Increased number of load ports on factory interface with robot that moves on track

Abstract

A factory interface includes a housing, a front surface of the housing having multiple loading ports, a robot with an arm and an end effector, and a track attached to a base plate within the housing. The robot is adapted to move horizontally along the track to multiple locations from which the arm can allow the robot's end effector to enter a front-opening wafer transfer box attached to any one of the multiple loading ports.

Description

[Technical Field]

[0001] Specific embodiments of this disclosure relate to increasing the number of loading ports on a factory interface having a robot moving on a track. [Previous Technology]

[0002] Electronic device manufacturing systems may include multiple processing chambers arranged around a host housing, the host housing having a transfer chamber and one or more loading and locking chambers configured to transfer substrates into the transfer chambers. For example, these systems may employ a transfer robot that can be housed in the transfer chamber. The transfer robot may be a selectively compliant articulated robotic arm (SCARA) robot, etc., and may be adapted to transfer substrates between the various processing chambers and one or more loading and locking chambers. For example, the transfer robot may transfer substrates from one processing chamber to another, from one loading and locking chamber to another, and vice versa.

[0003] Substrate handling in semiconductor device manufacturing typically occurs in multiple tools, where the substrate travels between tools in a substrate carrier (e.g., a front-opening wafer transfer cassette (FOUP)). The FOUP may dock to an EFEM (sometimes referred to as a "factory interface" or FI), which includes a loading / unloading (or FI) robot operable to transfer the substrate between one or more loading locks of the FOUP and tools, thus allowing the substrate to pass through for processing in a processing chamber. The loading locks provide a clean environmental buffer for the substrate before it is transferred to a transfer chamber, which typically includes a pressurized vacuum environment. Electronic device manufacturing systems are typically designed to minimize contaminant exposure to the substrate. [Summary of the Invention]

[0004] Some specific embodiments described herein cover a factory interface including a housing, a front surface of the housing having multiple loading ports, a robot having an arm and an end effector, and a track attached to a base plate within the housing. The robot is adapted to move horizontally along the track to multiple locations from which the arm can allow the robot's end effector to enter a front-opening wafer transfer cassette attached to any one of the multiple loading ports.

[0005] Some specific embodiments described herein cover an assembly comprising a robot having an arm and an end effector. The assembly further comprises a track attached to a base plate within a factory interface, wherein the robot is slidably attached to the track to move horizontally along the track to multiple positions, and the arm can from these positions allow the robot's end effector to enter a front-opening wafer transfer cassette at any of a plurality of loading ports attached to the factory interface. The assembly further comprises a ball screw assembly having a ball screw shaft and a nut, the ball screw shaft being coupled to a motor via a timing belt, and the nut being operatively connected between the ball screw shaft and the robot. The ball screw assembly is used to move the robot horizontally along the track.

[0006] At least some specific embodiments described herein cover a method of operating an assembly including a robot slidably attached to a track, the track being attached to a base plate of a factory interface. The method may include receiving a command identifying a front-open wafer transfer box (FOUP) at a first loading port of a plurality of loading ports attached to the factory interface as a destination. The method may further include causing the robot to move horizontally along the track to one of a plurality of positions, from which an end effector attached to the robot arm enters the FOUP. The method may further include causing the robot arm to enter the FOUP through the first loading port. The method may further include causing the robot arm to pick up a substrate from the FOUP or place a substrate into the FOUP.

[0007] Many other variations and embodiments are provided based on these and other specific embodiments of this disclosure. Further details of other features and embodiments of this disclosure will be gained from the following description of the implementation methods, the claims, and the accompanying drawings.

Implementation Method

[0021] The specific embodiments described herein relate to systems and methods for increasing the number of loading ports on a factory interface having a robot that moves on a track. For example, existing systems can benefit from increased efficiency and throughput and / or improved processing quality within the factory interface (“FI”). Improved quality may refer to transferring substrates between the FI and the loading lock without introducing unacceptable amounts of contaminants, such as particles present in the factory (or entering through the inlets of the manufacturing facility), airborne molecular contaminants (AMCs), and / or volatile organic compounds (VOCs) on the interface. In some specific embodiments, one or two additional loading ports are described to have a factory interface and corresponding components with a total of at least six loading ports, although cases with more than six loading ports are considered. Due to the increased length resulting from accommodating at least six loading ports on the factory interface, the FI robot can be adapted to move along the track to extend the reach of the FI robot's arm to the loading port location furthest from the FI robot.

