Chemical barrel detection device

Abstract

The chemical tank detection device disclosed herein monitors the pump frequency and the gas flow rate supplied to the chemical tank. Based on the concept that the volume of liquid extracted by the pump should be equal to the volume of gas supplied, it can determine as early as possible whether there is an anomaly in the chemical supply source. Furthermore, when an anomaly occurs, it promptly switches the chemical supply source to the normal supply end to prevent contaminated chemicals from entering the wafer and thus prevent wafer contamination.

Claims

1. A chemical drum detection device, suitable for detecting chemical drums, comprising: An airflow sensor detects the flow rate of gas in a gas supply line. The system includes a pump sensor that senses the frequency of the pump, wherein the chemical tank is coupled to the pump and the gas supply line, wherein the pump removes the chemical agent from the chemical tank, and the gas corresponding to the volume of the removed chemical agent is injected into the chemical tank, wherein the gas flow rate increases in response to the frequency change, and the instantaneous flow rate of the gas increases, and the chemical agent supply source is switched to a second chemical tank.

2. The chemical tank detection device as described in claim 1, which determines that the chemical agent in the chemical tank has been used up.

3. The chemical tank detection device as claimed in claim 1, wherein in response to the increase in frequency and the amount of gas being 0, the supply source is switched to the second chemical tank.

4. The chemical tank detection device as described in claim 3, which determines that the pipeline between the chemical tank and the pump is damaged.

5. The chemical tank detection device as claimed in claim 1, wherein in response to the pump starting and the amount of gas being 0, the supply source is switched to the second chemical tank.

6. The chemical tank detection device as described in claim 5, which determines that the chemical tank and the gas supply pipeline are not properly connected.

7. The chemical tank detection device as claimed in claim 1, wherein the gas is nitrogen.

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