural interior configured to receive target material traveling along a path; a container comprising a volume; and a connecting device disposed between the structure and the container, configured to provide fluid communication between the structural interior and the container volume. The connecting device includes: a mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange; an inner sleeve; and a baffle device. The flexible bellows defines a bellows passage extending in an axial direction between openings of the first flange and the second flange. The first flange is fixed to a wall of the structure, and the second flange is fixed to the container. The inner sleeve is attached to or supported by the first flange and extends in the axial direction within the bellows passage. The inner sleeve has an outer diameter smaller than one of the inner diameters of the flexible bellows, and defines a sleeve passage within the bellows passage, such that the sleeve passage provides fluid communication between the interior of the structure and the container volume. The baffle device is at least partially fixed to or supported by the second flange, and defines an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve.

[0026] The implementation may include one or more of the following features. For example, the container may be in fluid communication with a nozzle system configured to supply target material to a target supply system of an EUV light source. The container may be part of a target material residue collection and discharge system of a discharge module within a cavity of an EUV light source. Simple Explanation of the Diagram

[0027] Figure 1 is a block diagram of a device that includes a mechanical insulation device; a rigid inner sleeve extending within the passage of the mechanical insulation device; and a baffle device configured to prevent particles from entering the gap between the rigid inner sleeve and the mechanical insulation device.

[0028] Figures 2A and 2B are block diagrams of the device in Figure 1, respectively showing the translational and rotational relative motion between the first flange at the first end of the mechanical insulation device and the second flange at the second end of the mechanical insulation device;

[0029] Figure 3A is a cross-sectional perspective view of an embodiment of the device in Figure 1;

[0030] Figure 3B is a perspective view of the rigid internal sleeve of the device in Figure 3A;

[0031] Figure 3C is a perspective view of an embodiment of the disc used in the shielding device of the equipment in Figure 3A;

[0032] Figure 3D is a side cross-sectional view of the device in Figure 3A;

[0033] Figure 3E is a plan view along the XY plane at plane 3E-3E of Figure 3D. This plan view includes the disk housing, the disk, and the rigid internal sleeve of the device in Figure 3D.

[0034] Figure 3F is a side cross-sectional view showing a portion of the embodiment of the device in Figure 3D.

[0035] Figure 3G is a side cross-sectional view showing another embodiment of part 3F of the device in Figure 3D;

[0036] Figure 3H is a perspective view of another embodiment of the disc used in the baffle device of the equipment in Figure 3A;

[0037] Figure 4A is a side cross-sectional view of the device in Figure 3A, showing the relative axial movement between the first flange and the second flange attached to the mechanical insulation device;

[0038] Figure 4B is a plan view along the XY plane at plane 4B-4B of Figure 4A. This plan view includes the disk housing, disk, and rigid internal sleeve of the device in Figure 4A.

[0039] Figure 5A is a side cross-sectional view of the device in Figure 3A, showing the relative movement between the first flange and the second flange attached to the mechanical insulation device. This relative movement is a translational movement in a direction perpendicular to the axial direction.

[0040] Figure 5B is a plan view along the XY plane at plane 5B-5B of Figure 5A. This plan view includes the disk housing, disk, and rigid internal sleeve of the device in Figure 5A.

[0041] Figure 6A is a side cross-sectional view of the device in Figure 3A, showing the relative movement between the first flange and the second flange attached to the mechanical insulation device. This relative movement is a rotational movement about a direction perpendicular to the axial direction.

[0042] Figure 6B is a plan view along the XY plane at plane 6B-6B of Figure 6A. This plan view includes the disk housing, disk, and rigid internal sleeve of the device in Figure 6A.

[0043] Figure 7A is a side cross-sectional view of another embodiment of the device of Figure 1, wherein the baffle device includes a plurality of disks housed in a disk housing;

[0044] Figure 7B is a plan view along the XY plane at plane 7B-7B of Figure 7A. This plan view includes the disk housing, disk, and rigid internal sleeve of the device in Figure 7A.

[0045] Figure 7C is a side cross-sectional view showing an embodiment of part 7C of the device in Figure 7A;

[0046] Figure 8A is a side cross-sectional view of another embodiment of part 3F of the device in Figure 3D, showing the movement of the rigid inner sleeve relative to a baffle device comprising a single disk in a disk housing.

[0047] Figure 8B is a side cross-sectional view of another embodiment of part 7C of the device of Figure 7A, showing the movement of the rigid inner sleeve relative to a baffle assembly comprising two disks in a disk housing;

[0048] Figure 9A is a side cross-sectional view of the device in Figure 7A, showing the relative movement between the first flange and the second flange attached to the mechanical insulation device. This relative movement is a translational movement in a direction perpendicular to the axial direction.

[0049] Figure 9B is a plan view along the XY plane at plane 9B-9B of Figure 9A. This plan view includes the disk housing, disk, and rigid internal sleeve of the device in Figure 9A.

[0050] Figure 10A is a side cross-sectional view of the device in Figure 7A, showing the relative movement between the first flange and the second flange attached to the mechanical insulation device. This relative movement is a rotational movement about a direction perpendicular to the axial direction.

[0051] Figure 10B is a plan view along the XY plane at plane 10B-10B of Figure 10A. This plan view includes the disk housing, disk, and rigid internal sleeve of the device in Figure 10A.

[0052] Figure 11A is a side cross-sectional view of another embodiment of the device of Figure 1, wherein the device includes heating equipment associated with a rigid inner sleeve and an inner protective member associated with a second flange attached to a mechanical insulating device;

[0053] Figure 11B is a plan view along the XY plane at plane 11B-11B of Figure 11A. This plan view includes the disc housing, disc, rigid internal sleeve, and internal protective components of the device in Figure 11A.

[0054] Figure 11C is a perspective view of an embodiment of the internal protective component of the device in Figure 11A;

[0055] Figure 12 is a block diagram of the equipment of Figure 1, including the structure, the container, and the connecting device between the structure and the container; and

[0056] Figure 13 is a block diagram of an extreme ultraviolet (EUV) light source, in which the container in Figure 12 is in fluid communication with the nozzle system of the target supply system configured to supply the target material. Implementation

[0057] Referring to Figures 1, 2A, and 2B, device 100 is configured as a fluid-passing device connecting a first component 105 and a second component 110. Device 100 enables relative movement between the first component 105 and the second component 110 while maintaining the connection between them and simultaneously maintaining a fluid flow path for fluid to pass through between them. The relative movement between the first component 105 and the second component 110 can be attributed to thermal expansion or contraction of one or more of the first component 105 and the second component 110, as well as vibration and positioning misalignment between them.

[0058] Device 100 provides a flexible and mechanically adjustable path for a fluid path between a first component 105 and a second component 110. Device 100 includes a mechanical insulation device 115 comprising a flexible bellows extending between a first flange 125 defining a first opening 125° and a second flange 130 defining a second opening 130°. The flexible bellows 115 defines a bellows passage 120 extending in an axial direction BA between the openings 125° and 130°. The axial direction BA is parallel to the Z-axis of the X, Y, Z coordinate system.

[0059] A first flange 125 is fixed to a first component 105, and a second flange 130 is fixed to a second component 110, allowing fluid to pass through openings 125° and 130°. The first flange 125 and the second flange 130 are extensions (such as ribs or rims) providing strength and attachment between the respective first component 105 and the second component 110 and the mechanical insulation device 115. Furthermore, the first flange 125 and the second flange 130 may be vacuum flanges, each serving to provide an airtight seal between the respective first component 105 and the second component 110 and the mechanical insulation device 115, this seal maintaining fluid flow within the fluid flow path. Therefore, to achieve a vacuum seal at each vacuum flange 125, 130, a sealing gasket may be disposed at the interface between the respective first component 105 and the second component 110 and the first flange 125 and the second flange 130. The sealing gasket may be, for example, a resilient O-ring placed in a groove.

[0060] The device 100 includes a rigid inner sleeve 135 secured to a first flange 125 by a mounting structure 136. The rigid inner sleeve 135 extends axially along a bellows passage 120 in the direction BA and defines a sleeve passage 137 within the bellows passage 120. The outer diameter OD 135 of the inner sleeve 135 is smaller than the inner diameter ID 115 of the flexible bellows 115. The rigid inner sleeve 135 acts as a shield to prevent or significantly reduce contamination of the flexible bellows 115. Specifically, the rigid inner sleeve 135 substantially blocks particles (which may be located in the fluid flowing between the first component 105 and the second component 110) from reaching the flexible bellows 115. More specifically, the rigid inner sleeve 135 retains particles traveling between the first component 105 and the second component 110 within the sleeve passage 137 (and thus keeps these particles separated from the flexible bellows 115). The rigid inner sleeve 135 also achieves the removal of such particles from the sleeve passage 137 in a manner that minimizes or reduces the disruption to the operation of the first flange 125, the second flange 130, and the flexible bellows 115.