[0022] The use of FI robots itself introduces moving parts and potential contaminants. Increasing the movement of the FI robot along the track increases the number of moving parts, lubricants, and potential contaminants. Therefore, various structures and modifications to the factory interface can be employed to remove such contaminants at the track and FI robot level, for example, before the contaminants can rise (or circulate) to the substrate (e.g., silicon wafer) level transferred by the robot's end effector, or before the contaminants escape into the front-opening wafer transfer box (FOUP) or loading lock. Because the disclosed FI employs gas recirculation, contaminant removal becomes more complex than simply sucking the gas out from bottom or side vents.

[0023] Therefore, the advantages of the systems and methods implemented according to some specific embodiments of this disclosure include, but are not limited to, designing a factory interface with additional loading ports to increase substrate yield and / or storage capacity while also reducing contaminants generated by robots moving along tracks. Other advantages that will be apparent to those skilled in the art of factory interface hardware and control design will be discussed below.

[0024] FIG1A is a perspective view of an example factory interface 100 according to various embodiments. FIG1B is a front view of the factory interface of FIG1A according to various embodiments. FIG1C is another perspective view of an example factory interface 100 according to various embodiments. In these embodiments, the factory interface 100 (or FI 100) includes a housing having a front 102 (or front surface), a back 104 (or rear surface), and a side 106 (or side surface). The front portion 102 of the FI 100 housing may be configured with a set of loading ports 110. In some embodiments, the set of loading ports 110 includes at least six loading ports: three loading ports 110A on the left side and three loading ports 110B on the right side along the length of the FI 100. However, as discussed, in other embodiments, the set of loading ports 110 is increased, for example, to include four loading ports on each of the right and left sides, up to a total of eight or more loading ports. FOUP, side storage compartment (SSP) or other substrate containers can be attached to any of the loading ports 110 to remove substrates from and / or deliver substrates to the loading ports 110.

[0025] In at least some embodiments, the factory interface 100 includes a FI robot assembly 101, which includes a FI robot 120 and a track 130, the FI robot 120 being slidably attached to the track 130. In these embodiments, the track 130 is attached (or mounted) to the bottom of the factory interface 100. In different embodiments, the bottom of the factory interface 100 is a bottom frame of the FI housing, or, in the absence of a bottom frame, a base plate (e.g., a factory base plate) of the factory interface 100. In these embodiments, the FI robot 120 is slidably attached to the track 130 and moves horizontally along the track 130 to multiple locations from which the arm of the robot 120 can allow end effectors attached to the arm to enter a FOUP (or SSP or other substrate container) attached to any one of the loading ports of the loading port group 110. The track 130 may include one or more rails or guides to limit the linear movement of the FI robot 120 back and forth, as will be discussed in detail.

[0026] As shown in the figures, in some specific embodiments, the track 130 extends along a subset of the loading port group 110, the subset excluding at least the outermost loading ports of the loading port group 110. Therefore, the track 130 enables the FI robot 120 to move horizontally back and forth between approximately any intermediate loading ports located in the loading port group 110. For example, the robot 120 can move along the track 130 until it reaches one of a plurality of positions from which the arm of the robot 120 can allow the end effector of the robot 120 to enter and attach to any of the loading ports in the loading port group 110. These plurality of positions can exclude at least the two outermost loading ports of the loading port group 110. Thus, when the FI robot 120 is in the leftmost position (as shown in Figures 1A to 1C), the arm and end effector of the FI robot 120 can extend into each of the three leftmost loading ports 110A. Similarly, when the FI robot 120 is in the rightmost position, the arm and end effector of the FI robot 120 can extend into each of the three loading ports 110B on the right.

[0027] These embodiments can be extended to additional loading ports, such as four loading ports on the left side of the center and four loading ports on the right side of the center, or more. By making the track 130 shorter and generally confined to the intermediate loading ports, these embodiments minimize the track length and therefore also minimize the contaminants that the track 130 is intended to generate. In other embodiments, the track 130 is made longer than illustrated, for example, extending along the four intermediate loading ports to reach additional loading port locations with six, seven, or more loading ports.

