Furnace and furance system for co-fired ceramic devices

Abstract

This application discloses a furnace and furnace system. The furnace includes a furnace cavity, a conveyor belt, and several upper infrared devices. The conveyor belt is installed inside the furnace cavity to carry and move co-fired ceramic devices through the furnace cavity. Several upper infrared devices are arranged above the conveyor belt. The furnace cavity is configured to perform either of the following two procedures: providing heating to remove binder material from the co-fired ceramic devices; or providing heating to form the co-fired ceramic devices into a monolithic sintered block structure. The furnace and furnace system of this application can be used for both binder removal and co-firing cycles, especially during the temperature rise phase, and features improved heating uniformity to increase the rate of temperature rise, the ability to project infrared light onto the ceramic devices being processed to improve temperature uniformity, and the use of a type of heating device in the furnace to simplify the furnace's heating structure.

Description

Technical Field

[0001] This case relates to furnaces, and more specifically to furnaces used in equipment for processing co-fired ceramics. Prior Technology

[0002] Co-fired ceramic devices are manufactured with a multi-layered structure. The manufacturing process begins with the production of a composite tape, which consists of ceramic particles mixed with a binder. Electrical components (such as capacitors, resistors, inductors, resonators, filters, etc.) are formed on the individual layers of the composite tape. Then, the multiple layers of the composite tape are etched and bonded together. The composite tape is flexible and can be cut into many component pieces. These component pieces are placed on a support structure. The component pieces and their support structure are co-fired in a furnace to form the co-fired ceramic device. The co-fired device manufacturing process can also be used to produce hybrid circuit boards.

[0003] Co-firing can be divided into two applications: low-temperature ceramic device (LTCC) application and high-temperature ceramic device (HCTC) application. Low temperature means sintering temperature below 1000 degrees Celsius, while high temperature is around 1600 degrees Celsius. Summary of the Invention

[0004] The first aspect of this application discloses a furnace comprising a furnace chamber, a conveyor belt, and a plurality of upper infrared devices. The conveyor belt is installed inside the furnace chamber for carrying and moving a co-fired ceramic device through the furnace chamber. The plurality of upper infrared devices are arranged above the conveyor belt. The furnace chamber is configured to perform either of the following two procedures: (1) providing heating to remove binder material from the co-fired ceramic device; (2) providing heating to form the co-fired ceramic device into a monolithic sintered block structure.

[0005] As disclosed in the first aspect above, the furnace wherein the plurality of upper infrared devices generate heat inside the furnace cavity.

[0006] The furnace disclosed in the first aspect further includes a plurality of bottom infrared devices that project infrared light. When the ceramic device moves through the furnace cavity, the plurality of bottom infrared devices project infrared light onto the co-fired ceramic device.

[0007] The furnace disclosed in the first aspect further includes a plurality of bottom coils arranged below the conveyor belt. These bottom coils generate heat inside the furnace cavity.

[0008] As disclosed in the first aspect of the furnace, the plurality of upper infrared devices are a plurality of upper infrared lamps.

[0009] As disclosed in the first aspect of the furnace, the plurality of bottom infrared devices are a plurality of bottom infrared lamps.

[0010] As disclosed in the first aspect above, the conveyor belt is configured to carry at least one support device to house the co-fired ceramic device located on the at least one support device within the furnace cavity.

[0011] As disclosed in the first aspect of the furnace, the at least one support device is made of a material that allows infrared light to pass through.

[0012] The furnace as disclosed in the first aspect above, wherein the furnace cavity includes several heating zones.

[0013] The furnace disclosed in the first aspect further includes several zone dividers that divide the furnace cavity into several heating zones.

[0014] As disclosed in the first aspect of the furnace, each of the plurality of zone dividers has an upper section and a bottom section such that a gap is formed between the upper section and the bottom section when the upper section and the bottom section are placed together. The upper section and the bottom section have small holes distributed on the two sections such that these holes allow compressed air (or gas) to move through, but separate the plurality of heating zones from each other to improve temperature uniformity among the plurality of heating zones.

[0015] As disclosed in the first aspect above, the temperature inside the furnace cavity is between 100°C and 100°C during the process of providing heating to form the co-fired ceramic device into an integral sintered block structure.

[0016] The furnace disclosed in the first aspect further includes an inlet section and an outlet section. The inlet section is located before the furnace cavity. The outlet section is located after the furnace cavity.

