Sheet components made of fragile materials, intermediate products, and methods for manufacturing such components.

Abstract

The object of the present invention is to manufacture smaller components from glass and glass-ceramics with consistent quality through laser-assisted etching, while simplifying the manipulation of the components during manufacturing and for further processing. To this end, a sheet element (10) made of a fragile material is proposed, having two opposing, particularly parallel, side surfaces (100, 101) and a surrounding edge surface (13) that defines the outer contour of the sheet element (10), wherein the edge surface (13) has at least one first region (15) and at least one second region (17), wherein the surface structures of the first region (15) and the second region (17) are different, wherein the first region (15) has an etched surface, and wherein the second region (17) is a fracture surface, and wherein the area of ​​the at least one first region (15) is larger than the area of ​​the at least one second region (17), wherein the first and second regions are arranged side by side along the direction of the edge surface (13).

Description

Technical Field

[0001] This invention generally relates to the manufacture of components made of fragile materials. More particularly, this invention relates to the manufacture of such components by machining contours from sheet-like workpieces. Prior Technology

[0002] US 2018 / 215647 A1 describes a method for inserting continuous channels into a sheet-like glass element using an ultrashort pulse laser. The laser pulse is formed by a focal extension optical system, and a subsequent etching process removes these channels by etching away material bridges located between adjacent channels, thereby disassembling and manufacturing a structured component with a predetermined geometry and specific edge features ("caps"). Even glass or glass-ceramic elements with complex profiles can be fabricated from sheet-like materials using this method.

[0003] US 10941069 B2 describes a method for processing a plate-shaped workpiece having a layer made of glass or glass-ceramic, the layer being selectively etched by laser into several incompletely separated sub-segments, wherein these sub-segments are initially connected to the remainder of the workpiece by a mesh connection, wherein the remainder connection is further provided with side recesses on the top and bottom sides, i.e., structured (in only one section of thickness).

[0004] US 10626040 B2 discloses a sheet-like glass article structured by two damaged regions, wherein the second damaged region has at least one interruption, and the glass article is monomerized after an etching process. These damaged regions may partially overlap, and the material is placed by a laser process, which may also include ultrashort pulses.

[0005] Based on the process described in US 2018 / 215647 A1, a transparent substrate made of glass or glass-ceramic (generally, a brittle fracture material) can be structured in a two-step process. Specifically, first, modified chains are inserted laterally along the desired structure using an ultrashort pulse laser. In the second step, these modified chains are amplified through a more alkaline etching process until they are spatially connected and the internal and external components are separated in the etching bath. However, if several products with small lateral dimensions need to be manufactured from the starting substrate, the following operational problems arise: the disassembled miniature products (Kleinstprodukt) move around in the etching medium and deposit in the bottom region of the etching tank, thus no longer being able to be conveyed to further process steps in a controlled manner. Overlapping of glass components occurs, leading to uncontrolled etching, damage during further operations, and significant quality variations in manufacturing. In view of this, the object of the present invention is to manufacture smaller components from glass and glass-ceramics with consistent quality through laser-assisted etching, while simultaneously simplifying the manipulation of the components during manufacturing and for further processing. The basic concept is that the small product manufactured according to a laser-based contour definition step and subsequent etching is maintained by at least one tab-like connection to an adjacent holding section or other adjacent product. This holding section can hold one or more structured small products in place and can be implemented in a variety of geometries (such as one or more strips) or as a wraparound frame. Summary of the Invention

[0006] Accordingly, the present invention proposes a sheet-like element made of a fragile material, having two opposing, particularly parallel, side surfaces and a surrounding edge surface that defines the outer contour of the sheet-like element. The edge surface has at least one first region and at least one second region, wherein the surface structures of the first region and the second region are different. Specifically, the first region has an etched surface. The second region is a fracture surface. The area of ​​the at least one first region is greater than the area of ​​the at least one second region. If there are multiple first and second regions, this condition applies accordingly to the sum of their areas. Accordingly, in this case, the total area of ​​the first regions is greater than the total area of ​​the second regions. The first and second regions are arranged side-by-side along the edge surface, or along the contour defined by the edge surface. A preferred fragile material is glass-ceramic, especially glass.

[0007] The component, made of fragile materials, is manufactured by separating it from a larger intermediate product. This connection within the intermediate product greatly simplifies the manipulation of the component.

[0008] Accordingly, the present invention also proposes a sheet-like intermediate product made of a fragile material for manufacturing the element, wherein the intermediate product has a holding section and an element connected to the holding section via at least one connecting section, wherein the element and the connecting section have edge surfaces with etched surfaces. At the transition region toward the element, the width of the connecting section is less than the length of the profile formed by the edge surface including the etched surface, so that the element can be separated by breaking the fragile material at the connecting section, thereby obtaining an independent element made of the fragile material. The edge surface of the element has at least one first region and at least one second region, wherein the surface structures of the first region and the second region are different, wherein the first region has an etched surface, and wherein the second region is a fracture surface, and wherein the area of ​​the at least one first region is larger than the area of ​​the at least one second region, and wherein the first and second regions are arranged side-by-side along the direction of the edge surface or along the outer profile defined by the edge surface. The invention is described in more detail below with reference to the accompanying drawings. The intermediate product made of a fragile material can be manufactured by the following method: providing a sheet made of a fragile material and irradiating it with a laser, wherein the fragile material of the sheet is at least partially transparent to the laser, and wherein the laser beam of the laser causes material modification within the sheet. The laser beam is guided along a path within the sheet, such that the material modification is located side-by-side along the path. The sheet is then subjected to an etching process, wherein the etching process widens the material modification into a channel for final connection, causing the sheet to split along the path. This path defines the outline of an element connected by a connecting section and a holding section, thereby obtaining the sheet intermediate product according to this invention. To manufacture a sheet element made of a fragile material, the connecting section can be cut, thereby separating the element from the holding section. Simple Explanation of the Diagram

[0009] The present invention will now be described in detail with reference to the accompanying drawings. Figure 1 is a perspective view of a sheet-like element made of fragile material. Figure 2 shows a fragment of the surface structure of the first region. Figures 3(a) to (e) show different variations of intermediate products containing elements made of fragile materials, which are each connected to a retaining section. Figures 4 to 6 illustrate embodiments of several components made of fragile materials connected to a common retaining section. Figures 7(a) to (d) illustrate the steps of manufacturing a component 10 made of fragile materials. Figure 8 illustrates one implementation of intermediate products divided into zones. Figure 9 shows an apparatus for manufacturing intermediate products made of fragile materials. Figure 10 is a top view of an element made of fragile material. Figure 11 shows the functional relationship between "the distance between the position of the edge face and the centroid of the area" and "the distance along the outline of the element" for the element in Figure 10. Figure 12 shows an example of one of the intermediate products, which includes a component in the form of a gear made of a fragile material. Figure 13 shows the height curve of the edge face. Figures 14 and 15 are optical micrographs of components made of glass. Figures 16 and 17 are two electron micrographs of the edge surface of an element made of fragile material. Figure 18 shows the camera module. Figure 19 shows the Weibull diagram of the fracture strength of the glass element. Figure 20 shows an intermediate product containing rectangular components made of fragile materials. Figure 21 illustrates an embodiment that includes elements made of fragile materials. Figure 22 shows an example of an electro-optical layout containing elements. Figure 23 shows a layout for separating components, including an intermediate product located on a carrier. Figure 24 shows another layout for separating the self-holding sections of the component. Implementation

[0010] Figure 1 is a perspective view of a sheet element 10 made of a fragile material. Glass and glass-ceramics are generally considered fragile materials. These materials are characterized primarily by their generally high transparency, for example, an average transparency of over 80% in the range of 270 nm to 2700 nm, which simplifies the superior manufacturing process using laser-assisted etching, detailed below. The sheet element 10 made of the fragile material has two opposing, particularly parallel, sides 100, 101. The outer contour of the element 10 is formed by a surrounding edge surface 13. The edge surface 13 is divided into different segments or regions arranged side-by-side. At least one first region 15 and at least one second region 17 are provided. The difference between these two types of regions lies in their surfaces. Specifically, the first region 15 has an etched surface. The second region 17 is a fracture surface. The area of ​​the first region 15 is larger than the area of ​​the second region 17. Instead of being overlapping strips extending parallel to the sides 100 and 101, these regions are arranged side by side along the direction of the outline, i.e., along the edge surface 13. Accordingly, the second region 17 of the edge surface 13 is adjacent to at least one of the edges 19 and 20, and the edge surface 13 transitions to the sides 100 and 101 at these edges.

[0011] In the example shown, two second regions 17 are provided. Since these second regions 17 are spaced apart, a first region 15 with an etched surface is provided between the two second regions 17. Another first region extends around the element 10 along the edge surface 13 and is adjacent to the second regions 17 at the transition points where they face away from each other. Only a single second region 17 may be provided. In this case, if no other treatment is applied to the edge surface, only a single first region 15 exists. However, it is preferable to adopt an implementation with two or more second regions 17 spaced apart, as shown in the example. This helps to achieve a stable connection with the retaining segment while ensuring the element 10 is easily separable. For the same reason, in one embodiment, the width of at least one second region 17, or the total width of the plurality of second regions 17, is at least 0.5%, preferably at least one percent, of the maximum lateral dimension of the element 10. Therefore, in the example of the rectangular outline of the element 10 shown in FIG1, the maximum lateral dimension is given by the length of the diagonal between two opposite corners. The width of the second region 17, or the total width of several second regions, should be at least 20 μm, preferably at least 50 μm, and even more preferably at least 100 μm.

