Corona discharge treatment apparatus, corona discharge treatment method, and thin film manufacturing system and thin film manufacturing method

Abstract

In the corona discharge treatment device, the bearing supporting the rod integrally formed with the roller is used to suppress electrolytic corrosion. The corona discharge treatment device 6, which treats the surface of the thin film 9 by causing corona discharge on the surface of the thin film 9, comprises: a conductive roller 61 that is rotatable with a shaft 61R as its rotation axis; a conductive rod 65 integrally formed with the roller 61 and rotatable with a shaft 61R as its rotation axis; a bearing 66 that supports the rod 65 in a rotatable state; an electrode 62 that is separate from the roller 61 and positioned opposite the roller 61; a high-frequency power supply 63 connected to the electrode 62 that causes corona discharge between the electrode 62 and the roller 61; and an AC / DC converter 73 that converts alternating current into direct current based on the charge generated on the roller 61 by the corona discharge between the electrode 62 and the roller 61.

Description

Technical Field

[0001] This invention relates to a corona discharge treatment device, a corona discharge treatment method, a thin film manufacturing system, and a thin film manufacturing method. Prior Technology

[0002] A surface treatment technique for thin films involves corona discharge treatment of the thin film (see, for example, Patent Document 1). Therefore, a test apparatus and experiments are provided for evaluating the surface treatment apparatus using corona discharge.

[0003] [Patent Literature] [Patent Document 1] Japanese Patent Application Publication No. 2017-197766. [Patent Document 2] Japanese Patent Application Publication No. 2021-135173. Summary of the Invention

[0004] In corona discharge treatment apparatuses that use corona discharge for surface treatment, corona discharge is repeatedly applied between opposing electrodes and rollers using a surface-treated object such as a thin film. However, according to the inventors' review, it has been found that when corona discharge is repeatedly applied, electrolytic corrosion can occur in the bearings of the rod that is integrally formed with the roller.

[0005] Due to the aforementioned situation, a technology is needed in the corona discharge treatment device to suppress the electrolytic corrosion of the bearing that supports the rod integrally formed with the roller.

[0006] The corona discharge treatment apparatus disclosed in this case performs surface treatment on the object to be treated by causing corona discharge on the surface of the object to be treated. It comprises: a roller that is conductive and rotatable with a first axis as its rotation axis; a rod that is conductive, integrally formed with the roller, and rotatable with the first axis as its rotation axis; a bearing that supports the rod in a rotatable state; an electrode that is separate from the roller and disposed opposite the roller; a high-frequency power supply connected to the electrode that causes corona discharge between the electrode and the roller; and an AC / DC converter that converts alternating current into direct current based on the charge generated on the roller by the corona discharge between the electrode and the roller.

[0007] The corona discharge treatment method disclosed in this case is a corona discharge treatment device that performs surface treatment of an object by causing corona discharge on the surface of the object to be treated. The corona discharge treatment device includes: a roller that is conductive and rotatable with a first axis as its rotation axis; a rod that is conductive, integrally formed with the roller, and rotatable with the first axis as its rotation axis; a bearing that supports the rod in a rotatable state; an electrode that is separate from the roller and disposed opposite the roller; and a high-frequency power supply connected to the electrode, which causes corona discharge between the electrode and the roller; and an AC / DC converter that converts alternating current into direct current based on the charge generated on the roller by the corona discharge between the electrode and the roller.

[0008] The film manufacturing system disclosed in this case comprises: an extrusion device for mixing and extruding raw materials to form a film; a stretching device for stretching the film; a corona discharge treatment device for applying a surface treatment to the stretched film; and a winding device for winding the surface-treated film.

[0009] The thin film manufacturing method disclosed in this case involves mixing and extruding raw materials; stretching the thin film; applying a surface treatment to the stretched thin film using a corona discharge treatment device of this embodiment; and winding the surface-treated thin film.

[0010] According to one embodiment of the thin film manufacturing method disclosed in this case, electrolytic corrosion of the bearing supporting the rod integrally formed with the roller can be suppressed in a corona discharge treatment device. Simple Explanation of the Diagram

[0011] Figure 1 is a schematic diagram showing the structure of the thin film manufacturing system related to Embodiment 1. Figure 2 is a flowchart showing the thin film manufacturing method according to Embodiment 1. Figure 3 is a diagram showing a structural example of the main parts of the surface treatment apparatus related to Embodiment 1. Figure 4 is a cross-sectional view of the main part of the surface treatment apparatus and a diagram of the energy storage device connected to the main part. Figure 5 is a schematic diagram showing the bearing structure. Figure 6 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 1. Figure 7 is a flowchart showing the operation of the surface treatment apparatus as a result of a modification of embodiment 1. Figure 8 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 2. Figure 9 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 2. Figure 10 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 3. Figure 11 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 3. Figure 12 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 4. Figure 13 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 4. Figure 14 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 5. Figure 15 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 5. Figure 16 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 6. Figure 17 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 6. Implementation

[0012] The embodiments will now be described in detail with reference to the examples or drawings. Furthermore, in all the drawings used to illustrate the embodiments, components with the same function are given the same symbol, and repeated descriptions are omitted.

[0013] (Implementation Form 1) <Thin Film Manufacturing Systems> Figure 1 is a schematic diagram showing the structure of the thin film manufacturing system related to Embodiment 1. Figure 2 is a flowchart showing the thin film manufacturing method according to Embodiment 1.

[0014] The film manufacturing system 1 of this embodiment shown in Figure 1 includes an extrusion device 2, a T-die 3, a cooling device 4, a stretching device 5, a surface treatment device 6, a static electricity removal device 7, and a winding device 8. The surface treatment device 6 is an example of the corona discharge treatment device in this invention. The cooling device 4 is also referred to as a raw material cooling device, a casting roller, etc.

[0015] In the example shown in Figure 1, resin material (pellet) and additives are first supplied to the raw material supply section 2A of the extrusion device 2. The extrusion device 2 mixes and conveys the supplied resin material while extruding. The T-die 3 extrudes the compound (molten resin) from the slit through the extrusion device (S1). The compound extruded from the T-die 3 is cooled in a cooling device to form a thin film 9 (S2).

