Film laminator and film lamination system

Abstract

This invention discloses a film-applying machine and system for semiconductor packaging. The film-applying platform is connected to an x-axis motion module, allowing the module to move the platform along the x-direction during operation. A material-gripping mechanism is located on one side of the film-applying mechanism. The film-applying mechanism includes a film-applying device, a dust removal device located on the side of the film-applying device facing the material-gripping mechanism, and an air-blowing device. The film-applying device includes a roller frame with an air supply channel inside. An air outlet is located on the roller frame facing the roller surface, and an air inlet is located on the outer periphery of the roller frame. The air supply channel connects the air inlet and outlet. The air outlet of the air-blowing device faces the air inlet, and the air-blowing device can heat the air within the air inlet. The air-blowing device blows hot air into the roller frame to heat the film bonded to the wafer surface. Heating the film effectively increases the bonding strength between the film and the wafer frame, preventing polyester material leakage after molding.

Claims

1. A film applicator, characterized in that it comprises an applicator platform, an x-axis motion module, a material gripping mechanism, and an applicator mechanism; the applicator platform is connected to the x-axis motion module, such that during operation, the x-axis motion module drives the applicator platform to move along the x-direction; the material gripping mechanism is located on one side of the applicator mechanism; the applicator mechanism comprises an applicator, a dust removal device located on the side of the applicator facing the material gripping mechanism, and an air blowing device; the applicator includes a roller frame, an air supply channel is provided inside the roller frame, an air outlet is provided on the roller frame facing the roller surface, an air inlet is provided on the outer periphery of the roller frame, the air supply channel connects the air inlet and the air outlet, the air outlet of the air blowing device is provided facing the air inlet, and the air blowing device can at least heat the air in the air inlet.

2. As in request item 1, the film applicator, wherein, The air outlet extends from the air inlet into the air delivery channel and has a preset gap with the interior of the air delivery channel.

3. As in request item 2, the film applicator, wherein, The roller frame has air inlets on both sides of its outer periphery. The film application mechanism includes two air blowing devices. Each air blowing device is located on the side of the roller frame where the air inlet is located, and the air outlet of the air blowing device is oriented towards the corresponding air inlet.

4. As in request item 1, the film applicator, wherein, The film application platform is equipped with a heating device that heats the bearing surface of the film application platform during operation.

5. As in request item 1, the film applicator, wherein, The machine includes at least two sets of x-axis motion modules and at least two film application platforms, each corresponding to one of the x-axis motion modules and connected to the corresponding x-axis motion module. The film application machine further includes a y-axis motion module, which is connected to the film application mechanism via a drive device, such that during operation, the drive device drives the film application mechanism to move along the y-direction across at least two film application platforms.

6. As in request item 5, the film applicator, wherein, The drive unit includes a cylinder connected to the dust removal device.

7. As in request item 5, the film applicator, wherein, The drive unit includes a servo motor connected to the film application device.

8. As in request item 1, the film applicator, wherein, The film application platform has vacuum suction holes on its bearing surface.

9. As in request item 8, the film applicator, wherein, These vacuum suction holes are provided to correspond to the gap area between adjacent windows in the frame to be coated.

10. A film application system, characterized in that it includes a film application machine as claimed in any one of claims 1 to 9.

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