Inspection probes and inspection sockets for use with inspection probes

Abstract

[Problem] To provide an inspection probe and an inspection socket for use with the inspection probe, wherein the inspection probe has or is capable of having a shielding function in a smaller and simpler manner. [Solution] The inspection probe includes: a hollow housing made of a conductive material; an elastic member provided inside the housing in a telescoping state in the axial direction; and a contact member provided inside the housing in a state where it is constantly biased by the elastic member and a portion protrudes to the outside of the housing; The housing includes: a cylindrical body portion extending in the axial direction; and a shielding portion provided along the axial direction on a portion of the circumferential surface of the body portion in a state protruding in the radial direction of the body portion; or, the housing includes: a cylindrical body portion extending in the axial direction; and a recessed portion provided along the axial direction on a portion of the circumferential surface of the body portion in a state recessed in the radial direction of the body portion, thereby enabling the end of the shielding portion of another inspection probe to be connected, and / or the end of the shielding member, to be provided in the recessed portion.

Description

Technical Field

[0001] The present invention relates to an inspection probe, more specifically, to an inspection probe particularly suitable for use as a grounding probe, which has or can have a shielding function, and an inspection socket used for the inspection probe. Prior Art

[0002] Inspection probes are used, for example, for electrical inspection of array-type electronic devices such as IC chips, which have a plurality of solder balls, pads, leads, etc. on the package. They can be used as power supply probes, signal probes, and grounding probes.

[0003] Patent Document 1 (Japanese Patent No. 6475479) discloses an example of using a test probe as a grounding probe. In the following description, reference numbers follow those in Patent Document 1. Patent Document 1 discloses an inspection unit 30 for a high-frequency-compatible receptacle. The inspection unit 30 includes: a metal block (pin block) 50 having a plurality of through-holes 51 formed therein; a grounding contact probe 40A inserted into the through-holes 51 of the metal block; a power supply contact probe 40B; a high-frequency signal contact probe 40C; a grounding bush 60 disposed around the grounding contact probe 40A; a resin plate (pin plate 70) serving as an insulator; and an insulating ring 75 serving as an insulating member.

[0004] The ground contact probe 40A is inserted and positioned within the metal block 50 along with the power contact probe 40B and the high-frequency signal contact probe 40C. Furthermore, similarly to the power contact probe 40B and the high-frequency signal contact probe 40C, the ground contact probe 40A is insulated from the metal block 50 by a resin plate and an insulating ring 75 serving as an insulator. Therefore, the ground contact probe 40A cannot function as a ground. In order to enable the grounding contact probe 40A to perform its original function, Patent Document 1 provides a grounding contact probe 40A in which a grounding bushing 60 made of a conductive metal is arranged around the grounding contact probe 40A to electrically connect the grounding contact probe 40A to a metal block 50, thereby allowing the metal block 50 to function as a shield. [Prior Art Literature] [Patent Document]

[0005] [Patent Document 1] Japanese Patent No. 6475479 Summary of the Invention

[0006] [Problems to be solved by the invention]

[0007] As is clear from the description in Patent Document 1, there has been a conventional belief among those skilled in the art that inspection probes should be cylindrical. This conventional belief allowed Patent Document 1 to employ a configuration that uses a grounding bushing and a metal block to provide a grounding function to the contact probe, despite the device's increased size and complexity and limited design freedom. The present invention overturns this inherent concept held by those skilled in the art and provides an inspection probe and an inspection socket for use with the inspection probe. By changing the shape of the inspection probe itself, which is generally considered to be cylindrical, a shielding function is provided or can be provided in a simpler manner without requiring the device to be enlarged. [Means for solving the problem]

