Material taking mechanism and processing device

Abstract

This invention relates to a material handling mechanism and a processing apparatus. The material handling mechanism includes a first locking member, a second locking member, a gripper assembly, and a reversing transmission structure. The first locking member is reciprocating along a first direction; the second locking member is reciprocating along a second direction intersecting the first direction; the gripper assembly is drive-connected to the second locking member; the first locking member and the second locking member are driven by the reversing transmission structure to convert the reciprocating motion of the first locking member along the first direction into the reciprocating motion of the second locking member along the second direction. The above-mentioned material handling mechanism has a simple structure, is easy to process, and can avoid the adverse effects of the relatively complex drive component's precision on the gripper assembly's precision, improving the consistency of the gripper assembly's clamping and releasing positions each time, thereby improving the gripper's clamping precision and long-term operational stability.

Description

Reclaiming mechanism and processing device The present invention relates to the technical field of semiconductor processing equipment, and in particular to a material taking mechanism and a processing device. The rapid development of the semiconductor industry over the years has resulted in the emergence of diverse equipment, often with similar mechanisms. For example, processing equipment such as wafer saws and splitters all feature a retrieving mechanism for retrieving material from a magazine. The gripper of a retrieving mechanism is typically driven in a variety of ways, such as using a pneumatic cylinder to push out and clamp, then retract and release; or using a slide cylinder to extend and raise, then retract and lower. However, current retrieving mechanisms rely on a drive unit to directly actuate the gripper. Therefore, the gripper's clamping and release positions are susceptible to the accuracy of the drive unit itself. This can be particularly noticeable after long-term operation, when wear and tear of the drive unit can lead to significant discrepancies. The first object of the present invention is to provide a material-retrieving mechanism so that the clamping and releasing positions of the clamping jaws are not easily affected by the accuracy of the driving device itself, thereby improving the clamping accuracy of the clamping jaws and the stability of long-term operation. The second object of the present invention is to provide a processing device including the above-mentioned material taking mechanism. To achieve the above-mentioned objectives, the present invention provides the following technical solutions: A material-picking mechanism, comprising: a first locking member, wherein the first locking member can reciprocate along a first direction; a second locking member, wherein the second locking member can reciprocate along a second direction, and the first direction intersects with the second direction; a direction-changing transmission structure, wherein the first locking member and the second locking member are cooperated through the direction-changing transmission structure to convert the reciprocating motion of the first locking member along the first direction into the reciprocating motion of the second locking member along the second direction; a clamping jaw assembly, wherein the clamping jaw assembly is transmission-connected to the second locking member, and during the reciprocating motion of the second locking member along the second direction, the second locking member drives the clamping jaw assembly to clamp or release. Optionally, the direction-changing transmission structure includes: a transmission surface, which is arranged on one of the first locking member and the second locking member, the transmission surface is inclined, and the connecting line of the two ends of the transmission surface is respectively set at an angle to the first direction and the second direction; a transmission roller, which is arranged on the other of the first locking member and the second locking member, and the transmission surface cooperates with the transmission roller to convert the reciprocating motion of the first locking member along the first direction into the reciprocating motion of the second locking member along the second direction. Optionally, the direction-changing transmission structure further includes a locking surface, which is arranged at an end of the transmission surface away from the clamping claw and connected to the transmission surface, and the locking surface is parallel to the first direction. Optionally, the material picking mechanism further includes: a support member; a sliding member, the second locking member is arranged on the sliding member, and the sliding member can slide back and forth along the second direction; and an elastic return member is arranged between the support member and the sliding member. Optionally, the material picking mechanism further includes a sensing component, the sensing component including: a sensing sheet, the sensing sheet being arranged on the sliding member; a detection device, the detection device being arranged on the supporting member, the sensing sheet being used to trigger the detection device when the driving assembly drives the first locking member to put the clamping jaw assembly in a released position. Optionally, the clamping jaw assembly includes a movable jaw portion and a fixed jaw portion, the movable jaw portion is transmission-connected to the second locking member, the second locking member is used to drive the movable jaw portion to reciprocate along a second direction relative to the fixed jaw portion to clamp or release the clamping jaw assembly, and the material picking mechanism includes a limiting mechanism arranged on the movable jaw portion along the second direction, the limiting mechanism adjusts the clamping space between the movable jaw portion and the fixed jaw portion when the clamping jaw assembly is in a state of releasing the workpiece, and the clamping space is used to clamp the workpiece. Optionally, the limiting mechanism includes a limiting block that is adjustably arranged on the movable claw portion along the second direction, and the limiting block controls the gap between the movable claw portion and the fixed claw portion by