Semiconductor Wafer Box Automated Warehouse Management System and its Operation Method

Abstract

This invention relates to an automated semiconductor wafer cassette storage and management system and its operating method, aiming to solve the problems of low efficiency, high error rate, and difficulty in environmental control inherent in traditional manual management methods. The system utilizes the collaborative operation of multiple components, including automated guided vehicles, overhead cranes, a warehouse management system, barcode readers, sensors, a conveying system, and an operation control system, to achieve automated storage, retrieval, transfer, and management of wafer cassettes. The automated operation significantly improves wafer cassette storage and retrieval efficiency and reduces manual intervention. A comprehensive sensor system and environmental monitoring functions ensure the stability of the wafer cassette storage environment, minimizing human error.

Description

Technical Field

[0001] This invention relates to the field of semiconductor warehousing and retrieval equipment, and more particularly to an automated semiconductor wafer cassette storage and management system and its operation method. Prior Technology

[0002] As a cornerstone of modern information technology, the semiconductor industry plays a crucial role in global economic and technological development. With the continuous advancement of integrated circuit technology, the manufacturing and management of semiconductor wafer cassettes have become increasingly complex and sophisticated. Against this backdrop, automated warehouse management systems for semiconductor wafer cassettes have become key factors in ensuring production efficiency, improving product quality, and reducing costs.

[0003] Traditional semiconductor wafer cask warehousing management relies primarily on manual labor, which presents numerous problems and challenges. Manual operations require significant time and manpower, as workers must manually locate, retrieve, and transport wafer casks. This is not only time-consuming and labor-intensive but also difficult to meet the rapid turnover demands of large-scale production environments. Because semiconductor wafer casks are extremely delicate and fragile, they are easily damaged due to negligence or improper handling during manual operations. Even minor scratches or contamination can render an entire batch of products unusable, resulting in substantial economic losses. Furthermore, manual management struggles to accurately and promptly monitor inventory levels, easily leading to insufficient or excessive inventory. This not only affects production planning but can also result in unnecessary capital tied up.

[0004] Semiconductor wafer cassettes have extremely stringent requirements for their storage environment, including temperature, humidity, and cleanliness. Manual operation makes it difficult to maintain ideal environmental conditions consistently, potentially affecting the quality and performance of the wafer cassettes. Frequent manual operations also increase the risk of workers being exposed to hazardous substances or suffering workplace injuries, and simultaneously increase the likelihood of wafer cassette theft or leakage of confidential information. In the long run, manual operation not only requires significant labor costs but also substantial resources for training and management, resulting in low economic efficiency.

[0005] To address these issues, automated warehouse management systems emerged. Early automation systems primarily focused on improving single functions, such as the application of Automated Storage and Retrieval Systems (AS / RS). While these systems improved efficiency to some extent, they still had many limitations. Early automation systems often operated independently, making seamless integration with other production processes difficult, leading to information silos. Most systems could only execute simple, pre-set instructions, lacking flexibility and adaptability, and unable to cope with complex and ever-changing production demands. Due to technological limitations, early systems had relatively high failure rates and high maintenance costs. Many automated devices could not meet the stringent environmental control requirements of semiconductor wafer storage. Furthermore, early systems did not adequately consider data security and physical security, posing potential security risks.

[0006] With the rapid development of the semiconductor industry, warehouse management systems need to possess excellent scalability to adapt to ever-increasing production capacity and changing technological requirements. While automation levels are continuously improving, the role of humans remains indispensable. Designing a user-friendly human-machine interface to achieve efficient collaboration between humans and machines is a crucial consideration in system design. Ensuring long-term stable operation of highly complex automated systems and achieving rapid fault diagnosis and repair to minimize downtime are significant challenges in system reliability design. Meeting individual needs while achieving standardized system design for compatibility with equipment and systems from different vendors is key to improving system versatility and portability.

[0007] In view of this, how to eliminate the above-mentioned deficiencies is the technical difficulty that the inventor of this case wants to solve; therefore, based on years of experience in related industries, the inventor of this case has devoted himself to research and improvement for many years, and finally successfully developed this case, thus giving birth to this invention to improve its effectiveness. Summary of the Invention

[0008] The purpose of this invention is to provide an automated semiconductor wafer cassette storage management system and method to solve the above-mentioned problems in the prior art.