[0061] In some embodiments, a target material that emits EUV light when in a plasma state can be used to form microparticles (such as shown in Figure 13) within an extreme ultraviolet (EUV) light source cavity. The target material can be, for example, water, tin, lithium, xenon, or any material that has an emission spectrum in the EUV range when converted to a plasma state. For example, the target material can be elemental tin, which can be used as pure tin (Sn); as tin compounds, such as SnBr₄, SnBr₂, SnH₄; as tin alloys, such as tin-gallium alloys, tin-indium alloys, tin-indium-gallium alloys, or any combination of such alloys.

[0062] During operation, and without the rigid inner sleeve 135, the flexible bellows 115 will be exposed to particles due to the fluid flow between the first component 105 and the second component 110. These particles include, for example, solid particles, fluid particles, and particle agglomerates. Contamination of the flexible bellows 115 and its attached flanges 125, 130 by these particles can adversely affect the functionality of the flexible bellows 115; the vacuum integrity of the flexible bellows 115; and the integrity of one or more vacuum seals at least partially maintained by the flexible bellows 115. Specifically, the flexible bellows 115 is made of a flexible and thin bellows material extending in the axial direction BA, and this bellows material has a geometry including corrugations or pleats (such as ridges or grooves). These corrugations or pleats are configured to fold and unfold to allow relative movement between the first flange 125 and the second flange 130. These corrugations or folds provide functionality to the flexible bellows 115; for example, the expansion and contraction of the corrugations allow for relative movement between the first component 105 and the second component 110 while maintaining the connection between them. Particles deposited within the corrugations of the flexible bellows 115 can thus impair its ability to expand and / or contract. Furthermore, particles deposited on the thin bellows material of the flexible bellows 115 can corrode the material, thereby compromising the vacuum integrity of the flexible bellows 115. This can lead to vacuum leaks in the thin bellows material of the flexible bellows 115.

[0063] As discussed above, the outer diameter OD 135 of the inner sleeve 135 is smaller than the inner diameter ID 115 of the flexible bellows 115. Furthermore, the outer diameter OD 135 of the inner sleeve 135 is small enough that the gap between the inner sleeve 135 and the flexible bellows 115 is sufficiently large to allow the necessary movement of the flexible bellows 115 and sufficient relative movement between the first flange 125 and the second flange 130. The difference (G) between the inner diameter ID 115 of the flexible bellows 115 and the outer diameter OD 135 of the inner sleeve 135 is given by G = ID 115 - OD 135. This difference G can be greater than a percentage P of the inner diameter ID 115 of the flexible bellows 115. In some embodiments, the difference G is greater than approximately 10% of the inner diameter ID 115 of the flexible bellows 115, or G > 0.1 × ID 115. In other embodiments, the difference G is greater than about 20% of the inner diameter ID 115 of the flexible bellows 115, or G > 0.2 × ID 115. In other embodiments, the difference G is greater than about 30% of the inner diameter ID 115 of the flexible bellows 115, or G > 0.3 × ID 115.

[0064] As shown in Figure 2A, the relative motion between the first flange 125 and the second flange 130 can be a translational motion along one or more directions perpendicular to the axial direction BA. Although Figure 2A shows translation along the X-axis, this translational motion can be in any direction in the XY plane. As shown in Figure 2B, the relative motion between the first flange 125 and the second flange 130 can be a rotational motion about one or more directions perpendicular to the axial direction BA. Although Figure 2B shows rotation about the Y-axis, this rotational motion can be in any direction in the XY plane.

[0065] The device 100 further includes a baffle device 140 disposed within the gap between the inner sleeve 135 and the flexible bellows 115. The baffle device 140 acts as a baffle or cover to prevent particles (such as solid particles, fluid particles, and splashes or sprayed particles) from entering the gap between the rigid inner sleeve 135 and the flexible bellows 115. Furthermore, the baffle device 140 is capable of preventing contamination while maintaining the spacing between the inner sleeve 135 and the flexible bellows 115 and not restricting the movement of the rigid inner sleeve 135.

[0066] Referring to Figure 3A, an embodiment 300 of the device 100 is shown. The device 300 includes a flexible bellows 315 extending between a first flange 325 defining a first opening 325° and a second flange 330 defining a second opening 330°. The first flange 325 can be fixed to a structure or component such as a first component 105 (FIG. 1), and the second flange 330 can be fixed to another structure or component such as a second component 110 (FIG. 1). In this way, a vacuum seal can be formed between the first flange 325 and the first component 105, and a vacuum seal can be formed between the second flange 330 and the second component 110. The flexible bellows 315 is an embodiment of the mechanical insulation device 115 (FIG. 1). The device 300 also includes a rigid inner sleeve 335 fixed to the first flange 325, and a baffle device 340 at least partially fixed or supported by the second flange 330.

[0067] A flexible bellows 315 defines a bellows passage 320 extending in the axial direction BA between a first opening 325° and a second opening 330°. The axial direction BA is parallel to the Z-axis. The flexible bellows 315 includes a first end 317, a second end 319, and a corrugated portion 316 made of bellows material and geometrically shaped to allow for the functionality (including expansion and contraction) of the flexible bellows 315. The first end 317 is fixed to a first flange 325 and connects the corrugated portion 316 of the flexible bellows 315 to the first flange 325. The second end 319 is fixed to a baffle device 340 and connects the corrugated portion 316 of the flexible bellows 315 to the baffle device 340. The corrugated portion 316 includes folds 318 configured to fold and unfold, allowing the flexible bellows 315 to generally expand and contract in the axial direction BA. The flexible bellows 315 provides for relative movement between the first flange 325 and the second flange 330, which can be caused by thermal expansion or contraction of one or more of the structures fixed to each of the flanges 325 and 330, as well as vibration and positioning misalignment between the structures fixed to each of the flanges 325 and 330. This relative movement is discussed with reference to Figures 4A to 6B.

[0068] A rigid inner sleeve 335 extends axially along the direction BA through the bellows passage 320. The rigid inner sleeve 335 defines a sleeve passage 337 within the bellows passage 320. The rigid inner sleeve 335 is secured to a first flange 325 by a mounting structure 336. The mounting structure 336 is connected to a first end 317 of the flexible bellows 315, and the first end 317 directly engages with the first flange 325. Referring further to FIG. 3B, the rigid inner sleeve 335 is cylindrically formed with a circular cross-section in the XY plane. The rigid inner sleeve 335 is made of a rigid material that does not react with fluid passing through the bellows passage 320. For example, the rigid inner sleeve 335 may be made of metals such as molybdenum, aluminum, or copper, or other suitable materials such as (but not limited to) alumina, diamond, and graphite. The rigid inner sleeve 335 may have an generally smooth inner surface 338 (which defines the sleeve passage 337).

[0069] Referring again to Figure 3A, the baffle device 340 is at least partially fixed or supported by the second flange 330. The baffle device 340 defines an axial device opening 340o that is in fluid communication with the second opening 330o. The baffle device 340 is positioned at the free end of the rigid inner sleeve 335 (closest to the end of the second flange 330) such that the free end of the rigid inner sleeve 335 extends through the axial device opening 340o.

[0070] The baffle assembly 340 includes at least one movable disk 344 and a disk housing 342 configured to hold the disk 344. The disk housing 342 includes a first side 346a and a second side 346b. The first side 346a of the baffle assembly 340 is fixed to the second end 319 of the flexible bellows 315, and the second side 346b is fixed to the second flange 330 via a mounting area 327. This fixing can be achieved by vacuum sealing. Specifically, the first side 346a can be vacuum-sealed to the second end 319 of the flexible bellows 315, and the second side 346b can be vacuum-sealed to the second flange 330.

[0071] Referring specifically to Figures 3D and 3F, the disc housing 342 is annular in shape, thus defining an axial device opening 340o through which the rigid inner sleeve 335 can pass, to avoid obstructing fluid flow through the device 300 and to allow relative movement between the first flange 325 and the second flange 330. The axial device opening 340o is defined by an inner diameter ID 342, which approximates or is the same length as the inner diameter ID 315 of the flexible bellows 315. The inner diameters ID 342 and ID 315 may be approximately the same size as the diameter of the opening 330o. The disc housing 342 has an annular radius AR 342 (Figure 3E), which is given as half the distance between the outer annular edge of the disc housing 342 (defining the outer diameter OD 342) and the inner annular edge (defining the inner diameter ID 342 of the axial opening 340o).

[0072] Referring to Figures 3C to 3F, the disk 344 has a generally flat shape along the axial direction BA when inserted into the disk housing 342. The disk 344 is held in the disk housing 342, allowing the disk 344 to move in the XY plane.