[0008] To solve the above-mentioned problems, an inspection probe according to one aspect of the present invention comprises: a hollow housing made of a conductive material; an elastic member disposed within the housing in an axially extendable state; and a contact member disposed within the housing in a state in which the elastic member is constantly biased and a portion of the contact member protrudes outside the housing. The housing comprises: a cylindrical main body extending in the axial direction; and a shielding portion provided on a portion of the circumference of the main body so as to protrude in a radial direction of the main body and be arranged along the axial direction; or; The aforementioned shell includes: a cylindrical main body portion extending in the aforementioned axial direction; and a recessed portion, which is arranged along the aforementioned axial direction on a part of the circumferential surface of the aforementioned main body portion in a state recessed in the radial direction of the aforementioned main body portion, and is constructed so that the end of the aforementioned shielding portion of other inspection probes to be connected and / or the end of the shielding component can be arranged in the aforementioned recessed portion. According to the inspection probe of this aspect, it is possible to provide an inspection probe that is particularly suitable for use as a grounding probe and that has or can have a shielding function added by changing the shape of the inspection probe itself. [Effects of the Invention]

[0009] According to the present invention, there are provided an inspection probe and an inspection socket used for the inspection probe, which have or can have a shielding function. Simple diagram description

[0010] FIG. 1 is a perspective view showing a conventional general inspection probe and its internal structure. FIG. 2 is a schematic perspective view of an inspection probe according to a first exemplary embodiment of the present invention. FIG3 is a perspective view showing a modified example of the inspection probe of FIG1 . FIG. 4 is a perspective view showing an example of arrangement of inspection probes in an inspection socket. FIG. 5 is a plan view showing an example of arrangement of inspection probes. FIG6 is a plan view showing an example of the arrangement of the inspection probe corresponding to FIG5. FIG. 7 is a perspective view showing a modified example of the inspection probe of FIG. 1 . FIG. 8 is a plan view showing an example of arrangement of inspection probes. FIG. 9 is a perspective view showing an example of a connection state of the inspection probe. FIG. 10 is a perspective view showing an example of a connection state of an inspection probe. FIG. 11 is a schematic perspective view of an inspection probe according to a second exemplary embodiment of the present invention. FIG. 12 is a perspective view showing a modified example of the inspection probe of FIG. 11 . FIG. 13 is a perspective view showing a connection state of an inspection probe having both a recessed portion and a shielding portion and an inspection probe having only a recessed portion. [Figure 14] is a top view of Figure 13. FIG. 15 is a perspective view showing an example of a connection state of the inspection probe shown in FIG. 13 . FIG. 16 is a plan view showing a connection state of an inspection probe having only a recessed portion. FIG. FIG. 17 is a plan view showing another connection state of the inspection probe having only a recessed portion. FIG. 18 is a schematic perspective view of an inspection socket according to an exemplary embodiment of the present invention. FIG. 19 is a partially cutaway perspective view showing the arrangement of the inspection probes housed in the lower housing. [Figure 20] is a schematic top view of Figure 19. FIG. 21 is a plan view showing the arrangement of the holding member and the through-hole before the inspection probe is installed. FIG. [Figure 22] is a three-dimensional cross-sectional view taken along line AA of Figure 21. Implementation Method

[0011] Below, exemplary embodiments for implementing the present invention will be described in detail with reference to the drawings. However, the materials, shapes, and relative positions of the components described in the following embodiments are arbitrary, unless they are essential to solving the problems of the present invention, and may be modified depending on the configuration of the device to which the present invention is applied or various conditions. Furthermore, unless otherwise specified, the scope of the present invention is not limited to the specific embodiments described below.

[0012] FIG1 shows a conventional, general inspection probe 9 disclosed in Patent Document 1 and other publications. Specifically, it shows a perspective view of an inspection probe without a shielding function ( FIG1(a) ) and a perspective view of its internal structure ( FIG1(b) ). Inspection probe 9 comprises a hollow, cylindrical housing 110, an elastic member 31 disposed within housing 110, and contact members 21 and 22 disposed within housing 110 with portions protruding outside of housing 110.

[0013] The housing 110 is made of a conductive material, and is formed, for example, by punching and bending a metal plate.