[0016] The raw material film formed by the T-die 3 is continuously supplied to the stretching device 5 via the cooling device 4. In the stretching device 5, the film 9 is stretched in, for example, the conveying direction of the film 9 (hereinafter referred to as longitudinal direction), and then stretched in the transverse direction intersecting the longitudinal direction (S3). The stretched film 9 is then subjected to a surface treatment using corona discharge by the surface treatment device 6 (S4). A feature of this embodiment is the use of a charge storage device in this surface treatment. This feature will be described later. The surface-treated film 9 is then subjected to a charge removal treatment by the charge removal device 7 to eliminate the charge on the film 9 (S5). The charge-removed film 9 is then wound by the winding device 8 (S6).

[0017] Furthermore, in the case of the thin film manufacturing system 1 shown as an example in Figure 1, the thin film 9 is manufactured as described above. Additionally, the thin film manufacturing system 1 shown in Figure 1 can be modified in various ways depending on the characteristics of the formed thin film 9. For example, in the example shown in Figure 1, the thin film 9 is extended longitudinally and then laterally. However, the method of extending the thin film 9 is not particularly limited; for example, it can also be configured to be extended simultaneously in both the longitudinal and transverse directions.

[0018] Furthermore, the so-called sheet-like film 9, which is extended into a sheet shape, can also be referred to as a film sheet. In this embodiment, the object to be treated by corona discharge is a film, but this film includes films made from various materials, in addition to plastics such as polyethylene. Here, plastic means thermoplastic resin, thermosetting resin, photocuring resin, etc. Moreover, the object to be treated is not limited to a film, but can be assumed to be, for example, paper, cloth including non-woven fabric, metal foil, or other sheet-like materials.

[0019] The cooling device 4 and the cooling process (S2) may be omitted depending on the type of film or the raw material.

[0020] Surface treatment apparatus Figure 3 is a structural example of the main parts of the surface treatment apparatus related to Embodiment 1. Figure 4 is a cross-sectional view of the main parts of the surface treatment apparatus and a diagram of the energy storage device connected to the main parts. The cross-sectional view of the main parts of the surface treatment apparatus shown in Figure 4 is a cross-sectional view showing the state of the main parts viewed along the direction of film deposition.

[0021] The surface treatment apparatus 6 modifies the surface state of the film 9 by generating a corona discharge on its surface. When a corona discharge occurs on the surface of the film 9, the surface roughness of the film 9 becomes coarser, or polar groups, such as carboxyl groups or hydroxyl groups, are introduced, initiating surface modification. As a result, the "wetting properties" of the film 9 can be improved. Improving the wettability of the film 9 surface can improve the printability or adhesion properties of the film 9.

[0022] The surface treatment apparatus includes: a roller 61 for conveying a thin film 9; and an electrode 62 disposed opposite the roller 61 through the thin film 9. As shown in FIG. 4, the roller 61 rotates about a shaft 61R (first shaft). Furthermore, the roller 61 is integrally formed with a rod 65 that rotates around the shaft 61R. The rod 65 is supported by a bearing 66.

[0023] Figure 5 is a schematic diagram showing the structure of the bearing. As shown in Figure 5, the bearing 66 includes a ball 67, insulating grease 68, an inner wheel 691, and an outer wheel 692. The ball 67 is a rotating body made of conductive material. The inner wheel 691 and the outer wheel 692 are track wheels. The inner wheel 691 is fixed to the rod 65, and the outer wheel 692 is fixed to the housing 50 shown in Figure 4 through a housing (not shown). When the roller 65 rotates, the inner wheel 691 rotates with the rod 65, but the ball 67, which is a rotating body, is not fixed to the inner wheel 691 and the outer wheel 692, so it moves freely within the tracks defined by the inner wheel 691 and the outer wheel 692.

[0024] Furthermore, insulating grease 68 is disposed between the inner wheel 691 and the ball 67, and the ball 67 is insulated from the inner wheel 691. That is, it can also be said that insulating grease 68 is disposed between the ball 67 and the rod 65, so that the ball 67 and the rod 65 are electrically insulated. Alternatively, there are cases where a cylindrical component (roller) not shown is used as the rotating body instead of the ball 67.

[0025] In the example shown in Figure 3, since surface treatment is performed on both the upper and lower sides of the film 9, there is a roller 61A for the upper side and a roller 61B for the lower side.

[0026] Furthermore, in the example shown in Figure 3, multiple electrodes 62 are arranged on the opposing surfaces of the upper roller 61A and the lower roller 61B. Each of the multiple electrodes 62 is electrically connected to a high-frequency power supply 63. When a high-frequency voltage is applied to each of the multiple electrodes 62 from the high-frequency power supply 63, corona discharge occurs between each of the multiple electrodes 62 and the roller 61. In the surface treatment apparatus 6, since the corona discharge occurs while the thin film 9 is present, a relatively high power is supplied from the high-frequency power supply 63. For example, at rated output, a high-frequency voltage of approximately 20kW to 70kW and approximately 10kHz to 100kHz is applied. In addition, the above voltage is only an example, and there are various variations.

[0027] Furthermore, the surface treatment apparatus 6 needs to continuously apply surface treatment to the thin film 9. In the case of the surface treatment apparatus 6, a high-frequency power supply 63 is used as the power source to generate corona discharge, and continuous surface treatment is achieved by repeatedly generating corona discharge.

[0028] If the charge generated within the roller 61 due to the discharge is not discharged to the outside when corona discharge occurs repeatedly, the charge will be stored within the roller 61, causing instability in the potential difference between the electrode 62 and the roller 61. Therefore, the roller 61 is generally equipped with a charge eliminator 64 connected to a grounding potential to eliminate the charge generated by the roller 61. As an example of the charge eliminator 61, a method can be given by pressing a charge-eliminating member, such as a carbon brush, against a rod 65 integrally formed with the roller 61. According to this method, the potential difference between the electrode 62 and the roller 61 can be stabilized, and corona discharge can be recurred stably.

