System and working method for high-resolution reflection tomographic imaging

Abstract

This invention provides a high-resolution reflective computed tomography system and method. The high-resolution reflective computed tomography system of this invention may include: an objective lens; a telescope lens; a camera; an illumination element for introducing light having temporal coherence and spatial incoherence; and a retroreflective surface element for splitting the light into a sample beam and a reference beam between the telescope lens and the camera, such that the sample beam and the reference beam emitted from the sample cause interference for computed tomography.

Description

Technical Field

[0001] This invention relates to a high-resolution reflective computed tomography system and its operating method. Prior Technology

[0002] Optical inspection technology is essential in the manufacturing and quality assurance processes of semiconductor and display devices. This technology provides a non-destructive method for assessing product integrity and quality, helping to ensure performance and reliability. Two core technologies are confocal microscopy and white light interferometry (WLI). This technology enables high-resolution imaging and surface analysis, thus allowing for precise inspection of device structures and materials. Confocal microscopy offers the advantages of providing depth sectioning and improved resolution for detailed defect inspection. On the other hand, white light interferometry provides accurate three-dimensional surface tomography and determines thin film thickness, which is particularly important for the inspection layers of semiconductors and display devices.

[0003] Depth resolution reflectance measurements are primarily based on three techniques: white-light interferometry, confocal microscopy (or confocal reflection microscopy), and optical coherence tomography (OCT). Confocal microscopy and OCT rely heavily on focused scanning, which is slow and difficult to implement. This limitation necessitates the development of methods for acquiring the entire field of view without scanning in white-light interferometry. As shown in Figures 1a and 1b, white-light interferometry is based on two interferometer structures. The first structure uses a special objective lens called a Mirau objective (as shown in Figure 1b). However, the Mirau objective has limited resolution and lacks aberration correction. Furthermore, for commercial use, the Mirau objective can only be used for visible light wavelengths. When using a standard objective lens, an alternative structure is the Linnik interferometer structure (as shown in Figure 1a). This setup uses two objective lenses around a beam splitter to generate the sample beam and the reference beam. While this structure offers flexibility in optics selection, it requires precise alignment and may not be compatible with all microscopes.

[0004] Confocal microscopy utilizes point illumination and a pinhole on an optical conjugate plane in front of the detector to remove defocusing signals. This results in high-resolution images and three-dimensional surface analysis. However, the point-unit scanning process makes it slower than other imaging techniques. White light interferometry uses white light interferometry to determine surface height with nanometer precision. However, its accuracy is affected by variations in surface reflectivity, and therefore may not provide adequate results on surfaces with high optical roughness or high reflectivity. Recently, although quantitative phase imaging techniques have been explored in the field of reflection geometry, spatially and temporally coherent light remains unavailable for depth-selective imaging. Summary of the Invention

[0005] The demand for high-resolution non-destructive testing using computed tomography (CT) is increasing. In addition to surface profiling, inspection systems need to provide three-dimensional internal images of semiconductors and display devices. This allows for the non-destructive inspection of multilayer structures. Furthermore, the ability to quantitatively analyze properties at the nanometer level, increased automation, and faster inspection speeds are key features addressing the challenges of continuously shrinking device sizes and increasingly complex structures. In short, to keep pace with the rapid development of optical inspection technologies in the semiconductor and display industries, there is a need for more detailed insights into device structures and materials, enabling faster and more efficient delivery.

[0006] Therefore, the object of the present invention is to provide a system in which light with temporal coherence and spatial incoherence is applied for quantitative phase imaging determination of reflected signals. The quantitative phase image information provides surface profile information of the reflecting surface. This can be achieved by generating a reference beam in a conjugate image plane remote from the sample. Off-axis detection can be used to determine the signal in a single step. The structure of the present invention eliminates the need for a specific objective lens and can be designed to be additionally located at the camera port of all microscopes. By using a high numerical aperture objective lens in conjunction with light having temporal coherence and spatial incoherence to scan the sample, objective lens, or virtual focusing lens along the axial direction, optical slicing functions for synthesizing three-dimensional object tomographic reconstruction can be performed, thus enabling quantitative phase imaging of optical slices at various axial positions.