[0017] According to a second aspect of this case, a furnace system for processing co-fired ceramic devices is disclosed, comprising a furnace cavity, a conveyor belt, a plurality of upper infrared devices, and at least one support device. The conveyor belt is installed inside the furnace cavity to carry and move the co-fired ceramic device into the furnace cavity. The plurality of upper infrared devices are arranged above the conveyor belt. The at least one support device is used to house the co-fired ceramic device thereon within the furnace cavity. The plurality of upper infrared devices generate heat inside the furnace cavity and project infrared light onto the co-fired ceramic device as it moves through the furnace cavity.

[0018] The furnace system disclosed in the second aspect further includes a plurality of bottom infrared devices arranged below the conveyor belt. These bottom infrared devices generate heat inside the furnace cavity.

[0019] As disclosed in the second aspect above, in the furnace system, when the ceramic device moves through the furnace cavity, the plurality of bottom infrared devices project infrared light onto the co-fired ceramic device.

[0020] The furnace system disclosed in the second aspect further includes a plurality of bottom coils arranged below the conveyor belt. These bottom coils generate heat inside the furnace cavity.

[0021] As disclosed in the second aspect of the furnace system, the at least one support device is made of a material that is transparent to infrared light.

[0022] The furnace and furnace system in this case include the following advanced technical effects: 1. It can be used in both binder removal cycles and co-firing cycles; 2. Especially during the temperature rise stage, it improves heating uniformity to increase the temperature rise rate; 3. It can project infrared light onto the ceramic device during processing to improve temperature uniformity; 4. Use a type of heating device (such as an infrared lamp) in the furnace to simplify the furnace's heating structure; 5. Ventilation partitions are installed between the furnace chambers to improve the heating uniformity of each heating zone.

[0023] Due to the aforementioned advanced technological advantages, the sintering furnace in this case offers particular benefits for the processing of low-temperature ceramic devices (LTCC). Simple Explanation of the Diagram

[0024] The invention will be described more fully in the following detailed description taken in conjunction with the accompanying drawings, in which the same or similar parts are referred to by the same element symbols as follows:

[0025] Figure 1 is an exemplary block diagram of the furnace according to this case;

[0026] Figure 2 shows a perspective view of the furnace shown in Figure 1;

[0027] Figures 3A to 3C illustrate three cross-sectional views of the furnace cut along line AA in Figure 2, showing three embodiments of the furnace respectively;

[0028] Figures 4A to 4C illustrate details of the furnace cavity according to the three embodiments shown in Figures 3A to 3C, respectively;

[0029] Figures 5A and 5B are top and bottom cross-sectional views of the furnace shown in Figure 3A;

[0030] Figure 6A illustrates a tray used to hold ceramic devices in place in the furnace during binder removal or co-firing cycles.

[0031] Figures 6B and 6C illustrate the heating zone partitions in the furnace cavity;

[0032] Figures 7A and 7B illustrate the heating curves during the binder removal cycle and the heating curves during the co-firing cycle, respectively.

[0033] Figure 8 illustrates several support devices (such as trays) placed in the furnace cavity shown in Figure 4A;

[0034] Figure 9 illustrates the block diagram of the controller shown in Figure 1;

[0035] Figure 10 illustrates a flowchart for operating the furnace in this case. Implementation

[0036] Figure 1 is an exemplary block diagram of the furnace 100 according to this invention. As shown in Figure 1, the furnace 100 includes a furnace shell 102, a furnace inlet 101 (i.e., the entry section), and a furnace outlet 103 (i.e., the outlet section). The furnace inlet 101 is connected to the inlet opening 122 of the furnace shell 102, and the furnace outlet 103 is connected to the outlet opening 124 of the furnace shell 102. Three exhaust pipes 116.1, 116.2, and 116.3 are provided on the upper wall 144 of the furnace shell 102, and three exhaust openings 117.1, 117.2, and 117.3 are respectively provided at the top of the three exhaust pipes 116.1, 116.2, and 116.3. Two exhaust openings 119.1 and 119.2 are also provided on the upper wall 144 of the furnace shell 102. In Figure 1, the furnace 100 has a shell bottom wall 145.

[0037] In Figure 1, the furnace shell 102 houses the furnace cavity 142, the pipe assembly 108, and the air gauge 104. The furnace cavity 142 houses a heating source 152 and heating sensors 154, which provide heat to several heating zones within the furnace cavity 142 (shown in Figures 4A to 4C). These heating sensors 154 are used to measure the current temperature in these heating zones. Exhaust openings 117.1, 117.2, and 117.3 are used to release used air (or gas) from the furnace cavity 142, and exhaust openings 119.1 and 119.2 are used to release air from the furnace shell 102.

