Special gas safety control method, device, control circuit, and semiconductor process equipment, and computer-readable storage medium

Abstract

A special gas safety control method, apparatus, control circuit, and semiconductor process equipment, as well as a computer-readable storage medium, are disclosed. The method includes: acquiring the pressure value of a chamber; when the pressure value is greater than a preset pressure threshold, and when it is necessary to open a second gas valve and a third gas valve, controlling a first circuit to disconnect and a second circuit and a third circuit to connect, thereby closing the first gas valve and opening the second and third gas valves; and controlling the first gas valve to connect and the second and third circuits to disconnect, thereby opening the first gas valve and closing the second and third gas valves.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a special gas safety control method, device, control circuit, semiconductor process equipment, and computer-readable storage medium. Prior Art

[0002] Chemical vapor deposition (CVD) is a method for depositing a substance onto a substrate surface in the form of an atomic film. With the advancement of microelectronics and deep submicron wafer technology, the dimensions of devices and materials are constantly decreasing, while aspect ratios in devices are increasing. The advantages of CVD in filling devices are becoming increasingly apparent, making this process increasingly popular in the semiconductor industry.

[0003] A hallmark of the CVD process is the flow of multiple process gases into the chamber. Once the chamber environment is established, the process gases enter simultaneously and adhere to the wafer, reacting on the wafer surface to form the desired thin film. Simultaneously, a vacuum pump is required to continuously remove byproducts and residual reactants. The CVD process gases can contain a variety of specialty gases, which are flammable, explosive, toxic, and corrosive, such as H2, WF6, 5% B2H6 / 95% N2, NF3, and SiH4.

[0004] In the existing technology, the interlocking between valves is controlled by software programs according to the interlocking conditions of special gas valves. However, the software has the risk of failure and poses a safety hazard. Summary of the Invention

[0005] In view of the above problems, embodiments of the present invention are proposed to provide a special gas safety control method, device, semiconductor process equipment, and computer-readable storage medium that overcome the above problems or at least partially solve the above problems.

[0006] To address the above-mentioned problems, an embodiment of the present invention discloses a special gas safety control method for use in semiconductor process equipment. The semiconductor process equipment includes: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on / off of a valve corresponding to a first gas, a second circuit for controlling the on / off of a valve corresponding to a second gas, and a third circuit for controlling the on / off of a valve corresponding to a third gas. The method includes: obtaining a pressure value of the process chamber; when the pressure value is greater than a preset pressure threshold, when it is necessary to open the second and third gas corresponding valves, controlling the first circuit to be disconnected and the second and third circuits to be connected, so that the first gas corresponding valve is closed and the second and third gas corresponding valves are opened; when it is necessary to open the first gas corresponding valve, controlling the first circuit to be connected and the second and third circuits to be disconnected, so that the first gas corresponding valve is opened and the second and third gas corresponding valves are closed.

[0007] Optionally, it also includes: when the pressure value is less than or equal to the preset pressure threshold, controlling the first circuit, the second circuit and the third circuit to be connected so that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

[0008] Optionally, the control circuit further includes: a first relay, a second relay, and a third relay, and the method further includes: when the pressure value is greater than the preset pressure threshold, controlling the second relay to be connected and the third relay to be disconnected via the first relay, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit; and when the pressure value is less than or equal to the preset pressure threshold, controlling the second relay to be disconnected and the third relay to be connected via the first relay, so that the third relay controls the on-off of the first circuit, the second circuit, and the third circuit.

[0009] Optionally, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than the preset pressure threshold, the first relay is used to control the second relay to be connected and the third relay to be disconnected, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit, including: when the pressure value is greater than the preset pressure threshold, the first relay is used to control the first pair of normally open contacts to remain in an open state to control the third relay to be disconnected, and the first relay is used to control the first pair of normally closed contacts to remain in a closed state to control the second relay to be connected, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit.

[0010] Optionally, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; and when the pressure value is greater than a preset pressure threshold, when it is necessary to open the second gas corresponding valve and the third gas corresponding valve, controlling the first circuit to disconnect and controlling the second circuit to connect to the third circuit, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened, includes: controlling the second pair of normally closed contacts to disconnect and the first circuit to disconnect through the second relay, and controlling the second pair of normally open contacts to close and the third pair of normally open contacts to close through the second relay, and controlling the second circuit to connect to the third circuit, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened.

[0011] Optionally, when it is necessary to open the valve corresponding to the first gas, the first circuit is controlled to be connected, and the second circuit and the third circuit are controlled to be disconnected, so that the first gas corresponding valve is opened and the second gas corresponding valve and the third gas corresponding valve are closed, including: controlling the second pair of normally closed contacts to remain in a closed state through the second relay, controlling the first circuit to be connected, and controlling the second pair of normally open contacts and the third pair of normally open contacts to remain in an disconnected state through the second relay, and controlling the second circuit and the third circuit to be disconnected, respectively, so that the first gas corresponding valve is opened and the second gas corresponding valve and the third gas corresponding valve are closed.

[0012] Optionally, when the pressure value is less than or equal to the preset pressure threshold, the first relay is used to control the second relay to be disconnected and the third relay to be connected, so that the third relay controls the on-and-off of the first circuit, the second circuit, and the third circuit, including: when the pressure value is less than or equal to the preset pressure threshold, the first relay is used to control the first pair of normally closed contacts to open and the second relay to be disconnected, and the first relay is used to control the first pair of normally open contacts to close and the third relay to be connected, so that the third relay controls the on-and-off of the first circuit, the second circuit, and the third circuit.

[0013] Optionally, the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts; and when the pressure value is less than or equal to the preset pressure threshold, controlling the first circuit, the second circuit, and the third circuit to be connected so that the first gas corresponding valve, the second gas corresponding valve, and the third gas corresponding valve are opened includes: controlling the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close through the third relay, and controlling the first circuit, the second circuit, and the third circuit to be connected so that the first gas corresponding valve, the second gas corresponding valve, and the third gas corresponding valve are opened.

[0014] Optionally, the first gas is NF 3, the second gas is H 2, and the third gas is SiH 4.

[0015] The present invention also discloses a control circuit for use in semiconductor process equipment. The control circuit includes: a first circuit for controlling the on / off of a valve corresponding to a first gas; a second circuit for controlling the on / off of a valve corresponding to a second gas; and a third circuit for controlling the on / off of a valve corresponding to a third gas.

[0016] The device further comprises a first relay, a second relay, and a third relay. When the pressure value is greater than the preset pressure threshold, the first relay is used to control the second relay to be connected and the third relay to be disconnected, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit. When the pressure value is less than or equal to the preset pressure threshold, the first relay is also used to control the second relay to be disconnected and the third relay to be connected, so that the third relay controls the on-off of the first circuit, the second circuit, and the third circuit.

[0017] Optionally, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than a preset pressure threshold, the first relay is used to control the first pair of normally open contacts to remain in an open state, control the third relay to be disconnected, and control the first pair of normally closed contacts to remain in a closed state through the first relay, control the second relay to be connected, so that the second relay controls the on and off of the first circuit, the second circuit, and the third circuit; and / or, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; the second relay is used to control the second pair of normally closed contacts to be disconnected, so as to control the disconnection of the first circuit. The second relay is further configured to control the closure of the second pair of normally open contacts and the third pair of normally open contacts to respectively control the connection of the second circuit and the third circuit, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened; and / or the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts; the third relay is configured to control the closure of the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to control the connection of the first circuit, the second circuit, and the third circuit, so that the first gas corresponding valve, the second gas corresponding valve, and the third gas corresponding valve are opened.