[0028] In various specific embodiments, FI 100 includes a gas recirculation system, including a pressurized gas chamber 118 (or simply a gas chamber 118) in the top region of the FI 100 housing. This pressurized gas chamber 118 may include a fan (or other forced gas source) that initiates and drives the airflow of the gas recirculation system, including forcing gas downward through the housing and pulling gas upward through FI 100 to the pressurized gas chamber 118. By recirculating the gas within the housing, FI 100 avoids continuous intake of gas from the wafer fab environment outside FI 100. However, the gas recirculation system also increases the risk of contaminants (particularly contaminants from moving parts) being recycled from FI robot 120 and track 130 back onto the substrates passed by FI robot 120 through FI 100.

[0029] In some specific embodiments, the gas recirculation system may force gas in the form of ambient air, clean dry air (CDA), nitrogen, or other inert gases downwards from chamber 118 through the height of FI 100 and return the recirculated gas to pressurized chamber 118 via return duct assembly 114 (see also FIG. 3). For example, return duct assembly 114 may include a return duct 114A located inside the plant interface 100, as part of or near the frame between each loading port 110. Return duct assembly 114 may further include return ducts 114B at each corner along the height of the housing of FI 100. Thus, this return duct assembly 114 generally extends from top to bottom, and the fan and gas circulation ultimately force the return gas back through return duct 114. Chamber 118 may also include multi-layer filters to filter out chemicals, organic matter, and particles, and the filters will be discussed in more detail with reference to FIG. 3. In various specific embodiments, FI 100 includes a drive housing 125 surrounding the track 130 and the FI robot 120, wherein at least a portion of the drive housing 125 is part of or integrated with the track air chamber, which will be discussed in detail below with reference to FIG2A.

[0030] In at least some embodiments, the factory interface 100 further includes a first door 116A and a second door 126A, the first door 116A being attached to a first side of the housing to selectively cover the pressurized air chamber 118, and the second door 126A being attached to a first side of the housing to selectively cover the space 128 occupied by the robot 120 and the track 130. In at least some embodiments, the factory interface 100 further includes a third door 116B and a fourth door 126B, the third door 116B being attached to a second side of the housing to selectively cover the pressurized air chamber 118, and the fourth door 126B being attached to a second side of the housing to selectively cover the space 128 occupied by the robot 120 and the track 130. Allowing the selective (e.g., independent) opening of the second door 126A and the fourth door 126B while keeping the first door 116A and the third door 116B closed allows access (e.g., for maintenance) to moving parts (e.g., robot 120, track 130, and related components), while the pressurized chamber remains free of moisture and contaminants. Furthermore, gas recirculation can continue to function to continue filtering out particles during maintenance or repair.

[0031] In the illustrated embodiment, FI 100 further includes a controller 150 (FI 1A), which can be coupled to FI robot 120, has mechanical means associated with track 130 (e.g., guiding horizontal movement), and has different configurations of the gas recirculation system. Signals from controller 150 can cause movement of various components of FI robot 120 and / or adjustments in the gas recirculation system. Suitable feedback mechanisms can be provided for one or more of the components by means of various sensors (e.g., position encoders, gas pollutant sensors, etc.), and can also respond to user input. Controller 150 may include suitable processors, memory, and electronics for receiving input from various sensors and for controlling one or more valves, actuators, vents, etc., to control environmental conditions in the microenvironment of FI 100 in which FI robot 120 operates, as will be described below.

[0032] FIG. 1D is a perspective view of a factory interface 100 as disclosed herein, according to a specific embodiment, wherein two intermediate posts 144A, 144B are removable as the RF robot assembly 101. As discussed, the factory interface 100 may also include a FOUP 90 (or SSP, etc.) attached to each loading port of the loading port group 110. In at least some embodiments, the two intermediate posts 144A and 144B (or other group posts defining at least some loading ports of the loading port group 110) are removable. Furthermore, the FI robot assembly 101, which includes at least the robot 120 and the drive housing 125, is also removable after the two intermediate posts 144A and 144B have been removed (e.g., by sliding out and / or being lifted out by a crane). The removability of the FI robot assembly 101 can facilitate cleaning, maintenance, or replacement associated with the FI robot assembly 101.

