Large format reticle container

Abstract

This invention provides a substrate container comprising an inner box configured to accommodate a large photomask and an outer box configured to house and secure the inner box. The inner box can be clamped together using a clamp or feature disposed on the outer box. The clamping feature of the outer box includes flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. The clamping mechanism can be actuated by physical, electrical, and / or magnetic features, such as placement of a door in an opening of a housing, operation of a latch, or interaction of a tool for releasing the clamping mechanism using mechanical, electrical, and / or magnetic forces.

Description

Large mask container The present invention relates to a substrate container configured to store and hold large photomasks. Reticle containers typically include standard mechanical interface (SMIF) boxes or modular boxes that include an inner box and an outer box shaped to accommodate a generally square reticle. The present invention relates to a substrate container configured to store and hold large photomasks. Reticles with larger sizes and / or different aspect ratios can provide superior lithography performance. These reticles will not fit into current reticle pods and / or the associated automation used to handle them. The large substrate container provided herein can use standard interfaces while securely holding the reticle in an inner pod that is fixed within an outer pod. In conventional reticle pods, the outer pod can be opened by lifting a pod dome and / or lowering a pod door, thereby opening it in a vertical direction. Vertical opening and closing of the outer pod facilitates clamping to maintain the position and closure of the inner pod and, optionally, further allows the reticle itself to be clamped. When using a pod suitable for storing large reticles, the outer pod can be opened horizontally. The substrate container provided herein allows for clamping of the inner pod and, in embodiments, a reticle housed therein, through suitable design of the outer pod and / or inclusion of a clamping mechanism therein. Thus, even large reticles can be secured in a horizontally open substrate container. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a bottom plate. The substrate container further includes an outer box configured to hold the inner box. The outer box has an opening on a front side of the outer box. The outer box includes first flanges on opposing sidewalls, the first flanges configured to support the inner box. In one embodiment, the outer box includes a second flange on the opposing side walls, and the respective first and second flanges on each respective side wall define a groove configured to receive the inner box so that the lid and the base are clamped. In one embodiment, the respective first and second flanges are angled relative to each other. In one embodiment, the inner box includes one or more reticle retention features, and the outer box includes one or more securing features configured to actuate the reticle retention features when the inner box is inserted into the outer box so that a reticle is clamped within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a base plate. The substrate container further includes an outer box configured to hold the inner box. The outer box includes an outer shell having an opening on a front side of the outer box and a door configured to be secured to cover the opening. The outer shell includes a first angled clamping surface, and the door includes a second angled clamping surface. The first and second angled clamping surfaces are configured to clamp the lid and base plate when the door is secured to the outer shell. The first and second angled clamping surfaces are configured to support the inner box when the inner box is oriented vertically or at an angle to the horizontal. In one embodiment, one of the first clamping surface or the second clamping surface further comprises an inner box retainer configured to maintain alignment between the lid and one of the base plates when the inner box rests on the second angled clamping surface. In one embodiment, the inner box includes one or more reticle retaining features, and at least one of the first angled clamping surface and the second angled clamping surface is configured to interface with at least some of the one or more reticle retaining features such that the at least some of the one or more reticle retaining features are actuated to clamp a reticle within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a base plate. The substrate container further includes an outer box configured to hold the inner box. The outer box includes an outer shell having an opening on a front side of the outer box. The substrate container further includes a clamp configured to attach to the inner box such that the clamp clamps the lid to the base plate. In one embodiment, the outer box includes one or more supports configured to receive one or more portions of the clamp such that when the clamp is attached to the inner box and the inner box is inserted into the outer box, the clamp is supported. In one embodiment, the outer box includes one or more supports configured to contact the inner box such that when the clamp is attached to the inner box and the inner box is inserted into the outer box, the inner box is supported by contact with the supports. In one embodiment, the inner box includes one or more reticle retaining features, and the clamp is configured to contact the one or more reticle retaining features such that the one or more reticle retaining features are actuated to clamp a reticle within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a bottom plate. The substrate container further includes an outer box configured to hold the inner box. The outer box includes an outer shell having an opening on a front side of the outer box and a door. The door includes a latch, a latch interface on an outward-facing side of the door, and an actuation interface on an inward-facing side of the door. The outer shell contains a clamping mechanism configured to interface with the actuation interface such that when the door is attached to the outer shell and the latch is operated to secure the door to the outer shell, the clamping mechanism is actuated to clamp the inner box within the outer box. In one embodiment, the actuation interface is configured to receive a receptacle of a corresponding protrusion included in the clamping mechanism. In one embodiment, the actuation interface is configured to receive a protrusion in a receptacle included in the clamping mechanism. In one embodiment, the inner box includes one or more reticle retention features, and the clamping mechanism is configured to contact the one or more reticle retention features such that the one or more reticle retention features are actuated to clamp a reticle within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a bottom plate. The substrate container further includes an outer box configured to hold the inner box. The outer box includes an outer shell having an opening on a front side of the outer box and a door. The door includes an actuation feature. The outer shell includes a clamping mechanism configured to interface with the actuation feature such that when the door is attached to the outer shell, the clamping mechanism is actuated to clamp the inner box within the outer box. In one embodiment, the actuating feature comprises a first magnet and the clamping mechanism comprises a second magnet, wherein the clamping mechanism is driven to clamp the inner box at least in part by the interaction of the first magnet and the second magnet. In one embodiment, the actuating feature comprises an actuating surface configured to contact a portion of the clamping mechanism such that the clamping mechanism is driven to clamp the inner box. In one embodiment, the clamping mechanism comprises a biasing spring configured to release the clamping mechanism when the door is removed from the outer shell. In one embodiment, the clamping mechanism comprises an arm secured by a pivot, wherein a clamping surface is disposed at one end of the arm. In one embodiment, the inner box comprises one or more mask retaining features, and the clamping mechanism is configured to contact the one or more mask retaining features such that the one or more mask retaining features are actuated to clamp a mask within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a bottom plate. The substrate further includes an outer box configured to hold the inner box. The outer box includes an outer shell having an opening on a bottom side of the outer box and a door. The outer box includes one or more latch controls disposed on a front wall of the outer box. The door includes an inner box support, and the outer shell includes one or more clamping surfaces such that when the inner box is placed on the inner box support and the door is positioned proximate the opening on the bottom side of the outer shell, the photomask is clamped between the one or more clamping surfaces and the inner box support. In one embodiment, the inner box includes one or more mask retaining features, and at least one of the inner box support and the one or more clamping surfaces are configured to contact the one or more mask retaining features so that the one or more mask retaining features are actuated to clamp a mask within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask. The inner box includes a lid and a bottom plate. The substrate container further includes an outer box configured to hold the inner box. The outer box includes an outer shell having an opening on a front side of the outer box, the outer shell including a clamping mechanism. The clamping mechanism is configured such that in a rest state, the clamping mechanism is positioned to clamp the inner box within the outer box, and in an actuated state, the clamping mechanism is positioned such that