Airflow-assisted film application device

Abstract

This invention provides an airflow-assisted film application device, which includes: a working platform, a guide fluid, a first guide plate, a second guide plate, a wafer, and an airflow. The working platform has a control unit, a moving unit, and a working unit. The guide fluid is disposed on the moving unit and electrically connected to the control unit. The first and second guide plates are pivotally mounted on the guide fluid. The wafer is disposed on the working unit. The airflow is discharged at an inclined angle between the first and second guide plates through a first guide portion and a second guide portion thereon, tightly adhering an adhesive film to the wafer, thereby achieving the effect of film application assisted by the airflow.

Description

Technical Field

[0001] This invention relates to a film application device, and more particularly to a device that uses two guide plates to guide an airflow to disperse air bubbles generated between a wafer and an adhesive film and to tightly adhere the adhesive film to the wafer, thereby achieving the effect of an airflow-assisted film application device. Prior Technology

[0002] Note that in various industries, whether semi-finished or finished products, items are often packaged before further processing or sale. The main purpose is usually to protect the items from collisions, scratches, damage, and breakage due to pressure, squeezing, or vibration during handling. Among various packaging materials, fruits are typically wrapped or packaged with cushioning or impact-resistant materials such as foam or polystyrene; plastic components may be covered with partitions or fillers; and glass or fragile items are often wrapped with bubble wrap or air cushion film. Soft, elastic, shock-absorbing, and cushioning packaging materials are commonly used in daily life, such as cardboard boxes, clothing, or newspapers for simple packaging or cushioning. Adhesive film is also a very common packaging material. In the high-tech industry, adhesive film packaging is ubiquitous. For example, smartphone screens or high-priced gaming laptop screens all require adhesive film to protect the screen. In addition, in the semiconductor industry, wafers also need to be coated with special adhesive film during the manufacturing process to protect the integrity of the wafer. Traditionally, the adhesive film is first applied to the wafer and then rolled to ensure it adheres firmly to the wafer surface. However, wafers are quite thin, easily broken, and deformed. When rolling the adhesive film onto the wafer, it is easy to accidentally damage or destroy a wafer, causing significant problems and losses. Therefore, maintaining wafer yield is a very important direction and step in the wafer production process.

[0003] Therefore, how to improve the aforementioned deficiencies is the technical difficulty that the inventors of this case wish to solve. Summary of the Invention

