Flow restrictor, cryopump and method of upgrading the cryopump
The two-stage flow restrictor in cryogenic pumps addresses preferential gas pumping and frost buildup by diverting gas flow around the baffle, achieving uniform distribution and increased gas trapping capacity, thus enhancing efficiency and reducing regeneration frequency.
TWI933833BActive Publication Date: 2026-08-01EDWARDS VACUUM LLC
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Patent Information
- Application Number
- TW110140688
- Authority / Receiving Office
- TW · TW
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2020-11-02
- Filing Date
- 2021-11-02
- Publication Date
- 2026-08-01
- Estimated Expiration
- 2041-11-01
AI Technical Summary
Technical Problem
Conventional flow restrictors in cryogenic pumps experience preferential gas pumping and frost buildup due to direct line-of-sight orifices, leading to increased radiative heat load and prolonged pressure recovery times.
Method used
A two-stage flow restrictor with a baffle and intermediate assembly is installed in the inlet of the cryogenic pump, diverting gas flow around the baffle and through angled orifices to prevent direct line-of-sight to the cryogenic plates, ensuring uniform gas distribution and reduced radiative heat load.
Benefits of technology
This configuration enhances frost accumulation uniformity, increases gas trapping capacity, and reduces regeneration frequency, thereby improving pumping efficiency and pressure recovery time.
✦ Generated by Eureka AI based on patent content.
Abstract
This invention discloses a flow restrictor for limiting the flow rate of gas flowing into a cryogenic pump, and the cryogenic pump itself. The flow restrictor is configured to be installed in an inlet of the cryogenic pump and includes: an inlet assembly for providing a gas flow path into the cryogenic pump; a baffle plate installed to at least partially block the gas flow path through the inlet assembly; and an intermediate assembly connecting the baffle plate to the inlet assembly, the intermediate assembly including at least one aperture defining at least one gas flow path into the cryogenic pump. The baffle plate is configured to block the gas flow path through the inlet assembly such that, when installed on the cryogenic pump, there is no direct visual path through the inlet assembly to a cryogenic plate within the cryogenic pump.
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