[0033] FIG2A is a perspective view of an FI robot assembly 201 having an FI robot 120 moving horizontally on a track 130 according to a specific embodiment. In some cases, components of the FI robot assembly 201 may be assembled into an existing factory interface 100. In various specific embodiments, the FI robot assembly 201 includes the FI robot 120, a drive box 125, a track 130, a track air chamber 202, and one or more gas lines 212. The FI robot 120 may include a motor assembly 210, an arm assembly 203 (or simply "arm"), and an end effector 205. The motor assembly 210 may control the arm assembly 203 to perform arrival and pick-up and arrival and drop-off operations by the end effector 205 to move a substrate from one location to another, such as from a FOUP (e.g., FOUP 90) to a loading lock, or from a loading lock to a FOUP or side storage compartment.

[0034] The FI robot 120 may further include one or more fans 211 built into the motor assembly 201 to keep the movable parts of the motor assembly 201 cooled, wherein the one or more fans 211 themselves can discharge some contaminants. Thus, in some specific embodiments, the one or more fans 211 include chemical and particulate filters at the outlet of the one or more fans 211 to provide some local filtration of the orbital air chamber 202 and / or contaminants locally generated by the one or more fans 211.

[0035] Referring also to Figures 2B to 2E, Figure 2B is a perspective view of the track 130 and drive housing 125 of the FI robot assembly 201 of Figure 2A according to a specific embodiment. Figure 2C is a top view of the FI robot assembly 201 of Figure 2A according to a specific embodiment. Figure 2D is a side sectional view of the track 130 and drive housing 125 of the FI robot assembly 201 according to a specific embodiment. Figure 2E is an end view of the FI robot assembly of Figure 2A according to a specific embodiment.

[0036] As discussed, the FI robot 120 can move horizontally along a track 130, for example, within a pair of linear guides 232. The track 130 can be attached to the bottom of the FI 100 via a slide 234 (e.g., on a frame member or directly attached to the base plate of the FI 100). The slide 234 may include or be attached to a plurality of sliders 236 adapted to be attached to and slide along the pair of linear guides 232. Thus, each of the plurality of sliders 236 may include a bearing or a set of bearings (not shown) to facilitate sliding.

[0037] In at least some embodiments, the drive housing 125 of track 130 may further include a ball screw assembly 240 (FIGs 2C-2D) that provides controllable mechanical actuation to move the FI robot 120 along a pair of linear guides 232. For example, the ball screw assembly 240 may include a ball screw shaft 242 coupled to a motor 252 via a timing belt 254 (or other pulley). The ball screw assembly 240 may also include a nut 246 operatively coupled between the ball screw shaft 242 and the FI robot 120. In these embodiments, the ball screw assembly 240 is used to move the FI robot 120 horizontally along track 130, for example, via a set of linear guides 232. The drive housing 125 may also include a connecting cable 260 (FI 2D) that facilitates the movement of the cable along with the motor 250 and nut 246 when the motor 250 and nut 246 are actuated (e.g., by the controller 150) to move the FI robot 120. As previously described, these movable parts can increase the level of contaminants generated by the FI robot 120 from within the FI 100.

[0038] In at least some embodiments, and further referring to FIG. 2A, the orbital air chamber 202 is added as a top-opening box to isolate, pull out, and filter out particulate matter or other contaminants. The orbital air chamber 202 may be mounted tightly around the track 130 to maximize the ability of the orbital air chamber 202 to contain and control such particulate matter and other contaminants. In various embodiments, the controller 150 may measure (and monitor) the pressure around the orbital air chamber 202 surrounding the FI robot 120, for example, using a pressure sensor 216 attached to the interior of the orbital air chamber 202, which may include a location within the drive housing 125. If the orbital air chamber 202 lacks sufficient pressure, for example, the controller 150 may use the pressure sensor 216 to detect that the pressure is below or does not meet a threshold pressure. In response to detecting such pressure, the controller 150 may deactivate the robot 120 and the loading port assembly 110. Additionally, or alternatively, the controller 150 may warn the operator of errors and / or prevent operation of the FI 100 to prevent operation without the anti-contamination function of the orbital air chamber 202.

