Gas isolator mounting structure, ion source apparatus and mounting method and dismounting method thereof

Abstract

This application relates to an insulating needle mounting structure, an ion source device, and its installation and disassembly methods. The insulating needle mounting structure includes a mounting base and a clamping component connected to the mounting base. The clamping component is placed in the inner space of the ion source base plate, and the insulating needle is fixed by the clamping component. The mounting base is fixed to the outer side of the ion source base plate. When disassembling the insulating needle, the connection between the clamping component and the insulating needle can be loosened from the inner side of the ion source base plate, and the insulating needle can be pulled out from the inner side of the ion source base plate. Alternatively, the connection between the mounting base and the ion source base plate can be loosened from the outer side of the ion source base plate, and the mounting base, clamping component, and insulating needle can be pulled out as a whole from the outer side of the ion source base plate. This technical solution reduces the difficulty of disassembling, repairing, and maintaining the ion source device, and improves the performance of the ion source device.

Description

Insulating gas needle mounting structure, ion source equipment, and mounting and disassembly methods thereof The present application relates to the technical field of ion sources, and in particular to an insulating gas needle mounting structure, an ion source device, and an installation method and a disassembly method thereof. An ion source is a device used to generate an ion beam. It can output a specific ion beam current and is used in a wide range of applications, including ion beam sputtering, ion beam etching, surface treatment, and assisted deposition. Among them, the radio frequency ion source is a key ion source device that can independently control ion density and energy. It accelerates positive ions to produce an ion beam through a grid electric field, and generates electrodeless discharge through an external coil. It offers advantages such as zero loss, clean plasma, high ionization efficiency, and high plasma density. The ion source equipment needs to introduce working gas to react and generate plasma. Before the working gas is input into the discharge chamber for reaction, an insulating gas needle needs to be connected for gas supply. The insulating gas needle guides the working gas input from the gas supply pipeline into the discharge chamber in a stable and uniform laminar flow through a fine gas needle, and also has isolation and anti-fouling effects. At present, the structure for installing the insulating gas needle on the ion source equipment is usually installed on the ion source equipment from the bottom of the ion source. When the insulating gas needle needs to be disassembled and maintained, the insulating gas needle is generally disassembled from the bottom of the ion source. However, in some cases, once the ion source equipment is installed on the vacuum equipment, when other equipment is installed at the bottom of the ion source to block it, the insulating gas needle cannot be removed from the bottom due to the obstruction of these equipment, which increases the difficulty of disassembly, repair and maintenance of the ion source equipment and seriously affects the use effect of the ion source equipment. The purpose of this application is to solve one of the above-mentioned technical defects and to provide an insulating gas needle mounting structure, an ion source device and an installation method and a disassembly method thereof. An insulating gas needle mounting structure is used to mount an insulating gas needle on an ion source device, comprising: a mounting base, and a clamping component connected to the mounting base; The mounting base is used to be fixed to the outer side of the ion source base plate of the ion source device, and the clamping component is placed in the inner space of the ion source base plate to fix the insulating gas needle; A through hole is formed in the middle of the mounting base, and the air inlet pipe of the insulating air needle passes through the through hole; A gas needle mounting hole is provided in the middle of the ion source bottom plate, wherein the size of the gas needle mounting hole is larger than the size of the insulating gas needle and the clamping component and smaller than the size of the mounting base. In one embodiment, the insulating gas needle passes through the gas needle mounting hole and is fixed to the clamping component; the insulating gas needle and the clamping component pass through the gas needle mounting hole from the outside of the ion source base plate and are placed in the inner space of the ion source base plate; the mounting base is fixed to the ion source base plate from the outside of the ion source base