the inner box can be removed from the outer box. In one embodiment, the clamping mechanism is configured to be placed in the actuated state by applying a mechanical force at an actuation interface. In one embodiment, the actuation interface is disposed on a side wall of the housing. In one embodiment, the actuation interface is disposed on a bottom portion of the housing. In one embodiment, the actuation interface is disposed on a base plate attached to the housing. In one embodiment, the actuation interface is disposed between a base plate attached to the housing and a bottom portion of the housing. In one embodiment, the clamping mechanism comprises a shape memory material. In one embodiment, the clamping mechanism is configured to be placed in the actuated state by applying an electric current to an actuation surface. In one embodiment, the actuation surface is electrically connected to a shape memory material. In one embodiment, the actuation surface is positioned on an exterior of the housing. In one embodiment, the actuation surface is positioned within an interior space defined by the housing. In one embodiment, the clamping mechanism is configured to be placed in the actuated state by applying a magnetic field to an actuation surface. In one embodiment, the actuation surface comprises a magnet. In one embodiment, the actuation surface is positioned on an exterior of the housing. In one embodiment, the actuation surface is positioned within an interior space defined by the housing. In one embodiment, the inner box includes one or more reticle retaining features, and the clamping mechanism is configured to contact the one or more reticle retaining features such that the one or more reticle retaining features are actuated to clamp a reticle within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask, the inner box comprising a lid and a bottom plate. The substrate container further includes an outer box configured to hold the inner box, the outer box comprising an outer shell and a door. The door includes a contact surface, and the outer shell includes an inner box support platform and a clamping surface connected to the outer shell by one or more pivots. When the door is attached to the outer shell, the contact surface of the door contacts the inner box support platform, thereby driving the inner box support platform to move about the one or more pivots, such that the inner box is clamped between the inner box support platform and the clamping surface. In one embodiment, the inner box includes one or more mask retaining features, and one or both of the inner box support platform and the clamping surface include features configured to contact the one or more mask retaining features when the door is attached to the outer shell, so that the one or more mask retaining features are actuated to clamp a mask to one or more features within the inner box. In one embodiment, a substrate container includes an inner box configured to hold a large photomask, the inner box comprising a lid and a bottom plate. The substrate container further includes an outer box configured to hold the inner box, the outer box comprising an outer shell and a door. The door includes a sloped inner box support. The outer shell includes one or more inner box supports and a clamping surface. Each of the one or more inner box supports includes a flat portion and a sloped portion. When the door is attached to the outer shell, the sloped inner box support of the door is configured to support the inner box and drive the inner box along the sloped portion of the inner box support of the outer shell, causing the inner box to clamp against the clamping surface. In one embodiment, the inner box includes one or more mask retaining features, and the clamping surface includes one or more features configured to contact the one or more mask retaining features when the door is attached to the outer shell, so that the one or more mask retaining features are actuated to clamp a mask within the inner box. The present invention relates to a substrate container configured to store and hold large photomasks. As used herein, "inner box" refers to a box configured to house a photomask. As used herein, "outer box" refers to a box configured to contain an inner box. As used herein, a "large reticle" is a reticle having an increased size beyond a nominal size of six inches by six inches. In one embodiment, the large reticle may have a generally square shape. In one embodiment, the large reticle may have a rectangular shape. In one embodiment, the rectangular shape may have an aspect ratio between 1.5:1 and 2.5:1. As used herein, "FOUP" refers to a front-opening pod. In one embodiment, a FOUP may be configured to interface with a loadport, such as a 300 mm loadport. As used herein, "SMIF box" refers to a Standard Mechanical Interface box. FIG1 shows a substrate container according to one embodiment. The substrate container 100 includes an outer box 102, which includes an outer shell 104 and a door 106; and an inner box 108, which includes a lid 110 and a bottom plate 112. The inner box 108 is configured to accommodate a large photomask 114. The substrate container 100 is configured to securely hold the large photomask 114 within the inner box 108, and to securely hold the inner box 108 within the outer box 102. In one embodiment, the outer box 102 is configured to interface with a standard 300 mm loadport. In one embodiment, the outer box 102 is a FOUP modified to accommodate one or more mechanisms for holding the inner box 108, such as according to the example embodiments provided herein. In one embodiment, the outer box 102 may be a FOUP modified to present the door on the top or bottom side relative to the front of the outer box 102. In one embodiment, the substrate container 100 may be modified so that a large reticle 114 may be received in one of the SMIF pods. The door 106 may be used to close the outer pod 102 when the inner pod 108 is received therein. FIG2 illustrates a substrate container according to one embodiment. The substrate container 200 is shown in a cross-sectional view. The substrate container 200 includes an outer box 202 comprising an outer shell 204 and a door (not shown). The outer shell 204 includes a flange 206 defining a groove 208. The outer box 202 may further include one or more securing features 210 configured to interface with an inner box 212 at reticle retaining features 214. The inner box 212 also includes a lid 216 and a base 218. The substrate container 200 can be a modified FOUP or any other suitable cassette design. In one embodiment, the substrate container 200 is capable of interfacing with a 300 mm loadport. The substrate container 200 is configured to hold a reticle within the inner cassette 212 between the lid 216 and the base plate 218. In one embodiment, reticle retention features 214 can be provided to allow for the securement of the reticle within the inner cassette 212. As a non-limiting example, the reticle retention features 214 can be one or more vertically movable pins configured to clamp the reticle when actuated, for example, by contact between a securing feature 210 disposed in the outer cassette 202 and an actuating surface disposed on the reticle retention features 214. The outer shell 204 includes flanges 206. The flanges 206 define a groove 208 configured to receive the inner box 212. The flanges 206 can be spaced and / or angled such that the groove 208 is configured to exert a clamping force that urges the lid 216 and the base 218 together when the inner box 212 is inserted into the groove 208. In one embodiment, the flanges 206 defining the groove 208 are parallel to each other. In one embodiment, the flanges 206 defining the groove 208 are angled relative to each other such that the width of the groove 208 decreases as one moves from the opening of the outer box 202 toward a rear wall opposite the opening. In an embodiment in which the inner box 212 includes reticle retention features 214, securing features 210 may be further disposed in the outer box 202. The securing features 210 may be, for example, protrusions extending from the top, side, or bottom walls of the outer shell 204. The securing features 210 may be configured to interface with the reticle retention features 214, for example, pressing against an actuating surface on the reticle retention features 214 to actuate movable pins, causing the movable pins to apply a clamping force to secure the reticle within the inner box 212. In an embodiment in which the outer box 202 includes the securing features 210, one of the flanges 206 may be omitted. In such an embodiment, the remaining flange 206 may provide a shelf configured to support the inner box 212. In such an embodiment, the downward clamping force for securing the inner box 212 and the reticle contained therein may be provided by contact between the securing features 210 and the cover 216. FIG3A shows a substrate container according to one embodiment. The substrate container 300 includes an outer shell 302 and a door 304. The outer shell 302 includes at least one first angled clamping surface 306. The door 304 includes at least one second angled clamping surface 308. The door 304 may further include an inner cartridge holder 310. The inner cartridge 312 includes a lid 314 and a bottom plate 316. The inner cartridge 312 may further include reticle retaining features 318. When the inner cartridge 312 is to be stored within the outer shell 302, the inner cartridge 312 can be placed on the second angled clamping surface 308 provided on the door 304. In one embodiment, the inner cartridge retainer 310 can maintain the relative position of the lid 314 and the bottom plate 316 so that the inner cartridge 312 remains closed even when angled due to resting on the second angled clamping surface 308. The door 304 can be coupled to the outer shell 302, wherein the inner cartridge 312 and the second angled clamping surface 308 are guided into the interior