[0007] This invention provides a high-resolution reflective computed tomography system and method.

[0008] The high-resolution reflective tomography system of the present invention may include: an object lens; a telescope lens; a camera; an illumination element for introducing light having temporal coherence and spatial incoherence; and a retroreflective surface element for dividing the light into a sample beam and a reference beam between the telescope lens and the camera, such that the sample beam from the sample and the reference beam cause interference for tomography.

[0009] The high-resolution reflective tomography system of the present invention includes: a microscope device including an objective lens and a barrel lens, forming a camera port; and a camera device including a camera, which can be mounted and detached from the camera port. The camera device may further include: an illumination element for introducing light having temporal coherence and spatial incoherence; and a retroreflective surface element for dividing the light into a sample beam and a reference beam between the barrel lens and the camera, such that the sample beam from the sample and the reference beam cause interference for tomography.

[0010] The high-resolution reflective computed tomography system of the present invention operates by a high-resolution reflective computed tomography system having an objective lens, a telescope lens, and a camera, and may include the following steps: introducing light having temporal coherence and spatial incoherence through an illumination element; dividing the light into a sample beam and a reference beam through an antireflective surface element between the telescope lens and the camera; and acquiring a three-dimensional image for the computed tomography measurement by the camera based on the interference caused by the sample beam and the reference beam from the sample.

[0011] This invention provides a high-resolution reflective tomography system and its operating method based on an optical setup for quantitative phase imaging of a measurable sample. In the optical setup of this invention, even if the reference beam and the sample beam do not have the same path length, light with temporal coherence and spatial incoherence can be used to induce interference between the reference beam and the sample beam. Therefore, the optical setup of this invention can acquire a three-dimensional image for tomography based on the interference caused by the sample beam and the reference beam. Thus, the optical setup of this invention has the following advantages: First, since the optical setup of this invention uses a universal objective lens, high numerical aperture objectives and immersion objectives can be used. Lenses with spherical aberration correction can also be used for image samples behind coverslips. Second, since reflection is easily induced in the magnified image plane, its setup is simpler compared to the structure of a Linnicke interferometer or a Milau interferometer. Third, since the optical path lengths of the sample beam and the reference beam do not need to be the same, a camera device can be connected to the camera port of a commercial microscope. Simple Explanation of the Diagram

[0012] Figure 1a shows the structure of an existing Linnicke interferometer.

[0013] Figure 1b shows the structure of an existing Milau interferometer.

[0014] Figure 2 is a diagram illustrating the high-resolution reflective computed tomography system of the first embodiment.

[0015] Figure 3 is a diagram illustrating the high-resolution reflective computed tomography system of the second embodiment.

[0016] Figure 4 is a diagram illustrating the high-resolution reflective computed tomography system of the third embodiment.

[0017] Figure 5 is a diagram illustrating the high-resolution reflective computed tomography system of the fourth embodiment.

[0018] Figure 6 is a diagram illustrating the operation of a high-resolution reflective computed tomography system according to several embodiments.

[0019] Figure 7 is an example of a tomographic image of a micro-patterned micro-electrical device acquired by a high-resolution reflective tomography system according to several embodiments. Implementation

[0020] Hereinafter, several embodiments of the present invention will be described with reference to the drawings.

[0021] In this invention, for determining quantitative phase imaging of a sample's reflection, the provided optical setup includes a reference beam remote from the sample on the conjugate imaging plane. Unlike existing white light interferometers or full-field optical interferometric tomography scanners that use light with temporal incoherence and make the paths of the reference beam and sample beam the same, this invention allows light with both spatial incoherence and temporal coherence to induce interference even if the reference beam and sample beam do not have the same path length. Taking advantage of this property, the present invention allows for the movement of the retroreflective surface used to generate the reference beam on the conjugate image plane. This structure can be systematically scaled down to allow for a slightly tilted reference beam capable of measuring off-axis signals. Spatially incoherent light has previously been used to determine interferometer reflectivity, but only in Linnicke interferometer configurations. While off-axis measurement is also disclosed herein, it requires complex optical setups or results in a loss of numerical aperture.

