Check the socket

Abstract

This invention provides a test socket with high contact reliability. The test socket includes first to fourth probes, each having a first contact and a second contact at both ends in a first direction. In a second direction intersecting the first direction, the first and second probes are arranged facing each other, and the third and fourth probes are arranged facing each other. In a third direction intersecting the first and second directions, the first and third probes are arranged in a specific configuration, and the second and fourth probes are also arranged in a specific configuration. Each first contact has an inclined surface capable of contacting an object. The second contact of the first probe is located on one side of the second direction relative to the second contact of the third probe. The second contact of the second probe is also located on one side of the second direction relative to the second contact of the fourth probe.

Description

Inspection Socket The present disclosure relates to an inspection socket. In Patent Document 1, an inspection jig used for continuity inspection, characteristic measurement, etc. of an electronic module is described. [Prior Art Documents] [Patent Documents] [Patent Document 1] Japanese Patent Application Laid-Open No. 2022-135106 [Problems to be Solved by the Invention] An inspection socket including the inspection jig of Patent Document 1 has a plurality of probes. Each probe is arranged at intervals and accommodated in a housing in a state of being electrically independent of each other. However, when the intervals between the terminals in the object to be contacted (e.g., a connector) of the inspection socket are narrow, it is necessary to reduce the intervals between the probes that contact the respective terminals. When the intervals between the probes are narrow, contact failure may sometimes occur during inspection. An object of the present disclosure is to provide an inspection socket with high contact reliability. [Means for Solving the Problems] An inspection socket according to an aspect of the present disclosure includes: a housing; and a first probe, a second probe, a third probe, and a fourth probe, each having a first contact point provided at one end in a first direction and a second contact point provided at the other end in the first direction, and each supported by the housing; the first probe and the second probe are arranged facing each other at intervals in a second direction intersecting the first direction, the third probe and the fourth probe are arranged facing each other at intervals in the second direction, in a third direction intersecting the first direction and the second direction, the first probe and the third probe are arranged, in the third direction, the second probe and the fourth probe are arranged, the first contact points of each of the first probe, the second probe, the third probe, and the fourth probe have inclined surfaces capable of contacting an object to be contacted, the second contact point of the first probe is located on one side of the second direction with respect to the second contact point of the third probe, and the second contact point of the second probe is located on one side of the second direction with respect to the second contact point of the fourth probe. [Effects of the Invention] According to the present disclosure, an inspection socket with high contact reliability can be provided. Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. The following description is essentially only an example and is not intended to limit the present disclosure, the application of the present disclosure, or the use of the present disclosure. The drawings are schematic, and the ratios of the respective dimensions are not necessarily the same as the actual situation. In addition, in the following description, terms indicating a specific direction or position (for example, terms including "upper", "lower", "right", "left", "front", and "rear") are used as needed. However, the use of terms indicating a specific direction or position is for facilitating the understanding of the present disclosure with reference to the drawings, and does not limit the technical scope of the present disclosure by the meanings of these terms. As shown in FIGS. 1 and 2, an inspection socket 1 according to an embodiment of the present disclosure includes a housing 2, a housing 3, a housing 4, a housing 5, a housing 6, and a plurality of plate-shaped probes 7 housed inside the housing 2, the housing 3, the housing 4, the housing 5, and the housing 6. As shown in FIG. 2, the housing 2 has through holes 2A and 2B that penetrate the housing 2 in the vertical direction (for example, the Z direction shown in each figure). The vertical direction and the Z direction are an example of the first direction. In the present embodiment, in the vertical direction, the side where the housing 2 is located is the upper side, and the side where the housing 6 is located is the lower side. The housing 3 has a base portion 31 and a protruding portion 32 that protrudes upward from the base portion 31. Here, the so-called "protruding upward" means "protruding in the direction from the housing 6 toward the housing 2 along the first direction". The protruding portion 32 has a concave portion 3A that is recessed downward. Here, the so-called "recessed downward" means "recessed in the direction from the housing 2 toward the housing 6 along the first direction". The protruding portion 32 has a plurality of through holes 3B that penetrate the protruding portion 32 in the vertical direction on the bottom surface constituting the concave portion 3A. Each of the plurality of through holes 3B corresponds to each of the plurality of probes 7. The housing 4 has through holes 4A and 4B that penetrate the housing 4 in the vertical direction. The housing 5 holds the plurality of probes 7 in an array as shown in FIG. 2. The housing 6 has: a pin 61 that protrudes upward; and a concave portion 6A that is recessed downward from the upper surface (in other words, the surface of the outer surface of the housing 6 facing the housing 4). The housing 6 has a plurality of through holes 6B that penetrate the housing 6 in the vertical direction on the bottom surface constituting the concave portion 6A. Each of the plurality of through holes 6B corresponds to each of the plurality of probes 7. The lower portion of the housing 5 that holds the probe 7 is housed in the concave portion 6A of the housing 6. The lower portion of the housing 5 is the portion of the housing 5 that is closer to the housing 6 in the first direction. At this time, the second contact points 121, 122, 752, and 762 of each probe 7 (refer to FIG. 3) are exposed to the outside of the inspection socket 1 through the through holes 6B. The housing 2, the housing 3, and the housing 4 are assembled above the housing 6 that houses the housing 5. The housing 2, the housing 3, and the housing 4 are assembled to the housing 6 from below in the order of the housing 4, the housing 3, and the housing 2. The pin 61 of the housing 6 penetrates through the through hole 4B of the housing 4 and the through hole 2B of the housing 2. Thereby, the housing 2 and the housing 4 are positioned with respect to the housing 6. The protruding portion 32 of the housing 3 penetrates through the through hole 2A of the housing 2 from below. Thereby, the protruding portion 32 is exposed to the outside of the inspection socket 1, and the housing 3 is positioned with respect to the housing 2. The first connection portion 11 (refer to FIGS. 5 and 6) of each probe 7 penetrates through the through hole 4A of the housing 4 from below. The first contact points 111, the first contact points 751, and the first contact points 761 (refer to FIG. 3) of each probe 7 are exposed to the outside of the inspection socket 1 through the through hole 3B of the housing 3. The inspection socket 1 is connected to an inspection device (not shown), and the contact object 8 (refer to FIGS. 4, 5, and 6) is connected to the inspection socket 1. In