Test jig

Abstract

This invention provides a flexible substrate that is not easily damaged even when subjected to localized force. The flexible substrate includes: one end portion; another end portion; and a patterned portion 31a3, formed at least between the one end portion and the other end portion. The patterned portion 31a3 has a first tongue 31a41 formed by a cut. The first tongue 31a41 includes: a first region A1, which is the front end region of the first tongue 31a41; and a second region A2, which communicates with the first region A1 and is the root region of the first tongue 31a41. The first tongue 31a41 is electrically connected to other components via the first region A1. The width of the first region A1 of the first tongue 31a41 is greater than the width of the second region A2 of the first tongue 31a41.

Description

[Technical Field]

[0001] This disclosure relates to flexible substrates, inspection fixtures, etc. [Previous Technology]

[0002] In the past, as shown in Patent Document 1, there have been proposals for flexible substrates that can stretch and extend.

[0002] [Previous Technical Documents]

[0002] [Patent Documents]

[0003] Patent Document 1: Japanese Patent Application Publication No. 2020-92277

[0004] However, when the flexible substrate is subjected to localized force, a portion of the flexible substrate may be bent or damaged.

[0005] Therefore, one object of the present invention is to provide a flexible substrate or the like that is not easily damaged even when subjected to localized force. Other objects of the present invention will be apparent from the description herein.

[0006] The flexible substrate of the present invention comprises: one end portion; another end portion; and a patterned portion formed at least between the one end portion and the other end portion. The patterned portion has a first tongue formed by a cut. The first tongue includes: a first region, which is a front end region of the first tongue; and a second region, which communicates with the first region and is a root region of the first tongue. The first tongue is electrically connected to other components via the first region. The width of the first region is greater than the width of the second region.

[0007] Thus, according to the present invention, a flexible substrate or the like that is not easily damaged even when subjected to localized force can be provided. [Simplified Explanation of the Diagram]

[0008] Figure 1 is an exploded perspective view of the first inspection fixture of the first embodiment.

[0008] Figure 2 is an exploded perspective view of the connector contact part, the substrate holding part, and the substrate part.

[0008] Figure 3 is an exploded perspective view of the front substrate assembly.

[0008] Figure 4 is a perspective view of the first flexible substrate viewed from the front and from the bottom.

[0008] Figure 5 is a perspective view of the area with the tongue of the first flexible substrate viewed from the front and from the bottom.

[0008] Figure 6 is a view of the area with the tongue on the first flexible substrate viewed from below.

[0008] Figure 7 is an exploded perspective view of the assembly of the first flexible substrate and the first connector, the front retaining part, the front connector seat, and the front probe group.

[0008] Figure 8 is an exploded perspective view of the rear substrate assembly.

[0008] Figure 9 is a perspective view of the first inspection fixture viewed from the front and from the bottom.

[0008] Figure 10 is a front view of the first inspection fixture viewed from the front side.

[0008] Figure 11 is a yz cross-sectional view of the first inspection fixture and the inspection object connector in the first state, and includes the area where the first spring is located.

[0008] Figure 12 is an enlarged xz cross-sectional view of the tongue region of the first flexible substrate in the first state.

[0008] Figure 13 is a yz cross-sectional view of the first inspection fixture and the inspection object connector in the second state, including the area where the first spring is located.

[0008] Figure 14 is a yz cross-sectional view of the first inspection fixture and the inspection object connector in the third state, including the area where the first spring is located.

[0008] Figure 15 is a yz cross-sectional view of the first inspection fixture and the inspection object connector in the fourth state, including the area where the first spring is located.

[0008] Figure 16 is an enlarged xz cross-sectional view of the tongue region of the first flexible substrate in the fourth state.

[0008] Figure 17 is a yz cross-sectional view of the first inspection fixture and the inspection object connector in the fifth state, including the area where the first spring is located.

[0008] Figure 18 is a perspective view of the second inspection fixture in the second embodiment.

[0008] Figure 19 is a cross-sectional view of the second inspection fixture.

[0008] Figure 20 is a perspective view of the first flexible substrate of the second embodiment.

[0008] Figure 21 is a perspective view of the third inspection fixture of the third implementation type.

[0008] Figure 22 is a perspective view of the first flexible substrate of the third embodiment.

[0008] Figure 23 is a perspective view of the fourth inspection fixture of the fourth implementation type.

[0008] Figure 24 is a perspective view of the first to tenth flexible substrates of the fourth embodiment.

[0008] Figure 25 is an enlarged perspective view of the area of ​​the first flexible substrate in Figure 24 that has the first tongue and the second tongue.

Implementation Method

[0009] The first embodiment will be described below using Figures 1 to 17. However, the embodiment is not limited to the following embodiments. Furthermore, the content described in one embodiment generally applies to other embodiments as well. Moreover, each embodiment and its variations can be appropriately combined.

[0010] (First inspection fixture 1)

[0010] As shown in FIG1, the first inspection fixture 1 of the first embodiment includes a connector contact portion 10, a substrate holding portion 20, a substrate portion 30, and a horizontal position adjustment portion 40. The first inspection fixture 1 contacts the inspection object connector (BtoB connector; Board to Board connector) 100 of the inspection object via the connector contact portion 10, and is electrically connected to the internal first flexible substrate 31a and second flexible substrate 32a. Here, the inspection object connector 100 is omitted from the illustration in FIG1.

[0011] To illustrate the directions, the horizontal direction (front-to-back direction) of the arrangement of the two substrate assemblies (front substrate assembly 31 and rear substrate assembly 32) is defined as the x-direction, the direction perpendicular to the x-direction and formed by the arrangement of the two support portions 43 (left-right direction) is defined as the y-direction, and the direction perpendicular to both the x-direction and the y-direction (up-down direction) is defined as the z-direction. In Figure 1, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the upward direction, respectively. Specifically, the direction from the rear substrate assembly 32 toward the front substrate assembly 31 is defined as the forward direction, the direction from the support portion 43 located in the lower right of Figure 1 toward the support portion 43 located in the upper left of Figure 1 is defined as the right direction, and the direction from the connector contact portion 10 toward the horizontal position adjustment portion 40 is defined as the upward direction.

[0012] (Connector Contact 10)

[0012] As shown in FIG. 2, the connector contact portion 10 has a floating guide (first movable member) 11 and a first spring (first elastic member) 13. The floating guide 11 has a through hole in the z-direction. The hole in the floating guide 11 allows the lower end of the lower retaining portion 21 and the lower end of the base plate portion 30 to be inserted upward in the z-direction. The hole in the floating guide 11 allows the upper end of the inspection target connector 100 to be inserted downward in the z-direction. That is, the inspection target connector 100 is installed on the floating guide 11 in a detachable state.

[0013] In order to facilitate the insertion of the inspection object connector 100, it is preferable to provide a guide portion 11a with an inclined shape in which the opening in the lower z direction gradually increases in the lower z direction of the hole in the floating guide 11.

[0014] The upper part of the floating guide 11 in the z-direction is fixed to the lower holding part 21 by screws. The first spring 13 is provided between the floating guide 11 and the lower holding part 21. The first spring 13 pushes the floating guide 11 to move away from the first flexible substrate 31a and the second flexible substrate 32a in the z-direction. Therefore, as long as no force is applied that pushes the first inspection fixture 1 from the upper part of the z-direction into the inspection object connector 100 or in a direction of contraction in the z-direction, the floating guide 11 and the lower holding part 21 are kept in a separated state by the first spring 13.

[0015] (Substrate holding part 20)

[0015] The substrate holding portion 20 has a lower holding portion (pin holder) 21 and an upper holding portion (connecting plate) 23. The lower holding portion 21 is provided on the lower side of the substrate portion 30 in the z-direction. The upper holding portion 23 is provided on the upper side of the substrate portion 30 in the z-direction. The lower holding portion 21 and the upper holding portion 23 clamp the substrate portion 30 along the z-direction.