[0022] Figure 2 is a diagram illustrating the high-resolution reflective computed tomography system 100 of the first embodiment.

[0023] Referring to Figure 2, the high-resolution reflective tomography system 100 may include an object lens 110, a barrel lens 120, a camera 130, an illumination element 140, and a retroreflective surface element 150.

[0024] The objective lens 110, the telescope lens 120, and the camera 130 are structural elements used for optical settings in a microscope. The objective lens 110 is adjacent to the sample and can magnify the sample. The telescope lens 120 is located between the objective lens 110 and the camera 130 and can form a sample-related image to the camera 130. The camera 130 can acquire the formed image.

[0025] Illumination element 140 can introduce light with temporal coherence and spatial incoherence into high-resolution reflective tomography system 100. In one embodiment, as shown, illumination element 140 may include a light source 141 and a mirror 143. Light source 141 can generate light with temporal coherence and spatial incoherence. Mirror 143 can reflect the light emitted from light source 141 toward retroreflective surface element 150. For example, mirror 143 may be positioned opposite retroreflective surface element 150 through a lens 120. Thus, lens 120 can project light from illumination element 140 onto retroreflective surface element 150. In yet another embodiment, although not shown, illumination element 140 may include a beam splitter (not shown) instead of mirror 143. The beam splitter can reflect a portion of the light emitted from light source 141 toward retroreflective surface element 150.

[0026] A retroreflective surface element 150 may be disposed between the lens barrel 120 and the camera 130. In one embodiment, the retroreflective surface element 150 is integrated with the camera sensor of the camera 130 and can be in direct contact with the camera sensor. The retroreflective surface element 150 divides the light emitted from the illumination element 140 into a sample beam and a reference beam, which can cause interference for tomographic measurements. Specifically, the retroreflective surface element 150 can generate a sample beam by providing a portion of the light from the illumination element 140 to the sample through the objective lens 110. The retroreflective surface element 150 reflects corresponding light towards the lens barrel 120, and the corresponding light can be provided to the sample through the lens barrel 120 and the objective lens 110 to generate a sample beam. Thus, the lens barrel 120 can project the sample beam onto the retroreflective surface element 150. Furthermore, the retroreflective surface element 150 can generate a reference beam from the remaining light from the illumination element 140. As a result, although the sample beam and the reference beam have different path lengths, interference can still occur. Thus, the camera 130 can acquire a three-dimensional image for tomographic measurement based on the interference caused by the sample beam and the reference beam. For example, the retroreflective surface element 150 can be selected from a variety of optical elements such as a semi-reflective mirror, a plate beam splitter, a wire grid polarizer, a cubic beam splitter with mirrors, or any other retroreflective surface element.

[0027] Figure 3 is a diagram illustrating the high-resolution reflective computed tomography system 200 of the second embodiment.

[0028] Referring to Figure 3, the high-resolution reflective computed tomography system 200 may include an objective lens 210, a barrel lens 220, a camera 230, an illumination element 240, a retroreflective surface element 250, and a relay lens 260. In one embodiment, the objective lens 210, barrel lens 220, camera 230, and illumination element 240 are actually similar to the objective lens 110, barrel lens 120, camera 130, and illumination element 140 of the first embodiment described above; therefore, detailed descriptions will be omitted.

[0029] A retroreflective surface element 250 may be disposed between the lens barrel 220 and the camera 230. In one embodiment, the retroreflective surface element 250 may be disposed on the conjugate image plane between the lens barrel 220 and the camera 230. The retroreflective surface element 250 divides the light from the illumination element 240 into a sample beam and a reference beam, which can cause interference for tomographic measurements. Specifically, the retroreflective surface element 250 can generate a sample beam by providing a portion of the light from the illumination element 240 to the sample through the objective lens 210. The retroreflective surface element 250 reflects corresponding light towards the lens barrel 220, and the sample beam can be generated by providing corresponding light to the sample through the lens barrel 220 and the objective lens 210. Thus, the lens barrel 220 can project the sample beam onto the retroreflective surface element 250. Furthermore, the retroreflective surface element 250 can utilize the remaining light from the illumination element 240 to generate a reference beam. As a result, although the sample beam and the reference beam have different path lengths, interference can still occur. For example, the retroreflective surface element can be selected from a variety of optical elements such as a semi-reflective mirror, a plate beam splitter, a wire grid polarizer, a cubic beam splitter with a mirror, or any other retroreflective surface element.