[0038] Air gauge 104 is connected to an external air source 106 and a controller 112. A heating source 152 is connected to the controller 112, allowing the controller 112 to control the heating source 152 to set appropriate heating profiles in several heating zones for co-firing. Based on temperature feedback from the heating sensor 154, the controller 112 adjusts the temperature in several heating zones according to the appropriate heating profiles. The air source 106 supplies circulating air (or circulating gas) (e.g., compressed air) to the furnace chamber 142 via the air gauge 104 and the pipe assembly 108. Under the control of the controller 112, the air gauge 104 regulates the amount and velocity of the compressed air passing through the pipe assembly 108. The compressed air from the air source 106 enters the furnace chamber 142 via the pipe assembly 108. The compressed air enhances the temperature uniformity in the furnace chamber 142, and the amount and velocity of the compressed air are determined by parameters of the ceramic device to be processed (e.g., the quality and thickness of the ceramic device).

[0039] In this case, by appropriately selecting the heating device for the furnace cavity 142 and designing the structure for the furnace 100, the furnace 100 can be used for both binder removal cycle (or process) and co-firing sintering cycle (or process). This is because the processing time in the binder removal cycle can vary considerably relative to the processing time in the co-firing sintering cycle. By being able to be used for both binder removal and co-firing sintering cycles, the furnace 100 of this case can operate more efficiently than existing furnaces.

[0040] In the binder removal cycle, controller 112 first sets the heating source 152 according to a pre-designed heating profile suitable for removing the binder material from the green ceramic apparatus to be processed. The green ceramic apparatus is fed into the inlet opening 122 of the furnace chamber 142 via furnace inlet 101 and is carried and moved through the furnace chamber 142 to the termination opening 124 of the furnace chamber 142. After the green ceramic apparatus has moved through the furnace chamber 142, the binder material is removed from the green ceramic apparatus, making them ready for processing in subsequent co-firing sintering cycles. At this point, furnace outlet 103 removes these binder-free ceramic apparatuses from the furnace chamber 142.

[0041] In the co-firing cycle, controller 112 first sets the heating source 152 according to a pre-designed heating profile suitable for co-firing binder-free ceramic devices. The binder-free ceramic devices are fed into the inlet opening 122 of the furnace chamber 142 via furnace inlet 101 and are carried and moved through the furnace chamber 142 until they reach the termination opening 124. After the binder-free ceramic devices have moved through the furnace chamber 142, they become the final co-fired ceramic devices. At this point, furnace outlet 103 removes the final co-fired ceramic devices from the furnace chamber 142.

[0042] Figure 2 illustrates a perspective view of the furnace 100 shown in Figure 1. As shown in Figure 2, in addition to all other components shown in Figure 1, the furnace housing 102 also includes a front housing wall 202. In Figure 2, a controller 112 is mounted on the front housing wall 202 and includes a screen 204 and a keyboard 206. The furnace housing 102 also includes a bottom housing wall and a rear housing wall, which are not shown in Figure 2.

[0043] Figures 3A to 3C illustrate three cross-sectional views of furnace 100 cut along line AA in Figure 2, respectively illustrating three embodiments of furnace 100.

[0044] As shown in Figures 3A to 3C, the furnace cavity 142 has an upper wall 302 and a bottom wall 304, wherein a heating space 308 is formed between the upper wall 302 and the bottom wall 304. The furnace cavity 142 has an inlet opening 122 and an outlet opening 124. A conveyor belt 306 circulates through and around the furnace cavity 142 to carry and move ceramic devices from the inlet opening 122 to the outlet opening 124. The conveyor belt 306 in the furnace cavity 142 divides the heating space 308 into an upper heating space 308.1 and a bottom heating space 308.2. Three fans 309.1, 309.2, and 309.3 are installed inside three exhaust pipes 116.1, 116.2, and 116.3, respectively, and are connected to the heating space 308. An air source 106 delivers compressed air to the furnace cavity 142 via a pipe assembly 108. Fans 309.1, 309.2, and 309.3 drive compressed air (or compressed gas) to circulate the compressed air within the furnace cavity 142 and drive the compressed air out of the furnace cavity 142 through three exhaust pipes 116.1, 116.2, and 116.3. Air circulation can improve the temperature uniformity within the heating space 308.

[0045] In Figures 3A to 3C, a main wheel 318 driven by a motor (as shown in Figure 9) drives a conveyor belt 306. As the conveyor belt 306 is driven by the motor and moves through and around the furnace inlet 101, heating space 308, and furnace outlet 103, six support wheels 321, 322, 323, 324, 325, and 326 support the conveyor belt 306. A controller 112, as shown in Figure 9, controls a motor 962.

[0046] According to the first embodiment shown in FIG3A, the upper infrared device 312 is installed in the upper heating space 308, and the lower infrared device 313 is installed in the lower heating space 308.2. More details of the upper infrared device 312 and the lower infrared device 313 will be described below with reference to FIG4A.