the connected state, the continuity between the contact object 8 and the inspection device is inspected. The inspection socket 1 is placed on the substrate included in the inspection device. Thereby, the second contact points 121, the second contact points 122, the second contact points 752, and the second contact points 762 (refer to FIG. 3) of each probe 7 exposed to the outside of the inspection socket 1 through the through hole 6B are electrically connected to the conductive pads formed on the substrate. The contact object 8 shown in FIGS. 4, 5, and 6 is inserted into the recess 3A of the housing 3. As shown in FIGS. 5 and 6, the contact object 8 includes a plurality of terminals 81. When the contact object 8 is inserted into the recess 3A of the housing 3, each terminal 81 is electrically connected to the first contact points 111, the first contact points 751, and the first contact points 761 (refer to FIG. 3) of each probe 7 exposed to the outside of the inspection socket 1 through the through hole 3B. As shown in FIGS. 3 and 4, the probe 7 includes a first probe 71, a second probe 72, a third probe 73, a fourth probe 74, a fifth probe 75, and a sixth probe 76. At least one of each of the first probe 71, the second probe 72, the third probe 73, the fourth probe 74, the fifth probe 75, and the sixth probe 76 is provided. In the present embodiment, the probe 7 has thirteen first probes 71, thirteen second probes 72, thirteen third probes 73, thirteen fourth probes 74, two fifth probes 75, and two sixth probes 76. In the present embodiment, the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 are signal terminals, and the fifth probe 75 and the sixth probe 76 are power supply terminals or ground terminals. However, the type of each probe is not limited to this. Each first probe 71, each second probe 72, each third probe 73, each fourth probe 74, each fifth probe 75, and each sixth probe 76 are arranged at intervals. That is, each first probe 71, each second probe 72, each third probe 73, each fourth probe 74, each fifth probe 75, and each sixth probe 76 are electrically insulated from each other. The first probe 71, the third probe 73, and the fifth probe 75 are arranged at intervals along the front-rear direction (for example, the Y direction shown in each figure) that intersects (orthogonal in this embodiment) the up-down direction of the inspection socket 1. The front-rear direction and the Y direction are the plate thickness direction of the probe 7 and are an example of the third direction. The first probe 71 and the third probe 73 are alternately arranged in the front-rear direction. Two fifth probes 75 sandwich thirteen first probes 71 and thirteen third probes 73 in the front-rear direction. That is, the two fifth probes 75 are arranged at the foremost and rearmost positions among the first probe 71, the third probe 73, and the fifth probe 75. The second probe 72, the fourth probe 74, and the sixth probe 76 are arranged at intervals along the front-rear direction of the inspection socket 1. The second probe 72 and the fourth probe 74 are alternately arranged in the front-rear direction. Two sixth probes 76 sandwich thirteen second probes 72 and thirteen fourth probes 74 in the front-rear direction. That is, the two sixth probes 76 are arranged at the foremost and rearmost positions among the second probe 72, the fourth probe 74, and the sixth probe 76. As shown in FIG. 5, each first probe 71 and each second probe 72 are arranged facing each other at intervals along the left-right direction (for example, the X direction shown in each figure) that intersects (orthogonal to both the up-down direction and the front-rear direction in this embodiment) both the up-down direction and the front-rear direction. The left-right direction and the X direction are an example of the second direction. As shown in FIG. 6, each third probe 73 and each fourth probe 74 are arranged facing each other at intervals in the left-right direction. In this embodiment, the first probe 71 and the fourth probe 74 have the same structure (in other words, the same size and the same shape). The fourth probe 74 is a member arranged in the opposite direction to the first probe 71 in the left-right direction. In this embodiment, the second probe 72 and the third probe 73 have the same structure (in other words, the same size and the same shape). The third probe 73 is a member arranged in the opposite direction to the second probe 72 in the left-right direction. Based on the above, in this embodiment, the inspection socket 1 includes two types of probes 7 instead of four types of probes 7 with different structures. One of the two types of probes 7 is the probe 71 and the probe 74, and the other of the two types of probes 7 is the probe 72 and the probe 73. As shown in FIG. 3, each fifth probe 75 and each sixth probe 76 are arranged facing each other at intervals in the left-right direction. In this embodiment, the fifth probe 75 and the sixth probe 76 have the same structure (in other words, the same size and the same shape). In this embodiment, the fifth probe 75 and the sixth probe 76 are arranged in opposite directions in the left - right direction. The fifth probe 75 and the sixth probe 76 are arranged to be line - symmetric with respect to an imaginary line L1 extending in the up - down direction between the fifth probe 75 and the sixth probe 76. Hereinafter, the structure of each probe 7 will be described. In this embodiment, each of the first probes 71, the second probes 72, the third probes 73, the fourth probes 74, the probes 75, and the probes 76 has substantially the same structure. Therefore, the structure of the first probe 71 will be described below, and the description of the structures of other probes will be omitted in principle. Furthermore, in each figure, the same symbols are used to denote the common points of the structures. Among them, the structures different from the first probe 71 in other probes will be described. In the following description, the "left side" and "right side" in the left - right direction have the following meanings. That is, in the first probe 71 and the third probe 73, in the left - right direction, the side of the bending portion 133 is the "left side", and the side opposite to the bending portion 133 is the "right side". On the other hand, in the second probe 72 and the fourth probe 74, in the left - right direction, the side opposite to the bending portion 133 is the "left side", and the side of the bending portion 133 is the "right side". As shown in FIG. 5, the first probe 71 includes a first connection portion 11, a second connection portion 12, and an elastic portion 13. The first connection portion 11 is connected to one of the upper and lower ends of the elastic portion 13 in the up - down direction (in this embodiment, it is the upper end portion 13A of the elastic portion 13). In other words, the lower end portion of the first connection portion 11 (in this embodiment, the end portion closer to the elastic portion 13 in the up - down direction) is connected to the upper end portion of the elastic portion 13. The second connection portion 12 is connected to the other end of the upper and lower ends of the elastic portion 13 in the up - down direction (in this embodiment, it is the lower end portion 13B of the elastic portion 13). In other words, the upper end portion of the second connection portion 12 (in this embodiment, the end portion closer to the elastic portion 13 in the up - down direction) is connected to the lower end portion of the elastic portion 13. The first connection portion 11 includes a first contact point 111, and the first contact point 111 is provided at the upper end portion of the first connection portion 11 (in this embodiment, the end portion farther from the second connection portion 12 in the up - down direction). The second connection portion 12 includes a second contact point 121, and the second contact point 121 is provided at the lower end portion of the second connection portion 12 (in this embodiment, the end portion farther from the first