[0073] In the embodiments shown in Figures 3A to 3F, only one disk 344 is held in the disk housing 342. The outer diameter OD 344 of the disk 344 is larger than the inner diameter ID 342 of the disk housing 342, so that the disk 344 is not removed from the disk housing 342 or tilted within the disk housing, which can cause the disk 344 to be stuck and unable to move. Furthermore, in order for the disk 344 to be able to move freely in the XY plane and move far enough in the XY plane to achieve a complete range of relative movement between the first flange 325 and the second flange 330, the outer diameter OD 344 of the disk 344 should be smaller than the outer diameter OD 342 of the disk housing 342. The greater the difference between the outer diameter OD 342 of the disk housing 342 and the outer diameter OD 344 of the disk 344, the greater the range of movement of the disk 344 in the XY plane.

[0074] The disk 344 is annular in shape and thus defines a central opening 345 through which the rigid inner sleeve 335 can pass. For the rigid inner sleeve 335 to pass through the central opening 345, the diameter D 345 of the central opening 345 is larger than the outer diameter OD 335 of the rigid inner sleeve 335. The annular radius AR 344 of the disk 344 is given as half the distance between the outer annular edge 343 (defining the outer diameter OD 344) and the inner annular edge 341 (defining the diameter D 345 of the central opening 345).

[0075] Referring to Figures 3C, 3D, and 3F, the disk 344 is defined by a thickness T 344 taken along the Z-axis, which is parallel to the axial direction BA when the disk 344 and the baffle device 340 are attached within the device 300. This thickness T 344 is less than the thickness T 342 of the internal cavity 339 of the disk housing 342 taken along the Z-axis. The difference between the thickness T 342 of the internal cavity 339 of the disk housing 342 and the thickness T 344 of the disk 344 should be sufficiently large to allow the disk 344 to move freely along the XY plane within the internal cavity 339 of the disk housing 342. Conversely, the difference between the thickness T 342 of the internal cavity 339 of the disk housing 342 and the thickness T 344 of the disk 344 should be sufficiently small to at least partially constrain excessive movement of the disk 344 along the Z-axis when the disk 344 is located inside the disk housing 342. Figures 3A, 3D and 3F show a clear gap between the disk housing 342 and the disk 344 to enhance the clarity of the illustration; however, the disk 344 may be in contact with or closer to the disk housing 342, as shown in Figure 3G.

[0076] Referring to Figure 3H, in some embodiments, the disk 344 includes a radially extending slot 347 between its outer edge 343 (defining the outer diameter OD 344) and inner edge 341 (defining the central opening 345 of the disk 344). In other words, the disk 344 is cut radially from its outer edge 343 to its central opening 345, thereby forming the slot 347. The slot 347 is formed by a first radial edge 348a and a second radial edge 348b of the disk 344. The first radial edge 348a and the second radial edge 348b can be moved relative to each other in the Z-direction by bending the disk 344 to form a gap extending in the Z-direction between the first radial edge 348a and the second radial edge 348b. For example, the thickness T 344 of the disk 344 can be small enough that the disk 344 is flexible and bendable to allow the first radial edge 348a to move relative to the second radial edge 348b in the Z direction.

[0077] The slit 347 allows the disk 344 to be mounted within the internal cavity 339 of the disk housing 342. As the first radial edge 348a and the second radial edge 348b move relative to each other, a gap is formed between the first radial edge 348a and the second radial edge 348b in the Z direction. This gap allows a portion of the disk 344 including the first radial edge 348a to be mounted within the internal cavity 339 of the disk housing 342, followed by the mounting of the remaining portion of the disk 344 including the second radial edge 348b to the disk housing 342. Specifically, the first radial edge 348a can pass through the opening 330o of the second flange 330 and the axial device opening 340o to mount that portion of the disk 344 including the first radial edge 348a into the internal cavity 339 of the disk housing 342. The disk 344 can then be rotated about the axial direction BA to mount the remaining portion of the disk 344, including the second radial edge 348b, into the internal cavity 339 of the disk housing 342. In this way, the gap 347 allows the disk 344, defined by an outer diameter OD 344 larger than the inner diameter ID 342 of the disk housing 342, to be mounted within the disk housing 342.

[0078] The baffle device 340, including the disk 344 and the disk housing 342, can be made of a rigid material that is unresponsive to fluid passing through the device 300. For example, the disk 344 and the disk housing 342 can be made of a metal such as stainless steel. In an embodiment of the disk 344 that includes a slit 347, the disk 344 can be made of a flexible metal that bends back to its original shape after a force is applied to the disk 344 causing it to deform. Therefore, the disk 344 can be made of stainless steel defined by a thickness T 344 that is much smaller than the outer diameter OD 344.

[0079] Additionally, one or more of the disk 344 and disk housing 342 (of the baffle device 340) may also include a coating configured to prevent particulate contamination of the baffle device 340. For example, the coating of the baffle device 340 may be configured to repel fluid particles to prevent fluid particles from accumulating on the baffle device 340 and to prevent solid particles from adhering to the baffle device 340. The coating of the baffle device 340 may be, for example, a nitride such as a metal nitride or a metal-like nitride. The coating on the disk 344 and / or the disk housing 342 may also be used to prevent corrosion of the underlying material (which may be stainless steel) caused by contamination by particulate matter.

[0080] If the particles are formed from the target material using the cavity of the EUV light source, the shielding device 340 can be coated to be compatible with and / or repel the target material.

[0081] The rigid inner sleeve 335 may also include a coating configured to prevent particulate matter 328 from contaminating one or more of the baffle device 340 and the rigid inner sleeve 335 during operation. As discussed above, particulate matter 328 may include one or more of solid particles, fluid particles, and splashes of fluid passing through the sleeve passage 337. For example, the coating of the rigid inner sleeve 335 may be configured to repel fluid particles to prevent particle accumulation on the baffle device 340 and the rigid inner sleeve 335. The coating of the rigid inner sleeve 335 may be, for example, a metal nitride or silicon nitride. If the particulate matter is formed from the target material using the cavity of the EUV light source, the rigid inner sleeve 335 coating may be selected to be compatible with and / or repel the target material.

[0082] Specifically, and referring to Figure 3F, the coating on the rigid inner sleeve 335 can be configured to repel particles 328 (such as fluid particles) in a direction parallel to the axial direction BA or away from the baffle device 340. Specifically, as fluid propagates through the sleeve passage 337, fluid particles detaching from the coating on the smooth inner surface 338 detach in a manner that causes their propagation direction to be parallel to the axial direction BA or away from the components (disc 344 and disk housing 342) of the baffle device 340, as shown in Figure 3F. The coating on the rigid inner sleeve 335 can also be configured to prevent solid particles from adhering to the baffle device 340 and the rigid inner sleeve 335. As another example, the coating on the rigid inner sleeve 335 can be configured to prevent corrosion caused by particle contamination on the outer surfaces of the baffle device 340 (such as the surfaces of the disk 344 or disk housing 342).

[0083] In operation, the rigid inner sleeve 335 is configured to physically block particles from reaching the flexible bellows 315 by holding particles traveling between structures or components through the device 300 within the sleeve passage 337 and separating them from the flexible bellows 315. As described above, the functionality of the flexible bellows 315 allows relative movement between the first flange 325 and the second flange 330, which can be caused by thermal expansion or contraction of one or more of the structures fixed to each of the flanges 325 and 330, and by vibration and misalignment between the structures fixed to each of the flanges 325 and 330. The upper end of the rigid inner sleeve 335 fixed to the first flange 325 moves relative to the first flange 325 and relative to the second flange 330 as each of the flanges 325 and 330 moves relative to each other. In this way, as the particle 328 travels through the sleeve passage 337, and each of the flanges 325 and 330 moves relative to each other, the rigid inner sleeve 335 continues to prevent the particle 328 from reaching the flexible bellows 315.

[0084] Furthermore, the lower end of the rigid inner sleeve 335, located near the second flange 330, extends below the baffle device 340 to substantially prevent particles 328 from contaminating the baffle device 340. Additionally, the baffle device 340 prevents particles 328 from traveling through the opening defined between the lower end of the rigid inner sleeve 335 (closest to the second flange 330) and the second flange 330 to the area between the flexible bellows 315 and the rigid inner sleeve 335. Specifically, when the rigid inner sleeve 335 moves relative to the second flange 330 and the first flange 325, the disk 344 also moves relative to the lower portion of the second flange 330 and the rigid inner sleeve 335 (near the second flange 330), preventing particles 328 from traveling to the opening 320 between the flexible bellows 315 and the rigid inner sleeve 335. Therefore, both the rigid inner sleeve 335 and the baffle device 340 substantially prevent particles 328 from reaching and contaminating the flexible bellows 315 during operation. Details are provided below.