[0009] The semiconductor wafer cassette automated storage and warehousing management system of the present invention includes:

[0010] Automated Guided Vehicle: Equipped with a positioning and navigation system, and has barcode reading capabilities;

[0011] Overhead crane: Used to move wafer cassettes both vertically and horizontally;

[0012] Warehouse management system: capable of receiving and processing wafer cell location information and status data sent by automated guided vehicles and overhead cranes in real time, and has fault diagnosis and maintenance prompt functions;

[0013] Barcode readers: Installed in key locations in the warehouse, they can automatically scan the identification codes and batch numbers of wafer cassettes;

[0014] Sensors: including height limit detection sensors and environmental monitoring sensors;

[0015] Conveying system: includes conveyor belts and rotary tables connecting automated guided vehicles and overhead cranes, equipped with anti-static protection devices;

[0016] Operation and control system: including control interface and safety light curtain;

[0017] Under the control of the warehouse management system, the automated guided vehicle travels along a predetermined path and scans the identification code of the wafer box at a designated location using a barcode reader. After the information is matched with the warehouse management system, storage and retrieval operations are performed.

[0018] Under the scheduling of the warehouse management system, the overhead crane moves horizontally and vertically to move wafer boxes from one location to another, achieving efficient transfer in conjunction with automated guided vehicles;

[0019] The barcode reader is installed on the running path of the automated guided vehicle and the overhead crane to ensure accurate reading of identification codes and batch information during wafer box storage, retrieval and transfer, and to feed the information back to the warehouse management system in real time;

[0020] The sensors are installed in key locations within the warehouse. Height limit sensors ensure the height of wafer cassettes during storage, retrieval, and transfer to prevent collisions and interference. Environmental monitoring sensors monitor the temperature, humidity, and dust particle concentration within the warehouse.

[0021] The conveying system connects the automated guided vehicle and the overhead crane, and achieves seamless connection of wafer cassettes between different devices through conveyor belts and rotary tables. Anti-static protection devices prevent static electricity from damaging the wafer cassettes.

[0022] The operation control system displays the system's operating status and wafer cell storage information through a control interface, and uses a safety light curtain to detect the safety status within the operating area, ensuring the safety of personnel and equipment.

[0023] Furthermore, the automated guided vehicle (AGV) has obstacle avoidance capabilities and is equipped with ultrasonic sensors, infrared sensors, and laser radar. These sensors detect obstacles ahead and potential risks in the path in real time. It has an autonomous navigation algorithm that can automatically analyze the optimal driving path based on the data provided by the sensors and adjust the driving direction and speed in real time to avoid collisions. It is also equipped with an emergency stop device that can stop operation immediately when an unavoidable obstacle is detected.

[0024] Furthermore, the overhead crane is equipped with a precise positioning system and an automatic calibration function. The precise positioning system includes a high-precision laser positioning sensor and an inertial navigation unit, which can determine the current position and height of the overhead crane in real time. The automatic calibration function can automatically adjust the height and position of the crane's operating level according to the instructions of the warehouse management system to ensure the accurate storage, retrieval and transfer of wafer boxes. The overhead crane also has a load detection function, which can monitor the weight of the wafer boxes being transported in real time and automatically adjust the transport speed and path according to the weight.

[0025] Furthermore, the warehouse management system possesses data analysis and optimized scheduling functions. The data analysis function includes a big data analysis module and machine learning algorithms, which can analyze the historical operating data of automated guided vehicles (AGVs) and overhead cranes to identify potential opportunities for efficiency improvement and fault prevention. The optimized scheduling function can dynamically adjust the operating paths and task allocation of AGVs and overhead cranes based on the analysis results to achieve optimal scheduling of warehousing operations. The warehouse management system is also equipped with a predictive maintenance module, which predicts the maintenance needs of the equipment based on the operating status and historical data, and automatically generates maintenance tasks.

[0026] Furthermore, the barcode reader is equipped with multi-angle scanning and a high-speed data transmission module. The multi-angle scanning function enables rapid identification of barcode information on the wafer cell at any position and angle through barcode scanning devices in multiple directions. The high-speed data transmission module uses wireless communication technology to instantly transmit the scanned identification code and batch information to the warehouse management system, ensuring timely updates and accurate synchronization of information. The barcode reader also integrates automatic calibration and fault detection functions, which can automatically adjust scanning parameters according to environmental changes and send an alarm to the warehouse management system when a fault is detected.