[0030] A relay lens 260 may be disposed between the retroreflective surface element 250 and the camera 230. The relay lens 260 can project the interference caused by the sample beam and the reference beam onto the camera sensor of the camera 230. Thus, the camera 230 can acquire a three-dimensional image for tomographic measurement based on the interference caused by the sample beam and the reference beam.

[0031] Figure 4 is a diagram illustrating the high-resolution reflective computed tomography system 300 of the third embodiment.

[0032] Referring to Figure 4, the high-resolution reflective computed tomography system 300 may include an objective lens 310, a barrel lens 320, a camera 330, an illumination element 340, and a retroreflective surface element 350. In one embodiment, the objective lens 310, barrel lens 320, camera 330, and retroreflective surface element 350 may actually be similar to the objective lens 110, barrel lens 120, camera 130, and retroreflective surface element 150 of the first embodiment described above. In this case, the retroreflective surface element 350 is combined with the camera sensor of the camera 330 and can directly contact the camera sensor. On the other hand, as shown in the figure, in one embodiment, the object lens 310, the barrel lens 320, the camera 330, and the retroreflective surface element 350 can actually be the same as the object lens 210, the barrel lens 220, the camera 230, and the retroreflective surface element 250 in the second embodiment described above. In this case, the retroreflective surface element 350 can be disposed on the conjugate image plane between the barrel lens 320 and the camera 330, and the relay lens (not shown) can be additionally disposed between the retroreflective surface element 350 and the camera 330.

[0033] Illumination element 340 can introduce light with temporal coherence and spatial incoherence into the high-resolution reflective computed tomography system 300. In one embodiment, as shown, illumination element 340 may include light source 341, mirror 343, and wavefront formor 345. In one embodiment, light source 341 and mirror 343 are actually similar to light source 141 and mirror 143 of the first embodiment, respectively, therefore, detailed description will be omitted. Wavefront formor 345 may be disposed between light source 341 and mirror 343. Wavefront formor 345 can be used to modulate illumination patterns to minimize aberrations in the high-resolution reflective computed tomography system 300 or to minimize the reduction of optical transmission function of the high-resolution reflective computed tomography system 300. In yet another embodiment, although not shown, illumination element 340 may include a beam splitter (not shown) instead of mirror 343. The beam splitter may reflect a portion of the light emitted from light source 341 toward retroreflective surface element 350.

[0034] Figure 5 is a diagram illustrating the high-resolution reflective computed tomography system 400 of the fourth embodiment.

[0035] Referring to Figure 5, the high-resolution reflective computed tomography system 400 includes a microscope device 401 and a camera device 405, which can be attached to and detached from the microscope device 401. The microscope device 401 may include a microscope body 402 and a first camera port 403. The microscope body 402 may include an object lens 410 and a tube lens 420. Optionally, the microscope body 402 may also include at least one mirror 425 between the object lens 410 and the tube lens 420. The first camera port 403 may be formed on one side of the microscope body 402. The camera device 405 may include a camera body 406 and a second camera port 407. The camera body 406 may include a camera 430, an illumination element 440, a retroreflective surface element 450, and a relay lens 470. The second camera port 407 may be formed on one side of the camera body 406. The second camera port 407 can be installed and removed from the first camera port 403. With the second camera port 407 installed in the first camera port 403, the camera device 405 can be combined with the microscope device 401.

[0036] The objective lens 410, the telescope lens 420, and the camera 430 are structural elements used for optical settings in a conventional microscope. The objective lens 410 is adjacent to the sample and magnifies it. The telescope lens 420 is located between the objective lens 410 and the camera 430 and can project a sample-related image to the camera 430. The camera 430 can acquire the projected image.