[0047] As shown in Figure 3B, the structure of the second embodiment is similar to that shown in Figure 3A. In Figure 3B, as in the structure of Figure 3A, the upper infrared device 312 is installed in the upper heating space 308.1. However, in Figure 3B, the bottom heating device is the bottom coil device 317 installed in the bottom heating space 308.2. More details of the upper infrared device and the lower coil device will be described below with reference to Figure 4B.

[0048] As shown in Figure 3C, the structure of the third embodiment is similar to that shown in Figure 3A. In Figure 3C, as in the structure of Figure 3A, the upper infrared device 312 is installed in the upper heating space 308.1. However, in Figure 3C, no heating device is provided in the bottom heating space 308.2. More details of the upper infrared device will be described below with reference to Figure 4C.

[0049] Figures 4A to 4B illustrate details of the furnace cavity 142 according to the three embodiments shown in Figures 3A to 3C.

[0050] As shown in Figure 4A, the first embodiment of the furnace cavity 142 has nine heating zones 402.1, 402.2, 402.3, 402.4, ..., 402.9 and eight zone separators 411, 412, ..., 418. The zone separators can prevent mutual thermal interference among the nine heating zones during the heating process, thus better maintaining the temperature uniformity of each heating zone among the nine heating zones. In each of the nine heating zones, the upper infrared device 312 includes four sets of upper infrared lamps 411.1, 411.2, 411.3, 411.4; 412.1, 412.2, 412.3, 412.4; ... or 419.1, 419.2, 419.3, 419.4 installed above the conveyor belt 306, and the lower infrared device 313 includes four sets of lower infrared lamps 421.1, 421.2, 421.3, 421.4; 422.1, 422.2, 422.3, 422.4; ... or 429.1, 429.2, 429.3, 429.4 installed below the conveyor belt 306. Five heating zones 402.1, 402.2, 402.3, 402.4, and 402.9 have approximately the same zone length (e.g., 1100 mm), and four heating zones 402.5, 402.6, 402.7, and 402.8 have approximately the same zone length (e.g., 860 mm). Because the zone lengths of the four heating zones 402.5, 402.6, 402.7, and 402.8 are shorter than the zone lengths of the five heating zones 402.1, 402.2, 402.3, 402.4, and 402.9, the shorter heating zones can provide more concentrated heat compared to the five longer heating zones, given the same heat source. Each tube in the tube element 108 is connected to each of the nine heating zones via the upper cavity wall 302 and the bottom cavity wall 304.

[0051] As shown in Figure 4B, the second embodiment of the furnace cavity 142 has a structure similar to the first embodiment shown in Figure 4A. In Figure 4B, as shown in the structure in Figure 4A, in each of the nine heating zones, the upper infrared device 312 includes four sets of upper infrared lamps 411.1, 411.2, 411.3, 411.4; 412.1, 412.2, 412.3, 412.4; ..., or 419.1, 419.2, 419.3, 419.4 mounted above the conveyor belt 306. However, in each of the nine heating zones, the bottom coil device 317 includes four sets of coil devices (e.g., coil wires) 431.1, 431.2, 431.3, 431.4; 432.1, 432.2, 432.3, 432.4; ..., or 439.1, 439.2, 439.3, 439.4, mounted below the conveyor belt 306.

[0052] As shown in Figure 4C, the third embodiment of the furnace cavity 142 has a structure similar to the first embodiment shown in Figure 4A. In Figure 4C, as shown in Figure 4A, the upper infrared device 312 includes four sets of upper infrared lamps 411.1, 411.2, 411.3, 411.4; 412.1, 412.2, 412.3, 412.4; ..., or 419.1, 419.2, 419.3, 419.4, mounted above the conveyor belt 306. However, no heating device is installed in the bottom heating space 308.2 below the conveyor belt 306.

[0053] Figures 5A and 5B are top and bottom cross-sectional views of the furnace 100 shown in Figure 3A, illustrating four sets of upper infrared lamps 411.1, 411.2, 411.3, 411.4; 412.1, 412.2, 412.3, 412.4; ..., or 419.1, 419.2, 419.3, 419.4 and four sets of bottom infrared lamps 421.1, 421.2, 421.3, 421.4; 422.1, 422.2, 422.3, 422.4; ..., or 429.1, 429.2, 429.3, 429.4 in the furnace cavity 142.