contacting and cooperating with the fixed claw portion when the clamping jaw assembly is in the released position. Optionally, the limit block is arranged on the movable claw through a threaded fastener, one of the limit block and the movable claw is provided with a strip hole, the length direction of the strip hole is the second direction, the other of the limit block and the movable claw is provided with a threaded hole, and the threaded fastener passes through the strip hole and cooperates with the threaded hole. A processing device comprises the material taking mechanism described above. Optionally, the processing device is a splitter. It can be seen from the above technical solution that the present invention discloses a material picking mechanism, which includes a first locking member, a second locking member, a clamping jaw assembly, and a changing transmission structure, wherein the first locking member can reciprocate along the first direction; the second locking member can reciprocate along the second direction, and the first direction intersects with the second direction; the first locking member and the second locking member are transmitted and cooperated through the changing transmission structure, and the clamping jaw assembly is connected to the second locking member to convert the reciprocating motion of the first locking member along the first direction into the reciprocating motion of the second locking member along the second direction, so as to drive the clamping jaw assembly to clamp or loosen. When in use, the first locking member, the second locking member and the direction-changing transmission structure between the first locking member and the second locking member are used for transmission cooperation. That is, when the first locking member moves along the first direction toward the direction of the clamping jaw assembly, the first locking member can drive the second locking member to move along one side of the second direction through the direction-changing transmission structure to drive the clamping jaw assembly to clamp. When the first locking member moves away from the clamping jaw assembly along the first direction, the first locking member can drive the second locking member to move along the other side of the second direction through the direction-changing transmission structure, thereby loosening the clamping jaw assembly. The first locking member, the second locking member and the direction-changing transmission structure The dynamic structure adopts a stable and reliable pure mechanical structure, and does not directly drive the clamping jaw assembly, but transmits power through a variable direction transmission structure. Compared with the more complex driving assembly that directly drives the clamping jaw assembly, its accuracy and consistency are easier to ensure. The above-mentioned transmission structure is simple and easy to process, and can avoid the driving assembly directly acting on the clamping jaw assembly, thereby avoiding the accuracy of the relatively complex driving assembly from having an adverse effect on the accuracy of the clamping jaw assembly, improving the consistency of the clamping and releasing position of the clamping jaw assembly each time, thereby improving the clamping accuracy of the clamping jaw and the stability of long-term operation. The present invention also discloses a processing device, which includes the above-mentioned material-taking mechanism. Since the processing device adopts the above-mentioned material-taking mechanism, the processing device should have the same beneficial effects as the material-taking mechanism, which will not be described in detail here. One of the core aspects of the present invention is to provide a material-retrieving mechanism whose structural design makes the clamping and releasing positions of its jaws less susceptible to the accuracy of the drive device itself, thereby improving the clamping accuracy of the jaws and the stability of long-term operation. Another core of the present invention is to provide a processing device including the above-mentioned material taking mechanism. The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention. Please refer to Figures 1 and 2. Figure 1 is a structural schematic diagram of a material taking mechanism provided in an embodiment of the present invention, and Figure 2 is a cross-sectional view of the material taking mechanism provided in an embodiment of the present invention. The embodiment of the present invention discloses a material taking mechanism, which includes a first locking member 6, a second locking member 7, a clamping jaw assembly 5 and a direction-changing transmission structure. Among them, the first locking member 6 can reciprocate along the first direction, and the second locking member 7 can reciprocate along the second direction. The first direction intersects with the second direction. In an embodiment of the present invention, the first direction is perpendicular to the second direction. Of course, it should be noted that in other embodiments, the first direction and the second direction can also adopt other angles. The clamping jaw assembly 5 is transmission-connected to the second locking member 7, and the second locking member 7 reciprocates along the second direction to drive the clamping jaw assembly 5 to clamp or release. The first locking member 6 and the second locking member 7 cooperate through a direction-changing transmission structure to convert the reciprocating motion of the first locking member 6 in a first direction into the reciprocating motion of the second locking member 7 in a second direction. The direction-changing transmission structure converts the motion of the first locking member 6 in the first direction into the motion of the second locking member 7 in the second direction. For example, the direction-changing transmission structure can be implemented by the cooperation of a roller and an inclined surface, or other structures capable of converting motion in different directions. It can be seen that, compared with the prior art, the material-retrieving mechanism provided in the embodiment of the present invention does not directly act on the clamping jaw assembly 5 through an external force (such as the driving assembly in the prior art), but utilizes the first locking member 6, the second locking member 7, and the direction-changing transmission structure between the first locking member 6 and the second locking member 7 for transmission cooperation. That is, when