[0037] Illumination element 440 can introduce light with temporal coherence and spatial incoherence into a high-resolution reflective tomography system 400. In one embodiment, as shown, illumination element 440 may include a light source 441 and a mirror 443. Light source 441 can generate light with temporal coherence and spatial incoherence. Mirror 443 can reflect the light emitted from light source 441 toward retroreflective surface element 450. For example, mirror 443 may be positioned opposite retroreflective surface element 450 with a relay lens 470 in between. Thus, the corresponding relay lens 470 can project light from illumination element 440 onto retroreflective surface element 450. In yet another embodiment, although not shown, illumination element 440 may include a beam splitter (not shown) instead of mirror 443. The beam splitter can reflect a portion of the light emitted from light source 441 toward retroreflective surface element 450. In another embodiment, although not shown, illumination element 440 may also include a wavefront former (not shown). The wavefront former can be positioned between the light source 441 and the mirror 443 or the beam splitter.

[0038] A retroreflective surface element 450 may be disposed between the lens 420 and the camera 430. In one embodiment, the retroreflective surface element 450 is integrated with the camera sensor of the camera 430 and can directly contact the camera sensor. The retroreflective surface element 450 divides the light emitted from the illumination element 440 into a sample beam and a reference beam, which can cause interference for tomographic measurements. Specifically, the retroreflective surface element 450 can generate a sample beam by providing a portion of the light from the illumination element 440 to the sample through the lens 420 and the objective lens 410. The retroreflective surface element 450 reflects corresponding light towards the lens 420, and the objective lens 410 provides corresponding light to the sample to generate the sample beam. Furthermore, the retroreflective surface element 450 can generate a reference beam from the remaining light from the illumination element 440. As a result, although the sample beam and the reference beam have different path lengths, interference can occur. Thus, the camera 430 can acquire a three-dimensional image for tomographic measurements based on the interference caused by the sample beam and the reference beam. For example, the retroreflective surface element 450 can be selected from a variety of optical elements such as a semi-reflective mirror, a plate beam splitter, a wire grid polarizer, a cubic beam splitter with a mirror, or any other retroreflective surface element.

[0039] A relay lens 470 may be disposed between the barrel lens 420 and the retroreflective surface element 450. One of the relay lenses 470 may be disposed between the illumination element 440 and the retroreflective surface element 450. The relay lens 470, together with the barrel lens 420, can project the interference caused by the sample beam and the reference beam onto the camera sensor of the camera 430. Thus, the camera 430 can acquire a three-dimensional image for tomographic measurement based on the interference caused by the sample beam and the reference beam.

[0040] On the other hand, as shown in the figure, in one embodiment, the retroreflective surface element 450 may be disposed on the conjugate image plane between the lens barrel 420 and the camera 430. In this case, an additional relay lens (not shown) may be additionally disposed between the retroreflective surface element 450 and the camera 430. The additional relay lens may be disposed between the retroreflective surface element 450 and the camera 430. The additional relay lens may project the interference caused by the sample beam and the reference beam onto the camera sensor of the camera 430.

[0041] Figure 6 is a diagram illustrating the operation of high-resolution reflective computed tomography systems 100, 200, 300, and 400 according to several embodiments.

[0042] Referring to Figure 6, in step 510, illumination elements 140, 240, 340, and 440 can introduce light with temporal coherence and spatial incoherence. Specifically, light sources 141, 241, 341, and 441 can generate light with temporal coherence and spatial incoherence. Next, mirrors 143, 243, 343, and 443, or beam splitters (not shown), can reflect the light emitted from light sources 141, 241, 341, and 441 toward retroreflective surface elements 150, 250, 350, and 450. Thus, light from illumination elements 140, 240, 340, and 440 can be projected onto retroreflective surface elements 150, 250, 350, and 450.