[0054] As shown in Figure 5A, the four sets of upper infrared lamps 411.1, 411.2, 411.3, 411.4; 412.1, 412.2, 412.3, 412.4; ..., or 419.1, 419.2, 419.3, 419.4 are infrared lamps installed on the upper wall 302 of the furnace cavity 142 along the width direction in the heating space 308. As shown in Figure 5B, the four sets of bottom infrared lamps 421.1, 421.2, 421.3, 421.4; 422.1, 422.2, 422.3, 422.4; ..., or 429.1, 429.2, 429.3, 429.4 are infrared lamps installed on the bottom wall 304 of the furnace cavity 308 along the width direction in the heating space 308.

[0055] It should be understood that those skilled in the art can install the four sets of upper infrared lights 411.1, 411.2, 411.3, 411.4; 412.1, 412.2, 412.3, 412.4; ..., or 419.1, 419.2, 419.3, 419.4 shown in Figures 4B to 4C according to the structure shown in Figure 5A.

[0056] Figure 6A illustrates tray 602, which is used to hold ceramic devices to be processed in furnace 100 during binder removal cycles or co-firing cycles. Co-fired ceramic devices are typically small in size. For example, three specific co-fired ceramic devices have lengths, widths, and heights of 1.85 mm x 0.9 mm x 0.4 mm, 1.97 mm x 0.96 mm x 0.70 mm, and 1.88 mm x 0.98 mm x 0.7 mm, respectively. As shown in Figure 6A, tray 602 has a tray bottom 604 and four tray walls 606.1, 606.2, 606.3, and 606.4 extending upward from the four edges of the tray bottom.

[0057] Therefore, as the ceramic devices move through the furnace chamber 142, they need to be held in a support device (e.g., a tray), which may have several compartments for holding (or carrying) many individual ceramic devices. As shown in Figure 6A, the tray 602 includes a bottom 604 and four walls extending from its four edges. The trays can be stacked in several layers so that a large number of ceramic devices can be processed in a single cycle. The support device can be of other types, such as a shelf.

[0058] Through observation and analysis, the inventors realized that even with effective air circulation within the furnace chamber, existing furnaces may struggle to evenly distribute heat onto the ceramic device during processing (especially as the temperature rises), thus preventing the heat from uniformly affecting the ceramic device during processing. Therefore, existing furnaces may need to slow down the heating phase and may require holding the ceramic device in the furnace for a longer period, resulting in the ceramic device remaining in the furnace chamber for an extended time. Furthermore, due to the influence of the support device (such as tray 602), existing furnaces may also struggle to evenly distribute heat onto the ceramic device during processing.

[0059] In contrast, through experiments and simulations, even under the influence of the support device in furnace cavity 142, the infrared device used in this invention can provide improved heating uniformity for the ceramic device being processed, especially during the heating phase, where the infrared device can still provide improved heating consistency. Therefore, compared with existing furnaces used for producing co-fired ceramic devices, the furnace 100 in this invention has a faster production cycle.

[0060] Figure 6B illustrates a cross-sectional view along line BB in Figure 2, showing one of the eight zone dividers 411, 412, ..., 418 in furnace cavity 142. Figure 6C illustrates the structure of the divider in detail.

[0061] As shown in Figure 6B, furnace 100 has two conveyor channels, and each conveyor channel has two zone separators D1 and D2. At the midpoint of each of D1 and D2, there is a gap G1 or G2 to allow conveyor belt 306 and tray 602 to pass through.

[0062] As shown in Figure 6C, each of the two zone separators D1 and D2 has an upper section 614 and a bottom section 616. A cavity 628 is present at the bottom edge of the upper section 614 such that when the upper section 614 and the bottom section 616 are placed together, a gap G1 or G2, as shown in Figure 6B, is formed between them. Also as shown in Figure 6C, the upper section 614 and the bottom section 616 have substantially uniformly distributed small holes (e.g., shown as substantially uniformly distributed black dots in Figure 6C) on both sections, such that these holes allow compressed air to move through the nine heating zones while separating them from each other, reducing the influence of temperature variations between the heating zones and improving temperature uniformity among the nine heating zones.

[0063] Figures 7A and 7B illustrate the heating curves during the binder removal cycle and the co-firing sintering cycle, respectively.

[0064] As shown in Figure 7A, in the binder removal cycle, the vertical axis represents the temperature arrangement from 0 to 400 degrees Celsius; the top axis represents the heating zones (#1, #2, ..., #9); and the bottom axis represents the total time interval for a batch of ceramic devices to move through all nine heating zones. As shown in Figure 7A, due to the improved heating uniformity, the binder removal cycle can be completed in furnace 100 within 480 minutes.

