Probe and electrical connection device

Abstract

The probe of this invention comprises: a front end portion disposed at one end in the axial direction and contacting the object to be inspected; a base end portion disposed at the other end; and a plurality of coil spring portions and a connecting portion disposed between the front end portion and the base end portion. The plurality of coil spring portions are elastic, while the connecting portion is not elastic. The probe is rectangular in shape with four side surfaces when viewed from the axial direction. The plurality of coil spring portions are connected along the axial direction via the connecting portion.

Description

Technical Field

[0001] This invention relates to a probe and an electrical connection device for inspecting the electrical properties of an object. Prior Technology

[0002] To inspect the electrical characteristics of semiconductor integrated circuits and other objects under inspection in wafer condition, an electrical connection device including probes is used. In probe-based inspection, one end of the probe contacts the electrode of the object under inspection, and the other end of the probe contacts a terminal (hereinafter also referred to as a "pad") disposed on a substrate included in the electrical connection device. The pad is electrically connected to inspection equipment such as a tester.

[0003] To accurately inspect the electrical characteristics of the object under inspection, the object and the pads must be stably electrically connected via probes. Therefore, a method is employed where the probe, lacking axial elasticity, is held in a bent state at the probe tip of the electrical connection device. By applying overdrive by pressing the bent probe firmly against the object under inspection, further bending the probe, the probe's elasticity is utilized to ensure stable contact between the probe and the pads. [Previous Technical Documents] [Patent Literature]

[0004] Patent Document 1: Japanese Patent Application Publication No. 2018-4260 Summary of the Invention

[0005] [The problem that the invention aims to solve] However, in electrical connection devices that hold the probe in a bent state, when the probe needs to be replaced, it must be removed from the probe head after the probe held by the probe head has been restored from a bent state to a straight state. Therefore, there is a problem that it takes time to replace the probe.

[0006] In view of the above problems, the object of the present invention is to provide a probe and an electrical connection device that allow for easy replacement of the probe in an electrical connection device. [Methods used to solve problems]

[0007] One embodiment of the probe system of the present invention comprises: a front end portion disposed at one end in the axial direction and in contact with the object to be inspected; a base end portion disposed at the other end; and a plurality of coil spring portions and a connecting portion disposed between the front end portion and the base end portion. The plurality of coil spring portions are elastic, while the connecting portion is not elastic. The probe system is rectangular in shape with four side surfaces when viewed from the axial direction. The plurality of coil spring portions are connected along the axial direction via the connecting portion. [Benefits of the Invention]

[0008] According to the present invention, a probe and an electrical connection device that allow for easy replacement of the probe in an electrical connection device can be provided. Simple Explanation of the Diagram

[0009] Figure 1 is a schematic side view showing the configuration of the probe in the implementation mode. Figure 2 is a schematic top view showing the configuration of the probe in the implementation mode. Figure 3 is a schematic diagram showing the first component that constitutes the probe shown in Figure 1. Figure 4 is a schematic diagram showing the second component that constitutes the probe shown in Figure 1. Figure 5 is a schematic diagram showing the third component that constitutes the probe shown in Figure 1. Figure 6 is a schematic diagram showing the configuration of the coil spring portion of the probe in the embodiment. Figure 7 is a schematic perspective view of the coil spring portion of the probe in the implementation configuration. Figure 8 is a schematic diagram showing the connection between the front end of the probe shown in Figure 1 and the current path component. Figure 9 is a schematic diagram showing the connection between the probe connector and the current path component shown in Figure 1. Figure 10 is a schematic diagram showing the shape of each wire in the coil spring section of the probe in the embodiment. Figure 11 is a schematic diagram showing the configuration of the electrical connection device in the embodiment. Figure 12 is a schematic diagram showing another configuration of the electrical connection device in an embodiment. Figure 13 is a schematic diagram showing the first component of the probe constituting the first variant of the embodiment. Figure 14 is a schematic diagram showing the second component of the probe constituting the first variant of the embodiment. Figure 15 is a schematic diagram showing the third component of the probe constituting the first modified example of the embodiment. Figure 16 is a schematic diagram showing the current path component of the probe in the first modified embodiment. Figure 17 is a schematic side view showing the configuration of the probe in the first modified embodiment. Figure 18 is a schematic diagram showing the connection method of the current path component of the probe shown in Figure 17. Figure 19 is a schematic diagram showing the first component of the probe constituting the second variation of the embodiment. Figure 20 is a schematic diagram showing the second component of the probe constituting the second variation of the embodiment. Figure 21 is a schematic diagram showing the third component of the probe constituting the second variation of the embodiment. Figure 22 is a schematic side view showing the configuration of the probe in the second variation of the embodiment. Figure 23 is a schematic diagram showing the connection method of the current path component of the probe shown in Figure 22. Figure 24 is a schematic cross-sectional view showing an example of the opening shape of the connecting part of the probe in other embodiments. Figure 25 is a schematic cross-sectional view showing another example of the opening shape of the connector of a probe in other embodiments. Implementation