[0027] Furthermore, the sensors include a vibration monitoring sensor and a light monitoring sensor. The vibration monitoring sensor can monitor the vibration in the warehouse in real time and send an alarm to the warehouse management system when abnormal vibration is detected. The light monitoring sensor is used to monitor the light intensity in the warehouse to ensure that the ambient light is suitable for the storage and operation of the wafer cassette. The sensors also integrate an automatic calibration function, which can automatically adjust the detection parameters according to the actual environmental conditions in the warehouse. All data from the sensors can be transmitted to the warehouse management system in real time.

[0028] Furthermore, the conveying system includes a height adjustment device and an automatic alignment system. The height adjustment device can automatically adjust the height and angle of the conveyor belt and rotary table according to the size and weight of the wafer cassette, ensuring the stability and safety of the wafer cassette during transport. The automatic alignment system uses a camera and laser positioning equipment to monitor the position and orientation of the wafer cassette in real time, and automatically adjusts the position of the conveyor belt and rotary table during transport to ensure precise docking of the wafer cassette between different devices. The conveying system is also equipped with an electrostatic protection device and a soft-start control device to effectively prevent electrostatic damage to the wafer cassette and reduce impact force during start-up and shutdown.

[0029] The present invention also provides a method for accessing semiconductor wafer cassettes using the above system, comprising the following steps:

[0030] Sending a storage / retrieval request: The warehouse management system receives the operation request and determines the storage / retrieval task for the wafer cassette.

[0031] Automated Guided Vehicle (AGV) Picking and Placing: Under the control of the warehouse management system, the AGV travels along a predetermined path to the designated location, scans the identification code of the wafer box with a barcode reader, and after confirming that the identification code matches the warehouse management system, it performs the wafer box picking and placing operation.

[0032] Overhead crane dispatching: Under the scheduling of the warehouse management system, the overhead crane adjusts the height and position of the operating level according to the requirements of the wafer box storage and retrieval task, and moves the wafer box from one position to another.

[0033] Automatic identification and information feedback: When the wafer box passes through the barcode reader's scanning area, the identification code and batch number of the wafer box are automatically scanned. After confirming the identification code, the data is immediately fed back to the warehouse management system.

[0034] Environmental monitoring and adjustment: Sensors monitor environmental parameters in the warehouse in real time, including temperature, humidity, vibration and light intensity. The warehouse management system adjusts the environment based on the monitoring data to ensure the safe storage of wafer boxes.

[0035] Seamless connection of the conveying system: The conveying system achieves seamless connection and transfer of wafer cassettes between the automated guided vehicle and the overhead crane through the conveyor belt and rotary table. The height adjustment device adjusts according to the size and weight of the wafer cassette.

[0036] Operator intervention: The operator performs necessary operations through the operation control system at the manual operation port, and the control interface displays the system's operating status and the wafer cell's storage information.

[0037] Security monitoring: The safety light curtain detects the security status of the operating area in real time. When unauthorized entry is detected, an alarm is triggered and the operation of the relevant equipment is stopped.

[0038] Final confirmation: When the wafer box is moved to its final storage location or shipped out, the barcode reader scans the wafer box's identification code again. After confirming that the identification code is correct, the warehouse management system records the relevant information and completes the storage and retrieval operation.

[0039] The beneficial effects of this invention are as follows:

[0040] Improved efficiency: Automated storage and transfer systems greatly improve the efficiency of wafer cassette access, reducing the time and cost of manual operations.

[0041] Reduced errors: Through the cooperation of automated guided vehicles, overhead cranes, and barcode readers, the system can accurately identify and retrieve wafer boxes, reducing human error.

[0042] Ensuring safe storage: Environmental monitoring sensors and anti-static protection devices ensure the safety of wafer cassettes during storage and operation, preventing damage to wafer cassettes caused by improper environment and electrostatic discharge.

[0043] Optimized scheduling: The warehouse management system has data analysis and optimized scheduling functions, which can dynamically adjust the system operation path and task allocation to achieve optimal scheduling.

[0044] Preventing failures in advance: Through data analysis and predictive maintenance modules, the system can identify potential failures and maintenance needs in advance, reducing downtime and maintenance costs.

[0045] Improved positioning accuracy: The crane's precise positioning system and automatic calibration function ensure high accuracy during wafer cassette storage, retrieval, and transfer, avoiding positioning errors.

