Writing apparatus

Abstract

A drawing apparatus is used to draw a pattern on a substrate by irradiating light. The drawing apparatus includes: a holding part for holding the substrate; a light irradiation part for drawing the pattern on the substrate; a cover (6) for covering the holding part and the light irradiation part; and an air supply part for supplying first air at an adjusted temperature into the cover (6). The air supply part includes: a temperature regulating part (71a) for introducing air from outside the cover (6) and generating second air at an adjusted temperature; an air intake part (72) for introducing air from outside the cover (6); and a pipe (734) that functions as a mixing part, which mixes the second air introduced from the temperature regulating part (71a) and the third air introduced from the air intake part (72) to generate the first air.

Description

Technical Field

[0001] The present invention relates to a drawing apparatus for drawing a pattern on a substrate by irradiating light. [References to related applications] This application asserts priority to Japanese Patent Application JP2023-157474, filed on September 22, 2023, and incorporates the entire disclosure of Japanese Patent Application JP2023-157474 into this application. Prior Technology

[0002] In the past, when drawing patterns on printed circuit boards, semiconductor substrates, etc. (hereinafter referred to as "substrate"), the following drawing apparatus was used: light was irradiated onto a photosensitive material formed on the substrate, and a pattern was drawn on the photosensitive material. In this kind of drawing apparatus, in order to maintain a constant atmosphere around the substrate, the main parts, such as the substrate holding part and the light irradiation part that irradiates the substrate, are housed in a cover.

[0003] For example, in the exposure apparatus of a direct-drawing type painting device disclosed in Japanese Patent Application Publication No. 2006-235378 (Document 1), a chamber covering the exposure unit and the camera unit is provided, and the chamber is connected to an air conditioning device by a duct. An internal thermometer is installed inside the chamber, and an external thermometer is installed outside the chamber. Then, the air conditioning device is controlled to maintain the temperature inside the chamber at a temperature that is lower than the central value of the ambient temperature of the exposure apparatus by a predetermined offset value.

[0004] However, the temperature difference between the cleanroom where the drawing apparatus is located and the required temperature inside the drawing apparatus is usually small. On the other hand, in order to maintain a constant temperature inside the drawing apparatus, a large amount of air needs to be regulated, thus requiring large and expensive temperature control devices to generate such large amounts of air.

[0005] The purpose of this invention is to reduce the manufacturing cost of the drawing device by adjusting the temperature inside the shroud with an inexpensive component. Summary of the Invention

[0006] One embodiment of the present invention is a drawing apparatus for drawing a pattern on a substrate by irradiating light; the drawing apparatus includes: a holding part for holding the substrate; a light irradiation part for emitting light toward the substrate held by the holding part to draw a pattern on the substrate; a cover for covering the holding part and the light irradiation part; and an air supply part for supplying first air at an adjusted temperature into the cover; the air supply part includes: a temperature regulating part for introducing air outside the cover and generating second air at an adjusted temperature; an intake part for introducing air outside the cover; and a mixing part for mixing the second air guided from the temperature regulating part and the third air guided from the intake part to generate the first air.

[0007] According to one embodiment of the present invention, the temperature inside the control shroud can be adjusted at a low cost, thereby reducing the manufacturing cost of the drawing device.

[0008] The second embodiment of the present invention is a drawing device as described in the first embodiment, wherein the aforementioned air supply unit further comprises: a thermometer for obtaining the temperature of the aforementioned first air; and a temperature control unit for controlling the temperature of the aforementioned second air based on the temperature of the aforementioned first air obtained by the aforementioned thermometer.

[0009] The third embodiment of the present invention is a drawing device as described in the first embodiment (or the second embodiment). The air supply unit further includes a flow control unit that controls the flow rate of at least one of the second and third air according to the target flow rate of the first air.

[0010] The fourth embodiment of the present invention is a drawing device as described in the third embodiment, wherein the aforementioned cover system has: a door that is opened when the aforementioned substrate held by the aforementioned holding portion is replaced; during the period when the aforementioned door is open, the aforementioned flow control portion increases the flow rate of the aforementioned first air.

[0011] The fifth aspect of the present invention is a drawing device as described in aspect one (or any one of aspects one to four), which further includes: another temperature control unit of the same type as the aforementioned temperature control unit; the aforementioned other temperature control unit supplies fourth air with adjusted temperature to the aforementioned light irradiation unit.

[0012] The sixth embodiment of the present invention is a drawing apparatus as described in any one of embodiments one to five, further comprising: a moving mechanism that moves at least one of the aforementioned holding portion and the aforementioned light irradiation portion in a direction parallel to the aforementioned substrate held by the aforementioned holding portion, thereby moving the aforementioned holding portion relative to the aforementioned light irradiation portion; the aforementioned light irradiation portion comprises: a drawing head that emits modulated light toward the aforementioned substrate held by the aforementioned holding portion; during the period when the aforementioned drawing head emits modulated light, the aforementioned moving mechanism moves the aforementioned substrate held by the aforementioned holding portion relative to the aforementioned light irradiation portion, thereby drawing a pattern on the aforementioned substrate.