[0014] Elastic member 31 is, for example, a coil spring as shown in FIG1 , and is disposed within housing 110 so as to be expandable and contractible in the axial direction α. ​​While elastic member 31 does not necessarily need to be formed of a conductive material, forming it from a conductive material can strengthen the electrical connection between contact members 21 and 22, and between these contact members 21 and 22 and housing 110.

[0015] Like housing 110, contact members 21 and 22 are made of a conductive material, for example, by cutting a metal block. However, they can also be formed by punching or bending a metal plate, instead of or in combination with cutting. Contact members 21 and 22 function as so-called plungers and are constantly biased by elastic member 31. If housing 110 and elastic member 31 are made of conductive material, they are electrically connected to the elastic member 31.

[0016] Figure 2 is a schematic perspective view of an inspection probe 1 according to a first exemplary embodiment of the present invention. The inspection probe 1 differs from the inspection probe 9 shown in Figure 1 in its outer shell. Specifically, the outer shell 110 of the inspection probe 9 consists solely of a cylindrical main body 111 extending in the axial direction "α." In contrast, the outer shell 10 of the inspection probe 1 includes a shield 13 in addition to the main body 11. Regarding elements other than the outer shell, namely, the elastic member 31 and the contact members 21 and 22, there are no substantial differences between the inspection probe 1 and the inspection probe 9.

[0017] The shield portion 13 is made of a conductive member and can be formed integrally with the main body 11 by, for example, punching or bending a metal plate or cutting a metal block. However, it does not necessarily need to be formed integrally with the main body 11 and can be formed separately from the main body 11 and then fixed to the main body 11 by welding or other means.

[0018] Each shield portion 13 is provided on a portion of the peripheral surface 11a of the main body portion 11 in a state of protruding in the radial direction "R" of the main body portion 11. By protruding in the radial direction, it can function to shield adjacent inspection probes.

[0019] Each shielding portion 13 is also provided along the axial direction "α" over a predetermined length. This length can be freely determined according to the size of the device and the shielding effect.

[0020] There is no particular limitation on the number of shielding parts 13. In the inspection probe 1, a total of four shielding parts 13 are provided, but, for example, only one shielding part 13 may be provided as in the inspection probe 1A shown in FIG.

[0021] When multiple shielding portions 13 are provided, as shown in Figure 2 , they can be arranged radially or evenly spaced apart on the "β-γ" plane. A radial arrangement allows for shielding of more inspection probes 1, and evenly spaced apart arrangements simplify and improve the design of the inspection probe arrangement. However, radial arrangement and evenly spaced apart arrangements are not necessary. The arrangement method can be modified appropriately to suit the intended use.

[0022] Each shielding portion 13 may also be a straight line extending along the β-γ plane with a substantially constant width. For example, as shown in Figure 2 , it may be formed as a thin strip. In this case, the shielding portion 13 as a whole is formed as a thin plate. The shape of the plate is not particularly limited. For example, a rectangular shape, as shown in Figure 2 , allows for a simpler and more efficient layout design. However, this shape may be modified appropriately depending on the intended use.

[0023] FIG4 shows a perspective view of an example arrangement of the inspection probe 1 in an inspection socket (omitted here for simplicity). FIG5 shows a top view of another example arrangement of the inspection probe 1, and FIG6 shows a top view of an example arrangement of the inspection probe 1A corresponding to FIG5.

[0024] For example, inspection probes 1 and 1A are placed in the inspection socket along with conventional inspection probes 9. Inspection probes 9 can also be used, for example, for power supply or signal testing. By adopting the configuration shown in Figures 4 through 6, the main body 11 of inspection probes 1 and 1A, functioning as grounding probes, and the shield 13 of inspection probes 1 and 1A can shield these inspection probes 9 from adjacent inspection probes 9 and external signals in the axial directions "α" and "β-γ" planes. In particular, in the configuration shown in Figures 5 and 6, because inspection probes 1 and 1A substantially surround inspection probe 9 on all four sides, inspection probe 9 can be almost completely shielded from the outside. While inspection probes 1 and 1A are thus particularly well-suited for use as grounding probes, their use is not limited to grounding probes and can, of course, also be used as power supply or signal testing probes.