space defined by the outer shell 302. The door 304 can be moved to a position in which the door 304 and the outer shell 302 can be latched to each other. When the door 304 is positioned for latching or when the door 304 is latched, the first angled clamping surface 306 can contact the inner cartridge 312. When the housing 302 and door 304 are engaged, the contact of the first and second angled clamping surfaces 306, 308 with the inner box 312 can provide a grip to hold the inner box 312 closed while allowing the door 304 to be opened and removed in a horizontal direction. In one embodiment, portions of the angled clamping surfaces 306 and / or 308 can interface with a reticle retention feature 318 of the inner box 312. The reticle retention feature 318 can be, for example, a movable post configured to be actuated from an exterior of the inner box 312 and thereby moved to grip a reticle housed within the inner box 312. When the housing 302 and door 304 are engaged, the interface of the portions of the angled clamping surfaces 306 and / or 308 with the reticle retention feature 318 can drive the reticle retention feature 318 to grip a reticle housed within the inner box 312. FIG3B shows a substrate container according to one embodiment. The substrate container 320 includes an outer box 322. The outer box 322 includes an outer shell 324 and a door 326. The outer shell 324 includes an angled inner box support 328. The door 326 includes an angled clamping surface 330. The angled inner box support 328 is configured to support an inner box 332 such that the inner box is angled relative to a horizontal direction. When the inner box 332 rests on the angled inner box support 328 and the door 326 is attached to the outer shell 324, the angled clamping surface 330 can contact the inner box 332 to clamp the inner box 332 against the angled inner box support 328. The inner box 332 can include a lid 334 and a base 336. The clamping of the inner box 332 can hold the lid 334 and base 336 together and maintain their positions. In one embodiment, the inner box 332 can further include a reticle retaining feature 338. The reticle retention features 338 can be, for example, movable posts configured to, when actuated, clamp a reticle housed within the inner box 332. The reticle retention features 338 can be actuated by respective features disposed on one or both of the angled inner box supports 328 and / or the angled clamping surface 330. FIG3C illustrates a substrate container according to one embodiment. The substrate container 340 includes an outer box 342. The outer box 342 includes an outer shell 344 and a door 346. The outer shell 344 includes a vertical inner box support 348. The door 346 includes a clamping surface 350. The vertical inner box support 348 is configured to support an inner box 352 such that a major plane of the inner box 352 and / or a reticle contained therein is oriented vertically. The vertical inner box support 348 may include one or more retaining features 354 to facilitate retaining the inner box 352 in a vertical orientation, for example, to prevent a lid 356 and a base plate 358 of the inner box 352 from separating while in the vertical orientation. When the inner box 352 rests on the vertical inner box support 348 and the door 346 is attached to the outer shell 344, the clamping surface 350 may contact the inner box 352 to clamp the inner box 352 against the vertical inner box support 348. The clamping of the inner box 352 can hold the lid 356 and the base plate 358 together and maintain their positions. In one embodiment, the inner box 352 can further include a reticle retaining feature 360. The reticle retaining feature 360 ​​can be, for example, a movable post configured to clamp a reticle housed in the inner box 352 when actuated. The reticle retaining feature 360 ​​can be actuated by respective features disposed on one or both of the vertical inner box supports 348 and / or the clamping surface 350. FIG4 illustrates a substrate container according to one embodiment. The substrate container 400 includes an outer box 402, which includes a housing 404 and a door (not shown). The outer box 402 includes a support member 406. The substrate container 400 further includes an inner box 408, which includes a lid 410 and a bottom plate 412. A fixture 414 is also provided. The outer box 402 can be defined by an outer shell 404. One or more supports 406 can be disposed within the interior space defined by the outer shell 406. The supports 406 are configured to support the inner box 408 within the space defined by the outer shell 404, either directly or via a support fixture 414. In one embodiment, the supports 406 are configured to receive one or more features of the fixture 414 to support the fixture 414 when the inner box 408 is retained within the fixture 414. In one embodiment, the supports 406 are one or more lugs, flanges, posts, struts, or any other such suitable features capable of directly supporting the inner box 408. The inner box 408 includes a lid 410 and a base plate 412 configured to accommodate a large photomask. The lid 410 and base plate 412 can be clamped together by one or more clamps 414. The clamp 414 includes at least one lid contact surface 416 and at least one base plate contact surface 418. The clamp 414 is configured so that the lid contact surface 416 and the base plate contact surface 418 are opposite and spaced apart from each other, enabling the clamp 414 to provide a clamping force that holds the lid 410 and base plate 412 together. The clamp 414 can be made of any suitable material that can be deformed to fit over the lid 410 and base plate 412 while being sufficiently resilient to exert a clamping force. As non-limiting examples, the clamp 414 can be a metal material, such as any suitable spring steel or polymer material. The clamp 414 can optionally include additional features, such as, for example, a flange 420 configured to be received in a groove provided as one or more support members 406 of the outer box 402. In one embodiment, additional features may include an actuation surface 422 for a reticle holder 424 disposed on the inner box 408. As a non-limiting example, the reticle holder 424 may be a movable pin configured to apply a clamping force to the reticle within the inner box 408, and the actuation surface 422 may be portions of the clamp 414 configured to contact the reticle holder 424 so as to urge the movable pin inward relative to the inner box 408 such that the clamping force is applied. FIG5 illustrates a substrate container according to one embodiment. The substrate container 500 includes an outer box 502 comprising an outer shell 504 and a door 506. The door 506 includes a latch operating interface 508 on an exterior-facing side of the door 506 and an actuation interface 510 on an interior-facing side of the door 506. The outer box 502 includes one or more holding elements 512 configured to be actuated by rotation transmitted by the actuation interface 510. The substrate container 500 further includes an inner box 514 comprising a lid 516, a bottom plate 518, and reticle holding features 520. The substrate container 500 is configured such that when the door 506 is latched to the housing 504, the latch of the door 506 also provides for clamping of the lid 516 to the base 518 via operation of a latch operating interface 508. The latch operating interface 508 can be any suitable interface capable of automated operation at a load port, such as a tab, a handle, a socket, or the like. Each latch operating interface 508 is configured to provide a force for operating the latch of the door 506 and further provide a force to one or more respective actuation interfaces 510. In one embodiment, one or more cams, gears, or other suitable mechanical connections can be used to transmit force from the latch operating interface 508 to the respective actuation interface 510. In one embodiment, the latch operating interface 508 can be directly connected to the actuation interface 510 such that rotation of the latch operating interface 508 rotates the respective actuation interface 510. One or more retaining elements 512 each include a portion configured to interface with a respective actuation interface 510. Actuation interface 510 can transmit force to respective retaining elements 512 to drive retaining elements 512 from a released position to a clamped position and vice versa. Retaining elements 512 can be configured to be in the released position when door 506 is unlatched from housing 504, and to be driven into the clamped position when door 506 is latched to housing 504. As a non-limiting example, the retaining element 512 may include a protrusion configured to be received in a socket provided in the respective actuation interface 510, and an oval-shaped contact member having a shape configured such that the contact member contacts a major axis of the inner cartridge when the latch operating interface 508 is operated to latch the door 506 to the housing 504, and a shape configured such that the contact member does not contact a minor axis of the inner cartridge when the latch operating interface 508 is operated to unlatch the door 506 from the housing 504. It should be understood that any suitable mechanical connection or combination thereof (such as gears, cams, lever arms, movable elements, and the like) may alternatively be used to provide one of the one or more retaining elements 512, so long as the retaining element 512 can be suitably driven between the clamped position and the released position by the force transmitted by the respective actuation interface 510. In one embodiment, at least some of the retaining elements 512 may include features configured to interface with mask retaining features 520 optionally disposed on the inner box 514 such that the mask retaining features (such as movable posts) are actuated to clamp a mask housed within the inner box 514 and thereby secure the mask within the inner box 514. FIG6 