[0043] Subsequently, in step 520, the retroreflective surface elements 150, 250, 350, and 450 between the lens barrels 120, 220, 320, and 420 and the cameras 130, 230, 330, and 430 can split the light into a sample beam and a reference beam. The retroreflective surface elements 150, 250, 350, and 450 split the light from the illumination elements 140, 240, 340, and 440 into a sample beam and a reference beam, which can cause interference between the sample beam and the reference beam from the sample for tomographic measurements. Specifically, the retroreflective surface elements 150, 250, 350, and 450 can generate a sample beam by providing a portion of the light from the illumination elements 140, 240, 340, and 440 to the sample through the objective lenses 110, 210, 310, and 410. In this design, retroreflective surface elements 150, 250, 350, and 450 reflect corresponding light towards the telescope lenses 120, 220, 320, and 420, respectively. This light, along with the object lenses 110, 210, 310, and 410, provides the corresponding light to the sample to generate a sample beam. Thus, the telescope lenses 120, 220, 320, and 420 can project the sample beam onto the retroreflective surface elements 150, 250, 350, and 450. Furthermore, the retroreflective surface elements 150, 250, 350, and 450 can generate a reference beam using the residual light from the illumination elements 140, 240, 340, and 440. As a result, although the sample beam and the reference beam have different path lengths, interference can occur.

[0044] Then, in step 530, cameras 130, 230, 330, and 430 can acquire a three-dimensional image for computed tomography based on the interference caused by the sample beam and the reference beam from the sample. Some notable advantages of the optical setup of this invention are described below.

[0045] First, numerical aperture. Because the Milau interferometer structure requires a long working distance, it is typically limited by numerical aperture. However, the optical setup of this invention uses a universal objective lens; therefore, high numerical aperture objectives and immersion objectives can be used. Lenses with spherical aberration correction can also be used for image samples behind coverslips.

[0046] Second, robustness of alignment. Because reflections are easily induced on the magnified image plane, its setup is simpler compared to the structure of a Linnick or Milau interferometer. The retroreflective surface elements 150, 250, 350, and 450 are typically set within 100 μm without performance loss; conversely, in the structure of a Linnick or Milau interferometer, the retroreflector should be set with an accuracy of approximately 1 μm.

[0047] Third, the microscope device. Since it is not necessary for the optical path lengths of the sample beam and the reference beam to be the same, as shown in the fourth embodiment, a camera device (camera device 405 in Figure 5) can be installed on the camera port of a commercial microscope (microscope device 401 in Figure 5).

[0048] The novel interferometric method for measuring sample reflectance of the present invention is of great importance in industrial applications. Figure 7 is an example of tomographic images of micro-patterned micro-electrical devices acquired by high-resolution reflective tomographic measurement systems 100, 200, 300, and 400 according to several embodiments.

[0049] This invention operates on electromagnetic waves of any wavelength. For example, compared to using visible light wavelengths, shorter wavelengths such as ultraviolet (UV) can achieve higher imaging resolution. The high numerical aperture and adaptability to use ultraviolet light are particularly useful in the semiconductor industry, where high resolution is especially important. Furthermore, this optical setup is effective in industrial applications such as biological sample observation and display manufacturing, where samples behind glass are measured. Unlike existing Milau interferometers, the optical setup of this invention allows for the correction of spherical aberrations by rotating the correction collar. Another advantage of the optical setup of this invention is that it can be manufactured into a device that can be easily mounted to the camera ports of all microscopes. This feature facilitates simultaneous use with other microscopic inspection methods, thus increasing the versatility and potential of parallel imaging applications.

[0050] In summary, the present invention provides high-resolution reflective computed tomography systems 100, 200, 300, and 400 and their operating methods.

[0051] The high-resolution reflective tomography system 100, 200, 300, 400 of the present invention may include: objective lenses 110, 210, 310, 410; barrel lenses 120, 220, 320, 420; cameras 130, 230, 330, 430; illumination elements 140, 240, 340, 440 for introducing light with temporal coherence and spatial incoherence; and retroreflective surface elements 150, 250, 350, 450, which divide the light into a sample beam and a reference beam between the barrel lenses 120, 220, 320, 420 and the cameras 130, 230, 330, 430, such that the sample beam and the reference beam from the sample cause interference for tomography.

[0052] According to several embodiments, the illumination elements 140, 240, 340, 440 may include: light sources 141, 241, 341, 441 for generating light; and at least one of mirrors 143, 243, 343, 443 or a beam splitter for reflecting light from light sources 141, 241, 341, 441 toward retroreflective surface elements 150, 250, 350, 450.