the first locking member 6 moves in the first direction toward the direction of the clamping jaw assembly, the first locking member 6 can drive the second locking member 7 to move along one side of the second direction through the direction-changing transmission structure to drive the clamping jaw assembly 5 to clamp. When the first locking member 6 moves away from the clamping jaw assembly in the first direction, the first locking member 6 can drive the second locking member 7 to move along the other side of the second direction through the direction-changing transmission structure. One side is opposite to the other direction), so that the clamping jaw assembly 5 is loosened. The first locking member 6, the second locking member 7 and the change-direction transmission structure adopt a stable and reliable pure mechanical structure, and do not directly drive the clamping jaw assembly, but transmit power through the change-direction transmission structure. Compared with the more complex driving assembly directly driving the clamping jaw assembly, its accuracy and consistency are easier to ensure. Therefore, the above-mentioned transmission structure is simple and easy to process, and can avoid the driving assembly directly acting on the clamping jaw assembly 5, thereby avoiding the accuracy of the relatively complex driving assembly to adversely affect the accuracy of the clamping jaw assembly 5, and improve the consistency of the clamping and releasing position of the clamping jaw assembly 5 each time, thereby improving the clamping accuracy of the clamping jaw and the stability of long-term operation. The above-mentioned material picking mechanism also includes a driving component 1, which is transmission-connected to the first locking member 6. The driving component 1 is used to drive the first locking member 6 to move back and forth along the first direction. The first locking member 6 and the second locking member 7 are transmission-coordinated through a changing transmission structure to convert the reciprocating motion of the first locking member 6 along the first direction into the reciprocating motion of the second locking member 7 along the second direction. As shown in Figure 2, in an embodiment of the present invention, the direction-changing transmission structure includes a transmission surface 601 and a transmission roller 8, wherein the transmission surface 601 is arranged on one of the first locking member 6 and the second locking member 7, and the transmission surface 601 is inclined. The transmission surface 601 can be a plane or a smooth curved surface. If the transmission surface 601 is a smooth curved surface, the inclined setting of the smooth curved surface means that the two ends of the smooth curved surface are not in the same plane parallel to the first direction, and the connecting line of the two ends of the transmission surface 601 is set at an angle to the first direction and the second direction respectively. The transmission roller 8 is arranged on the other of the first locking member 6 and the second locking member 7, and the transmission surface cooperates with the transmission roller 8 to convert the reciprocating movement of the first locking member 6 along the first direction into the reciprocating movement of the second locking member 7 along the second direction. Specifically, as shown in the embodiment of Figure 2, the transmission surface 601 is provided on the first locking member 6, and the transmission roller 8 is provided on the second locking member 7. At the same time, in order to ensure that the target object is subjected to uniform and consistent force, the transmission surface 601 is an inclined plane. In this way, as long as the driving component 1 drives the first locking member 6 to move in the first direction at a certain speed, the speed of movement of the second locking member 7 in the second direction is also certain, which can ensure that the clamping jaw assembly 5 is clamped or released at a uniform speed. To further optimize the above technical solution, in an embodiment of the present invention, as shown in Figure 2, the above-mentioned direction-changing transmission structure also includes a locking surface 602. The locking surface 602 is provided at an end of the transmission surface 601 away from the clamping jaw assembly and is connected to the transmission surface 601. The locking surface 602 is parallel to the first direction. When the transmission roller 8 rolls along the transmission surface 601, the transmission surface 601 can convert the movement of the first locking member 6 along the first direction into the movement of the second locking member 7 along the second direction. When the transmission roller 8 rolls along the transmission surface 601 to the locking surface 602, that is, because the locking surface 602 is parallel to the first direction, even if the driving assembly 1 continues to move along the first direction, as long as the transmission roller 8 is still engaged with the locking surface 602, the clamping jaw assembly 5 can be kept in the clamping position and not move. At this time, the first locking member 6 and the second locking member 7 are engaged at a dead point position, thereby avoiding the problem of material falling during the transportation of the sheet. As shown in Figures 1 and 2, in an embodiment of the present invention, the material picking mechanism also includes a support member 2, a sliding member 3 and an elastic reset member, wherein the support member 2 is used to provide an installation position and support for the fixed claw portion 502 of the clamping jaw assembly 5, the driving assembly 1 and the sliding member 3. Of course, the support member 2 can adopt an integrated structure or a split structure. The sliding member 3 can be arranged on the support member 2 to slide back and forth along the second direction. In this case, the sliding member 3 is installed on the support member 2 through a linear guide rail 9, the second locking member 7 is arranged on the sliding member 3, the movable claw portion 501 of the clamping jaw assembly 5 is arranged on the sliding member 3, and the elastic reset member is arranged between the support member 2 and the sliding member 3. The elastic reset member is used to drive the sliding member 3 to reset relative to the support member 2 when the driving assembly 1 drives the first locking member 6 to reset. In order to accurately obtain the position information of the clamping jaw assembly 5, in an embodiment