[0046] Enhanced safety: Safety light curtains and safety protection devices in the operation and control system ensure the safety of system operation and prevent accidental damage to personnel and equipment.

[0047] Adaptable to complex environments: The obstacle avoidance function and autonomous navigation algorithm of the automated guided vehicle enable it to operate safely in complex warehouse environments, avoiding collisions and obstacles.

[0048] Real-time data synchronization: The barcode reader's high-speed data transmission module ensures real-time updates and accurate synchronization of information, improving system response speed and data consistency.

[0049] Through the improvements and optimizations in the above aspects, this invention provides an efficient, accurate, and safe automated storage and management system for semiconductor wafer cassettes and its operating method, which can significantly improve the storage and management efficiency of semiconductor wafer cassettes, reduce costs, and improve product quality. Simple Explanation of the Diagram

[0050] The first figure is a schematic diagram of the structure of the semiconductor wafer cassette automated storage and warehousing management system of the present invention. The second figure is a top view of the semiconductor wafer cassette automated storage and warehousing management system of the present invention. The third figure is a flowchart of the operation method of the semiconductor wafer cassette automated storage and management system of the present invention. Implementation

[0051] To facilitate the explanation of the content and effects of this invention, specific embodiments are listed below with reference to the figures. Please refer to the first figure. The semiconductor wafer cassette automated storage and management system 1 of this invention includes:

[0052] Automated guided vehicles, overhead cranes 2, warehouse management system (software not shown), barcode readers, sensors, conveying system 3, and operation control system (software not shown).

[0053] The automated guided vehicle (AGV) is equipped with a positioning and navigation system and barcode reading capabilities. Controlled by the warehouse management system, it travels along a predetermined path to a designated location. The barcode reader scans the identification code of the wafer cassette, and the information is matched with the warehouse management system information for storage and retrieval operations. The AGV also features obstacle avoidance capabilities, equipped with ultrasonic sensors, infrared sensors, and laser radar. It can instantly detect obstacles ahead and potential risks in the path, and has an autonomous navigation algorithm that automatically analyzes the optimal driving path, adjusting its direction and speed in real time to avoid collisions. It is also equipped with an emergency stop device that can immediately halt operation when an unavoidable obstacle is detected.

[0054] Please refer to Figures 1 and 2. The overhead crane 2 is used to move wafer cassettes 4 longitudinally and laterally. Under the control of the warehouse management system, it can move horizontally and vertically, transferring wafer cassettes 4 from one location to another, achieving efficient transfer in conjunction with automated guided vehicles (AGVs). The overhead crane is also equipped with a precise positioning system and automatic calibration function, including a high-precision laser positioning sensor and an inertial navigation unit. This allows for real-time determination of the crane's current position and height. The automatic calibration function adjusts the height and position of the crane's operating level according to instructions from the warehouse management system, ensuring accurate storage, retrieval, and transfer of wafer cassettes.

[0055] The warehouse management system features data analysis and optimized scheduling capabilities, including a big data analysis module and machine learning algorithms. It can analyze historical operating data of automated guided vehicles (AGVs) and overhead cranes to identify potential efficiency improvements and fault prevention opportunities. Based on the analysis results, the optimized scheduling function dynamically adjusts the operating paths and task allocation of AGVs and overhead cranes to achieve optimal scheduling of warehouse operations. The warehouse management system is also equipped with a predictive maintenance module, which predicts equipment maintenance needs based on equipment operating status and historical data, and automatically generates maintenance tasks.

[0056] As shown, the barcode reader, installed in a key location in the warehouse, can automatically scan the identification codes and batch numbers on wafer cassettes. Equipped with multi-angle scanning capabilities and a high-speed data transmission module, the barcode reader enables rapid identification of barcode information on wafer cassettes from any position and angle through multiple directional scanning devices. The high-speed data transmission module uses wireless communication technology to instantly transmit the scanned identification codes and batch information to the warehouse management system, ensuring timely updates and accurate synchronization. The barcode reader also integrates automatic calibration and fault detection functions, automatically adjusting scanning parameters according to environmental changes and sending alarms to the warehouse management system when a fault is detected.