connection portion 11 in the up - down direction). That is, the first probe 71 includes: a first contact point 111 provided at one end in the up - down direction (in this embodiment, the upper end portion); and a second contact point 121 provided at the other end in the up - down direction (in this embodiment, the lower end portion). The elastic part 13 has a first part 131, a second part 132, and a bending part 133. The first part 131 extends in the left - right direction from the first end 13A. The second part 132 extends in the left - right direction from the second end 13B. The second part 132 extends to the same side as the first part 131 in the left - right direction. In the example shown in FIG. 5, the first part 131 extends leftward from the first end 13A, and the second part 132 extends leftward from the second end 13B. The bending part 133 is in a bent shape. The bending part 133 connects the end (for example, the left end in FIG. 5) of the two ends of the first part 131 in the left - right direction that is far from the first end 13A and the end (the left end in FIG. 5) of the two ends of the second part 132 in the left - right direction that is far from the second end 13B. The first end 13A and the second end 13B, which are the two ends of the elastic part 13, are connected to the first connecting part 11 and the second connecting part 12 from the same side (the left side in this embodiment) in the left - right direction. That is, the elastic part 13 is located on the same side (the left side in this embodiment) as one side surface (the left surface in this embodiment) of the first connecting part 11 in the left - right direction. The length L2 in the up - down direction between the end 11A of the first connecting part 11 to which the first end 13A is connected and the end 12A of the second connecting part 12 to which the second end 13B is connected is longer than the inner diameter R1 of the bend of the elastic part 13. In this embodiment, the end 11A is the lower end of the first connecting part 11, and the end 12A is the upper end of the second connecting part 12. Additionally, in this embodiment, the inner diameter R1 of the bend of the elastic part 13 is the inner diameter R1 of the bending part 133. The elastic part 13 includes a plurality of long plate parts 134 (three long plate parts 134A, 134B, and 134C in this embodiment). Each long plate part 134A, 134B, 134C extends throughout the first part 131, the second part 132, and the bending part 133. Each long plate part 134A, 134B, 134C extends along the length direction of the elastic part 13. The length direction of the elastic part 13 is the direction in which the elastic part 13 extends from the first part 131 through the bending part 133 to the second part 132. That is, the length direction of the elastic part 13 is the left - right direction in the first part 131 and the second part 132, and is the direction along the bent shape in the bending part 133. Each long plate part 134A, 134B, 134C is arranged at intervals along the width direction of the elastic part 13. The width direction of the elastic part 13 is the direction orthogonal to both the front - back direction (the plate thickness direction of the probe 7 in this embodiment) and the length direction of the elastic part 13. The more the plurality of long plate portions 134 are located on the outer side of the bent shape of the bent portion 133, the longer they are in the width direction. In the present embodiment, the long plate portion 134A is longer than the long plate portion 134B in the width direction, and the long plate portion 134B is longer than the long plate portion 134C in the width direction. The second portion 132 extends in the plane of FIG. 5 in a manner that trends upward as it moves toward the right. That is, the second portion 132 extends in a manner that approaches the first end 13A in the vertical direction as it approaches the second end 13B in the left-right direction. That is, the surface constituting the inner edge and the surface constituting the outer edge in the radial direction of the second portion 132 are inclined surfaces that are inclined with respect to the left-right direction. The upper edge portion 12B of the second connecting portion 12 extends in the plane of FIG. 5 in a manner that trends downward as it moves toward the right. That is, the edge portion 12B on the first connecting portion 11 side (the upper side in the present embodiment) in the vertical direction of the second connecting portion 12 extends in a manner that moves away from the first connecting portion 11 in the vertical direction as it moves away from the elastic portion 13 in the left-right direction. That is, the edge portion 12B is an inclined surface that is inclined with respect to the left-right direction. Further, the edge portion 12B may extend along the left-right direction. Further, as shown in FIG. 3, the edge portions 12B of the fifth probe 75 and the sixth probe 76 extend along the left-right direction. As shown in FIG. 5, the first contact point 111 is in the shape of a protrusion and protrudes upward from the upper end portion of the first connecting portion 11 (in the present embodiment, in the direction away from the second connecting portion 12 in the first direction). The first contact point 111 includes an inclined surface 111A and a protrusion 111B. The inclined surface 111A is located on one side of the first contact point 111 in the left-right direction. The inclined surface 111A is inclined in the vertical direction in a manner that moves away from the center line C as it moves away from the elastic portion 13. The center line C is a line that passes through the center of the first connecting portion 11 in the left-right direction and extends in the vertical direction. The protrusion 111B protrudes upward (in the present embodiment, in the direction away from the second connecting portion 12 in the first direction). The protrusion 111B faces the inclined surface 111A with a gap in the left-right direction. The protruding front end (the upper end in the present embodiment) of the protrusion 111B is located below the upper end of the inclined surface 111A and above the lower end of the inclined surface 111A. That is, in the first direction, the protruding front end of the protrusion 111B is located between the end on the side of the inclined surface 111A that is away from the elastic portion 13 and the end on the side of the inclined surface 111A that is close to the elastic portion 13. The terminal 81 of the contact object 8 can contact the inclined surface 111A and the protrusion 111B. When the contact object 8 is inserted into the recess 3A of the housing 3, the terminal 81 has a U-shaped portion when observed from the side in the front-rear direction. That is, the terminal 81 has a downwardly convex curved portion 81A at the front end. The inclined surface 111A contacts the curved portion 81A of the terminal 81 from one side in the left-right direction. In the present embodiment, the first contact point 111 has only one inclined surface that can contact the contact object 8. That is, in the present embodiment, in the first contact point 111, the inclined surface that can contact the contact object 8 is only the inclined surface 111A. The second contact point 121 is in a protrusion shape and protrudes downward from the lower end of the second connection portion 12 (in the present embodiment, in the direction away from the first connection portion 11 in the first direction). The second contact point 121 has a notch 121C. The notch 121C is notched upward from the lower surface of the second contact point 121 (in the present embodiment, on the side of the first connection portion 11 in the first direction). The second connection portion 12 has a notch 12C. The notch 12C is provided between the second contact point 121 and the second portion 132 of the elastic portion 13. The notch 12C is notched along the left-right direction from the end in the left-right direction of the second connection portion 12. The first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 