[0016] The lower holding portion 21 has a through hole in the z-direction. The hole in the lower holding portion 21 allows the lower end of the substrate portion 30 to be inserted upward in the z-direction. A protrusion is formed on the lower side of the lower holding portion 21 in the z-direction. This protrusion is inserted into the hole of the floating guide 11 from the upper side in the z-direction.

[0017] The upper z-direction of the lower retaining portion 21 is for mounting the front retaining portion 31c of the front substrate assembly 31 and the rear retaining portion 32c of the rear substrate assembly 32. The front retaining portion 31c is mounted to the lower retaining portion 21 by means of engagement and attachment using a boss hole. The rear retaining portion 32c is mounted to the lower retaining portion 21 by attachment.

[0018] The lower z-direction side of the upper retaining portion 23 is used for mounting the front push block 31i of the front substrate assembly 31 and the rear push block 32i of the rear substrate assembly 32. The front push block 31i is mounted to the upper retaining portion 23 by means of a screw that passes through a round hole from the upper z-direction. The rear push block 32i is mounted to the upper retaining portion 23 by means of a screw that passes through an elongated hole extending in the x-direction from the upper z-direction. The elongated hole extending in the x-direction of the upper retaining portion 23 is used to adjust the x-direction spacing between the front retaining portion 31c that holds the front push block 31i and the rear retaining portion 32c that holds the rear push block 32i.

[0019] The x-direction spacing between the front retaining portion 31c and the rear retaining portion 32c depends on the x-direction spacing of the electrode positions of the connector 100 under inspection. When the x-direction spacing of the electrodes of the connector 100 under inspection is narrow, the front retaining portion 31c and the rear retaining portion 32c are installed on the lower retaining portion 21, and the front push block 31i and the rear push block 32i are installed on the upper retaining portion 23, while the x-direction spacing between the front retaining portion 31c and the rear retaining portion 32c is narrow. When the x-direction spacing of the electrodes of the connector 100 under inspection is wide, the front retaining portion 31c and the rear retaining portion 32c are installed on the lower retaining portion 21, and the front push block 31i and the rear push block 32i are installed on the upper retaining portion 23, while the x-direction spacing between the front retaining portion 31c and the rear retaining portion 32c is wide.

[0020] That is, the substrate holding part 20 holds a plurality of flexible substrates (first flexible substrate 31a, second flexible substrate 32a) in a state where the interval in the x-direction can be adjusted.

[0021] (Substrate part 30)

[0021] The substrate portion 30 has a front substrate assembly 31 and a rear substrate assembly 32. The front substrate assembly 31 is disposed on the front side in the x direction, and the rear substrate assembly 32 is disposed on the rear side in the x direction.

[0022] (Front side substrate assembly 31)

[0022] As shown in FIG3, the front substrate assembly 31 has a first flexible substrate (flexible substrate) 31a, a first connector 31b, a front retaining part 31c, a front connector seat 31d, a front connector pressing rubber 31e, a front connector cover 31f, a front probe group 31g, a front second spring 31h, and a front push block (second movable member) 31i.

[0023] (First flexible substrate 31a)

[0023] As shown in Figures 4 and 5, the first flexible substrate 31a has a connector connection end (one end) 31a1, a retaining part connection end (the other end) 31a2 and a pattern part 31a3.

[0024] The connector connection end 31a1 is the front end of the first flexible substrate 31a in the x direction and the upper end in the z direction. The first connector 31b is mounted to the connector connection end 31a1 by soldering or the like. The retaining part connection end 31a2 is the rear end of the first flexible substrate 31a in the x direction and the upper end in the z direction, and is to be hooked onto the front retaining part 31c. Specifically, the hole 31a21 provided in the retaining part connection end 31a2 is inserted into the boss 31c3 on the upper z direction of the probe receiving part 31c1 provided in the front retaining part 31c. However, the hooking of the retaining part connection end 31a2 and the front retaining part 31c is not limited to the insertion of the hole 31a21 and the boss 31c3.

[0025] The patterned portion 31a3 is the area between the connector connection end 31a1 and the retaining portion connection end 31a2. The lower (surface) surface of the patterned portion 31a3 in the z-direction is formed with a pattern of a transmission line (signal line, ground line, or power line) extending from the connector connection end 31a1. When viewed in the y-direction, the patterned portion 31a3 is bent into a generally V-shape. The lower end of the lower surface of the patterned portion 31a3 in the z-direction, which is bent into a generally V-shape, is provided with the end of the transmission line. This end of the transmission line is used as a substrate-side electrode for electrical connection with the electrode of the connector 100 under inspection.

[0026] (Slit S, Tongue 31a4)

[0026] As shown in FIG6, a slit S is provided around the end of the transmission line (including the area where the pattern portion 31a3 is electrically connected to the connector 100 to be inspected). The slit S has a starting point S1 and an ending point S2 on the side closer to the connector connection end 31a1 than the end of the transmission line. The starting point S1 and the ending point S2 are positioned across the transmission line. The slit S extends from the starting point S1 along the transmission line toward the end of the transmission line and extends to surround the end of the transmission line, and then extends along the transmission line to the ending point S2. A generally U-shaped tongue 31a4 is formed by the slit S. That is, the pattern portion 31a3 has a tongue 31a4. The slit S has two closed ends (starting point S1 and ending point S2) of the cut (cut), but it is also possible that one end (one of the starting point S1 and the ending point S2) is an open end and the other end (the other of the starting point S1 and the ending point S2) is a closed end.

[0027] (First tongue piece 31a41, Second tongue piece 31a42)

[0027] The tongue 31a4 has a first tongue 31a41 and a second tongue 31a42. Each of the first tongue 31a41 and the second tongue 31a42 has a first region (the front end region of the tongue) A1 and a second region (the root region of the tongue) A2. The first region A1 is the region where the end of the transmission line is located. Each of the first tongue 31a41 and the second tongue 31a42 is electrically connected to the inspection object connector 100 and other components via the first region A1. The second region A2 is connected to the first region A1. The second region A2 is the region where the transmission line extends, including the starting point S1 and the ending point S2 (the end of the cut) of the slit S.

[0028] Preferably, the end of the signal line in the transmission line forms a first tongue 31a41. The first tongue 31a41 has a generally U-shaped shape with a wide front end. The width of the first region A1 of the first tongue 31a41 is greater than the width of the second region A2 of the first tongue 31a41. Specifically, the first region A1 of the first tongue 31a41 has a region with a width greater than the second region A2 of the first tongue 31a41 (dimensional in the y-direction). That is, the first region A1 of the first tongue 31a41 has a shape in which the width gradually widens from the region connected to the second region A2 of the first tongue 31a41 toward the foremost part and then gradually narrows.

[0029] Compared to the second region A2 of the first tongue 31a41, the first region A1 of the first tongue 31a41 has both a region that rapidly widens and a region that rapidly narrows. Here, the "region that rapidly widens compared to the second region A2" refers to the region of the first region A1 that is close to the second region A2, while the "region that rapidly narrows compared to the second region A2" refers to the foremost part of the first region A1.

[0030] In the first embodiment, the second region A2 of the first tongue 31a41 has a generally square shape enclosed by two slits S, and the first region A1 of the first tongue 31a41 has a generally circular shape. For example, when the second region A2 of the first tongue 31a41 is designated as the front side and the first region A1 of the first tongue 31a41 is designated as the rear side, the rear side has a region with a width greater than that of the front side. That is, the first tongue 31a41 has a generally front-rounded and rear-rounded shape. However, the first region A1 of the first tongue 31a41 is not limited to a generally circular shape; for example, it can also be a polygonal shape.

[0031] The width of the wider region of the first region A1 of the first tongue 31a41 and the shape of the first region A1 are designed to avoid physical interference with adjacent slits or through holes. For example, the width of the wider region of the first region A1 of the first tongue 31a41 (or the diameter of the circle if the first region A1 is circular) is approximately twice the width of the second region A2 of the first tongue 31a41.