[0057] The sensors, including height limit sensors and environmental monitoring sensors, are installed in key locations within the warehouse. Height limit sensors ensure the height of wafer cassettes is controlled during storage, retrieval, and transfer, preventing collisions and interference. Environmental monitoring sensors monitor temperature, humidity, and dust particle concentration within the warehouse, ensuring a stable storage environment for the wafer cassettes. The system also includes vibration and light monitoring sensors. Vibration sensors continuously monitor vibration levels within the warehouse and send alarms to the warehouse management system when abnormal vibrations are detected. Light monitoring sensors monitor light intensity within the warehouse, ensuring suitable ambient lighting for the storage and operation of the wafer cassettes. Data from all sensors is transmitted to the warehouse management system in real time.

[0058] The conveying system, as shown, includes a conveyor belt and a rotary table connecting the automated guided vehicle (AGV) and the overhead crane. Equipped with anti-static protection devices, it enables seamless connection of wafer cassettes between different devices. The system includes a height adjustment device and an automatic alignment system. The height adjustment device automatically adjusts the height and angle of the conveyor belt and rotary table based on the size and weight of the wafer cassette, ensuring stability and safety during transport. The automatic alignment system uses cameras and laser positioning equipment to monitor the position and orientation of the wafer cassette in real time and automatically adjusts the position of the conveyor belt and rotary table during transport to ensure precise docking between different devices. The system also features anti-static protection devices and a soft-start control device to effectively prevent damage to the wafer cassettes from static electricity and reduce impact during start-up and shutdown.

[0059] The operation and control system includes a control interface and a safety light curtain. The control interface displays the system's operating status and wafer cell storage information, while the safety light curtain detects the safety status within the operating area to ensure the safety of personnel and equipment. When unauthorized entry is detected, an alarm is triggered and the operation of the relevant equipment is stopped.

[0060] Please refer to Figures 1 to 3. The operation method of the semiconductor wafer cassette automated storage and warehousing management system of the present invention includes the following steps:

[0061] Sending a storage / retrieval request: The warehouse management system receives the operation request and determines the storage / retrieval task for the wafer cassette.

[0062] Automated Guided Vehicle (AGV) Picking and Placing: Under the control of the warehouse management system, the AGV travels along a predetermined path to the designated location, scans the identification code of the wafer box with a barcode reader, and after confirming that the identification code matches the warehouse management system, it performs the wafer box picking and placing operation.

[0063] Overhead crane dispatching: Under the scheduling of the warehouse management system, the overhead crane adjusts the height and position of the operating level according to the requirements of the wafer box storage and retrieval task, and moves the wafer box from one position to another.

[0064] Automatic identification and information feedback: When the wafer box passes through the barcode reader's scanning area, the identification code and batch number of the wafer box are automatically scanned. After confirming the identification code, the data is immediately fed back to the warehouse management system.

[0065] Environmental monitoring and adjustment: Sensors monitor environmental parameters in the warehouse in real time, including temperature, humidity, vibration and light intensity. The warehouse management system adjusts the environment based on the monitoring data to ensure the safe storage of wafer boxes.

[0066] Seamless connection of the conveying system: The conveying system achieves seamless connection and transfer of wafer cassettes between the automated guided vehicle and the overhead crane through the conveyor belt and rotary table. The height adjustment device adjusts according to the size and weight of the wafer cassette.

[0067] Operator intervention: The operator performs necessary operations through the operation control system at the manual operation port, and the control interface displays the system's operating status and the wafer cell's storage information.

[0068] Security monitoring: The safety light curtain detects the security status of the operating area in real time. When unauthorized entry is detected, an alarm is triggered and the operation of the relevant equipment is stopped.

[0069] Final confirmation: When the wafer box is moved to its final storage location or shipped out, the barcode reader scans the wafer box's identification code again. After confirming that the identification code is correct, the warehouse management system records the relevant information and completes the storage and retrieval operation.

[0070] This embodiment describes the improvement and optimization scheme of the system in practical applications, so as to further improve the efficiency and reliability of the system.

[0071] Improve obstacle avoidance capabilities of automated guided vehicles (AGVs): Introduce more sensor types, such as millimeter-wave radar and depth cameras, into the obstacle avoidance system to enhance its perception capabilities. Simultaneously, optimize the autonomous navigation algorithm to enable it to calculate the optimal path more quickly and operate safely in more complex environments.