[0012] The etched surface of the first region occupying the largest portion of the edge surface 13 is generally advantageous because such an edge surface 13 has high stability, i.e., high (mechanical) (edge) strength. Therefore, generally and not limited to the example shown, in a preferred embodiment, the sum of all area portions of the first region 15 or such first regions accounts for at least 90%, preferably at least 95%, more preferably at least 98%, and particularly at least 99% of the total area of ​​the edge surface 13.

[0013] The strength of glass components depends primarily on the properties of their surfaces, particularly on the microcracks extending from the surface into the substrate material. Therefore, the strength of small components manufactured according to the present invention is characterized by generally high strength in most of the surfaces that have undergone the etching process (disassembly process).

[0014] According to one embodiment, in the first region, the bending load strength of element 10 relative to edge surface 13 is higher, and particularly much higher, than in the second region 17. The much higher strength refers to an average increase of at least 50 MPa. Accordingly, according to a further embodiment, for glass elements, a characteristic strength of 80-200 MPa is measured at the edge where the filament is pre-damaged and broken by an ultrashort pulse laser. When combined with an etching process to form a surface like that in the first region, a characteristic strength higher than 150 MPa and even 500 MPa is measured. The characteristic strength σc is obtained by fitting the two-parameter Weibull distribution to the experimentally measured data using the most approximation method.

[0015] That is, by testing the strength of each side / edge of the component 10 manufactured according to this invention, for example, using a 3-point bend or a 4-point bend or a stifenrolle, a significant characteristic strength difference can be found between the edge with the second region (i.e., the removed / broken retaining tab) and the edge without the second region. The surface exposed in the second region by removing the tab or retaining section has lower mechanical strength and can therefore be used as or serve as a marker of the breakage point.

[0016] Even though the strength is reduced in the area of ​​the fracture surface of the second region 17 exposed due to the separation, the high strength of the small component is maintained. The second region 17 can also be used as a marker fracture point as described above and taken into consideration in the construction.

[0017] Another advantage of dividing the edge surface 13 into at least one first region and at least one second region 15, 17 is the possibility of alignment. Accordingly, the second region can be used as an orientation mark for component alignment. For example, a robot can detect this second region and grasp or insert the component 10 in a predetermined orientation. Thus, even if the second region 17 is asymmetrically aligned with respect to the component's axis of symmetry, the robot can determine how the sides are oriented, such as which side is superior. This is particularly important when one of the sides has a coating.

[0018] In a preferred embodiment, the number of such second regions 17, which are inserted as fracture surfaces and have altered strength, is minimized. Generally, advantageously, the number of such connecting sections and such second regions is up to 50, preferably up to 10, further preferably up to 5, and most preferably up to 3. In a particularly preferred embodiment, the structuring is carried out such that the small component is connected to the holding section by one or two connecting sections. As explained below in conjunction with Figure 3, several connecting sections can fix the small component from different directions; in a preferred embodiment, for stability reasons, a scheme from the same direction or even parallel sections is used. In a preferred embodiment, the small component or element 10 is connected to the holding section by parallel connecting sections, preferably two parallel connecting sections.

[0019] Besides surface characteristics, the two types of regions 15 and 17 may also have other distinguishing features. Accordingly, the edge surfaces may form different angles with the side surfaces 100 and 101 within these two regions. For example, in the first region 15, due to the etching process, there are tapered angles on the two edges 19 and 29. Furthermore, the second region 17 may have an inclination due to a fracture operation, causing one edge to extend and / or the other edge to retract. In addition to different surface structures, the first and second regions 15 and 17 may also have different edge geometries or edge shapes.

[0020] Generally, the cone angle of the edge surface in the first region can also be generated by the incident direction of the laser beam. In this case, filamentary damage that extends obliquely into the material is inserted, thereby creating an edge surface with a correspondingly obliquely positioned surface along the filament direction during the etching process.

[0021] The different surface structures of the first and second regions 15 and 17 can be distinguished primarily based on roughness, reflectivity, and visual appearance. According to one embodiment, although the two regions 15 and 17 are distinguishable, they have the same or at least indistinguishable visual appearance by the naked eye alone.

[0022] Component 10 is preferably implemented as a small product for precision mechanical or micromechanical applications, such as design and functional components for the watchmaking industry, packaging components for photoelectroluminescent emitters, or packaging components for photoelectromagnetic sensors. Preferably, the maximum lateral dimension of the component is 100 mm, more preferably 80 mm, and even more preferably 50 mm. Smaller components with a maximum lateral dimension of 30 mm can also be manufactured. Furthermore, a maximum lateral dimension of 0.3 mm or more preferably 1 mm, more preferably 3 mm, and even more preferably 5 mm is used.

[0023] Figure 2 shows a fragment of the surface structure of a first region according to a preferred embodiment. Typically, the etched surface of the first region 15 has cap-shaped grooves 22. These cap-shaped grooves are particularly likely to be more or less directly adjacent to each other, such that adjacent grooves 22 are separated by ridges 24. The depth of the cap-shaped or rounded grooves is preferably less than 5 μm. According to one embodiment, the average lateral dimension of the grooves 22 falls within the range of 5 μm to 200 μm, preferably 5 μm to 100 μm, particularly 5 μm to 50 μm, and even more preferably 5 μm to 20 μm. According to a further embodiment, in a top view of the first region 15, the ridges 24 form the polygonal boundaries of the cap-shaped grooves 22.

[0024] The average lateral dimension of the cap-shaped grooves can be affected by the duration of the etching process. These cap-shaped grooves are typically produced at low removal rates, and preferably using alkaline etching media such as KOH or NaOH solutions. However, etching can also be performed using acidic etching media. According to a preferred embodiment, material is removed at a removal rate of less than 15 μm / hour, preferably less than 10 μm / hour, and most preferably less than 8 μm / hour. After the channels formed along the filamentary damage converge, depending on the amount of material removed, the channels at the edges of the sheet element are still considered as laterally open, adjacent channels, or as ribs. These ribs remain at the positions where the channels abutted each other during etching. If further etching is performed for a longer time after the channels converge, these structures are balanced, and an upper structure (Überstruktur) without semi-open channels or ribs is produced, except for the cap-shaped grooves. Preferably, the average number of sides of the polygons formed by the ridges is less than eight, preferably less than seven. Compared to the curvature of the cap-shaped groove, the ridge 24 is relatively sharp. Accordingly, the area share of the convex region, for example, that needs to be centered on the ridge is only small. The area share of the convex region on the etched surface is preferably less than 5%, and particularly less than 2%.

[0025] In particular, the surface structure caused by low etching rate is characterized by high edge strength, which is especially advantageous for small components subjected to mechanical loads.

[0026] The properties of such a surface and its manufacture are described in US 2018 / 215647 A1, and this application fully incorporates the laser-assisted etching method and the resulting surface structure.

[0027] Figure 3, with sub-figures (a) to (e), illustrates different embodiments of a structured sheet-like intermediate product 1 made of fragile material. These intermediate products all have elements 10 as separable material segments, which are connected to holding sections 6 via connecting sections 2, preferably in the form of tabs. Here, in all the embodiments shown, the holding section 6 is constructed as a frame. The elements 10 are arranged within the frame 8 or within openings 9 defined by the frame 8, and are connected to the frame 8 or more generally to the holding section 6 via one or more connecting sections 2. In the example of sub-figure (a), the element 10 is connected to the frame 8 via a single tab-shaped connecting section 2.

[0028] Due to manufacturing constraints, the inner edge surface 80 of the opening 9 of the frame-shaped retaining element 6 generally has the same surface structure as the first region 19 of the edge surface 13 of the sheet-like element 10, i.e., a similar etched surface. This has the advantage of also providing the frame 8 with high stability.

[0029] To enhance the mechanical stability of the separated element (10), according to an embodiment also implemented in the example in sub-figure (a) of FIG3, the profile of element 10 adjacent to the second region 17 is convex or arched outward. Compared to a straight or concave profile, this geometry reduces the tensile force appearing on the second region 17 under mechanical load.

[0030] In the example of sub-figure (b), two connecting sections 2 are provided on opposite sides of the element 10 to hold it. Two material bridges or connecting sections 2 are also provided in the examples of sub-figures (c) and (d). In example (c), the connecting sections 2 hold the element 10 on two different sides. In other words, the longitudinal directions of the material bridges intersect each other, and are in particular perpendicular to each other. In example (d), these connecting sections or material bridges 2 are arranged side by side. Therefore, the longitudinal directions of the connecting sections 2 are generally parallel.

[0031] In order to provide the necessary mechanical stability to the manufactured components or small or ultra-small products by maintaining section 6, not limited to the specific embodiment shown, according to a preferred embodiment, the product is larger than connecting section 2 and / or component 10 in at least one lateral dimension.