[0013] The above-mentioned objects, as well as other objects, features, features, and advantages, will become clearer with reference to the accompanying drawings and from the following detailed description of the invention. Simple Explanation of the Diagram

[0014] [Figure 1] is a perspective view of the drawing device. [Figure 2] is a diagram showing the structure for supplying air into the enclosure. [Figure 3] is a block diagram showing the configuration used to adjust the temperature of the first air. [Figure 4] is another example of a display tube. Implementation

[0015] Figure 1 is a perspective view of a drawing apparatus 1 according to an embodiment of the present invention. The drawing apparatus 1 irradiates a generally beam-shaped light source with spatial modulation onto a photosensitive material forming the upper surface of a substrate 9. Then, it scans the irradiated area on the substrate 9 to draw a pattern. The drawing apparatus 1 is a so-called direct drawing apparatus. In Figure 1, the three mutually orthogonal directions are shown by arrows as the X, Y, and Z directions. In the example shown in Figure 1, the X and Y directions are mutually perpendicular horizontal directions, and the Z direction is a vertical direction (i.e., the up-down direction).

[0016] The substrate 9 is, for example, a printed wiring substrate used to manufacture a generally rectangular flat plate. On the main surface of the +Z side of the substrate 9 (hereinafter also referred to as "upper surface 91"), a resist film formed of a photosensitive material is provided on a copper layer. In the drawing apparatus 1, a circuit pattern (i.e., an image with a circuit pattern) is drawn on the resist film of the substrate 9. Furthermore, the type and shape of the substrate 9 can be varied in various ways.

[0017] The drawing device 1 includes a stage 21, a stage moving mechanism 22, an alignment part 3, a light irradiation part 4, a base 5, a cover 6, and an air supply part 7. For easy understanding of the drawings, the shape of the cover 6 and the tubes 73 and 74 described later are shown by two-point chain lines in Figure 1, and the various components housed inside the cover 6 are shown by solid lines.

[0018] The cover 6 is a frame that houses the stage 21, the stage moving mechanism 22, the alignment part 3, the light irradiation part 4, and the base 5 within an internal space 60. The internal space 60 of the cover 6 is isolated from the external space of the cover 6. In the example shown in Figure 1, the cover 6 is approximately cuboid in shape, with its length in the Y direction being longer than its length in the X direction. Furthermore, a step is provided on the upper surface of the cover 6 (i.e., the +Z side surface), and the +Y side portion of this upper surface is located further +Z than the -Y side portion.

[0019] Platform 21 is a generally rectangular flat plate component, positioned below the alignment section 3 and the light irradiation section 4 (i.e., the -Z side). Platform 21 includes a holding section 25, which holds the substrate 9 in a horizontal position. The holding section 25 is, for example, a vacuum chuck, used to adsorb and hold the lower surface of the substrate 9. The holding section 25 may also have a structure other than a vacuum chuck, or it may be, for example, a mechanical chuck. The upper surface 91 of the substrate 9 placed on the holding section 25 is perpendicular to the Z direction and generally parallel to the X and Y directions.

[0020] The stage moving mechanism 22 is a moving mechanism that moves the stage 21 relative to the alignment part 3 and the light irradiation part 4 in a horizontal direction (that is, in a direction substantially parallel to the upper surface 91 of the substrate 9). The stage moving mechanism 22 includes a first moving mechanism 23 and a second moving mechanism 24. The second moving mechanism 24 supports the stage 21 from below and moves the stage 21 linearly along the guide rail in the X direction. The first moving mechanism 23 supports the second moving mechanism 24 from below and moves the stage 21 and the second moving mechanism 24 together linearly along the guide rail in the Y direction. The drive source for the first moving mechanism 23 and the second moving mechanism 24 is, for example, a linear servo motor or a structure in which a motor is mounted on a ball screw. The structure of the first moving mechanism 23 and the second moving mechanism 24 can also be modified in various ways.

[0021] The drawing apparatus 1 may also include a stage rotation mechanism, which rotates the stage 21 with a rotation axis extending in the Z direction as its center. Furthermore, the drawing apparatus 1 may also include a stage lifting mechanism, which moves the stage 21 in the Z direction. The stage rotation mechanism can be, for example, a servo motor. The stage lifting mechanism can be, for example, a linear servo motor. The structures of the stage rotation mechanism and the stage lifting mechanism can also be modified in various ways.