plate. In one embodiment, the mounting base is fixed to the outer surface of the ion source bottom plate by a plurality of screws, and the clamping component fixes the insulating gas needle by tightening the screws. In one embodiment, the bottom of the insulating gas needle is further connected to a fixing column, and the clamping component fixes the insulating gas needle through the fixing column. In one embodiment, the lower end of the fixing column is further connected to a ferrule joint that is sleeved on the air inlet pipe and is used to connect to the air supply pipe. As mentioned above, the insulating gas needle mounting structure is arranged by mounting a base and a clamping component connected to the mounting base, the clamping component is placed in the inner space of the ion source base plate, the insulating gas needle is fixed by the clamping component, and is fixed to the outer side of the ion source base plate through the mounting base; when removing the insulating gas needle, the connection between the clamping component and the insulating gas needle can be loosened from the inner side of the ion source base plate, and the insulating gas needle can be pulled out from the inner side of the ion source base plate, or the connection between the mounting base and the ion source base plate can be loosened from the outer side of the ion source base plate, and the mounting base, the clamping component and the insulating gas needle can be pulled out as a whole from the outer side of the ion source base plate. An ion source device comprises: an ion source body, an insulating gas needle and the insulating gas needle mounting structure; wherein the insulating gas needle is mounted on the ion source bottom plate of the ion source body through the insulating gas needle mounting structure. In one embodiment, the ion source body includes: a main structure, a discharge chamber, a grid assembly, a discharge chamber support plate, a discharge chamber pressure ring, and a grid assembly pressure ring; wherein, The discharge chamber support plate is mounted on the upper end of the main structure and fixed to the main structure; The discharge chamber is inserted into the discharge chamber support plate; The discharge chamber pressure ring is buckled on the discharge chamber and fixed to the main structure; The grid assembly is superimposed on the upper part of the discharge chamber pressure ring; The grid assembly pressure ring is buckled on the grid assembly and fixed to the main structure. In one embodiment, a dirt retaining ring is provided on the side of the discharge chamber pressure ring facing the discharge chamber; Wherein, the dirt-blocking ring is embedded in the inner side of the discharge cavity and is in close contact with the discharge cavity. A method for installing an ion source device, applied to the ion source device, comprising: Fix the mounting base and the insulating gas needle to the ion source base plate from the outside of the ion source base plate at the lower end of the main structure; Install the discharge chamber support plate on the main structure and fix it with screws; Place a discharge cavity on the main structure, place a discharge cavity pressure ring on the discharge cavity, and fix the discharge cavity pressure ring to the main structure with screws; Place the grid assembly on the discharge chamber pressure ring, place the grid assembly pressure ring on the grid assembly, and fix the grid assembly pressure ring to the main structure with screws. A method for disassembling an ion source device, applied to the ion source device, comprising: Loosen the screws between the grid assembly pressure ring and the main structure, and remove the grid assembly pressure ring and grid assembly in turn; Loosen the screws between the discharge cavity pressure ring and the main structure, and remove the discharge cavity pressure ring and the discharge cavity in turn; Loosen the screws between the discharge cavity support plate and the main structure, and remove the discharge cavity support plate; Loosen the connection between the clamping component and the insulating gas needle from the inner side of the main structure, and pull the insulating gas needle upward from the inner side of the main structure. Additional aspects and advantages of the present application will be given in part in the following description, which will become apparent from the following description, or will be learned through practice of the present application. The following describes in detail embodiments of the present application, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and are not to be construed as limiting the present application. Those skilled in the art will understand that, unless otherwise specified, the singular forms "a," "an," "the," and "the" used herein may also include the plural forms. It should be further understood that the term "comprising" used in the specification of this application refers to the presence