[0018] An embodiment of the present invention further discloses a semiconductor process device, comprising: a process chamber and a control circuit; the control circuit comprising a first circuit for controlling the on / off of a first gas-corresponding valve, a second circuit for controlling the on / off of a second gas-corresponding valve, and a third circuit for controlling the on / off of a third gas-corresponding valve; the semiconductor process device further comprising: a controller for obtaining a pressure value of the process chamber; when the pressure value is greater than a preset pressure threshold, when it is necessary to open the second gas-corresponding valve and the third gas-corresponding valve, controlling the first circuit to be disconnected, and controlling the second circuit and the third circuit to be connected, so that the first gas-corresponding valve is closed and the second gas-corresponding valve and the third gas-corresponding valve are opened; when it is necessary to open the first gas-corresponding valve, controlling the first circuit to be connected, and controlling the second circuit and the third circuit to be disconnected, so that the first gas-corresponding valve is opened and the second gas-corresponding valve and the third gas-corresponding valve are closed.

[0019] Optionally, the controller is further configured to control the first circuit, the second circuit, and the third circuit to be connected when the pressure value is less than or equal to the preset pressure threshold, so that the first gas corresponding valve, the second gas corresponding valve, and the third gas corresponding valve are opened.

[0020] Optionally, the control circuit further includes: a first relay, a second relay, and a third relay, and the controller is further configured to, when the pressure value is greater than the preset pressure threshold, control the second relay to be connected and the third relay to be disconnected via the first relay, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit; and, when the pressure value is less than or equal to the preset pressure threshold, control the second relay to be disconnected and the third relay to be connected via the first relay, so that the third relay controls the on-off of the first circuit, the second circuit, and the third circuit.

[0021] Optionally, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; the controller is configured to, when the pressure value is greater than a preset pressure threshold, control the first pair of normally open contacts through the first relay to remain in an open state and control the third relay to be disconnected, and control the first pair of normally closed contacts through the first relay to remain in a closed state and control the second relay to be connected, so that the second relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0022] Optionally, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; the controller is used to control the second pair of normally closed contacts to open, thereby disconnecting the first circuit, through the second relay, and to control the second pair of normally open contacts and the third pair of normally open contacts to close, thereby controlling the second circuit and the third circuit to connect, respectively, through the second relay, so that the valve corresponding to the first gas is closed and the valve corresponding to the second gas and the valve corresponding to the third gas are opened.

[0023] Optionally, the controller is used to control the second pair of normally closed contacts to remain in a closed state through the second relay, controlling the first circuit to be connected, and to control the second pair of normally open contacts and the third pair of normally open contacts to remain in an open state through the second relay, controlling the second circuit and the third circuit to be disconnected, respectively, so that the valve corresponding to the first gas is opened and the valve corresponding to the second gas and the valve corresponding to the third gas are closed.

[0024] Optionally, the controller is used to control the first pair of normally closed contacts to open and the second relay to disconnect through the first relay when the pressure value is less than or equal to the preset pressure threshold, and to control the first pair of normally open contacts to close and the third relay to connect through the first relay, so that the third relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0025] Optionally, the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts; the controller is used to control the closure of the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts through the third relay, and to control the connection of the first circuit, the second circuit, and the third circuit, so as to open the valve corresponding to the first gas, the valve corresponding to the second gas, and the valve corresponding to the third gas.

[0026] Optionally, the first gas is NF 3, the second gas is H 2, and the third gas is SiH 4.

[0027] An embodiment of the present invention further discloses a special gas safety control device for controlling a control circuit in semiconductor process equipment. The special gas safety control device includes at least one processor and at least one memory, wherein at least one program is stored in the memory; when the at least one program is executed by the at least one processor, the at least one processor implements the above-mentioned method disclosed in the embodiment of the present invention.

[0028] An embodiment of the present invention further discloses a computer-readable storage medium for use in semiconductor processing equipment, on which a computer program is stored. When the program is executed by a processor, the method disclosed in the embodiment of the present invention is implemented.

[0029] Embodiments of the present invention include the following advantages:

[0030] In an embodiment of the present invention, a process chamber pressure value is obtained; when the pressure value exceeds a preset pressure threshold, when it is necessary to open the valves corresponding to the second and third gases, the first circuit is controlled to be disconnected and the second and third circuits are controlled to be connected, so that the first gas valve is closed and the second and third gas valves are opened; when it is necessary to open the first gas valve, the first circuit is controlled to be connected and the second and third circuits are controlled to be disconnected, so that the first gas valve is opened and the second and third gas valves are closed. By controlling the first, second, and third circuits, a valve interlock function can be implemented. That is, the valve interlock function is incorporated into the circuit design so that when the process chamber pressure reaches the preset threshold, the first and second gas valves, and the first and third gas valves, will not open simultaneously. This avoids the risk of software control failure, prevents chemical reactions between the specialty gases from generating byproducts that could damage hardware and harm personnel, eliminates safety hazards, and protects the safety of the system and personnel. Simple diagram description

[0031] The aspects of the present disclosure are best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, in accordance with standard practice in the industry, various components are not drawn to scale. In fact, the dimensions of the various components may be arbitrarily increased or reduced for clarity of discussion. Figure 1 is a flowchart of the steps of a special gas safety control method provided in an embodiment of the present invention; Figure 2 is a schematic diagram of a special gas safety control embodiment of the present invention provides; Figure 3 is a block diagram of a semiconductor process equipment according to an embodiment of the present invention; FIG4 is a structural block diagram of a special gas safety control device provided in an embodiment of the present invention. Implementation Method

[0032] The present invention uses the tungsten chemical vapor deposition (CVD) process as an example. This CVD W process is primarily used for depositing 28-14nm W metal thin films. Specialty gases used in CVD W equipment include: H₂, WF₆, 5% B₂H₆ / 95% N₂, NF₃, and SiH₄. The Material Safety Data Sheet (MSDS) for each gas is as follows:

[0033] 1. H 2:

[0034] Hazard Overview: Hydrogen is a colorless, odorless, flammable compressed gas stored in high-pressure cylinders. When the hydrogen content in the air exceeds 4%, fire or explosion may occur at any time.

[0035] Molecular weight: 2.016.

[0036] Boiling point: (1 atmosphere) -423.0F (-252.8C).

[0037] Chemical stability: stable.

[0038] Incompatibility: Oxidizing agents.

[0039] 2. B 2H 6:

[0040] Hazard Overview: A colorless, highly toxic, extremely flammable gas sold as a mixture with argon, helium, hydrogen, or nitrogen. The gas has a sickening sweet odor. Inhalation or absorption through the skin can cause death.

[0041] Molecular weight: 27.67.

[0042] Boiling point: (1 atmosphere) -135.1F (-92.8C).

[0043] Chemical stability: Unstable.

[0044] Incompatibilities: Oxidizing agents, aluminum, lithium, halides and metal oxides.

[0045] 3. WF 6:

[0046] Hazard Overview: Toxic, corrosive, non-flammable liquefied gas that hydrolyzes into corrosive hydrofluoric acid upon contact with moisture. Inhalation or contact with skin can cause severe chemical burns.