[0032] For mechanical stability reasons, according to another embodiment, not limited to a specific example, the width of the connecting section 2 is at least half a percentage (0.5%) of the maximum lateral dimension of the attached miniature product or glass or glass-ceramic element 10, preferably at least one percentage, but according to an alternative or supplementary embodiment, the width of the connecting section is at least 100 μm. To achieve good separability of the element 10, generally preferably, the width of the connecting section is at most 50%, preferably at most 30%, more preferably at most 20%, and further preferably at most 10% of the maximum lateral dimension of the holding section 6 or the glass or glass-ceramic element 10 connected to the connecting section 2.

[0033] To facilitate easy separation of the self-holding section 6 from the element 10 while still achieving stable holding of the element 10, according to another embodiment, it is generally preferred that the distance between at least two connecting sections 2 holding an element 10 is at least half the thickness of the intermediate product 1 or the element 10, preferably at least equal to that thickness, and particularly preferably at least twice that thickness. Here, the distance between them refers to the intermediate cavity between the edges of the connecting sections 2. Accordingly, according to this embodiment, in the example shown in FIG. 1, the width of the first region 15 located between the two regions 17 is also at least twice the thickness of the element 10. According to an alternative or supplementary embodiment, the distance between these connecting sections is at least 20 μm.

[0034] However, more than two connection segments 2 may also be provided. For this purpose, sub-figure (e) of Figure 3 shows an example of an embodiment in which element 10 is connected to holding segment 6 via three connection segments 2. Preferably, the connection segments 2 extend generally parallel. As mentioned earlier, but generally preferred, and not limited to the illustrated embodiment, only a smaller number of connection segments are provided. Also applicable to the illustrated example is that the number of such connection segments is preferably up to 50, particularly up to 10, preferably up to 5, and especially preferably between 1 and 3. A single connection segment 2 is often sufficient.

[0035] If several components 10 of different types and sizes are connected to the retaining section 6, it is preferable to use the above specifications for each component including the attached connecting section 2.

[0036] In the simplest case, the small component or component 10 is separated by a purely mechanical method, i.e., by applying mechanical stress at the transition point from component 10 to connecting element 2. However, such a separation process may cause tearing cracks in the small component or connecting element 2, leaving tiny material protrusions or shell-like recesses / notches on the outline of component 10. To avoid such defects, the transition area between the connecting element and the small component can be structured by selectively inserting pre-damping to control the stress characteristic curve and thus control the crack direction. For this purpose, methods known in the prior art, such as mechanical scribing, can be used, but laser-based methods, such as ablation, stealth dicing, laser-based thermal separation, or filamentation along the desired separation line, can also be used. That is, according to one embodiment, as shown in FIG3, a weakening structure 4 is provided, which extends along a predetermined separation line located between connecting section 2 and component 10.

[0037] In particular, the weakened structure 4 between the connecting section 2 and the small component or element 10 can be structured through a filamentation process. This involves inserting a through-hole or filamentous damage, typically within the submikron range, along a desired contour or separation line at a predetermined distance using a focused ultrashort pulse laser. To this end, according to one embodiment, the structured intermediate product 1, including the holding section 6, connecting element 2, and element 10, can be fed into an ultrashort pulse laser device and processed accordingly. Compared to pre-treated fracture edges without weakened structures, fracture edges pre-treated through this filamentation process have the advantage of being able to separate from the connecting section 2 with less force. The force required for separation is almost always the same, and there is virtually no abnormal appearance at the edge. In contrast, unfilamented edges show surface fracturing. The required force is significantly increased, which also increases the risk of damage to the original element 10.

[0038] In a preferred embodiment, these additional modifications are inserted perpendicular to the extension direction of the connecting element and as a supplement to the existing profile.

[0039] As an alternative or supplementary solution, weakening structure 4 may also include a region with reduced thickness. For example, this thickness reduction can be achieved through laser ablation.

[0040] Another approach is to insert engraving lines, for example, by using engraving wheels or engraving tools for diamonds.

[0041] Preferably, after the outline of the intermediate product 1 is formed, i.e., after the etching process, the weakening structure 4 is fabricated in a separate method step. This weakening structure can be constructed, for example, as a continuous or discontinuous trench (and thus as a localized thinning) located on at least one of the two surfaces, (e.g., by filamentation using an ultrashort pulse laser) as a perforation, or through internal modification, such as in so-called covert cutting. Generally, the weakening structure can be verified using an optical microscope or an electron microscope.

[0042] Figures 4 to 6 illustrate embodiments of an intermediate product 1 in the form of a structured sheet made of fragile material, each having several elements 10 connected to a common holding section 6. In the embodiment according to Figure 4, the holding section 6 is strip-shaped. That is, the holding section 6 does not enclose the element 10 in a ring or frame shape. This exposes at least one edge of the element 10, and the holding section 6 does not obstruct access. This facilitates, for example, the operation of grasping the glass or glass-ceramic element 10 with pliers and separating it from the holding section 6. For example, in automated manufacturing, plier-like tools may be provided as part of a robot.

[0043] In the example of Figure 5, several glass or glass-ceramic elements 10 are arranged in a matrix within a common opening 9 of a retaining frame 6 constructed as a frame 8. According to one embodiment, the glass or glass-ceramic elements 10 are arranged in rows, particularly in a matrix arrangement containing more than one row of elements 10, on the retaining section 6 in the form of a frame 8. A layout containing two rows within the opening 9 of the frame is particularly preferred, as shown in this example. Based on this layout, the elements 10 can be individually fixed to opposite sides of the opening by means of connecting sections 2. As shown, several, particularly two, connecting sections 2 may be provided for each element 10. Similar to the example in sub-figure (d) of Figure 3, two parallel extending connecting sections 2 are provided here. The embodiment shown here containing two, particularly parallel, tab-like connecting sections 2 is illustrative; two or fewer connecting sections or even more may be used for each small component. In the example of Figure 6, a typical implementation is achieved, wherein at least two elements 10 are provided in the opening 9 of the holding section 6 constructed as a frame 8, wherein the two elements 10 are connected by at least one connecting section 20 extending from one element 10 to the other element 10.

[0044] Figure 7 illustrates the steps of a method for manufacturing an element 10 made of a fragile material according to this disclosure and as illustratively shown in Figure 1. Generally, not limited to the specific embodiment shown, the method for manufacturing the intermediate product 1 and the method for manufacturing the sheet element 10 made of a fragile material are based on the following steps: as shown in sub-Figure (a) of Figure 7, a sheet 3 made of a fragile material is provided.

[0045] In particular, glass or glass-ceramics are used as fragile materials, specifically: alkali-free (AF) glass, borosilicate glass, and glass with product names such as AF32, AF35, AS87, D263, D263T, B270, MEMPAX, Willow, G-Leaf, EN-A1, and BDA-E.

[0046] For manufacturing methods involving laser irradiation, the formation of filamentary damage, and subsequent etching that converges along the channels widened by the filamentary damage, the following lists glass types that are particularly suitable.

[0047] According to one embodiment, the glass comprises the following components (unit: weight percentage): composition (wt%) SiO 2 63-85 Al₂O₃ 0-10 B 2O 3 5-20 Li₂O + Na₂O + K₂O 2-14 MgO + CaO + SrO + BaO + ZnO 0-12 TiO₂ + ZrO₂ 0-5 P₂O₅ 0-2

[0048] According to another embodiment, the glass of element 10 comprises the following components: composition (wt%) SiO 2 60-84 Al₂O₃ 0-10 B 2O 3 3-18 Li₂O + Na₂O + K₂O 5-20 MgO + CaO + SrO + BaO + ZnO 0-15 TiO₂ + ZrO₂ 0-4 P₂O₅ 0-2

[0049] In another embodiment, the glass comprises the following components: composition (wt%) SiO 2 58-65 Al₂O₃ 14-25 B 2O3 6-10.5 MgO + CaO + SrO + BaO + ZnO 8-18 ZnO 0-2

[0050] Another suitable composition for the glass of element 10 is: composition (wt%) SiO 2 50-81 Al₂O₃ 0-5 B 2O 3 0-5 Li₂O + Na₂O + K₂O 5-28 MgO + CaO + SrO + BaO + ZnO 5-25 TiO₂ + ZrO₂ 0-6 P₂O₅ 0-2

[0051] According to another embodiment, the glass of element 10 comprises the following components SiO 2 52 - 66 B 2O 3 0 - 8 Al₂O₃ 15 - 25 MgO + CaO + SrO + BaO + ZnO 0 - 6 ZrO 2 0 - 2.5 Li₂O + Na₂O + K₂O 4 - 30 TiO₂ + CeO₂ 0 - 2.5

[0052] For all the aforementioned glass compositions, the following applies: coloring oxides, such as Nd₂O₃, Fe₂O₃, CoO, NiO, V₂O₅, MnO₂, CuO, and CT₂O₃, may be added as appropriate. 0-2 wt% of As₂O₃, Sb₂O₃, SnO₂, SO₃, Cl, F, and / or CeO₂ may be added as a refining agent, and the total composition shall be 100 wt%.