[0004] Therefore, to achieve the above-mentioned objectives, the present invention relates to an airflow-assisted film application device, the film application device comprising: a working platform, a guide fluid, a first guide plate, a second guide plate, a wafer, and an airflow. The working platform has a control unit on one side and a moving part on the other side. The control unit and the moving part are electrically connected to control the moving part to move laterally left and right on the working platform. A working part is provided between the control unit and the moving part. The guide fluid system is disposed on the moving part. The guide fluid forms a first groove and a second groove on each of its two opposite sides, parallel and adjacent to each other. Each of the first grooves and each of the second grooves is located on the same axis. Each of the first grooves has a first screw hole formed at one end edge, and a first adjusting member is screwed into each of the first screw holes. Each of the first adjusting members partially passes through each of the first grooves, and each of the first grooves has a first front elastic member. One end of each of the first front elastic members abuts against one end of each of the first adjusting members, and the other end abuts against one end of each of the first guide members. Each of the first guide members has a first receiving hole, and the other end of each of the first guide members abuts against a first rear elastic member. An upper stop is provided at one end of the guide member above each of the first grooves, and a first positioning part is provided at the center of one end of the guide member below each of the first grooves. The upper part is provided with an elastic element, and each of the second grooves has a second screw hole formed at one end edge. A second adjusting element is screwed into each of the second screw holes. Each of the second adjusting elements partially passes through the second grooves, and each of the second grooves is provided with a second front elastic element. One end of each of the second front elastic elements abuts against one end of each of the second adjusting elements, and the other end abuts against one end of a second guide element. Each of the second guide elements has a second connecting hole, and the other end of each of the second guide elements abuts against a second rear elastic element. A second positioning part is provided at the center of the other end of the guide element and above each of the second grooves. An upper elastic element passes through the second positioning part, and the other end of the guide element... Furthermore, each of the second grooves has a stop portion below it, and the first guide vane has a first inlet portion at one end and a first guide portion at the other end. The first guide vane also has a first connecting portion on each of its two opposite sides at the junction of the first inlet portion and the first guide portion. The first guide portion extends from each of the first connecting portions at a slightly inclined angle, and each of the first connecting portions can be pivotally connected to each of the first connecting holes, allowing the first guide vane to swing between the first grooves. The first inlet portion extends outward to one side at its end edge to form a first abutment portion. The second guide vane has a second inlet portion at one end and a second guide portion at the other end.The second guide plate has a second receiving portion on each of its two opposite sides and at the junction of the second inlet and the second guide portion. The second guide portion extends at a slightly inclined angle from each of the second receiving portions, and each of the second receiving portions can be pivotally connected to each of the second receiving holes, allowing the second guide plate to swing between the second slots. The second guide portion extends outward from one side at its end edge to form a second abutment. The first guide plate and the second guide plate correspond to each other and are each pivotally mounted on the first and second guide components of the guide fluid. A film is attached to the wafer, which is disposed on the working part. The airflow system can pass between the first guide plate and the second guide plate, thereby the control unit controls the moving part to move and drive the guide plate to a position above the wafer. The airflow flows down through the channel formed by the first inlet and the second inlet and then exits between the first guide plate and the second guide plate, blowing away any air bubbles or unevenness on the wafer and tightly adhering it to the wafer. This achieves the effect of the film-applying device using the airflow to assist in film application. The first guide plate can swing between the first slots and the second guide plate can swing between the second slots. When the airflow is disordered... When unstable, the first guide vane moves towards the upper stop, and the first abutment is blocked and limited by the upper stop. Similarly, the second guide vane moves towards the lower stop, and the second abutment is blocked and limited by the lower stop. If the first guide vane moves towards the lower elastic member, the first guide portion is pushed back into position by the lower elastic member with strong restoring force. Conversely, if the second guide vane moves towards the upper elastic member, the second inlet portion is pushed back into position by the upper elastic member with strong restoring force. This ensures that the first and second guide vanes maintain a slightly tilted angle to allow airflow to pass through. Furthermore, when the position of the first guide vane needs to be adjusted individually, it can be achieved by simultaneously adjusting the positions of the other guide vanes. An adjusting member compresses the distance between the first front elastic members and the first flow guide members. The first rear elastic members can appropriately limit the movement distance of the first flow guide members, preventing the first flow guide from getting too close to the second flow guide. When the position of the second flow guide needs to be adjusted individually, the second adjusting members can be simultaneously adjusted to compress the distance between the second front elastic members and the second flow guide members. The second rear elastic members can appropriately limit the movement distance of the second flow guide members, preventing the second flow guide from getting too close to the first flow guide, thus ensuring sufficient space between the first and second flow guides to create a channel for the airflow to pass through. Simple Explanation of the Diagram

[0005]

[0006] Figure 1 is a schematic diagram of the structure of the present invention.

[0007] Figure 2 is a partial schematic diagram of the present invention.

[0008] Figure 3 is a partial schematic diagram of the present invention.

[0009] Figure 4 is a schematic diagram of a preferred embodiment of the present invention.

[0010] Figure 5 is a schematic diagram of a preferred embodiment of the present invention.

[0011] Figure 6 is a schematic diagram of a preferred embodiment of the present invention. Implementation

[0012] Please refer to Figures 1 through 6, which are schematic diagrams of the structure of the present invention, partial schematic diagrams 1 and 2, and schematic diagrams 1 to 3 of the preferred embodiments. As can be clearly seen from the figures, the film-applying device 1 includes:

[0013] A working platform 2, wherein a control unit 21 is provided on one side and a moving part 22 is provided on the other side, and a working part 23 is provided between the control unit 21 and the moving part 22;