[0047] Molecular weight: 297.8.

[0048] Boiling point: (1 atmosphere) 62.7F (17.2C).

[0049] Chemical stability: stable.

[0050] Reactivity: Hydrolysis produces hydrofluoric acid and tungsten oxyfluoride.

[0051] 4. NF 3:

[0052] Hazard Overview: Toxic, non-flammable compressed gas. It is an oxidizer and can cause or promote combustion of metals and non-metals.

[0053] Molecular weight: 71.0.

[0054] Boiling point: (1 atmosphere) -200.3F (-129.1C).

[0055] Chemical stability: stable.

[0056] Incompatibilities: Oils, greases, hydrocarbons.

[0057] 5. SiH 4:

[0058] Hazard Overview: Silane is a colorless, air-reactive gas that can cause asphyxiation. It will typically burn when in contact with air, releasing dense white smoke of amorphous silicon dioxide.

[0059] Molecular weight: 32.12.

[0060] Boiling point: (1 atmosphere) -169.0F (-111.7C).

[0061] Chemical stability: Spontaneous combustion, will spontaneously ignite when exposed to air.

[0062] Incompatibility: Air, other oxidizing agents and moisture.

[0063] It can be seen that gas safety design is an important part of CVD W equipment.

[0064] Among the special gases used in CVD W equipment, H2 and SiH4 are reducing agents, while NF3 is an oxidizing agent. The chemical bond energy of NF3 is relatively weak and unstable. Under certain conditions, NF3 can react chemically with H2. The chemical equation is:

[0065] NF 3+ 3H 2= NH 3+ 6HF

[0066] NF 3 can react chemically with SiH 4, and the chemical equation is:

[0067] 8NF 3+ 3SiH 4= 4N 2+ 3SiF 4+ 12HF

[0068] The reaction products, SiF₄ and NH₃, can contaminate the chamber and piping. Furthermore, HF, one of the reactants, is toxic and corrosive, potentially damaging hardware and posing safety risks. Since gas concentration is proportional to the chamber pressure, when the chamber pressure is below a certain value (e.g., 10 Torr), the gas concentration is low and the gas molecules are inactive, making chemical reactions less likely and eliminating the need for electrical interlocking.

[0069] When the process chamber pressure reaches a certain value (e.g., greater than 10 Torr), the above chemical reactions must be prevented. The valves for NF3 and H2 must not be opened simultaneously, nor must the valves for NF3 and SiH4 be opened simultaneously.

[0070] In the prior art, the opening and closing of the special gas valve is controlled by software according to preset interlocking conditions. For example, when one or more of the conditions such as the chamber cover is closed, the pressure difference between the gas cabinet and the environment is greater than the alarm value, and the chamber gas cabinet door is closed are not met, the special gas valve is not allowed to open, which can prevent the special gas from leaking into the air; when one or more of the alarms such as the coolant leakage alarm, the chamber overtemperature sensor alarm, and the smoke sensor alarm are detected, the special gas valve is closed, which can promptly prohibit the flow of special gas in the event of an abnormal situation, thereby preventing more serious hazards from occurring.

[0071] Although the current design uses software to interlock the valves, there is a risk of software failure, and this function needs to be added to the electrical design.

[0072] One of the core concepts of the embodiments of the present invention is to provide a new method for controlling specialty gas valves. By controlling the opening and closing of the specialty gas valves through circuitry, when the process chamber pressure exceeds a preset pressure threshold, the valves corresponding to the first gas and the second gas will not open simultaneously, and the valves corresponding to the first gas and the third gas will not open simultaneously. This avoids the risk of software control failure, prevents chemical reactions between the specialty gases from generating byproducts that could damage hardware and harm personnel, eliminates safety hazards, and protects the system and personnel.

[0073] 1 , there is shown a flowchart of the steps of a special gas safety control method provided by an embodiment of the present invention, which is applied to semiconductor process equipment. The semiconductor process equipment includes: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on / off of a valve corresponding to a first gas, a second circuit for controlling the on / off of a valve corresponding to a second gas, and a third circuit for controlling the on / off of a valve corresponding to a third gas. The special gas safety control method may specifically include the following steps:

[0074] Step 101, obtaining the pressure value of the process chamber;

[0075] For example, in an embodiment of the present invention, the control circuit may further include a controller (PLC, Programmed Logic Controller) for acquiring a pressure value signal of the process chamber and outputting a level signal to the control circuit.

[0076] In one embodiment of the present invention, the control circuit further includes: a first relay, a second relay, and a third relay, and the special gas safety control method further includes: obtaining a pressure value of the process chamber, and when the pressure value is greater than a preset pressure threshold, controlling the second relay to be connected and the third relay to be disconnected via the first relay, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit; and when the pressure value is less than or equal to the preset pressure threshold, controlling the second relay to be disconnected and the third relay to be connected via the first relay, so that the third relay controls the on-off of the first circuit, the second circuit, and the third circuit.

[0077] As an example, in an embodiment of the present invention, the second relay and the third relay can be controlled to be on and off by the first relay; and the first circuit, the second circuit, and the third circuit can be controlled to be on and off by the second relay and / or the third relay.

[0078] For example, the PLC can transmit a control signal to the first relay to control the closing or opening of the corresponding contacts of the first relay, thereby controlling the closing or opening of the corresponding contacts of the second and third relays. When the process chamber pressure is greater than a preset pressure threshold, the first relay can control the second relay to be closed and the third relay to be opened, so that the second relay controls the opening and closing of the first, second, and third circuits. When the pressure is less than or equal to the preset pressure threshold, the first relay can control the second relay to be opened and the third relay to be closed, so that the third relay controls the opening and closing of the first, second, and third circuits.

[0079] Step 102: When the pressure value is greater than a preset pressure threshold and it is necessary to open the valve corresponding to the second gas and the valve corresponding to the third gas, the first circuit is controlled to be disconnected, and the second circuit and the third circuit are controlled to be connected, so that the valve corresponding to the first gas is closed and the valve corresponding to the second gas and the valve corresponding to the third gas are opened.

[0080] For example, the control circuit may include a first circuit, a second circuit, and a third circuit, wherein the first circuit may control the on / off of the first gas valve, the second circuit may control the on / off of the second gas valve, and the third circuit may control the on / off of the third gas valve.

[0081] For example, if the pressure value of the process chamber is greater than the preset pressure threshold, it indicates that the concentration of the specialty gas in the process chamber is high, and the specialty gases are likely to react with each other, causing contamination of the process chamber and pipelines. When the second and third gas valves need to be opened, the first circuit can be controlled to be disconnected and the second and third circuits can be controlled to be connected, so that the first gas valve is closed and the second and third gas valves are opened.

[0082] In one embodiment of the present invention, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; when the pressure value is greater than a preset pressure threshold, the first relay controls the first pair of normally open contacts to remain in an open state to control the third relay to be disconnected, and the first relay controls the first pair of normally closed contacts to remain in a closed state to control the second relay to be connected, so that the second relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0083] For example, the first relay may include a first pair of normally closed contacts and a first pair of normally open contacts. When the process chamber pressure is greater than a preset pressure threshold, the PLC may output a low-level signal to the first relay. Upon receiving the low-level signal, the first relay may control the first pair of normally open contacts to remain in an open state, thereby disconnecting the third relay, and may control the first pair of normally closed contacts to remain in a closed state, thereby connecting the second relay. When the second relay is in the connected state, it may control the connection and disconnection of the first circuit, the second circuit, and the third circuit.