[0022] The platform moving mechanism 22 is mounted on the upper surface of the base 5 and supported from below by the base 5. The base 5 is, for example, generally rectangular, with its length in the Y direction being longer than its length in the X direction. The base 5 illustrated in Figure 1 includes an upper plate portion 51, a pedestal portion 52, and a plurality of legs 53. The upper plate portion 51 is a generally flat member that extends approximately perpendicular to the Z direction. The top view of the upper plate portion 51 (i.e., the shape viewed from the +Z side) is, for example, generally rectangular, with its length in the Y direction being longer than its length in the X direction. The upper surface of the upper plate portion 51 (i.e., the upper surface of the base 5) is a generally flat plane perpendicular to the Z direction.

[0023] The pedestal portion 52 is connected to the lower surface of the upper plate portion 51 and supports the upper plate portion 51 from below. The pedestal portion 52 is, for example, a generally rectangular parallelepiped-shaped member, with its length in the Y direction being longer than its length in the X direction. The plurality of legs 53 are generally columnar members, which are separately arranged and connected to the lower surface of the pedestal portion 52. The plurality of legs 53 extend downward from the lower surface of the pedestal portion 52 and contact the cleanroom floor, supporting the pedestal portion 52 and the upper plate portion 51 of the base 5 and the various components provided on the base 5 from below.

[0024] The alignment unit 3 includes a plurality of alignment cameras 31 (two in the example shown in Figure 1), arranged in the X direction. Each alignment camera 31 is supported above the stage 21 and the stage movement mechanism 22 by a support 40, which spans the stage 21 and the stage movement mechanism 22. The support 40 is a gate-shaped component (a so-called gantry), spanning the stage 21 and the stage movement mechanism 22, and is erected from the upper surface of the base 5.

[0025] Two alignment cameras 31 are mounted on the +Y side of the support 40. Of the two alignment cameras 31, for example, one is fixed to the support 40, while the other is movable in the X direction on the support 40. This allows the distance between the two alignment cameras 31 in the X direction to be changed. Furthermore, the alignment unit 3 may have one or more alignment cameras 31.

[0026] Each alignment camera 31 captures alignment marks (not shown), which are pre-set on the upper surface 91 of the substrate 9. In the drawing apparatus 1, the substrate 9 is aligned (that is, the relative position of the substrate 9 with respect to the drawing head 41 is corrected) based on the image of the alignment marks obtained by the alignment camera 31.

[0027] The light irradiation unit 4 includes: a plurality of (six in the example shown in Figure 1) drawing heads 41 arranged in the X direction; and a housing 42 that houses the drawing heads 41. The plurality of drawing heads 41 have substantially the same structure. Each drawing head 41 is equipped with a spatial light modulator and illuminates the modulated (i.e., spatially modulated) light downwards from the opening of the housing 42. The spatial modulation can be two-dimensional or one-dimensional. Each drawing head 41 is supported above the stage 21 and the stage moving mechanism 22 by the aforementioned support 40. The six drawing heads 41 are mounted on the side of the support 40 on the -Y side.

[0028] The six drawing heads 41 are arranged in a generally parallel and generally straight line in the X direction. The positions of the six drawing heads 41 in the Y and Z directions are approximately the same. In addition, the plurality of drawing heads 41 do not necessarily have to be arranged in a straight line, but can also be arranged, for example, in an alternating pattern. Furthermore, the number of drawing heads 41 in the light irradiation section 4 can be one or more.

[0029] In the drawing apparatus 1, a pattern is drawn on the substrate 9 using a so-called multi-pass method. Specifically, while modulated light is irradiated onto the upper surface 91 of the substrate 9 by a plurality of drawing heads 41 of the light irradiation unit 4, the substrate 9 is moved in the Y direction and passes under the drawing heads 41 by the first moving mechanism 23 of the stage moving mechanism 22. In this way, the irradiated area of ​​the light from the plurality of drawing heads 41 is scanned on the substrate 9 in the Y direction, thereby drawing the substrate 9. Thus, while each drawing head 41 emits modulated light toward the substrate 9 held by the holding unit 25, the substrate 9 is moved relative to the light irradiation unit 4, thereby drawing a pattern on the substrate 9.

[0030] Next, the substrate 9 is moved step-shifted in the X direction by the second moving mechanism 24 to a predetermined distance. Then, the substrate 9 is moved in the Y direction by the first moving mechanism 23 and light is irradiated onto the substrate 9 from the drawing head 41, which moves parallel to the substrate 9 in the Y direction, thereby drawing the substrate 9. In the drawing apparatus 1, the substrate 9 is alternately irradiated with light while moving in the Y direction and the substrate 9 is moved step-shifted in the X direction, thereby drawing a pattern on the substrate 9. In the following description, the Y direction is also referred to as the "main scanning direction" or simply the "scanning direction", and the X direction is also referred to as the "sub-scanning direction". The main scanning direction and the sub-scanning direction are directions that are substantially parallel to the upper surface 91 of the substrate 9. In the stage moving mechanism 22, the first moving mechanism 23 is the main scanning mechanism, which moves the stage 21 relative to the drawing head 41 in the main scanning direction. The second moving mechanism 24 is the sub-scanning mechanism, which moves the stage 21 relative to the drawing head 41 in the sub-scanning direction.