[0072] Enhance the crane's precision positioning system: Introduce a binocular vision sensor to the crane's positioning system to improve positioning accuracy. Improve the automatic calibration algorithm to complete the calibration process in a shorter time and achieve sub-millimeter level positioning accuracy.

[0073] Optimize the data analysis function of the warehouse management system: Add more data acquisition points to the data analysis module of the warehouse management system to improve the granularity of data analysis. Introduce more machine learning algorithms, such as deep learning and reinforcement learning, to improve the accuracy and predictive ability of data analysis.

[0074] Upgraded barcode reader scanning and transmission modules: The barcode reader is equipped with a higher-resolution camera and a more powerful processing chip to accelerate barcode scanning and improve recognition accuracy. The wireless transmission module protocol has been optimized to enhance data transmission speed and stability.

[0075] Enhance the environmental monitoring capabilities of sensors: Add gas monitoring sensors and more types of environmental monitoring sensors to comprehensively monitor the warehouse environment. Improve the data processing algorithms of the sensors to enable them to respond more quickly to environmental changes.

[0076] Improving the stability and precision of the conveyor system: The control algorithms for the height adjustment device and automatic alignment system in the conveyor system have been improved, enabling more precise adjustment of the conveyor belt and rotary table positions. Simultaneously, the design of the electrostatic discharge protection device and soft-start control device has been optimized to further reduce potential damage to the wafer cassette.

[0077] Optimize the human-machine interface of the operation control system: Introduce more visualization tools, such as 3D models and real-time status monitoring, into the control interface of the operation control system to improve operator efficiency and safety. Add more safety light curtains and safety protection devices to ensure the safe operation of the system.

[0078] The above detailed description is a specific description of one feasible embodiment of the present invention. However, the embodiment is not intended to limit the patent scope of the present invention. All equivalent implementations or modifications that do not depart from the spirit of the present invention should be included in the patent scope of this case.