[0053] According to one embodiment, the lighting element 340 may further include a wavefront shaper 345 disposed between the light source 341 and one of the mirrors 343 or beam splitters.

[0054] According to one embodiment, retroreflective surface elements 150, 350, and 450 can be combined with camera sensors of cameras 130, 330, and 430.

[0055] According to another embodiment, the retroreflective surface element 250 may be disposed on the conjugate image plane between the lens barrel 220 and the camera 230.

[0056] According to another embodiment, the high-resolution reflective tomography system 200 may further include a relay lens disposed between the retroreflective surface element 250 and the camera 230.

[0057] According to several embodiments, retroreflective surface elements 150, 250, 350, and 450 provide partial light to the sample to generate a sample beam and generate a reference beam through the remaining light. Cameras 130, 230, 330, and 430 can acquire three-dimensional images for tomographic measurements based on the interference caused by the sample beam and the reference beam.

[0058] The high-resolution reflective computed tomography system 400 of the present invention may include: a microscope device 401, including an objective lens 410 and a tube lens 420, and having a first camera port 403; and a camera device 405, including a camera 430, which can be mounted and detached from the first camera port 403.

[0059] According to several embodiments, the camera device 405 may further include: an illumination element 440 for introducing light having temporal coherence and spatial incoherence; and a retroreflective surface element 450 for dividing the light between the lens 420 and the camera 430 into a sample beam and a reference beam, such that the sample beam from the sample and the reference beam cause interference for tomographic measurements.

[0060] According to one embodiment, the retroreflective surface element 450 is combined with the camera sensor of the camera 430, and the camera device 405 may also include a relay lens 470 disposed between the lens barrel lens 420 and the retroreflective surface element 450.

[0061] According to another embodiment, the retroreflective surface element 450 is disposed on the conjugate image plane between the lens barrel 420 and the camera 430. The camera device 405 may also include a relay lens 470 disposed between the lens barrel 420 and the retroreflective surface element 450 and a relay lens disposed between the retroreflective surface element 450 and the camera 430.

[0062] The operating method of the high-resolution reflective tomography system 100, 200, 300, 400 of the present invention, having objective lenses 110, 210, 310, 410, barrel lenses 120, 220, 320, 420, and cameras 130, 230, 330, 430, may include: step 510, introducing light with temporal coherence and spatial incoherence through illumination elements 140, 240, 340, 440; step 520, dividing the light into a sample beam and a reference beam through retroreflective surface elements 150, 250, 350, 450 between the barrel lenses 120, 220, 320, 420 and the cameras 130, 230, 330, 430; and step 530, acquiring a three-dimensional image for tomography based on the interference caused by the sample beam and the reference beam from the sample through the cameras 130, 230, 330, 430.

[0063] The various embodiments of the present invention and the terminology used herein are not intended to limit the technology described in this specification to specific implementations, but should be understood to include various modifications, equivalent technical solutions, and / or alternative technical solutions of the corresponding embodiments. In the related descriptions of the drawings, similar element symbols may be used for similar structural elements. Unless otherwise expressly indicated in the context, singular expressions may include plural expressions. In this specification, expressions such as "A or B," "at least one of A and / or B," "A, B, or C," or "at least one of A, B, and / or C" may include all combinations of the projects listed together. Expressions such as "first," "second," "first," or "second" may be used to modify the corresponding structural element, and are not related to order or importance; they are only used to distinguish one structural element from another and do not limit the corresponding structural element. When indicating that a certain (e.g., first) structural element is "connected (at the functional or communication level)" or "linked" to another (e.g., second) structural element, it can mean that the aforementioned structural element is directly connected to the aforementioned other structural element, or that it can be connected through other structural elements (e.g., third structural element).

[0064] According to various embodiments, the structural elements described above may include a singular or plural entity. According to various embodiments, one or more structural elements or steps of the corresponding structural elements may be omitted, or one or more other structural elements or steps may be added. Alternatively or additionally, multiple structural elements may be integrated into a single structural element. In this case, the integrated structural element may perform the same or similar function as performed by the corresponding structural elements of the multiple structural elements prior to the integration of one or more functions of the individual structural elements of the multiple structural elements. According to various embodiments, steps performed by modules, programs, or other structural elements may be performed sequentially, in parallel, repeatedly, or heuristically; or one or more steps may be performed in different sequences or omitted, or one or more other steps may be added.