[0053] Generally, the thickness of the sheet 3 preferably falls within the range of 20 μm to 6000 μm, more preferably within the range of no more than 5000 μm, and particularly preferably within the range of 20 μm to 3000 μm. In the first step, the outline of the retaining and connecting elements, and the outline of the small product or component 10, are defined. For this purpose, the sheet 3, made of a fragile material, is irradiated with a laser, wherein the fragile material of the sheet 3 is at least partially transparent to the laser, and wherein the laser beam of the laser causes material modification 5 within the sheet 3. The laser beam is guided along a path 50 within the sheet 3 such that the material modification is located side by side on the path 50. Sub-figure (b) of Figure 7 shows the sheet 3 containing the material modification located side by side on the path 50. Here, modification can refer to material changes, particularly changes in refractive index (local or continuous), in the form of localized material thinning such as trenches, scribing, or cavities, internal damage in the substrate such as microcracks, localized melting, or continuous pores or filamentary damage (cylindrical or general shapes).

[0054] To separate the substrate portion required for holding section 6, connecting element 2, and small product or component 10 from unnecessary excess parts, the existing modification is strengthened in the next step by an etching process, i.e., enlarged, so that the modified areas contact or overlap, thereby performing continuous and uninterrupted material weakening, or even separation along the desired target contour. That is, the sheet 3 is then subjected to an etching process, in which the material modification 5 is widened into the final connection channel through the etching process, causing the sheet 3 to be split along path 50. Path 50 defines the contour of component 10, which is connected to holding section 8 through connecting section 2. Thereby, after splitting along this path, the sheet intermediate product 1 according to this disclosure is obtained.

[0055] Etching can be performed using acidic etching media, such as aqueous solutions of HF, HCl, H₂SO₄, HNO₃, or other acids. Preferably, etching is performed using alkaline etching media, such as potassium hydroxide, KOH, or sodium hydroxide, NaOH. According to a further embodiment, etching is carried out in an alkaline etching medium with a pH greater than 12 and containing a complexing agent. The complexing agent is selected in a manner that complexes at least one of the components of the fragile material. According to a further embodiment, a complexing agent is used to form a complex containing alkaline earth metal ions, preferably calcium ions (Ca²⁺). According to yet another further embodiment, the complexing agent is selected from the group consisting of: phosphates, preferably ATMP (aminotrimethylenephosphonic acid), phosphonic acids, salts of hydroxycarboxylic acids, preferably basic gluconate, EDTA, and / or transition metal salts, particularly CrCl₃. The aforementioned measures can advantageously counteract localized inhibition of the etching operation by complexing the dissolved components. To be precise, even within the structure to be generated, a self-stabilizing or even self-enhancing effect related to the etch rate is achieved.

[0056] Alternatively, an etching solution containing dissolved silicates, preferably basic silicates, and especially preferably water glass, can be used. Using an etching solution containing dissolved silicates significantly improves the etching rate. This effect is particularly noticeable when the silicate concentration in the etching solution is high. Especially at high silicate concentrations, silicates also act as a base support, thereby increasing the mobility or ion mobility of hydroxide ions. This is particularly beneficial in embodiments with extremely high hydroxide concentrations in the etching solution. Accordingly, at extremely high base concentrations, the ion mobility of hydroxide ions decreases with increasing concentration, which also affects the etching rate. However, by adding silicates as a base support, this effect can be at least partially compensated for.

[0057] If the sheet 3 is split along a path 50 that mimics the outline of element 10 and connecting section 2 through an etching process, an element 14 complementary to element 10 containing connecting section 2 separates from the sheet 3. That is, unwanted substrate portions are divided into several parts during the etching process (e.g., when auxiliary cutting is inserted before etching) or detached as a whole from the structured substrate. At the end of this step, there is a component consisting of one or more holding sections, one or more miniature products, single or multiple connections between miniature products and holding elements, or between miniature products themselves. This component is particularly characterized by the surface structure created by the etching process.

[0058] By separating component 14, intermediate product 1 is obtained. This is shown in sub-figure (c) of Figure 7. Contrary to the illustration, the outline of component 10 can also be formed without separating the complementary component 14, for example, by simply tracing the outline as a path with a laser beam, followed by a narrow-slit etching process that follows the path. Alternatively, component 10 can be fabricated by separating several smaller components, rather than a single complementary component 14.

[0059] At the end of the process chain is a separation step, in which the small component or element 10 is separated from its connecting element along a defined separation line. Accordingly, a method for manufacturing element 10 is also proposed, wherein the connecting section 2 is split after manufacturing intermediate product 1, thereby separating element 10 from holding section 6. Sub-figure (d) of Figure 7 illustrates this step.

[0060] Preferably, the steps shown in FIG7(d) are performed separately from the manufacturing time of the intermediate product (i.e., much later than that manufacturing) and / or at another location (e.g., for mounting element 10 into a dedicated device), for example after storage or transportation. The advantage of manufacturing the intermediate product 1 in this way is that the position of the subsequent smaller product or element 10 is stabilized, thus facilitating further processing, specifically by directly or with additional manipulatory assistance, treating the intermediate product as a whole. Without completeness, further process steps may include: coating or partial coating of the surface, printing, restructuring, or a combination thereof. According to another embodiment, the intermediate product 1 may be chemically pre-tightened. Even in this further processing, the connection between element 10 and holding section 6 simplifies manipulatory procedures. For chemical pre-tightening, it is generally advantageous to use alkali-containing brittle materials, such as glass or glass-ceramics with a sufficiently high Na₂O content. For this purpose, the Na₂O content is preferably at least 5 wt%. To simplify the separation of element 10 and retaining section 6 at the connecting section 2 even under chemical pre-tightening, according to a further embodiment, the width of the connecting section 2 is preferably less than twice the stress layer depth (DoL). In this case, the connecting section is chemically pre-tightened over its entire cross-section, thereby reducing the risk of uncontrolled fracture caused by stress variations along the fracture point. According to another further embodiment, the width of the connecting section 2 may also be less than four times the stress layer depth, or preferably less than three times the stress layer depth (DoL). This is particularly suitable for thicker glass, thereby achieving non-destructive separation while limiting the stress layer depth. According to yet another embodiment, a channel with a length of, for example, 10 μm may be provided at the connecting section 2.

[0061] The exchange bath can enter this channel, thereby creating chemical pre-tightening around it. This also allows for a degree of chemical pre-tightening of the transition region from the connecting section to element 10 within the volume, thus avoiding high stress differences at the fracture point. This at least one channel can be inserted into both the side and edge surfaces, as shown in the weakening structure 4 in Figure 1.

[0062] At the end of the separation process, the holding section containing the connecting element is separated from the small component or element 10. The sides 100 and 101 may also undergo further processing such as structuring or other forms.

[0063] As illustrated in conjunction with Figure 1, the surface exposed by the separation process has a second surface structure different from the first region exposed by the etching process. For example, it may be a smooth surface in the case of mechanical separation, or a rough surface typically observed in the case of laser drilling via a filamentation process, through which vertically extending open filamentary channels pass. For each original connection segment 2, the edge surface 13 of the element 10 has a second region 17, the area of ​​which is equal to the cross-sectional area of ​​the connection segment 2 in the contact area between the connection segment 2 and the element 10. Therefore, the sum of the proportions of the second regions 17 to the total area of ​​the edge surface 13 is much smaller than the sum of the proportions of the first regions 15. Preferably, the proportion of the second regions 17 is less than 20%, more preferably less than 10%, and even more preferably less than 5%. A proportion of less than 2%, and particularly less than 1%, is most preferably adopted.

[0064] Figure 8 illustrates an example of an embodiment of the intermediate product 1 divided into zones. By this embodiment, small components or elements 10 located within the frames 8 can also be manufactured in a cascaded manner. Specifically, in a first process step, the sheet 3 is first structured or pre-damaged according to the geometry of the holding sections 6, and in a second process step, the sub-regions, connecting elements 2, and elements 10 within the frames 8 are structured. Here, by appropriately selecting process parameters (e.g., pitch), it can be ensured that only the elements 10 are separated by the etching process, without processing the perforated lines 26 located between the frames 8. This embodiment of the intermediate product 1 is based on the fact that the intermediate product 1 has several holding sections 6 in the form of frames 8, each of which at least one element 10 is provided, connected to the frames 8 via at least one connecting section 2, wherein the frames 8 are detachably connected via one or more perforated lines 26.

[0065] Another implementation is also implemented in the example of Figure 8. Alignment marks 28 in the form of through holes can also be manufactured by a laser-assisted etching process used to define and process the outline of element 10. As shown in Figure 8, all retaining elements 6 in the form of frames, which are connected by perforation lines or several zones, obtain such alignment marks 28. This allows for simple and accurate alignment of the frames after the separation of the frames 8, for example, for further processing.

[0066] According to one embodiment of the method, inline ultrashort pulse laser structuring is performed during the fabrication of the substrate glass. Specifically, inline laser structuring can be integrated into a continuous stretching process, in which continuous glass ribbons are manufactured. Furthermore, laser structuring is preferably combined with the fabrication of thin and ultrathin glass with thicknesses less than 400 μm, preferably up to 200 μm, particularly preferably up to 100 μm, or even up to 50 μm or 30 μm. Thin glass can be manufactured by a pull-down method or an overflow melting method. Inline etching can be performed directly on the structured glass ribbon. As an alternative or supplementary method, the glass ribbon can be wound into a roll after laser structuring, or it can be divided transversely to the feed direction of the glass ribbon through other processes, and then cut to the desired dimensions along the feed direction. In these methods, the structuring, etching, and separation steps can be separated from each other in time and space. Therefore, Figure 9 shows an apparatus 29 for manufacturing glass ribbons, which has been modified to manufacture intermediate product 1 according to this disclosure.