[0031] Furthermore, in the drawing apparatus 1, the substrate 9 can also be drawn using a single-pass method (also known as a one-pass method). This single-pass method completes the drawing of the pattern on the substrate 9 by moving the substrate 9 relative to the drawing head 41 only once in the Y direction. In this case, during the drawing of the pattern, the sub-scanning of the substrate 9 (i.e., the step-by-step movement towards the X direction) performed by the second moving mechanism 24 is not performed. That is, the stage moving mechanism 22 is a scanning mechanism that moves the stage 21 relative to the drawing head 41 in at least the scanning direction.

[0032] In the drawing apparatus 1, a door 63 is provided at the -Y side end (i.e., the end on the scanning direction side) of the cover 6, for moving the substrate 9 in and out. The door 63 is used when moving the substrate 9 into the internal space 60 of the cover 6 and when moving the substrate 9 out of the internal space 60. Specifically, the stage 21 moves further -Y than the alignment part 3 and the light irradiation part 4, and opens the door 63 near the end of the internal space 60 on the -Y side, through which the substrate 9 is removed from the holding part 25 of the stage 21 and placed onto the holding part 25. The movement of the substrate 9 in and out can be performed by an operator or automatically by a transport device. The door 63 is provided on the upper surface and the -X side of the cover 6. The configuration and shape of the door 63 can be varied. In the following description, unless otherwise specified, the door 63 is in a closed state.

[0033] The air supply port 64 is located at the end of the +Y side of the cover 6 (i.e., the end on the other side of the scanning direction). In the example shown in FIG1, the air supply port 64 is located on the side of the +Y side of the cover 6. The air supply port 64 is located on the side of the +Y side of the cover 6, above the upper plate portion 51. Furthermore, the number of air supply ports 64 may be two or more.

[0034] The air supply unit 7 includes two temperature control units 71a and 71b, an air intake unit 72, and two pipes 73 and 74. The air supply port 64 is connected to the temperature control unit 71a and the air intake unit 72 via the pipe 73. The temperature control unit 71a introduces air from outside the enclosure 6 and generates air with adjusted temperature, then guides this air into the pipe 73. "Introducing air from outside the enclosure 6" means introducing air from the cleanroom where the drawing device 1 is installed. The air intake unit 72 also introduces air from outside the enclosure 6 and guides this air into the pipe 73. The air supplied from the temperature control unit 71a and the air supplied from the air intake unit 72 are mixed in the pipe 73 and then guided to the air supply port 64.

[0035] As a temperature control unit 71a, a known temperature adjustment device, such as a heat pump or Peltier type, can be used (the same applies to temperature control unit 71b). Air supplied from the air supply port 64 to the internal space 60 of the cover 6 flows in the -Y direction. The air system is mainly held above the substrate 9 on the platform 21 and discharged from an opening (not shown) on the -Y side of the cover 6, and is recovered as needed. The air supply port 64 can also be provided on the side of the end of the cover 6 on the -Y side, or on the upper surface of the cover 6.

[0036] The temperature control unit 71b is connected to the housing 42 of the light irradiation unit 4 via a pipe 74. Specifically, the pipe 74 branches and connects to the +X and -X sides of the housing 42. The temperature control unit 71b supplies temperature-adjusted air into the light irradiation unit 4. This maintains a constant temperature for the optical elements within each drawing head 41.

[0037] Figure 2 shows the configuration of the air supply unit 7 that supplies air to the hood 6. As described above, the air in the cleanroom is supplied to the hood 6 while its temperature is adjusted by the temperature control unit 71a, the intake unit 72, and the pipe 73. The pipe 73 includes: a pipe 731 connected to the temperature control unit 71a; a pipe 732 connected to the intake unit 72; a connecting part 733 connecting the pipes 731 and 732; and a pipe 734 connecting the hood 6 and the connecting part 733. The temperature control unit 71a includes, for example, a heat pump using a refrigerant and a fan. The temperature control unit 71a adjusts the temperature of the air in the cleanroom introduced by the fan and guides it to the pipe 731. The temperature control unit 71a can also lower the temperature of the intake air and raise the temperature of the intake air. The intake unit 72 has a fan and directly guides the air in the cleanroom introduced by the fan to the pipe 732.