[0010] The embodiments of the present invention will now be described with reference to the drawings. In the following drawings, identical or similar parts are marked with identical or similar symbols. However, the drawings are illustrative, and it should be noted that the thickness ratios of each part may differ from the actual dimensions. Furthermore, the drawings naturally include parts with different dimensional relationships or ratios. The embodiments shown below are examples of apparatuses or methods used to embody the technical concept of the present invention; the materials, shapes, structures, and arrangements of the constituent parts in the embodiments of the present invention are not limited to those described below.

[0011] (First Implementation Type) The probe 10 of the first embodiment shown in Figure 1 is used to inspect the electrical properties of an object. It has: a front end portion 11, disposed at one end of the probe 10 along its axial direction and in contact with the object being inspected; and a base end portion 13, disposed at the other end of the probe 10 along its axial direction. The probe 10 further includes a plurality of elastic coil spring portions and a connecting portion 122 disposed between the front end portion 11 and the base end portion 13. The plurality of coil spring portions are connected along the axial direction via the connecting portion 122. In the probe 10, the portion located between the front end portion 11 and the base end portion 13, including the coil spring portions and the connecting portion 122, is designated as the body portion 12.

[0012] The probe 10 is cylindrical with a front end 11 and a base end 13 at both ends. As shown in Figure 1, the axial direction of the probe 10 is designated as the Z direction, the left-right direction in Figure 1 is designated as the X direction, and the depth direction in Figure 1 is designated as the Y direction. Furthermore, the direction in which the front end 11 is located when viewed from the base end 13 along the Z direction is designated as upward, and the direction in which the base end 13 is located when viewed from the front end 11 is designated as downward. In addition, the upward-facing surface of each part of the probe 10 is designated as the upper surface, the downward-facing surface is designated as the lower surface, and the surface connecting the upper and lower surfaces is designated as the side surface.

[0013] As shown in Figure 2, the probe 10 is rectangular in shape with four side surfaces when viewed from the axial direction. The side surface viewed from the Y direction is designated as the first side surface 101, and the side surface facing away from the first side surface 101 is designated as the second side surface 102. Furthermore, the side surface viewed from the X direction is designated as the third side surface 103, and the side surface facing away from the third side surface 103 is designated as the fourth side surface 104. Additionally, as described later, the coil spring portion of the probe 10 is constructed by combining a first component 111, a second component 112, and a third component 113. As shown in Figure 2, the first side surface 101 is the surface of the first component 111, the second side surface 102 is the surface of the third component 113, and the third side surface 103 and the fourth side surface 104 are the surfaces of the second component 112.

[0014] As shown in Figure 1, the probe 10 is connected sequentially from the front end 11 to the base end 13 via the connecting part 122 to the first coil spring part 1211, the second coil spring part 1212, the third coil spring part 1213, and the fourth coil spring part 1214. When the number of coil spring parts included in the probe 10 is not limited, they are referred to as "coil spring part 121". Although Figure 1 illustrates a case where the probe 10 contains four coil spring parts 121, the number of coil spring parts 121 included in the probe 10 can be arbitrarily set if there are two or more.