[0067] In the example shown, apparatus 29 is adapted to wind an initially unstructured sheet 3, in the form of a continuous glass ribbon 30, into a roll 44. First, molten glass 32 is drawn from nozzle 34 into a glass ribbon 30, wherein a tension roller 36 located below nozzle 34 applies tension to the glass exiting nozzle 34. The illustrated scheme is a pull-down method, where the glass exits from a downward-opening nozzle. In an overflow melting method, the glass flows over the edge of an upward-opening elongated overflow channel and then flows downward along the sidewall of the overflow channel. The flow converges below the overflow channel to form a glass ribbon.

[0068] As shown, it is preferable to deflect the glass strip 30 in the horizontal direction and move the glass strip by means of a conveying device 38 (e.g., a conveyor belt). The structuring achieved by inserting filamentous material along path 50, as shown in sub-figure (b) of Figure 7, is performed on the undisassembled glass strip 30 by an ultrashort pulse laser 40. The laser beam 41 of the ultrashort pulse laser 40 is focused onto the glass strip 30 by a beam lens 42 and guided along the desired path 50 within the glass strip 30. In the illustrated embodiment, the glass strip 30 is then wound into a roll 44 on a core 46. Alternatively or supplementarily, the glass strip 30 can be guided through an etching bath to expose the outline of the element 10 as shown in sub-figure (c) of Figure 7. That is, the method and apparatus 29 according to this embodiment are based on: - As an unstructured sheet 3 made of brittle and hard material, a continuous glass ribbon 30 is manufactured in a continuous stretching process, wherein... - During the stretching process, the material is modified by inserting an ultrashort pulse laser 40 along a predetermined path 50 onto a moving, continuous glass strip 30.

[0069] Since the second region 17 of the edge surface 13 may have less strength than the first region 15, it is preferable to position the second region at a location where the mechanical load is generally smaller. Ideally, the second region 17 should be positioned where the stress is minimal under a defined, for example, symmetrical load condition. Therefore, a preferred embodiment of the arrangement of the second region on the edge surface 13 is described below. According to a preferred embodiment, the at least one second region 17 extends along specific locations on the edge surface 13, the distance from which the centroid of the area is at least 2 / 3 of the maximum distance. For the same purpose, as an alternative or supplementary option, the at least one second region 17 may extend along a segment of the edge surface 13, where, under load, the mechanical load of that segment is at most 80% of the maximum load, preferably at most 60%, and most preferably at most 40%.

[0070] For illustration, Figure 10 shows an example of an L-shaped element 10 in a top view of side 100. The centroid 103 of the area does not need to be located within the side 100 of the element 10. This is also true for the element 10 shown. For each point with coordinates (px, py) along the outer contour or edge surface 13 or edge 19 of the element 10, the distance d from the centroid 103 of the area with coordinates (mx, my) can be determined according to d = ((pxmx)² + (pxmy)²)¹ / ².

[0071] Therefore, Figure 11 shows a functional relationship between "the distance d between the position of the edge face or contour and the centroid of the area" and "the distance s along the contour of element 10" for the element in Figure 10. Point 104 is selected as the starting point, which is the point with the smallest distance from the centroid of the area 103. The arrows indicate the direction followed when traversing the contour. The corner points of the contour are represented by the letters a, b, c, d, e, and f in Figure 10. These points are also marked in the graph of Figure 11, and can be clearly identified as peaks. The maximum distance from the centroid of the area 103 exists at corner e. A dashed line is drawn in Figure 11, which indicates the value of 2 / 3 of the distance at point e. Based on the scale of Figure 11, the distance at corner e is approximately 51 (using arbitrary units). Accordingly, the limit of 2 / 3 of this value is approximately 34. Accordingly, in the example shown, the preferred position for connecting with connecting segment 2 is located at the ends of sides 105 and 106. For illustration, the preferred fixed area 107 is marked with a dashed line. As can be seen from the diagram in Figure 11, although the angle d is also relatively far from the centroid of the area 103, it does not yet meet the condition that the distance between them is at least 2 / 3 of the maximum distance.

[0072] In fact, this area is not very suitable for use as a region fixed by connecting section 2, because under the mechanical load acting on the sides 105 and 106, the fracture surface may be subjected to tensile stress in the region of angle d.

[0073] Figure 12 shows another example in which the layout of the second region, or (in the case of intermediate article 1) the position where element 10 is connected to retaining section 6 via connecting section 2, satisfies the above-described structural requirements. Figure 12 shows an intermediate article 1 having retaining element 6 in the form of a frame. In the opening of the frame, element 10, in the form of a gear, is connected to frame 8 via two connecting sections 2. The connecting sections 2 are connected to element 10 on the outer edge of the teeth 108. Compared to the recesses located between the teeth 108, these portions of the profile are further distanced from the centroid 103. Furthermore, the outer region of the teeth 108 has the maximum distance from the centroid 103 located at the center of the gear.

[0074] Generally, it is possible not only to produce edge surfaces with straight profiles, particularly those extending substantially perpendicular to the sides 100 and 101, but also edge surfaces with arched profiles or cross-sections. In addition to inward arching, i.e., concave profiles, outward arching profiles can also be manufactured. For this purpose, Figure 13 shows the height profile of the edge surface 13 of element 10 within the first region 15. The height profile marks the positions of sides 100 and 101 with a steep drop to a minimum at x-positions of approximately -321 μm and +372 μm. As can be seen from the combined curve, the edge surface arches outward with an absolute value falling within the range of 10 μm to 15 μm. Generally, this shape can be achieved by inserting filamentary damage, entirely or partially, at an angle. Alternatively or supplementarily, the etching removal rate can be influenced by generating filamentary damage that terminates at least on one side of the material.

[0075] Therefore, not limited to this particular embodiment, the edge surface 13 including the etched surface has a profile in the first section that arches outward or inward to a degree of at least 1% of the thickness of the element 10.

[0076] Figures 14 and 15 are optical micrographs of a glass component. As illustrated in the example in conjunction with Figure 13, the edge surface 13 of component 10 is arched outward. As shown in Figure 14, component 10 has an annular component adjacent to the rod-shaped segment shown in the upper right of the figure. In the photograph of Figure 14, it is almost impossible to distinguish the two regions 15 and 17 by appearance. Figure 15 shows a further enlarged photograph of the edge surface 13 containing regions 15 and 17. Here, in particular, the transition region 18, which can be identified as a line between regions 15 and 17, can be seen. However, it is also almost impossible to distinguish the broken edge of the second region 17 from the etched surface of the first region by appearance. This is especially because the roughness of the two regions can be matched. Thus, the roughness of the first region can be affected by the etching parameters. As for the second region 17, the roughness can be affected mainly by the type and design of the weakening structure 4, such as the distance of the filamentary damage along the weakening line. Therefore, not limited to the example shown, in one embodiment, the ratio of the average roughness Ra of the first region 15 to the adjacent second region 17 falls within the range of 0.75 to 1.25. According to a preferred embodiment, also as shown in the example, both regions 15 and 17 have an appearance similar to a polished surface. That is, not limited to the example shown, the two regions can in particular have the same visual appearance.

[0077] Since the second region 17 is preferably the fracture edge, this second region is usually flat. However, it is also possible to achieve another shape, such as a convex or concave arched shape, through specific measures. For this purpose, for example, several filamentary damages can be inserted at different angles as a weakening structure.

[0078] Furthermore, to ensure that the two regions 15 and 17 match in appearance, it is preferable that the height offset between the second region 17 and the adjacent first region 15 is less than 20 μm. This feature is satisfied even in the examples shown in Figures 14 and 15. The second region 17 neither protrudes nor significantly retracts. This feature can be achieved as follows: at the connecting segment 2, the weakening structure 4 terminates near the outer contour of the adjacent first region 15, or the outer contour is continued.

[0079] Figures 16 and 17 show two electron micrographs of the edge surface 13 of an element 10 made of a fragile material, which in particular uses an element made of glass as in the examples of Figures 14 and 15.

[0080] The example in Figure 16 is taken at 200x magnification. The second region 17, adjacent to the first region 15 on both the left and right sides, is clearly visible. The cap-shaped groove 22 located within the first region is also clearly visible. According to an embodiment also implemented in the illustrated example, a transition region 18 is provided between the first region 15 and the second region 17, wherein the transition region 18 has a cap-shaped groove, which, on average, is larger than the cap-shaped groove in the first region. These larger grooves 22 extending along the transition region 18 are clearly visible in the micrograph. These grooves are generated as a result of the etch rate variation at the transition region from the connecting section 2 to the element 10 during the contouring process in the etching bath. These larger cap-shaped features help prevent uncontrolled breakage or conchoidal fractures during the separation of the element 10 from the connecting section 2.