illustrates a substrate container according to one embodiment. The substrate container 600 includes an outer cartridge 602, which includes a housing 604 and a door 606. Either the door 606 or the housing 604 may include an actuator 608. The housing 604 includes an inner cartridge holder 610. The inner cartridge holder 610 includes an actuator interface 612, an arm 614, a pivot 616, and an inner cartridge contact 618. The substrate container 600 further includes an inner cartridge 620. The inner cartridge 620 includes a lid 622, a base plate 624, and reticle retaining features 626.The substrate container 600 is configured such that positioning the door 606 in an opening provided in the outer shell 604 actuates the inner cartridge holder 610 to clamp the inner cartridge 620 in position within the outer shell 602. The door 606 or the outer shell 604 may include an actuator 608. The actuator 608 is configured to act on an actuator interface 612 of the inner cartridge holder 610 to actuate the inner cartridge holder 610 into a clamped position. In one embodiment, the actuator 608 is a mechanical actuator, such as a contact point or contact surface provided on an interior portion of the door 606 that is configured to make direct physical contact with the actuator interface 612. In one embodiment, the actuator 608 is a magnetic actuator configured to apply a magnetic force to the actuation surface 612, for example, via a magnet included in the actuator 608. In one embodiment, the actuator 608 is a magnet disposed at one end of a plunger attached to the housing 604, wherein the plunger can be moved by contact with the door 606. The inner cartridge holder 610 can be any mechanical configuration configured to be driven by the actuator 608 such that the inner cartridge contact 618 contacts the inner cartridge 620 when the door 606 is positioned in an opening provided in the housing 604. As a non-limiting example, the inner cartridge holder 610 can include an arm 614 mounted on a pivot 616, wherein the actuator interface 612 is disposed at a first end of the arm 614 and the inner cartridge contact 618 is disposed at a second end of the arm 614 opposite the first end. When actuator 608 acts on actuator interface 612, arm 614 can be driven to rotate about pivot 616, bringing inner cartridge contact 618 into contact with inner cartridge 620, thereby clamping inner cartridge 620 against support features disposed in housing 604. Inner cartridge contact 618 can include a single contact point or multiple contact points connected by one or more beams. In one embodiment including multiple contact points, the contact points can be positioned such that contact between inner cartridge contact 618 and inner cartridge 620 is distributed across a surface of inner cartridge 620. In one embodiment, multiple inner cartridge holders 610 can be provided, wherein one or more of the multiple inner cartridge holders 610 are driven by a respective actuator 608 disposed in door 606. In such an embodiment, multiple actuators 608 can be disposed on door 606. In one embodiment, the arm 614 and the connected features can be configured such that when the actuator 608 is not present at or near the actuator interface 612, gravity causes the arm 614 to rotate about the pivot 616 to move to a released state. In one embodiment, a biasing spring 628 can be optionally provided to at least assist the arm 614 in rotating about the pivot 616 to move to a released state when the actuator 608 is not present at or near the actuator interface 612. In one embodiment, the inner box 620 includes reticle retaining features 626, such as movable posts, that are configured to be actuated to clamp a reticle housed within the inner box 620.In one embodiment, the inner box contact 618 may include one or more features that are configured to interface with one or more mask retaining features 626 when the inner box holder 610 is in a clamping position, so that the mask features 626 clamp the mask contained within the inner box 620. FIG7 illustrates a substrate container according to one embodiment. The substrate container 700 includes an outer box 702 having an outer shell 704 and a bottom door 706. The outer box 702 includes a front-mounted latch interface 708. An inner box clamping surface 710 and a reticle retention actuator 712 may be included in the outer box 702, such as in one or both of the outer shell 704 and the bottom door 706. The substrate container 700 further includes an inner box 714. The inner box 714 includes a lid 716, a bottom plate 718, and reticle retention features 720. The outer case 702 is configured such that when the door 706 is separated from the outer case, the outer case 704 and the door 706 can be separated by vertical movement of one or both of the outer case 704 and the door 706. The inner case clamping surface 710 can be configured such that when the door 706 is secured to the outer case 704, the lid 716 and the bottom plate 718 of the inner case 714 are clamped together. The substrate container 700 is configured to open vertically so that the lid 716 and the bottom plate 718 of the inner case 714 can remain aligned and held together by gravity during the opening and closing of the outer case 702. A front-mounted latch interface 708 is disposed on a front side of the outer case 704 and is configured to engage a load port. The front-mounted latch interface 708 is configured to be engaged automatically at the load port, allowing the latch to be operated to secure or release the door 706 from the outer case 704. The front-mounted latch interface 708 can be any suitable interface for loadport automation, such as a protrusion configured to engage and rotate, a socket configured to receive a protrusion from the automation, and the like. The front-mounted latch interface 708 is configured to transmit force provided by the loadport automation at the front of the housing 704 to operate a latch configured to hold or release the bottom-facing door 706. The automation provided at the loadport can include automation suitable for use with FOUPs and the manipulation of a FOUP's door latch. The inner box 714 may optionally include a reticle retention feature 720 to clamp the reticle within the inner box 714. As a non-limiting example, the reticle retention feature 720 may be a movable post that can be driven by contact with the reticle retention actuator 712 to contact the reticle, thereby clamping the reticle so that the reticle is fixed within the inner box 714. The reticle retention actuator 712 may be a protrusion disposed at a suitable position and height to actuate the reticle retention feature 720 when the door 706 is secured to the outer housing 704, causing the reticle retention feature 720 to clamp the reticle. FIG8 shows a substrate container according to one embodiment. The substrate container 800 includes an outer box 802, which includes an outer shell 804, a door (not shown), and a bottom plate 806. An inner box holder 808 is disposed in the outer box 802. An actuator interface 810 is provided and connected to the inner box holder 808. The substrate container 800 further includes an inner box 812. The inner box 812 includes a lid 814, a bottom plate 816, and reticle retention features 818. The outer box 802 can be any suitable box for housing the inner box 812. In one embodiment, the outer box 802 is a FOUP or a modified FOUP. In one embodiment, the outer box 802 is configured to be compatible with a loadport, such as a 300 mm loadport. The inner box retainer 808 is configured to clamp the lid 814 and base plate 816 of the inner box 812 together when in a non-actuated state, for example, by using a spring force to drive one or more retaining elements to contact at least one of the lid 814 and base plate 816. In one embodiment, a spring providing the spring force can extend from a top surface of the interior space defined by the outer shell 804. In one embodiment, the spring providing the spring force can be connected to a spring support member disposed within the interior space defined by the outer shell 804. The inner box retainer 808 can be moved to an actuated state by applying a mechanical force at the actuator interface 810. In the actuated state, the inner box retainer 808 can release the inner box 812 so that the inner box 812 can be removed from the outer box 802. The actuator interface 810 can be physically connected to the inner cartridge holder 808, for example, via any suitable combination of mechanical features (such as a plunger, contact surfaces, lever arms, and the like), such that a force applied to the actuator interface 810 is transmitted to the inner cartridge holder 808 to move the inner cartridge holder 808 to an actuated state in which the inner cartridge 812 is released. The actuator interface can be contacted by a protrusion or other suitable interacting feature provided on a tool used with the substrate container 800, such as a tool configured to manipulate the inner cartridge 812. In one embodiment, the actuator interface 810 is provided on the base plate 806. In one embodiment, the actuator interface 810 can be provided at a retention feature on the base plate 806 (e.g., a standard front retention feature, a standard center retention feature, or the like). In one embodiment, the actuator interface is provided between the base plate 806 and the housing 804. In one embodiment, the actuator interface 810 is disposed on the housing 804. In one embodiment, the actuator interface 810 is disposed on a top wall, a side wall, or a rear wall of the housing 804. In one embodiment, the actuator interface 810 is disposed on a bottom wall of the housing 804 and is accessible through an opening disposed in the bottom plate 806. In one embodiment, when a force is no longer applied at the actuator interface 810, or when the force is below a threshold force, the inner cartridge retainer 808 can return to a non-actuated state, gripping the inner cartridge 812 and thereby securely retaining the