of the present invention, the above-mentioned material picking mechanism also includes a sensing component 4, the sensing component 4 includes a sensing sheet 401 and a detection device 402, wherein the sensing sheet 401 is arranged on the sliding member 3, and the detection device 402 is arranged on the support member 2, the sensing sheet 401 is used to trigger the detection device 402 when the driving component 1 drives the first locking member 6 to make the clamping jaw assembly 5 in the released position, the detection device 402 includes but is not limited to a photoelectric sensor, a proximity switch, a Hall element, etc. In an embodiment of the present invention, the detection device 402 is a photoelectric sensor. When the clamping jaw assembly 5 is in the released position, the distance between the sensing sheet 401 and the detection device 402 is the shortest. At this time, the detection device 402 can detect the sensing sheet 401, indicating that the clamping jaw assembly 5 is in the open state. When the driving component 1 drives the first locking member 6 and the second locking member 7 to cooperate to clamp the clamping jaw assembly 5, the sensing sheet 401 is away from the detection device 402. When the detection device 402 cannot detect the sensing sheet 401, the clamping jaw assembly 5 is in the clamped position. As shown in Figures 1 and 2, in an embodiment of the present invention, the clamping jaw assembly 5 includes a movable jaw portion 501 and a fixed jaw portion 502, wherein the movable jaw portion 501 is in transmission connection with the second locking member 7, and the second locking member 7 is used to drive the movable jaw portion 501 to reciprocate relative to the fixed jaw portion 502 along a second direction to clamp or release the clamping jaw assembly 5, and a clamping gap is formed between the facing surfaces of the movable jaw portion 501 and the fixed jaw portion 502. The material picking mechanism also includes a limiting mechanism provided on the movable jaw portion 501 along the second direction. The limiting mechanism adjusts the clamping space between the movable jaw portion 501 and the fixed jaw portion 502 when the clamping jaw assembly is in a state of releasing the workpiece to accommodate materials of different specifications. The clamping space is used to clamp the workpiece. As shown in Figures 1 and 2, in an embodiment of the present invention, the limiting mechanism includes a limiting block 503 which is adjustably arranged on the movable claw portion 501 along the second direction. When the clamping jaw assembly 5 is in the released position, the limiting block 503 controls the gap between the movable claw portion 501 and the fixed claw portion 502 by contacting and cooperating with the fixed claw portion 502. When the clamping jaw assembly 5 is in the released position, the lower edge of the limiting block 503 cooperates with the side surface of the fixed claw portion 502 away from the movable claw portion 501 to limit the clamping gap between the movable claw portion 501 and the fixed claw portion 502. Therefore, by adjusting the position of the limiting block 503 on the movable claw portion 501, the clamping gap between the movable claw portion 501 and the fixed claw portion 502 can be adjusted. Specifically, in an embodiment of the present invention, the above-mentioned limit block 503 is set on the movable claw 501 through a threaded fastener, and one of the limit block 503 and the movable claw 501 is provided with a bar hole, the length direction of the bar hole is the second direction, and the other of the limit block 503 and the movable claw 501 is provided with a threaded hole, and the threaded fastener passes through the bar hole and cooperates with the threaded hole. In an embodiment of the present invention, the drive component 1 can adopt a variety of structures. For example, the drive component 1 can be a piston cylinder, such as a pneumatic cylinder or a hydraulic cylinder, or the drive component 1 can be a linear motor, or the drive component 1 includes a rotary motor and a transmission mechanism, which is used to convert the rotation output by the rotary motor into a linear reciprocating motion. The transmission mechanism includes but is not limited to a screw slider mechanism, a gear rack mechanism, and a cam connecting rod mechanism. An embodiment of the present invention further provides a processing device, which includes a material-taking mechanism as described in the above embodiment. Since the processing device adopts the material-taking mechanism in the above embodiment, the technical effects of the processing device please refer to the above embodiment. Preferably, in an embodiment of the present invention, the processing device is a wafer splitting machine. Of course, it should be noted that the processing device is not limited to a wafer splitting machine. In other embodiments, the processing device can also be other devices that require a material taking mechanism, such as a wafer cutting machine, etc., which is not limited here. It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same and similar parts between the various embodiments can be referenced to each other. This article uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only intended to help understand the core ideas of the present invention. It should be pointed out that for those skilled in the art, without departing from the principles of the present invention, several improvements and modifications can be made to the present invention, and such improvements and modifications also fall within the scope of protection of the patent application of the present invention. 1: Driving assembly 2: Support member 3: Sliding member 4: Sensing assembly 401: Sensing sheet 402: Detection device 5: Clamping jaw assembly 501: Movable jaw 502: Fixed jaw 503: Limiting block 6: First locking member 601: Transmission surface 602: Locking surface 7: Second locking member 8: Transmission roller 9: Linear guide In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work. FIG1 is a schematic structural diagram of a material taking mechanism provided in an embodiment of the present invention. FIG2 is a cross-sectional view of a material taking mechanism provided in an embodiment of the present invention. 2: Support 3: Sliding parts 401: Induction plate 501: movable claw 502:Fixed claw 503: Limit block 6: First locking piece 601: transmission surface 602: Locking surface 7: Second locking piece 8: Transmission roller 9: Linear guide