[0039] In some embodiments, the gas recirculation system is configured to include one or more gas lines 212, each gas line 212 containing a group of gas injectors 213 to create an air curtain around the FI robot 120 as it moves along the track 130. As an example, one or more gas lines 212 are shown at a specific height, but may be located higher or lower relative to the robot 120, as long as the arm assembly 203 remains free to move. In various embodiments, the movement of the FI robot 120 itself may disrupt the airflow and may agitate additional particles or contaminants in the miniature environment of the FI 100. The gas recirculation system may further be equipped with fans, gas thrusters, intake valves, or other such gas injectors within the track air chamber 202, which may alter the air curtain around the FI robot 120 based on the FI robot's position and / or velocity (or a combination of the robot's position, velocity, and direction of travel). For example, the controller 150 may receive feedback or otherwise detect a combination of the FI robot 120's position, velocity, and / or direction of travel. The controller 150 can then actuate the gas injector group 213 according to a predetermined algorithm to modify the air curtain generated by the FI robot 120 during movement to counteract the disturbance (or release) of particles by the movement of the FI robot 120, such as minimizing gas and particle damage caused by the horizontal movement of the FI robot 120.

[0040] In at least some embodiments, and continuing to refer to FIG. 2A, the FI robot assembly 101 also includes a conduit 204 that may be attached between the orbital air chamber and the return conduit assembly 114 (FIS 1A-1C). The conduit 204 may be typically attached in a horizontal and / or vertical position to mate with at least one return conduit in the return conduit assembly 114. Each conduit 204 may include a filter 206, which in some embodiments may also include a fan to filter out contaminants locally generated within the orbital air chamber 202.

[0041] In various embodiments, FI 100 includes an ion generator positioned near or adjacent to track 130. The ion generator produces positive and negative ions, which can each discharge charged particles, thereby depriving the charged particles of their ability to adhere to a surface such as a substrate. The ion generator may also optionally be attached to track 130 or located next to (or integrated into) one or more gas lines 212. In some embodiments, the ion generator is positioned between 4 and 12 inches above track 130. While ion generators are typically used in substrate transfer layers, including an ion generator on or near track 130 can help deactivate any particles that might otherwise be unable to be filtered out, rendering them inert.

[0042] Figure 3 is a side view of a plant interface 100 mates with FOUP 301 at loading port 110 according to a specific embodiment, illustrating general airflow. In various embodiments, the plant interface 100 includes the previously discussed gas recirculation system, including a pressurized chamber 118 at the top and return ducts 114A and 114B of a duct assembly 114 located between loading ports 110 and at a corner along the height of the FI housing. Large arrows illustrate the general movement of forced gas within the FI 100, including the return gas path through the duct assembly 114, which delivers forced gas back to the pressurized chamber 118. Not all possible return path flows are shown; instead, examples of return gas paths are shown from the side view. In some embodiments, the gas recirculation system also includes a heater, for example within the chamber 118, to further dry the gas and accelerate the filtration of particles and chemicals. The heater can reduce humidity in the microenvironment of the FI 100 after a maintenance event.

[0043] In at least some embodiments, the gas recirculation system further includes a gas filter 312, which includes at least a top filter 312A and a bottom filter 312B, located between the gas chamber 118 and the interior of the FI 100 in which the robot 120 moves and operates. The gas filter 312 can filter out various contaminants from the recirculated gas, such as ambient air, CDA, nitrogen, or other inert gases forcibly discharged from a gas source (e.g., a fan or gas source unit) within the pressurized gas chamber 118. For example, the top filter 312A may be a chemical filter for filtering out AMCs and VOCs. Furthermore, the bottom filter 312B may be a particulate filter that filters out physical particles, such as particles that are not inherently chemical or organic. In some embodiments, the top filter 312A and the bottom filter 312B are selectively retractable, such that only one or both can be used at a time.

[0044] In some specific embodiments, the controller 150 may selectively disable the return duct and open the vents in the gas chamber 118 and the base plate to operate in ambient mode instead of recirculation mode. For some substrate processing, operation in ambient mode may be preferred; therefore, the gas recirculation system may be adapted to selectively switch between recirculation mode and ambient mode.