[0085] During operation, as discussed above with reference to Figures 2A and 2B, the relative movement between the first flange 325 and the second flange 330 may include linear movement along the axial direction BA, translational movement along one or more directions perpendicular to the axial direction BA, and rotational movement about one or more directions perpendicular to the axial direction BA. The baffle device 340 realizes this relative movement between the first flange 325 and the second flange 330 while preventing particles 328 from entering the area between the rigid inner sleeve 335 and the flexible bellows 315 to avoid contaminating the flexible bellows 315.

[0086] Referring to Figures 4A and 4B, the first flange 325 and the second flange 330 move relative to each other in a linear motion along the axial direction BA. For example, the first flange 325 may move towards the second flange 330 along the axial direction BA. The flexible bellows 315 expands and contracts along the axial direction BA, thereby allowing the first flange 325 and the second flange 330 to move relative to each other. As described above, the flexible bellows 315 expands and contracts by folding and unfolding the pleats 318 in the corrugated portion 316 of the flexible bellows 315. For example, the flexible bellows 315 contracts by folding the pleats 318 as the first flange 325 and the second flange 330 move towards each other along the axial direction BA, and expands by unfolding the pleats 318 as the first flange 325 and the second flange 330 move away from each other along the axial direction BA. Because the rigid inner sleeve 335 is fixed to the first flange 325, the rigid inner sleeve 335 and the first flange 325 can move relative to the second flange 330 in the Z direction. For example, the rigid inner sleeve 335 can move toward the second flange 330 in the Z direction along with the first flange 325.

[0087] The baffle device 340 enables relative linear movement of the first flange 325 and the second flange 330 along the axial direction BA. Specifically, the rigid inner sleeve 335, which moves with the first flange 325, is able to move along the axial direction BA through the central opening 345 of the disk 344. Because the outer diameter OD 335 of the rigid inner sleeve 335 is smaller than the diameter D 345 of the central opening 345 of the disk 344, the rigid inner sleeve 335 can move freely relative to the disk 344 in the Z direction. In this way, the baffle device 340 achieves relative linear movement of the first flange 325 and the second flange 330 along the axial direction BA by allowing the rigid inner sleeve 335 to move together with the relative axial movement between the first flange 325 and the second flange 330. Furthermore, as the rigid inner sleeve 335 moves relative to the second flange 330 in the axial direction BA, the disk 344 continues to block the particles 328 from traveling into the area between the rigid inner sleeve 335 and the flexible bellows 315. Therefore, the baffle device 340 prevents the particles 328 from contaminating the flexible bellows 315 as the first flange 325 and the second flange 330 move relative to each other in the axial direction BA.

[0088] Referring to Figures 5A and 5B, the first flange 325 and the second flange 330 move relative to each other during a translational movement in the X direction, perpendicular to the axial direction BA. For example, as shown in Figure 5A, the first flange 325 can move relative to the second flange 330 in the -X direction. A portion or side of the flexible bellows 315 generally expands in the axial direction BA, while another portion or side of the flexible bellows 315 contracts, thus allowing the first flange 325 and the second flange 330 to move relative to each other. For example, when the first flange 325 moves relative to the second flange 330 in the -X direction, the corrugated portion 316a of the flexible bellows 315 expands by unfolding the pleats 318, while the corrugated portion 316b of the flexible bellows 315 contracts by folding the pleats 318. Because the rigid inner sleeve 335 is fixed to the first flange 325, the rigid inner sleeve 335 and the first flange 325 can move relative to the second flange 330 in the -X direction. For example, the rigid inner sleeve 335 and the first flange 325 can move relative to the second flange 330 in the -X direction.

[0089] The baffle device 340 enables and facilitates the relative translational movement between the first flange 325 and the second flange 330 along the XY plane. Specifically, because the disk 344 can move along the X direction (and in the XY plane) within the internal cavity 339 of the disk housing 342, the rigid inner sleeve 335, which moves with the first flange 325, can also move along the X direction while remaining within the opening 345 of the disk 344. In other words, the disk 344 does not prevent or restrict the movement of the rigid inner sleeve 335 in the X direction. Therefore, as the first flange 325 and the rigid inner sleeve 335 move relative to the second flange 330 along the X direction, the disk 344 is also caused to move along the X direction by means of the movement of the rigid inner sleeve 335. In this way, the baffle device 340 achieves relative translational movement of the first flange 325 and the second flange 330 in the X direction perpendicular to the axial direction BA by allowing the rigid inner sleeve 335 to also move with the first flange 325.

[0090] Furthermore, as the rigid inner sleeve 335 moves relative to the second flange 330 in the X direction, the disk 344 continues to block the particles 328 from traveling into the area between the rigid inner sleeve 335 and the flexible bellows 315. Because the disk 344, the rigid inner sleeve 335, and the first flange 325 move relative to the second flange 330 in the -X direction, the disk 344 continues to radially traverse the gap between the rigid inner sleeve 335 and the flexible bellows 315. Therefore, the baffle device 340 prevents the particles 328 from contaminating the flexible bellows 315 as the first flange 325 and the second flange 330 translate relative to each other along the XY plane. In other embodiments, the baffle device 340 can similarly achieve relative translational movement of the first flange 325 and the second flange 330 in any direction perpendicular to the axial direction BA (such as the Y direction or a direction in the XY plane). In these examples, the baffle device 340 prevents the particles 328 from contaminating the flexible bellows 315 in the same manner as described above.

[0091] Referring to Figures 6A and 6B, the first flange 325 and the second flange 330 move relative to each other in a rotational motion about a direction perpendicular to the axial direction BA (such as the Y direction). For example, the first flange 325 can rotate relative to the second flange 330 about the Y direction. The flexible bellows 315 generally expands along the axial direction BA at the corrugated portion 316a of the flexible bellows 315 and generally contracts along the axial direction BA at the corrugated portion 316b of the flexible bellows 315, thereby allowing the first flange 325 and the second flange 330 to rotate relative to each other. For example, the flexible bellows 315 expands by unfolding pleats 318 at the portion 316a of the flexible bellows 315 and contracts by folding pleats 318 at the portion 316b of the flexible bellows 315. Because the rigid inner sleeve 335 is fixed to the first flange 325, the rigid inner sleeve 335 and the first flange 325 can rotate relative to the second flange 330 about the Y direction. For example, the rigid inner sleeve 335 can rotate about the Y direction with the first flange 325, so that the lower part of the rigid inner sleeve 335 (near the second flange 330) rotates (and also translates) relative to the second flange 330.

[0092] The baffle device 340 achieves tilting between the first flange 325 and the second flange 330, which involves relative rotational movement between the first flange 325 and the second flange 330 about a direction perpendicular to the axial direction BA (such as the Y direction in this example). Specifically, because the disk 344 can move along the XY plane within the internal cavity 339 of the disk housing 342, the lower portion of the rigid inner sleeve 335, which moves by the rotation of the first flange 325 about the Y direction, also rotates. In other words, the disk 344 does not prevent the rotation of the lower portion of the rigid inner sleeve 335. Therefore, as the first flange 325 and the rigid inner sleeve 335 rotate relative to the second flange 330 in the Y direction, the disk 344 also moves in the X direction by the movement of the lower portion of the rigid inner sleeve 335. In this way, the baffle device 340 allows the rigid inner sleeve 335 to also move with the first flange 325, thereby enabling the relative rotational movement of the first flange 325 and the second flange 330 around the Y direction, which is perpendicular to the axial direction BA.

[0093] Furthermore, as the lower portion of the rigid inner sleeve 335 moves relative to the second flange 330, the disk 344 continues to block the particles 328 from traveling into the area between the rigid inner sleeve 335 and the flexible bellows 315. Because the disk 344 moves in the X direction relative to the lower portion of the rigid inner sleeve 335, the disk 344 continues to radially traverse the gap between the rigid inner sleeve 335 and the flexible bellows 315. Therefore, the baffle device 340 prevents the particles 328 from contaminating the flexible bellows 315 when the first flange 325 and the second flange 330 rotate relative to each other about the Y direction. In other embodiments, the baffle device 340 can similarly achieve relative rotational movement of the first flange 325 and the second flange 330 about any direction perpendicular to the axial direction BA (such as about the X direction or about a direction in the XY plane). In these embodiments, the baffle device 340 prevents the particles 328 from contaminating the flexible bellows 315 in the same manner as described above.

[0094] Referring to Figures 7A and 7B, device 700 is designed similarly to device 300, except that device 700 includes a plurality of disks 744a, 744b, 744c (or stacked) 744 disposed within an internal cavity 739 of disk housing 742. Disks 744a, 744b, 744c are layered or stacked adjacent to each other along the Z-direction. Each of the disks 744a, 744b, 744c in the stack 744 is designed similarly to disk 344, in that each disk 744a, 744b, 744c includes a central opening 745a, 745b, 745c sufficiently large to accommodate a rigid inner sleeve 735. Therefore, the diameters D 745a, D 745b, D 745c of each central opening 745a, 745b, 745c are larger than the outer diameter OD 735 of the rigid inner sleeve 735.