[0065] 100, 200, 300, 400: High-resolution reflective computed tomography system 110, 210, 310, 410: Objective lenses 120, 220, 320, 420: Lens tube 130, 230, 330, 430: Cameras 140, 240, 340, 440: Lighting elements 141, 241, 341, 441: Light source 143, 243, 343, 425, 443: Mirror 150, 250, 350, 450: Retroreflective surface elements 260: Relay Lens 345: Waveform Former 401: Microscope Apparatus 402: Microscope body 403: First Camera Port 405: Camera Equipment 406: Camera Body 407: Second Camera Port 470: Relay Lens 510, 520, 530: Steps

Claims

1. A high-resolution reflective computed tomography system, comprising an objective lens, a telescope lens, and a camera, wherein, The high-resolution reflective tomography system further includes: an illumination element, including a wavefront former, the illumination element for introducing light with temporal coherence and spatial incoherence formed by the wavefront former; and a retroreflective surface element for dividing the light into a sample beam and a reference beam between the lens barrel and the camera, such that the sample beam from the sample and the reference beam cause interference for tomography, wherein the retroreflective surface element is combined with and in contact with the camera sensor of the camera, and wherein the retroreflective surface element is used to reflect a portion of the first light toward the lens barrel, such that the first light is provided to the sample through the lens barrel and the object lens to generate the sample beam, and the remaining light of the second light other than the first light is used to generate the reference beam, thereby the sample beam and the reference beam having different path lengths.

2. The high-resolution reflectance computed tomography system as described in claim 1, wherein, The lighting element further includes: a light source for generating the light; and at least one of a mirror or a beam splitter for reflecting the light emitted from the light source toward the retroreflective surface element.

3. The high-resolution reflectance computed tomography system as described in claim 2, wherein, The wavefront shaper is positioned between the light source and one of the mirror or the beam splitter.

4. The high-resolution reflectance computed tomography system as described in claim 1, wherein, The camera acquires a three-dimensional image for the tomographic measurement based on the interference caused by the sample beam and the reference beam.

5. A high-resolution reflectance tomography system, comprising: The microscope apparatus includes an objective lens and a tube lens, and has a camera port. The system also includes a camera device, comprising a camera with a camera sensor, detachable from the camera port. The camera device further includes: an illumination element, including a wavefront former, for guiding light with temporal coherence and spatial incoherence formed by the wavefront former; and a retroreflective surface element for dividing the light into a sample beam and a reference beam between the lens barrel and the camera, such that the sample beam from the sample and the reference beam cause interference for tomographic measurements. The retroreflective surface element is combined with and in contact with the camera sensor of the camera, and wherein the retroreflective surface element reflects a portion of the first light toward the lens barrel, such that the first light is provided to the sample through the lens barrel and the object lens to generate the sample beam, and the remaining light of a second light other than the first light is used to generate the reference beam, thereby the sample beam and the reference beam having different path lengths.

6. The high-resolution reflectance computed tomography system as described in claim 5, wherein, The camera device also includes a relay lens, which is disposed between the lens barrel lens and the retroreflective surface element.

7. A method for operating a high-resolution reflective computed tomography system, wherein the system is configured with an objective lens, a telescope lens, and a camera, wherein... The working method includes the following steps: Light with temporal coherence and spatial incoherence, formed by the wavefront shaper, is introduced through an illumination element including a wavefront shaper; The light is divided into a sample beam and a reference beam by an retroreflective surface element between the lens barrel and the camera; and a three-dimensional image for tomographic measurement is acquired by the camera based on the interference caused by the sample beam and the reference beam from the sample, wherein the retroreflective surface element is combined with and in contact with the camera sensor of the camera, and wherein the retroreflective surface element is used to reflect a portion of the first light toward the lens barrel, such that the first light is provided to the sample through the lens barrel and the object lens to generate the sample beam, and the remaining light of the second light other than the first light is used to generate the reference beam, thereby the sample beam and the reference beam having different path lengths.

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