[0084] For example, FIG2 shows a schematic diagram of a special gas safety control system according to an embodiment of the present invention. KA01 is the first relay, KA02 is the second relay, and KA03 is the third relay. The first relay KA01 includes a first pair of normally closed contacts 11 and 12 for controlling the on / off of the second relay KA02. The first relay KA01 also includes a first pair of normally open contacts 13 and 14 for controlling the on / off of the third relay KA03. When the process chamber pressure exceeds a preset pressure threshold (e.g., 10 Torr), the PLC outputs a low level to the zero contact of the first relay KA01. At this point, the first pair of normally open contacts 13 and 14 of the first relay KA01 open, while the first pair of normally closed contacts 11 and 12 close. The third relay KA03 then opens, and the second relay KA02 closes. At this point, the second relay KA02 controls the on / off of the first, second, and third circuits.

[0085] In one embodiment of the present invention, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; the second relay controls the second pair of normally closed contacts to remain in a closed state, thereby controlling the first circuit to be connected; and the second relay controls the second pair of normally open contacts and the third pair of normally open contacts to remain in an open state, thereby controlling the second circuit and the third circuit to be disconnected, respectively, so that the valve corresponding to the first gas is closed and the valve corresponding to the second gas and the valve corresponding to the third gas are opened.

[0086] Exemplarily, the second relay may include a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts. When the process chamber pressure is greater than a preset pressure threshold, the first relay controls the second relay to be connected and the third relay to be disconnected. The second relay may control the second pair of normally closed contacts to remain closed, thereby connecting the first circuit, and control the second and third pairs of normally open contacts to remain open, thereby disconnecting the second and third circuits, respectively, thereby closing the first gas valve and opening the second and third gas valves.

[0087] In one embodiment of the present invention, the first gas is NF 3, the second gas is H 2, and the third gas is SiH 4.

[0088] As an example, the first gas may be NF 3, the second gas may be H 2, and the third gas may be SiH 4.

[0089] For example, as shown in FIG2 , which is a schematic diagram of a special gas safety control principle provided by an embodiment of the present invention, the second relay KA02 includes a second pair of normally closed contacts 21 and 22, which can control the on-off of the NF3 valve by controlling the on-off of the first circuit; the second relay KA02 also includes a second pair of normally open contacts 23 and 24, which can control the on-off of the H2 valve by controlling the on-off of the second circuit; the second relay KA02 also includes a third pair of normally open contacts 25 and 26, which can control the on-off of the SiH4 valve by controlling the on-off of the third circuit. When the process chamber pressure is greater than 10 Torr, the second relay KA02 controls the on / off of the first, second, and third circuits. When the H2 and SiH4 valves need to be opened, the PLC's NF3 and H2 and SiH4 valve opening switching signals can output high-level signals. The second relay KA02 receives the high-level signal and can control the second pair of normally open contacts 23, 24 and the third pair of normally open contacts 25, 26 of the second relay KA02 to close, and the second pair of normally closed contacts 21, 22 to disconnect. At this time, the circuits controlling the H2 and SiH4 valves are connected, and the circuit controlling the NF3 valve is disconnected. The H2 and SiH4 valves are allowed to open, and the NF3 valve is closed.

[0090] Step 103: When the valve corresponding to the first gas needs to be opened, the first circuit is controlled to be connected, and the second circuit and the third circuit are controlled to be disconnected, so that the valve corresponding to the first gas is opened and the valve corresponding to the second gas and the valve corresponding to the third gas are closed.

[0091] For example, when the pressure value of the process chamber is greater than a preset pressure threshold, when it is necessary to open the first gas valve, the first circuit can be controlled to be connected, and the second circuit and the third circuit can be controlled to be disconnected, so that the first gas valve is opened and the second gas valve and the third gas valve are closed, thereby achieving the first gas valve and the second gas valve are not opened at the same time, and the first gas valve and the third gas valve are not opened at the same time.

[0092] In one embodiment of the present invention, the second relay controls the second pair of normally closed contacts to remain in a closed state, thereby controlling the first circuit to be connected, and the second relay controls the second pair of normally open contacts and the third pair of normally open contacts to remain in an open state, thereby controlling the second circuit and the third circuit to be disconnected, respectively, so that the valve corresponding to the first gas is opened and the valve corresponding to the second gas and the valve corresponding to the third gas are closed.

[0093] For example, when the second relay is turned on and the NF3 valve needs to be opened, the second relay can control the second pair of normally closed contacts to remain in a closed state to connect the first circuit, and control the second pair of normally open contacts and the third pair of normally open contacts to remain in an open state to disconnect the second circuit and the third circuit, respectively, thereby controlling the NF3 valve to open and the H2 valve and the SiH4 valve to close.

[0094] For example, when the second relay KA02 is connected, when the NF3 valve needs to be opened, the PLC's NF3 and H2, SiH4 valve opening switching signals can output low-level signals. The second relay KA02 receives the low-level signal and can control the second pair of normally open contacts 23, 24 and the third pair of normally open contacts 25, 26 of the second relay KA02 to be disconnected, and the second pair of normally closed contacts 21, 22 to be closed. At this time, the circuits controlling the H2 valve and the SiH4 valve are disconnected, and the circuit controlling the NF3 valve is connected. The H2 valve and the SiH4 valve are closed, and the NF3 valve is allowed to open.

[0095] In one embodiment of the present invention, when the pressure value is less than or equal to a preset pressure threshold, the first circuit, the second circuit, and the third circuit are controlled to be connected so that the valve corresponding to the first gas, the valve corresponding to the second gas, and the valve corresponding to the third gas are opened.

[0096] For example, if the pressure value of the process chamber is less than or equal to the preset pressure threshold, it indicates that the concentration of the specialty gas in the process chamber is low, and the gas molecules are inactive and unlikely to undergo chemical reactions. Therefore, no electrical interlock is required, and the first circuit, the second circuit, and the third circuit can be controlled to be connected to open the NF3 valve, the H2 valve, and the SiH4 valve.

[0097] In one embodiment of the present invention, when the pressure value is less than or equal to a preset pressure threshold, the first relay controls the first pair of normally closed contacts to open and the second relay to disconnect, and the first relay controls the first pair of normally open contacts to close and the third relay to connect, so that the third relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0098] For example, when the pressure value of the process chamber is less than or equal to a preset pressure threshold, the PLC can output a high-level signal to the first relay. The first relay receives the high-level signal and can control the first pair of normally closed contacts to open, so as to disconnect the second relay, and control the first pair of normally open contacts to close, so as to connect the third relay, thereby controlling the third relay to control the on and off of the first circuit, the second circuit, and the third circuit.

[0099] For example, when the pressure value of the process chamber is less than or equal to 10 Torr, the PLC can output a high-level signal to the first relay KA01. The first relay KA01 receives the high-level signal and can control the first pair of normally closed contacts 11 and 12 to open, so that the second relay KA02 is disconnected, and control the first pair of normally open contacts 13 and 14 to close, so that the third relay KA03 is connected. The third relay KA03 controls the on and off of the first circuit, the second circuit and the third circuit.