[0095] In some embodiments, at least one of the disks (e.g., disk 744b) has an outer diameter OD 744b that is different from the outer diameters of the other disks (e.g., the outer diameters OD 744a and OD 744c of individual disks 744a and 744c). In still other embodiments, at least one disk (e.g., disk 744a) has an outer diameter OD 744a equal to the outer diameter OD 744c of another disk (e.g., disk 744c) and an inner diameter D 745a equal to the inner diameter D 745c of the other disk 744c. In these embodiments, disks 744a and 744c have the same annular radius.

[0096] The sum of the thickness T of each disk 744a, 744b, 744c along the axial direction BA is less than the length of the internal cavity 739 along the axial direction BA, so that the disks 744a, 744b, 744c fit within the internal cavity 739. Furthermore, one or more of the disks 744a, 744b, 744c may include a radially extending slot (such as slot 347 in disk 344 as described above) between the outer edge (defining the outer diameter OD) and the inner edge (defining the central opening 745a, 745b, 745c) of each disk 744a, 744b, 744c. This slot may function similarly to slot 347, allowing each disk 744a, 744b, 744c to be mounted within the internal cavity 739 of the disk housing 742.

[0097] In some embodiments, one of the disks in the disk stack 744 is a smaller disk, such as disk 744b. This means that disk 744b has an outer diameter OD 744b smaller than the sum of the inner diameter ID 742 and the annular radius AR 742 of the disk housing 742 (Figures 7B and 7C). In this case, the smaller disk 744b may be displaced from or tilted within the internal cavity 739, which may cause disk 744b to become accidentally stuck and unable to move within the internal cavity 739. Therefore, disk 744b is placed between (enclosed between) two large disks 744a and 744c, each of which has an outer diameter OD 744a and OD 744c greater than the sum of the inner diameter ID 742 of disk housing 742 and the annular radius AR 742 of disk housing 742 (Figures 7B and 7C).

[0098] Generally speaking, and referring to Figures 8A and 8B, compared to using only a single disk 344 (such as that used in device 300 and shown in a closer view in Figure 8A), using stacked or multiple disks with different inner and outer diameters (such as those shown in Figure 8B) results in improved compactness of the disk housing and also facilitates the mounting of the disk through the opening 330° of the second flange 330. Specifically, Figure 8A shows that the annular radius AR 342 of the disk housing 342 (in which a single disk 344 is placed) is substantially larger than the annular radius AR 842 of the disk housing 842 (in which two disks 844a, 844b of the stack 844 are placed). In addition, the overall length of the two disks 844a, 844b is given by their outer diameter, and this overall length is much smaller than the outer diameter OD 344 of the disk 344. Nevertheless, since the inner diameter ID 842 of the disk housing 842 is the same as the inner diameter ID 342 of the disk housing 342, it is easier to install the disks 844a and 844b into the internal cavity of the disk housing 842.

[0099] Generally, for disk stacks such as disk stack 744 or disk stack 844, the inner and outer diameters of each disk can be selected such that the disks in each stack overlap in all possible orientations of the rigid inner sleeve 735, while still covering the gap between the rigid inner sleeve 735 and the flexible bellows 715. In the most compact embodiment, all disks in the disk stack have the same annular radius, and the inner diameter of the nth disk is slightly smaller than the outer diameter of the (n-1)th disk, where n=1 indicates the disk with the smallest inner diameter slightly larger than the outer diameter of the rigid inner sleeve 735.

[0100] Referring to Figures 9A and 9B, reference device 700 illustrates the relative translational movement between the first flange 325 and the second flange 330. The baffle device 740 enables and facilitates the relative translational movement between the first flange 325 and the second flange 330 along the XY plane. Specifically, the small disk 744b surrounding the rigid inner sleeve 735 moves along the -X direction with the rigid inner sleeve 735. Furthermore, the large disks 744a and 744c also move when engaged by the rigid inner sleeve 735. Because the large disks 744a and 744c each have an outer diameter OD 744a and OD 744c that is greater than the sum of the inner diameter ID 742 and the annular radius AR 742 of the disk housing 742 (Figures 7B and 7C), the small disk 744b cannot displace from the internal cavity 739 of the baffle device 740.

[0101] Furthermore, as the rigid inner sleeve 735 moves relative to the second flange 330 in the X direction, the disk 744 continues to block the particle 328 from traveling into the area between the rigid inner sleeve 735 and the flexible bellows 715. Because the disks of the disk stack 744, the rigid inner sleeve 735, and the first flange 325 move relative to the second flange 330 in the -X direction, one or more of the disks 744a, 744b, and 744c continue to radially cross the gap between the rigid inner sleeve 735 and the flexible bellows 715. Therefore, the baffle device 740 prevents the particle 328 from contaminating the flexible bellows 715 as the first flange 325 and the second flange 330 translate relative to each other along the XY plane. In other embodiments, as discussed above, the baffle device 740 enables relative translational movement of the first flange 325 and the second flange 330 in any direction perpendicular to the axial direction BA (such as the Y direction or a direction in the XY plane). In these examples, the baffle device 740 prevents particulate matter 328 from contaminating the flexible bellows 715 in the same manner as described above.

[0102] Referring to Figures 10A and 10B, reference device 700 illustrates the relative rotational movement between a first flange 325 and a second flange 330. The first flange 325 and the second flange 330 move relative to each other in rotational movement about a direction perpendicular to the axial direction BA (such as the Y direction). The flexible bellows 715 expands and contracts as described with reference to the flexible bellows 315 in Figure 6A. Because the rigid inner sleeve 735 is fixed to the first flange 325, the rigid inner sleeve 735 and the first flange 325 rotate relative to the second flange 330 about the Y direction.

[0103] The baffle device 740 enables relative rotational movement between the first flange 325 and the second flange 330 about a direction perpendicular to the axial direction BA (such as the Y direction in this example). Specifically, the small disk 744b moves along the XY plane within the internal cavity 739 of the disk housing 742 when the rigid inner sleeve 735 rotates. Specifically, the small disk 744b surrounding the rigid inner sleeve 735 moves along the -X direction when the rigid inner sleeve 735 rotates. Furthermore, the large disks 744a and 744c also move when engaged by the rigid inner sleeve 735. Because the large disks 744a and 744c each have outer diameters OD 744a and OD 744c that are greater than the sum of the inner diameter ID 742 and the annular radius AR 742 of the disk housing 742 (Figures 7B and 7C), the small disk 744b cannot be displaced from the internal cavity 739 of the cover device 740.

[0104] Additionally, as the lower portion of the rigid inner sleeve 735 moves relative to the second flange 330, the disk stack 744 continues to block the particles 328 from traveling into the area between the rigid inner sleeve 735 and the flexible bellows 715.

[0105] Referring to Figures 11A and 11B, device 1100 is designed similarly to device 300, except that device 1100 includes a heating device 1151 and an internal protective element 1153. The heating device 1151 is configured to adjust and / or regulate the temperature of the rigid inner sleeve 335. The heating device 1151 is in direct thermal communication with the outer surface 335s of the rigid inner sleeve 335 to adjust or control the temperature of the rigid inner sleeve 335 by heat conduction. The heating device 1151 is not in direct thermal communication with the flexible bellows 315. This means that the flexible bellows 315 is substantially unaffected by the adjustment heat made by the heating device 1151. For example, the flexible bellows 315 may be positioned further away from the heating device 1151 or the flexible bellows 315 may be made of a material with reduced thermal conductivity.

[0106] Heating device 1151 may include a plurality of discrete heating elements disposed at various orientations relative to the outer surface 335s of the rigid inner sleeve 335, or may be a single heating element. By heating the outer surface 335s of the rigid inner sleeve 335, heating device 1151 also heats the sleeve passage 337, thereby heating the fluid passing through the sleeve passage 337 during operation. This allows the fluid passing through device 1100 to be transformed into a molten fluid or maintained in a molten state in which the fluid can flow. Heating is also used to melt or vaporize any particles or other materials in contact with the inner surface of the rigid inner sleeve 335, making them transportable away by fluid flow.

[0107] As described above, the rigid inner sleeve 335 is made of a rigid material that does not react with the fluid passing through the sleeve passage 337. In the example of Figure 11A, the rigid inner sleeve 335 may be made of a metal with high thermal conductivity, so that the temperature change applied by the heating device 1151 is effectively transmitted to the rigid inner sleeve 335. For example, the rigid inner sleeve 335 may be made of a metal such as molybdenum, aluminum, or copper, or other suitable materials such as alumina, diamond, or graphite. As described above, the rigid inner sleeve 335 also includes a coating configured to prevent particulate 328 from contaminating one or more of the baffle device 340 and the rigid inner sleeve 335. For example, the coating of the rigid inner sleeve 335 may be a metal nitride, a metal oxide, or silicon nitride.