[0079] 1: Semiconductor Wafer Box Automated Warehouse Management System

[0080] 2: Overhead crane

[0081] 3: Conveying System

[0082] 4: Wafer box

Claims

1. An automated warehouse management system for semiconductor wafer cassettes, comprising: at least one automated guided vehicle (AGV) equipped with a positioning and navigation system and barcode reading capability, wherein the AAV has obstacle avoidance capability and is equipped with ultrasonic sensors, infrared sensors, and laser radar to detect obstacles and potential risks in the path in real time. It has an autonomous navigation algorithm that can automatically analyze the optimal driving path based on data provided by the sensors, and adjust its driving direction and speed in real time to avoid collisions. It is also equipped with an emergency stop device that can immediately stop operation when an unavoidable obstacle is detected. At least one overhead crane is used to move at least one wafer cassette in the longitudinal and lateral directions. The wafer cassette is equipped with an identification code. The overhead crane is equipped with a precise positioning system and an automatic calibration function. The precise positioning system includes a high-precision laser positioning sensor and an inertial navigation unit, which can determine the current position and height of the overhead crane in real time. The automatic calibration function can automatically adjust the position and height according to instructions from the warehouse management system. The height and position of the overhead crane's operating level are adjusted to ensure accurate storage, retrieval, and transfer of wafer cassettes. The crane also features load detection, enabling it to monitor the weight of the wafer cassettes in real time and automatically adjust the handling speed and path accordingly. A warehouse management system is provided to receive and process wafer cassette location and status data from the automated guided vehicle (AGV) and the overhead crane in real time. It includes fault diagnosis and maintenance alerts. The warehouse management system also features data analysis and optimization scheduling capabilities. The data analysis function includes a big data analysis module and machine learning algorithms, which analyze the historical operating data of the AAV and the overhead crane to identify potential efficiency improvements and fault prevention opportunities. The optimization scheduling function dynamically adjusts the operating paths and task allocation of the AAV and the overhead crane based on the analysis results, achieving optimal scheduling for warehouse operations. The warehouse management system is also equipped with a predictive maintenance module, which predicts equipment maintenance needs based on the equipment's operating status and historical data, and automatically generates maintenance tasks. Multiple barcode readers, installed at a key location in a warehouse, are capable of automatically scanning the identification codes and batch information of a wafer cassette. Each barcode reader is equipped with multi-angle scanning capabilities and a high-speed data transmission module. The multi-angle scanning function enables rapid identification of barcode information on the wafer cassette from any position and angle using barcode scanning devices in multiple directions. The high-speed data transmission module employs wireless communication technology to instantly transmit the scanned identification codes and batch information to the warehouse management system, ensuring real-time updates and accurate synchronization. The barcode readers also integrate automatic calibration and fault detection functions, automatically adjusting scanning parameters according to environmental changes and sending alarms to the warehouse management system when a fault is detected. Multiple sensors are also included, including at least one height limit detection sensor and at least one environmental monitoring sensor.A conveying system includes at least one conveyor belt and at least one rotary table connecting the automated guided vehicle (AGV) and the overhead crane, and is equipped with an anti-static protection device. The conveying system includes a height adjustment device and an automatic alignment system. The height adjustment device automatically adjusts the height and angle of the conveyor belt and the rotary table according to the size and weight of the wafer cassette to ensure the stability and safety of the wafer cassette during transport. The automatic alignment system monitors the position and orientation of the wafer cassette in real time using a camera and laser positioning equipment, and automatically adjusts the position of the conveyor belt and the rotary table during transport to ensure precise docking of the wafer cassette between different devices. The conveying system is also equipped with an anti-static protection device and a soft-start control device to effectively prevent damage to the wafer cassette from static electricity and reduce impact force during start-up and shutdown. An operation control system includes at least one control interface and at least one safety light curtain. The AGV, under the control of the warehouse management system, travels along a predetermined path and scans the identification code of the wafer cassette at a designated location using a barcode reader, matching the information with the warehouse management system. After allocation, storage and retrieval operations are performed. Under the scheduling of the warehouse management system, the overhead crane moves horizontally and vertically, transferring the wafer cassette from one location to another, cooperating with the automated guided vehicle (AGV) for efficient transfer. Barcode readers are installed along the operating paths of the AGV and the overhead crane to ensure accurate reading of the identification code and batch information during wafer cassette storage, retrieval, and transfer, and to immediately feed the identification code back to the warehouse management system. Sensors are installed at key locations in the warehouse; the height limit sensor ensures height restrictions for the wafer cassette during storage, retrieval, and transfer, preventing collisions and interference; the environmental monitoring sensor monitors the temperature, humidity, and dust particle concentration within the warehouse. The conveying system connects the AGV and the overhead crane, achieving seamless connection of the wafer cassette between different devices through the conveyor belt and the rotating platform. An anti-static protection device prevents static electricity damage to the wafer cassette. The operation control system displays the system's operating status and wafer cassette storage information through the control interface; a safety light curtain detects the safety status within the operating area, ensuring the safety of personnel and equipment.

2. The semiconductor wafer cassette automated storage and management system as described in claim 1, wherein the sensors include vibration monitoring sensors and light monitoring sensors. The vibration monitoring sensors can monitor the vibration in the warehouse in real time and send an alarm to the warehouse management system when abnormal vibration is detected. The light monitoring sensors are used to monitor the light intensity in the warehouse to ensure that the ambient light is suitable for the storage and operation of the wafer cassette. The sensors also integrate an automatic calibration function, which can automatically adjust the detection parameters according to the actual environmental conditions in the warehouse. All data from the sensors can be transmitted to the warehouse management system in real time.