[0100] In one embodiment of the present invention, the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts are controlled to close by the third relay, thereby controlling the connection of the first circuit, the second circuit, and the third circuit, so that the valve corresponding to the first gas, the valve corresponding to the second gas, and the valve corresponding to the third gas are opened.

[0101] For example, when the third relay is turned on, the third relay can control the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close, so that the first circuit, the second circuit, and the third circuit are connected, thereby controlling the valves corresponding to NF 3, H 2, and SiH 4 to open.

[0102] For example, FIG2 is a schematic diagram of a special gas safety control principle provided by an embodiment of the present invention.

[0103] The third relay KA03 includes a fourth pair of normally open contacts 31 and 32, which can control the on / off of the NF3 valve by controlling the on / off of the first circuit; a fifth pair of normally open contacts 33 and 34, which can control the on / off of the H2 valve by controlling the on / off of the second circuit; and a sixth pair of normally open contacts 35 and 36, which can control the on / off of the SiH4 valve by controlling the on / off of the third circuit.

[0104] When the process chamber pressure is less than 10Torr, the PLC can output a high level signal to the 0 contact of the first relay KA01. At this time, the first pair of normally open contacts 13 and 14 of the first relay KA01 are closed, and the first pair of the first relay KA01 is closed Normally closed contacts 11 and 12 are disconnected to ensure that the second relay KA02 will not obtain a high level, then the second relay KA02 is disconnected and the 0 contact of the third relay KA03 gets a 24V high level signal, at which time the third relay KA03 controls the circuit. The fourth pair of normally open contacts 31, 32, the fifth pair of normally open contacts 33, 34 and the sixth pair of normally open contacts 35, 36 of the third relay KA03 are closed, then the signal for opening of the H 2 , NF 3 , and SiH 4 valves is turned on and the valves open. In this case, the H 2 , NF 3 , and SiH 4 valves do not do electrical mutual exclusion when the chamber pressure is less than 10Torr.

[0105] In embodiments of the present invention, the pressure value of the process chamber is obtained;in the case that the pressure value is greater than the preset pressure threshold, when it is necessary to open the second gas corresponding valve and the third gas corresponding valve, the control first circuit is disconnected and the control second and third circuits are turned on so that the first gas corresponding valve is closed closed, second gas corresponding valve and third gas corresponding valve open; Through the control of the above first circuit, second circuit and third circuit, can realize the valve interlocking function, that is, valve interlock added to the circuit design, so that the process chamber pressure reaches the preset threshold, the first gas corresponding valve and the second gas corresponding valve will not open at the same time.

[0106] It should be noted that for the method embodiments, for the sake of a brief description, they are all stated as a series of action combinations, but those skilled in the art should be aware that the embodiments of the invention are not limited by the sequence of actions described, because according to the embodiments of the invention, certain steps can be performed in other sequences or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are preferred embodiments and that the actions involved are not necessarily necessary for the embodiments of the invention.

[0107] A control circuit provided by an embodiment of the present invention is applied to semiconductor process equipment. The control circuit comprises: a first circuit for controlling the on / off of a valve corresponding to a first gas, a second circuit for controlling the on / off of a valve corresponding to a second gas, and a third circuit for controlling the on / off of a valve corresponding to a third gas; and further comprises a first relay, a second relay, and a third relay. When a pressure value is greater than a preset pressure threshold, the first relay is used to control the second relay to be turned on and the third relay to be turned off, so that the second relay controls the on / off of the first, second, and third circuits. When the pressure value is less than or equal to the preset pressure threshold, the first relay is also used to control the second relay to be turned off and the third relay to be turned on, so that the third relay controls the on / off of the first, second, and third circuits.

[0108] For example, the first relay may include a first pair of normally closed contacts and a first pair of normally open contacts. When the process chamber pressure is greater than a preset pressure threshold, the PLC may output a low-level signal to the first relay. Upon receiving the low-level signal, the first relay may control the first pair of normally open contacts to remain in an open state, thereby disconnecting the third relay, and may control the first pair of normally closed contacts to remain in a closed state, thereby connecting the second relay. When the second relay is in the connected state, it may control the connection and disconnection of the first circuit, the second circuit, and the third circuit.

[0109] For example, as shown in Figure 2, KA01 is the first relay, KA02 is the second relay, and KA03 is the third relay. The first relay KA01 includes a first pair of normally closed contacts 11 and 12 for controlling the on / off of the second relay KA02. The first relay KA01 also includes a first pair of normally open contacts 13 and 14 for controlling the on / off of the third relay KA03. When the process chamber pressure exceeds a preset pressure threshold (e.g., 10 Torr), the PLC outputs a low level to the zero contact of the first relay KA01. At this point, the first pair of normally open contacts 13 and 14 of the first relay KA01 open, while the first pair of normally closed contacts 11 and 12 close. The third relay KA03 then opens, and the second relay KA02 closes. At this point, the second relay KA02 controls the on / off of the first, second, and third circuits.

[0110] In one embodiment of the present invention, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; the second relay controls the second pair of normally closed contacts to remain in a closed state, thereby controlling the first circuit to be connected; and the second relay controls the second pair of normally open contacts and the third pair of normally open contacts to remain in an open state, thereby controlling the second circuit and the third circuit to be disconnected, respectively, so that the valve corresponding to the first gas is closed and the valve corresponding to the second gas and the valve corresponding to the third gas are opened.

[0111] Exemplarily, the second relay may include a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts. When the process chamber pressure is greater than a preset pressure threshold, the first relay controls the second relay to be connected and the third relay to be disconnected. The second relay may control the second pair of normally closed contacts to remain closed, thereby connecting the first circuit, and control the second and third pairs of normally open contacts to remain open, thereby disconnecting the second and third circuits, respectively, thereby closing the first gas valve and opening the second and third gas valves.

[0112] For example, as shown in FIG2 , taking the example that the first gas may be NF 3, the second gas may be H 2, and the third gas may be SiH 4, the second relay KA02 includes a second pair of normally closed contacts 21 and 22, which can control the on-off of the NF 3 valve by controlling the on-off of the first circuit; the second relay KA02 also includes a second pair of normally open contacts 23 and 24, which can control the on-off of the H 2 valve by controlling the on-off of the second circuit; the second relay KA02 also includes a third pair of normally open contacts 25 and 26, which can control the on-off of the SiH 4 valve by controlling the on-off of the third circuit. When the process chamber pressure is greater than 10 Torr, the second relay KA02 controls the on / off of the first, second, and third circuits. When the H2 and SiH4 valves need to be opened, the PLC's NF3 and H2 and SiH4 valve opening switching signals can output high-level signals. The second relay KA02 receives the high-level signal and can control the second pair of normally open contacts 23, 24 and the third pair of normally open contacts 25, 26 of the second relay KA02 to close, and the second pair of normally closed contacts 21, 22 to open. At this time, the circuits controlling the H2 and SiH4 valves are connected, and the circuit controlling the NF3 valve is disconnected. The H2 and SiH4 valves are allowed to open, and the NF3 valve is closed.