[0038] In the connecting part 733, the air guided from the temperature regulating part 71a and the air guided from the intake part 72 are combined and mixed in the pipe 734 before being guided into the cover 6. That is, the pipe 734 functions as a mixing part, which mixes the air guided from the temperature regulating part 71a and the air guided from the intake part 72. Hereinafter, the air supplied to the cover 6 from the pipe 734 is referred to as "first air", the air introduced from the temperature regulating part 71a into the pipe 731 is referred to as "second air", and the air introduced from the intake part 72 into the pipe 732 is referred to as "third air".

[0039] The temperature control unit 71a and the air intake unit 72 are equipped with filters to remove particulate matter, delivering clean second air and clean third air. This results in clean first air. The filter can also be located further downstream of the connecting part 733. The filter can also be located at any position that ensures the first air is clean, such as between the air intake of the temperature control unit 71a and the connecting part 733, or between the air intake of the air intake unit 72 and the connecting part 733, or between the connecting part 733 and the vicinity of the air supply port 64 inside the cover 6.

[0040] The first thermometer 741 is located in the tube 734 near the cover 6, and measures the temperature of the first air flowing within the tube 734. The first thermometer 741 may also be located near the air supply port 64. The second thermometer 742 is located in the tube 732, and measures the temperature of the third air flowing within the tube 732. The second thermometer 742 may also be located on the intake side of the intake section 72.

[0041] As described above, in the drawing device 1, a first type of air is supplied into the hood 6, which is a mixture of a second type of air supplied from the temperature control unit 71a and a third type of air supplied from the suction unit 72. Typically, the temperature difference between the cleanroom and the hood 6 is small. On the other hand, in order to adjust the temperature inside the hood 6 and suppress the entry of particles into the hood 6, air needs to be supplied into the hood 6 at a certain flow rate (i.e., the amount of air flowing per unit time). However, if a commercially available temperature control device that can ensure sufficient flow rate is used as the temperature control unit 71a, the temperature adjustment capability is excessive. In particular, a large temperature control device is required to obtain a sufficient amount of clean air after passing through a particulate-removing filter.

[0042] In the drawing apparatus 1, an inexpensive temperature control device, which cannot guarantee sufficient airflow when used alone, is used as the temperature control unit 71a. Then, the second air supplied from the temperature control unit 71a is mixed with the third air supplied from the intake unit 72 (typically a simple intake fan) which does not have a temperature control function, thereby enabling the temperature inside the shroud 6 to be adjusted inexpensively. As a result, the manufacturing cost of the drawing apparatus 1 can be reduced.

[0043] The drawing apparatus 1 also includes a separate temperature control unit 71b for cooling the light irradiation unit 4. The temperature control unit 71b supplies a fourth type of air, adjusted to the correct temperature, to the light irradiation unit 4. The temperature control units 71a and 71b are of the same model. "Same model" means that they can be ordered without distinction upon acquisition (except for minor options that do not affect performance), thus reducing the purchase price. By using the same model for the temperature control units 71a and 71b, the manufacturing cost of the drawing apparatus 1 can be further reduced.

[0044] Figure 3 is a block diagram showing the configuration used to adjust the temperature of the first air. However, as will be described later, all components directly or indirectly connected to the temperature control unit 71a and the intake unit 72 can be omitted. That is, if it is not necessary to control the temperature control unit 71a and the intake unit 72, then the components shown in Figure 3 used to control the temperature control unit 71a and the intake unit 72 are not required. In Figure 3, all components referred to in the plurality of operation examples described below are shown, and components not referred to in each operation example and electrical connections between components can also be appropriately omitted. It can also be interpreted that all components shown in Figure 3 are included in the air supply unit 7.

[0045] Temperature control unit 751 and flow control unit 752 demonstrate functions implemented by a dedicated circuit with arithmetic circuitry, a general-purpose arithmetic unit (i.e., a computer), or a combination of a dedicated circuit and a computer. The signal output from temperature control unit 751 is input to temperature control unit 71a to control the temperature of the second air supplied from temperature control unit 71a.

[0046] The signal output from the flow control unit 752 is input to the temperature control unit 71a and / or the intake unit 72, and controls the flow rate of the second air and / or the third air. The signal displaying the temperature of the first air obtained by the first thermometer 741 is input to the temperature control unit 751. The signal displaying the temperature of the first air can also be input to the flow control unit 752. The signal displaying the temperature of the third air obtained by the second thermometer 742 is input to the temperature control unit 751 as needed. The signal displaying the temperature of the third air can also be input to the flow control unit 752. The third thermometer 743 is installed inside the cover 6 and obtains the temperature of the air near the holding part 25 of the cover 6. The signal displaying the temperature obtained by the third thermometer 743 is input to the temperature control unit 751. The signal output from the third thermometer 743 can also be input to the flow control unit 752.