[0014] A guide fluid 3 is disposed on the moving part 22. The guide fluid 3 has a first groove 31 and a second groove 34 formed parallel and adjacent to each other on two opposite sides. Each of the first grooves 31 has a first screw hole 311 formed at one end edge. A first adjusting member 312 is screwed into each of the first screw holes 311. Each of the first grooves 31 also has a first front elastic member 313. One end of the first adjusting member 312 contacts one end of each of the first adjusting members 312, and the other end of each first guiding member 314 contacts one end of each first guiding member 314. Each of the first guiding members 314 has a first receiving hole 315, and each of the first guiding members 314 contacts a first elastic member 316 at the other end. An upper stop portion 32 is provided at one end of the guiding member 3 above each of the first groove portions 31. A first positioning portion 33 is provided at the center of one end of the guiding member 3 below each of the first groove portions 31. A lower elastic member 331 passes through the first positioning portion 33. Each of the second groove portions 34 has a second screw hole 341 formed at one end edge. A first threaded part is screwed into each of the second screw holes 341. Two adjusting members 342 are provided, and each of the second grooves 34 is provided with a second front elastic member 343. One end of each of the second front elastic members 343 abuts against one end of each of the second adjusting members 342, and the other end of each of the second flow guides 344 abuts against one end of each of the second flow guides 344. Each of the second flow guides 344 has a second connecting hole 345, and the other end of each of the second flow guides 344 abuts against a second rear elastic member 346. A second positioning part 35 is provided at the center of the other end of the flow guide 3 and above each of the second grooves 34. An upper elastic member 351 passes through the second positioning part 35, and a lower stop part 36 is provided at the other end of the flow guide 3 and below each of the second grooves 34.

[0015] A first guide vane 4 has a first inlet portion 41 at one end and a first guide portion 42 at the other end. The first guide vane 4 also has a first receiving portion 43 on each of its two opposite sides, at the junction of the first inlet portion 41 and the first guide portion 42. Each of the first receiving portions 43 can be pivotally connected to each of the first receiving holes 315, allowing the first guide vane 4 to swing between the first groove portions 31. The first inlet portion 41 extends outward from one side at its end edge to form a first abutment portion 44.

[0016] A second guide vane 5 has a second inlet portion 51 at one end and a second guide portion 52 at the other end. The second guide vane 5 also has a second connecting portion 53 on each of its two opposite sides, at the junction of the second inlet portion 51 and the second guide portion 52. Each of the second connecting portions 53 is pivotally connected to each of the second connecting holes 345, allowing the second guide vane 5 to swing between the second groove portions 34. The second guide portion 52 extends outward from one side at its end edge to form a second abutment portion 54.

[0017] A wafer 6, wherein the wafer 6 is disposed on the working part 23;

[0018] An airflow 7, wherein the airflow 7 can pass between the first guide vane 4 and the second guide vane 5;

[0019] The control unit 21 is electrically connected to the moving unit 22 to control the moving unit 22 to move laterally left and right on the working platform 2;

[0020] The first groove portion 31 and the second groove portion 34 are located on the same axis;

[0021] Each of the first adjusting members 312 is partially inserted into each of the first grooves 31, and each of the second adjusting members 342 is partially inserted into each of the second grooves 34;

[0022] The upper stop portion 32 is formed by extending the fluid guide 3 outward, and the lower stop portion 36 is formed by extending the fluid guide 3 outward.

[0023] The first guide portion 42 extends from each of the first contact portions 43 at a slightly inclined angle, and the second guide portion 52 extends from each of the second contact portions 53 at a slightly inclined angle.

[0024] The first guide vane 4 and the second guide vane 5 are mutually corresponding and each is pivotally mounted on the first guide member 314 and the second guide member 344 of the guide fluid 3;

[0025] A film 61 is attached to the wafer 6.