[0113] In one embodiment of the present invention, when the pressure value is less than or equal to a preset pressure threshold, the first relay controls the first pair of normally closed contacts to open and the second relay to disconnect, and the first relay controls the first pair of normally open contacts to close and the third relay to connect, so that the third relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0114] For example, when the pressure value of the process chamber is less than or equal to a preset pressure threshold, the PLC can output a high-level signal to the first relay. The first relay receives the high-level signal and can control the first pair of normally closed contacts to open, so as to disconnect the second relay, and control the first pair of normally open contacts to close, so as to connect the third relay, thereby controlling the third relay to control the on and off of the first circuit, the second circuit, and the third circuit.

[0115] For example, when the pressure value of the process chamber is less than or equal to 10 Torr, the PLC can output a high-level signal to the first relay KA01. The first relay KA01 receives the high-level signal and can control the first pair of normally closed contacts 11 and 12 to open, so that the second relay KA02 is disconnected, and control the first pair of normally open contacts 13 and 14 to close, so that the third relay KA03 is connected. The third relay KA03 controls the on and off of the first circuit, the second circuit and the third circuit.

[0116] In one embodiment of the present invention, the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts are controlled to close by the third relay, thereby controlling the connection of the first circuit, the second circuit, and the third circuit, so that the valve corresponding to the first gas, the valve corresponding to the second gas, and the valve corresponding to the third gas are opened.

[0117] For example, when the third relay is turned on, the third relay can control the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close, so that the first circuit, the second circuit, and the third circuit are connected, thereby controlling the valves corresponding to NF 3, H 2, and SiH 4 to open.

[0118] For example, as shown in FIG2 , the third relay KA03 includes a fourth pair of normally open contacts 31 and 32, which can control the on / off of the NF3 valve by controlling the on / off of the first circuit; includes a fifth pair of normally open contacts 33 and 34, which can control the on / off of the H2 valve by controlling the on / off of the second circuit; and includes a sixth pair of normally open contacts 35 and 36, which can control the on / off of the SiH4 valve by controlling the on / off of the third circuit.

[0119] When the process chamber pressure is less than 10Torr, the PLC can output a high level signal to the 0 contact of the first relay KA01. At this time, the first pair of normally open contacts 13 and 14 of the first relay KA01 are closed, and the first pair of the first relay KA01 is closed Normally closed contacts 11 and 12 are disconnected to ensure that the second relay KA02 will not obtain a high level, then the second relay KA02 is disconnected and the 0 contact of the third relay KA03 gets a 24V high level signal, at which time the third relay KA03 controls the circuit. The fourth pair of normally open contacts 31, 32, the fifth pair of normally open contacts 33, 34 and the sixth pair of normally open contacts 35, 36 of the third relay KA03 are closed, then the signal for opening of the H 2 , NF 3 , and SiH 4 valves is turned on and the valves open. In this case, the H 2 , NF 3 , and SiH 4 valves do not do electrical mutual exclusion when the chamber pressure is less than 10Torr.

[0120] For the device embodiments, the description is relatively simple due to their substantial similarity to the method embodiments, where relevant refer to the partial description of the method embodiments.

[0121] 3, a structural block diagram of a semiconductor process equipment provided by an embodiment of the present invention is shown. The semiconductor process equipment 301 includes: a process chamber and a control circuit;

[0122] controller 3011 for obtaining the pressure value of the above process chamber;in cases where the above pressure value is greater than the preset pressure threshold, when it is necessary to open the said second gas corresponding valve and the said third gas corresponding valve, control the above first circuit to disconnect, and control the said second circuit and the above third circuit to make the said first gas corresponding valve closing, the said second gas corresponding valve and said third gas corresponding valve open;

[0123] In an optional embodiment of the invention, the above controller, is also used to control the opening of the first circuit, the second circuit described above, and the third circuit described above in the case of the above pressure value being less than or equal to the preset pressure threshold to open the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve described above.

[0124] In an optional embodiment of the present invention, the circuit further includes: a first relay, a second relay, and a third relay; the controller is further configured to, when the pressure value is greater than a preset pressure threshold, control the second relay to be connected and the third relay to be disconnected via the first relay, so that the second relay controls the on-off of the first circuit, the second circuit, and the third circuit; and, when the pressure value is less than or equal to the preset pressure threshold, control the second relay to be disconnected and the third relay to be connected via the first relay, so that the third relay controls the on-off of the first circuit, the second circuit, and the third circuit.

[0125] In an optional embodiment of the present invention, the first relay includes a first pair of normally closed contacts and a first pair of normally open contacts; the controller is configured to, when the pressure value is greater than a preset pressure threshold, control the first pair of normally open contacts to remain in an open state through the first relay and control the third relay to be disconnected, and control the first pair of normally closed contacts to remain in a closed state through the first relay and control the second relay to be connected, so that the second relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0126] In an optional embodiment of the present invention, the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; the controller is configured to control the second pair of normally closed contacts to be disconnected, thereby disconnecting the first circuit, and to control the second pair of normally open contacts and the third pair of normally open contacts to be closed, thereby connecting the second circuit and the third circuit, thereby closing the valve corresponding to the first gas and opening the valve corresponding to the second gas and the valve corresponding to the third gas.

[0127] In an optional embodiment of the present invention, the controller is configured to control the second pair of normally closed contacts to remain in a closed state through the second relay, thereby controlling the first circuit to be connected, and to control the second pair of normally open contacts and the third pair of normally open contacts to remain in an open state through the second relay, thereby controlling the second circuit and the third circuit to be disconnected, so that the valve corresponding to the first gas is opened and the valve corresponding to the second gas and the valve corresponding to the third gas are closed.

[0128] In an optional embodiment of the present invention, the controller is configured to, when the pressure value is less than or equal to a preset pressure threshold, control the first pair of normally closed contacts to open and the second relay to disconnect through the first relay, and control the first pair of normally open contacts to close and the third relay to connect through the first relay, so that the third relay controls the on and off of the first circuit, the second circuit, and the third circuit.

[0129] In an optional embodiment of the present invention, the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts; the controller is configured to control the closure of the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts via the third relay, thereby controlling the connection of the first circuit, the second circuit, and the third circuit, so as to open the valve corresponding to the first gas, the valve corresponding to the second gas, and the valve corresponding to the third gas.

[0130] In an optional embodiment of the present invention, the first gas is NF 3, the second gas is H 2, and the third gas is SiH 4.

[0131] As for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0132] Figure 4 is a block diagram of a specialty gas safety control device provided in an embodiment of the present invention. As shown in Figure 4 , the specialty gas safety control device is used to control control circuits in semiconductor process equipment and includes: at least one processor 101, memory 102, and at least one I / O interface 103. Memory 102 stores at least one program. When executed by processor 101, processor 101 implements the steps of any of the methods described in the aforementioned embodiments. At least one I / O interface 103 is connected between processor 101 and memory 102 and is configured to facilitate information exchange between the processor and memory.

[0133] Among them, the processor 101 is a device with data processing capabilities, including but not limited to a central processing unit (CPU); the memory 102 is a device with data storage capabilities, including but not limited to random access memory (RAM, more specifically such as SDRAM, DDR, etc.), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), and flash memory (FLASH); the I / O interface (read-write interface) 103 is connected between the processor 101 and the memory 102, and can realize information exchange between the processor 101 and the memory 102, including but not limited to a data bus.

[0134] In some embodiments, the processor 101, the memory 102, and the I / O interface 103 are interconnected via a bus 104, and further connected to other components of the computing device.

[0135] In some embodiments, the processor 101 includes an FPGA.