[0029] However, according to the inventors' review, it has been found that electrolytic corrosion can occur in the bearing 66 of the support rod 65 in the surface treatment apparatus 6. It has been found that even when the surface treatment apparatus 6 is operated with the charge eliminator 64 installed, electrolytic corrosion of the bearing 66 still occurs.

[0030] Upon further review by the inventors, it has been found that, rather than eliminating the charge generated in the roller 61 by allowing it to escape to the outside, storing the charge generated in the roller 61, that is, the alternating current generated in the roller 61, at least temporarily, can slow down the electrolytic corrosion of the bearing 66.

[0031] In this embodiment, an energy storage device 70 is provided that can at least temporarily store the charge generated in the roller 61.

[0032] <Electronic Storage Devices> As shown in Figure 4, the energy storage device 70 includes a slip ring 71, a conductive component 72, a power regulator 73, an anti-backflow element 74, a switching switch 75, a resistor 76, an energy storage device 77, a switch 78, a first load 79, a second load 80, and a control circuit 81. Furthermore, the control circuit 81 is an example of the control device in this application.

[0033] The slip ring 71 is mounted on the rod 65 to be electrically connected to the rod 65.

[0034] The conductive component 72 is supported by contacting the sliding conductive surface of the slip ring 71. The conductive component 72 is, for example, a carbon brush or an air gap. The sliding conductive surface of the slip ring 71 is generally made of a material such as carbon, and more preferably, a material with excellent conductivity such as silver or copper is impregnated into the carbon.

[0035] The power regulator 73 converts the input alternating current (AC) into direct current (DC) and adjusts the voltage as needed for output. The power regulator 73 has two input terminals: one connected to the conductive member 72, and the other connected to ground or a member at ground potential. Through this connection structure, the AC current generated by the random charge of the roller 61 is input to the power regulator 73 via the rod 65, slip ring 71, and conductive member 72, where it is converted into DC current. Furthermore, this AC-based power can be assumed to have a voltage (effective value) of approximately 0.5V to 5V and an average frequency of 10kHz to 100kHz.

[0036] When the power regulator 73 converts alternating current into direct current, it temporarily stores the input charge, namely the charge generated by the roller 61. By temporarily storing the charge generated in the roller 61, the charge generated in the roller 61 is quickly absorbed, thereby suppressing the magnitude of the alternating current or voltage amplitude generated in the roller 61. As a result, the tendency of charge to pass through the bearing 66 is suppressed, and the electrolytic corrosion of the bearing 66 is slowed down. In addition, the term "temporarily storing charge" here means that during the process of converting alternating current into direct current, the charge is temporarily received and absorbed by a smoothing capacitor or the like. Therefore, "temporarily storing charge" does not mean a limited storage time.

[0037] The power regulator 73 may include, for example, an AC / DC converter and a step-up / step-down circuit. The AC / DC converter may be configured, for example, with a rectifier circuit such as a diode bridge and a smoothing capacitor. The power regulator 73 may be a circuit individually composed using semiconductor components, passive components, etc., or it may be a circuit composed using a dedicated IC.

[0038] The anti-reverse current element 74 connects its input terminal to the output terminal of the power regulator 73. The anti-reverse current element 74 prevents current from flowing back into the power regulator 73 and damaging it. The anti-reverse current element 74 is, for example, a diode.

[0039] The toggle switch 75 has an input terminal T0, a switching terminal S connected to the input terminal T0, and two output terminals selectively connected to the switching terminal S, namely a first output terminal T1 and a second output terminal T2. That is, the toggle switch 75 is configured to allow either connection of its switching terminal S to the first output terminal T1 or connection of its switching terminal S to the second output terminal T2. The input terminal T0 of the toggle switch 75 is connected to the output terminal of the anti-reverse current element 74. The toggle switch 75 can be, for example, a relay switch or a semiconductor switch represented by a MOSFET.

[0040] The first output terminal T1 of the switch 75 is connected to a circuit that connects the resistor 76, the energy storage device 77, the switch 78, and the first load 79 in series. The second output terminal T2 of the switch 75 is connected to the second load 80. The output terminals of the first load 79 and the second load 80 are respectively grounded or connected to a component at ground potential.

[0041] Resistor 76 is a component that converts the input electrical power into heat, which is then consumed. Resistor 76 also serves to prevent surge current from flowing to the energy storage device 77.

[0042] The energy storage device 77 stores electrical energy based on the direct current output by the power regulator 73. The energy storage device 77 is configured as, for example, a capacitor, or a secondary battery including a nickel-metal hydride battery, lithium-ion battery, etc. The energy storage device 77 may include a control circuit that controls charging or power supply. The energy storage device 77 is detachable; after charging, it can be removed and used as a power source for external devices. Furthermore, the energy storage device 77 can be of a type that can supply power while charging, or a type that cannot supply power while charging. This embodiment can correspond to both types, but in this embodiment, the energy storage device 77 is assumed to be of the type that cannot supply power while charging.

[0043] Switch 78 is used to toggle whether the storage device 77 is connected to the first load 79. When the switch is open or closed, the storage device 77 is connected to the first load 79, and the power stored in the storage device 77 is supplied to the first load 79. On the other hand, when switch 78 is turned on, the connection between the storage device 77 and the first load 79 is disconnected. Switch 78 is constructed, for example, by a transistor, MOSFET, relay switch, etc.

[0044] The first load 79 is, for example, an electronic circuit that is powered by electricity. This electronic circuit can be a circuit that constitutes the surface treatment device 6 or the thin film manufacturing system 1, or it can be a circuit that constitutes other devices or systems or an independently operating circuit.

[0045] In the case where the storage device 77 cannot supply power during charging, the first load 79 is usually supplied with power from the main power source (not shown), and the storage device 77 is used as a secondary power source only when it has stored power. On the other hand, in the case where the storage device 77 can supply power during charging, the first load 79 will use the storage device 77 as a power source.

[0046] In this embodiment, the first load 79 is assumed to be an electronic circuit, but it could also be, for example, something that converts electricity into heat, light, or power. In this case, the first load 79 could be, for example, a resistor, a light-emitting element, a motor, etc.