of the stated features, integers, steps, or operations, but does not preclude the presence or addition of one or more other features, integers, steps, or operations. An embodiment of the insulating air needle mounting structure is described below. In order to facilitate the installation and disassembly of the insulating gas needle of the ion source equipment, the present application designs an insulating gas needle installation structure, which can remove the insulating gas needle from the upper and lower directions of the ion source equipment, so that the insulating gas needle can be quickly disassembled when repairing the ion source equipment, thereby improving the disassembly and maintenance efficiency of the ion source equipment. Referring to Figures 1 to 3, Figure 1 is a schematic cross-sectional view of an exemplary insulating gas needle mounting structure, Figure 2 is a perspective view of an exemplary insulating gas needle mounting structure from the inside, and Figure 3 is a perspective view of an exemplary insulating gas needle mounting structure from the outside; this mounting structure is used to mount an insulating gas needle 02 on an ion source device 100. The insulating gas needle mounting structure 03 includes a mounting base 301 and a clamping member 302 connected to the mounting base 301. A through hole 301d is formed in the middle of the mounting base 301, through which the inlet pipe 20b of the insulating gas needle 02 passes, thereby enabling connection to the gas supply pipeline. As shown in the figure, the mounting base 301 is fixed to the outer side of the ion source base plate 102. When installed, the clamping component 302 is placed in the inner space of the ion source base plate 102, and the clamping component 302 is used to fix the insulating gas needle 02; a gas needle mounting hole 102a is opened in the middle of the ion source base plate 102, wherein the size of the gas needle mounting hole 102a (for example, diameter) is larger than the size (for example, diameter) of the insulating gas needle 02 and the clamping component 302, and smaller than the size (for example, side length) of the mounting base 301, so that the insulating gas needle 02 and the clamping component 302 can be inserted into the interior of the ion source from bottom to top, and at the same time, the mounting base 301 can be connected to and fixed to the outer side of the ion source base plate 102. As in the above structural scheme, the insulating gas needle 02 is fixed by the clamping component 302, the clamping component 302 is supported by the mounting base 301, and the mounting base 301 is fixed to the ion source bottom plate 102, thereby achieving the purpose of installing the insulating gas needle 02 to the ion source device 100. In one embodiment, when installing the insulating gas needle 02, the insulating gas needle 02 can be passed through the through hole 301d of the mounting base 301 and fixed using the clamping component 302; the insulating gas needle 02 and the clamping component 302 are passed from the outside of the ion source base plate 102 through the gas needle mounting hole 102a into the inner space of the ion source base plate 102; and then the mounting base 301 is fixed to the ion source base plate 102 from the outside of the ion source base plate 102. Based on the above-mentioned insulating gas needle mounting structure 03, when disassembling the insulating gas needle 02, it can be disassembled from the bottom direction of the ion source or from the top direction of the ion source; specifically, the disassembly scheme can be as follows: When it is necessary to disassemble from the upper part of the ion source, the connection between the clamping component 302 and the insulating gas needle 02 can be loosened from the inner side of the ion source base plate 102, and the insulating gas needle 02 can be pulled upward from the inner side of the ion source base plate 102; since the insulating gas needle 02 is fixed by the clamping component 302, after the insulating gas needle 02 is pulled upward from the inside, the mounting base 301 and the clamping component 302 are still fixed on the ion source base plate 102. When the insulating gas needle 02 is subsequently installed back, the insulating gas needle 02 can be inserted into the clamping component 302 from top to bottom and then fixed. When it is necessary to disassemble from the bottom of the ion source, the connection between the mounting base 301 and the ion source base plate 102 can be loosened from the outside of the ion source base plate 102, and the mounting base 301, the clamping component 302 and the insulating gas needle 02 can be pulled out downward from the outside of the ion source base plate 102 as a whole; since the insulating gas needle 02 is fixed to the mounting base 301 by the clamping component 302, the insulating gas needle 02 can be pulled out downward from the outside after the mounting base 301 is disassembled. When the