[0136] According to an embodiment of the present disclosure, a computer-readable medium is also provided. The computer-readable medium stores a computer program, wherein when the program is executed by a processor, the program implements the steps of any of the test wafer scheduling methods described in the above embodiments.

[0137] In particular, according to embodiments of the present disclosure, the processes described above with reference to the flowcharts can be implemented as computer software programs. For example, embodiments of the present disclosure include a computer program product comprising a computer program embodied on a machine-readable medium, the computer program containing program code for executing the methods illustrated in the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network via a communication component and / or installed from removable media. When executed by a central processing unit (CPU), the computer program performs the aforementioned functions defined in the system of the present disclosure.

[0138] It should be noted that the computer-readable medium described in this disclosure may be a computer-readable signal medium or a computer-readable storage medium, or any combination thereof. Computer-readable storage media may be, for example, but not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or components, or any combination thereof. More specific examples of computer-readable storage media may include, but are not limited to, an electrical connection having one or more conductors, a portable computer disk, a hard drive, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical memory devices, magnetic memory devices, or any suitable combination thereof. In this disclosure, a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, device, or component. In this disclosure, a computer-readable signal medium may include a data signal transmitted in baseband or as part of a carrier wave, which carries computer-readable program code. Such propagated data signals may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A computer-readable signal medium may also be any computer-readable medium other than a computer-readable storage medium that can transmit, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device. Program code embodied on a computer-readable medium may be transmitted using any suitable medium, including but not limited to wireless, wire, optical cable, RF, or any suitable combination thereof.

[0139] The flowcharts and block diagrams in the accompanying drawings illustrate the possible architectures, functions, and operations of the systems, methods, and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowchart or block diagram may represent a module, program segment, or portion of code, which contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in an order different from that marked in the accompanying drawings. For example, two blocks shown in succession may actually be executed substantially in parallel, or they may sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, as well as combinations of blocks in the block diagram and / or flowchart, may be implemented using a dedicated hardware-based system that performs the specified functions or operations, or may be implemented using a combination of dedicated hardware and computer instructions.

[0140] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0141] Those skilled in the art will appreciate that embodiments of the present invention may be provided as methods, apparatuses, or computer program products. Thus, embodiments of the present invention may take the form of entirely hardware embodiments, entirely software embodiments, or embodiments combining software and hardware aspects. Furthermore, embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk drives, CD-ROMs, optical drives, etc.) containing computer-usable program code.

[0142] The embodiments of the present invention are described with reference to flowcharts and / or block diagrams of methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and / or block in the flowcharts and / or block diagrams, as well as combinations of processes and / or blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions executed by the processor of the computer or other programmable data processing terminal device produce a device for implementing the functions specified in one or more processes in the flowcharts and / or one or more blocks in the block diagrams.

[0143] These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce a product including an instruction device that implements the functions specified in one or more processes in the flowchart and / or one or more blocks in the block diagram.

[0144] These computer program instructions can also be loaded into a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce computer-implemented processing, so that the instructions executed on the computer or other programmable terminal device provide steps for implementing the functions specified in one or more processes in the flowchart and / or one or more boxes in the block diagram.

[0145] Although preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they understand the basic inventive concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

[0146] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used solely to distinguish one entity or operation from another, and do not necessarily require or imply any actual relationship or order between these entities or operations. Furthermore, the terms "include," "comprise," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or terminal device that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or terminal device. Without further limitation, the elements defined by the phrase "include a..." do not preclude the presence of additional identical elements in the process, method, article, or terminal device that includes the elements.

[0147] The above is a detailed introduction to a special gas safety control method and a semiconductor process equipment provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core concept. At the same time, for those skilled in the art, according to the concept of the present invention, there may be changes in the specific implementation methods and application scopes. In summary, the contents of this specification should not be understood as limiting the present invention.

[0148] 101: Processor 102: Memory 103: I / O interface 104: Bus 301:Semiconductor process equipment 3011:Controller

Claims

1. A method for safety control of special gases, wherein, An application is made in a semiconductor manufacturing process apparatus, the apparatus comprising: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on / off state of a first gas corresponding valve, a second circuit for controlling the on / off state of a second gas corresponding valve, and a third circuit for controlling the on / off state of a third gas corresponding valve, the method comprising: acquiring a pressure value of the process chamber; when the pressure value is greater than a preset pressure threshold, indicating that a first gas and a second gas and / or a third gas are likely to undergo a chemical reaction in the process chamber to generate byproducts; when it is determined that the second gas corresponding valve and the third gas corresponding valve need to be opened, controlling the first circuit to be disconnected and controlling the second circuit and the third circuit to be connected, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened; when it is necessary to open the first gas corresponding valve, controlling the first circuit to be connected and controlling the second circuit and the third circuit to be disconnected, so that the first gas corresponding valve is opened and the second gas corresponding valve and the third gas corresponding valve are closed. The control circuit further includes: a first relay, a second relay, and a third relay. The first relay includes a first pair of normally closed contacts and a first pair of normally open contacts. When the pressure value exceeds the preset pressure threshold, the first relay controls the first pair of normally open contacts to remain open, thereby controlling the third relay to open. The first relay also controls the first pair of normally closed contacts to remain closed, thereby controlling the second relay to connect, so that the second relay controls the on / off state of the first circuit, the second circuit, and the third circuit. The first gas, the second gas, and the third gas each include one of H2, WF6, 5%B2H6 / 95%N2, NF3, and SiH4.

2. The method as described in request item 1, wherein, It also includes: when the pressure value is less than or equal to the preset pressure threshold, controlling the first circuit, the second circuit and the third circuit to be connected so that the first gas corresponding valve, the second gas corresponding valve and the third gas corresponding valve are opened.

3. The method as described in claim 2, wherein, When the pressure value is less than or equal to the preset pressure threshold, the first relay controls the second relay to disconnect and the third relay to connect, so that the third relay controls the connection and disconnection of the first circuit, the second circuit and the third circuit.

4. The method as described in request item 1, wherein, The second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts. When the pressure value exceeds a preset pressure threshold, and it is necessary to open the second gas corresponding valve and the third gas corresponding valve, controlling the first circuit to disconnect and controlling the second circuit and the third circuit to connect, so that the first gas corresponding valve closes and the second gas corresponding valve and the third gas corresponding valve open, includes: controlling the second pair of normally closed contacts to disconnect via the second relay, controlling the first circuit to disconnect, and controlling the second pair of normally open contacts and the third pair of normally open contacts to close via the second relay, respectively controlling the second circuit and the third circuit to connect, so that the first gas corresponding valve closes and the second gas corresponding valve and the third gas corresponding valve open.

5. The method as described in request item 4, wherein, When it is necessary to open the valve corresponding to the first gas, the system controls the first circuit to be connected and the second and third circuits to be disconnected, so that the valve corresponding to the first gas is opened and the valves corresponding to the second and third gas are closed. This includes: controlling the second pair of normally closed contacts to remain closed by the second relay, controlling the first circuit to be connected, and controlling the second pair of normally open contacts and the third pair of normally open contacts to remain open by the second relay, thereby controlling the second and third circuits to be disconnected, so that the valve corresponding to the first gas is opened and the valves corresponding to the second and third gas are closed.