[0015] Figure 3 shows the first component 111 constituting probe 10. Figure 4 shows the second component 112 constituting probe 10. Figure 5 shows the third component 113 constituting probe 10. The first component 111 and the third component 113 have a structure in which beams extending obliquely relative to the X direction (hereinafter also referred to as "oblique beams") are arranged along the Z direction. The second component 112 has a structure in which beams parallel to the Y direction (hereinafter also referred to as "parallel beams") are arranged along the Z direction.

[0016] The coil spring portion 121 of the probe 10 is constructed by sequentially overlapping the third component 113, the second component 112, and the first component 111 along the Y direction. That is, the coil spring portion 121 is constructed by connecting the beam of the first component 111 and the beam of the third component 113 through the beam of the second component 112.

[0017] Figure 6 shows the configuration of the coil spring portion 121. The first component 111 shown on the first side surface 101 includes a slanted beam extending from the upper left to the lower right when viewed from the normal direction of the first side surface 101. The third component 113 shown on the second side surface 102 includes a slanted beam extending from the upper right to the lower left when viewed from the normal direction of the first side surface 101. In other words, the slanted beams of the first component 111 and the third component 113 are symmetrically arranged about the central axis of the probe 10. As shown in Figure 6, the coil spring portion 121 has a double-helix structure. Figure 7 shows a perspective view of the coil spring portion 121.

[0018] Furthermore, the probe 10 includes a current path member 114A disposed inside the coil spring portion 121. The current path member 114A is a conductive columnar member. The current path member 114A of the probe 10 shown in FIG1 bridges at least any one of the following: the front end portion 11 and the connecting portion 122; the two connecting portions 122; and the base end portion 13 and the connecting portion 122.

[0019] For example, the current path member 114A bridges the connection portion 122, which is connected at one end to the coil spring portion 121 at the front end portion 11, and the front end portion 11. In this way, the connection portion 122, which is closest to the front end portion 11, is electrically connected to the front end portion 11.

[0020] Furthermore, the current path member 114A bridges the connection portion 122, which is connected to the coil spring portion 121 at one end of the base end portion 13, and the base end portion 13. In this way, the connection portion 122 closest to the base end portion 13 is electrically connected to the base end portion 13.

[0021] Furthermore, the current path component 114A bridges the two connecting portions 122, which are respectively connected to both ends of a coil spring portion, to each other. In this way, the two connecting portions 122 are electrically connected.

[0022] For example, as shown in FIG8, the current path member 114A disposed inside the first coil spring portion 1211 has its first end inserted into the first opening 110 formed on the lower surface of the front end portion 11, and its second end connected to the upper surface of the connecting portion 122. If the coil spring portion 121 extends or retracts, the first end of the current path member 114A slides inside the first opening 110.

[0023] Furthermore, as shown in FIG9, the current path member 114A disposed inside the second coil spring portion 1212 has its first end inserted into the second opening 120 formed on the lower surface of one connecting portion 122, and its second end connected to the upper surface of the other connecting portion 122. The current path member 114A disposed inside the third coil spring portion 1213 also electrically connects the two connecting portions 122 in the same manner as the current path member 114A disposed inside the second coil spring portion 1212. The current path member 114A disposed inside the fourth coil spring portion 1214 has its first end inserted into the second opening 120 formed on the lower surface of the connecting portion 122, and its second end connected to the upper surface of the base end portion 13. When the coil spring portion 121 extends or retracts, the first end of the current path member 114A slides inside the second opening 120.

[0024] As described above, when the coil spring portion 121 extends or retracts, the end of the current path member 114A slides inside the first opening 110 and the second opening 120. Therefore, even if the probe 10 extends or retracts in the axial direction, the current path member 114A will not bend and protrude outside the coil spring portion 121.

[0025] The first component 111, the second component 112, the third component 113, and the current path member 114A are formed by processing a plate of conductive material such as metal. Furthermore, the components are joined in the order of the third component 113, the second component 112, the current path member 114A, and the first component 111 to manufacture the probe 10. The beams of the first component 111 and the third component 113 function as springs, and the second component 112 connects the beams of the first component 111 and the third component 113 to each other. In other words, the beams of the first component 111, the second component 112, and the third component 113 are connected to form the wires of the coil spring section 121.

[0026] The probe 10 can extend and retract freely in the axial direction by means of a coil spring portion 121 composed of a first component 111, a second component 112, and a third component 113. In other words, since the probe 10 itself has axial elasticity, it is not necessary to hold the probe 10 in a bent state, for example.