[0047] The second load 80 is, for example, converting electricity into heat, light, or power. In this case, the second load 80 is, for example, a resistor, a light-emitting element, a motor, etc.

[0048] In the initial state, the input terminal of the switch 75 is connected to the first output terminal, and the switch 78 is turned on. That is, the power generated by the charge generated by the roller 61 is temporarily stored by the power regulator 73 and charged to the battery 77 through the anti-reverse current element 74, the switch 75, and the resistor 76.

[0049] The control circuit 81 has the function of detecting the status of the battery 77. The control circuit 81 controls the switching of the switch 75 and the opening and closing of the switch 78 based on the detection result of the status of the battery 77.

[0050] The control circuit 81 continuously or periodically detects the charging current and charging voltage (capacity) of the battery 77. When the control circuit 81 detects that the charging voltage of the battery 77 has risen to the preset upper voltage V1 (first standard), it controls the battery by switching the connection of the switching terminal S of the switch 75 to the second output terminal T2, i.e., the second load 80 side, and opening and closing the switch 78. The upper voltage V1 is, for example, the voltage required for a full charge of the battery 77, and in the case of a circuit with the first load 79, it is the upper limit voltage that the circuit can supply.

[0051] Through this control, the battery 77 is electrically connected to the first load 79, and the battery 77 supplies power to the first load 79. While the battery 77 is supplying power to the first load 79, the power generated by the charge in the roller 61 is supplied to the second load 80 through the power regulator 73, the anti-reverse current element 74, and the changeover switch 75.

[0052] When the control circuit 81 detects that the charging voltage (capacity) of the detected battery 77 has dropped to the preset lower voltage V2 (second standard), it controls the battery by switching the connection of the switching terminal S of the switch 75 to the first output terminal T1, i.e., the battery 77 side, and opening the switch 78. The lower voltage V2 is, for example, the voltage corresponding to the lower discharge limit of the battery 77, or, in the case of a circuit with the first load 79, the lower limit voltage that the circuit can supply. By controlling this, the battery 77 and the first load 79 are electrically disconnected, and the battery 77 is charged.

[0053] The control circuit 81 has the function of detecting abnormalities in the battery 77. The control circuit 81 detects an abnormality when the charging current or charging voltage of the battery 77 exceeds a pre-set upper limit. That is, the control circuit 81 detects overvoltage and overcurrent in the battery 77 as abnormalities. When the control circuit 81 detects an abnormality in the battery 77, it switches the switching target of the switching terminal S of the switch 75 to the second output terminal T2, i.e., the second load 80 side, and stops the charging of the battery 77 to prevent damage to the battery 77. Additionally, when the control circuit 81 detects an abnormality in the battery 77, it opens the switch 78 to disconnect the battery 77 from the first load 79 to prevent damage to the first load 79.

[0054] The control circuit 81 series is composed of, for example, circuits using dedicated ICs, PLCs, microcomputers, etc.

[0055] <Operation of the surface treatment device> The operation of the surface treatment device 6 will be explained.

[0056] Figure 6 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 1. As shown in Figure 6, firstly, corona discharge is initiated (S11). Specifically, while the drive source drives the roller 61 to rotate and transport the thin film 9, the high-frequency power supply 63 repeatedly causes corona discharge between the roller 61 and the electrode 62.

[0057] Next, the power regulator 73 temporarily stores the alternating current generated by the charge produced by the roller 61 and converts it into direct current (S12). At this point, the switch 75 and switch 78 are in their initial states. That is, the switching terminal S of the switch 75 is connected to the first output terminal T1, and switch 78 is open. Therefore, the direct current output by the power regulator 73 is stored in the storage device 77.

[0058] Next, the control circuit 81 detects the status of the battery 77 and determines whether there is an abnormality based on the detection result (S13). If the control circuit 81 determines that there is an abnormality (S13: Yes), it switches the connection of the switching terminal S of the switch 75 to the second output terminal T2, that is, the second load 80 side, and stops the charging of the battery 77 (S14). Further, the control circuit 81 opens the switch 78 to disconnect the battery 77 from the first load 79 to protect the first load 79 (S15) and ends the process.

[0059] On the other hand, when the control circuit 81 determines that there is no abnormality (S13: No), it determines whether the charging voltage V of the battery 77 has reached the voltage V1 equivalent to a full charge (S16). When the control circuit 81 determines that the charging voltage V has reached voltage V1 (S16: Yes), it switches the connection of the switching terminal S of the switch 75 to the second output terminal T2, that is, the second load 80 side, and stops the charging of the battery 77 (S17). Further, the control device 81 closes the switch 78 and connects the battery 77 to the first load 79, and the battery 77 begins to supply power to the first load 79 (S18). Then, it proceeds to step S19.

[0060] On the other hand, when the control circuit 81 determines that the charging voltage V of the battery 77 has not reached voltage V1 (S16: No), it proceeds to step S19 and determines whether the charging voltage V of the battery 77 has dropped to a voltage V2 equivalent to insufficient charging (S19). When the control circuit 81 determines that the charging voltage V has dropped to voltage V2 (S19: Yes), it opens the switch 78 and disconnects the battery 77 from the first load 79 (S20). Further, the control circuit 81 switches the connection of the switching terminal S of the switching switch 75 to the first output terminal T1, i.e., the battery 77 side, and begins charging of the battery 77 (S21). After that, it proceeds to step S22.

[0061] In step S19, if the control circuit 81 determines that the charging voltage V of the battery 77 has not dropped to voltage V2 (S19: No), it will proceed to step S22, and the control circuit 81 will allow the charging of the battery 77 to continue (S22). After that, it will proceed to step S23.

[0062] In step S23, the control circuit 81 determines whether the process should end based on whether there is user operation or whether the process should end. If the control circuit 81 determines that the process should end (S23: Yes), it will end the process; if it determines that the process should not end (S23: No), it will return to step S13 and continue the process.