inner cartridge 812.In one embodiment, after the inner cartridge 812 is placed within the outer cartridge 802, the inner cartridge holder 808 can be returned to a clamped state by another operation performed by a tool (e.g., by mechanical, electrical, or magnetic manipulation). In one embodiment, one or more features of the inner cartridge holder 808 can be configured to interface with one or more reticle retaining features 818 disposed on the inner cartridge 812. The reticle retaining features 818 can be configured to apply a clamping force to a reticle, for example, by being movable posts that can be actuated to clamp the reticle when interfacing with a reticle housed within the inner cartridge 812. The interface between the inner cartridge holder 808 and the one or more reticle retaining features 818 can occur when the inner cartridge holder 808 is in a non-actuated position in which the inner cartridge holder 808 clamps the inner cartridge 812. The interface of the inner cassette holder 808 with one or more reticle retaining features 818 can actuate the reticle retaining features 818 to apply a clamping force to the reticle. FIG9 illustrates a substrate container according to one embodiment. The substrate container 900 includes an outer box 902, which includes an outer shell 904, a door (not shown), and an inner box holder 906. The inner box holder 906 may include a magnetic actuation interface 908. The substrate container 900 includes an inner box 910. The inner box 910 includes a lid 912, a bottom plate 914, and reticle retention features 916. The outer box 902 may be any suitable box for housing the inner box 910. In one embodiment, the outer box 902 is a FOUP or a modified FOUP. In one embodiment, the outer box 902 is configured to be compatible with a loadport, such as a 300 mm loadport. The inner cartridge holder 906 is configured to clamp the lid 912 and base 914 of the inner cartridge 910 together when in an unactuated state, for example, by using a spring force to drive one or more retaining elements into contact with at least one of the lid 912 and base 914. In one embodiment, a spring providing the spring force may extend from a top surface of the interior space defined by the outer shell 904. In another embodiment, the spring providing the spring force may be connected to a spring support disposed within the interior space defined by the outer shell 904. The inner cartridge holder 906 may be moved to an actuated state by applying a magnetic force at the magnetic actuation interface 908. In the actuated state, the inner cartridge holder 906 may release the inner cartridge 910, allowing it to be removed from the outer cartridge 902. In one embodiment, the inner cartridge holder 906 may be actuated using a magnet that repels another magnet disposed in the magnetic actuation interface 908. The magnetic actuation interface 908 can be configured to be operated by a tool, such as a tool configured to handle the inner cartridge 910 when the door is removed and a portion of the tool extends into the interior space defined by the outer shell 904. The magnetic actuation interface 908 can include a magnet that is repelled by another magnet disposed on the tool, thereby driving the inner cartridge holder 906 to an actuated state, releasing the inner cartridge 910. In one embodiment, when the magnet on the tool is no longer in proximity to the magnetic actuation interface 908, the inner cartridge holder 906 can return to a non-actuated state, gripping the inner cartridge 910 and thereby securely holding the inner cartridge 910. In one embodiment, after the inner cartridge 910 is placed within the outer shell 902, the inner cartridge holder 906 can be returned to the gripped state by another operation performed by the tool (e.g., by mechanical, electrical, and / or magnetic manipulation). In one embodiment, one or more features of the inner cartridge holder 906 can be configured to interface with one or more reticle retaining features 916 disposed on the inner cartridge 910. The reticle retaining features 916 can be configured to apply a clamping force to the reticle, for example, by serving as movable posts that can be actuated to clamp the reticle when interfacing with a reticle housed within the inner cartridge 910. The interface of the inner cartridge holder 906 and the one or more reticle retaining features 916 can occur when the inner cartridge holder 906 is in a non-actuated position in which the inner cartridge holder 906 clamps the inner cartridge 910.The interface of the inner cassette holder 906 with one or more reticle retaining features 916 can actuate the reticle retaining features 916 to apply a clamping force to the reticle. FIG10 illustrates a substrate container according to one embodiment. The substrate container 1000 includes an outer box 1002, which includes an outer shell 1004, a door (not shown), and an inner box holder 1006. The inner box holder 1006 may include an electro-actuation interface 1008. The substrate container 1000 includes an inner box 1010. The inner box 1010 includes a lid 1012, a bottom plate 1014, and reticle retention features 1016. The outer box 1002 can be any suitable box for housing the inner box 1010. In one embodiment, the outer box 1002 is a FOUP or a modified FOUP. In one embodiment, the outer box 1002 is configured to be compatible with a loadport, such as a 300 mm loadport. The inner cartridge holder 1006 is configured to clamp the lid 1012 and base plate 1014 of the inner cartridge 1010 together when in a non-actuated state, for example, by using a spring force to drive one or more retaining elements to contact at least one of the lid 1012 and base plate 1014. In one embodiment, a spring providing the spring force can extend from a top surface of the interior space defined by the outer shell 1004. In one embodiment, the spring providing the spring force can be connected to a spring support member disposed within the interior space defined by the outer shell 1004. The inner cartridge holder 1006 can be moved to an actuated state by applying an electric current at the electrical actuation interface 1008. In the actuated state, the inner cartridge holder 1006 can release the inner cartridge 1010 so that the inner cartridge 1010 can be removed from the outer box 1002. In one embodiment, actuation of the inner cartridge holder 1006 can be performed using an electric actuator operated by applying an electric current at an electric actuation interface 1008. In one embodiment, the inner cartridge holder 1006 can include at least one element of a shape memory material configured to move to an actuated state (shown in dashed lines) when an electric current is supplied to the electric actuation interface 1008. The electric actuation interface 1008 can be configured to be contacted by a tool, such as a tool configured to handle the inner cartridge 1010 when the door is removed and a portion of the tool is extended into the interior space defined by the outer shell 1004. The electric actuation interface 1008 can include contacts to which the tool can supply power, thereby driving the inner cartridge holder 1006 to the actuated state, releasing the inner cartridge 1010. In one embodiment, when power is not provided or when the applied voltage and / or current drops below a threshold, the inner cartridge holder 1006 can return to a non-actuated state, clamping the inner cartridge 1010 and thereby securely holding the inner cartridge 1010. In one embodiment, after the inner cartridge 1010 is placed within the outer cartridge 1002, the inner cartridge holder 1006 can return to a clamped state by another operation performed by a tool (e.g., by mechanical, electrical, or magnetic manipulation). In one embodiment, one or more features of the inner cartridge holder 1006 can be configured to interface with one or more reticle retention features 1016 disposed on the inner cartridge 1010.The reticle retaining features 1016 can be configured to apply a clamping force to the reticle, for example, by being movable posts that can be actuated to clamp the reticle when interfacing with a reticle housed within the inner cartridge 1010. The interfacing of the inner cartridge holder 1006 with the one or more reticle retaining features 1016 can occur when the inner cartridge holder 1006 is in a non-actuated position in which the inner cartridge holder 1006 clamps the inner cartridge 1010. The interfacing of the inner cartridge holder 1006 with the one or more reticle retaining features 1016 can actuate the reticle retaining features 1016 to apply a clamping force to the reticle. FIG11 illustrates a substrate container according to one embodiment. The substrate container 1100 includes an outer cartridge 1102. The outer cartridge 1102 includes an outer shell 1104 and a door 1106. The outer shell 1104 includes an inner cartridge support platform 1108 supported by one or more pivots 1110. The inner cartridge support platform 1108 further includes a door contact 1112. The outer shell 1104 further includes one or more clamping surfaces 1114 positioned above the inner cartridge support platform 1108. The door 1106 includes a contact surface 1116 configured to contact the inner cartridge support platform 1108. The inner cartridge 1118 is configured to be placed on the inner cartridge support platform 1108. The inner cartridge 1118 includes a lid 1120 and a bottom plate 1122. The inner box 1118 can further include reticle retention features 1124, such as movable posts, configured to clamp a reticle within the inner box 1118 when the reticle retention features 1124 are actuated. When the inner box 1118 is placed on the inner box support platform 1108 and the door 1106 is attached to the outer housing 1104, the door contacts 1112 can be contacted by contact surfaces 1116 provided on the door 1106, thereby driving the inner box support platform 1108 to rotate about one or more pivots 1110, thereby raising the inner box support platform 1108 so that the inner box 