Silicon photonic wafer testing system and testing method thereof

Abstract

A silicon photonics wafer testing system includes a wafer prober, an optical coupling braking device, an optical measurement instrument, and an integrated control module. The wafer prober includes an upward-facing lens, a downward-facing lens, and a probe card. The silicon photonics wafer is adapted to be mounted on a stage of the wafer prober. The probe card is positioned above the stage. At least one fiber optic array is adapted to be mounted on a fiber optic carrier of the optical coupling braking device. The fiber optic array is positioned in the optical measurement path of the optical measurement instrument. The integrated control module is electrically connected to the wafer prober, the optical coupling braking device, and the optical measurement instrument. A silicon photonics wafer testing method is also provided.

Claims

1. A silicon photonic wafer testing system, comprising: A wafer prober includes an upward camera, a downward camera, and a probe card. A silicon photonic wafer is adapted to be mounted on the stage of the wafer prober, and the probe card is positioned above the stage. An optical coupling actuator is mounted on the wafer prober, and at least one fiber array is adapted to be mounted on the fiber optic carrier of the optical coupling actuator. The optical measurement instrument includes an optical fiber array positioned along its optical measurement path; and an integrated control module electrically connected to the wafer probe tester, the optical coupling braking device, and the optical measurement instrument. The integrated control module drives the up-illuminated lens to align the probe card and the optical fiber array, and drives the down-illuminated lens to align the pads of the silicon photonic wafer. By combining the position information of the coupler of the silicon photonic wafer, the relative positional relationship of the probe card, the optical fiber array, the pads of the silicon photonic wafer, and the coupler on the wafer probe tester is obtained.

2. The silicon photonic wafer testing system as claimed in claim 1, wherein the probe card has a window for the optical coupling braking device to drive the fiber array through the window and move toward the silicon photonic wafer from top to bottom.

3. The silicon photonic wafer testing system as described in claim 1 further includes an automatic test equipment (ATE) integrated into the wafer prober and electrically connected to the integrated control module and the probe card, wherein the integrated control module drives the automatic test equipment to detect the electrical or photoelectric properties of the silicon photonic wafer.

4. The silicon photonic wafer testing system as claimed in claim 1 further includes a rangefinder disposed on the fiber optic carrier and electrically connected to the integrated control module.

5. The silicon photonic wafer testing system as claimed in claim 1, wherein the stage is a movable stage and the uplighting lens is mounted on the side of the stage to move with the stage.

6. The silicon photonic wafer testing system as claimed in claim 1, wherein the position information of the coupler is obtained by the integrated control module driving the downlight lens to align the coupler.

7. The silicon photonic wafer testing system as claimed in claim 1, wherein the position information of the coupler is obtained by the integrated control module from built-in information of the silicon photonic wafer.

8. A silicon photonic wafer testing method, applicable to the silicon photonic wafer testing system as described in claim 1, the testing method comprising: The silicon photonic wafer is transferred and loaded onto the stage of the wafer prober; The alignment process includes: Alignment 1: Aligning the probes of the probe card with the up-illuminated lens; Alignment 2: Aligning the fiber array with the up-illuminated lens; Alignment 3: Aligning the silicon photonic wafer and its pads with the down-illuminated lens. After the alignment process is completed, the integrated control module combines the position information of the coupler of the silicon photonic wafer and drives the stage to move the silicon photonic wafer toward the probe card until the probe contacts the pad of the silicon photonic wafer with a preset needle pressure. Then, the integrated control module drives the optical coupling actuator to move the fiber array to a position corresponding to the coupler and reaching a preset distance before optical coupling is performed.

9. The silicon photonic wafer testing method as described in claim 8 further includes: After the optical coupling is completed, the optical measurement instrument is driven to perform optical testing on the silicon photonic wafer.

10. The silicon photonic wafer testing method as described in claim 8, wherein the silicon photonic wafer testing system further includes an automated testing machine integrated into the wafer prober and electrically connected to the integrated control module and the probe card, and the testing method further includes: After the optical coupling is completed, the integrated control module drives the optical measurement instrument and the automatic testing machine to perform photoelectric testing on the silicon photonic wafer.

11. The silicon photonic wafer testing method as described in claim 8, wherein the silicon photonic wafer testing system further includes a rangefinder disposed on the fiber optic carrier and electrically connected to the integrated control module, and the testing method further includes: The integrated control module drives the rangefinder to obtain the relative distance between the fiber array and the silicon photonic wafer, thereby achieving the preset distance.

12. The silicon photonic wafer testing method as described in claim 8, wherein the alignment step further includes alignment four: aligning the silicon photonic wafer and the coupler thereon with the downlight lens to obtain the position information of the coupler.

13. The silicon photonic wafer testing method as described in claim 8, wherein the position information of the coupler is obtained by the integrated control module from built-in information of the silicon photonic wafer.

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