[0026] The main features are as follows: a control unit 21 is located on one side of the working platform 2, and a moving part 22 is located on the other side. The control unit 21 and the moving part 22 are electrically connected to control the moving part 22 to move laterally left and right on the working platform 2. A working part 23 is located between the control unit 21 and the moving part 22. The guide fluid 3 is disposed on the moving part 22. The guide fluid 3 has parallel and adjacent first grooves 31 and second grooves 34 formed on its two opposite sides. The first grooves 31 and second grooves 34 are located on the same axis. Each first groove 31 has a first screw hole 311 formed at one end edge. Each screw is provided with a first adjusting member 312, and each first adjusting member 312 partially passes through each first groove 31. Each first groove 31 is provided with a first front elastic member 313. One end of each first front elastic member 313 abuts against one end of each first adjusting member 312, and the other end abuts against one end of each first guide member 314. Each first guide member 314 has a first receiving hole 315, and the other end of each first guide member 314 abuts against a first rear elastic member 316. An upper stop 32 is provided at one end of the guide fluid 3 and above each first groove 31. The upper stop 32 is formed by extending the guide fluid 3 outward. The guide fluid 3 has a first positioning part 33 at the center of one end and below each of the first grooves 31. A lower elastic member 331 passes through the first positioning part 33. Each of the second grooves 34 has a second screw hole 341 formed at one end edge. A second adjusting member 342 is screwed into each of the second screw holes 341. Each second adjusting member 342 partially passes through each of the second grooves 34. Each of the second grooves 34 has a second front elastic member 343. One end of each second front elastic member 343 contacts one end of each second adjusting member 342, and the other end contacts one end of each second guide fluid 344. Each of the second guide fluid 344 has a second connecting hole 345. Each of the second flow guides 344 has a second rear elastic member 346 abutting at its other end. A second positioning portion 35 is located at the center of the other end of the flow guide 3, above each of the second grooves 34. An upper elastic member 351 passes through the second positioning portion 35. A lower stop portion 36 is located at the other end of the flow guide 3, below each of the second grooves 34. The lower stop portion 36 is formed by extending outward from the flow guide 3. The first flow guide plate 4 has a first inlet portion 41 at one end and a first guide portion 42 at the other end. The first flow guide plate 4 has first connecting portions 43 on its two opposite sides, at the junction of the first inlet portion 41 and the first guide portion 42.The first guide portion 42 extends from each of the first connecting portions 43 at a slightly inclined angle, and each of the first connecting portions 43 can be pivotally connected to each of the first connecting holes 315, so that the first guide plate 4 can swing between each of the first groove portions 31. The first inlet portion 41 extends outward to one side at its end edge to form the first abutment portion 44. The second guide plate 5 has the second inlet portion 51 at one end and the second guide portion 52 at the other end. Each of the two sides has a second connecting portion 53 at the junction of the second inlet portion 51 and the second guide portion 52. The second guide portion 52 extends from each of the second connecting portions 53 at a slightly inclined angle, and each of the second connecting portions 53 can be pivotally connected to each of the second connecting holes 345, so that the second guide plate 5 can swing between the second groove portions 34. The second guide portion 52 extends outward to one side at its end edge to form a second abutment portion 54. The first guide plate 4 The second guide vanes 5 are mutually corresponding and each is pivotally mounted on the first guide vanes 314 and the second guide vanes 344 of the guide fluid 3. The wafer 6 is disposed on the working part 23, and the adhesive film 61 is attached to the wafer 6. The airflow 7 can pass between the first guide vanes 4 and the second guide vanes 5. In this way, the control unit 21 controls the moving part 22 and drives the guide fluid 3 to move to the working part 23. At the upper position, the wafer 6 with the adhesive film 61 attached is disposed on the working part 23. The airflow 7 flows downward through the channel formed between the first inlet 41 and the second inlet 51 and then extends through the first guide part 42 and the second guide part 52 at a slightly inclined angle before being discharged. Each of the first contact parts 43 and each of the first contact holes 315 are pivotally connected to each other, and each of the second contact parts 53 and each of the second contact holes 345 are pivotally connected to each other. The first guide vane 4 oscillates between the first slots 31 and the second guide vane 5 oscillates between the second slots 34. When the airflow 7 slightly changes its direction or speed, the airflow 7, guided by the first guide vane 4 and the second guide vane 5, can still form a stable and smooth guiding airflow to disperse any bubbles or unevenness in the adhesive film 61 on the wafer 6 and ensure it adheres tightly to the wafer. On wafer 6, the film-applying device 1 achieves the effect of using the airflow 7 to assist in film application. If the airflow 7 is too strong, causing excessive wind resistance in the first guide section 42 and the second guide section 52, resulting in the first guide plate 4 and the second guide plate 5 being tilted or offset, the first guide section 42 will be forcefully pushed back into position by the lower elastic member 331, and the second inlet section 51 will be forcefully pushed back into position by the upper elastic member 351.The strength or weakness of the airflow 7 will not affect the normal guiding function of the first guide vane 4 and the second guide vane 5. Furthermore, if the airflow 7 is too chaotic or unstable, that is, if the first guide vane 4 approaches the upper stop 32, the first abutment 44 will be blocked and limited by the upper stop 32 to prevent the first guide vane 4 from swinging too much, and if the second guide vane 5 approaches the lower stop 36, the second abutment 54 will be blocked and limited by the lower stop 36 to prevent the second guide vane 5 from swinging too much. Moreover, when... When the size of the wafer 6 is changed and the spacing between the first guide plate 4 and the second guide plate 5 needs to be adjusted, since each of the first screw holes 311 is screwed with a first adjusting member 312, and each of the first adjusting members 312 partially passes through each of the first grooves 31, the distance between the first front elastic members 313 and the first guide plates 314 can be compressed by adjusting the first adjusting members 312. The first rear elastic members 316 can appropriately restrict the movement of the first guide plates 314. The distance is adjusted to prevent the first guide vane 4 from getting too close to the second guide vane 5, thus achieving fine-tuning of the position of each of the first guide members 314 in each of the first grooves 31, and also moving the first guide vane 4 in the guide fluid 3. In addition, each of the second screw holes 341 is screwed with a second adjusting member 342, and each of the second adjusting members 342 partially passes through each of the second grooves 34, so that the second front elastic member 343 and the second guide can be compressed simultaneously by adjusting the second adjusting members 342. The distance between components 344, and the appropriate limitation of the movement distance of each of the second rear elastic components 346, prevents the second guide vane 5 from getting too close to the first guide vane 4. This allows for fine-tuning of the position of each of the second guide components 344 within the second grooves 34, and also moves the second guide vane 5 within the guide fluid 3. This ensures that the first guide vane 4 and the second guide vane 5 maintain a slightly inclined angle and have sufficient space to create a channel for the airflow 7 to pass through.