6. A method for safety control of special gases, wherein, An application is made in a semiconductor manufacturing process apparatus, the apparatus comprising: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on / off state of a first gas corresponding valve, a second circuit for controlling the on / off state of a second gas corresponding valve, and a third circuit for controlling the on / off state of a third gas corresponding valve, the method comprising: acquiring a pressure value of the process chamber; when the pressure value is greater than a preset pressure threshold, indicating that a first gas and a second gas and / or a third gas are likely to undergo a chemical reaction in the process chamber to generate byproducts; when it is determined that the second gas corresponding valve and the third gas corresponding valve need to be opened, controlling the first circuit to be disconnected and controlling the second circuit and the third circuit to be connected, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened; when it is necessary to open the first gas corresponding valve, controlling the first circuit to be connected and controlling the second circuit and the third circuit to be disconnected, so that the first gas corresponding valve is opened and the second gas corresponding valve and the third gas corresponding valve are closed. The control circuit further includes: a first relay, a second relay, and a third relay. The first relay includes a first pair of normally closed contacts and a first pair of normally open contacts. When the pressure value is less than or equal to the preset pressure threshold, the first relay controls the first pair of normally closed contacts to open, controls the second relay to disconnect, and controls the first pair of normally open contacts to close, controls the third relay to connect, so that the third relay controls the on / off state of the first circuit, the second circuit, and the third circuit. The first gas, the second gas, and the third gas each include one of H2, WF6, 5%B2H6 / 95%N2, NF3, and SiH4.

7. The method as described in claim 6, wherein, The third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts. When the pressure value is less than or equal to the preset pressure threshold, controlling the first circuit, the second circuit, and the third circuit to connect, thereby opening the first gas-corresponding valve, the second gas-corresponding valve, and the third gas-corresponding valve, includes: controlling the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close via the third relay, thereby connecting the first circuit, the second circuit, and the third circuit, thereby opening the first gas-corresponding valve, the second gas-corresponding valve, and the third gas-corresponding valve.

8. A method for safety control of special gases, wherein, An application is made in a semiconductor manufacturing process apparatus, the apparatus comprising: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on / off state of a first gas corresponding valve, a second circuit for controlling the on / off state of a second gas corresponding valve, and a third circuit for controlling the on / off state of a third gas corresponding valve, the method comprising: acquiring a pressure value of the process chamber; when the pressure value is greater than a preset pressure threshold, indicating that a first gas and a second gas and / or a third gas are likely to undergo a chemical reaction in the process chamber to generate byproducts; when it is determined that the second gas corresponding valve and the third gas corresponding valve need to be opened, controlling the first circuit to be disconnected and controlling the second circuit and the third circuit to be connected, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened; when it is necessary to open the first gas corresponding valve, controlling the first circuit to be connected and controlling the second circuit and the third circuit to be disconnected, so that the first gas corresponding valve is opened and the second gas corresponding valve and the third gas corresponding valve are closed. The first gas is NF3, the second gas is H2, and the third gas is SiH4.

9. A control circuit applied to a semiconductor manufacturing equipment, wherein, The control circuit includes: a first circuit for controlling the on / off state of a valve corresponding to a first gas, a second circuit for controlling the on / off state of a valve corresponding to a second gas, and a third circuit for controlling the on / off state of a valve corresponding to a third gas; and a first relay, a second relay, and a third relay. The first relay includes a first pair of normally closed contacts and a first pair of normally open contacts. When the pressure value is greater than the preset pressure threshold, it indicates that the first gas and the second gas and / or the third gas are likely to undergo a chemical reaction in the process chamber to generate byproducts. The first relay is used to control the second relay to be turned on and the third relay to be turned off, so that the second relay controls the on / off state of the first circuit, the second circuit, and the third circuit. When the pressure value is less than or equal to the preset pressure threshold, the first relay is also used to control the second relay to be turned off and the third relay to be turned on, so that the third relay controls the on / off state of the first circuit, the second circuit, and the third circuit. When the pressure value exceeds the preset pressure threshold, the first relay controls the first pair of normally open contacts to remain open, thereby controlling the third relay to open; and the first relay controls the first pair of normally closed contacts to remain closed, thereby controlling the second relay to close, so that the second relay controls the on / off state of the first circuit, the second circuit, and the third circuit; wherein the first gas, the second gas, and the third gas each include one of H2, WF6, 5%B2H6 / 95%N2, NF3, and SiH4.

10. The control circuit as claimed in claim 9, wherein the second relay includes a second pair of normally closed contacts, a second pair of normally open contacts, and a third pair of normally open contacts; the second relay is used to control the second pair of normally closed contacts to open, thereby controlling the first circuit to disconnect; the second relay is also used to control the second pair of normally open contacts and the third pair of normally open contacts to close, thereby controlling the second circuit and the third circuit to connect, respectively, so that the first gas corresponding valve is closed and the second gas corresponding valve and the third gas corresponding valve are opened; and / or, the third relay includes a fourth pair of normally open contacts, a fifth pair of normally open contacts, and a sixth pair of normally open contacts; the third relay is used to control the fourth pair of normally open contacts, the fifth pair of normally open contacts, and the sixth pair of normally open contacts to close, thereby controlling the first circuit, the second circuit, and the third circuit to connect, thereby causing the first gas corresponding valve, the second gas corresponding valve, and the third gas corresponding valve to open.

11. A semiconductor manufacturing apparatus, wherein, The semiconductor manufacturing apparatus includes: a process chamber and a control circuit; the control circuit includes a first circuit for controlling the on / off state of a first gas corresponding valve, a second circuit for controlling the on / off state of a second gas corresponding valve, and a third circuit for controlling the on / off state of a third gas corresponding valve; the semiconductor manufacturing apparatus further includes: A controller includes a first relay, a second relay, and a third relay. The first relay includes a first pair of normally closed contacts and a first pair of normally open contacts. The controller is used to acquire the pressure value of the process chamber. When the pressure value is greater than a preset pressure threshold, it indicates that a first gas and a second gas and / or a third gas are likely to undergo a chemical reaction in the process chamber to generate byproducts. When it is determined that the valves corresponding to the second gas and the third gas need to be opened, the controller controls the first circuit to be disconnected and controls the second and third circuits to be connected, so that the valve corresponding to the first gas is closed and the valves corresponding to the second and third gases are opened. When it is necessary to open the valve corresponding to the first gas, the controller controls the first circuit to be connected and controls the second and third circuits to be disconnected, so that the valve corresponding to the first gas is opened and the valves corresponding to the second and third gases are closed. When the pressure value exceeds the preset pressure threshold, the first relay controls the first pair of normally open contacts to remain open, thereby controlling the third relay to open; and the first relay controls the first pair of normally closed contacts to remain closed, thereby controlling the second relay to close, so that the second relay controls the on / off state of the first circuit, the second circuit, and the third circuit; wherein the first gas, the second gas, and the third gas each include one of H2, WF6, 5%B2H6 / 95%N2, NF3, and SiH4.

12. A special gas safety control device, wherein, For controlling control circuitry in a semiconductor manufacturing apparatus, the special gas safety control device includes at least one processor and at least one memory, the memory storing at least one program; when the at least one program is executed by the at least one processor, the at least one processor performs the method as described in any one of claims 1, 6, or 8.

13. A computer-readable storage medium for a semiconductor processing apparatus, wherein a computer program is stored thereon, When the program is executed by the processor, it implements the method described in any of requests 1, 6, or 8.

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