[0081] Figure 17 shows the edge surface at 500x magnification. In this magnification, the filamentary damage 39 inserted into the fracture surface of the first region 15 by the ultrashort pulse laser can also be identified through dark, fine lines, as the fracture surface follows these filamentary damages. Therefore, these damages subsequently exist as partially open channels within the fracture surface. In the image of Figure 17, the filamentary damage 39 extends from top to bottom, i.e., from one side of element 10 toward the opposite side. In the example shown, the distance between the filamentary damages 39 is approximately 6 μm. As previously mentioned, it is preferable to first fabricate the outline of the sheet-like intermediate product including the connecting section 2 and element 10 through filamentation and etching. The filamentary damage 39 is then inserted, forming the weakening structure 4, which is then visible in the fracture surface of the second region. However, other methods can also be used, such as inserting all the filamentary damages and subsequently masking the damage 39 in the connecting section 2, thereby avoiding the etching removal of these damages 39.

[0082] In one embodiment, as illustrated in Figures 4 to 6, the intermediate product 1 is coated after the structuring process (laser filamentation and subsequent etching). Accordingly, the element 10 separated from the intermediate product may also be coated, particularly with an optically effective coating.

[0083] In principle, different coating methods can be used, such as sputtering and PVD, dip coating, or printing the component and holding section as a whole. Different types of coating layers can also be used, such as optically effective layers (anti-reflective layers, filtering layers, such as infrared cut-off filters), functional layers (anti-fingerprint, antimicrobial, or antibacterial coatings (e.g., silver ion-based), scratch-resistant coatings), or purely decorative coatings in the form of pigments or varnishes. For example, layers based on aluminum nitride / silicon nitride or zirconium oxide, with high refractive indices and a thickness greater than or equal to 1 μm, are generally suitable for use as scratch-resistant coatings.

[0084] For infrared cutoff or bandpass filters, a multilayer system can be formed by alternating high-refractive-index coatings (mostly TiO2, Ta2O5, Nb2O5, HfO2, ZrO2) and low-refractive-index coatings (preferably SiO2) of appropriate thickness to achieve the desired optical properties. Such multilayer systems can also be used for other coatings, such as anti-reflective coatings. Therefore, not limited to a specific example, in one embodiment, the optically effective coating comprises several layers with different refractive indices, particularly alternating layers with higher and relatively lower refractive indices.

[0085] The methods described herein enable the fabrication and manipulation of extremely small components, particularly those with lateral dimensions ranging from 1 mm to a maximum of 10 mm, within a substrate material thickness of 50 μm (but at least 70 μm to 400 μm). Such small components may be used as infrared cut-off filters, for example, for camera sensors located in mobile phones or camera modules, and other portable electronic devices such as laptops or tablet PCs. For this purpose, an optically effective layer with the required optical properties is typically applied. Layer deposition is simplified, or even based on, the positioning of the component 10 in a predetermined manner by the connecting section 2 and the holding section 6.

[0086] Furthermore, the strength of the components is also important for the aforementioned application areas. In particular, high-strength filter elements can be manufactured by appropriately combining the coating process adjacent to the structuring process with the pre-tightening process performed in between or after it.

[0087] The coating of the components, the orientation of the separated and coated components 10 by the robot according to regions 15 and 17, and the pre-tightening have been described above.

[0088] Therefore, according to one embodiment of the present invention, a sheet-like filter element is provided, wherein the element 10, made of a fragile material, is coated with a filter coating. At least one of the sides 100, 101 may be provided with the filter coating, and depending on the situation, coatings may also be provided on both sides. The coatings may also be different. The filter coating may be an infrared cut-off coating, i.e., a coating that absorbs or reflects radiation in the near-infrared region. In this case, for such a filter element, the substrate or element 10 is permeable to infrared radiation, or more generally, its transmittance for infrared radiation is higher than that of the filter coating. Regarding the function of the infrared cut-off coating, the near-infrared region refers to the wavelength range from 0.7 μm to 2.5 μm. According to another embodiment, a camera module is provided having a sensor covered by the sheet-like element 10 according to this disclosure, wherein the sheet-like element 10 constitutes a filter. For this purpose, in particular, as described above, a filter coating may be provided on the element 10. As an alternative or supplementary option, the glass of the sheet element 10 can also be a filter glass.

[0089] Figure 18 illustrates a camera module 52 for this embodiment, which can be used, for example, in a mobile phone or another portable electronic device. The camera module 52 includes a camera sensor 56 for capturing images, an objective lens 58, and, depending on the application, a housing 59 for housing and securing the sensor 56 and the objective lens 58. A filter element 60 is applied to the photosensitive layer of the sensor 56, for example, by bonding it with a bonding layer 61. The filter element 60 is formed by a coated element 10. The filter coating 54 is constructed such that most of the radiation in the near-infrared region is reflected or absorbed, so that essentially only visible light is incident on the sensor.

[0090] In another embodiment, the substrate is pre-tightened prior to the coating process, preferably by chemical pre-tightening. For this purpose, the holding section 6 and frame 8, and connecting section 2, or the fragile sheet-like intermediate product 1 containing the aforementioned components, undergoes a pre-tightening process as a whole in an exchange bath.

[0091] The strength of a component is important both within the composite containing the retaining section and after detachment. This strength largely depends on the fracture strength of the corresponding edges. For this purpose, Figure 19, a Weibull diagram, shows typical values ​​for the fracture strength of a 100 μm thick ultrathin glass, measured immediately after the filamentation operation, i.e., after inserting a filamentary damage via an ultrashort pulse laser (measurement "A", circle symbol). Measurements of the glass sheet after the subsequent KOH etching process (measurement "B", triangle symbol) and after a chemical pre-tightening process immediately following the etching process (measurement "C", diamond symbol) are also shown. The glass sheet was manufactured using D263T type glass.

[0092] The lines shown in Figure 19 represent the failure probability in the form H = 100%·(1-exp(-t / T) b) matched with the measured values. Accordingly, these lines represent the cumulative density function of the fracture probability with shape parameter b and scale parameter T. For the measured value "A" after filamentation, T = 53.55, b = 25.25; for the measured value "B" after etching, T = 826.35, b = 1.69; and for the measured value "C" after etching and pre-tightening, T = 508.8, b = 8.27.

[0093] The filamentary edge (measurement "A") of the ultrathin glass substrate has a minimum fracture stress of approximately 50 MPa, while the etched edge (measurement "B") has at least approximately 200 MPa, and the pre-tightened edge (measurement "C") even reaches at least approximately 300 MPa. Through the pre-tightening process, the distribution width of the fracture stress of the etched edge is significantly narrowed, and is defined as: the average fracture stress of the etched and pre-tightened edge is approximately 500 MPa.

[0094] The strength enhancement achieved through the pre-tightening process is material-dependent, and, as shown in the example of Figure 19, it can typically achieve a significantly higher strength value compared to an unpre-tightened glass sheet.

[0095] For the separation process of smaller components or elements 10 with the retaining frame 8 or with the material bridge, i.e., with the connecting section 2, these values ​​are significant: if the weakening structure 4 has been placed within the narrow material bridge, its strength is approximately equal to the reference value (measurement "A") for the filamentous edge, and therefore, its strength is approximately one-quarter of the strength of the etched edge (based on the characteristic b10 value). If the component also undergoes a pre-tightening process, the coefficient further increases to 6. Therefore, during the monomerization process, the material bridge first breaks in the region of the weakening structure 4, and the component 10 can be reliably separated from the retaining section 6 of the frame 8. That is, based on this effect, the element 10 can be easily separated from the frame 8 even after chemical pre-tightening. Therefore, in an advantageous embodiment, a sheet-like intermediate product 1 is proposed, wherein the weakening structure 4 extends along the separation line provided between the connecting section 2 and the component 10, wherein the weakening structure 4 has a chain of filamentous damage, and wherein the intermediate product 1 is chemically pre-tightened. Component 10, and at least the connecting section 2 within the region of the weakening structure 4, are chemically pre-tightened.

[0096] If the intermediate product 1, coated and / or pre-tightened according to this case, is split at the holding section 6 or material bridge, a second region 17 of the edge surface 13, as described above, is generated. This region not only has a different roughness value than the first region 15 of the edge surface, as previously mentioned, but also differs from the first region due to the coating state and intensity. In particular, for the pre-tightened and coated intermediate product 1, when the material bridge / connecting section 2 contacts in the corresponding region of the edge surface of the element 10, and a reduction in the strength of the element 10 in these regions is acceptable in future applications, it is appropriate to achieve a reduced strength of the edge surface in the second region 17, depending on the situation. Therefore, for the rectangular element 10, the connecting or holding section 6 is preferably arranged in the region of the corner of the element 10 or directly at the corner, because the stress is minimal under load. Figure 20 shows an intermediate product 1 including the correspondingly provided connecting section 2. The difference from the embodiments of Figures 3 to 8 is that the connecting section 2 is here directly attached to the corner of the rectangular element 10. If element 10 is now separated from holding section 6, not limited to the illustrated example, an element 10 with a shape including at least one corner is obtained, wherein a second region 17 with an edge surface has an edge coinciding with the corner of element 10, or wherein the second region 17 terminates at the corner. A similar effect can also reduce the distance between the edge of region 17 and the corner. According to a more general embodiment, the distance between the edge of the second region and the corner is less than the width of the second region 17, preferably less than half the width of the second region 17.

