Imprinting mechanism and grating forming equipment

Abstract

This application relates to the field of optical component fabrication technology, providing an imprinting mechanism and a grating forming apparatus. The imprinting mechanism includes a rolling element. The rolling element is configured to be rollable and arranged to roll and scrape along its extension direction. The rolling element includes a plurality of imprinting structures. The plurality of imprinting structures are spaced apart along the extension direction. The imprinting structure has a scraping surface. A cavity is formed between two adjacent imprinting structures. When the rolling element rolls and scrapes, the rolling element can be unrolled from a rolled state to a flat state. The rolling element elastically deforms when rolled and can recover its deformation when unrolled. The beneficial effect of this application is that when the rolling element is unrolled from a rolled state to a flat state, the deformation of the rolling element recovers, the scraping surface scrapes photoresist into the cavity and fills the cavity, and very little photoresist remains between the scraping surface and the surface of the part to be imprinted.

Claims

1. An imprinting mechanism for imprinting a workpiece coated with photoresist, the improvement of which includes: Roller-formed parts are constructed to be rollable and configured to be rolled and scraped along their extension direction. The rolling element includes a plurality of imprinting structures, which are spaced apart along the extension direction, and a mold cavity is formed between two adjacent imprinting structures; each imprinting structure has a scraping surface; when the rolling element is rolled and scraped, it can be unwound from a wound state to a flat state; the rolling element is elastically deformed in the wound state and can recover its deformation when unwound; wherein, when the rolling element is unwound, the deformation recovery of the rolling element causes the scraping surface to scrape the photoresist into and fill the mold cavity; when the rolling element is in the flat state, the scraping surface is in contact with the workpiece to be imprinted, wherein the imprinting mechanism further includes a winding member, the rolling element is wound around the winding member, the winding member is configured to rotate about a rotation axis and drive the rolling element to roll and scrape along the extension direction, the rotation axis intersecting the extension direction; The rolling element includes a first snap-fit ​​portion and a second snap-fit ​​portion, which are connected to each other to allow the rolling element to be wound around the take-up element.

2. The embossing mechanism as described in claim 1, wherein, The rolling element includes a first component and a second component, which are connected. The first component has a rolling side and a first connecting side disposed opposite to each other, and the second component has a second connecting side. The embossing structure is disposed on the rolling side. Both the first connecting side and the second connecting side are provided with toothed structures. The toothed structures on the first connecting side and the toothed structures on the second connecting side are engaged and connected to each other, thereby connecting the first component and the second component.

3. The embossing mechanism as described in claim 2, wherein, The tooth-like structure includes a plurality of tooth-shaped portions, which are arranged sequentially and connected along the extending direction; each tooth-shaped portion has a first tooth surface and a second tooth surface, which are symmetrically arranged and connected, and the included angle between the first tooth surface and the second tooth surface is in the range of 30° to 75°.

4. The embossing mechanism as described in claim 2, wherein, The embossing mechanism also includes a controller, the first component is made of a piezoelectric material, and the controller is electrically connected to the first component to obtain the pressure value applied to the first component.

5. The embossing mechanism as described in claim 1, wherein, The imprinting mechanism further includes a sensing module, which includes an emitter and a detector, the emitter and the detector being electrically connected; the emitter is configured to emit detection light when the rolling element is in the flattened state, the detection light passing through the scraping surface; the detector is configured to receive the detection light.

6. The embossing mechanism as described in claim 2, wherein, The material of the first component is thermosetting resin.

7. The embossing mechanism as described in claim 2, wherein, The material of the second component is a metal material or a resin substrate.

8. The imprinting mechanism as described in any one of claims 1 to 7, wherein, The imprinting structure also has a first side and a second side. Along the extending direction, the first side, the scraping surface, and the second side are connected sequentially. The first side and the second side are both perpendicularly connected to the scraping surface and located on the same side of the scraping surface. Along the extending direction, the length of the scraping surface is L1, 50nm≤L1≤400nm. Along the direction perpendicular to the extending direction, the length of the first side is L2, and the length of the second side is L3, 100nm≤L2=L3≤800nm.

9. A grating forming apparatus, the improvement of which includes a worktable and an imprinting mechanism as described in any one of claims 1 to 8; the worktable being used to fix a photoresist-coated workpiece to be imprinted.

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