[0065] Similarly, as shown in Figure 7B, the vertical axis represents the temperature arrangement from 0 to 900 degrees Celsius; the top axis represents the heating zones (#1, #2, ..., #9); and the bottom axis represents the total time interval for a batch of ceramic devices to move through all nine heating zones. As shown in Figure 7A, due to the improved heating uniformity, the co-firing cycle can be completed in furnace 100 within 480 minutes.

[0066] Figure 8 illustrates several support devices (such as trays 602) placed within the furnace cavity 142 shown in Figure 4A. These support devices (such as trays 602) form a furnace system with the furnace. As shown in Figure 8, during binder removal cycles or co-firing cycles, the ceramic device is held in trays 602 and moves through nine heating zones. Infrared heating devices (such as infrared lamps) provide heat to heat the environment of the furnace cavity 142. Simultaneously, the upper infrared heating device projects infrared light onto the upper surface of the ceramic device. Because the ceramic device is heated by both the heat in the furnace environment and the infrared light projected onto the upper surface of the ceramic device, heating uniformity is improved, especially as the heating temperature increases. Furthermore, if the tray is made of a material that allows infrared light to pass through (such as quartz), the bottom infrared device can also project infrared light onto the bottom surface of the ceramic device, thus further improving the heating uniformity inside the furnace cavity 142.

[0067] Figure 9 illustrates a block diagram of the controller 112 shown in Figure 1. As shown in Figure 9, the controller 112 includes a bus 902. A processor 903, a memory 904, a mass storage device 905, an input interface 906, and an output interface 907 are connected to the bus 902. The processor 903 can read programs (or instructions) from the memory 904 or the mass storage device 905 and execute the programs (or instructions) to perform control functions on the furnace 100; the processor 903 can also write data or instructions to the memory 904 or the mass storage device 905. The memory 904 and the mass storage device 905 can store programs (instructions) or data. Typically, the memory 904 has a faster access speed than the mass storage device 905, while the mass storage device has a larger memory size than the memory 904. By executing instructions in memory 904, the processor can control memory 904, large storage device 905, input interface 906, and output interface 907.

[0068] Input interface 906 receives input from external devices (such as keyboard 206, heat sensor 154) and converts the input received from the external devices into signals that can be recognized by processor 903. In FIG9, input interface 906 is connected to heat sensor 154 via connection 921 and to keyboard 206 via connection 922.

[0069] The output interface receives control signals from the processor 903 and converts the control signals into outputs suitable for driving external devices (such as the screen 204, the heating source 152, and the motor 962 for driving the main wheel 318 in Figures 3A to 3C).

[0070] During operation, when a converted input is received from the keyboard 206, the processor 903 performs the required function based on the input from the keyboard 206; when a converted input is received from the heating sensor 154, the processor 903 controls the heating device in the heating source 152 to make the heating area in the furnace cavity 142 at a suitable temperature.

[0071] Similarly, during operation, when a control signal is received from the processor 903, the output interface 907 converts the control signal into an output and uses the converted output to switch in the air gauge 104, to control / adjust the temperature of the heating source 152, to display user information on the screen 204, and to control the rotation speed of the main wheel 318 in the motor 962.

[0072] Figure 10 illustrates a flowchart 1000 for operating the furnace 100 in this case.

[0073] Before operating the furnace 100, the user inputs command parameters into the controller 112 via the keyboard 206 and the screen 204.

[0074] In step 1004, based on the instruction parameters, the controller 112 determines whether the operation is in the binder removal cycle or the co-firing sintering cycle.

[0075] If the operation is in an adhesive removal cycle, the operation proceeds to step 1005 to set a heating profile suitable for adhesive removal, and then the operation proceeds to step 1008.

[0076] If the operation is in a co-firing sintering cycle, the operation proceeds to step 1006 to set a heating profile suitable for the co-firing sintering cycle, and then the operation proceeds to step 1008.

[0077] In step 1008, the controller 112 starts the heating device shown in Figures 3A to 3B according to the input of the heating curve.

[0078] In step 1010, the controller 112 starts the conveying device shown in Figures 3A to 3B according to the input of the heating curve.

[0079] In step 1012, the controller 112 activates the air meter 104 as shown in Figure 1 based on the input of the heating curve.

[0080] In step 1014, after the ceramic device to be processed is placed on the support device of the tray 602, such as in FIG. 6A, the controller 112 controls the loading of the support device into the furnace cavity 142 through the furnace inlet 101 as shown in FIG. 1.

[0081] In step 1016, by controlling motor 962, controller 112 controls the start and stop of rotation and the rotation speed of conveyor belt 306 as shown in Figures 3A to 3C, so that the ceramic device moves through the nine heating zones shown in Figures 3A to 3C.