[0032] It is preferable that the ends of the grounding wire and the power line in the transmission line form a second tongue 31a42. The second tongue 31a42 has a generally U-shaped shape with the front end not including a wide region. The first region A1 of the second tongue 31a42 does not have a region with a width greater than the second region A2 of the second tongue 31a42. That is, the first region A1 of the second tongue 31a42 does not have a region whose width widens from the region connected to the second region A2 of the second tongue 31a42 toward the front end, but has a shape with a gradually narrowing width.

[0033] Compared to the second region A2 of the second tongue 31a42, the first region A1 of the second tongue 31a42 is a region whose width narrows sharply. Here, the so-called "region whose width narrows sharply compared to the second region A2" refers to the foremost part of the first region A1.

[0034] Therefore, the width of the first region A1 of the second tongue 31a42 is the same as the width (dimensional in the y direction) of the second region A2 of the second tongue 31a42. That is, the width of the first region A1 of the second tongue 31a42 is the same as or less than the width of the second region A2 of the second tongue 31a42.

[0035] In the first embodiment, the second region A2 of the second tongue 31a42 has a generally square shape enclosed by two slits S, and the first region A1 of the second tongue 31a42 has a generally semi-circular shape. However, the first region A1 of the second tongue 31a42 is not limited to a generally semi-circular shape, but may also be, for example, a semi-polygonal shape.

[0036] Here, the pattern provided on the lower (surface) side of the pattern section 31a3 in the z-direction is not limited to transmission lines. Furthermore, on the lower (surface) side of the pattern section 31a3 in the z-direction, a plurality of through holes 31a5 and grounding wires may be provided only in the area to be connected to the connector 100 to be inspected (the first area A1 of the tongue 31a4) and in the area for soldering the first connector 31b of the connector connection end 31a1. In this case, since the area where the grounding wire is provided is reduced, it becomes less cost-effective compared to the case where the grounding wire pattern is provided on the entire lower (surface) side of the pattern section 31a3 in the z-direction.

[0037] In order to increase the downward displacement in the z-direction by the probe P of the front probe group 31g (described later), it is preferable to increase the length of the slit S in the longitudinal direction of the second region A2 forming the tongue 31a4. On the other hand, in order to prevent the high-frequency characteristics of the signal line from deteriorating, it is preferable to shorten the length of the slit S in the longitudinal direction of the second region A2 forming the tongue 31a4. Therefore, the length of the slit S in the longitudinal direction of the second region A2 forming the tongue 31a4 should be determined by considering both the downward displacement of the tongue 31a4 in the z-direction and the high-frequency characteristics of the signal line. Only one signal line, ground line, or power line may be provided in one tongue 31a4, or at least one of a plurality of signal lines, ground lines, and power lines may be provided.

[0038] Furthermore, the first tongue 31a41 formed by the slit S is not limited to a general U-shape with a wide front end. As long as the patterned portion 31a3 can be displaced from the upper z-direction to the lower z-direction by the probe P of the front probe group 31g in an unextended state, it can be other shapes with a wide front end, such as a general groove shape.

[0039] Furthermore, the second tongue 31a42 formed by the slit S is not limited to a general U-shape. As long as the patterned portion 31a3 can be displaced from the upper z-direction to the lower z-direction by the probe P of the front probe group 31g in an unextended state, it can be other shapes such as a general V-shape, a general C-shape, a general L-shape, or a general groove shape.

[0040] The z-direction upper (back) surface of the patterned portion 31a3, that is, the side opposite to the side to which it is electrically connected to the connector 100 to be inspected, is provided with a ground wire or ground plane that is different from the ground wire of the z-direction lower (surface) surface. The patterned portion 31a3 is provided with a plurality of through holes 31a5 for electrically connecting the z-direction upper surface and the z-direction lower surface. Here, Figures 4 to 6 show an example of having a plurality of through holes 31a5. However, the lead of the symbol "31a5" points only to one of the plurality of through holes 31a5.

[0041] Since the pattern part 31a3 is provided with a plurality of through holes 31a5, even if only one side of the pattern part 31a3 (the side electrically connected to other components, the surface side) is electrically connected to other components, the other side of the pattern part 31a3 (the opposite side of the side electrically connected to other components, the back side) can still be electrically connected to other components.

[0042] Furthermore, depending on the specifications of the connector 100 being inspected, the grounding wire or ground plane on the z-direction side of the patterned portion 31a3 and the plurality of through holes 31a5 may be omitted. In addition, in figures other than Figures 4 to 6, there may be cases where the transmission line, slit S, tongue 31a4, and through holes 31a5 of the patterned portion 31a3 are omitted.

[0043] In addition, a plurality of through holes 31a5 and a grounding area (grounding wire or ground plane) on the upper (back) side in the z direction may be provided only in the area to be connected to the connector 100 of the object to be inspected (the first area A1 of the tongue 31a4) and the area for soldering the first connector 31b of the connector connection end 31a1.

[0044] (First Connector 31b)

[0044] As shown in FIG7, the first connector 31b is installed on the connector connection end 31a1 of the first flexible substrate 31a. The first connector 31b is used to electrically connect the first flexible substrate 31a to an inspection device (not shown).

[0045] (Front side retaining part 31c)

[0045] The front holding portion 31c holds the front connector seat 31d in the front direction in the x direction. The front holding portion 31c holds the holding portion connection end 31a2 of the first flexible substrate 31a in the rear direction in the x direction.

[0046] (Probe receiving part 31c1)

[0046] A probe receiving portion 31c1 for holding the front probe group 31g is provided on the rear side in the x direction and the lower side in the z direction of the front holding portion 31c. The probe receiving portion 31c1 is formed of resin material. When the probe receiving portion 31c1 is formed of resin material, it is lighter, easier to process, and cheaper than when the probe receiving portion 31c1 is formed of metal material. However, the probe receiving portion 31c1 may also be formed of metal material.

[0047] The probe receiving portion 31c1 is composed of a groove (upper groove 31c11, lower groove 31c12) extending in the z-direction and a hole (upper hole 31c13, lower hole 31c14) extending in the z-direction. The widths of the upper groove 31c11 and the lower groove 31c12 in the x and y directions are larger than the outer diameters of the spring receiving portion (cylinder) P2 of the probe P constituting the front probe group 31g. The upper end of the upper hole 31c13 is connected to the lower end of the upper groove 31c11, and the lower end of the upper hole 31c13 is connected to the upper end of the lower groove 31c12. The inner diameter of the upper hole 31c13 is larger than the outer diameter of the spring receiving portion P2 of the probe P constituting the front probe group 31g. The upper end of the lower hole portion 31c14 is connected to the lower end of the lower groove portion 31c12, and the lower end of the lower hole portion 31c14 is open. The inner diameter of the lower hole portion 31c14 is larger than the outer diameter of the front end portion P1 of the probe P constituting the front probe group 31g, but smaller than the outer diameter of the spring receiving portion P2.

[0048] (Method for forming probe receiving part 31c1)

[0048] The upper groove portion 31c11 and the lower groove portion 31c12 are formed by means of a mold. The holes in the upper hole portion 31c13 and the lower hole portion 31c14 are formed by making holes in the cuboid area using pins or the like. However, the method of forming the probe receiving portion 31c1 is not limited to the above.

[0049] (Mounting of the first flexible substrate 31a to the front holding portion 31c)

[0049] The first flexible substrate 31a is mounted to the front holding portion 31c to satisfy the following two conditions. First condition: The lower side of the front holding portion 31c in the z-direction faces the upper side of the patterned portion 31a3 of the first flexible substrate 31a in the z-direction. Second condition: The first region A1 of the tongue 31a4 of the first flexible substrate 31a is located on the lower side of the lower hole portion 31c14 of the probe receiving portion 31c1 of the front holding portion 31cc in the z-direction.

[0050] (Groove part 31c2 for push block)

[0050] A groove (push block groove 31c2) opening upward in the z-direction is provided on the probe receiving part 31c1 of the front retaining part 31c. The push block groove 31c2 is for the front push block 31i to be inserted from the z-direction upward (see Figure 3).