[0108] The inner protective member 1153 extends axially in the direction BA through the opening 330° of the second flange 330. Referring further to FIG11C, the inner protective member 1153 defines an inner protective passage 1152 within the opening 330°. The inner protective member 1153 is secured to the second flange 330 by a mounting structure 1154. The inner protective member 1153 is cylindrically formed with a circular cross-section in the XY plane. The inner protective member 1153 may have an generally smooth inner surface 1155 (which defines the inner protective passage 1152). The inner protective member 1153 is made of a rigid material that does not react with fluid passing through the bellows passage 320. Therefore, the inner protective member 1153 may be made of a metal including a coating configured to prevent particulate 328 from contaminating the inner protective member 1153. For example, the coating may be a metal nitride. If the particles are formed from the target material using the cavity of the EUV light source, an internal protective element 1153 can be selected to be compatible with and / or repel the target material.

[0109] The distance between the outer diameter OD 1153 of the inner protective element 1153 and the inner diameter of the second flange 330 is small enough to reduce the amount of particulate 328 contaminating the second flange 330. Specifically, the distance between the outer diameter OD 1153 of the inner protective element 1153 and the inner diameter of the second flange 330 is configured to reduce the amount of particulate 328 contaminating the second flange 330, at least in part, due to the repulsion of particles from the surface of the inner protective element 1153 and the second flange 330. As described above, the particulate 328 may include solid particles and fluid particles. The coating of the inner protective element 1153 is configured to repel fluid particles to prevent fluid particles from accumulating on the inner protective element 1153 and to prevent solid particles from adhering to the inner protective element 1153.

[0110] Referring to Figure 12, in some embodiments, device 100 may be implemented as a connecting device 1200 in device 1260. Device 1260 includes a structure 1205 defining a structural interior 1263 configured to receive target material traveling along a path as a first component 105, and a container 1210 defining a fluid volume 1265 as a second component 110. The connecting device 1200 is positioned between the structure 1205 and the container 1210 and configured to provide fluid communication between the structural interior 1263 and the container volume 1265. A first flange 325 is fixed to a wall of the structure 1205, and a second flange 330 is fixed to a wall of the container 1210.

[0111] In some embodiments, container 1210 is in fluid communication with a nozzle system configured to supply target material to an EUV light source, such as within target material supply system 1375 of FIG13. In other embodiments, container 1210 is part of a target material residue collection and discharge system within a discharge module of an EUV light source cavity, such as discharge module 1364 shown in FIG13.

[0112] Device 1260 (including connection device 1200) can be implemented in an extreme ultraviolet (EUV) light source. Referring to Figure 13, an EUV light source 1370 is shown. EUV light source 1370 includes a cavity 1372 defining an interior 1373. EUV light source 1370 includes a target material supply system 1375, which includes a droplet generator 1376 configured to generate a stream of target 1377. Target 1377 includes a target material that emits EUV light when in a plasma state. The target material can be, for example, water, tin, lithium, xenon, or any material that has an emission spectrum in the EUV range when converted to a plasma state. For example, the target material can be elemental tin, which can be used as pure tin (Sn); as tin compounds, such as SnBr 4, SnBr 2, SnH 4; as tin alloys, such as tin-gallium alloys, tin-indium alloys, tin-indium-gallium alloys, or any combination of such alloys.

[0113] Target 1377 is guided toward target location 1378. One or more magnified beams 1379 are also guided to target location 1378. The interaction between the magnified beam 1379 and the target material within target 1377 (located at target location 1378) generates plasma emitting EUV light or radiation 1380. Concentrator 1382 collects EUV light 1380 and guides the collected EUV light to optical device 1384. Optical device 1384 may be a lithography apparatus, such as using any number of process steps, to form patterns on a wafer using this EUV light 1380, such process steps may be one or more of a combination of process steps such as etching, deposition, and lithography processes, which involve forming patterns of openings (such as grooves, channels, or holes) in or deposited on the wafer material using different masks.

[0114] Device 1260 is held at wall 1369 of cavity 1372. Structure 1205 of device 1260 is designed to have a structural passage 1305p configured to receive the target 1377 (or remaining target material from target 1377) traveling along the target material path Ptm. In this example, structure 1305 is positioned in cavity 1372 opposite to droplet generator 1376. Furthermore, structural passage 1305p and target material path Ptm may be aligned with the direction of gravity, such that device 1260 acts as a gravity-driven drain configured to transfer or capture target material from target 1377 traveling within cavity 1372.

[0115] For example, the rigid inner sleeve 335 may have a cross-sectional shape other than a circle; such as a polygon or an ellipse. As another example, another inner guard may be configured relative to the first flange 325 (in addition to the inner guard 1153 configured relative to the second flange 330). As another example, it is possible to configure the device 1260 at the wall of the cavity 1372 such that the first flange 325 of the device 1260 is directly fixed to the cavity wall, and the second flange 330 is fixed to the wall of the second cavity (which may be the container 1210).