have differences in terms of arrangement orientation, configuration, etc. The following will be described in detail. As shown in FIG. 5, the first probe 71 and the second probe 72 are arranged facing each other in the left-right direction with the elastic portion 13 facing the outside in the left-right direction. As shown in FIG. 6, the third probe 73 and the fourth probe 74 are arranged facing each other in the left-right direction with the elastic portion 13 facing the outside in the left-right direction. As shown in FIGS. 5 and 6, the inclined surfaces 111A of the first probe 71 and the fourth probe 74 are located on the side of the curved portion 133 of the elastic portion 13 of the first contact point 111 in the left-right direction. The inclined surfaces 111A of the first probe 71 and the fourth probe 74 face the side opposite to the curved portion 133 of the elastic portion 13 in the left-right direction. The protrusions 111B of the first probe 71 and the fourth probe 74 are located on the side opposite to the inclined surfaces 111A with respect to the curved portion 133 of the elastic portion 13 in the left-right direction. The inclined surface 111A of the first probe 71 is located on the left side of the first contact point 111 on the plane of FIG. 5, extends in a manner that slopes downward as it goes to the right, and faces右上. The protrusion 111B of the first probe 71 is located on the right side of the inclined surface 111A of the first probe 71 on the plane of FIG. 5. The inclined surface 111A of the fourth probe 74 is located on the right side of the first contact point 111 on the plane of FIG. 6, extends in a manner that slopes downward as it goes to the left, and faces左上. The protrusion 111B of the fourth probe 74 is located on the left side of the inclined surface 111A of the fourth probe 74 on the plane of FIG. 6. As shown in FIGS. 5 and 6, the inclined surfaces 111A of the second probe 72 and the third probe 73 are located on the side opposite to the elastic portion 13 of the first contact point 111 in the left-right direction. The inclined surfaces 111A of the second probe 72 and the third probe 73 face the bending portion 133 side of the elastic portion 13 in the left-right direction. The protrusions 111B of the second probe 72 and the third probe 73 are located on the elastic portion 13 side with respect to the inclined surfaces 111A in the left-right direction. The inclined surface 111A of the second probe 72 is located on the left side of the first contact point 111 on the plane of FIG. 5, extends in a manner that slopes downward as it goes to the right, and faces右上. The protrusion 111B of the second probe 72 is located on the right side of the inclined surface 111A of the second probe 72 on the plane of FIG. 5. The inclined surface 111A of the third probe 73 is located on the right side of the first contact point 111 on the plane of FIG. 6, extends in a manner that slopes downward as it goes to the left, and faces左上. The protrusion 111B of the third probe 73 is located on the left side of the inclined surface 111A of the third probe 73 on the plane of FIG. 6. Based on the above, as shown in FIG. 5, the inclined surfaces 111A of the first contact point 111 of the first probe 71 and the inclined surfaces 111A of the first contact point 111 of the second probe 72 face the same side (the right side in this embodiment) in the left-right direction. As shown in FIG. 6, the inclined surfaces 111A of the first contact point 111 of the third probe 73 and the inclined surfaces 111A of the first contact point 111 of the fourth probe 74 face the same side (the left side in this embodiment) in the left-right direction. In addition, as shown in FIGS. 5 and 6, the inclined surface 111A (refer to FIG. 5) of the first contact point 111 of the first probe 71 and the inclined surface 111A (refer to FIG. 6) of the first contact point 111 of the third probe 73 face opposite sides in the left-right direction. The inclined surface 111A (refer to FIG. 5) of the first contact point 111 of the second probe 72 and the inclined surface 111A (refer to FIG. 6) of the first contact point 111 of the fourth probe 74 face opposite sides in the left-right direction. In addition, when observed in the front-rear direction, the inclined surfaces 111A of the first contact points 111 of the first probe 71 and the inclined surfaces 111A of the first contact points 111 of the third probe 73 face each other in the left-right direction. When observed in the front-rear direction, the inclined surfaces 111A of the first contact points 111 of the second probe 72 and the inclined surfaces 111A of the first contact points 111 of the fourth probe 74 face each other in the left-right direction. The first probe 71 and the fourth probe 74 include second contact points 121 and cutouts 121C. The second probe 72 and the third probe 73 include second contact points 122 instead of the second contact points 121. The second contact points 122 do not include the cutouts 121C. The difference between the second contact points 122 and the second contact points 121 is that they do not have the cutouts 121C. In the first probe 71 and the fourth probe 74, when observed in the up-down direction, the second contact points 121 are located at positions deviated from the first contact points 111. In the first probe 71 and the fourth probe 74, when observed in the up-down direction, the second contact points 121 are located at positions deviated from the inclined surfaces 111A. In the first probe 71 and the fourth probe 74, when observed in the up-down direction, the portion of the second connecting portion 12 that includes the second contact points 121 overlaps with the elastic portion 13. That is, in the first probe 71 and the fourth probe 74, in the left-right direction, at least a part of the portion of the second connecting portion 12 that includes the second contact points 121 and at least a part of the elastic portion 13 are at the same position. In addition, in the first probe 71 and the fourth probe 74, the elastic portion 13 and the second contact points 121 are on the same side in the left-right direction with respect to the first connecting portion 11. In the second probe 72 and the third probe 73, when observed in the up-down direction, the second contact points 122 and the first contact points 111 are located at positions where at least a part of them overlaps with each other. That is, in the second probe 72 and the third probe 73, in the left-right direction, at least a part of the second contact points 122 and at least a part of the first contact points 111 are at the same position. In addition, in the second probe 72 and the third probe 73, the first contact points 111 and the second contact points 122 are on the same side in the left-right direction with respect to the elastic portion 13. In the second probe 72 and the third probe 73, when observed in the up-down direction, the second contact points 122 and the inclined surfaces 111A are located at positions where at least a part of them overlaps with each other. That is, in the second probe 72 and the third probe 73, in the left-right direction, at least a part of the second contact points 122 and at least a part of the inclined surfaces 111A are at the same position. In addition, in the second probe 72 and the third probe 73, the inclined surfaces 111A and the second contact points 122 are on the same side in the left-right direction with respect to the elastic portion 13. As shown in FIG. 5, in the first probe 71 and the second probe 72, the inclined surface 111A is provided on the left part of the first contact point 111. As shown in FIG. 6, in the third probe 73 and the fourth probe 74, the inclined surface 111A is provided on the right part of the first contact point 111. The left side in FIGS. 5 and 6 (and FIGS. 7 to 10 described later) is an example of one side in the left-right direction, and the right side in FIGS. 5 and 6 (and FIGS. 7 to 10 described later) is an example of the other side in the left-right direction. As shown in FIGS. 5 and 6, the second