[0063] According to Embodiment 1 above, the power regulator 73 temporarily stores the charge generated by the roller 61 to suppress electrolytic corrosion of the bearing 66, that is, to slow down the electrolytic corrosion process. In addition, the DC current output by the power regulator 73 charges the storage device 77. The charged storage device 77 can then be used as a power source for the first load 79 or an external device. Through this function, the charge generated by the roller 61, which would otherwise be unnecessary, can be used as a power source, thus contributing to energy conservation.

[0064] Furthermore, this embodiment is an example of applying the surface treatment apparatus using corona discharge to a film manufacturing system for manufacturing plastic films. However, it can also be applied to film manufacturing systems for manufacturing materials other than plastic films. For example, surface treatment using corona discharge is sometimes applied during the manufacturing of materials including paper, non-woven fabrics, and metal foils. Therefore, the surface treatment apparatus disclosed herein can be similarly applied to film manufacturing systems for manufacturing such paper, fabrics, and metal foils.

[0065] <Variation Example 1> In the above embodiment, the storage device 77 is the type that cannot supply power while being charged. This modified example uses the storage device 77 as the type that can supply power while being charged. In this case, the charging of the storage device 77 does not need to be stopped, regardless of whether it is fully charged or undercharged.

[0066] Figure 7 is a flowchart illustrating the operation of the surface treatment apparatus as a variation of Embodiment 1. The changes from the above embodiment are explained. As shown in Figure 7, when it is determined that the charging voltage V of the battery 77 reaches a voltage V1 equivalent to a full charge (S16: Yes), the switching of the changeover switch 75 towards the second load 80 side will not be performed (S17). Furthermore, when it is determined that the charging voltage V of the battery 77 drops to a voltage V2 equivalent to an undercharged voltage (S19: Yes), the switching of the changeover switch 75 towards the battery 77 side will not be performed (S21).

[0067] According to this variation 1, since the battery 77 is designed to continue supplying power while being charged, it is not necessary to stop charging the battery 77 even if it is fully charged or undercharged.

[0068] <Variation Example 2> In the above embodiment, insulating grease 68 is disposed between the ball 67 and the rod 65 inserted into the bearing 66. In this modified embodiment, the insulating grease 68 is replaced with a conductive grease. By this configuration, the bearing 66 is brought closer to the potential of the roller 61, thereby preventing electrical shocks to the bearing 66 that may occur in the event of insulation failure of the insulating grease.

[0069] By means of this variation 2, since the grease inserted between the ball 67 and the rod 65 inserted into the bearing 66 is a conductive grease, it is possible to make a bearing 66 that can prevent electrical impact on the bearing 6 from occurring when the insulation of the grease is damaged.

[0070] Furthermore, when the insulating grease 68 is disposed between the ball 67 and the rod 65 inserted into the bearing 66, the inventors have found that the power input to the power regulator 73 becomes relatively higher. To achieve both suppression of electrolytic corrosion of the bearing 66 and energy saving in power supply to the energy storage device 77, the first load 79, or the second load 80, it is preferable to dispose of the insulating grease 68 between the ball 67 and the rod 65.

[0071] (Implementation Form 2) The surface treatment apparatus related to Embodiment 2 will be described in detail.

[0072] Figure 8 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 2. As shown in Figure 8, compared with Embodiment 1, the surface treatment apparatus 6a related to Embodiment 2 differs in the structure of the energy storage device. The surface treatment apparatus 6a is located in its energy storage device 70a and is not connected to the second load. Instead, the power from the power regulator 73 is used to charge the energy storage device 77 and to supply power to the first load 79.

[0073] As shown in Figure 8, compared to Embodiment 1, the energy storage device 70a has a structure that omits the switching switch 75, switch 78, second load 80, and control circuit 81. That is, the output terminal of the power regulator 73 is connected in series with the anti-reverse current element 74, resistor 76, energy storage device 77, and first load 79. In addition, the energy storage device 77 is of the type that can still supply power while being charged.

[0074] Figure 9 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 2. As shown in Figure 9, firstly, the high-frequency power supply 63 begins corona discharge (S41). Next, the power regulator 73 temporarily stores the charge generated by the charging roller 61 while converting the alternating current based on its charge into direct current (S42). The storage device 77 is charged by its direct current (S43). The storage device 77 supplies power to the first load 79 (S44).

[0075] The surface treatment apparatus 6a according to Embodiment 2, similar to Embodiment 1, suppresses electrolytic corrosion of the bearing 66 by temporarily storing the charge generated in the roller 61 using the power regulator 73. Furthermore, the surface treatment apparatus 6a according to Embodiment 2 has a simpler structure because it does not require a control circuit 81, thus reducing the risk of failure and cost. Additionally, when the first load 79 is an electronic circuit, the charge generated by the roller 61 can be used to supply power to the electronic circuit, contributing to energy saving.

[0076] (Implementation Form 3) The surface treatment apparatus related to Embodiment 3 will be explained.

[0077] Figure 10 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 3. As shown in Figure 10, compared with Embodiment 1, the structure of the energy storage device of the surface treatment apparatus 6b related to Embodiment 3 is different. The surface treatment apparatus 6b is configured such that it is not connected to a load in its energy storage device b, but is configured such that the power from the power regulator 73 can be used to charge the energy storage device 77.

[0078] As shown in Figure 10, compared to Embodiment 1, the energy storage device 70b has a structure that omits the switching switch 75, switch 78, first load 79, second load 80, and control circuit 81. That is, the output terminal of the power regulator 73 is connected in series with the anti-reverse current element 74, resistor 76, and energy storage device 77. The energy storage device is configured to be detachable.

[0079] Figure 11 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 3. As shown in Figure 11, firstly, the high-frequency power supply 63 begins corona discharge (S51). Next, the power regulator 73 temporarily stores the charge generated by the charge roller 61 while converting the alternating current based on its charge into direct current (S52). The storage device 77 is then charged by its direct current (S53).

[0080] According to this embodiment 3, the surface treatment apparatus 6b, similar to embodiment 1, can suppress the electrolytic corrosion of the bearing 66 by temporarily storing the charge generated by the roller 61 using the power regulator 73. According to the surface treatment apparatus 6a related to embodiment 3, since the control circuit 81 is not required, the structure is simpler, thus reducing the risk of failure or cost. Furthermore, by charging the charge generated by the roller 61 to the energy storage device 77, the energy storage device can be used as a power source for other circuits. Also, by replacing the energy storage device 77 with one of larger capacity, the more complex operation of energy storage device replacement when the energy storage device 77 is not fully charged can be eliminated.