[0045] FIG4 is a top view of an electronic manufacturing system 400 including a factory interface 100 attached to a loading lock 402 according to a specific embodiment. The electronic manufacturing system 400 may further include a transfer chamber 405 attached to the loading lock 402 and one or more processing chambers 408 attached to a small plane of the transfer chamber 405. The factory interface 100 includes a loading port group 110, such as a loading port chamber, which includes at least six loading ports, as previously described. In some embodiments, at least one of the loading port groups 110 is adapted to become a side storage compartment (SSP) integrated within the FI 100 and adapted to a storage substrate. For example, in one embodiment, each of the outermost loading ports 110 may be adapted to replace an SSP.

[0046] The six substrates 401 shown in front of FI 100 can be understood as representing six potential FOUPs that can supply and receive substrates during substrate processing. A set of additional substrates 411 can represent substrate storage locations, for example, processed substrates can be degassed (e.g., using chlorine or bromine), cooled, and awaiting transfer back to their location in FI 100 via loading lock 402. All wafers in a particular storage station can be returned to a specific FOUP. For simplicity, the FI robot is not shown in Figure 4.

[0047] FIG5 is a flowchart of a method 500 for operating a robot-track assembly according to various specific embodiments. Method 500 may be executed by processing logic, which may include hardware (e.g., processing device, circuit system, dedicated logic, programmable logic, microcode, device hardware, integrated circuitry, etc.), software (e.g., instructions that run or execute on the processing device), or a combination thereof. In some specific embodiments, method 500 is executed by the controller 150 of FIG1A (or a similar processing device). Although shown in a specific order or sequence, the order of processes may be modified unless otherwise stated. Therefore, the specific embodiments shown should be understood as examples only, and the processes shown may be executed in different orders, and some processes may be executed in parallel. Additionally, one or more processes may be omitted in various specific embodiments. Therefore, not all processes are required in every specific embodiment. Other processing flows are also possible.

[0048] In operation 510, the processing logic receives a command to identify the first loading port of the plurality of loading ports attached to the plant interface as the destination.

[0049] In operation 520, the processing logic causes the robot to move horizontally along a track to one of a plurality of positions, and the robot's arm moves from the position to insert an end effector attached to the arm into the FOUP. In some embodiments, the horizontal movement of the robot along the track includes controlling a ball screw assembly operatively coupled between a slide and a motor attached to the robot, the motor being controlled according to the robot's horizontal destination. In at least some embodiments, the track extends along a subset of the loading port group, the subset excluding at least the outermost loading port of the loading port group. In at least some embodiments, the step of horizontally moving the robot includes moving the robot to the outermost loading port of the subset of the plurality of loading ports before extending the end effector into one of the outermost loading ports of the plurality of loading ports with the robot's arm.

[0050] In operation 530, the processing logic causes the robot arm to enter the FOUP through the first loading port.

[0051] In operation 540, the processing logic causes the robot arm to pick up a substrate from the FOUP or place a substrate into the FOUP.

[0052] The foregoing description sets forth numerous specific details, such as examples of particular systems, components, methods, etc., to provide a good understanding of several specific embodiments of this disclosure. However, it will be apparent to those skilled in the art that at least some of the specific embodiments of this disclosure can be practiced without these specific details. In other instances, well-known components or methods have not been described in detail, or have been presented in a simple block diagram format to avoid unnecessarily obscuring this disclosure. Therefore, the specific details set forth are merely exemplary. Specific implementations may differ from these exemplary details and may still be contemplated within the scope of this disclosure.

[0053] References to "one embodiment" or "a specific embodiment" in this specification indicate that a particular feature, structure, or characteristic described and associated with that specific embodiment is included in at least one embodiment. Therefore, the phrases "in one embodiment" or "in a specific embodiment" appearing throughout the specification do not necessarily refer to the same specific embodiment. Additionally, the term "or" is intended to indicate an inclusive "or" rather than an exclusive "or." When the terms "about" or "approximately" are used herein, this is intended to mean that the given nominal value is exactly within ±10%.