[0027] The film application device 1 of the present invention is composed of: the working platform 2, the guide fluid 3, the first guide plate 4, the second guide plate 5, the wafer 6, and the airflow 7. When the adhesive film 61 on the wafer 6 has bubbles or is uneven, the control unit 21 controls the moving unit 22 and moves the guide fluid 3 to a position above the working unit 23. The airflow 7 flows downward through the channel formed between the first inlet 41 and the second inlet 51 and then through the first... The guide portion 42 and the second guide portion 52 extend at a slightly inclined angle to tightly adhere the adhesive film 61 to the wafer 6. If the airflow 7 is too strong, causing excessive wind resistance to the first guide portion 42 and the second guide portion 52, the first guide portion 42 will be forcefully pushed back into position by the lower elastic member 331, and the second inlet portion 51 will be forcefully pushed back into position by the upper elastic member 351. If the airflow 7 is too chaotic or unstable, the first stop portion 44 will be blocked and limited by the upper stop portion 32 to avoid [further problems]. To prevent the first guide plate 4 from swinging too much, and to limit the second stop portion 54 by the lower stop portion 36, the second guide plate 5's swing can be prevented from being too large. If the wafer 6 size changes and the spacing between the first guide plate 4 and the second guide plate 5 needs to be adjusted, the first adjusting members 312 are simultaneously adjusted to compress the distance between the first front elastic members 313 and the first guide members 314. The first rear elastic members 316 can appropriately limit the movement distance of the first guide members 314, preventing excessive swing. The first guide plate 4 is too close to the second guide plate 5. At the same time, the second adjusting members 342 are adjusted to compress the distance between the second front elastic members 343 and the second guide members 344. The second rear elastic members 346 can appropriately limit the movement distance of the second guide members 344, so as to prevent the second guide plate 5 from being too close to the first guide plate 4. This ensures that the first guide plate 4 and the second guide plate 5 always maintain a slightly inclined angle and have enough space to create a channel for the airflow 7 to pass through. This achieves the effect that the film application device 1 uses the first guide plate 4 pivotally mounted on the first guide members 314 and the second guide plate 5 pivotally mounted on the second guide members 344 to assist the airflow 7 in completing the film application.

[0028] The embodiments listed above are intended to illustrate one preferred embodiment of the present invention and are not intended to limit the scope of the present invention. Anyone skilled in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

[0029]