[0027] Furthermore, in the probe 10, the current path member 114A, disposed inside the coil spring portion 121, functions as the current path between the front end portion 11 and the base end portion 13. Therefore, even if the resistance in the coil spring portion 121 increases due to the longer path, the current path of the probe 10 can be shortened. In other words, the resistance of the current path of the probe 10 can be reduced by means of the current path member 114A. Thus, the current path member 114A functions as a component that shortens the current path. Alternatively, if the resistance of the coil spring portion 121 does not affect the inspection level of the object being inspected, the probe 10 may not include the current path member 114A.

[0028] As shown in Figure 8, the current path member 114A can also be arranged inside the coil spring portion 121 in a bent state. In this case, the bending directions of the plurality of current path members 114A arranged along the axial direction can also be different, for example, the bending directions can be different from each other along the axial direction.

[0029] The probe 10 can also be made of materials such as nickel (Ni), nickel alloys, gold (Au), silver (Ag), copper (Cu), palladium (Pd), palladium alloys, rhodium (Rh), rhodium alloys, or other precious metals. The current path component 114 can be made of a material with lower mechanical strength than the first component 111, the second component 112, and the third component 113, but higher conductivity. For example, Ni alloys can be used in the first component 111 and the third component 113, while gold or copper can be used in the current path component 114A.

[0030] Furthermore, when viewed from a direction perpendicular to the axial direction, each line of the coil spring portion 121 may also include curved rather than straight portions. For example, as shown in FIG10, the direction of travel of each line may also vary along the side surface. The coil spring portion 121 shown in FIG10 includes a structure consisting of a first portion 121A and a second portion 121B connected together. The first portion 121A extends at a first angle relative to the axial direction, and the second portion 121B extends at a second angle relative to the axial direction, different from the first angle. In the example shown in FIG10, the second portion 121B is disposed between the first portion 121A and the second portion 121B. By including curved portions rather than simply straight lines in each line of the coil spring portion 121, the load applied to the probe 10 is easily transmitted along the axial direction, and the bending and buckling of the probe 10 from the central axis when a thrust in the axial direction is applied to the probe 10 can be suppressed.

[0031] The elastic force of the plurality of coil spring sections 121 contained in the probe 10 may also be different. For example, the number of coils wound on a portion of the first coil spring section 1211, the second coil spring section 1212, the third coil spring section 1213, and the fourth coil spring section 1214 may also be different. Alternatively, the number of coils wound on all coil spring sections 121 may also be different. As described above, the number of coils wound on one of the two coil spring sections 121 with different elastic forces may be different from that on the other coil spring section 121. The number of coils wound on the coil spring sections 121 contained in the probe 10 can be arbitrarily selected for each coil spring section 121.

[0032] The probe 10 is used, for example, in the electrical connection device 100A shown in FIG. 11. The probe 10 is held in a holding portion 20, which is provided with an insertion hole for insertion of the probe 10. The probe 10 is inserted into the insertion hole of the holding portion 20 from the base end portion 13 side. A conductive pad 21, which is a terminal, is disposed at the bottom of the insertion hole of the holding portion 20, and the end face of the base end portion 13 of the probe 10 is electrically connected to the pad 21. The holding portion 20 includes an external terminal 22 electrically connected to the pad 21 via an internal circuit (not shown). The external terminal 22 is electrically connected to an inspection device such as an IC tester (not shown).

[0033] Alternatively, the base end 13 of the probe 10 can be bonded to the pad 21 to form an electrical connection device 100A. The connection method and connection material for bonding the probe 10 to the pad 21 can be arbitrarily selected. For example, the end face of the base end 13 of the probe 10 can be bonded to the pad 21 by soldering.

[0034] The retaining part 20 can also be, for example, an integrally molded space transformer. By using the retaining part 20 as a space transformer, the arrangement spacing of the external terminals 22 can be increased compared to the arrangement spacing of the probes 10. This makes the connection between the electrical connection device 100A and the inspection device easier.