[0081] (Implementation Form 4) The surface treatment apparatus related to Embodiment 4 will be explained.

[0082] Figure 12 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 4. As shown in Figure 12, compared with Embodiment 1, the structure of the energy storage device of the surface treatment apparatus 6c related to Embodiment 4 is different. The surface treatment apparatus 6c is configured such that multiple energy storage devices can be charged sequentially in its energy storage device 70.

[0083] As shown in Figure 12, compared to Embodiment 1, the energy storage device 70c replaces the switch 75 with a switch 75a. Furthermore, the energy storage device 70c replaces the resistor 76 and the energy storage device 77 with a resistor 76a and a first energy storage device 77a, and a resistor 76b and a second energy storage device 77b. The switch 78 and the first load 79 are omitted.

[0084] As shown in Figure 12, the output terminal of the power regulator 73 is connected to the anti-reverse current element 74, and the output terminal of the anti-reverse current element 74 is connected to the input terminal T0 of the switch 75a. The switch 75a has three output terminals.

[0085] The first output terminal T1 is connected in series with resistor 76a and first battery 77a. The third output terminal T3 is connected in series with resistor 76b and second battery 77b. The second output terminal T2 is connected to the second load 80. The first battery 77a and the second battery 77b are detachable. The control circuit 81 detects the status of the first battery 77a and the second battery 77b and controls the switching switch 75a based on the detection result.

[0086] Figure 13 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 4. As shown in Figure 13, firstly, the high-frequency power supply 63 begins corona discharge (S61). Next, the power regulator 73 temporarily stores the alternating current generated by the charge produced by the roller 61 and converts it into direct current (S62). The control circuit 81 first switches the connection of the switching terminal S of the switch 75 to the first output terminal T1, that is, the first storage device 77a side (S63). The power output from the power regulator 73 is stored in the first storage device 77a.

[0087] Next, the control circuit 81 detects the status of the first battery 77a and determines whether there is an abnormality based on the detection result (S64). If the control circuit 81 determines that there is an abnormality (S64: Yes), it will switch the connection of the switching terminal S of the switch 75 to the second output terminal T2, that is, the second load 80 side, and stop the charging of the first battery 77a (S65), thus ending the process.

[0088] On the other hand, when the control circuit 81 determines that there is no abnormality (S64: No), it determines whether the charging voltage Va of the first battery 77a has reached the voltage V1 equivalent to full charge (S66). When the control circuit 81 determines that the charging voltage Va has not reached the voltage V1 (S66: No), it allows the charging of the first battery 77a to continue (S67). Then, the control circuit 81 determines whether the process should be terminated based on whether there is user operation or an event that should be terminated (S68). When the control circuit 81 determines that the process should be terminated (S68: Yes), it terminates the process; when it determines that the process should not be terminated (S68: No), it returns to step S64 and continues the process.

[0089] In step S66, when the control circuit 81 determines that the charging voltage Va has reached voltage V1 (S66: Yes), it will switch the connection of the switching terminal S of the switch 75 to the third output terminal T3, that is, the second battery 77b side, and start charging of the second battery 77b (S69). At this time, the fully charged first battery 77a will be exchanged with other uncharged batteries by the user.

[0090] Furthermore, the control circuit 81 detects the status of the second battery 77b and determines whether there is an abnormality based on the detection result (S70). When the control circuit 81 determines that there is an abnormality (S70: Yes), it proceeds to step S65, switches the connection of the switching terminal S of the switch 75 to the second output terminal T2, that is, the second load 80 side, and stops the charging of the second battery 77b (S65), thus ending the process.

[0091] On the other hand, in step S70, when the control circuit 81 determines that there is no abnormality (S70: No), it determines whether the charging voltage Vb of the second battery 77b has reached the voltage V1 equivalent to a full charge (S71). In step S71, when the control circuit 81 determines that the charging voltage Vb has reached voltage V1 (S71: Yes), it returns to step S63 and switches the connection of the switching terminal S of the switch 75 to the first output terminal T1, that is, the side of the first battery 77a, and starts charging the first battery 77a again (S63). At this time, the fully charged second battery 77b will be exchanged with other uncharged batteries by the user.

[0092] In step S71, when the control circuit 81 determines that the charging voltage Vb has not reached the voltage V1 (S71: No), it will allow the charging of the second battery 77b to continue (S72). Then, the control circuit 81 will determine whether the process should be terminated based on whether there is user operation or an event that should terminate the process (S73). If the control circuit 81 determines that the process should terminate (S73: Yes), it will terminate the process; if it determines that the process should not terminate (S73: No), it will return to step S70 and continue the process.

[0093] The surface treatment apparatus 6c according to Embodiment 4, similar to Embodiment 1, can suppress the electrolytic corrosion of the bearing 66 by temporarily storing the charge generated by the roller 61 using the power regulator 73. Furthermore, the surface treatment apparatus 6a related to Embodiment 4 can effectively store the charge generated by the roller in a plurality of energy storage devices, thus contributing to energy conservation.

[0094] (Implementation Form 5) The surface treatment apparatus related to Embodiment 5 will be explained.

[0095] Figure 14 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 5. As shown in Figure 14, compared with Embodiment 1, the structure of the energy storage device in the surface treatment apparatus 6d related to Embodiment 5 is different. The surface treatment apparatus 6d is configured such that its energy storage device 70d does not contain an energy storage device, and the power from the power regulator 73 that generates the charge from the temporary energy storage roller 61 is supplied to the first load 79 composed of electronic circuits, etc.

[0096] As shown in Figure 14, compared to Embodiment 1, the energy storage device 70d has a structure that omits the switching switch 75, resistor 76, energy storage device 77, switch 78, second load 80, and control circuit 81. That is, the output terminal of the power regulator 73 is connected in series with the anti-reverse current element 74 and the first load 79. The first load 79 is, for example, an electronic circuit, such as a circuit constituting the surface treatment apparatus 6d or the thin film manufacturing system 1, or an external device. The first load 79 can use the power regulator 73 as the main power source, or it can have a separate main power source and use the power regulator 73 as a secondary power source.