[0051] (Protrusion 31c3)

[0051] A boss 31c3 extending upward in the z-direction is provided on the probe receiving portion 31c1 of the front holding portion 31c. The boss 31c3 is used to hook the holding portion connecting end 31a2 of the first flexible substrate 31a.

[0052] (Front connector seat 31d)

[0052] The front connector seat 31d holds the first connector 31b in the front direction in the x direction. The front connector seat 31d is located further in the front direction in the x direction than the front retaining part 31c, and is mounted on the front retaining part 31c.

[0053] The assembly system of the first flexible substrate 31a and the first connector 31b is mounted to the assembly of the front retaining portion 31c and the front connector seat 31d such that it clamps the front retaining portion 31c and the front connector seat 31d in the x-direction and surrounds the lower end of the front retaining portion 31c. The front retaining portion 31c is fixedly mounted to the front connector seat 31d by screws from the rear side in the x-direction.

[0054] (Front connector press rubber 31e)

[0054] The front connector pressing rubber 31e is disposed between the first connector 31b and the front connector cover 31f. The front connector pressing rubber 31e is used to minimize the adverse effects caused by the uneven height of the first connector 31b when electrically connected to the inspection device. In addition, the front connector pressing rubber 31e is used to make it difficult to move the first connector 31b when the cable extending from the inspection device needs to be attached or detached from the first connector 31b.

[0055] (Front connector cover 31f)

[0055] The front connector cover 31f covers the patterned portion 31a3 of the first flexible substrate 31a and the front side of the first connector 31b in the x-direction. The front connector cover 31f is mounted on the front connector seat 31d by screws from the front side in the x-direction. The front connector cover 31f and the front connector seat 31d clamp the front connector 31b and the front connector pressing rubber 31e in the x-direction.

[0056] (Anterior probe group 31g)

[0056] The front probe group 31g has a plurality of probes (telescopic members) P that extend and retract in the z-direction. The plurality of probes P are arranged in the y-direction. Each probe P constituting the front probe group 31g has a front end portion P1 on the lower side in the z-direction, and a spring receiving portion P2 on the upper side in the z-direction from the front end portion P1. The spring receiving portion P2 is used to house a spring (not shown). The front end portion P1 is pushed in the direction of full length extension by the spring in the spring receiving portion P2.

[0057] When the first flexible substrate 31a is not installed in the front holding portion 31c, and each of the probes P constituting the front probe group 31g is placed in the probe receiving portion 31c1 of the front holding portion 31c, the front end P1 of the probe P protrudes downward in the z direction from the hole (lower hole portion 31c14) at the lower end of the probe receiving portion 31c11. However, since the step difference between the lower hole portion 31c14 and the lower groove portion 31c12 retains the spring receiving portion P2, the probe P will not fall out of the lower hole portion 31c14.

[0058] When the first flexible substrate 31a is mounted on the front holding portion 31c, and each of the probes P constituting the front probe group 31g is placed on the probe receiving portion 31c1 of the front holding portion 31c, the front end P1 of the probe P abuts against the back side of the first region A1 of the tongue 31a4 of the first flexible substrate 31a. For example, among the plurality of probes P, the first probe P is in a position abutting against a region (the first region A1 of a tongue 31a4) of the first flexible substrate 31a that is to be electrically connected to the connector 100 to be inspected. Furthermore, among the plurality of probes P, the second probe P, which is different from the first probe P, is in a position abutting against a region (a tongue 31a4) of the first flexible substrate 31a that is to be electrically connected to the connector 100 to be inspected, and is different from the first region A1 of the tongue 31a4 of the tongue 31a4 corresponding to the first probe P. However, since the probe P is relatively light, it only makes contact and hardly causes the tongue 31a4 to shift downward in the z direction.

[0059] The assembly system of the first flexible substrate 31a and the first connector 31b is installed onto the assembly of the front holding part 31c and the front connector seat 31d in a state where each of the probes P constituting the front probe group 31g has been placed on the probe receiving part 31c1.

[0060] (Front side second spring 31h, front side push block 31i)

[0060] The front pusher 31i is inserted into the groove (pusher groove 31c2) of the front retaining portion 31c from the upper side in the z direction while being movable in the z direction. The front pusher 31i is used to press each of the probes P constituting the front probe group 31g downward in the z direction. That is, the plurality of probes P constituting the front probe group 31g are disposed between the first flexible substrate 31a and the front pusher 31i.

[0060] A front second spring 31h is provided between the front retaining part 31c and the front push block 31i. The front second spring 31h pushes the front push block 31i so that it moves away from the front retaining part 31c in the z direction.

[0061] The spring characteristics (spring compression, spring constant, etc.) of the first spring 13, the front second spring 31h, and the rear second spring 32h (described later) are set such that when subjected to a force applied in the direction of contraction along the z-direction, the compression of the front second spring 31h and the rear second spring 32h in the z-direction will only end after the first spring 13 has finished compressing in the z-direction. That is, the front second spring 31h and the rear second spring 32h will only contract after the first spring 13 has contracted.

[0062] That is, when the connector 100 to be inspected is connected to the first flexible substrate 31a and the second flexible substrate 32a, as described below, the movement control of the floating guide 11 with the first flexible substrate 31a and the second flexible substrate 32a is performed by the first spring 13, the front second spring 31h, and the rear second spring 32h. After the first distance d1 between the floating guide 11 and the first flexible substrate 31a and the second flexible substrate 32a shortens, the second distance d2 between the front push block 31i and the first flexible substrate 31a and the second distance d2 between the rear push block 32i and the second flexible substrate 32a shortens at approximately the same time.

[0063] For example, the first distance d1 is the distance in the z-direction between the lower end of the floating guide 11 (the opening area for the insertion of the inspection object connector 100) and the lower end of the first flexible substrate 31a (the area where the patterned portion 31a3 is electrically connected to the inspection object connector 100). For example, the second distance d2 is the distance in the z-direction between the lower end of the front push block 31i (the area that abuts against the front probe group 31g) and the lower end of the first flexible substrate 31a (the area where the patterned portion 31a3 is electrically connected to the inspection object connector 100) (see FIG9).

[0064] Therefore, even if the first inspection fixture 1 is pressed from the z-direction upward toward the inspection object connector 100, or in a direction of contraction along the z-direction, as long as the first spring 13 does not contract, the front push block 31i and the front retaining part 31c are kept in a separated state due to the front second spring 31h, and the rear push block 32i and the rear retaining part 32c are kept in a separated state due to the rear second spring 32h.

[0065] (Rear substrate assembly 32)

[0065] The rear substrate assembly 32 includes a second flexible substrate 32a, a second connector 32b, a rear retaining part 32c, a rear connector seat 32d, a rear connector pressing rubber 32e, a rear connector cover 32f, a rear probe group 32g, a rear second spring 32h, and a rear push block (second movable member) 32i.

[0066] Except for the reversal of the x-direction, the configuration of the rear substrate assembly 32 is the same as that of the front substrate assembly 31. The second flexible substrate 32a of the rear substrate assembly 32 is equivalent to the first flexible substrate 31a of the front substrate assembly 31. The second connector 32b of the rear substrate assembly 32 is equivalent to the first connector 31b of the front substrate assembly 31. The rear holding portion 32c of the rear substrate assembly 32 is equivalent to the front holding portion 31c of the front substrate assembly 31. The rear connector seat 32d of the rear substrate assembly 32 is equivalent to the front connector seat 31d of the front substrate assembly 31. The rear connector pressing rubber 32e of the rear substrate assembly 32 is equivalent to the front connector pressing rubber 31e of the front substrate assembly 31. The rear connector cover 32f of the rear substrate assembly 32 is equivalent to the front connector cover 31f of the front substrate assembly 31. The rear probe group 32g of the rear substrate assembly 32 is equivalent to the front probe group 31g of the front substrate assembly 31. The rear second spring 32h of the rear substrate assembly 32 is equivalent to the front second spring 31h of the front substrate assembly 31. The rear push block 32i of the rear substrate assembly 32 is equivalent to the front push block 31i of the front substrate assembly 31.