contact point 121 of the first probe 71 is located on the left with respect to the second contact point 122 of the third probe 73. That is, when observed along the front-rear direction, the second contact point 121 of the first probe 71 does not overlap with the second contact point 122 of the third probe 73. That is, in the left-right direction, the second contact point 121 of the first probe 71 is located at a position different from that of the second contact point 122 of the third probe 73. Furthermore, when observed along the front-rear direction, the second contact point 121 of the first probe 71 may only overlap with a part of the second contact point 122 of the third probe 73. That is, in the left-right direction, the second contact point 121 of the first probe 71 may also be at a position partially the same as that of the second contact point 122 of the third probe 73. The second contact point 122 of the second probe 72 is located on the left with respect to the second contact point 121 of the fourth probe 74. That is, when observed along the front-rear direction, the second contact point 122 of the second probe 72 does not overlap with the second contact point 121 of the fourth probe 74. That is, in the left-right direction, the second contact point 122 of the second probe 72 is located at a position different from that of the second contact point 121 of the fourth probe 74. Furthermore, when observed along the front-rear direction, the second contact point 122 of the second probe 72 may only overlap with a part of the second contact point 121 of the fourth probe 74. That is, in the left-right direction, the second contact point 122 of the second probe 72 may also be at a position partially the same as that of the second contact point 121 of the fourth probe 74. As described above, in the first probe 71 and the second probe 72, the inclined surface 111A is provided on the left part of the first contact point 111. In addition, the second contact point 121 of the first probe 71 is located on the left with respect to the second contact point 122 of the third probe 73, and the second contact point 122 of the second probe 72 is located on the left with respect to the second contact point 121 of the fourth probe 74. That is, the inclined surface 111A of the first contact point 111 of the first probe 71 is arranged in the left-right direction on the left side of the first contact point 111 of the first probe 71, which is the side where the second contact point 121 of the first probe 71 is arranged with respect to the second contact point 122 of the third probe 73. In addition, the inclined surface 111A of the first contact point 111 of the second probe 72 is arranged in the left-right direction on the left side of the first contact point 111 of the second probe 72, which is the side where the second contact point 122 of the second probe 72 is arranged with respect to the second contact point 121 of the fourth probe 74. As described above, in the third probe 73 and the fourth probe 74, the inclined surface 111A is provided on the right part of the first contact point 111. In addition, the second contact point 122 of the third probe 73 is located on the right side with respect to the second contact point 121 of the first probe 71, and the second contact point 121 of the fourth probe 74 is located on the right side with respect to the second contact point 122 of the second probe 72. That is, the inclined surface 111A of the first contact point 111 of the third probe 73 is arranged in the left-right direction on the right side of the first contact point 111 of the third probe 73, which is the side where the second contact point 122 of the third probe 73 is arranged with respect to the second contact point 121 of the first probe 71. In addition, the inclined surface 111A of the first contact point 111 of the fourth probe 74 is arranged in the left-right direction on the right side of the first contact point 111 of the fourth probe 74, which is the side where the second contact point 121 of the fourth probe 74 is arranged with respect to the second contact point 122 of the second probe 72. The first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 can exhibit the following effects. In the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74, the length L2 in the up-down direction between the end portion 11A and the end portion 12A is longer than the inner diameter R1 of the bend of the elastic portion 13. The edge portion 12B on the first connection portion 11 side in the up-down direction of the second connection portion 12 extends in such a manner that it moves away from the first connection portion 11 in the up-down direction as it moves away from the elastic portion 13 in the left-right direction. Therefore, on the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74, the stroke in the up-down direction generated by the elastic portion 13 can be increased. As a result, the contact reliability of the probe 7 can be improved. The second portion 132 extends in such a manner that it approaches the first end portion 13A in the up-down direction as it approaches the second end portion 13B in the left-right direction. Therefore, in each probe 7, the portion occupied by the elastic portion 13 can be reduced. The elastic portion 13 includes a plurality of long plate portions 134. The plurality of long plate portions 134 are longer in the width direction the more they are located on the outer side of the bent shape of the bent portion 133. Therefore, the elastic portion 13 can be easily bent. The first contact point 111 has an inclined surface 111A that can contact the object to be contacted 8. For example, when the terminal 81 of the object to be contacted 8 has a bent portion 81A at the front end, the inclined surface 111A contacts the bent portion 81A of the terminal 81 from one side in the left-right direction. When gold plating is applied only to one side of the bent portion 81A of the terminal 81 and tin plating is applied to the portions other than the one side, the inclined surface 111A can be made to contact the gold-plated portion. The first contact point 111 includes a protrusion 111B in addition to the inclined surface 111A. Therefore, the first contact point 111 can contact the object to be contacted 8 at multiple points. The first probe 71 and the fourth probe 74 can achieve the following effects. When observed in the vertical direction, the second contact points 121 of the first probe 71 and the fourth probe 74 are located at positions offset from the inclined surface 111A. Therefore, in a structure where the first probe 71 and the third probe 73 are arranged in the front-rear direction, the positions of the second contact point 121 of the first probe 71 and the second contact point 122 of the third probe 73 in the left-right direction can be made different. Similarly, in a structure where the fourth probe 74 and the second probe 72 are arranged in the front-rear direction, the positions of the second contact point 121 of the fourth probe 74 and the second contact point 122 of the second probe 72 in the left-right direction can be made different. The second connecting portions 12 of the first probe 71 and the fourth probe 74 have cutouts 12C. Thereby, the second contact point 121 can be bent in the vertical direction. The second probe 72 and the third probe 73 can achieve the following effects. When observed in the vertical direction, at least a part of the second contact points 122 of the second probe 72 and the third probe 73 overlaps at least a part of the inclined surface 111A. Therefore, in a structure where the second probe 72 and the fourth probe 74 are arranged in the front-rear direction, the positions of the second contact point 122 of the second probe 72 and the second contact point 121 of the fourth probe 74 in the left-right direction can be made different. Similarly, in a structure where the third probe 73 and the first probe 71 are arranged in the front-rear direction, the positions of the second contact point 122 of the third probe 73 and the second contact point 121 of the