[0030] 1: Film application device

[0031] 2: Work Platform

[0032] 21: Control Department

[0033] 22: Mobile Department

[0034] 23: Work Department

[0035] 3: Fluid Guide

[0036] 31: First groove section

[0037] 311: First screw hole

[0038] 312: First adjusting component

[0039] 313: First front elastic element

[0040] 314: First flow guide

[0041] 315: First connection hole

[0042] 316: First rear elastic element

[0043] 32: Upper stop

[0044] 33: First Positioning Section

[0045] 331: Lower elastic element

[0046] 34: Second groove section

[0047] 341: Second screw hole

[0048] 342: Second adjusting component

[0049] 343: Second front elastic element

[0050] 344: Second flow guide

[0051] 345: Second connection hole

[0052] 346: Second rear elastic element

[0053] 35: Second Positioning Section

[0054] 351: Upper elastic element

[0055] 36: Lower stop

[0056] 4: First guide vane

[0057] 41: First Entrance Section

[0058] 42: First Guiding Section

[0059] 43: First Reception Department

[0060] 44: First Reach

[0061] 5: Second guide vane

[0062] 51: Second Entrance

[0063] 52: Second Guiding Section

[0064] 53: Second Reception Department

[0065] 54: Second Reach

[0066] 6: Wafer

[0067] 61: Adhesive film

[0068] 7: Airflow

Claims

1. An airflow-assisted film application device, the film application device comprising: a working platform, a control unit on one side of the working platform and a moving unit on the other side, and a working unit between the control unit and the moving unit; A guide body is provided on the moving part. The guide body has a first groove and a second groove formed parallel and adjacent to each other on two opposite sides. Each of the first grooves has a first screw hole at one end edge, and a first adjusting member is screwed into each of the first screw holes. Each of the first grooves has a first front elastic member, one end of which abuts against one end of each of the first adjusting members, and the other end of each abuts against one end of a first guide member. Each of the first guide members has a first connecting hole, and the other end of each of the first guide members abuts against a first rear elastic member. An upper stop is provided at one end of the guide body above each of the first grooves, and a stop is provided at the center of one end of the guide body below each of the first grooves. A first positioning part is provided at the position of the first positioning part, and an elastic member is provided through the first positioning part. Each of the second grooves has a second screw hole formed at one end edge. A second adjusting member is screwed into each of the second screw holes. A second front elastic member is provided in each of the second grooves. One end of each of the second front elastic members abuts against one end of each of the second adjusting members, and the other end of each of the second flow guides abuts against one end of each of the second flow guides. Each of the second flow guides has a second connecting hole, and a second rear elastic member abuts against the other end of each of the second flow guides. A second positioning part is provided at the center of the other end of the flow guide and above each of the second grooves. An upper elastic member is provided through the second positioning part. A stop part is provided at the other end of the flow guide and below each of the second grooves. A first guide vane, wherein the first guide vane has a first inlet portion at one end and a first guide portion at the other end, and the first guide vane has a first contact portion on each of its two opposite sides and at the junction of the first inlet portion and the first guide portion, and each of the first contact portions can be pivotally connected to each of the first contact holes, so that the first guide vane can swing between the first slots, and the first inlet portion extends outward to one side at its end edge to form a first abutment portion; A second guide vane, having a second inlet at one end and a second guide at the other end, and having a second contact portion on each of its two opposite sides at the junction of the second inlet and the second guide portion, wherein each of the second contact portions is pivotally connected to each of the second contact holes, allowing the second guide vane to swing between the second slots, and the second guide portion extends outward to one side at its end edge to form a second abutment; a wafer disposed on the working part; and an airflow system that can pass between the first guide vane and the second guide vane.

2. The airflow-assisted film application device as described in claim 1, wherein, The control unit is electrically connected to the moving unit to control the moving unit to move laterally left and right on the working platform.

3. The airflow-assisted film application device as described in claim 1, wherein, The first groove and the second groove are located on the same axis.

4. The airflow-assisted film application device as described in claim 1, wherein, Each of the first adjusting members will be inserted into each of the first grooves, and each of the second adjusting members will be inserted into each of the second grooves.

5. The airflow-assisted film application device as described in claim 1, wherein, The upper stop portion is formed by extending the fluid guide outward, and the lower stop portion is formed by extending the fluid guide outward.

6. The airflow-assisted film application device as described in claim 1, wherein, The first guide portion extends from each of the first contact portions at a slightly inclined angle, and the second guide portion extends from each of the second contact portions at a slightly inclined angle.

7. The airflow-assisted film application device as described in claim 1, wherein, The first guide vane and the second guide vane are mutually corresponding and each is pivotally mounted on the first guide member and the second guide member of the guide fluid.

8. The airflow-assisted film application device as described in claim 1, wherein, A film is attached to the wafer.

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