[0082] In step 1018, when needed, the controller 112 adjusts the heat generated by the heating device shown in Figures 3A to 3C according to the input of the heating curve based on feedback from the heating sensor 154 shown in Figure 1.

[0083] In step 1020, after the binder removal cycle or co-firing cycle is completed, the controller 112 controls the rotation of the conveyor belt 306 to output the ceramic device via the furnace outlet 103 as shown in FIG1.

[0084] In step 1022, controller 112 determines whether the operation needs to continue.

[0085] If the operation does not need to continue, the operation proceeds to step 1022 to end the operation.

[0086] If the operation needs to continue, the operation proceeds to step 1004 to begin a new processing loop.

[0087] The flowchart program shown in Figure 10 can be stored in memory 904 in Figure 9. The controller 112 controls the operation shown in Figure 10 by executing the program stored in memory 904 in Figure 9.

[0088] The embodiments of this case include the following advantageous technical effects: 1. It can be used in both binder removal cycles and co-firing cycles; 2. Especially during the temperature rise stage, it improves heating uniformity to increase the temperature rise rate; 3. It can project infrared light onto the ceramic device during processing to improve temperature uniformity; 4. Use a type of heating device (such as an infrared lamp) in the furnace to simplify the furnace's heating structure; 5. Ventilation partitions are installed between the furnace chambers to improve the heating uniformity of each heating zone.

[0089] Due to the aforementioned advanced technological advantages, the sintering furnace in this case offers particular benefits for the processing of low-temperature ceramic devices (LTCC).

[0090] Although this application has been described with reference to examples of the embodiments outlined above, various alternatives, modifications, variations, improvements, and / or substantially equivalents, whether known or currently or soon to be foreseen, will be apparent to those skilled in the art. Furthermore, the technical effects and / or technical problems described herein are exemplary and not limiting; therefore, the disclosures herein may be used to solve other technical problems and have other technical effects and / or solve other technical problems. Thus, the examples of embodiments of this application as stated above are intended to be illustrative and not limiting. Various changes can be made without departing from the spirit or scope of this application. Therefore, this application is intended to include all known or previously developed alternatives, modifications, variations, improvements, and / or substantially equivalents.

[0091] 100: Furnace 101: Furnace entrance 102: Furnace shell 103: Furnace outlet 104: Air meter 106: External air source 108: Pipe assembly 112: Controller 122: Entrance opening 124: Termination of opening 116.1: Exhaust pipe 116.2: Exhaust pipe 116.3: Exhaust pipe 117.1: Exhaust opening 117.2: Exhaust opening 117.3: Exhaust opening 119.1: Exhaust opening 119.2: Exhaust opening 142: Furnace cavity 144:Upper wall 145: Bottom wall of the shell 152: Heating source 154: Heating Sensor 202: Front wall of the shell 204: Screen 206: Keyboard 302: Upper wall of cavity 304: Cavity bottom wall 306: Conveyor Belt 308: Heating Space 308.1: Upper heating space 308.2: Bottom heating space 309.1: Fan 309.2: Fan 309.3: Fan 312: Upper infrared device 313: Bottom infrared device 317: Bottom coil assembly 318: Main Wheel 321: Support wheel 322: Support wheel 323: Support wheel 324: Support wheel 325: Support wheel 326: Support wheel 402.1: Heating Area 402.2: Heating Zone 402.3: Heating Area 402.4: Heating Area 402.5: Heating Area 402.6: Heating Area 402.7: Heating Area 402.8: Heating Area 402.9: Heating Area 411: Area divider 411.1: Upper infrared light 411.2: Upper infrared light 411.3: Upper infrared light 411.4: Upper infrared light 412: Area separator 412.1: Upper infrared light 412.2: Upper infrared light 412.3: Upper infrared light 412.4: Upper infrared light 413: Area divider 414: Area divider 415: Area divider 416: Area divider 417: Area divider 418: Area divider 419.1: Upper infrared light 419.2: Upper infrared light 419.3: Upper infrared light 419.4: Upper infrared light 421.1: Bottom Infrared Light 421.2: Bottom infrared light 421.3: Bottom infrared light 421.4: Bottom infrared light 422.1: Bottom Infrared Light 422.2: Bottom infrared light 422.3: Bottom infrared light 422.4: Bottom infrared light 429.1: Bottom infrared light 429.2: Bottom infrared light 429.3: Bottom infrared light 429.4: Bottom infrared light 431.1: Coil assembly 431.2: Coil assembly 431.3: Coil assembly 431.4: Coil assembly 432.1: Coil assembly 432.2: Coil assembly 432.3: Coil assembly 432.4: Coil assembly 439.1: Coil assembly 439.2: Coil assembly 439.3: Coil assembly 439.4: Coil assembly 602: Pallet 604: Pallet bottom 606.1: Pallet wall 606.2: Pallet wall 606.3: Pallet wall 606.4: Pallet wall 614: Upper Section 616: Bottom Section 628: Cavity 902: Busbar 903: Processor 904: Memory 905: Large storage area device 906: Input Interface 907: Output Interface 921: Connection 922: Connection 962: Motor 1000: Flowchart 1004: Steps 1005: Steps 1006: Steps 1008: Steps 1010: Steps 1012: Steps 1014: Steps 1016: Steps 1018: Steps 1020: Steps 1022: Steps D1: Area separator D2: Area separator G1: Gap G2: Gap