[0116] Other aspects of the invention are described in the following numbered entries. 1. An apparatus comprising: A mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between openings in the first flange and the second flange; A rigid inner sleeve, attached to or supported by the first flange, and extending along the bellows passage in the axial direction, the rigid inner sleeve having an outer diameter smaller than one of the inner diameters of the flexible bellows; and A baffle device, at least partially fixed to or supported by the second flange, and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve; The baffle device is configured to achieve relative movement between the first flange and the second flange. The relative movement includes translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction. 2. The device as described in clause 1, wherein the baffle device extends into the bellows passage. 3. The device of clause 1, wherein a distance between an inner diameter of the flexible corrugated tube and the outer diameter of the rigid inner sleeve is greater than about 10% of the inner diameter of the flexible corrugated tube, greater than about 20% of the inner diameter of the flexible corrugated tube, or greater than about 30% of the inner diameter of the flexible corrugated tube. 4. The device of clause 1, wherein the baffle assembly comprises one or more disks extending in a direction not parallel to the axial direction. 5. The device as described in item 4, wherein the direction in which the one or more disks extend is perpendicular to the axial direction. 6. The device of clause 4, wherein the one or more disks comprise a plurality of disks, and at least one of the disks has an outer diameter different from the outer diameter of each of the other disks, and at least one of the disks has an inner diameter different from the inner diameter of each of the other disks. 7. The device of clause 4, wherein the one or more disks comprise a plurality of disks, and at least one of the outer diameters of the disks is equal to the outer diameter of the other disk, and at least one of the inner diameters of the disks is equal to the inner diameter of the other disk. 8. The device of clause 4, wherein each disk is restricted from moving along the axial direction and is free to move in a direction not parallel to the axial direction. 9. The device of clause 4, wherein each disk is defined by a thickness along the axial direction, which allows each disk to be mounted adjacent to the second flange. 10. The device of paragraph 4, wherein each of the one or more disks includes a slit extending from one outer diameter of the disk to one inner diameter of the disk. 11. The device of paragraph 4, wherein the shielding device further comprises a disk housing configured to hold one of the one or more disks. 12. The device of clause 11, wherein the disc housing is defined by an inner diameter equal to the inner diameter of the flexible bellows. 13. The device of clause 11, wherein at least one of the one or more disks has an outer diameter greater than the inner diameter of one of the disk housings. 14. The device of clause 11, wherein the one or more disks comprise a plurality of disks, including a small disk having an outer diameter less than the sum of an inner diameter of the disk housing and an annular radius of the disk housing, the small disk being sandwiched between two disks, each of the two disks having an outer diameter greater than the sum of the inner diameter of the disk housing and the annular radius of the disk housing. 15. The device of clause 11, wherein each disk is defined by a thickness along the axial direction, such that the one or more disks can be housed within the disk housing. 16. The device of clause 1, wherein the shielding device is configured to at least partially cover or cover an area between the flexible bellows and the rigid inner sleeve. 17. The apparatus of paragraph 16, wherein such particles include one or more of solid particles, fluid particles and splashes. 18. The device of clause 1, wherein the flexible bellows includes folds configured to fold and unfold to achieve the relative movement between the first flange and the second flange. 19. The device of paragraph 1, wherein the shielding device is made of a metal including a coating configured to prevent particulate contamination of the shielding device. 20. The equipment as described in clause 19, wherein: These particles include one or more of solid particles, fluid particles, and splashes; and The coating of the shielding device is configured to: repel fluid particles to prevent them from accumulating on the shielding device; and prevent solid particles cured on the shielding device from adhering to the shielding device. 21. The equipment of clause 20, wherein the coating of the shielding device is further configured to prevent corrosion of one of the outer surfaces of the shielding device caused by contamination by such particles. 22. The equipment of clause 19, wherein the metal is stainless steel and the shielding device is coated with a metal nitride or a metal oxide. 23. The device of clause 1, wherein the rigid inner sleeve is made of a metal. 24. The apparatus of clause 23, wherein the metal has a high thermal conductivity. 25. The equipment of clause 1, wherein the rigid inner sleeve is made of molybdenum, aluminum, copper, alumina, diamond or graphite. 26. The device of clause 23, wherein the rigid inner sleeve includes a coating configured to prevent particulate contamination of one or more of the baffle device and the rigid inner sleeve. 27. The equipment as described in clause 26, wherein: These particles include one or more of the following: solid particles, fluid particles, and splashes; and The rigid inner sleeve coating is configured to: repel fluid particles to prevent them from accumulating on the baffle device; and prevent solid particles cured on the baffle device from adhering to the baffle device. 28. The device of clause 27, wherein the rigid inner sleeve coating is configured to repel fluid particles in a direction parallel to or away from the baffle device, such that when a fluid propagates through the rigid inner sleeve, the fluid detaches from the rigid inner sleeve having a propagation direction parallel to or away from the baffle device. 29. The equipment of clause 27, wherein the rigid inner sleeve coating is further configured to prevent corrosion of one of the outer surfaces of the shielding device caused by contamination by such particles. 30. The device of clause 1, wherein the rigid inner sleeve comprises a coating of a metal nitride, a metal oxide, or a silicon nitride. 31. The equipment of clause 1, further comprising a heating device configured to adjust the temperature of one of the rigid internal sleeves. 32. The apparatus of clause 31, wherein the heating device is in direct thermal communication with one of the outer surfaces of the rigid inner sleeve to adjust the temperature of the rigid inner sleeve by means of heat conduction, and the heating device is not in direct thermal communication with the flexible bellows. 33. The device of clause 1, wherein the first flange and the second flange are vacuum flanges. 34. The device of clause 1 further includes an internal protective member extending above one or more of the following openings: the first flange and the second flange. 35. The equipment of clause 34, wherein the internal protective element is made of a metal including a protective coating configured to prevent particulate contamination of the internal protective element. 36. The equipment of clause 35, wherein the distance between the internal protective element and the respective flange is small enough to reduce the amount of particles contaminating the respective flange. 37. The device of clause 36, wherein the distance between the inner guard and the respective flange is configured to reduce the amount of particles contaminating the respective flange, at least in part, due to the repulsion of particles from the surfaces of the inner guard and the respective flange. 38. The device of clause 36, wherein the particles include solid particles and fluid particles, and the coating is configured to: repel the fluid particles to prevent the fluid particles from accumulating on the internal protective element; and prevent the solid particles from adhering to the internal protective element. 39. The equipment of clause 35, wherein the protective coating is a metal nitride. 40. The device of clause 1, wherein the rigid inner sleeve and the baffle device are configured such that the rigid inner sleeve is configured to penetrate the opening of the baffle device. 41. The device of clause 1, wherein the flexible bellows is coupled or fixed to the first flange at a first end and coupled or fixed to the second flange at a second end. 42. The device of clause 1, wherein the rigid inner sleeve is directly attached to the first flange or to a first end of one of the flexible bellows fixed to the first flange. 43. An extreme ultraviolet (EUV) light source, comprising: A cavity, comprising a cavity wall defining a fluid inlet; and A device, held at the cavity wall, the device comprising: A mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between an opening of the first flange and the second flange in fluid communication with a fluid inlet; A rigid inner sleeve, attached to or supported by the first flange, and extending along the bellows passage in the axial direction, the rigid inner sleeve having an outer diameter smaller than one of the inner diameters of the flexible bellows; and A baffle device, at least partially fixed to or supported by the second flange, and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve; The baffle device is configured to achieve relative movement between the first flange and the second flange caused by the movement of the cavity wall. The relative movement includes translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction. 44. An EUV light source as described in clause 43, wherein the first flange is fixed to the cavity wall and the second flange is fixed to a second wall of a second cavity. 45. An EUV light source as described in paragraph 43, further comprising a target material supply system including a droplet generator configured to generate a stream of targets, wherein the targets comprise a target material that emits EUV light when in a plasma state. 46. ​​The EUV light source of clause 45 further includes a structure comprising a structural passage configured to receive target material traveling along a target material path, wherein the first flange is fixed to a wall of the structure. 47. An EUV light source as described in clause 46, wherein the second flange is fixed to a wall of a container configured to receive the target material from the structural passage. 48. An EUV light source as described in clause 47, wherein the first flange and the second flange are vacuum flanges, the first flange is fixed to the wall of the structure by a vacuum seal, and the second flange is fixed to the wall of the container by another vacuum seal. 49. An EUV light source as described in clause 48, further comprising a first internal protective member extending above the opening of the first flange and a second internal protective member extending above the opening of the second flange, wherein each of the first internal protective member and the second internal protective member is configured to: prevent the target material from contacting the respective vacuum seal; and prevent the target material from solidifying at the location of the vacuum seal between the respective flange and the structural wall, and to prevent the formation of an undesirable bond between the respective flange and the structural wall. 50. An EUV light source as described in clause 46, wherein the structure is positioned at one of the locations of the cavity opposite the droplet generator. 51. An EUV light source as described in clause 46, wherein the structural path is aligned with a gravitational direction, and the flow direction of one of the target materials is at least partially aligned with the gravitational direction. 52. An EUV light source as described in clause 44, wherein the device is configured as a gravity-driven drain pipe for transferring or capturing target material traveling within the cavity. 53. An apparatus comprising: A mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between openings in the first flange and the second flange; A rigid inner sleeve, attached to or supported by the first flange, and extending along the bellows passage in the axial direction, the rigid inner sleeve having an outer diameter smaller than one of the inner diameters of the flexible bellows; and A baffle device, at least partially fixed to or supported by the second flange, and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve, wherein the baffle device is configured to at least partially cover or cover an area between the flexible bellows and the rigid inner sleeve. 54. The device of clause 53, wherein the baffle assembly comprises one or more movable disks supported by a disk housing fixed to the second flange, each disk defining an opening large enough to accommodate one opening of the rigid inner sleeve, wherein each disk has an inner diameter smaller than the inner diameter of the flexible bellows. 55. The device of clause 54, wherein the one or more movable disks are configured to enable relative movement between the first flange and the second flange, the relative movement including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction. 56. An apparatus comprising: A structure comprising an interior configured to accommodate target material traveling along a path; A container, comprising a volume; and A connecting device, situated between the structure and the container, and configured to provide fluid communication between the interior of the structure and the volume of the container, the connecting device comprising: A mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between openings of the first flange and the second flange, the first flange being fixed to a wall of the structure and the second flange being fixed to the container; An inner sleeve, attached to or supported by the first flange, and extending in the axial direction within the bellows passage, the inner sleeve having an outer diameter smaller than one inner diameter of the flexible bellows, and defining a sleeve passage within the bellows passage such that the sleeve passage provides fluid communication between the interior of the structure and the container volume; and A baffle device, which is at least partially fixed to or supported by the second flange, and defines an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner sleeve. 57. The apparatus of clause 56, wherein the container is in fluid communication with a nozzle system of a target supply system configured to supply target material to an EUV light source. 58. The apparatus of clause 56, wherein the container is part of a discharge module within a cavity of an EUV light source, comprising a target material residue collection and discharge system.

[0117] Other implementation schemes fall within the scope of the following patent applications.