first probe 71 in the left-right direction can be made different. The inspection socket 1 can achieve the following effects. The second contact point 121 of the first probe 71 is located to the left of the second contact point 122 of the third probe 73, and the second contact point 122 of the second probe 72 is located to the left of the second contact point 121 of the fourth probe 74. With such a structure, when the first probe 71 and the third probe 73 are alternately arranged in the front-rear direction, the distance between two adjacent second contact points in the front-rear direction can be increased. The following is a detailed description. Assuming that the positions of the second contact point 121 of the first probe 71 and the second contact point 122 of the third probe 73 are the same in the left-right direction, the second contact points 121 and 122 of the first probe 71 and the third probe 73 alternately arranged in the front-rear direction are adjacent to each other front and rear. On the other hand, when the second contact point 121 of the first probe 71 is located to the left of the second contact point 122 of the third probe 73, the second contact points 121 and 122 of the first probe 71 and the third probe 73 alternately arranged in the front-rear direction are not adjacent to each other front and rear. In this case, the second contact points 121 and 121 of the two first probes 71 are adjacent to each other front and rear. That is, corresponding to the third probe 73 not being located between the two first probes 71, the distance between two adjacent second contact points becomes larger. Similarly, when the second probe 72 and the fourth probe 74 are alternately arranged in the front-rear direction, the distance between two adjacent second contact points in the front-rear direction can also be increased. As a result, the contact reliability of the inspection socket 1 can be improved. When the intervals between the probes are narrow, the intervals between the pads on the substrate on which the inspection socket is mounted also become narrow, and there is a risk that it is difficult to form each pad. In the inspection socket 1 of the present embodiment, as described above, the distance between two adjacent second contact points in the front-rear direction can be increased. Thereby, the interval between the pads on the substrate can be increased, and thus each pad can be easily formed. When observing in the up-down direction, in the first probe 71 and the fourth probe 74, the first contact point 111 is located at a position deviated from the second contact point 121. When observing in the up-down direction, in the second probe 72 and the third probe 73, the first contact point 111 and the second contact point 122 are located at overlapping positions. Thereby, when the first probe 71 and the third probe 73 are alternately arranged in the front-rear direction, the positions of the second contact point 121 of the first probe 71 and the second contact point 122 of the third probe 73 in the left-right direction can be made different positions. In addition, when the second probe 72 and the fourth probe 74 are alternately arranged in the front-rear direction, the positions of the second contact point 122 of the second probe 72 and the second contact point 121 of the fourth probe 74 in the left-right direction can be made different positions. The third probe 73 has the same structure as the second probe 72 and is arranged in the opposite direction to the second probe 72 in the left-right direction. The fourth probe 74 has the same structure as the first probe 71 and is arranged in the opposite direction to the first probe 71 in the left-right direction. Thereby, the types of probes included in the inspection socket 1 can be reduced. The inclined surfaces 111A of the first probe 71 and the second probe 72 arranged to face each other in the left-right direction face the same side in the left-right direction. The inclined surfaces 111A of the third probe 73 and the fourth probe 74 arranged to face each other in the left-right direction face the same side in the left-right direction. Thereby, the inclined surfaces 111A of the two probes arranged to face each other in the left-right direction can contact the contact object 8 from the same side in the left-right direction. The inclined surfaces 111A of the first probe 71 and the third probe 73 arranged in a row in the front-back direction face opposite sides in the left-right direction. The inclined surfaces 111A of the second probe 72 and the fourth probe 74 arranged in a row in the front-back direction face opposite sides in the left-right direction. Thereby, the inclined surfaces 111A of the two probes arranged in a row in the front-back direction can contact the contact object 8 from opposite sides in the left-right direction. When observing in the front-back direction, the inclined surfaces 111A of the first probe 71 and the third probe 73 arranged in a row in the front-back direction face each other in the left-right direction. When observing in the front-back direction, the inclined surfaces 111A of the second probe 72 and the fourth probe 74 arranged in a row in the front-back direction face each other in the left-right direction. Thereby, the inclined surfaces 111A of the respective probes can contact the contact object 8 from the outer sides in the left-right direction. Each of the first contact points 111 of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 has only one inclined surface 111A that can contact the contact object 8. Assuming that there are two inclined surfaces that can contact the contact object 8 at the first contact point 111, when the contact object 8 is pressed against one of the inclined surfaces, the possibility that the contact object 8 deviates from the other inclined surface increases. However, according to the above structure, the possibility that the inclined surface 111A does not contact the desired position of the contact object 8 can be reduced. The inspection socket 1 can also be configured as follows. In the above embodiment, the structure of the inspection socket 1 including two types of probes 7 is described. One of the two types of probes 7 is the first probe 71 and the fourth probe 74 having the same structure as each other. The other of the two types of probes 7 is the second probe 72 and the third probe 73 having the same structure as each other. However, the types of probes 7 included in the inspection socket 1 are not limited to two types. FIG. 7 and FIG. 8 show the structure of the inspection socket 1 including four types of probes 7. In FIGS. 7 and 8, parts having the same structure as the probes shown in FIGS. 5 and 6 are labeled with the same symbols, and the description thereof is omitted. In the structures shown in FIGS. 7 and 8, each of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 includes a second contact point having a mutually different structure. That is, the first probe 71 includes a second contact point 123, the second probe 72 includes a second contact point 124, the third probe 73 includes a second contact point 125, and the fourth probe 74 includes a second contact point 126. The number of cuts included in the second contact point 123, the second contact point 124, the second contact point 125, and the second contact point 126 is different. The second contact point 123 has three cuts, the second contact point 124 has two cuts, the second contact point 125 has no cuts, and the second contact point 126 has one cut. In the above-described embodiment, the structure in which the first contact point 111 has only one inclined surface 111A capable of contacting the contact object 8 has been described. However, the first contact point 111 may also have a plurality of inclined surfaces. FIG. 9 and FIG. 10 show the structure in which the first contact point 111 has two inclined surfaces (the inclined surface 111A and the second inclined surface 111C). In FIGS. 9 and 10, parts having the same structure as the probes shown in FIGS. 5 and 6 are labeled with the same symbols, and the description