[0067] (Horizontal position adjustment part 40)

[0067] The horizontal position adjustment part 40 has a third spring (third elastic member) 41, a support part (third movable member) 43, and a bracket 45 (see Figure 1).

[0068] (Third spring 41, support part 43)

[0068] Two support units 43 are provided along the y-direction. Each of the two support units 43 has a built-in coil spring (not shown).

[0069] The support part 43 is used to absorb the offset of the first region A1 of the tongue 31a4 of the first flexible substrate 31a of the front substrate assembly 31 and the front end region of the tongue of the second flexible substrate 32a of the rear substrate assembly 32 with the position of the electrode of the inspection target connector 100 facing each other in the z direction.

[0070] For example, suppose that the first region A1 of the tongue 31a4 of the first flexible substrate 31a of the front substrate assembly 31 and the front end region of the tongue of the second flexible substrate 32a of the rear substrate assembly 32 are offset in the xy plane from the position of the electrode of the inspection target connector 100 facing each other in the z direction. In this case, when the first inspection fixture 1 is installed on the inspection target connector 100, the connector contact portion 10, the substrate holding portion 20 and the substrate portion 30 can be moved in the xy plane without moving the horizontal position adjustment portion 40.

[0071] The support part 43 is fixed to the upper retaining part 23 by a screw from the lower side in the z direction. A third spring 41 is provided between the support part 43 and the upper retaining part 23. The third spring 41 pushes the support part 43 to move away from the upper retaining part 23 in the z direction.

[0072] The spring characteristics (spring compression, spring constant, etc.) of the first spring 13, the front second spring 31h, the rear second spring 32h, and the third spring 41 are set such that when subjected to a force in the direction of contraction along the z-direction, the compression of the third spring 41 in the z-direction ends only after the compression of the first spring 13, the front second spring 31h, and the rear second spring 32h in the z-direction has ended. That is, the third spring 41 contracts only after the first spring 13, the front second spring 31h, and the rear second spring 32h have contracted.

[0073] That is, when the connector 100 to be inspected is connected to the first flexible substrate 31a and the second flexible substrate 32a, as described below, the movement control of the floating guide 11, the front push block 31i, the rear push block 32i, and the support part 43 is performed by the first spring 13, the front second spring 31h and the rear second spring 32h, and the third spring 41. After the first distance d1 between the floating guide 11 and the first flexible substrate 31a and the second flexible substrate 32a shortens, the second distance d2 between the front push block 31i and the first flexible substrate 31a and the second distance d2 between the rear push block 32i and the second flexible substrate 32a shortens at approximately the same time. Furthermore, after the second distance d2 between the front push block 31i and the first flexible substrate 31a and the second distance d2 between the rear push block 32i and the second flexible substrate 32a become shorter, the third distance d3 between the support part 43 and the first flexible substrate 31a and the second flexible substrate 32a becomes shorter.

[0074] For example, the distance in the z direction between the lower end of the third distance d3 system support 43 (the area facing the upper holding part 23 in the z direction) and the lower end of the first flexible substrate 31a (the area where the pattern part 31a3 is electrically connected to the inspection object connector 100).

[0075] Therefore, even if the first inspection fixture 1 is pressed from the z-direction upward toward the inspection object connector 100 and the force is applied in the direction of contraction along the z-direction, as long as the first spring 13, the front second spring 31h and the rear second spring 32h do not contract, the support part 43 and the upper holding part 23 are kept in a separated state by the third spring 41.

[0076] As an example of spring characteristics, the setting of the spring characteristics of each spring can be such that the spring pressure of the third spring 41 is greater than the spring pressure of the front second spring 31h and the rear second spring 32h, and the spring pressure of the front second spring 31h and the rear second spring 32h is greater than the spring pressure of the first spring 13.

[0077] Furthermore, regarding the example of spring characteristics, the setting of the spring characteristics of each spring can be such that the combined spring constant (elastic coefficient) of the two third springs 41 is greater than the combined spring constant (elastic coefficient) of the two front second springs 31h and the two rear second springs 32h, and the combined spring constant (elastic coefficient) of the two front second springs 31h and the two rear second springs 32h is greater than the combined spring constant (elastic coefficient) of the two first springs 13.

[0078] (Bracket 45)

[0078] The bracket 45 is a device (not shown) installed on an inspection device, working machine, etc., to hold the first inspection fixture 1 and move the first inspection fixture 1. The bracket 45 is installed on the upper side of the two support parts 43 in the z-direction. The bracket 45 is fixed to the support parts 43 by screws from the upper side in the z-direction.

[0079] As shown in Figures 9 and 10, the first spring 13, the front second spring 31h, and the rear second spring 32h are configured such that a portion of the first spring 13 is visible from the outside, while the front second spring 31h and the rear second spring 32h are almost invisible from the outside (not visible from the front in the x-direction and the rear in the x-direction). Furthermore, the third spring 41 is configured such that at least a portion of the third spring 41 is visible from the outside when in its extended state.

[0080] (Materials, metal parts, resin parts of each part)

[0080] Among the components constituting the first inspection fixture 1, the conductive areas such as the first flexible substrate 31a, the front probe group 31g, the rear probe group 32g, and the screws are made of metal. The other components constituting the first inspection fixture 1 are made of non-conductive components such as resin.

[0081] (Connection procedure of the first inspection fixture 1 to the inspection object connector 100)

[0081] Next, the changes in the extension and retraction state of the first spring 13 when the first inspection fixture 1 is moved from the upper side of the z-direction to the lower side of the z-direction and connected to the inspection object connector 100 will be described (see Figures 11 to 17).

[0082] Although the rear second spring 32h is not shown in the yz cross-sectional configuration diagrams of Figures 11, 13 to 15, and 17, the rear second spring 32h is located behind the front second spring 31h in the x direction and extends and retracts in the same manner as the front second spring 31h. Furthermore, although the rear push block 32i is not shown in the yz cross-sectional configuration diagrams of Figures 11, 13 to 15, and 17, the rear push block 32i is located behind the front push block 31i in the x direction and moves in the same manner as the front push block 31i. Furthermore, although the rear probe group 32g is not shown in the yz cross-sectional configuration diagrams of Figures 11, 13 to 15, and 17, the rear probe group 32g is located behind the front probe group 31g in the x direction and operates in the same manner as the front probe group 31g. Furthermore, although the tongue of the second flexible substrate 32a is not shown here, the tongue of the second flexible substrate 32a is located behind the tongue 31a4 of the first flexible substrate 31a in the x direction and is displaced in the same way as the tongue 31a4 of the first flexible substrate 31a.

[0083] As shown in FIG11, before the first inspection fixture 1 contacts the inspection object connector 100, the first spring 13, the front second spring 31h, the rear second spring 32h, and the third spring 41 are in an extended state, and the first distance d1, the second distance d2, and the third distance d3 are not shortened (first state). At this time, the front end P1 of the probe P constituting the front probe group 31g in the z-direction downward side abuts against the first region A1 of the tongue 31a4 of the first flexible substrate 31a (see FIG12). However, since the probe P is relatively light, the tongue 31a4 of the first flexible substrate 31a is hardly pressed down in the z-direction downward side. Similarly, the front end P1 of the probe P constituting the rear probe group 32g in the z-direction downward side abuts against the front end region of the tongue of the second flexible substrate 32a. However, since the probe P is relatively light, the tongue of the second flexible substrate 32a is hardly pressed down in the z-direction downward side.

[0084] As shown in Figure 13, after the inspection target connector 100 is inserted into the hole of the floating guide 11 of the first inspection fixture 1, the first spring 13, the front second spring 31h, the rear second spring 32h, and the third spring 41 are in an extended state, and the first distance d1, the second distance d2, and the third distance d3 have not shortened (second state). At this time, the first flexible substrate 31a and the second flexible substrate 32a have not yet come into contact with the inspection target connector 100.