insulating gas needle 02 is subsequently installed back, the insulating gas needle 02 can be fixed by the clamping component 302, and then inserted into the ion source from bottom to top, and the mounting base 301 can be fixed to the outside of the ion source base plate 102 to complete the task. In one embodiment, as shown in Figures 1 to 3, the mounting base 301 can be fixed to the outer surface of the ion source base plate 102 by multiple screws; the clamping component 302 can be designed to be cylindrical with a certain height, and the specific height can be determined according to the shape and installation position of the insulating gas needle 02. The internal hollow part of the clamping component 302 is aligned with the through hole 301d of the mounting base 301, and a fastening screw can be used to fix the insulating gas needle 02 at the upper end of the clamping component 302; illustratively, the clamping component 302 can use two screws to fix the insulating gas needle 02. Furthermore, a fixing column 201 is connected to the bottom of the insulating gas needle 02, and the clamping component 302 fixes the insulating gas needle 02 through the fixing column 201. Generally, the fixing column 201 can be set to be smaller than the diameter of the insulating gas needle 02 body, so that the clamping component 302 and the insulating gas needle 02 can be roughly the same size, and the size of the gas needle mounting hole 102a can be set more reasonably. Furthermore, a ferrule joint 202 that is sleeved on the air inlet pipe 20b is connected to the lower end of the fixed column 201. The ferrule joint 202 can be directly used to connect the air supply pipe. After installing the insulating air needle 02, the air supply pipe is inserted into the ferrule joint 202 to complete the installation of the air supply related pipelines. Based on the insulating gas needle mounting structure 03 of the above-mentioned embodiments, when disassembling the insulating gas needle 02, the insulating gas needle 02 can be disassembled from the inner side of the ion source base plate 102, or the insulating gas needle 02 can be disassembled from the outer side of the ion source base plate 102, which reduces the difficulty of disassembly, repair and maintenance of the ion source device 100 and improves the use effect of the ion source device 100. An embodiment of the ion source apparatus is described below. The ion source device 100 provided in the present application is shown in Figures 4 to 6, where Figure 4 is an exploded view of the ion source device of an embodiment, Figure 5 is a cross-sectional schematic diagram of the ion source body 01 of an embodiment, and Figure 6 is an example ion source body installation schematic diagram, which mainly includes the ion source body 01, an insulating gas needle 02 and an insulating gas needle mounting structure 03; wherein the insulating gas needle 02 is mounted on the ion source base plate 102 of the ion source body 01 through the insulating gas needle mounting structure 03. As in the ion source device 100 of the above embodiment, since the insulating gas needle mounting structure 03 of the above embodiment is used, when removing the insulating gas needle 02, the insulating gas needle 02 can be removed from the inner side of the ion source base plate 102, or from the outer side of the ion source base plate 102. Even after the ion source device 100 is installed in the vacuum equipment, the insulating gas needle 02 can be easily removed when there are other equipment blocking the bottom, thereby reducing the difficulty of disassembly, repair and maintenance of the ion source device 100 and greatly improving the use effect of the equipment. Based on the ion source device 100 provided in the present application, when used in a radio frequency ion source, considering that the grid assembly and the discharge chamber of the radio frequency ion source are installed in an integrated manner, resulting in a heavy weight and high difficulty in installation, and it is difficult to align the gas input hole 12j with the insulating gas needle 02, which makes the insulating gas needle 02 easy to damage the discharge chamber, resulting in a high installation risk. In order to facilitate the installation and disassembly and maintenance of the radio frequency ion source, the present application also provides the following radio frequency ion source embodiment. As shown in Figures 4 to 6 , the ion source apparatus 100 of this embodiment comprises, from bottom to top, a main structure 11, a discharge chamber support plate 11e, a discharge chamber 12, a discharge chamber pressure ring 12f, a grid assembly 13, a grid assembly pressure ring 13g, and supporting components such as screws for fixing. The discharge chamber support plate 11e is mounted on the upper end of the main structure 11 and fixed to the main structure 11; the discharge chamber 12 is inserted into the discharge chamber support plate 11e; the discharge chamber pressure