thereof is omitted. In the structures shown in FIGS. 9 and 10, the first contact point 111 of each probe 7 has a second inclined surface 111C in addition to the inclined surface 111A. The second inclined surface 111C faces the inclined surface 111A in the left-right direction. The second inclined surface 111C is inclined in the opposite direction with respect to the inclined surface 111A facing in the left-right direction. For example, when the inclined surface 111A is inclined upward to the right, the second inclined surface 111C is inclined upward to the left. Similar to the inclined surface 111A, the second inclined surface 111C can contact the terminal 81 of the contact object 8. The inclined surface 111A contacts the bent portion of the terminal 81 from one side in the left-right direction. On the other hand, the second inclined surface 111C contacts the bent portion of the terminal 81 from the other side in the left-right direction. The shapes and structures of the housing 2, the housing 3, the housing 4, the housing 5, and the housing 6 can be arbitrarily changed according to the design of the inspection socket 1 or the like. For example, the shapes of the housing 2, the housing 3, the housing 4, the housing 5, and the housing 6 are not limited to a substantially quadrangular prism shape, and may be a substantially cylindrical shape, or may be a substantially polygonal shape other than the substantially quadrangular prism shape. The housing is not limited to the case of being composed of five members, and may be composed of one member, or may be composed of a plurality of members other than five. The number of probes 7 included in the inspection socket 1 can be arbitrarily changed according to the design of the inspection socket 1 or the like. For example, in the structures shown in FIGS. 3 and 4, the probe 7 includes thirteen first probes 71, thirteen second probes 72, thirteen third probes 73, thirteen fourth probes 74, two fifth probes 75, and two sixth probes 76. Here, a member formed by arranging a pair of probes 71 and 72 facing each other in the left-right direction and a pair of probes 73 and 74 facing each other in the left-right direction in the front-back direction is defined as one probe set. In this case, in the structures shown in FIGS. 3 and 4, thirteen probe sets are arranged in the front-back direction. By such an arrangement, when observed in the up-down direction, the structure is such that the positions of the adjacent second contact points 121 and 122 in the left-right direction are different. The number of probe sets arranged in the front-back direction may also be other than thirteen. As described above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. Furthermore, in the following description, reference numerals are added as an example for description. The inspection socket 1 according to the first aspect of the present disclosure includes: a housing 5; and first probes 71, second probes 72, third probes 73, and fourth probes 74, each having a first contact point 111 provided at one end in a first direction and second contact points 121 and 122 provided at the other end in the first direction, and each being supported by the housing 5; the first probe 71 and the second probe 72 are arranged to face each other with a space therebetween in a second direction intersecting the first direction, the third probe 73 and the fourth probe 74 are arranged to face each other with a space therebetween in the second direction, in a third direction intersecting the first direction and the second direction, the first probe 71 and the third probe 73 are arranged, in the third direction, the second probe 72 and the fourth probe 74 are arranged, the first contact point 111 of each of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 has an inclined surface 111A capable of contacting a contact object 8, the second contact point 121 of the first probe 71 is located on one side in the second direction with respect to the second contact point 122 of the third probe 73, and the second contact point 122 of the second probe 72 is located on one side in the second direction with respect to the second contact point 121 of the fourth probe 74. In the inspection socket 1 according to the second aspect of the present disclosure, like the inspection socket 1 of the first aspect, when observed along the first direction, the first contact point 111 of the first probe 71 is located at a position offset from the second contact point 121 of the first probe 71, when observed along the first direction, the first contact point 111 of the fourth probe 74 is located at a position offset from the second contact point 121 of the fourth probe 74, when observed along the first direction, the first contact point 111 of the second probe 72 and the second contact point 122 of the second probe 72 are located at overlapping positions, when observed along the first direction, the first contact point 111 of the third probe 73 and the second contact point 122 of the third probe 73 are located at overlapping positions. In the inspection socket 1 according to the third aspect of the present disclosure, like the inspection socket 1 of the first or second aspect, the third probe 73 and the second probe 72 have the same structure and are arranged in the second direction in a reverse configuration with respect to the second probe 72, the fourth probe 74 and the first probe 71 have the same structure and are arranged in the second direction in a reverse configuration with respect to the first probe 71. In the inspection socket 1 according to the fourth aspect of the present disclosure, like the inspection socket 1 of any one of the first to third aspects, the inclined surfaces 111A of the first contact point 111 of the first probe 71 and the inclined surfaces 111A of the first contact point 111 of the second probe 72 face the same side in the second direction, the inclined surfaces 111A of the first contact point 111 of the third probe 73 and the inclined surfaces 111A of the first contact point 111 of the fourth probe 74 face the same side in the second direction. In the inspection socket 1 according to the fifth aspect of the present disclosure, like the inspection socket 1 of the fourth aspect, the inclined surfaces 111A of the first contact point 111 of the first probe 71 and the inclined surfaces 111A of the first contact point 111 of the third probe 73 face opposite sides in the second direction, the inclined surfaces 111A of the first contact point 111 of the second probe 72 and the inclined surfaces 111A of the first contact point 111 of the fourth probe 74 face opposite sides in the second direction. In the inspection socket 1 according to the sixth aspect of the present disclosure, like the inspection socket 1 of the fifth aspect, when observed along the third direction, the inclined surfaces 111A of the first contact point 111 of the first probe 71 and the inclined surfaces 111A of the first contact point 111 of the third probe 73 face each other in the second direction, when observed along the third direction, the inclined surfaces 111A of the first contact point 111 of the second probe 72 and the inclined surfaces 111A of the first contact point 111 of the fourth probe 74 face each other in the second direction. For the inspection socket 1 according to any one of the first to sixth aspects, in the inspection socket 1 according to the seventh aspect of the present disclosure, each of the first contact points 111 of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 has only one inclined surface 111A capable of contacting the contact object 8. For the inspection socket 1 according to any one of the first to seventh aspects, in the inspection socket 1 according to the eighth aspect of the present disclosure, the inclined surface 111A of the first contact point 111 of the first probe 71 is arranged in the second direction on one side of the first contact point 111 of the first probe 71 where the second contact point 121 of the first probe 71 is arranged relative to the second contact point 122 of the third probe 