[0097] Figure 21 illustrates an embodiment including such element 10. In this example, the second region 17 does not terminate directly at the corresponding corner 110, but is spaced a small distance from the corner. However, this distance is less than the width of the second region 17, even less than half the width of the second region 17. Such a small distance, as shown in the example, helps prevent material breakage at the corner 110 during the separation process and prevents the fracture surface of the second region from being uneven. As mentioned earlier, the intermediate product 1 can be coated before separating the element 10. In this way, the second region 17 exposed at the material bridge due to the separation process of the coated intermediate product 1 does not have a coating. This embodiment is also shown in Figure 21. The coating 70 is shown here in shaded lines. As shown, the coating 70 may also be present at least partially on the edge surface 13. Not limited to the specific example shown, according to another embodiment, an element 10 made of a fragile material is provided, wherein at least one of the sides 100, 101 and at least a portion of the edge surface 13 are provided with a coating 70, wherein the coating 70 is omitted or missing in the second region 17.

[0098] Therefore, in another embodiment, (depending on subsequent processing on the opposite side) the resulting second region can be used in future applications for input coupling and / or output coupling of electromagnetic radiation, particularly visible (coherent or incoherent) electronic radiation. Such elements can be used, for example, as light guides or as microfluidic elements in biotechnology. That is, according to yet another embodiment, not limited to the location of a particular coating, an electro-optical layout is proposed, comprising at least one radiation source and / or sensor, wherein the radiation source and / or sensor is arranged such that radiation input is coupled from the radiation source or radiation output is coupled for detection by the sensor through at least one second region 17 located on the edge surface 13 of the element 10 made of fragile material.

[0099] In summary, besides the change in roughness value in the second region 17 of the edge 13 of the intermediate product compared to the surrounding first region 15, the lack of coating and reduced strength in these second regions also indicate the usefulness of the method of the present invention. In another embodiment, a weakening structure 4 along the target contour of the element 10 is provided for the transition region between the element 10 and the material bridge or connecting section 2, and then Cr / CrO is coated by a sputtering process or another PVD method, for example. Since the thickness of the intermediate product is small, it can be seen here that not only the sides 100, 101 of the intermediate product 10 are coated, but also, as previously described, its surrounding edge surface 13 (at least partially) and (where the diameter of the weakening structure 4 is sufficiently large after the etching process) the inner surfaces of each element of the weakening structure 4 are coated. After the element 10 is separated from the connecting section 2, the edge surface has the aforementioned characteristics, namely, the edge surface 13, divided into first and second sections 15, 17 according to the number of material bridges, has the aforementioned coating at least outside the area of ​​the material bonding, i.e., on the first region 15, and, depending on the situation, also has residues of the coating 70 in the second region 17. To distinguish the first and second regions of the edge surface 13, different optical characteristics can be employed, particularly for reflection / scattering. The element 10 thus manufactured can primarily achieve an electro-optical layout as described below.

[0100] Figure 22 illustrates an example of an electro-optic layout 71 including element 10. The electro-optic layout 71 includes a radiation source 72 and a radiation sensor 74. Element 10 has a coating 70, which is also present on the edge surface 13, but as previously mentioned, the second region 17 does not have this coating. The coating 70 may, for example, have the property of reflecting radiation. In this case, the radiation input of the radiation source 72 can be coupled to element 10 through the second region 17, and the radiation is re-emitted through another second region 17, thereby being detected by the radiation sensor 74. A possible optical path is illustrated in conjunction with the illustrative beam 76. If one of the sides of element 10 is also uncoated, for example, the interaction between radiation and the medium can occur here.

[0101] The following describes a further aspect of the method for manufacturing the component 10 made of a fragile material. The basic idea of ​​this method is to simplify the manipulation of the component 10 through its connection with the holding section 6. At the latest, with separation at the connecting section 2, the component 10 exists in a monolithic form and becomes difficult to manipulate again from this point onward. For further improvement, according to one embodiment of the method, the intermediate product 1 is fixed to a carrier. According to a first further aspect, with the component 10 fixed to the carrier, the component 10 is separated from the holding section 6, wherein even after separation, the component 10 remains connected to the carrier. This allows the component 10 to be detached from the carrier at a later appropriate point in time, without needing to cut the holding section 2 at that point. According to an alternative or supplementary further aspect, the carrier system is deformable, wherein the component 10 is separated from the connecting section 2 by mechanical stress generated on the connecting section 2 based on the deformation of the carrier. This deformation may include stretching and / or bending of the carrier. During the bending process, a bending stress is applied to the connecting section 2 because the intermediate product 1 bends as it is fixed to the carrier. If the carrier is stretched, a tensile stress is generated in the connecting section 2 along the surface of the intermediate product 1.

[0102] The following detailed explanation of the aforementioned further scheme is illustrated with examples. Generally, the carrier can be constructed as a thin film. In this case, the intermediate product 1 can be applied to the carrier in the form of a strip-shaped film while minimizing air bubbles or other inclusions. The film can be fixed to another holding frame (e.g., made of steel) such that a constant tension is maintained within the film. This ensures that element 10 is secured and locked even during subsequent separation processes. Element 10 can now be separated from holding section 6 by various methods:

[0103] A) Stretching the film: The geometry of the film retaining frame is determined by the geometry of the component and the stretching direction required during the separation process: for circular components, it is preferable to use isotropic (i.e., angle-independent) stretching of the film that is the same in all directions, while for rectangular components, it is suitable to use directional, uniaxial stretching to transfer the mechanical tensile stress generated by the stretching of the film in the area of ​​material weakening or usually at the connection section 2, thereby separating the element 10 from the retaining section 2.

[0104] Figure 23 shows a corresponding layout. The intermediate product 1 is fixed to a carrier 77 in the form of a stretchable film 78. The film 78 is tensioned by a tensioning device 82. The tensioning device 82 may include, for example, a suitable retaining frame. In this case, as indicated by the arrow marked "F", a force can be applied to the film 78 through the tensioning device 82. This stretches the film 78 and transmits the force as tensile stress to the intermediate product. Accordingly, the tensile stress extends along the surface of the intermediate product and causes separation at the connection section 2. In particular, with regard to the retaining section 6 in the form of a frame 8 surrounding the element 10, as in the example shown, separation can be simplified when the frame 8 also has one or more weakening structures 4. In this way, during the stretching or extension of the film, the frame 8 can separate first, thereby also transmitting the extension to the connection between the element 10 and the retaining section 6.

[0105] B) Bending: Another approach is to mechanically bend the carrier and / or the intermediate product 1 fixed to the carrier along the weakening structure, or more generally at the connecting section 2. For example, a three-point bending process can be used, wherein, from one side of the layout consisting of the carrier and the intermediate product, in the area located on the right and left sides of the weakening structure 4 or the connecting section 2, it is supported by two support beams / blades, while from the opposite side, a blade places the connecting section itself under mechanical load, causing it to break at the connecting section 2, preferably at the weakening structure 4.

[0106] Depending on the layout and fixation of element 10 on the holding section, this process can also be performed sequentially in different directions. An example in Figure 24 shows a corresponding layout. For example, a carrier 77, in the form of a film 78 or another deformable pad, is laid on two spaced-apart supports 84, such that the connecting section 2 of the intermediate product fixed to the carrier 77 is located between the supports 84. A blade 86 presses against the carrier 77 containing the intermediate product from opposite sides of the supports, thereby bending the carrier 77 and the intermediate product together and inducing bending stress in the region of the connecting section 2. Figure 24 shows the holding section 6 and element 10 in a separated state.

[0107] Further embodiments of mechanical bending may include: (e.g., by means of negative pressure attraction) guiding the film of the supporting member through a recess, or more preferably through a protruding, for example, rounded structure, thereby transferring mechanical stress to the connection section between element 10 and holding section 6 and triggering a separation operation.

[0108] Suitable film 78 can be implemented as a single-layer film or a multi-layer film. It typically includes at least one carrier film and a pressure-sensitive adhesive film, and may also include another separator film depending on the situation. So-called blue tape can be used as an adhesive tape, or (in cases where the structuring of component 10 is very complex) UV-curable tape can also be used. The adhesive strength of the tape should be sufficient to hold the component or component 10 during the processing, but also to allow the monomerized component to be peeled off from the film without damaging the component. UV-curable film is particularly suitable here because it has high adhesive strength in the uncured state, while the adhesive strength is reduced through the curing process, and the component can be peeled off. Another option is to fix the intermediate product 1 to the carrier 77 electrostatically.

[0109] Those skilled in the art will appreciate that these embodiments are not limited to the specific examples shown and described, but can be modified and combined in various ways. Accordingly, the aforementioned separation methods can also be combined with each other, for example, to separate element 10 at connection sections 2 that are positioned in different ways.