[0054] Although the operations of the methods herein are shown and described in a specific order, the order of operations for each method can be changed to perform certain operations in reverse order, thereby performing at least some operations concurrently with other operations. In another specific embodiment, instructions or sub-operations of different operations may be performed intermittently and / or alternately.

[0055] It should be understood that the above description is intended to illustrate rather than limit. Many other specific embodiments will become apparent to those skilled in the art after reading and understanding the foregoing description. Therefore, the scope of the disclosure should be determined with reference to the appended claims and covers the full and equivalent scope of those claims. [Simplified Explanation of the Diagram]

[0008] The present disclosure is illustrated by way of example and not limitation in the accompanying drawings, in which the same reference numerals indicate similar elements. It should be noted that different references to "a" or "an" specific embodiment in this disclosure do not necessarily refer to the same specific embodiment, and such references imply at least one specific embodiment.

[0009] Figure 1A is a perspective view of an example factory interface (FI) according to various specific embodiments.

[0010] FIG1B is a front view of the factory interface of FIG1A according to various specific embodiments.

[0011] FIG1C is another perspective view of an example factory interface according to various specific embodiments.

[0012] FIG1D is a perspective view of a factory interface as disclosed herein according to a specific embodiment, wherein two intermediate pillars are removable as FI robot components.

[0013] FIG2A is a perspective view of a FI robot assembly having a FI robot moving horizontally on a track according to a specific embodiment.

[0014] FIG2B is a perspective view of the track and drive box of the FI robot assembly of FIG2A according to a specific embodiment.

[0015] FIG2C is a top view of the FI robot assembly of FIG2A according to a specific embodiment.

[0016] FIG2D is a side cross-sectional view of the track and drive box of a FI robot assembly according to a specific embodiment.

[0017] FIG2E is an end view of the FI robot assembly of FIG2A according to a specific embodiment.

[0018] Figure 3 is a side view of a factory interface that mates with a front-open wafer transport box (FOUP) at the loading port according to a specific embodiment, showing general airflow.

[0019] Figure 4 is a top view of an electronic manufacturing system according to a specific embodiment, including a factory interface attached to a loading lock.

[0020] Figure 5 is a flowchart of a method for operating a robot-track assembly according to various specific embodiments. [Biomaterial Storage]

[0057] Domestic storage information (please note in order of storage institution, date, and number): None. International storage information (please note in order of storage country, institution, date, and number): None.

Claims

1. A factory interface, comprising: A housing; a front surface of the housing including a plurality of loading ports, wherein the plurality of loading ports includes at least six loading ports; a robot having an arm and an end effector; and a track attached to a base plate within the housing, wherein the robot is adapted to move horizontally along the track to multiple positions from which the arm can allow the robot's end effector to enter a front-opening wafer transfer box attached to any one of the plurality of loading ports, and wherein the multiple positions exclude at least the two outermost loading ports of the six loading ports.

2. The factory interface as claimed in claim 1, wherein the track extends along a subset of the plurality of loading ports, the subset excluding at least the outermost loading port of the plurality of loading ports.

3. The factory interface as claimed in claim 1, wherein the front surface includes a removable pair of posts, wherein the robot and track can be removed by removing the pair of posts to open a space in the housing.

4. The factory interface as described in claim 1, further comprising: A gas recirculation system; an orbital chamber surrounding the orbit; And a pipe that is attached between the orbital gas chamber and a return pipe of a gas recirculation system.

5. The plant interface as described in claim 4, the plant interface further comprising at least one of a fan or a filter integrated within the duct to filter out contaminants generated locally in the orbital air chamber.

6. The factory interface as described in claim 4, further comprising: A pressure sensor is used to measure the pressure inside the orbital air chamber; and a controller coupled to the robot, the plurality of loading ports and the pressure sensor, wherein the controller is configured to: use the pressure sensor to detect that the pressure in the orbital chamber does not meet a threshold pressure; and in response to detecting the pressure, deactivate the robot and the plurality of loading ports.

7. The factory interface as described in claim 1, further comprising: A group of gas injectors were located near the robot; A controller coupled to the robot and the set of gas injectors, wherein the controller is configured to: detect a combination of the robot's position, velocity, and direction of travel along the track; and activate the set of gas injectors to modify an air curtain generated by the robot during its motion to counteract the interference of the robot's motion on particles.