73; the inclined surface 111A of the first contact point 111 of the second probe 72 is arranged in the second direction on one side of the first contact point 111 of the second probe 72 where the second contact point 122 of the second probe 72 is arranged relative to the second contact point 121 of the fourth probe 74; the inclined surface 111A of the first contact point 111 of the third probe 73 is arranged in the second direction on one side of the first contact point 111 of the third probe 73 where the second contact point 122 of the third probe 73 is arranged relative to the second contact point 121 of the first probe 71; the inclined surface 111A of the first contact point 111 of the fourth probe 74 is arranged in the second direction on one side of the first contact point 111 of the fourth probe 74 where the second contact point 121 of the fourth probe 74 is arranged relative to the second contact point 122 of the second probe 72. The present disclosure is fully described in association with the accompanying drawings and preferred embodiments. Various modifications or corrections will be obvious to those skilled in the art. It should be understood that such modifications or corrections are included therein as long as they do not depart from the scope of the present disclosure based on the appended claims. [Industrial Applicability] The inspection socket of the present disclosure can be applied, for example, to an inspection device used for inspecting electronic modules such as optical modules. 1: Inspection socket 2, 3, 4, 5, 6: Housing 2A, 2B, 3B, 4A, 4B, 6B: Through-hole 3A, 6A: Recess 7: Probe 8: Object to be contacted 11: First connection part 11A, 12A: End part 12: Second connection part 12B: Edge part 12C, 121C: Cutout 13: Elastic part 13A: First end part 13B: Second end part 31: Base part 32: Protrusion 61: Pin 71: First probe / Probe 72: Second probe / Probe 73: Third probe / Probe 74: Fourth probe / Probe 75: Fifth probe / Probe 76: Sixth probe / Probe 81: Terminal 81A, 133: Bending part 111, 751, 761: First contact point 111A: Inclined surface 111B: Protrusion 111C: Second inclined surface 121, 122, 123, 124, 125, 126, 752, 762: Second contact point 131: First part 132: Second part 134, 134A, 134B, 134C: Long plate part C: Center line L1: Imaginary line L2: Length R1: Inner diameter X, Y, Z: Direction FIG. 1 is a perspective view of an inspection socket showing an implementation state of the present disclosure. FIG. 2 is an exploded perspective view of the inspection socket of FIG. 1. FIG. 3 is a perspective view of a probe. FIG. 4 is a plan view of the probe and the object to be contacted. FIG. 5 is a sectional view taken along line A-A of FIG. 4. FIG. 6 is a sectional view taken along line B-B of FIG. 4. FIG. 7 is a sectional view showing a first modification of the probe of FIG. 5. FIG. 8 is a sectional view showing a first modification of the probe of FIG. 6. FIG. 9 is a sectional view showing a second modification of the probe of FIG. 5. FIG. 10 is a sectional view showing a second modification of the probe of FIG. 6. 8: Object to be contacted 11: First connection part 11A, 12A: End part 12: Second connection part 12B: Edge part 12C, 121C: Cutout 13: Elastic part 13A: First end part 13B: Second end part 71: First probe / Probe 72: Second probe / Probe 73: Third probe / Probe 74: Fourth probe / Probe 81: Terminal 81A, 133: Bending part 111: First contact point 111A: Inclined surface 111B: Protrusion 121, 122: Second contact point 131: First part 132: Second part 134, 134A, 134B, 134C: Long plate part C: Center line L2: Length R1: Inner diameter X, Y, Z: Directions

Claims

1. A test socket, comprising: case; The system comprises a first probe, a second probe, a third probe, and a fourth probe, each having a first contact at one end in a first direction and a second contact at the other end in the first direction, and each supported by the housing. The first and second probes are arranged facing each other with a spaced distance in a second direction intersecting the first direction. The third and fourth probes are also arranged facing each other with a spaced distance in the second direction. In a third direction intersecting both the first and second directions, the first and third probes are arranged in a specific configuration. Each of the first, second, third, and fourth probes has a first contact with an inclined surface capable of contacting an object. The second contact of the first probe is located on one side of the second direction relative to the second contact of the third probe, and the second contact of the second probe is located on one side of the second direction relative to the second contact of the fourth probe. The inclined surfaces of the first and second probes face the same side in the second direction. The inclined surface of the first contact of the third probe and the inclined surface of the first contact of the fourth probe face the same side in the second direction.

2. The inspection socket as described in claim 1, wherein, When viewed along the first direction, the first contact of the first probe is located at a position offset from the second contact of the first probe. When viewed along the first direction, the first contact of the fourth probe is located at a position offset from the second contact of the fourth probe. When viewed along the first direction, the first contact of the second probe and the second contact of the second probe are located at a position that overlaps with each other. When viewed along the first direction, the first contact of the third probe and the second contact of the third probe are located at a position that overlaps with each other.

3. The inspection socket as described in claim 1 or 2, wherein, The third probe has the same structure as the second probe and is configured in the opposite direction to the second probe in the second direction. The fourth probe has the same structure as the first probe and is configured in the opposite direction to the first probe in the second direction.

4. The inspection socket as described in claim 1, wherein, The inclined surface of the first contact of the first probe and the inclined surface of the first contact of the third probe face opposite directions in the second direction, and the inclined surface of the first contact of the second probe and the inclined surface of the first contact of the fourth probe face opposite directions in the second direction.

5. The inspection socket as described in claim 4, wherein, Viewed along the third direction, the inclined surface of the first contact of the first probe and the inclined surface of the first contact of the third probe face each other in the second direction. Viewed along the third direction, the inclined surface of the first contact of the second probe and the inclined surface of the first contact of the fourth probe face each other in the second direction.

6. The inspection socket as described in claim 1 or 2, wherein, Each of the first probe, the second probe, the third probe, and the fourth probe has only one inclined surface at its first contact point, which is capable of contacting the object being contacted.

7. The inspection socket as described in claim 1 or 2, wherein, The inclined surface of the first contact of the first probe is disposed in the second direction on one side of the first contact of the first probe relative to the second contact of the third probe. The inclined surface of the first contact of the second probe is disposed in the second direction on one side of the first contact of the second probe relative to the second contact of the fourth probe. The inclined surface of the first contact of the third probe is disposed in the second direction on one side of the first contact of the third probe relative to the second contact of the first probe. The inclined surface of the first contact of the fourth probe is disposed in the second direction on one side of the first contact of the fourth probe relative to the second contact of the second probe.

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