[0047] The door sensor 76 outputs the following signal: indicating that the door 63 of the cover 6 is open when the substrate 9 held by the holding part 25 is replaced; this signal is input to the flow control unit 752. When the door 63 opens and closes automatically, the control signal indicating that the door 63 is open can also replace the signal from the door sensor 76 and be input to the flow control unit 752. The temperature control unit 751 is connected to the flow control unit 752 and adjusts the temperature of the second air and the flow rate of the first air. In Figure 3, the temperature control unit 751 and the flow control unit 752 are shown separately as functions; however, the temperature control unit 751 and the flow control unit 752 can also be highly interconnected and do not need to be clearly distinguished as electrical circuits (or programs).

[0048] Next, a first example of supplying first air into the cover 6 of the drawing device 1 will be described. In this first example, the target temperature and target flow rate (i.e., target air volume) of the first air have been preset. Furthermore, the temperature of the second air supplied from the temperature control unit 71a can be adjusted, but the flow rate of the second air supplied from the temperature control unit 71a is constant. The flow rate of the third air supplied from the intake unit 72 is fixed as the amount obtained by subtracting the flow rate of the second air from the target flow rate of the first air.

[0049] Under the above conditions, in the first operating example, based on the temperature of the third air (i.e., the temperature of the air in the cleanroom) obtained by the second thermometer 742 and the temperature of the first air obtained by the first thermometer 741, feedback control is performed in a manner that reduces the difference between the temperature of the first air and the target temperature: the temperature of the second air is adjusted by the temperature control unit 751. Furthermore, various known controls can also be used as feedback control. In the above control, since the temperature inside the cleanroom is utilized, even if the temperature of the air near the intake unit 72 changes significantly, the temperature of the first air is quickly adjusted to the target temperature.

[0050] In the second operating example, under the premise of the first operating example, instead of measuring the temperature of the third air, feedback control is performed solely based on the temperature of the first air obtained from the first thermometer 741 to reduce the difference between the temperature of the first air and the target temperature. The temperature control unit 751 adjusts the temperature of the second air. That is, the second thermometer 742 is not used. In the second operating example, the necessary components are simplified, and the operation is also simplified.

[0051] In the third operation example, the target temperature of the first air has been preset. On the other hand, the target flow rate of the first air is set to a minimum value, but is not fixed to a constant value. The temperature of the second air supplied from the temperature control unit 71a can be adjusted, and the flow rate of the second air supplied from the temperature control unit 71a can also be adjusted. The flow rate of the third air supplied from the intake unit 72 is fixed.

[0052] Under the above conditions, in the third operation example, based on the temperature of the third air obtained by the second thermometer 742 and the temperature of the first air obtained by the first thermometer 741, feedback control is performed to reduce the difference between the temperature of the first air and the target temperature: the temperature control unit 751 adjusts the temperature of the second air supplied from the temperature regulating unit 71a, and the flow control unit 752 adjusts the flow rate of the second air. At this time, the temperature and flow rate of the second air are determined according to a constraint condition and in a manner that minimizes the power consumption in the temperature regulating unit 71a, the constraint condition being that the flow rate of the first air is not lower than a minimum value.

[0053] In any of the above-described examples, the temperature obtained by the third thermometer 743 can be used to replace the first thermometer 741. Since the third thermometer 743 obtains the temperature of the air near the holding part 25, even if there is a temperature difference between the first air and the air near the holding part 25, better control of the temperature and / or flow rate of the first air can be achieved by using the third thermometer 743.

[0054] In the fourth operation example, while adjusting the temperature of the first air as described in the various operation examples above and replacing the substrate 9, the flow rate of the first air is increased by the flow control unit 752 during the period when the door 63 of the cover 6 is open. That is, during the period when the door 63 is open, a signal is input from the door sensor 76 to the flow control unit 752, and the flow control unit 752 increases the flow rate of the second air delivered from the temperature control unit 71a. The flow control unit 752 can also increase the flow rate of the third air delivered from the intake unit 72. In this way, during the period when the flow rate of the first air is increased and the door 63 is open, particles are suppressed from entering through the door 63 and the temperature inside the cover 6 is maintained.

[0055] The signal from the door sensor 76 can also be input to the temperature control unit 751; or, the flow rate determined by the flow control unit 752 can also be input to the temperature control unit 751. The temperature control unit 751 performs temperature control of the temperature adjustment unit 71a while referring to the flow rate change, thereby increasing the flow rate of the first air and setting the first air to an appropriate temperature more quickly.