[0085] As shown in Figure 14, when the first inspection fixture 1 moves further down in the z direction from the second state, the first spring 13 contracts in the z direction, causing the lower holding part 21 to approach the floating guide 11 (third state).

[0086] At this time, the first flexible substrate 31a and the second flexible substrate 32a are in a state close to the connector 100 to be inspected. Therefore, the first distance d1 in the third state is smaller than the first distance d1 in the second state. However, the front second spring 31h, the rear second spring 32h, and the third spring 41 are almost not contracted. Therefore, the second distance d2 in the third state is almost not smaller than the second distance d2 in the second state. The third distance d3 in the third state is almost not smaller than the third distance d3 in the second state.

[0087] As shown in Figure 15, when the first inspection fixture 1 moves further down in the z-direction from the third state, the front second spring 31h contracts in the z-direction, causing the front push block 31i to approach the front holding part 31c (fourth state). Similarly, the rear second spring 32h contracts in the z-direction, causing the rear push block 32i to approach the rear holding part 32c.

[0088] Furthermore, by moving the front push block 31i downward in the z-direction, the probe P of the front probe group 31g moves downward in the z-direction, causing the front end P1 of the probe P to press against the back side (upper z-direction) of the first flexible substrate 31a. This presses the tongue 31a4 of the first flexible substrate 31a downward in the z-direction (see Figure 16). That is, by using the probe P of the front probe group 31g, the first region A1 of the tongue 31a4 of the first flexible substrate 31a is brought close to the electrode of the connector 100 being inspected. Similarly, by moving the rear push block 32i downward in the z-direction, the probe P of the rear probe group 32g moves downward in the z-direction, causing the front end P1 of the probe P to press against the back side (upper z-direction) of the second flexible substrate 32a. This presses the tongue of the second flexible substrate 32a downward in the z-direction. That is, by means of the probe P of the rear probe group 32g, the front end area of ​​the tongue of the second flexible substrate 32a is brought close to the electrode of the connector 100 to be inspected.

[0089] Accordingly, the first flexible substrate 31a and the second flexible substrate 32a are electrically connected to the inspection target connector 100. Furthermore, the first distance d1 in the fourth state is smaller than the first distance d1 in the third state. Additionally, the front push block 31i and the rear push block 32i are pressed down to the lowest point of their movable range in the z-direction. Therefore, the second distance d2 in the fourth state is smaller than the second distance d2 in the third state. However, the third spring 41 hardly contracts. Therefore, the third distance d3 in the fourth state is not much smaller than the third distance d3 in the third state.

[0090] As shown in Figure 17, when the first inspection fixture 1 moves further downward in the z-direction from the fourth state, the third spring 41 contracts in the z-direction, causing the support 43 and the bracket 45 to approach the upper holding part 23 (fifth state). At this time, the support 43 is in a state close to the upper holding part 23. Therefore, the third distance d3 in the fifth state is smaller than the third distance d3 in the fourth state.

[0091] Whether the front second spring 31h and the rear second spring 32h are in a contracted state cannot be visually discerned from the front and rear sides in the x-direction. Furthermore, whether the front push block 31i and the rear push block 32i have moved downwards in the z-direction cannot be visually discerned from the front and rear sides in the x-direction. However, a portion of the third spring 41 is visually discernible from the outside, at least in its extended state. Therefore, by viewing the area containing the third spring 41 from the outside, it can be confirmed whether the third spring 41 has begun to contract significantly, and whether the movement of the front push block 31i, etc., downwards in the z-direction has ended, thus confirming whether the first flexible substrate 31a and the second flexible substrate 32a are electrically connected to the connector 100 under inspection.

[0092] (The effect of individually pressing with probe P)

[0092] Considering the uneven height of the parts (electrodes) that contact the inspection object connector 100 in the transmission line, if each electrode is individually pressed against the telescopic member such as the probe P, the connection between each electrode and the inspection object connector 100 can be reliably made.

[0093] (The effect of setting the tongue on the first flexible substrate 31a and the second flexible substrate 32a)

[0093] To absorb the unevenness in electrode height, when a telescopic member such as a probe P presses against the electrode and applies localized force, the tongue 31a4 formed in the region of the first flexible substrate 31a containing the portion under force is separated by the slit S from other regions adjacent to the tongue 31a4 of the first flexible substrate 31a and displaces in the direction of being pressed (downward in the z-direction). Furthermore, the tongue formed in the region of the second flexible substrate 32a containing the portion under force is separated by the slit S from other regions adjacent to the tongue of the second flexible substrate 32a and displaces in the direction of being pressed (downward in the z-direction). Therefore, compared to the case without tongues, even with displacement, the flexible substrates (first flexible substrate 31a, second flexible substrate 32a) are less likely to break.

[0094] (The effect of a tongue containing multiple electrodes)

[0094] Compared to a configuration where only one electrode is provided on a single tongue 31a4, the number of slits S can be reduced, making it easier to form the tongue 31a4 in narrow areas. The tongue of the second flexible substrate 32a is the same.

[0095] (Effect of increasing the width of the front end of the tongue)

[0095] When the width (dimensional in the y-direction) of the tongue (the tongue 31a4 of the first flexible substrate 31a and the tongue of the second flexible substrate 32a corresponding to the first tongue 31a41) is narrowed, it has the following advantages compared to the case where the width of the tongue is increased: the tongue can be made lighter, and the tongue can be displaced with less load. If the load used to displace the tongue can be reduced, the total load applied to the first inspection fixture 1 is also reduced, that is, the load applied to the parts constituting the first inspection fixture 1 is reduced, so that the deformation of such parts is reduced, and the product life of the first inspection fixture 1 can be extended.

[0096] Increasing the width of the tongue has the following advantages compared to narrowing the width of the tongue: Since the width of the tongue is wider, the allowable positional deviation of the probe P can be increased, and there is no need to improve the alignment accuracy between the probe P and the tongue, making the processing easier and reducing the manufacturing cost of the first inspection fixture 1.

[0097] In the first embodiment, the width of the front end region (first region A1) of the first tongue 31a41, that is, the region where the first tongue 31a41 contacts the probe P, is set to be greater than the root region (second region A2) of the first tongue 31a41. The root region (second region A2) of the first tongue 31a41 is set to be smaller than the front end region (first region A1) of the first tongue 31a41. This achieves both a lighter tongue and an increased contact area with the probe P, thereby increasing the allowable positional deviation of the probe P. Therefore, the product life of the first inspection fixture 1 can be extended and manufacturing costs can be reduced.

[0098] (The effect of the first tongue piece 31a41 forming a shape that is front-to-back round)

[0098] When the first region A1 is set to be approximately circular and the second region A2 is set to be approximately square (a quadrilateral with approximately equal angles at the four corners), the first tongue 31a41 can be formed more easily than a configuration formed by other shapes. In addition, the distance from the end of the transmission line to the edge of the first region A1 can be made equal, the contact area with the probe P can be maximized, and the allowable positional offset of the probe P can be maximized.

[0099] (The width of the first region A1 of the first tongue piece 31a41 is twice the width of the second region A2.)

[0099] The formation of the first region A1 is facilitated by avoiding physical interference with the adjacent slit S or through hole 31a5.

[0100] (Setting the effects of the first tongue piece 31a41 and the second tongue piece 31a42)

[0100] For the end of a transmission line (signal line) where the allowable position offset of probe P needs to be increased, a first tongue 31a41 may be provided, while for the end of a transmission line (grounding line and power line) where the necessity to increase the allowable amount is lower, a second tongue 31a42 may be provided.

[0101] (Effect of using the end as an electrode)

[0101] When making electrical connections with other components in the middle of a signal line, there is a risk of noise transmission and reception between that connection point and the end due to the antenna effect. By making electrical connections with other components near the end, noise transmission and reception can be reduced. In addition, when making electrical connections with other components in the middle of a ground wire, there is a risk of impedance mismatch.