ring 12f is pressed against the discharge chamber 12 and fixed to the main structure 11; the grid assembly 13 is superimposed on the upper portion of the discharge chamber pressure ring 12f; and the grid assembly pressure ring 13g is pressed against the grid assembly 13 and fixed to the main structure 11. Exemplarily, the discharge chamber support plate 11e is installed on the upper end of the main structure 11 and is fixed to the main structure 11 by screws; the discharge chamber 12 is inserted into the discharge chamber support plate 11e; the discharge chamber pressure ring 12f is buckled on the upper end of the discharge chamber 12 and fixed to the main structure 11 by a first screw 211; the grid assembly 13 is superimposed on the upper part of the discharge chamber pressure ring 12f; the grid assembly pressure ring 13g is buckled on the grid assembly 13 and fixed to the main structure 11 by a second screw 311; the insulating gas needle 02 is installed in the center position above the ion source base plate 102 of the main structure 11. Furthermore, the discharge chamber pressure ring 12f can be fixed to the main structure 11 by four first screws 211, and the grid assembly pressure ring 13g can be fixed to the main structure 11 by four second screws 311; preferably, the first screws 211 and the second screws 311 are staggered and distributed on the circumference; thereby, the discharge chamber 12 and the grid assembly 13 can be firmly mounted on the main structure 11. In addition, the ion source body 01 also includes a radio frequency coil 06 installed at the bottom of the discharge chamber 12; preferably, the radio frequency coil 06 is installed from top to bottom above the ion source base plate 102 and fixed by screws; an inlet and outlet water port 61 is provided on the ion source base plate 102, and the radio frequency coil 06 is installed on the ion source base plate 102 from the upper end of the main structure 11 in an upper mounting manner. Preferably, the radio frequency coil 06 is a hollow metal tube with a built-in cooling water channel to dissipate heat from the radio frequency coil 06; wherein, the ion source base plate 102 is provided with a water inlet and outlet 61 for connecting to the cooling water channel. As in the ion source body structure scheme of the above embodiment, the discharge chamber 12 and the grid assembly 13 are sequentially and separately installed on the main structure 11, thereby reducing the difficulty of installation and improving the installation efficiency. In one embodiment, as shown in Figure 5, a dirt shielding ring 21a is provided on the side of the discharge chamber pressure ring 12f facing the discharge chamber 12, as shown in the dotted frame portion in the figure; wherein, the dirt shielding ring 21a is embedded in the inner side of the discharge chamber 12 and in close contact, as shown in the enlarged portion in Figure 5, after the discharge chamber pressure ring 12f is installed, the dirt shielding ring 21a is embedded downward into the discharge chamber 12, and the dirt shielding ring 21a can prevent the sputtered metal film material from contaminating the contact position between the discharge chamber 12 and the screen electrode of the grid assembly 13, avoiding a short circuit phenomenon, thereby improving the use effect of the ion source device 100. Based on the structural solutions of the ion source device 100 in the above-mentioned embodiments, the present application also provides an embodiment of a method for installing the ion source device 100 . Referring to FIG. 7 , FIG. 7 is a flow chart of an installation method of an ion source device according to an embodiment, which can be applied to the ion source device 100 of the above embodiment and mainly includes the following steps. S11 , fixing the mounting base 301 and the insulating gas needle 02 to the ion source bottom plate 102 from the outside of the ion source bottom plate 102 at the lower end of the main structure 11 . S12, installing the discharge chamber support plate 11e on the main structure 11 and fixing it with screws. S13 , placing the discharge cavity 12 on the main structure 11 , placing the discharge cavity pressure ring 12 f on the discharge cavity 12 , and fixing the discharge cavity pressure ring 12 f to the main structure 11 with screws. S14, placing the grid assembly 13 on the discharge chamber pressure ring 12f, placing the grid assembly pressure ring 13g on the grid assembly 13, and fixing the grid assembly pressure ring 13g to the main structure 11 with screws. For example, in combination with the solution of the aforementioned embodiment, the insulating gas needle 02 is first installed on the ion source base plate 102, and then the discharge chamber support plate 11e is installed on the upper end of the main structure 11, and then the discharge chamber 12 is placed, the discharge chamber pressure ring 12f is installed, and it is fixed with four fixing screws; finally, the grid