[0118] 100: Equipment 105: First component 110: Second component 115: Mechanical insulation device / flexible bellows 120: Corrugated pipe passage 125: First flange 125°: First opening 130: Second flange 130°: Second opening 135: Rigid internal sleeve 136: Installation Structure 137: Casing Access 140: Baffle device 300: Equipment 315: Flexible Corrugated Pipe 316: Corrugated section 316a: Corrugated section 316b: Corrugated section 317: First end 318: Wrinkles 319: Second end 320: Bellows passage 325: First flange 325°: First opening 327: Installation Area 328: Particles 330: Second flange 330°: Second opening 335: Rigid internal sleeve 335s: Outer surface 336: Installation Structure 337: Casing Access 338: Inner surface 339: Internal cavity 340: Baffle device 340°: Axial device opening 341: Inner annular edge 342: Disc shell 343: Outer ring edge 344: Disc 345: Center Opening 346a: First side 346b: Second side 347: Gap 348a: First radial edge 348b: Second radial edge 700: Equipment 715: Flexible Corrugated Pipe 735: Rigid internal sleeve 739: Internal cavity 740: Baffle device 742: Disc shell 744: Stacking 744a: Disk 744b: Disk 744c: Disk 745a: Center opening 745b: Center Opening 745c: Center Opening 842: Disc shell 844: Stacking 844a: Disk 844b: Disk 1100: Equipment 1151: Heating equipment 1152: Internal protection access 1153: Internal protective components 1154: Installation Structure 1155: Inner surface 1200: Connecting device 1205: Structure 1210: Container 1260: Equipment 1263: Internal structure 1265: Fluid volume 1305: Structure 1305p: Structural pathway 1364: Excretion Module 1369: wall 1370: Extreme ultraviolet (EUV) light source 1372: Cavity 1373: Internal 1375: Target Material Supply System 1376: Droplet Generator 1377: Target 1378: Target Location 1379: Magnified beam 1380: Extreme ultraviolet (EUV) light or radiation 1382:Light collector 1384: Optical equipment AR 342: Circumference AR 344: Circumference BA: Axial direction D 345: Diameter D 745a: Diameter D 745b: Diameter D 745c: Diameter ID 135:Inner diameter ID 315:Inner diameter ID 342:Inner diameter OD 135: Outer Diameter OD 335: Outer Diameter OD 342: Outer Diameter OD 344: Outer Diameter OD 744a: Outer diameter OD 744b: Outer Diameter OD 744c: Outer Diameter OD 1153: Outer Diameter Ptm: Target Material Path T 342: Thickness T 344: Thickness

Claims

1. An insulating device comprising: a mechanical insulating device including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passageway extending in an axial direction between an opening of the first flange and the second flange; a rigid inner sleeve attached to or supported by the first flange and extending in the axial direction along the bellows passageway, the rigid inner sleeve having an outer diameter smaller than an inner diameter of the flexible bellows; and a shield device at least partially fixed to or supported by the second flange and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve; The baffle device includes one or more disks and a disk housing, the disk housing defining an internal cavity of one or more disks configured to hold the one or more disks and constrain them along the axial direction.

2. The device of claim 1, wherein the baffle device extends into the bellows passage.

3. The device of claim 1, wherein the one or more disks extend in a direction not parallel to the axial direction.

4. The device of claim 1, wherein the one or more disks comprise a plurality of disks, at least one of the disks has an outer diameter different from the outer diameter of each of the other disks, and at least one of the disks has an inner diameter different from the inner diameter of each of the other disks.

5. The device of claim 1, wherein the disk housing has an annular shape.

6. The device of claim 1, wherein the shielding device is made of a metal including a coating configured to prevent particulate contamination of the shielding device.

7. The device of claim 6, wherein the metal is stainless steel and the shielding device is coated with a metal nitride or a metal oxide.

8. The device of claim 1, wherein the rigid inner sleeve is made of molybdenum, aluminum, copper, alumina, diamond or graphite.

9. The device of claim 1, wherein the rigid inner sleeve comprises a coating of a metal nitride, a metal oxide, or a silicon nitride.

10. The device of claim 1, further comprising a heating device configured to adjust the temperature of one of the rigid internal sleeves.

11. The device of claim 1, further comprising an internal protective member extending above one or more of the following openings: the first flange and the second flange.

12. The device of claim 11, wherein the internal protective element is made of a metal including a protective coating configured to prevent particulate contamination of the internal protective element.

13. The device of claim 1, wherein the rigid inner sleeve and the baffle device are configured such that the rigid inner sleeve is configured to penetrate the opening of the baffle device.

14. The device of claim 1, wherein the baffle device is configured to enable relative movement between the first flange and the second flange, the relative movement including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

15. The device of claim 1, wherein the internal cavity of the disc housing extends annularly outward beyond the axial device opening.

16. An insulating device comprising: a mechanical insulating device including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between an opening of the first flange and the second flange; a rigid inner sleeve attached to or supported by the first flange and extending in the axial direction along the bellows passage, the rigid inner sleeve having an outer diameter smaller than an inner diameter of the flexible bellows; and a baffle device at least partially fixed to or supported by the second flange and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve, the baffle device including one or more disks extending in a direction not parallel to the axial direction, wherein at least one of the one or more disks has an outer diameter larger than an inner diameter of a disk housing.

17. An insulating device comprising: a mechanical insulating device including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between openings in the first flange and the second flange; a rigid inner sleeve attached to or supported by the first flange and extending in the axial direction along the bellows passage, the rigid inner sleeve having an outer diameter smaller than an inner diameter of the flexible bellows; and a baffle device at least partially fixed to or supported by the second flange and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve, the baffle device including one or more disks extending in a direction not parallel to the axial direction. The one or more disks include a plurality of disks, including a small disk having an outer diameter that is smaller than the sum of the inner diameter of one of the disk housings and the annular radius of one of the disk housings, the small disk being sandwiched between two disks, each of the two disks having an outer diameter that is larger than the sum of the inner diameter of the disk housing and the annular radius of the disk housing.

18. An extreme ultraviolet (EUV) light source comprising: a cavity including a cavity wall defining a fluid inlet; and a device held at the cavity wall, the device comprising: a mechanical insulating device including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between an opening of the first flange and the second flange in fluid communication with the fluid inlet; a rigid inner sleeve attached to or supported by the first flange and extending in the axial direction along the bellows passage, the rigid inner sleeve having an outer diameter smaller than an inner diameter of the flexible bellows; and a baffle device at least partially fixed to or supported by the second flange and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve; The baffle device includes one or more disks and a disk housing, the disk housing defining an internal cavity of one or more disks configured to hold the one or more disks and constrain them along the axial direction.

19. The EUV light source of claim 18 further includes a target material supply system comprising a droplet generator configured to produce a stream of targets, wherein the targets comprise a target material that emits EUV light when in a plasma state.

20. The EUV light source of claim 19 further includes a structure comprising a structural passage configured to receive the target material traveling along a target material path, wherein the first flange is fixed to a wall of the structure.

21. An insulating device comprising: a structure including a structural interior configured to receive target material traveling along a path; a container including a volume; and a connection means disposed between the structure and the container and configured to provide fluid communication between the structural interior and the container volume, the connection means comprising: a mechanical insulating device including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between openings of the first flange and the second flange, the first flange being fixed to a wall of the structure and the second flange being fixed to the container; An inner sleeve, attached to or supported by the first flange, and extending axially within the bellows passage, the inner sleeve having an outer diameter smaller than one inner diameter of the flexible bellows, and defining a sleeve passage within the bellows passage such that the sleeve passage provides fluid communication between the interior of the structure and the container volume; and a baffle device, at least partially fixed to or supported by the second flange, and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner sleeve, wherein: The baffle device includes one or more disks extending in a direction not parallel to the axial direction; the baffle device further includes a disk housing configured to hold one or more disks; and the outer diameter of one or more disks is larger than the inner diameter of one of the disk housings.

22. The apparatus of claim 21, wherein the container is in fluid communication with a nozzle system of a target supply system configured to supply target material to an EUV light source.

23. An insulating device comprising: a mechanical insulating device including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows passage extending in an axial direction between an opening of the first flange and the second flange; a rigid inner sleeve attached to or supported by the first flange and extending in the axial direction along the bellows passage, the rigid inner sleeve having an outer diameter smaller than an inner diameter of the flexible bellows; and a baffle device at least partially fixed to or supported by the second flange and defining an axial device opening having a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the rigid inner sleeve, the baffle device including one or more disks extending in a direction not parallel to the axial direction, the outer diameter of one or more disks being larger than an inner diameter of the flexible bellows.

24. The device of claim 23, wherein the one or more disks comprise a plurality of disks, including a small disk having an outer diameter less than the sum of an inner diameter of one of the disk housings and an annular radius of one of the disk housings, the small disk being sandwiched between two disks, each of the two disks having an outer diameter greater than the sum of the inner diameter of the disk housing and the annular radius of the disk housing.

25. The device of claim 23, wherein the one or more disks comprise a plurality of disks, at least one of the disks has an outer diameter different from that of each of the other disks, and at least one of the disks has an inner diameter different from that of each of the other disks.

26. The device of claim 23, wherein the shielding device further comprises a disk housing configured to constrain one of the one or more disks along the axial direction.

27. The device of claim 26, wherein each disk is defined by a thickness along the axial direction, such that the one or more disks can be housed within the disk housing.

28. The device of claim 23, wherein the baffle assembly is configured to enable relative movement between the first flange and the second flange, the relative movement including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

29. The device of claim 23, wherein a distance between an inner diameter of the flexible bellows and the outer diameter of the rigid inner sleeve is greater than about 10% of the inner diameter of the flexible bellows, greater than about 20% of the inner diameter of the flexible bellows, or greater than about 30% of the inner diameter of the flexible bellows.

30. The device of claim 23, wherein the direction in which the one or more disks extend is perpendicular to the axial direction.

31. The device of claim 23, wherein each disk has an annular shape defining a central opening through which the rigid sleeve passes.

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