[0056] The temperature adjustment mechanism within the hood 6 can be modified in various ways. For example, when the flow rate of the intake section 72 is set to a fixed value and the temperature and flow rate of the temperature control section 71a have been pre-adjusted, the first thermometer 741, second thermometer 742, third thermometer 743, door sensor 76, temperature control section 751, and flow control section 752 shown in FIG3 can all be omitted. When the temperature of the first air is controlled by feedback to improve the accuracy of the first air temperature, at least the following are required: a first thermometer 741, which acquires the temperature of the first air; and a temperature control section 751, which controls the temperature of the second air based on the temperature of the first air. Furthermore, a third thermometer 743, which acquires the temperature of the air near the holding section 25, can be used instead of the first thermometer 741. The temperature control section 751 can also use the temperatures acquired by the first thermometer 741 and the third thermometer 743. Moreover, when the temperature inside the cleanroom is also used, the temperature acquired by the second thermometer 742 is input to the temperature control section 71a.

[0057] In addition to controlling the temperature of the temperature control unit 71a, when the flow rate is also controlled, the temperature information input to the temperature control unit 71a is also input to the flow control unit 752, or the information is transmitted from the temperature control unit 71a to the flow control unit 752. However, the temperature control unit 751 and the flow control unit 752 do not need to be strictly distinguished physically or functionally.

[0058] The flow control unit 752 controls the flow rate of at least one of the temperature control unit 71a and the intake unit 72 according to a preset target flow rate of the first air or a target flow rate of the first air calculated from a calculation. This allows the flow rate of the first air to be set to an optimal flow rate as needed. This control does not need to be feedback control, but advanced control methods such as feedback control can also be used. To reduce the manufacturing cost of the drawing device 1, it is preferable that the flow rate of only one of the temperature control unit 71a and the intake unit 72 is variable while the flow rate of the other is fixed. Here, "fixed flow rate" means that the flow rate is constant when the resistance of the delivered air is constant.

[0059] The control system that increases the flow rate of the first air during the period when the door 63 is open, upon receiving a signal from the door sensor 76, can be applied to any of the aforementioned controls, and can also be applied to situations where the temperature of the first air is not subject to feedback control. That is, in the drawing device 1, the flow rate of the first air can also be increased during the period when the door 63 is open, independently of adjusting the temperature of the first air, using only the door sensor 76 and the flow control unit 752.

[0060] Figure 4 shows another example of tube 73. Compared to Figure 2, the tube 73 in Figure 4 has a connecting part 733a that functions as a mixing part, which mixes the second air and the third air. Hereinafter, the connecting part 733a will be referred to as the "mixing part 733a". The mixing part 733a is box-shaped, and tubes 731, 732, and 734 are connected to the mixing part 733a.

[0061] A second air system guided by the temperature control unit 71a flows from pipe 731 into mixing section 733a, and a third air system guided by the intake unit 72 flows from pipe 732 into mixing section 733a. The second and third air systems mix to generate first air, which is then discharged into pipe 734. Mixing section 733a can be a simple cavity, or it can have a built-in fan for stirring air, or a plate can be fixed inside, which mixes the air while changing the direction of airflow. Thus, mixing sections 733a of various shapes can exist in pipe 73.

[0062] Furthermore, from the viewpoint of reducing the air supplied to the housing 6, the following structure can also be adopted: narrowing the space for airflow within the housing 6. Specifically, the outer periphery of the upper surface of the upper plate portion 51 in FIG1 is made to contact the inner surface of the housing 6 almost entirely, and the first air supplied to the housing 6 flows only above the upper plate portion 51 in the internal space 60. This reduces the flow rate of the first air supplied to the housing 6. As a result, the temperature control capability required for the temperature control unit 71a can be further reduced, thereby further reducing the manufacturing cost of the drawing device 1. In addition, to ensure uniform airflow in the internal space 60, it is preferable to provide an air diffuser (for example, a plate with numerous holes and perpendicular to the flow of the first air) near the air supply port 64.

[0063] In the drawing apparatus 1, the position of the holding part 25 may be fixed and the light irradiation part 4 may be moved relative to the holding part 25, thereby drawing the substrate 9. That is, the drawing apparatus 1 is provided with a moving mechanism that moves at least one of the holding part 25 and the light irradiation part 4 in a direction parallel to the substrate 9 held by the holding part 25 (i.e., in a direction parallel to the upper surface 91), thereby moving the holding part 25 relative to the light irradiation part 4. Of course, both the holding part 25 and the light irradiation part 4 may also be moved in a direction parallel to the substrate 9. Furthermore, the drawing apparatus 1 may also be a device without the moving mechanism 22.