assembly 13 is placed, the grid assembly pressure ring 13g is installed, and it is fixed with four fixing screws. As in the installation method of the above embodiment, since the discharge chamber 12 and the grid assembly 13 are respectively installed on the main structure 11 from top to bottom, it is convenient to accurately align the gas input hole 12j at the bottom of the discharge chamber 12 with the outlet pipe 20c of the insulating gas needle 02, thereby preventing the outlet pipe 20c of the insulating gas needle 02 from damaging the discharge chamber 12, thereby reducing the difficulty of component installation, reducing installation risks, and improving installation efficiency. Based on the structural schemes of the ion source device 100 in the above-mentioned embodiments, the present application also provides an embodiment of a method for disassembling the ion source device 100, which can achieve more convenient and efficient disassembly when the installed ion source device 100 needs to be disassembled and maintained. Referring to FIG. 8 , FIG. 8 is a flow chart of a method for disassembling an ion source device according to an embodiment, which can be applied to the ion source device 100 of the above embodiment and mainly includes the following steps. S21, loosen the screws between the grid assembly pressure ring 13g and the main structure 11, and take out the grid assembly pressure ring 13g and the grid assembly 13 in sequence. S22, loosen the screws between the discharge cavity pressure ring 12f and the main structure 11, and take out the discharge cavity pressure ring 12f and the discharge cavity 12 in sequence. S23, loosen the screws between the discharge cavity supporting plate 11e and the main structure 11, and remove the discharge cavity supporting plate 11e. S24 , loosening the connection between the clamping component 302 and the insulating gas needle 02 from the main structure 11 , and pulling the insulating gas needle 02 upward from the inside of the main structure 11 . For example, since the structure of a conventional ion source device 100 is usually installed on the main structure 11 from the bottom up, considering that after the ion source device 100 is installed on the vacuum equipment for use, when there are other objects blocking the bottom, the insulating gas needle 02 cannot be removed from the bottom of the ion source device, resulting in great difficulty in disassembly, repair and maintenance. Therefore, an insulating gas needle 02 that can be disassembled in both the upper and lower directions is designed. When disassembling the ion source device 100, the insulating gas needle 02 can be removed from the top or bottom of the main structure 11; in actual use, the insulating gas needle 02 can be removed from the bottom of the ion source device or the top of the ion source device as needed, thereby facilitating the disassembly and maintenance of the ion source device 100, making the ion source device 100 more efficient and improving the use effect of the ion source device 100. Those skilled in the art will understand that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with their meanings in the context of the prior art and, unless specifically defined as such, will not be interpreted in an idealized or overly formal sense. The above description is only part of the implementation methods of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application. 02: Insulated gas needle 03: Insulated gas needle mounting structure 301: Mounting base 302: Clamping component 20b: Inlet pipe 301d: Through hole 102: Ion source base plate 102a: Gas needle mounting hole 201: Fixed column 100: Ion source device 12j: Gas input hole 01: Ion source body 11: Main structure 12: Discharge chamber 13: Grid assembly 11e: Discharge chamber support plate 12f: Discharge chamber pressure ring 13g: Grid assembly pressure ring 06: RF coil 61: Water inlet and outlet 21a: Dirt ring 20c: Outlet pipe 202: Ferrule connector 211: First screw 311: Second screw Figure 1 is a schematic cross-sectional view of an example insulating gas needle installation structure. Figure 2 is a stereoscopic view of an example insulating gas needle installation structure from an inner perspective. Figure 3 is a stereoscopic view of an example insulating gas needle installation structure from an outer perspective. Figure 4 is an exploded view of an ion source device of an embodiment. Figure 5 is a schematic cross-sectional view of an ion source body of an embodiment. Figure 6 is a schematic diagram of an ion source body installation of an embodiment. Figure 7 is a flow chart of an installation method of an ion source device of an embodiment. Figure 8 is a flow chart of a disassembly method of an ion source device of an embodiment. 02: Insulated air needle 03: Insulation air needle installation structure 301: Install the base 302: Clamping part 20b: Intake pipe 102: Ion source base plate 201:Fixed column 20c: Exhaust pipe 202: Compression fitting