[0097] Figure 15 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 5. As shown in Figure 15, firstly, the high-frequency power supply 63 begins corona discharge (S81). Next, the power regulator 73 temporarily stores the charge generated by the charging roller 61 while converting the alternating current based on its charge into direct current (S82). The first load 79 is supplied with power due to its direct current (S83).

[0098] The surface treatment apparatus 6d according to Embodiment 5, similar to Embodiment 1, suppresses electrolytic corrosion of the bearing 66 by temporarily storing the charge generated by the roller 61 using the power regulator 73. Furthermore, the surface treatment apparatus 6a according to Embodiment 5 has a simpler structure because it does not require a control circuit or a power storage device, thus reducing the risk of failure or cost. Also, when the first load 79 is an electronic circuit, the charge generated by the roller 61 can be used to supply power to the electronic circuit, contributing to energy saving.

[0099] (Implementation Form 6) The surface treatment apparatus related to Embodiment 6 will be explained.

[0100] Figure 16 is a schematic diagram showing the structure of the surface treatment apparatus related to Embodiment 6. As shown in Figure 16, compared with Embodiment 1, the structure of the energy storage device in the surface treatment apparatus 6e related to Embodiment 6 is different. The surface treatment apparatus 6e is configured such that its energy storage device 70e does not contain an energy storage device, and the power from the power regulator 73 that generates the charge from the temporary energy storage roller 61 is supplied to a second load 80 composed of resistors, etc.

[0101] As shown in Figure 16, compared to Embodiment 1, the energy storage device 70e has a structure that omits the switching switch 75, resistor 76, energy storage device 77, switch 78, first load 79, and control circuit 81. That is, the output terminal of the power regulator 73 is connected in series with the anti-reverse current element 74 and the second load 80. The second load 80 is, for example, a passive element such as a resistor or a light-emitting element.

[0102] Figure 17 is a flowchart showing the operation of the surface treatment apparatus related to Embodiment 6. As shown in Figure 17, firstly, the high-frequency power supply 63 begins corona discharge (S91). Next, the power regulator 73 temporarily stores the charge generated by the charge roller 61 while converting the alternating current based on its charge into direct current (S92). The second load 80 is supplied with power based on its direct current (S83). The second load 80 consumes its power by converting it into heat or light, etc.

[0103] Similar to Embodiment 1, the surface treatment apparatus 6e of Embodiment 6, based on this embodiment 6, uses a power regulator 73 to temporarily store the charge generated by the roller 61, thus slowing down the electrolytic corrosion of the bearing 66. Furthermore, the surface treatment apparatus 6e of Embodiment 6 has a simpler structure because it does not require a control circuit, thereby reducing the risk of failure or cost. Additionally, if the second load 80 is a resistor, it can be used as a heater. If the second load 80 is a light-emitting element, it can be used as lighting.

[0104] (Implementation Form 7) The surface treatment method related to Embodiment 7 will be described below. Embodiment 7 is a corona discharge treatment method using a corona discharge treatment apparatus. The corona discharge treatment apparatus treats the surface of an object by causing corona discharge on the surface of the object to be treated. The corona discharge treatment apparatus includes: a roller that is conductive and rotatable with a first axis as its rotation axis; a rod that is conductive, integrally formed with the roller, and rotatable with the first axis as its rotation axis; a bearing that supports the rod in a rotatable state; an electrode that is separate from the roller and disposed opposite the roller; and a high-frequency power supply connected to the electrode, which causes corona discharge between the electrode and the roller. This surface treatment method uses a power regulator including an AC / DC converter to at least temporarily store the charge generated on the roller due to the corona discharge occurring between the electrode and the roller.

[0105] According to the surface treatment method related to this embodiment 7, since the charge generated by the electric roller is temporarily stored by the power regulator, the electrolytic corrosion of the bearing can be suppressed.

[0106] (Implementation Form 8) The following describes a film manufacturing system related to Embodiment 8. The film manufacturing system related to Embodiment 8 includes: an extrusion device for mixing and extruding raw materials to form a film; a stretching device for stretching the film; a surface treatment device as described in any one of Embodiments 1 to 6 for applying a surface treatment to the stretched film; and a winding device for winding the surface-treated film.

[0107] Furthermore, when the raw material is metal, natural cooling is required as a preparation for stretching. However, when the raw material is plastic resin, cooling is necessary as a preparation for stretching. Here, the film manufacturing system is configured to have a cooling device that cools the film extruded by the extrusion device, and the stretching device stretches the cooled film.

[0108] Furthermore, when the raw material has a property of easily becoming charged, it may be necessary to remove the residual charge on the surface-treated film to prevent the films from sticking together and to facilitate winding. Here, the film manufacturing system includes: a charge removal device that removes the charge generated on the film that has been surface-treated by the aforementioned surface-treatment device; and a winding device that can wind the film after it has been decharged by the charge removal device.

[0109] According to this embodiment 8, the thin film manufacturing system can suppress the electrolytic corrosion of the bearing because it uses a power regulator that includes an AC / DC converter to temporarily store the charge generated by the roller.

[0110] (Implementation Form 9) The film manufacturing method related to Embodiment 9 will be described below. The film manufacturing method related to Embodiment 9 involves mixing and extruding raw materials; stretching the film; applying a surface treatment to the stretched film using a surface treatment apparatus of any one of Embodiments 1 to 6; and winding the surface-treated film.

[0111] According to the thin film manufacturing method related to this embodiment 9, since the charge generated by the roller is temporarily stored by a power regulator including an AC / DC converter, the electrolytic corrosion of the bearing can be suppressed.