[0102] (Other implementation types, telescopic components other than probes)

[0102] The first embodiment has described the use of probe P as a telescopic member for pressing the first flexible substrate 31a from the back side (upper side in the z direction) to the lower side in the z direction and for pressing the second flexible substrate 32a from the back side (upper side in the z direction) to the lower side in the z direction. However, if the member is telescopic along the z direction (the direction in which the flexible substrate is pressed), it is not limited to probe P, and other elastic members may also be used.

[0103] (Other implementations, probes are not limited to two rows)

[0103] The first embodiment has already described the arrangement of the front probe group 31g and the rear probe group 32g along the x-direction, that is, the probe groups arranged along the y-direction are arranged in two columns along the x-direction. However, the number of columns of the probe groups may also be one or more columns depending on the configuration of the electrodes of the connector 100 to be inspected. For example, the second inspection fixture 2 described later is provided with one column of probe groups. In addition, the third inspection fixture 3 described later is provided with probe groups at four positions. In addition, the fourth inspection fixture 4 described later is provided with ten columns of probe groups.

[0104] (Other embodiments, elastic members other than springs)

[0104] The first embodiment has described a configuration in which a first spring 13 is provided between the floating guide 11 and the lower retaining portion 21, a front second spring 31h is provided between the front retaining portion 31c and the front push block 31i, a rear second spring 32h is provided between the rear retaining portion 32c and the rear push block 32i, and a third spring 41 is provided between the upper retaining portion 23 and the support portion 43. However, if the component is a member that can extend and retract in the z-direction (the direction in which the flexible substrate is pressed), it is not limited to springs, and other elastic components may also be used.

[0105] (Other embodiments, application examples of inspection fixtures using flexible substrates including tongues)

[0105] The first embodiment has described an example of connecting the flexible substrate (first soft substrate 31a, etc.) containing the first tongue 31a41 to the inspection object connector 100 located on the opposite side of the telescopic member by pressing the flexible substrate (first flexible substrate 31a, etc.) containing the first tongue 31a41 with a telescopic member such as a probe P. However, the flexible substrate containing the first tongue 31a41 can also be used for connection with other inspection object members. Furthermore, the inspection fixture containing the flexible substrate provided with the first tongue 31a41 is not limited to the first inspection fixture 1, and may also be an inspection fixture with other shapes.

[0106] For example, the second inspection fixture 2 may also include a flexible substrate (first flexible substrate 31a) (second embodiment, see Figures 18 to 20). The second inspection fixture 2 has a first clamping member 2a, a second clamping member 2b, a base portion 2c, a first flexible substrate 31a, and a first connector 31b.

[0107] To illustrate the directions, the horizontal direction (front-back direction) perpendicular to the rotation axis (first rotation axis ax1) of the second clamping member 2b is defined as the x-direction, the direction parallel to the first rotation axis ax1 (left-right direction) is defined as the y-direction, and the direction perpendicular to both the x-direction and the y-direction (up-down direction) is defined as the z-direction. In Figure 18, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the up direction, respectively. Specifically, the direction from the first gripping area 2a1 of the first clamping member 2a toward the area of ​​the base portion 2c that holds the first clamping member 2a is defined as the forward direction; in Figure 18, the direction from the area located at the lower right of the front side of the first clamping member 2a in the x-direction toward the area located at the upper left of the front side of the first clamping member 2a in the x-direction is defined as the right direction; and the direction from the first clamping member 2a toward the second clamping member 2b is defined as the up direction.

[0108] The first clamping member 2a holds the second clamping member 2b in a state where it can rotate about the first rotation axis ax1. The first clamping member 2a has a base portion 2c. The second clamping member 2b holds the first flexible substrate 31a and the first connector 31b. The second clamping member 2b functions as a substrate holding portion 20. A telescopic member such as a probe (not shown) is provided on the upper side of the tongue 31a4 of the first flexible substrate 31a in the z-direction. The base portion 2c holds the inspection object member (not shown).

[0109] When force is applied to bring the first gripping area 2a1 of the first clamping member 2a close to the second gripping area 2b1 of the second clamping member 2b, a gap is created between the tongue 31a4 of the first flexible substrate 31a and the base portion 2c. The inspection target member is placed into this gap and placed on the base portion 2c. When the force that brought the first gripping area 2a1 close to the second gripping area 2b1 is released, the tongue 31a4 of the first flexible substrate 31a comes into contact with the inspection target member placed on the base portion 2c. At this time, the telescopic member presses the tongue 31a4 downward in the z-direction, so that the end of the transmission line provided on the tongue 31a4 is electrically connected to the inspection target member.

[0110] Furthermore, for example, the third inspection fixture 3 may include a flexible substrate (such as a first flexible substrate 31a) (third embodiment, see Figures 21 to 22). The third inspection fixture 3 has a first pressing part 3a, a first substrate holding platform 3b, a first flexible substrate 31a to a fourth flexible substrate 34a, and a first connector 31b to a fourth connector 34b.

[0111] To illustrate the directions, the horizontal direction (front-back direction) perpendicular to the rotation axis (second rotation axis ax2) of the first pressing part 3a is defined as the x-direction, the direction parallel to the second rotation axis ax2 (left-right direction) is defined as the y-direction, and the direction perpendicular to both the x-direction and the y-direction (up-down direction) is defined as the z-direction. In Figure 21, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the upward direction, respectively. Specifically, the direction from the area holding the first pressing part 3a in the first substrate holding table 3b toward the area in the first substrate holding table 3b where the front end of the first pressing part 3a is detachably mounted is defined as the forward direction. In Figure 21, the direction from the area located at the lower right of the front side of the first substrate holding table 3b in the x-direction toward the area located at the upper left of the front side of the first substrate holding table 3b in the x-direction is defined as the right direction. And the direction from the first substrate holding table 3b toward the first pressing part 3a with the front end of the first pressing part 3a mounted on the first substrate holding table 3b is defined as the upward direction.

[0112] The first pressing part 3a holds the inspection object component (inspection object module 300). The first substrate holding stage 3b holds the first pressing part 3a in a state where it can rotate around the second rotation axis ax2. The first substrate holding stage 3b holds flexible substrates (first flexible substrate 31a to fourth flexible substrate 34a). The first substrate holding stage 3b functions as a substrate holding part 20. A telescopic member such as a probe (not shown) is provided on the lower side of the tongue 31a4 in the z-direction of the first flexible substrate 31a. The configuration of the second flexible substrate 32a to the fourth flexible substrate 34a is the same as that of the first flexible substrate 31a. The configuration of the second connector 32b to the fourth connector 34b is the same as that of the first connector 31b. A telescopic member such as a probe (not shown) is provided on the lower side of the tongue in the z-direction of each of the second flexible substrate 32a to the fourth flexible substrate 34a. The first flexible substrate 31a to the fourth flexible substrate 34a are configured such that, when viewed from the side in the z-direction, the region containing the tongue 31a4 of the first flexible substrate 31a, the region containing the tongue of the second flexible substrate 32a, the region containing the tongue of the third flexible substrate 33a, and the region containing the tongue of the fourth flexible substrate 34a are located on the side forming a generally square.

[0113] When the front end of the first pressing part 3a approaches the first substrate holding platform 3b, the tongue 31a4 of the first flexible substrate 31a and the tongues of the second flexible substrate 32a to the fourth flexible substrate 34a come into contact with the inspection target module 300. At this time, the telescopic member presses the tongue 31a4 and the like upward in the z-direction, so that the end of the transmission line provided on the tongue 31a4 and the like is electrically connected to the inspection target module 300.