[0035] During the inspection of the object 200, the front end 11 of the probe 10 contacts the electrode pad (not shown) of the object 200. The inspection of the object 200 is performed by transmitting electrical signals between the object and the inspection device via the probe 10 and the holding part 20.

[0036] Because the coil spring portion 121 of the probe 10 is elastic, when the front end portion 11 of the probe 10, with its base end portion 13 connected to the pad 21, contacts the object to be inspected 200, elastic deformation may occur along the axial direction of the probe 10. Therefore, after the probe 10 contacts the object to be inspected 200, an overpressure can be applied to press the probe 10 firmly against the object to be inspected 200. By applying the overpressure, the electrical connection between the probe 10 and the object to be inspected 200 can be ensured.

[0037] After the inspection of the object 200 is completed, the probe 10 system is removed from the object 200. The probe 10 system, which has a coil spring portion 121, returns to its original shape after being removed from the object 200.

[0038] In Figure 11, although the probes 10 are shown as being held in a row in the holding part 20, the arrangement of the probes 10 in the holding part 20 is arbitrary. For example, the probes 10 can also be arranged in a matrix when viewed from the axial direction. Since the probes 10 are held in a straight line along the axial direction, the arrangement density of the probes 10 can be increased.

[0039] Furthermore, the depth of the insertion hole in the holding portion 20 for inserting the probe 10 can be arbitrarily set. For example, by deepening the insertion hole, it is possible to prevent the probe 10 from being held at an angle in the holding portion 20. In this way, it is possible to prevent the position of the front end portion 11 relative to the electrode pad of the object being inspected 200 from shifting.

[0040] Figure 12 shows another example of an electrical connection device 100B including a probe 10. The holding portion 20 of the electrical connection device 100B includes: a probe head 201 with an insertion hole through which the probe 10 is inserted; and a wiring substrate 202 laminated on the probe head 201. Pads 21 are disposed on the surface of the wiring substrate 202 opposite to the probe head 201. The wiring substrate 202 may also be, for example, a space converter.

[0041] As described above, the holding portion 20 of the holding probe 10 can also be integrally formed as shown in FIG11, or it can be formed by combining multiple components as shown in FIG12. For example, when the holding portion 20 is formed by multiple components, the manufacturing time of the holding portion 20 can be shortened by manufacturing each component in parallel.

[0042] The electrical connection device may also deposit a printed circuit board having a wiring pattern that is electrically connected to the external terminal 22 onto the holding portion 20. Furthermore, electrical signals are transmitted between the object to be inspected and the inspection device via the wiring pattern.

[0043] In summary, the probe 10 in this embodiment has a coil spring portion 121, which allows it to extend and retract freely in the axial direction. Therefore, it is not necessary to hold the probe 10 in a bent state in the electrical connection device. Thus, based on the probe 10 and the electrical connection device including the probe 10, it is easy to replace the probe in the electrical connection device.

[0044] <First Variation> The above description illustrates the arrangement of current path members 114A individually within each of the coil spring portions 121. However, as shown in Figures 13 to 16, the probe 10 can also be constructed using a single columnar current path member 114B. Figure 13 shows the structure of the first component 111. Figure 14 shows the structure of the second component 112. Figure 15 shows the structure of the third component 113. Figure 16 shows the current path member 114B.

[0045] Figure 17 shows a coil spring portion 121 constructed from the first component 111, the second component 112, and the third component 113 shown in Figures 13 to 15, respectively, and a probe 10, the current path member 114B shown in Figure 16, is disposed inside the coil spring portion 121. The probe 10 shown in Figure 17 contains two coil spring portions 121.

[0046] In the probe 10 shown in FIG. 17, as shown in FIG. 14, a second through hole 152 extending in the axial direction is formed in the connecting portion 122. The current path member 114B is disposed inside the second through hole 152 of the coil spring portion 121 and the connecting portion 122, and bridges the front end portion 11 and the base end portion 13. For example, the first end portion of the current path member 114B is inserted into the first through hole 151 formed in the front end portion 11 as shown in FIG. 14, and the second end portion is inserted into the third through hole 153 formed in the base end portion 13. If the coil spring portion 121 extends or retracts, the end portion of the current path member 114B slides inside the first through hole 151 and the third through hole 153.