[0112] The present invention has been described above with reference to various embodiments, but the present invention is not limited to the embodiments described above, but includes various modifications. Furthermore, the embodiments described above are for the purpose of easy understanding of the present invention and are not necessarily limited to having all the structures described. Also, it is possible to replace a part of the structure of a certain embodiment with the structure of another embodiment, and it is also possible to add the structure of another embodiment to the structure of a certain embodiment. In addition, the numerical values ​​or information contained in the text or figures are merely examples, and the effect of the present invention is not diminished even if different structures are used.

[0113] Furthermore, parts of the structure of each implementation can be added, deleted, or replaced. Also, the aforementioned structures, functions, processing units, and processing methods can be partially or entirely implemented in hardware, for example, through integrated circuit design. Furthermore, at least one of the aforementioned constituent elements and functions can be interpreted and executed as a program that a processor such as an MPU or CPU will implement each function, and implemented in software. Furthermore, the scope of functions implemented in software is not limited, and hardware and software can be used simultaneously. The programs, tables, files, and other information implementing each function can be stored in memory or recording devices such as hard drives, SSDs, or recording media such as IC cards, SD cards, and DVDs.

[0114] 1: Thin Film Manufacturing System 2: Extrusion device 3: T-shaped mold 4: Cooling device 5: Extension device 6,6a~6e: Surface treatment apparatus (corona discharge treatment apparatus) 7: Electrostatic removal device 8: Winding device 9: Film 61, 61A, 61B: Rollers 61R: Axis (First Axis) 62, 62A, 62B: Electrodes 63: High-frequency power supply 64: Charge Eliminator 65: Pole 66: Bearing 67: Ball 68: Insulating grease 70, 70a~70e: Energy storage devices 71: Slip ring 72: Conductive components 73: Power Regulator (AC / DC Converter) 74: Anti-backflow element 75, 75a: Toggle switch 76, 76a, 76b: Resistors 77, 77a, 77b: Storage devices 78: Switch 79: First load 80: Second load 81: Control circuit (control device)

Claims

1. A corona discharge treatment apparatus for surface treatment of an object by causing corona discharge on the surface of the object to be treated, comprising: a roller having conductivity and being rotatable with a first axis as a rotation axis; a rod having conductivity, integrally formed with the roller, and rotatable with the first axis as a rotation axis; a bearing supporting the rod in a rotatable state; an electrode being separate from the roller and disposed opposite the roller; a high-frequency power supply connected to the electrode and causing corona discharge between the electrode and the roller; and an AC / DC converter that converts alternating current into direct current based on the charge generated on the roller due to the corona discharge between the electrode and the roller.

2. The corona discharge treatment apparatus as claimed in claim 1, comprising: an energy storage device that stores electrical energy based on the direct current output from the AC / DC converter.

3. The corona discharge treatment apparatus as claimed in claim 2, comprising: a load connected to the storage device.

4. The corona discharge treatment apparatus as claimed in claim 3, comprising: a switch disposed between the accumulator and the load; and a control device that detects the state of the accumulator and controls the opening and closing of the switch based on the detection result.

5. The corona discharge treatment apparatus as claimed in claim 1, comprising: a switching device connected to the output terminal of the AC / DC converter; a battery connected to the first output terminal of the switching device; a switch connected to the battery; a first load connected to the switch; and a second load connected to the second output terminal of the switching device.

6. The corona discharge treatment apparatus as claimed in claim 5, comprising: a control device that detects the state of the accumulator and controls the switching of the switch and the opening and closing of the switch based on the detection result.

7. The corona discharge treatment apparatus as described in claim 6, wherein, The first load is the circuit that constitutes the corona discharge treatment device.

8. The corona discharge treatment apparatus as described in claim 6, wherein, The control device detects the stored power of the battery and controls the switch by turning it off when the detected stored power rises to the upper first standard and turning it on when the detected stored power drops to the lower second standard.

9. The corona discharge treatment apparatus as described in any one of claims 6 to 8, wherein, The control device has the function of detecting abnormalities in the battery, and performs control by connecting the switching terminal of the switch to the first output terminal when no abnormality is detected, and connecting the switching terminal to the second input terminal when an abnormality is detected.

10. The corona discharge treatment apparatus as described in any one of claims 2 to 8, wherein, The energy storage system is designed to be detachable.

11. The corona discharge treatment apparatus as claimed in claim 9, wherein, The energy storage system is designed to be detachable.

12. The corona discharge treatment apparatus as claimed in claim 1, comprising: a load that consumes power based on the direct current output by the AC / DC converter.

13. The corona discharge treatment apparatus as claimed in claim 12, wherein, The load is an electronic circuit.

14. The corona discharge treatment apparatus as claimed in claim 12, wherein, The load is a resistor or a light-emitting element.

15. The corona discharge treatment apparatus as claimed in claim 1, comprising: insulating grease or conductive grease located between the rod and the bearing.

16. The corona discharge treatment apparatus as claimed in claim 1, comprising: a charge eliminator that allows the charge generated on the roller to escape to the outside.

17. The corona discharge treatment apparatus as claimed in claim 1, wherein, The material to be processed is plastic film, paper, cloth, or metal foil.

18. A corona discharge treatment method, comprising a corona discharge treatment apparatus for surface treatment of an object by causing corona discharge on the surface of the object to be treated, the corona discharge treatment apparatus comprising: a roller having conductivity and being rotatable with a first axis as a rotation axis; a rod having conductivity, integrally formed with the roller, and rotatable with the first axis as a rotation axis; a bearing supporting the rod in a rotatable state; an electrode being separate from the roller and disposed opposite the roller; and a high-frequency power supply connected to the electrode, which causes corona discharge between the electrode and the roller; and an AC / DC converter converting alternating current into direct current based on the charge generated on the roller by the corona discharge between the electrode and the roller.

19. A film manufacturing system comprising: an extrusion device for mixing and extruding raw materials to form a film; a stretching device for stretching the film; a corona discharge treatment device as described in any one of claims 1 to 17 for applying a surface treatment to the stretched film; and a winding device for winding the surface-treated film.

20. A method for manufacturing a thin film, comprising: mixing and extruding raw materials; stretching the film; applying a surface treatment to the stretched film using a corona discharge treatment apparatus as described in any one of claims 1 to 17; and winding the surface-treated film.

Images