[0064] The drawing apparatus 1 is not limited to a so-called direct drawing apparatus. The air supply unit 7 can be used in various apparatuses that draw patterns on the substrate 9 by irradiating light. The air supply unit 7 can be used in apparatuses that irradiate light onto a patterned mask, irradiate the substrate with light passing through the mask, and thereby draw patterns on the substrate 9. Thus, as the light irradiation unit 4 in the drawing apparatus 1, it is possible to employ various configurations that draw patterns on the substrate 9 by emitting light toward the substrate 9 held by the holding unit 25.

[0065] The substrate 9 is not limited to printed wiring substrates; it can also be a glass substrate for photomask substrates or a substrate for other purposes.

[0066] The cover system for supplying the first air only needs to cover at least the retaining part 25 and the light irradiation part 4. For example, an inner cover can be provided inside the cover 6 in FIG1, which covers the retaining part 25 and the light irradiation part 4, and the first air is supplied to the inner cover. "Covering the retaining part 25 and the light irradiation part 4" does not mean completely isolating the outside and inside of the cover, but means covering the retaining part 25 and the light irradiation part 4 in a way that allows (almost) all the air inside the cover to be used as the first air.

[0067] The air supply unit 7, which supplies the first air at an adjusted temperature to the inside of the enclosure 6, can be further modified in various ways. For example, when it is not necessary to normally set the flow rate of the first air to be higher than the flow rate of the second air supplied from the temperature control unit 71a, the suction unit 72 does not need to operate normally. For example, the suction unit 72 may operate only when the door 63 is open. When the temperature relationship between the air inside the enclosure 6 and the air temperature in the cleanroom is constant, the temperature control unit 71a may only have a cooling function or a heating function.

[0068] The above-mentioned implementation forms and the components in each variation can be appropriately combined as long as they do not contradict each other.

[0069] Although the invention has been described and illustrated in detail, these descriptions are illustrative and not limiting. Therefore, various variations and configurations are to be considered without departing from the scope of the invention.

[0070] 1: Depicting device 3: Alignment 4: Light Illumination Section 5:Abutment 6: Cover 7: Air Supply Department 9:Substrate 21: Taiwan 22: Taiwan Mobile Agency 23: First moving mechanism 24: Second moving mechanism 25: Maintaining section 31: Aim at the camera 40: Support section 41: Describing the head 42: Shell 51: Upper plate part 52:pedestal part 53: Feet 60: Interior Space 63: Door 64: Air supply port 71a, 71b: Temperature control section 72: Inhalation section 73,74,731,732,734: pipe 76: Door Sensor 91: Upper surface 733: Connecting part 733a: Mixing section (connection section) 741: First Thermometer 742: Second Thermometer 743: Third Thermometer 751: Temperature Control Department 752: Flow Control Department

Claims

1. A drawing apparatus for drawing a pattern on a substrate by irradiating light; the drawing apparatus comprising: a holding portion for holding the substrate; a light irradiation portion for emitting light toward the substrate held by the holding portion, thereby drawing a pattern on the substrate; a cover for covering the holding portion and the light irradiation portion; and an air supply portion for supplying first air at an adjusted temperature into the cover; the air supply portion comprising: a temperature regulating portion for introducing air outside the cover and generating second air at an adjusted temperature; a suction portion for introducing air outside the cover; a mixing portion for mixing the second air guided from the temperature regulating portion and the third air guided from the suction portion to generate the first air; and a flow control portion for controlling the flow rate of at least one of the second air and the third air according to a target flow rate of the first air; the cover comprising: a door for opening when replacing the substrate held by the holding portion; during the period when the door is open, the flow control portion increases the flow rate of the first air.

2. The drawing apparatus as described in claim 1, wherein the aforementioned air supply unit further comprises: a thermometer for obtaining the temperature of the aforementioned first air; and a temperature control unit for controlling the temperature of the aforementioned second air based on the temperature of the aforementioned first air obtained by the aforementioned thermometer.

3. The drawing device as described in claim 1, further comprising: a door sensor that outputs a signal indicating that the door has been opened when the door of the aforementioned cover is opened; and a flow control unit that increases the flow rate of the aforementioned second air when the signal from the aforementioned door sensor is input.

4. The drawing apparatus as described in claim 1, further comprising: another temperature control unit of the same type as the aforementioned temperature control unit; the aforementioned other temperature control unit supplies fourth air with adjusted temperature to the aforementioned light irradiation unit.

5. The drawing apparatus as described in any one of claims 1 to 4, further comprising: a moving mechanism for moving at least one of the holding portion and the light irradiation portion in a direction parallel to the substrate held by the holding portion, thereby moving the holding portion relative to the light irradiation portion; the light irradiation portion comprising: a drawing head for emitting modulated light toward the substrate held by the holding portion; during the period when the drawing head emits modulated light, the moving mechanism moves the substrate held by the holding portion relative to the light irradiation portion, thereby drawing a pattern on the substrate.

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