[0025] 7 shows an inspection probe 1B in which the shape of the shield portion is modified according to a modification. FIG. 8 shows an example of arrangement of the inspection probe 1B in the inspection socket (omitted for simplicity) in a plan view similar to FIG. 5 and FIG. 6 .

[0026] The shield portion 13B of the inspection probe 1B has a shape that tapers in the radial direction "R" as it moves away from the peripheral surface 11a on the "β-γ" plane. This shape further enhances the shielding function near the inspection probe 1B without interfering with the placement of other inspection probes. The tapered shield portion 13B may have a curved outline 13Bb. Preferably, the curved outline 13Bb is positioned substantially concentrically with the peripheral surface 11a of the main body 11 of the adjacent inspection probe 9. This positioning maintains a constant distance between the inspection probe 1B and the inspection probe 9, effectively preventing the generation of noise.

[0027] Figure 9 shows a perspective view of an example of how inspection probes are connected. As shown in this figure, for example, shield portion 13 of inspection probe 1A shown in Figure 3 can be used to connect adjacent inspection probes. The number of connected inspection probes is not particularly limited; two or more inspection probes can be connected. Furthermore, the inspection probe 1 shown in Figure 2, the inspection probe 1B shown in Figure 7, and the inspection probes described below can also be connected using the same method.

[0028] Figure 9 shows an example of connecting inspection probes located nearby, but as shown in Figure 10 , it is also possible to connect inspection probes 1D located farther away. Figure 10 shows an example of the arrangement of inspection probes 1D in an inspection socket (omitted for simplicity) using the same perspective view as Figure 4 . One or more inspection probes 9 can be placed between a pair of inspection probes 1D connected by a shield 13D to shield them. In this case, to further enhance the shielding function, it is preferable that the inspection probes 9 placed between the inspection probes 1D are arranged as straight as possible along the arrangement direction "K" of the inspection probes 1D connected by the shield 13D. Therefore, the shield 13D is provided with a curved portion 13Db on the "β-γ" plane, which curves away from the arrangement direction "K" of the adjacent inspection probes 1D connected by the shield 13D. Although not particularly shown, the inspection probe 1 shown in FIG. 2 , the inspection probe 1B shown in FIG. 7 , and other inspection probes can also be connected in the same manner.

[0029] FIG11 is a schematic perspective view of an inspection probe 1E according to a second exemplary embodiment of the present invention. Inspection probe 1E differs from inspection probe 1 shown in FIG2 in its housing. Specifically, housing 10 of inspection probe 1E includes a recessed portion 14 in place of shielding portion 13 of inspection probe 1.

[0030] In addition to the end 13a of the shield 13 of the other inspection probes 1 and 1A shown in Figures 1 and 2 (see Figures 2 to 6), the end 13Ba of the shield 13B of the inspection probe 1B shown in Figure 7 (see Figures 7 and 8), and other shielding portions, the recessed portion 14 also includes an end 15a of a "shielding member" (indicated by reference numeral "15" in Figure 15, described later) (see Figure 15). Here, the "shielding member" is a member having the same size and shape as the shield, but unlike the shield, it is not part of the inspection probe but is provided separately from the inspection probe. By providing a predetermined portion of the shield and / or shielding member in the recessed portion 14, the inspection probe 1E can be connected to other inspection probes, similar to the modified example shown in Figure 2 and other examples.

[0031] The recessed portion 14 is provided on a portion of the circumferential surface 11a of the main body 11, recessed in the radial direction "R" of the main body 11. The recessed portion 14 can also be formed, for example, using the annular raised portion 18 of the main body 11. The recessed portion 14 is formed by recessing the portion of the circumferential surface 11a of the main body formed by the raised portion 18 in the radial direction "R." By forming the recessed portion 14 using the raised portion 18, the wall thickness of the main body 11 is not reduced, thereby preventing the strength of the inspection probe from being weakened.