[0047] For example, as shown in FIG18, the current path member 114B can also be connected to the connection portion 122 of the first member 111 and the third member 113 by means of the connecting member 115. The connecting member 115 is disposed between the support plate 116 disposed inside the second through hole 152 and the current path member 114B, and engages the support plate 116 and the current path member 114B.

[0048] The probe 10 shown in Figure 17 can reduce the resistance of the current path compared to the probe 10 shown in Figure 1, which uses multiple current path components 114A. This allows for an increase in the allowable current flowing through the probe 10.

[0049] <Second Variation> As for the probe 10, which uses a current path member 114B that is a single columnar member, the coil spring portion 121 can also be constructed by the first component 111 shown in FIG. 19, the second component 112 shown in FIG. 20, and the third component 113 shown in FIG. 21. FIG. 22 shows that the coil spring portion 121 is constructed by the first component 111, the second component 112, and the third component 113 shown in FIG. 19 to FIG. 21, and the probe 10 with the current path member 114B shown in FIG. 16 is arranged inside the coil spring portion 121.

[0050] The probe 10 shown in Figure 22 is configured with a connecting portion 122 connected to the front end portion 11 via the first coil spring portion 1211 and a connecting portion 122 connected to the base end portion 13 via the second coil spring portion 1212, which are arranged opposite to each other along the axial direction and separated. In other words, the body portion 12 is divided into two sections.

[0051] Even with the probe 10 shown in FIG22, similarly to the probe 10 shown in FIG17, the current path member 114B is disposed inside the second through hole 152 of the coil spring portion 121 and the connecting portion 122, and bridges the front end portion 11 and the base end portion 13. The first end portion of the current path member 114B is inserted into the first through hole 151 formed in the front end portion 11, and the second end portion is inserted into the third through hole 153 formed in the base end portion 13.

[0052] The current path member 114B can also be connected to the connection portion 122 of the first component 111 and the third component 113 by means of the connecting member 115. For example, as shown in FIG23, the connecting member 115 is disposed between the support plate 116 disposed inside the second through hole 152 of the connection portion 122 and the current path member 114B, and engages the support plate 116 and the current path member 114B.

[0053] Although Figure 22 shows a probe 10 containing two coil spring portions 121, the number of coil spring portions 121 of the probe 10 is not limited to two. One connecting portion 122 and another connecting portion 122 can be separately arranged along the axial direction. One connecting portion 122 is electrically connected to the front end portion 11 via at least one coil spring portion 121, and the other connecting portion is electrically connected to the base end portion 13 via at least one coil spring portion 121. In other words, the body portion 12 can also be divided into two or more arbitrary blocks.

[0054] (Other implementation methods) As described above, although the present invention has been described by way of embodiments, it should be understood that the discussion and drawings that form part of this disclosure do not limit the invention. Those skilled in the art to which this invention pertains should be able to understand various alternative embodiments, examples, and applications from this disclosure.

[0055] For example, the above description illustrates a shape in which the first opening 110, the second opening 120, the first through hole 151, the second through hole 152, and the third through hole 153 are formed perpendicularly to the upper or lower surface of the front end portion 11, the base end portion 13, or the connecting portion 122. However, the opening shape of these openings and through holes may also be a tapered shape in which the area of ​​the opening gradually narrows from the outside towards the center.

[0056] Figures 24 and 25 show an example where the opening shape of the second opening 120 in a cross-section along the axial direction is tapered. By setting the opening shape to tapered, the end of the current path member 114A can be easily inserted into the first opening 110 and the second opening 120, and the end of the current path member 114B can be easily inserted into the first through hole 151 and the third through hole 153.

[0057] Furthermore, the electrical connection device can also be configured in a manner that allows the base end 13 of the probe 10 to freely contact and separate from the pad 21. For example, as shown in the electrical connection device 100B of FIG12, the probe 10 can be held by the probe head 201. Since the base end 13 is not engaged with the pad 21, the probe 10 can be easily replaced when, for example, a defect occurs in the probe 10.

[0058] Therefore, the present invention also includes various embodiments not described in the above description.