1118 is clamped between the inner box support platform 1108 and the one or more clamping surfaces 1114. In one embodiment, at least one of the inner box support platform 1108 and the one or more clamping surfaces 1114 may include one or more features configured to interface with the reticle retaining features 1124 so as to actuate the reticle retaining features 1124 to clamp a reticle within the inner box 1118 . FIG12 illustrates a substrate container according to one embodiment. The substrate container 1200 includes an outer box 1202. The outer box 1202 includes an outer shell 1204 and a door 1206. The outer shell 1204 includes one or more inner box supports 1208, each including a ramped portion 1210. The outer shell 1204 further includes one or more inner box clamping surfaces 1212. The door 1206 includes a ramped inner box support 1214. The substrate container 1200 further includes an inner box 1216, which includes a lid 1218 and a bottom plate 1220. The inner box 1216 may further include one or more reticle retaining features 1222. The inner box support 1208 may be a shelf, platform, or one or more flanges extending from the outer shell 1204 and configured to support the inner box 1216 within the interior space defined by the outer shell 1204. The inner cartridge support 1208 and the inner cartridge clamping surface 1212 can be spaced apart such that the inner cartridge 1216 can rest on a flat portion of the inner cartridge support 1208 without contacting the inner cartridge clamping surface 1212 and can be easily placed in or removed from the substrate container 1200. When the inner cartridge 1216 is placed on the inner cartridge support 1208 and the door 1206 is attached to the outer housing 1204, the ramped inner cartridge support 1214 can push the inner cartridge 1216 rearward to rise along the ramp portion 1210, thereby lifting the inner cartridge 1216 on the ramp portion 1210 and the ramped inner cartridge support 1214 such that the inner cartridge 1216 is clamped against the inner cartridge clamping surface(s) 1212. In one embodiment, the housing 1204 may contain one or more features configured to actuate one or more reticle retention features 1222 to clamp a reticle housed within the inner box 1216 when the door 1206 is attached to the housing 1204 . Style: Aspect 1. A substrate container comprising: an inner box configured to accommodate a large photomask, the inner box comprising a lid and a bottom plate; and an outer box configured to accommodate the inner box, the outer box having an opening on a front side thereof, the outer box comprising first flanges on opposite sidewalls, the first flanges configured to support the inner box. Aspect 2. The substrate container according to Aspect 1, wherein the outer box comprises second flanges on the opposing side walls, the respective first flanges and second flanges on each respective side wall defining a groove configured to receive the inner box such that the lid and the bottom plate are clamped. Aspect 3. The substrate container of Aspect 2, wherein the respective first flanges and second flanges are angled relative to each other. Aspect 4. The substrate container of any one of aspects 1 to 3, wherein the inner box comprises one or more mask retaining features, and the outer box comprises one or more securing features configured to actuate the mask retaining features when the inner box is inserted into the outer box such that a mask is clamped within the inner box. Aspect 5. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; and an outer box configured to house the inner box, the outer box comprising an outer shell having an opening on a front side of the outer box and a door configured to be secured so as to cover the opening, the outer shell comprising a first angled clamping surface and the door comprising a second angled clamping surface, wherein the first angled clamping surface and the second angled clamping surface are configured to clamp the lid and the bottom plate when the door is secured to the outer shell, wherein the first angled clamping surface and the second angled clamping surface are configured to support the inner box when the inner box is oriented vertically or at an angle to a horizontal direction. Aspect 6. The substrate container of Aspect 5, wherein one of the first clamping surface or the second clamping surface further comprises an inner box retainer configured to maintain alignment of the lid and one of the bottom plates when the inner box rests on the second angled clamping surface. Aspect 7. The substrate container of any one of aspects 5 to 6, wherein the inner box comprises one or more mask-retaining features, and at least one of the first angled clamping surface and the second angled clamping surface is configured to interface with at least some of the one or more mask-retaining features such that the at least some of the one or more mask-retaining features are actuated to clamp a mask within the inner box. Aspect 8. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; an outer box configured to house the inner box, the outer box comprising an outer shell having an opening on a front side of the outer box; and a clamp configured to attach to the inner box such that the clamp clamps the lid to the bottom plate. Aspect 9. The substrate container of Aspect 8, wherein the outer box comprises one or more supports configured to receive one or more portions of the clamp such that the clamp is supported when the clamp is attached to the inner box and the inner box is inserted into the outer box. Aspect 10. The substrate container of Aspect 8, wherein the outer box comprises one or more supports configured to contact the inner box such that when the clamp is attached to the inner box and the inner box is inserted into the outer box, the inner box is supported by contact with the supports. Aspect 11. The substrate container of any one of Aspects 8 to 10, wherein the inner box comprises one or more reticle-retaining features, and the clamp is configured to contact the one or more reticle-retaining features such that the one or more reticle-retaining features are actuated to clamp a reticle within the inner box. Aspect 12. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; and an outer box configured to house the inner box, the outer box comprising an outer shell having an opening on a front side of the outer box and a door, wherein the door comprises a latch, a latch interface on an exterior-facing side of the door, and an actuation interface on an interior-facing side of the door, and wherein the outer shell contains a clamping mechanism configured to interface with the actuation interface such that when the door is attached to the outer shell and the latch is operated to secure the door to the outer shell, the clamping mechanism is actuated to clamp the inner box within the outer box. Aspect 13. The substrate container of Aspect 12, wherein the actuation interface is configured to receive a receptacle of a corresponding protrusion included in the clamping mechanism. Aspect 14. The substrate container of Aspect 12, wherein the actuation interface is configured to receive a protrusion in a socket included in the clamping mechanism. Aspect 15. The substrate container of any one of Aspects 12 to 14, wherein the inner box comprises one or more reticle-retaining features, and the clamping mechanism is configured to contact the one or more reticle-retaining features such that the one or more reticle-retaining features are actuated to clamp a reticle within the inner box. Aspect 16. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; an outer box configured to house the inner box, the outer box comprising an outer shell having an opening on a front side of the outer box and a door, wherein the door comprises an actuation feature, and wherein the outer shell contains a clamping mechanism configured to interface with the actuation feature such that when the door is attached to the outer shell, the clamping mechanism is actuated to clamp the inner box within the outer box. Aspect 17. The substrate container of aspect 16, wherein the actuation feature comprises a first magnet and the clamping mechanism comprises a second magnet, wherein the clamping mechanism is driven to clamp the inner box at least in part by interaction of the first magnet and the second magnet. Aspect 18. The substrate container of any one of Aspects 16 to 17, wherein the actuation feature comprises a portion configured to contact the clamping mechanism such that the clamping mechanism is actuated to clamp an actuation surface of the inner box. Aspect 19. The substrate container of any one of Aspects 16 to 18, wherein the clamping mechanism comprises a biasing spring configured to release the clamping mechanism when the door is removed from the housing. Aspect 20. The substrate container according to any one of Aspects 16 to 19, wherein the clamping mechanism comprises an arm fixed by a pivot, wherein a clamping surface is provided at one end of the arm. Aspect 21. The substrate container of any one of aspects 16 to 20, wherein the inner box comprises one or more mask-retaining features, and the clamping mechanism is configured to contact the one or more mask-retaining features such that the one or more mask-retaining features are actuated to clamp a mask within the inner box. Aspect 22. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; an outer box configured to house the inner box, the outer box comprising an outer shell having an opening on a bottom side of the outer box and a door, wherein the outer box comprises one or more latch controls disposed on a front wall of the outer box, wherein the door comprises an inner box support, and the outer shell comprises one or more clamping surfaces such that when the inner box is placed on the inner box support and the door is positioned proximate the opening on the bottom side of the outer shell, the photomask is clamped between the one or more clamping surfaces and the inner box support. Aspect 23. The substrate container of aspect 22, wherein the inner box comprises one or more mask retaining features, and at least one of the inner box support and the one or more clamping surfaces is configured to contact the one or more mask retaining features such that the one or more mask retaining features are actuated to clamp a mask within the inner box. Aspect 24. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; an outer box configured to house the inner box, the outer box comprising an outer shell having an opening on a front side of the outer box, the outer shell comprising a clamping mechanism, the clamping mechanism being configured such that in a rest state, the clamping mechanism is positioned to clamp the inner box within the outer box, and when in an actuated state, the clamping mechanism is positioned such that the inner box can be removed from the outer box. Aspect 25. The substrate container of Aspect 24, wherein the clamping mechanism is configured to be placed in the actuated state by applying a mechanical force at an actuation interface. Aspect 26. The substrate container of Aspect 25, wherein the actuation interface is disposed on a side wall of the housing. Aspect 27. The substrate container of Aspect 25, wherein the actuation interface is disposed on a bottom portion of the housing. Aspect 28. The substrate container of Aspect 25, wherein the actuation interface is disposed on a base plate attached to the housing. Aspect 29. The substrate container of Aspect 25, wherein the actuation interface is disposed between a bottom portion of the housing and a base plate attached to the housing. Aspect 30. The substrate container of any one of Aspects 24 to 29, wherein the clamping mechanism comprises a shape memory material. Aspect 31. The substrate container of Aspect 24, wherein the clamping mechanism is configured to be placed in the actuated state by applying an electric current to an actuation surface. Aspect 32. The substrate container of Aspect 31, wherein the actuating surface is electrically connected to a shape memory material. Aspect 33. The substrate container of any one of Aspects 31-32, wherein the actuation surface is positioned on an exterior of the housing. Aspect 34. The substrate container of any one of Aspects 31-32, wherein the actuation surface is positioned within an interior space defined by the housing. Aspect 35. The substrate container of Aspect 24, wherein the clamping mechanism is configured to be placed in the actuated state by applying a magnetic field to an actuation surface. Aspect 36. The substrate container of Aspect 35, wherein the actuation surface comprises a magnet. Aspect 37. The substrate container of any one of Aspects 35 to 36, wherein the actuation surface is positioned on an exterior of the housing. Aspect 38. The substrate container of any one of Aspects 35 to 36, wherein the actuation surface is positioned within an interior space defined by the housing. Aspect 39. The substrate container of any one of aspects 24 to 38, wherein the inner box comprises one or more mask-retaining features, and the clamping mechanism is configured to contact the one or more mask-retaining features such that the one or more mask-retaining features are actuated to clamp a mask within the inner box. Aspect 40. A substrate container comprising: an inner box configured to accommodate a large photomask, the inner box comprising a lid and a bottom plate; an outer box configured to accommodate the inner box, the outer box comprising an outer shell and a door, wherein the door comprises a contact surface, and wherein the outer shell contains an inner box support platform and a clamping surface connected to the outer shell by one or more pivots, wherein when the door is attached to the outer shell, the contact surface of the door contacts the inner box support platform to drive the inner box support platform to move about the one or more pivots such that the inner box is clamped between the inner box support platform and the clamping surface. Aspect 41. A substrate container according to aspect 40, wherein the inner box includes one or more mask retaining features, and one or both of the inner box support platform and the clamping surface include one or more features configured to contact the one or more mask retaining features when the door is attached to the outer shell, so that the one or more mask retaining features are actuated to clamp a mask to the one or more features within the inner box. Aspect 42. A substrate container comprising: an inner box configured to house a large photomask, the inner box comprising a lid and a bottom plate; an outer box configured to house the inner box, the outer box comprising an outer shell and a door, wherein the door comprises a sloped inner box support, and wherein the outer shell comprises one or more inner box supports and a clamping surface, each of the one or more inner box supports comprising a flat portion and a sloped portion, wherein when the door is attached to the outer shell, the sloped inner box support of the door is configured to support the inner box and drive the inner box along the sloped portion of the inner box support of the outer shell such that the inner box is clamped against the clamping surface. Aspect 43. A substrate container according to aspect 42, wherein the inner box includes one or more mask retaining features, and the clamping surface includes one or more features configured to contact the one or more mask retaining features when the door is attached to the outer shell, so that the one or more mask retaining features are actuated to clamp a mask within the inner box. The examples disclosed in this application should be considered in all respects as illustrative and non-restrictive. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes that fall within the meaning and range of equivalents of the claims are intended to be encompassed therein. 100: substrate container 102: outer box 104: housing 106: door 108: inner box 110: lid 112: base plate 200: substrate container 202: outer box 204: housing 206: flange 208: groove 210: securing feature 212: inner box 214: reticle retaining feature 216: lid 218: base plate 300: substrate container 302: housing 304: door 306: first angled clamping surface 308: second angled clamping surface 310: inner box retainer 312: inner box 314: lid 316: base plate 318: reticle retaining feature 320: substrate container 322: outer box 324: housing 326: door 330 28: Angled inner box support 330: Angled clamping surface 332: Inner box 334: Lid 336: Bottom plate 338: Reticle retention feature 340: Substrate container 342: Outer box 344: Housing 346: Door 348: Vertical inner box support 350: Clamping surface 352: Inner box 354: Retention feature 356: Lid 358: Bottom plate 360: Reticle retention feature 400: Substrate container 402: Outer box 404: Housing 406: Support 408: Inner box 410: Lid 412: Bottom plate 414: Clamp 416: Lid contact surface 418: Bottom plate contact surface 420: Flange 422: Actuation surface 424: Reticle Hood Holder 500: Substrate Container 502: Outer Cassette 504: Housing 506: Door 508: Latch Operating Interface 510: Actuation Interface 512: Retention Element 514: Inner Cassette 516: Lid 518: Bottom Plate 520: Reticle Retention Feature 600: Substrate Container 602: Outer Cassette 604: Housing 606: Door 608: Actuator 610: Inner Cassette Holder 612: Actuator Interface 614: Arm 616: Pivot 618: Inner Cassette Contact 620: Inner Cassette 622: Lid 624: Bottom Plate 626: Reticle Retention Feature 628: Bias Spring 700: Substrate Container 702: Outer Cassette 704: Housing 706: Bottom-Side Door 708 : Front Mount Latch Interface 710 : Inner Cassette Clamping Surface 712 : Mask Retention Actuator 714 : Inner Cassette 716 : Lid 718 : Bottom Plate 720 : Mask Retention Feature 800 : Substrate Container 802 : Outer Cassette 804 : Housing 806 : Bottom Plate 808 : Inner Cassette Retainer 810 : Actuator Interface 812 : Inner Cassette 814 : Lid 816 : Bottom Plate 818 : Mask Retention Feature 900 : Substrate Container 902 : Outer Cassette 904 : Housing 906 : Inner Cassette Retainer 908 : Magnetic Actuation Interface 910 : Inner Cassette 912 : Lid 914 : Bottom Plate 916 : Mask Retention Feature 1000 : Substrate Container 1002 : Outer Cassette 1004 : Housing1006: Inner Cartridge Holder 1008: Electro-Actuation Interface 1010: Inner Cartridge 1012: Lid 1014: Bottom Plate 1016: Mask Retention Feature 1100: Substrate Container 1102: Outer Cartridge 1104: Housing 1106: Door 1108: Inner Cartridge Support Platform 1110: Pivot 1112: Door Contact 1114: Clamping Surface 1116: Contact Surface 1118: Inner Cartridge 1120: Lid 1122: Bottom Plate 1124: Mask Retention Feature 1200: Substrate Container 1202: Outer Cartridge 1204: Housing 1206: Door 1208: Inner Cartridge Support 1210: Ramp Portion 1212: Inner Cartridge Clamping Surface 1214: Ramp Inner Cartridge Support 1216: Inner Cartridge 1218: Lid 1220: Bottom Plate 1222: Mask Retention Feature FIG. 1 shows a substrate container according to one embodiment. FIG. 2 shows a substrate container according to one embodiment. FIG. 3A shows a substrate container according to one embodiment. FIG. 3B shows a substrate container according to one embodiment. FIG. 3C shows a substrate container according to one embodiment. FIG. 4 shows a substrate container according to one embodiment. FIG. 5 shows a substrate container according to one embodiment. FIG. 6 shows a substrate container according to one embodiment. FIG. 7 shows a substrate container according to one embodiment. FIG. 8 shows a substrate container according to one embodiment. FIG. 9 shows a substrate container according to one embodiment. FIG. 10 shows a substrate container according to one embodiment. FIG. 11 shows a substrate container according to one embodiment. FIG. 12 shows a substrate container according to one embodiment. 100:Substrate container 102: Outer box 104: Shell 106: Door 108: Inner box 110: Cover 112: Bottom plate