[0032] Each recess 14 is also provided along the axial direction "α" over a predetermined length. This length can be freely determined based on the size and shielding effect of the device, as well as the size of the shield 13 and / or the end of the shield member provided in the recess 14.

[0033] If recessed portion 14 is provided along the entire length of raised portion 18 along axial direction α, the ends of the shield portion and / or shield member disposed within recessed portion 14 may be susceptible to falling off, particularly at the bottom. To prevent this and maintain stability, inspection probe 1F may be configured such that at least one end portion of recessed portion 14 in axial direction α, particularly bottom end portion 14a, is substantially closed along the β-γ plane, as shown in FIG12 .

[0034] There is no particular limitation on the number of recesses 14. In the inspection probe 1E, a total of four recesses 14 are provided, but the number may be one, three (see Figures 13 to 15 below), or eight (see Figure 17 below).

[0035] When multiple recesses 14 are provided, as shown in FIG11 , these recesses 14 may be arranged radially or evenly spaced apart on the β-γ plane. However, they do not necessarily need to be arranged radially or evenly spaced apart. The arrangement method can be modified appropriately depending on the intended use.

[0036] Figures 13 to 17 illustrate connection patterns of inspection probes connected using recessed portions 14. While the first embodiment shown in Figure 1 and other embodiments describes an inspection probe equipped with a shielding member, and the second embodiment shown in Figure 11 and other embodiments describes an inspection probe equipped with a recessed portion, these two embodiments can also be combined to form an inspection probe, as shown in Figures 13 to 15.

[0037] In Figures 13 to 15 , a single inspection probe 1G is provided with both a recessed portion 14 and a shield portion 13. Figure 13 is a perspective view showing the connection between inspection probe 1G and inspection probe 1E (1F) shown in Figures 11 (12), while Figure 14 is a top view thereof. As shown in these figures, by providing the end portion 13a of the shield portion 13 of inspection probe 1E (1F) in recessed portion 14 of inspection probe 1G, inspection probe 1G and inspection probe 1E (1F) can be connected.

[0038] FIG15 is a top view similar to FIG14 showing another connection configuration of the inspection probe 1G and the inspection probe 1E (1F). In this connection configuration, the inspection probe 1G is connected to the inspection probe 1E (1F) and another inspection probe 1G. Because the inspection probe 1G has both a recessed portion 14 and a shield portion 13, as shown in this figure, it can be connected to another inspection probe 1E (1F) using its own shield portion 13, and can also be connected through the other inspection probe 1G. The inspection probe 1G shown in FIG13 through FIG15 has three recessed portions 14 and one shield portion 13, but the total number of these recessed portions and shield portions, or the number of each recessed portion and shield portion, is not particularly limited.

[0039] Figure 16 is a top view equivalent to Figure 15 , showing the same connection pattern as in Figure 15 , achieved using an inspection probe 1E (1F) having only recesses 14. Unlike inspection probe 1G, inspection probe 1E (1F) does not have shielding 13 . Therefore, shielding member 15 is used to connect inspection probes 1E (1F) to each other. Figure 17 also shows a connection pattern using an inspection probe 1H having only recesses 14. However, since eight recesses 14 are arranged radially, the connection pattern is more complex than that shown in Figure 16 . The connection pattern shown in Figure 17 offers the advantage of being able to shield a total of two inspection probes 9 using a smaller area using a total of six inspection probes 1H.

[0040] Figure 18 shows a schematic perspective view of an inspection socket according to an exemplary embodiment of the present invention. The inspection socket 5 is composed of an upper housing 5A and a lower housing 5B, which are assembled to accommodate the inspection probe 1 of the present invention, as shown in Figures 1 to 17 , and other inspection probes. The upper housing 5A includes a resin base 51 and a frame 52 that supports the base 51 and surrounds the outer periphery of the base 51.