3. An operating method for an automated semiconductor wafer cassette storage management system, comprising the following steps: Sending a storage / retrieval request: The warehouse management system receives the operation request and determines the storage / retrieval task for the wafer cassette; Automated Guided Vehicle (AGV) Pick-and-Place: Under the control of the warehouse management system, the AGV travels along a predetermined path to a designated location. It scans the identification code of the wafer cassette using a barcode reader. After confirming that the identification code matches the warehouse management system, it performs the wafer cassette pick-and-place operation. The AGV is equipped with a positioning and navigation system and has barcode reading capabilities. The AGV also features obstacle avoidance capabilities, equipped with ultrasonic sensors, infrared sensors, and laser radar. These sensors detect obstacles and potential risks in the path in real time. It has an autonomous navigation algorithm that can automatically analyze the optimal driving path based on sensor data, adjusting its direction and speed in real time to avoid collisions. It is also equipped with an emergency stop device that can stop when an unavoidable obstacle is detected. Immediately stop operation; Overhead crane dispatch: Under the scheduling of the warehouse management system, the overhead crane adjusts the height and position of the operating level according to the requirements of the wafer box storage and retrieval task, transferring the wafer box from one location to another. The overhead crane is used to move the wafer box in the longitudinal and lateral directions. The overhead crane is equipped with a precise positioning system and an automatic calibration function. The precise positioning system includes a high-precision laser positioning sensor and an inertial navigation unit, which can determine the current position and height of the overhead crane in real time. The automatic calibration function can automatically adjust the height and position of the operating level of the overhead crane according to the instructions of the warehouse management system to ensure the accurate storage, retrieval and transfer of the wafer box. The overhead crane has a load detection function, which can monitor the weight of the wafer box being transported in real time and automatically adjust the transport speed and path according to the weight.Automatic Identification and Information Feedback: When a wafer cassette passes through the barcode reader's scanning area, the system automatically scans the wafer cassette's identification code and batch number. After confirming the identification code, the data is immediately fed back to the warehouse management system. The barcode reader is equipped with multi-angle scanning capabilities and a high-speed data transmission module. The multi-angle scanning function uses barcode scanning devices in multiple directions to quickly identify barcode information on the wafer cassette at any position and angle. The high-speed data transmission module uses wireless communication technology to instantly transmit the scanned identification code and batch information to the warehouse management system, ensuring timely updates and accurate synchronization of information. The barcode reader also integrates automatic calibration and fault detection functions, automatically adjusting scanning parameters according to environmental changes and sending alarms to the warehouse management system when a fault is detected. The warehouse management system can instantly receive and process the wafer cassette's location and status data sent by the automated guided vehicle and the overhead crane, and has fault diagnosis and maintenance prompt functions. The warehouse management system also has data analysis and optimization scheduling functions. The system includes a big data analysis module and machine learning algorithms, capable of analyzing historical operating data of the automated guided vehicle (AGV) and overhead crane to identify potential efficiency improvements and fault prevention opportunities. The optimized scheduling function dynamically adjusts the operating paths and task allocation of the AGV and overhead crane based on the analysis results, achieving optimal scheduling for warehouse operations. The warehouse management system is also equipped with a predictive maintenance module, which predicts equipment maintenance needs based on operating status and historical data, and automatically generates maintenance tasks. Environmental monitoring and adjustment: Sensors monitor environmental parameters within the warehouse in real time, including temperature, humidity, vibration, and light intensity. The warehouse management system adjusts the environment based on the monitoring data to ensure the safe storage of wafer cassettes. The sensors include at least one height limit detection sensor and at least one environmental monitoring sensor. The sensors are installed at key locations within the warehouse. The height limit detection sensor ensures height restrictions for wafer cassettes during storage, retrieval, and transfer to avoid collisions and interference. The environmental monitoring sensor monitors temperature, humidity, and dust particle concentration within the warehouse.Seamless Connection of the Conveying System: The conveying system achieves seamless connection and transfer of wafer cassettes between the automated guided vehicle (AGV) and the overhead crane via a conveyor belt and a rotary table. A height adjustment device adjusts the height and angle of the conveyor belt and rotary table according to the size and weight of the wafer cassette. The conveying system includes at least one conveyor belt and at least one rotary table connecting the AGV and the overhead crane, and is equipped with an anti-static protection device. The conveying system includes a height adjustment device and an automatic alignment system. The height adjustment device automatically adjusts the height and angle of the conveyor belt and rotary table according to the size and weight of the wafer cassette to ensure the stability and safety of the wafer cassette during transport. The automatic alignment system monitors the position and orientation of the wafer cassette in real time using a camera and laser positioning equipment, and automatically adjusts the position of the conveyor belt and rotary table during transport to ensure precise docking of the wafer cassette between different devices. The conveying system is also equipped with an anti-static protection device and a soft-start control device to effectively prevent damage to the wafer cassette from static electricity and reduce impact during start-up and shutdown. Operator Intervention: Operators perform necessary operations at the manual control port via the operation control system. The control interface displays the system's operating status and wafer cassette storage information. This operation control system includes at least one control interface and at least one safety light curtain. Security Monitoring: The safety light curtain continuously detects the security status within the operating area. Upon detecting unauthorized entry, it triggers an alarm and stops the operation of related equipment. Final Confirmation: When a wafer cassette is moved to its final storage location or retrieved from the warehouse, the barcode reader scans the wafer cassette's identification code again. After confirmation, the warehouse management system records the relevant information, completing the storage and retrieval operation.

Images