Method of carbon capture and recycling tetramethyl ammonium carbonate-containing solution

Abstract

A method for capturing carbon and recovering a tetramethylammonium carbonate solution includes providing a recovery device comprising a reactor, the reactor comprising a top cover, a side wall and a bottom, a fluid supply pipe suspended in the reactor near the top cover, a plurality of atomizing nozzles connected to the fluid supply pipe, the plurality of nozzles being disposed on the side wall, and a process for recovering the tetramethylammonium carbonate solution using the recovery device, the aforementioned process comprising first inputting the tetramethylammonium carbonate solution into the fluid supply pipe and spraying it out through the atomizing nozzles, and then turning on a carbon dioxide gas to spray the carbon dioxide gas out through each nozzle, such that the pH value of the tetramethylammonium carbonate solution is lowered after adjustment by the carbon dioxide gas.

Claims

1. A method for carbon capture and recovery of a tetramethylammonium carbonate solution, comprising: providing a recovery device, wherein the recovery device comprises: a reactor including a top cover, a side wall, and a bottom, the side wall having a fluid inlet and a fluid recovery outlet; a fluid supply pipe suspended in the reactor near the top cover, the fluid supply pipe communicating with the fluid inlet and the fluid recovery outlet; a plurality of atomizing nozzles disposed on the fluid supply pipe, each atomizing nozzle having an inlet communicating with the fluid supply pipe, and each atomizing nozzle having an outlet facing the bottom of the reactor; and a plurality of nozzles disposed on the side wall, wherein some of the nozzles are at the same distance from the bottom, some of the nozzles are at different distances from the bottom, and the nozzles at the same distance from the bottom are evenly distributed around the side wall, wherein... A horizontal direction is parallel to the bottom of the reactor. Each nozzle has a first angle between itself and the horizontal direction, the first angle being between 0 and 80 degrees. Each nozzle faces the top cover or is parallel to the horizontal direction, and the first angle of the nozzle closer to the bottom is greater than the first angle of the nozzle farther from the bottom. Viewed from the top cover towards the bottom, a second angle is formed between the sidewall and each nozzle, the second angle being between 10 and 80 degrees, starting from the sidewall and measured along a direction. The recovery equipment is used to perform a process for recovering a tetramethylammonium carbonate solution, the process comprising: A tetramethylammonium carbonate solution is introduced into the fluid supply pipe and ejected from the atomizing nozzles; and a carbon dioxide gas is turned on to eject the carbon dioxide gas from each of the nozzles, wherein the flow rate of the carbon dioxide gas from the nozzle closer to the bottom is greater than the flow rate of the carbon dioxide gas from the nozzle farther from the bottom, so that the carbon dioxide gas generates a rotating upward airflow at the center of the reactor, and the pH value of the tetramethylammonium carbonate solution is reduced after adjustment by the carbon dioxide gas.

2. A method for capturing and recovering carbon containing tetramethylammonium carbonate solution as described in claim 1, wherein a vertical direction is perpendicular to the bottom of the reactor, and the nozzles are arranged in a straight line along the vertical direction.

3. A method for capturing and recovering a carbon-containing tetramethylammonium carbonate solution as described in claim 1, wherein the direction is counterclockwise, and the carbon dioxide-containing gas is ejected from each of the nozzles and then flows along a predetermined path toward the center of the reactor to generate a counterclockwise airflow at the center of the reactor.

4. A method for capturing and recovering a carbon-containing tetramethylammonium carbonate solution as described in claim 1, wherein the direction is clockwise, and the carbon dioxide-containing gas is ejected from each of the nozzles and each travels along a predetermined path toward the center of the reactor to generate a clockwise airflow at the center of the reactor.

5. A method for capturing and recovering carbon containing tetramethylammonium carbonate solution as described in claim 1, wherein the recovery apparatus further comprises: a storage tank disposed at the bottom of the reactor; and a filter communicating with the storage tank.

6. A method for capturing and recovering a tetramethylammonium carbonate solution as described in claim 5, wherein the process for recovering the tetramethylammonium carbonate solution further comprises: reacting the tetramethylammonium carbonate solution sprayed from the atomizing nozzles and the carbon dioxide gas sprayed from each of the nozzles at the center of the reactor to form a first processed liquid that is collected in the storage tank; stopping the input of the tetramethylammonium carbonate solution into the fluid supply pipe and shutting off the carbon dioxide gas; and feeding the first processed liquid from the storage tank into the filter to remove photoresist from the first processed liquid to form a second processed liquid.

7. A method for capturing and recovering a solution containing tetramethylammonium carbonate as described in claim 6, wherein the process for recovering the solution containing tetramethylammonium carbonate further includes: detecting the pH value of the second processed liquid; if the pH value is greater than or equal to 9, inputting the second processed liquid into the fluid supply pipe through the fluid recovery port, and turning on the carbon dioxide gas to mix the carbon dioxide gas with the second processed liquid to reduce the pH value of the second processed liquid.

8. A method for capturing carbon and recovering a tetramethylammonium carbonate solution as described in claim 7, wherein the recovery process further includes: detecting the pH value of the second processed solution; if the pH value is less than 9, sending the second processed solution to a collection tank.

9. A method for capturing and recovering a tetramethylammonium carbonate solution as described in claim 8, wherein the process for recovering the tetramethylammonium carbonate solution further comprises: sending the second treated liquid to the collection tank, then introducing other untreated tetramethylammonium carbonate solution into the fluid supply pipe through the fluid inlet, and turning on the carbon dioxide gas.

10. A method for carbon capture and recovery of a tetramethylammonium carbonate solution as described in claim 1, further comprising: providing a tetramethylammonium carbonate waste liquid before carrying out the recovery process, heating the tetramethylammonium carbonate waste liquid to increase the concentration of tetramethylammonium carbonate in the waste liquid to 10-30% (weight / weight percentage) to obtain a tetramethylammonium carbonate solution.

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