[0110] 1: Flake intermediate products 2,20: Connecting section, material bridge 3: Unstructured sheet-like material 4: Weakening the structure 5: Material Modification 6: Maintain section 8: Framework The opening in 9:8 10: Components made of fragile materials 11:10 Outline 12:10 Opening 13:10 edge surface 14: Components complementary to component 10 15:13, Area 1 17:13 Second Area The transition zone between 18:15 and 17 19, 20:10 on the edge 22: Cap-shaped groove 24: Ridge line 26: Perforated wire 28: Alignment Marks 29: Apparatus for manufacturing glass ribbons 30: Glass ribbon 32: Glass melt 34: Nozzle 36: Stretching roller 38: Conveying device 39: Filamentous injury 40: Ultrashort Pulse Laser 41: Laser Beam 42: Beam Lens 44: Rolls 46: Roll core 50: Path 52: Camera Module 54: Filter Coating 56: Sensor 58: Objective lens 59: Shell 61: Bonding layer 70: Coating 71: Electro-optical layout 72: Radiation source 74: Radiation Sensor 76: Beam 77: Carrier 78:Film 80:8,9 inner edge surfaces 82: Tensioning device 84: Support components 86: Blade 100, 101:10 side view 103:10 area centroid 104: The point with the smallest distance from 103 105, 106: Side 107: Fixed Area 108: Teeth 110:10 corner

Claims

1. A sheet-like element made of a fragile material, having two opposing sides (100, 101) and a surrounding edge (13) defining the outer contour of the sheet-like element (10), wherein, The edge surface (13) has at least one first region (15) and at least one second region (17), wherein the surface structure of the first region (15) and the second region (17) are different, wherein the first region (15) has an etched surface, and wherein the second region (17) is a fracture surface, and wherein the area of ​​the at least one first region (15) is greater than the area of ​​the at least one second region (17), wherein the first and second regions are arranged side by side along the direction of the edge surface (13), wherein the etched surface of the at least one first region (15) has cap-shaped grooves (22) that are adjacent to each other, such that adjacent cap-shaped grooves (22) are separated by ridges (24), and the depth of the cap-shaped grooves (22) is less than 5 μm and / or the average lateral dimension falls within the range of 5 μm to 200 μm.

2. As in claim 1, the chip element, wherein, The fragile material is glass or glass-ceramic.

3. As in claim 1, the chip element, wherein, The second region (17) of the edge surface (13) is adjacent to at least one of the edges (19, 20), and the edge surface (13) transitions to the side surface (100, 101) at the edges.

4. The sheet element of claim 1 or 2 is characterized by at least one of the following features: the width of the at least one second region (17) is at least 0.5% of the maximum lateral dimension of the sheet element (10); the width of the at least one second region (17) is at least 20 μm; the sum of the area shares of the at least one first region (15) accounts for at least 90% of the total area of ​​the edge surface (13); the maximum lateral dimension of the sheet element (10) is at most 100 mm; the maximum lateral dimension is at least 1 mm; the sheet element (10) is convex in a manner adjacent to the second region (17); and the number of the second regions (17) is at most 50.

5. The sheet element of claim 1 or 2 is characterized by at least one of the following features: the at least one second region (17) extends along a specific location on the edge surface (13), the distance between such location and the centroid of area (103) is at least 2 / 3 of the maximum distance from the centroid of area, the at least one second region (17) extends along a segment of the edge surface (13), the mechanical load of the segment under load is at most 80% of the maximum load.

6. The sheet element of claim 1 or 2, characterized in that at least one of the following features: the second region (17) is flat; the height offset between the second region (17) and the adjacent first region (15) is less than 20 μm; the ratio of the average roughness Ra of the first region (15) and the adjacent second region (17) falls within the range of 0.75 to 1.25; a transition region (18) is provided between the first region (15) and the second region (17), wherein, The transition zone has a cap-shaped groove (22) that is larger on average than the cap-shaped groove in the first region (15). The at least one first region and the at least one second region have the same visual appearance. The second region (17) of the edge surface (13) terminates at one corner of the sheet element (10). The distance between the edge of the second region (17) and the corner of the sheet element (10) is less than the width of the second region (17). Compared with the second region (17), the sheet element (10) has a bending load strength against the edge surface (13) in the first region (15) that is at least 20 MPa higher.

7. As in claim 1 or 2, the sheet element, wherein, The sheet element (10) is equipped with an optically effective coating.

8. The sheet element of claim 7, characterized in that at least one of the following features is present: the sheet element (10) is coated with a light-filtering coating (54) on at least one of its sides (100, 101), which absorbs or reflects radiation in the near-infrared region, wherein, Compared to the filter coating (54), the sheet element (10) has a higher transmittance for infrared radiation. The optically effective coating includes several layers with different refractive indices. At least one of the sides (100, 101) and at least a portion of the edge surface (13) are provided with a coating (70), wherein the coating (70) is not provided on the second region (17).

9. A sheet-like intermediate product made of a fragile material for manufacturing a sheet-like element as claimed in any one of claims 1 to 8, comprising a retaining section (6) and a sheet-like element (10) connected to the retaining section (6) via at least one connecting section (2), wherein, The sheet element (10) and the connecting section (2) have an edge surface (13) with an etched surface, and wherein, in the transition area toward the sheet element (10), the width of the connecting section is less than the length of the outline formed by the edge surface (13) containing the etched surface, thereby, by breaking the fragile material at the connecting section (2) to separate the sheet element (10), an independent sheet element (10) made of fragile material can be obtained. The edge surface (13) of the element has at least one first region (15) and at least one second region (17), wherein the surface structure of the first region (15) and the second region (17) are different, wherein the first region (15) has an etched surface, and wherein the second region (17) is a fracture surface, and wherein the area of ​​the at least one first region (15) is greater than the area of ​​the at least one second region (17), and wherein the first and second regions are arranged side by side along the direction of the edge surface (13).

10. The sheet-like intermediate product of claim 9, characterized in that at least one of the following features is present: the retaining section (6) is larger than the connecting section (2) or the sheet-like element (10) made of fragile material in terms of at least one lateral dimension; the width of the connecting section (2) is at least 0.5% of the maximum lateral dimension of the sheet-like element (10) made of fragile material; the width of the connecting section (2) is at least 20 μm; and the width of the connecting section (2) is at most 50% of the maximum lateral dimension of the retaining section (6) or the sheet-like element (10) made of fragile material.

11. As in the sheet-like intermediate products of request item 9 or 10, wherein, Several sheet elements (10) made of fragile materials are arranged in a matrix layout comprising one or more rows of sheet elements (10) made of fragile materials.

12. The sheet-like intermediate product of claim 9 or 10, having at least two sheet-like elements (10) made of fragile material located within an opening (9) of a retaining section (6) constructed as a frame (8), wherein, The two sheet elements (10) made of fragile material are connected by at least one connecting section (2) extending from one sheet element (10) to the other sheet element (10).

13. As in the sheet-like intermediate products of request item 9 or 10, wherein, A sheet element (10) is connected to the holding section (6) through at least two connecting sections (2), characterized by at least one of the following features: the distance between the connecting sections (2) is at least 20 μm, the distance between the connecting sections (2) is at least half the thickness of the intermediate product (1), and the sheet element (10) is connected to the holding section (6) through two parallel connecting sections (2).

14. The sheet-like intermediate product of claim 9 or 10, characterized in that the weakening structure (4) extends along a predetermined separation line located between the connecting section (2) and the sheet-like element (10).

15. As in claim 14, the sheet-like intermediate product, wherein, The weakened structure (4) has at least one of the following features: scribing lines, through holes or chains of filamentary damage, or areas with reduced thickness.

16. The sheet-like intermediate product as claimed in item 9 or 10, characterized by a plurality of holding sections (6) in the form of a frame (8), wherein, Each of the frames (8) is provided with at least one sheet element (10), which is connected to the frame (8) through at least one connecting section (2), wherein the frames (8) are connected in a separable manner through one or more perforated wires (26).

17. A method for manufacturing a sheet-like component made of a fragile material, wherein, A sheet (3) made of a fragile material is provided and irradiated by a laser, wherein the fragile material of the sheet (3) is at least partially transparent to the laser, wherein the laser beam (41) of the laser causes material modification (5) inside the sheet (3), and wherein the laser beam is guided along a path (50) within the sheet (3) such that the material modification is located side by side on the path (50), and wherein the sheet (3) is then subjected to... The etching process is used to widen the material modification (5) into a final connection channel, so that the sheet (3) is split along the path (50), and the path (50) defines the outline of the sheet element (10) connected by the connecting section (2) and the holding section (6), thereby obtaining a sheet intermediate product (1) as claimed in any of claims 9 to 16, and wherein the connecting section (2) is then cut off, so that the sheet element (10) is separated from the holding section (6).

18. As in request item 17, wherein, Insert a weakening structure (4) that extends along a predetermined separation line located between the connecting section (2) and the sheet element (10).

19. The method as described in claim 17 or 18, wherein, A continuous glass strip (30) is manufactured in a continuous stretching process as an unstructured sheet (3) made of a brittle and hard material, wherein during the stretching process, a material modifier is inserted along a predetermined path (50) on the moving continuous glass strip (30) by means of an ultrashort pulse laser (40).

20. As in request item 17 or 18, wherein, The intermediate product (1) is fixed to the carrier, characterized by one or more of the following steps: when the sheet element (10) is fixed to the carrier, the sheet element (10) is separated from the holding section (6), wherein even after separation, the sheet element (10) remains connected to the carrier, the carrier system is deformable, wherein the sheet element (10) is separated from the connecting section (2) by generating mechanical stress on the connecting section (2) based on the deformation of the carrier, the carrier is stretched to apply tensile stress to the connecting section (2), and the carrier and the intermediate product (1) fixed thereto are bent to apply bending stress to the connecting section (2).

Images