[0041] The inspection probes utilize the through holes 54A provided in the base 51A of the upper case 5A and the through holes 54B provided in the base 51B of the lower case 5B. The through holes 54A and 54B are arranged in a grid. When the inspection probe 1 and the like are housed in the upper housing 5A and the lower housing 5B, the upper half of the inspection probe is housed in the housing space of the upper housing 5A, and the lower half of the inspection probe is housed in the housing space of the lower housing 5B (see FIG19 ). Furthermore, in this case, a portion of the inspection probe's contact member 21, particularly the multi-point contact portion 21a at its tip (see FIG1 , etc.), is positioned so as to protrude slightly above the surface 51a of the base 51 through the through-hole 54A. Similarly, a portion of the inspection probe's contact member 22, particularly the contact portion 22a at its tip (see FIG1 , etc.), is positioned so as to protrude slightly below the bottom surface of the lower housing 5B through the through-hole 54B.

[0042] The frame 52 includes screw holes 52a, and similarly, the lower housing 5B includes screw holes 52c. The frame 52 and lower housing 5B are screwed together with the base 51 using these screw holes 52a and 52c to a predetermined position on an inspection device (not shown), such as a printed circuit board. When secured in the predetermined position, the contact components 21, such as the inspection probe 1, assembled on the base 51 of the inspection socket 5, are electrically connected to predetermined portions of the inspection device.

[0043] The electronic device (not shown) to be inspected is inserted into the recessed portion 57 formed by the inner wall surface 52b of the frame 52 and the surface 51a of the base 51. As a result, a specific portion of the electronic device, such as a specific solder ball of an IC circuit, is electrically and resiliently connected to each of the multiple contact points 21a of the contact member 21 arranged on the surface 51a of the base 51. Multiple electronic devices to be inspected can be plugged in and out of the inspection socket 5. For example, the power required to inspect the electronic device can be supplied by the inspection device. Current from the inspection device is supplied to the electronic device through the electrical connection between the inspection device and the contact points 22a of the contact member 22.

[0044] FIG19 shows a partially cutaway perspective view of the arrangement of the inspection probes 1 housed in the lower housing 5B, and FIG20 shows a schematic top view thereof. In the lower housing 5B, in addition to the through-hole 54B in the main body 11 of the housing, which houses the inspection probes 1, a retaining member 58 is provided around it to retain the shield 13 or shield member 15. The top view of FIG21 further illustrates the arrangement of the retaining member 58 and the through-hole 54B before the inspection probes 1 are installed, while FIG22 shows a cross-sectional perspective view taken along line AA in FIG21. As these figures clearly illustrate, the retaining member 58 is generally H-shaped when viewed from above. By providing the retaining member 58 within a recess 58a provided at a relative position to accommodate and retain the shield 13 or shield member 15 near its ends 13b and 15b, the inspection socket 5 allows for secure and stable installation of the inspection probe 1 and the like. Furthermore, by providing the holding members 58 at corresponding positions of the through holes 54B, the degree of freedom in design can be increased, allowing for any arrangement of the inspection probes.

[0045] With the aid of the teachings provided in the above description, one of ordinary skill in the art to which the present invention relates will be able to devise numerous modifications and alternative embodiments of the present invention. Furthermore, it will be apparent to one of ordinary skill in the art that variations and modifications may be made to the present invention without departing from the scope or spirit of the present invention. Therefore, it should be understood that the present invention is not limited to the specific embodiments disclosed, and that modifications and alternative embodiments are intended to be encompassed by the appended claims.