Claims

1. A material handling mechanism, characterized in that it comprises: A first locking member, which is capable of reciprocating along a first direction; The second locking member is capable of reciprocating along a second direction, the first direction intersecting the second direction; The reversing transmission structure allows the first locking member and the second locking member to be driven together by the reversing transmission structure to convert the reciprocating motion of the first locking member along the first direction into the reciprocating motion of the second locking member along the second direction. The system includes a gripper assembly, which is pulsatorically connected to the second locking member. During the reciprocating motion of the second locking member along the second direction, the second locking member drives the gripper assembly to clamp or release. The reversing transmission structure includes: a transmission surface disposed on one of the first and second locking members, the transmission surface being inclined; the line connecting the two ends of the transmission surface forming an angle with both the first and second directions; a transmission roller disposed on the other of the first and second locking members, the transmission surface cooperating with the transmission roller to convert the reciprocating motion of the first locking member along the first direction into the reciprocating motion of the second locking member along the second direction; and a locking surface disposed on the end of the transmission surface away from the gripper assembly and connected to the transmission surface, the locking surface being parallel to the first direction.

2. The material handling mechanism as described in claim 1, wherein, The material handling mechanism further includes: a support member; a sliding member, wherein the second locking member is disposed on the sliding member, and the sliding member is reciprocally disposed on the support member along the second direction; and an elastic reset member, wherein the elastic reset member is disposed between the support member and the sliding member.

3. The material handling mechanism as described in claim 2, wherein, The material handling mechanism further includes a sensing component, which includes: a sensing plate disposed on the sliding member; and a detection device disposed on the support member. The sensing plate is used to trigger the detection device when the driving component drives the first locking member to release the gripper assembly.

4. The material handling mechanism as described in claim 1 or 3, wherein, The gripper assembly includes a movable gripper and a fixed gripper. The movable gripper is throttle-connected to the second locking member. The second locking member is used to drive the movable gripper to reciprocate relative to the fixed gripper in the second direction, so that the gripper assembly clamps or releases. The material handling mechanism also includes a limiting mechanism disposed on the movable gripper in the second direction. When the gripper assembly is in the state of releasing the workpiece, the limiting mechanism adjusts the clamping space between the movable gripper and the fixed gripper. The clamping space is used to clamp the workpiece.

5. The material handling mechanism as described in claim 4, wherein, The limiting mechanism includes a limiting block that is adjustable in position along the second direction on the movable claw portion. When the gripper assembly is in the released position, the limiting block controls the gap between the movable claw portion and the fixed claw portion by contacting and engaging with the fixed claw portion.

6. The material handling mechanism as described in claim 5, wherein, The limiting block is set on the movable claw portion by a threaded fastener. One of the limiting block and the movable claw portion is provided with a strip hole, the length direction of which is the second direction. The other of the limiting block and the movable claw portion is provided with a threaded hole, and the threaded fastener passes through the strip hole and engages with the threaded hole.

7. A processing apparatus, characterized in that the processing apparatus includes a material handling mechanism as described in any one of claims 1 to 6.

8. The processing apparatus as described in claim 7, wherein, The processing device is a chipper.

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