[0114] Furthermore, for example, the fourth inspection fixture 4 may include a flexible substrate (such as a first flexible substrate 31a) (fourth embodiment, see Figures 23 to 25). The fourth inspection fixture 4 has a second pressing portion 4a, a second substrate holding platform 4b, and a flexible substrate (such as a first flexible substrate 31a). The flexible substrate of the fourth inspection fixture 4 includes a first flexible substrate 31a, a second flexible substrate 32a, a third flexible substrate 33a, a fourth flexible substrate 34a, a fifth flexible substrate 35a, a sixth flexible substrate 36a, a seventh flexible substrate 37a, an eighth flexible substrate 38a, a ninth flexible substrate 39a, and a tenth flexible substrate 310a.

[0115] To illustrate the directions, the horizontal direction (front-back direction) perpendicular to the rotation axis (third rotation axis ax3) of the second pressing part 4a is defined as the x-direction, the direction parallel to the third rotation axis ax3 (left-right direction) is defined as the y-direction, and the direction perpendicular to both the x-direction and the y-direction (up-down direction) is defined as the z-direction. In Figure 23, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the upward direction, respectively. Specifically, the direction from the area where the second pressing part 4a is held in the second substrate holding table 4b toward the area in the second substrate holding table 4b where the front end of the second pressing part 4a is detachably mounted is defined as the forward direction. In Figure 23, the direction from the area located at the lower right of the front side of the second substrate holding table 4b in the x-direction toward the area located at the upper left of the front side of the second substrate holding table 4b in the x-direction is defined as the right direction. And the direction from the second substrate holding table 4b toward the second pressing part 4a with the front end of the second pressing part 4a mounted on the second substrate holding table 4b is defined as the upward direction.

[0116] The second pressing part 4a holds the inspection object component (BGA / LGA (Ball Grid Array / Land Grid Array) 400). The second substrate holding stage 4b ​​holds the second pressing part 4a in a state that allows it to rotate around the third rotation axis ax3. The second substrate holding stage 4b ​​holds flexible substrates such as the first flexible substrate 31a. The second substrate holding stage 4b ​​functions as the substrate holding part 20. A telescopic member such as a probe (not shown) is provided on the lower side of the tongue 31a4 of the first flexible substrate 31a in the z direction. The connector connection end 31a1 of the first flexible substrate 31a is electrically connected to the inspection device (not shown) via a connector (not shown). The structure of the second flexible substrate 32a to the tenth flexible substrate 310a is the same as that of the first flexible substrate 31a. The first flexible substrate 3 The tenth flexible substrate 310a is configured such that, when viewed from above in the z-direction, the regions including the tongue 31a4 (first tongue 31a41, second tongue 31a42) of the first flexible substrate 31a, the region including the tongue of the second flexible substrate 32a, the region including the tongue of the third flexible substrate 33a, the region including the tongue of the fourth flexible substrate 34a, the region including the tongue of the fifth flexible substrate 35a, the region including the tongue of the sixth flexible substrate 36a, the region including the tongue of the seventh flexible substrate 37a, the region including the tongue of the eighth flexible substrate 38a, the region including the tongue of the ninth flexible substrate 39a, and the region including the tongue of the tenth flexible substrate 310a are arranged in one direction.

[0117] When the front end of the second pressing part 4a approaches the second substrate holding platform 4b, the tongue 31a4 of the first flexible substrate 31a and the tongues of the second flexible substrate 32a to the tenth flexible substrate 310a come into contact with the BGA / LGA400. At this time, the telescopic member presses the tongue 31a4 and the like upward in the z-direction, so that the end of the transmission line provided on the tongue 31a4 and the like is electrically connected to the BGA / LGA400.

[0118] Several embodiments of the present invention have been described above, but these embodiments are provided as examples and are not intended to limit the scope of the invention. These embodiments can also be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, and similarly, are also included in the scope of the invention described in the claims and their equivalents.

[0119] The following configurations are provided in accordance with this specification.

[0119] (State 1)

[0119] The present invention provides a flexible substrate comprising: one end portion; another end portion; and a patterned portion formed at least between the one end portion and the other end portion. The patterned portion has a first tongue formed by a cut. The first tongue includes: a first region, which is a front end region of the first tongue; and a second region, which communicates with the first region and is a root region of the first tongue. The first tongue is electrically connected to other components via the first region. The width of the first region is greater than the width of the second region.

[0120] According to the first embodiment, when a telescopic member such as a probe is pressed against and localized force is applied, the first tongue formed in the flexible substrate, including the area where the force is applied, is separated from other areas adjacent to the first tongue on the flexible substrate by a slit and displaced in the direction of the pressure. Therefore, compared to the case where no first tongue is provided, the flexible substrate is less likely to break even when localized force is applied. Furthermore, the width of the front end region (first region) of the first tongue, that is, the region where the first tongue contacts the telescopic member, is set to be greater than the root region (second region) of the first tongue. In this way, the tongue is made lighter and the contact area with the telescopic member is increased, thereby increasing the allowable displacement of the telescopic member.

[0121] (State Sample Two)

[0121] Preferably, the first region is circular and the second region is square.

[0122] According to the second form, when the first region is set to a circle and the second region is set to a square, the first tongue can be formed more easily than when it is formed by other shapes. In addition, the distance from the end of the transmission line to the edge of the first region A1 can be made equal, the contact area with the telescopic member can be increased as much as possible, and the allowable displacement of the telescopic member can be increased as much as possible.

[0123] (State Sample 3)

[0123] Preferably, the patterned part has a second tongue. The width of the front end region of the second tongue is the same as or less than the width of the root region of the second tongue.

[0124] According to the third state, a first tongue can be provided at the end of the transmission line where the allowable displacement of the telescopic member needs to be increased, while a second tongue can be provided at the end of the transmission line where the necessity to increase the allowable displacement is lower.

[0125] (State Sample 4)

[0125] Preferably, the pattern part has a signal line, a ground line and a power line, with a first tongue formed on the signal line and a second tongue formed on the ground line and the power line.

[0126] According to the fourth state, a first tongue can be provided at the end of the signal line for which the allowable displacement of the telescopic member needs to be increased, and a second tongue can be provided at the end of the grounding wire and power line for which the need to increase the allowable displacement is lower.

[0127] (State Sample 5)

[0127] Preferably, the present invention provides an inspection fixture comprising a flexible substrate of any one of states one to four, and a telescopic member. The telescopic member is pressed against the back side of the region containing the portion to be electrically connected to other components, so that the tongue is electrically connected to other components.

[0128] Based on sample five, the product life of the inspection fixture can be extended and the manufacturing cost can be reduced.

[0129] (State Six)

[0129] Preferably, the second region of the first tongue is square. The width of the wider region of the first tongue is twice the width of the second region of the first tongue.

[0130] According to the state sample six, the formation of the first region is easy because it will not physically interfere with the adjacent cuts or through holes.

Claims

1. A flexible substrate comprising: The end of one side; The other end; and The pattern portion is formed at least between the end of one of the aforementioned parties and the end of the other party; The aforementioned patterned section has a first tongue formed by cutting a slit; The aforementioned first tongue includes: a first region, which is the front end region of the aforementioned first tongue; and a second region, which is connected to the aforementioned first region and is the root region of the aforementioned first tongue; The aforementioned first tongue is electrically connected to other components via the aforementioned first region; The width of the first region mentioned above is greater than the width of the second region mentioned above.

2. The flexible substrate as described in claim 1, wherein, The first region mentioned above is circular, and the second region mentioned above is square.

3. The flexible substrate as described in claim 1, wherein, The aforementioned patterned part has a second tongue; The width of the front end region of the aforementioned second tongue is the same as or less than the width of the root region of the aforementioned second tongue.

4. The flexible substrate as described in claim 3, wherein, The aforementioned pattern section has signal lines, ground lines and power lines, with the aforementioned first tongue formed on the signal lines and the aforementioned second tongue formed on the ground lines and power lines.

5. An examination fixture, comprising: The flexible substrate as described in any one of claims 1 to 4; and Expansion joints; The aforementioned telescopic member is pressed against the back side of the area containing the portion to be electrically connected with the aforementioned other members, so that the aforementioned tongue is electrically connected with the aforementioned other members.