Polyhedral rotating disturbance device and operating method thereof and polyhedral rotating disturbance circulation equipment

Abstract

A polyhedral rotational agitation device includes an immersion tank, a driving member, a rotating base, and a agitating member. The immersion tank has a receiving space. The driving member has a driving portion. The rotating base is movably disposed in the receiving space of the immersion tank and has an abutment portion and a polyhedral portion disposed around the abutment portion. A substrate to be plated is fixed to the polyhedral portion, such that the substrate to be plated is disposed around the abutment portion. The substrate to be plated is immersed in a chemical solution in the receiving space, and the driving portion of the driving member approaches the rotating base to abut against the abutment portion of the rotating base, thereby causing the substrate to be plated, fixed on the rotating base, to rotate and agitate the chemical solution in the receiving space. The agitating member is disposed around the rotating base. When the rotating base rotates in the receiving space, the agitating member agitates the chemical solution in the receiving space.

Claims

1. A polyhedral rotational disturbance device, comprising: An immersion tank (110) has a receiving space (112); a driving member (120) is connected to the immersion tank (110) and has a driving part (122); a rotating base (130) is movably disposed in the receiving space (112) of the immersion tank (110) and has an abutment part (132) and a plurality of polyhedral parts (134) disposed around the abutment part (132), wherein a plurality of substrates (A) to be plated are respectively fixed on the plurality of polyhedral parts (134), such that the plurality of substrates (A) to be plated are disposed around the abutment part (132), the plurality of substrates (A) to be plated are immersed in a chemical solution (C) in the receiving space (112) of the immersion tank (110), and the driving part (122) of the driving member (120) is used to... The abutment portion (132) of the rotating base (130) is brought closer to the rotating base (130) to drive the plurality of substrates (A) fixed on the rotating base (130) to rotate in the accommodating space (112) to disturb the chemical solution (C) in the accommodating space (112); and a plurality of disturbance members (140) are arranged around the rotating base (130), wherein when the rotating base (130) rotates in the accommodating space (112), the plurality of disturbance members (140) are used to disturb the chemical solution (C) in the accommodating space (112).

2. The polyhedral rotational disturbance device as described in claim 1, further comprising: An auxiliary rotating disk (150) is disposed on one side of the rotating base (130) and has a plurality of auxiliary rollers (152) and a plurality of ball bearing platforms (154), wherein the plurality of auxiliary rollers (152) and the plurality of ball bearing platforms (154) surround the center of the auxiliary rotating disk (150), and the rotating base (130) is used to limit the rotation by means of the plurality of auxiliary rollers (152) and the plurality of ball bearing platforms (154) of the auxiliary rotating disk (150), and the rotation speed of the rotating base (130) is between 5 revolutions per minute and 150 revolutions per minute.

3. The polyhedral rotational disturbance device as claimed in claim 1, wherein the disturbance member (140) has a plurality of nozzles (142) for ejecting a bubble (B) or ejecting the chemical liquid (C) to disturb the chemical liquid (C) located in the receiving space (112).

4. The polyhedral rotating disturbance device as described in claim 3, wherein the number of the plurality of disturbance elements (140) is four, and the four disturbance elements (140) are respectively disposed around the rotating base (130), and one of the plurality of nozzles (142) of the four disturbance elements (140) has a spray distance (L) between it and the rotating base (130), the spray distance (L) being between 50 mm and 100 mm.

5. The polyhedral rotational disturbance device as claimed in claim 1, wherein the disturbance member (140a) has a disturbance plate (142a), and the disturbance plate (142a) of the disturbance member (140a) is used to disturb the chemical liquid (C) in the accommodating space (112).

6. The polyhedral rotational disturbance device as claimed in claim 1, wherein the soaking tank (110) has a cover plate (114), the drive member (120) is disposed on the cover plate (114) and a lifting and transporting member (300) is used to remove the rotating seat (130) from the receiving space (112) of the soaking tank (110) via the cover plate (114).

7. A method for operating a polyhedral rotational disturbance device, comprising: A plurality of substrates (A) to be plated are respectively fixed on a plurality of polyhedral portions (134) of a rotating base (130), wherein the rotating base (130) has an abutment portion (132), and the plurality of substrates (A) to be plated are disposed around the abutment portion (132); the rotating base (130) is moved into a receiving space (112) of an immersion tank (110), wherein the rotating base (130) is movably disposed in the receiving space (112), and the plurality of substrates (A) to be plated are immersed in a chemical solution (C) in the receiving space (112); A driving part (122) of a driving member (120) approaches the rotating base (130) to abut against the abutting part (132) of the rotating base (130) to drive the plurality of substrates (A) fixed on the rotating base (130) to rotate in the accommodating space (112) to disturb the chemical solution (C) in the accommodating space (112); and when the rotating base (130) is driven to rotate in the accommodating space (112) by the driving member (120), the plurality of disturbance members (140) disturb the chemical solution (C) in the accommodating space (112), wherein the plurality of disturbance members (140) are arranged around the rotating base (130).

8. The method of operating the polyhedral rotational disturbance device as described in claim 7 further includes: The rotating seat (130) is limited to rotating on the auxiliary rotating disk (150) by a plurality of auxiliary rollers (152) and a plurality of ball bearings (154), wherein the rotation speed of the rotating seat (130) is between 5 revolutions per minute and 150 revolutions per minute.

9. The method of operating the polyhedral rotational perturbation device as described in claim 7, wherein perturbing the chemical solution (C) in the accommodating space (112) further comprises: The chemical solution (C) in the receiving space (112) is disturbed by ejecting a bubble (B) or the chemical solution (C) through a plurality of nozzles (142) of a plurality of disturbance elements (140).

10. A polyhedral rotating disturbance circulation device, comprising: The polyhedral rotational disturbance device as described in any one of claims 1 to 6; a temperature controller (210) disposed in the accommodating space (112) of the soaking tank (110) and located on one side of the rotating base (130), the temperature controller (210) being used to control the temperature of the chemical solution (C) in the accommodating space (112); An overflow recovery device (220) is disposed on one side of the soaking tank (110) and on the side of the rotating base (130) opposite to the temperature controller (210). The overflow recovery device (220) is connected to the accommodating space (112) of the soaking tank (110). A liquid circulation device (230) is disposed on one side of the overflow recovery device (220) and has a circulation pipe (232) and a circulation pump (234). The circulation pipe (232) is connected to the plurality of disturbance members (140) and the overflow recovery device (220). The circulation pipe (232) is used to transport the chemical liquid (C) recovered by the overflow recovery device (220) to the plurality of disturbance members (140) by means of the circulation pump (234).

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