[0059] 10: Probe 11: Front end 12: Ontology part 13: Base end 20: Maintaining section 21: Solder pad 22:External terminal 100A, 100B: Electrical connection devices 101: First side surface 102: Second side surface 103: Third side surface 104: Fourth side surface 110: First opening 111: First component 112: Second component 113: Third component 114A, 114B: Current path components 115: Connecting components 116: Support plate 120: Second opening 121: Coil Spring Section 121A: Part One 121B: Part Two 122: Connecting Part 151: First through hole 152: Second through hole 153: Third through hole 200: Inspection object 201: Probe head 202: Wiring board 1211: First coil spring section 1212: Second coil spring section 1213: Third coil spring section 1214: Fourth coil spring section

Claims

1. A probe for inspecting the electrical properties of an object, the probe comprising: a front end portion disposed at one end in an axial direction and in contact with the object to be inspected; a base end portion disposed at the other end; a plurality of coil spring portions and a connecting portion disposed between the front end portion and the base end portion, the plurality of coil spring portions being elastic and the connecting portion being non-elastic; and a columnar member disposed inside the coil spring portions and being conductive; the probe being rectangular in shape with four side surfaces when viewed from the axial direction; the plurality of coil spring portions being connected along the axial direction via the connecting portion; and the columnar member bridging at least one of the front end portion and the connecting portion, two of the connecting portions, and the base end portion and the connecting portion.

2. A probe for inspecting the electrical properties of an object, the probe comprising: a front end portion disposed at one end in the axial direction and contacting the object to be inspected; a base end portion disposed at the other end; and a plurality of coil spring portions and a connecting portion disposed between the front end portion and the base end portion, the plurality of coil spring portions being elastic and the connecting portion being non-elastic; the probe being rectangular in shape with four side surfaces when viewed from the axial direction; the plurality of coil spring portions being connected along the axial direction via the connecting portion; a through hole extending through the axial direction being formed in the connecting portion; the probe further comprising a single columnar member disposed inside the through hole of the coil spring portions and the connecting portion, and bridging the front end portion and the base end portion.

3. A probe for inspecting the electrical properties of an object, the probe comprising: a front end portion disposed at one end in an axial direction and in contact with the object to be inspected; a base end portion disposed at the other end; and a plurality of coil spring portions and a connecting portion disposed between the front end portion and the base end portion, the plurality of coil spring portions being elastic and the connecting portion being non-elastic; the probe being rectangular in shape with four side surfaces when viewed from the axial direction; the plurality of coil spring portions being connected along the axial direction via the connecting portion; the coil spring portions having a helical structure; and, when viewed from a direction perpendicular to the axial direction, each coil spring portion comprising a structure connecting a first portion and a second portion, the first portion extending at a first angle relative to the axial direction, and the second portion extending at a second angle relative to the axial direction, different from the first angle.

4. The probe described in any one of claims 1 to 3 comprises at least two aforementioned coil spring portions with different elastic forces.

5. The probe as described in claim 4, wherein, The number of turns of one of the two aforementioned coil spring portions with different elastic forces is different from that of the other aforementioned coil spring portion.

6. The probe as described in claim 2 further includes a connecting member that connects the aforementioned columnar member and the aforementioned connecting portion.

7. The probe as described in claim 2, wherein, One of the aforementioned connecting portions and another of the aforementioned connecting portions are arranged opposite to each other and separated along the aforementioned axial direction. The one of the aforementioned connecting portions is electrically connected to the aforementioned front end via at least one of the aforementioned coil spring portions, and the other of the aforementioned connecting portions is electrically connected to the aforementioned base end via at least one of the aforementioned coil spring portions.

8. An electrical connection device comprising: a probe as described in any one of claims 1 to 7; and a holding portion for holding the probe, having an insertion hole for inserting the probe from the base end portion, and having a terminal electrically connected to the end face of the base end portion disposed at the bottom of the insertion hole.

9. The electrical connection device as described in claim 8, wherein, The aforementioned holding part is a space converter.

10. The electrical connection device as described in claim 8, wherein, The aforementioned holding part includes: a probe head having the aforementioned insertion hole through it; and a wiring substrate having the aforementioned probe head laminated thereon, and the aforementioned terminals disposed on the surface opposite to the aforementioned probe head.

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