8. The plant interface as described in claim 1, further comprising a gas recirculation system, the gas recirculation system comprising: A pressurized gas chamber located at a top of the housing, the pressurized gas chamber including a forced gas source that forces gas downward through the housing, wherein the forced gas is clean dry air, an inert gas, or a combination thereof; and a set of return pipes located between the plurality of loading ports and at a corner along a height of the housing, the set of return pipes conveying the forced gas upward to the pressurized gas chamber.

9. The factory interface as described in claim 8, further comprising: A first door, which is attached to one side of the housing to selectively cover the pressurized chamber; And a second door, which is connected to the side of the housing to selectively cover a space occupied by the robot and the track.

10. A substrate processing assembly, the substrate processing assembly comprising: A robot having an arm and an end effector; A track is attached to a base plate within a factory interface, wherein a robot is slidably attached to the track to move horizontally along the track to multiple positions, from which the arm can allow the robot's end effector to enter a front-opening wafer transfer box from any one of a plurality of at least six loading ports attached to the factory interface, wherein the plurality of positions exclude at least the two outermost loading ports of the at least six loading ports; And a ball screw assembly, including: a ball screw shaft connected to a motor via a timing belt; A nut is operatively coupled between the ball screw shaft and the robot; and the ball screw assembly is used to move the robot horizontally along the track.

11. The component as claimed in claim 10, further comprising: a pair of linear guides attached to a base plate of the rails; and a slide including a plurality of sliders adapted to be attached to and slide along the pair of linear guides, wherein the nut is attached to the slide.

12. The component as claimed in claim 10, further comprising: the motor; and a drive housing containing a connecting cable that allows a cable attached to the motor to move together with the motor and the nut.

13. The component as claimed in claim 10, wherein the robot further includes a chemical and particulate filter at an outlet of a fan of the robot.

14. The component as claimed in claim 10, further comprising: an orbital chamber surrounding and pressurizing the orbit; and a conduit that can be attached between the orbital chamber and a return conduit of a gas recirculation system.

15. The component as claimed in claim 14, wherein the plant interface further includes at least one of a fan or a filter integrated within the duct to filter out contaminants generated locally in the orbital air chamber.

16. The component as claimed in claim 14, further comprising: a pressure sensor for measuring a pressure inside an orbital chamber; and a controller coupled to the robot, the plurality of at least six loading ports, and the pressure sensor, wherein the controller is configured to: use the pressure sensor to detect that the pressure inside the orbital chamber does not meet a threshold pressure; and in response to detecting the pressure, deactivate the robot and the plurality of at least six loading ports.

17. The component as claimed in claim 10, further comprising: a set of gas injectors located near the robot; and a controller to be coupled to the robot and the set of gas injectors, wherein the controller is configured to: detect a combination of a position, velocity, and direction of travel of the robot along the track; and activate the set of gas injectors to modify an air curtain generated by the robot during its motion to counteract the interference of the robot's motion on particles.

18. A method of operating an assembly of a robot slidably attached to a track, the track being attached to a base plate of a factory interface, wherein the method includes: The robot receives a command to identify a front-open wafer transfer box (FOUP) as a destination at a first loading port of a plurality of at least six loading ports attached to the factory interface; moves the robot horizontally along the track to a position of a plurality of locations, from which an arm of the robot will insert an end effector attached to the arm into the FOUP, wherein the track extends along a subset of the plurality of at least six loading ports, the subset excluding at least the outermost loading ports of the plurality of at least six loading ports; inserts the end effector into the FOUP through the first loading port; and picks up a substrate from the FOUP or places a substrate into the FOUP.

19. The method of claim 18, wherein moving the robot horizontally along the track includes controlling a ball screw assembly operatively coupled between a slide and a motor attached to the robot, the motor being controlled according to a horizontal destination of the robot.

20. The method of claim 18, wherein the step of moving the robot horizontally includes: Before extending the end effector into one of the outermost loading ports of the plurality of at least six loading ports, the robot moves to the outermost loading port of the subset of the plurality of at least six loading ports.

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