[0046] 1,1A~1H,9: Inspection probe 5: Inspection socket 10: Shell 11: Ontology part 13, 13B, 13D: Shielding 14: Depression 15: Shielding components 18: bulge 21: Contact parts 22: Contact parts 31: Elastic component 51: Matrix 52:Frame 57: Settings 58: Holding component 110: Shell 111: Ontology Department 11a: Circumference 13a: End 13b: End 13Ba: End 13Bb: Contour 13Db: bend 14a: end 15a: End 15b: End 21a: Multi-point contact part 22a: Contact portion 51a: Surface 51A: substrate 51B: substrate 52a: screw hole 52b: Inner wall surface 52c: screw hole 54A:Through hole 54B:Through hole 58a: Depression 5A: Upper shell 5B: Lower side shell

Claims

1. A probe for inspection, characterized in that it comprises: a hollow outer shell made of a conductive material; an elastic member disposed within the outer shell in a telescoping state in the axial direction; and a contact member disposed within the outer shell in a state where it is constantly biased by the elastic member and a portion of it protrudes outside the outer shell; wherein, The aforementioned housing comprises: a cylindrical body portion extending in the aforementioned axial direction; and a shielding portion disposed along the aforementioned axial direction on a portion of the circumferential surface of the aforementioned body portion, in a state of protruding in the aforementioned radial direction of the aforementioned body portion, and the dimension in the aforementioned axial direction is formed to be larger than the dimension in the aforementioned radial direction; or; wherein the aforementioned housing comprises: a cylindrical body portion extending in the aforementioned axial direction; and a recessed portion disposed along the aforementioned axial direction on a portion of the circumferential surface of the aforementioned body portion, in a state of being recessed in the aforementioned radial direction of the aforementioned body portion, and configured to allow the end of the aforementioned shielding portion and / or the end of the shielding member of other inspection probes to be connected to be disposed in the aforementioned recessed portion, wherein the dimensions in the aforementioned axial direction and the aforementioned shielding member are formed to be larger than the dimensions in the aforementioned radial direction.

2. The inspection probe as described in claim 1, wherein, On the surface intersecting the aforementioned axial direction, the aforementioned shielding portion or the aforementioned shielding component is arranged radially in a plurality of units.

3. The inspection probe as described in claim 1, wherein, On the surface intersecting the aforementioned axial direction, the aforementioned shielding portion or the aforementioned shielding component has a straight line shape extending with approximately a certain width.

4. The inspection probe as described in claim 1, wherein, On the surface intersecting the aforementioned axial direction, the aforementioned shielding portion or the aforementioned shielding component has a shape that tapers at the front end as it moves away from the aforementioned circumferential surface in the aforementioned radial direction.

5. The inspection probe as described in claim 4, wherein, On the surface intersecting the aforementioned axial direction, the profile of at least a portion of the aforementioned shielding portion or the aforementioned shielding component is curved.

6. The inspection probe as described in claim 1, wherein, It is constructed by connecting a plurality of inspection probes through the aforementioned shielding part or the aforementioned shielding component.

7. The inspection probe as described in claim 6, wherein, On the surface intersecting the aforementioned axial direction, the aforementioned shielding portion or the aforementioned shielding component has a curved portion that bends away from the arrangement direction of the mutually adjacent inspection probes connected by the aforementioned shielding portion or the aforementioned shielding component.

8. The inspection probe as described in claim 1, wherein, The aforementioned recessed portion is formed using the annular raised portion of the aforementioned body portion.

9. The inspection probe as described in claim 1, wherein, At least one end of the aforementioned recessed portion in the aforementioned axial direction is substantially closed in a surface intersecting the aforementioned axial direction.

10. An inspection socket for use with an inspection probe as claimed in any one of claims 1 to 9.

11. The inspection socket as described in claim 10, wherein, Around the hole of the support body that accommodates the aforementioned main body, a retaining member is provided to retain the aforementioned shielding part or the aforementioned shielding component.

12. The inspection socket as described in claim 10, wherein, The curved profile of the aforementioned shielding portion or the aforementioned shielding component of the inspection probe as described in claim 5 is positioned on a concentric circle that is substantially the same as the circumferential surface of the aforementioned body portion of the adjacent inspection probe.

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