Claims

1. A substrate container, comprising: An inner box configured to house a large photomask, the inner box including a lid and a base plate; and an outer box configured to house the inner box, the outer box having an opening on one of its front sides, the outer box including first flanges on opposite sidewalls configured to support the inner box, wherein the outer box includes second flanges on opposite sidewalls, the respective first flanges and second flanges on each of the respective sidewalls defining a groove configured to receive the inner box such that the lid and the base plate are clamped.

2. The substrate container of claim 1, wherein the respective first flange and second flange are at an angle relative to each other.

3. The substrate container of claim 1, wherein the inner box includes one or more photomask holding features, and the outer box includes one or more fixing features configured to actuate the photomask holding features when the inner box is inserted into the outer box, such that a photomask is clamped in the inner box.

4. A substrate container, comprising: An inner box configured to house a large photomask, the inner box including a cover and a base plate; and an outer box configured to house the inner box, the outer box including a shell having an opening on one of its front sides and a door configured to be fixed to cover the opening, the shell including a first angled clamping surface and the door including a second angled clamping surface, wherein the first angled clamping surface and the second angled clamping surface are configured to clamp the cover and the base plate when the door is fixed to the shell, wherein the first angled clamping surface and the second angled clamping surface are configured to support the inner box when the inner box is vertically oriented or oriented at an angle to a horizontal direction.

5. The substrate container of claim 4, wherein one of the first angled clamping surface or the second angled clamping surface further includes an inner box retainer configured to maintain alignment of the lid with one of the base plates when the inner box is placed on the second angled clamping surface.

6. The substrate container of claim 4, wherein the inner box includes one or more photomask holding features, and at least one of the first angled clamping surface and the second angled clamping surface is configured to interface with at least some of the one or more photomask holding features, such that the at least some of the one or more photomask holding features are actuated to hold a photomask in the inner box.

7. A substrate container, comprising: An inner box configured to house a large photomask, the inner box comprising a lid and a base plate; An outer box configured to house the inner box, the outer box including a shell having an opening on one of its front sides; and a clamp configured to attach to the inner box such that the clamp holds the cover to the base plate.

8. The substrate container of claim 7, wherein the outer box includes one or more supports configured to receive one or more portions of the clamp such that the clamp is supported when the clamp is attached to the inner box and the inner box is inserted into the outer box.

9. The substrate container of claim 7, wherein the outer box includes one or more support members configured to contact the inner box such that when the clamp is attached to the inner box and the inner box is inserted into the outer box, the inner box is supported by contact with the support members.

10. The substrate container of claim 7, wherein the inner box includes one or more photomask holding features, and the clamp is configured to contact the one or more photomask holding features such that the one or more photomask holding features are actuated to hold a photomask within the inner box.

11. A substrate container, comprising: An inner box configured to house a large photomask, the inner box comprising a lid and a base plate; An outer box configured to house the inner box includes a housing and a door, wherein the door includes a contact surface, and wherein the housing includes an inner box support platform and a clamping surface connected to the housing by one or more pivots, wherein when the door is attached to the housing, the contact surface of the door contacts the inner box support platform to drive the inner box support platform to move about the one or more pivots, such that the inner box is clamped between the inner box support platform and the clamping surface.

12. The substrate container of claim 11, wherein the inner box includes one or more photomask holding features, and one or both of the inner box support platform and the clamping surface include features configured to contact the one or more photomask holding features when the door is attached to the outer casing, such that the one or more photomask holding features are actuated to clamp a photomask within the one or more features of the inner box.

13. A substrate container, comprising: An inner box configured to house a large photomask, the inner box comprising a lid and a base plate; An outer box configured to house the inner box, the outer box comprising a housing and a door, wherein the door includes a ramped inner box support, and wherein the housing includes one or more inner box supports and a clamping surface, each of the one or more inner box supports including a flat portion and a ramped portion, wherein when the door is attached to the housing, the ramped inner box support of the door is configured to support the inner box and drive the inner box along the ramped portion of the inner box support of the housing, such that the inner box is clamped against the clamping surface.

14. The substrate container of claim 13, wherein the inner box includes one or more photomask holding features, and the clamping surface includes features configured to contact the one or more photomask holding features when the door is attached to the outer casing, such that the one or more photomask holding features are actuated to clamp a photomask within one or more features in the inner box.

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