Claims

1. An insulating gas needle mounting structure for mounting an insulating gas needle onto an ion source device, the insulating gas needle mounting structure comprising: Mounting base, and clamping components connected to the mounting base; The mounting base is used to fix it to the outer side of the ion source base plate of the ion source device. The clamping component is placed in the inner space of the ion source base plate to fix the insulating gas needle. A through hole is opened in the middle of the mounting base, and the air inlet pipe of the insulating gas needle passes through the through hole. A gas needle mounting hole is opened in the middle of the ion source base plate, wherein the size of the gas needle mounting hole is larger than the size of the insulating gas needle and the clamping component and smaller than the size of the mounting base.

2. The insulating air needle mounting structure as described in claim 1, wherein, The insulating gas needle passes through the gas needle mounting hole and is fixed to the clamping component; the insulating gas needle and the clamping component pass through the gas needle mounting hole from the outside of the ion source base plate and are placed in the inner space of the ion source base plate; the mounting base is fixed to the ion source base plate from the outside of the ion source base plate.

3. The insulating air needle mounting structure as described in claim 2, wherein, The mounting base is fixed to the outer side of the ion source base plate by multiple screws, and the clamping component is fixed to the insulating gas needle by fastening screws.

4. The insulating air needle mounting structure as described in claim 3, wherein, The bottom of the insulating air needle is also connected to a fixing post, and the clamping component fixes the insulating air needle through the fixing post.

5. The insulating air needle mounting structure as described in claim 4, wherein, The lower end of the fixed column is also connected to a compression fitting that is sleeved on the air inlet pipe for connecting the air supply pipe.

6. An ion source device, comprising: The ion source body, the insulating needle, and the insulating needle mounting structure described in any one of claims 1-5; wherein the insulating needle is mounted to the ion source base plate of the ion source body through the insulating needle mounting structure.

7. The ion source apparatus as described in claim 6, wherein, The ion source body includes: a main structure, a discharge cavity, a grid assembly, a discharge cavity support plate, a discharge cavity pressure ring, and a grid assembly pressure ring; wherein, the discharge cavity support plate is installed on the upper end of the main structure and fixed to the main structure; the discharge cavity is fitted onto the discharge cavity support plate; the discharge cavity pressure ring is pressed onto the discharge cavity and fixed to the main structure; the grid assembly is superimposed on the upper part of the discharge cavity pressure ring; and the grid assembly pressure ring is pressed onto the grid assembly and fixed to the main structure.

8. The ion source apparatus as described in claim 7, wherein, The discharge cavity pressure ring has a dirt-blocking ring on the side facing the discharge cavity; wherein the dirt-blocking ring is embedded inside the discharge cavity and in close contact with the discharge cavity.

9. A method for installing an ion source device, applied to the ion source device described in claim 6, the method comprising: The mounting base and the insulating gas needle are fixed to the ion source base plate from the outside of the ion source base plate at the lower end of the main structure. The discharge cavity support plate is installed on the main structure and fixed with screws; The discharge chamber is placed on the main structure, and the discharge chamber pressure ring is placed on the discharge chamber. The discharge chamber pressure ring is fixed to the main structure using screws. The grid assembly is placed on the discharge chamber pressure ring, and the grid assembly pressure ring is placed on the grid assembly. The grid assembly pressure ring is fixed to the main structure using screws.

10. A method for disassembling an ion source device, applied to the ion source device described in claim 6, the disassembly method comprising: Loosen the screws between the grid assembly retaining ring and the main structure, and remove the grid assembly retaining ring and the grid assembly in sequence; Loosen the screws between the discharge chamber pressure ring and the main structure, and remove the discharge chamber pressure ring and the discharge chamber in sequence; Loosen the screws between the discharge chamber support plate and the main body structure, and remove the discharge chamber support plate; loosen the connection between the clamping component and the insulating needle from the inside of the main body structure, and pull the insulating needle out from the inside of the main body structure.

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