Claims

1. A furnace, comprising: A furnace cavity (142); a conveyor belt (306) installed inside the furnace cavity (142) for carrying and moving the co-fired ceramic apparatus through the furnace cavity (142); a plurality of upper infrared devices arranged above the conveyor belt (306); and a plurality of zone dividers dividing the furnace cavity into a plurality of heating zones; wherein each of the plurality of zone dividers has an upper section (614) and a bottom section (616) such that when the upper section (614) and the bottom section (616) are placed together, a gap is formed between the upper section (614) and the bottom section (616); wherein the upper section (614) and the bottom section (616) have small holes distributed on the two sections such that these holes allow compressed air to move through, but separate the plurality of heating zones from each other, thereby improving the temperature uniformity between the plurality of heating zones; The furnace chamber is configured to perform either of the following two procedures: (1) providing heating to remove binder material from the co-fired ceramic device; or (2) providing heating to form the co-fired ceramic device into an integral sintered block structure.

2. The furnace as described in claim 1, wherein: The several upper infrared devices generate heat inside the furnace cavity.

3. The furnace as described in claim 2, further comprising: Several bottom infrared devices, which project infrared light; When the co-fired ceramic device moves through the furnace cavity, the several bottom infrared devices project infrared light onto the co-fired ceramic device.

4. The furnace as described in claim 1, further comprising: Several bottom coils are arranged below the conveyor belt; The several bottom coils thereon generate heat inside the furnace cavity.

5. The furnace as described in claim 3, wherein: The aforementioned upper infrared devices are several upper infrared lamps.

6. The furnace as described in claim 5, wherein: The aforementioned bottom infrared devices are several bottom infrared lamps.

7. The furnace as described in claim 1, wherein: The conveyor belt is configured to carry at least one support device to house the co-fired ceramic device located on the at least one support device within the furnace cavity.

8. The furnace as described in claim 7, wherein: The at least one support device is made of a material that allows infrared light to pass through.

9. The furnace as described in claim 2, wherein: In the process of providing heating to form the co-fired ceramic device into an integral sintered block structure, the temperature inside the furnace cavity is between 0 degrees Celsius and 900 degrees Celsius.

10. The furnace as described in claim 4, further comprising: An entry section is located before the furnace cavity; and the outlet section, which is located after the furnace cavity.

11. A furnace system for processing co-fired ceramics, wherein the furnace system comprises: Furnace cavity; A conveyor belt, installed inside the furnace cavity, is used to carry and move the co-fired ceramic device into the furnace cavity; A plurality of upper infrared devices are arranged above the conveyor belt; at least one support device is provided for housing the co-fired ceramic device thereon within the furnace cavity; and a plurality of zone dividers divide the furnace cavity into a plurality of heating zones; wherein each of the plurality of zone dividers has an upper section (614) and a bottom section (616) such that when the upper section (614) and the bottom section (616) are placed together, a gap is formed between the upper section (614) and the bottom section (616); wherein the upper section (614) and the bottom section (616) have small holes distributed on the two sections such that these holes allow compressed air to move through but separate the plurality of heating zones from each other to improve temperature uniformity between the plurality of heating zones; The plurality of upper infrared devices generate heat inside the furnace cavity and project infrared light onto the co-fired ceramic device as it moves through the furnace cavity.

12. The furnace system as described in claim 11, further comprising: Several bottom infrared devices are arranged below the conveyor belt; The aforementioned bottom infrared devices generate heat inside the furnace cavity.

13. The furnace system as described in claim 12, wherein: As the ceramic device moves through the furnace cavity, the plurality of bottom infrared devices project infrared light onto the co-fired ceramic device.

14. The furnace system as described in claim 13, further comprising: Several bottom coils are arranged below the conveyor belt; The several bottom coils thereon generate heat inside the furnace cavity.

15. The furnace system as described in claim 11, wherein: The at least one support device is made of a material that is transparent to infrared light.

Images