Non-thermal plasma generation device
Patent Information
- Application Number
- TW114149254
- Authority / Receiving Office
- TW · TW
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2025-12-15
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2045-12-14
Smart Images

Figure 00000000_0000_ABST
Abstract
Claims
1. A non-thermal plasma generating device, characterized by comprising: a cavity; a high-voltage electrode base disposed at one end of the cavity; a grounding electrode base disposed at the other end of the cavity; a high-voltage electrode disposed on the high-voltage electrode base; and a plurality of grounding electrodes disposed on the grounding electrode base and surrounding the high-voltage electrode; wherein, The high-voltage electrode base, the cavity, and the grounding electrode base form a sealed non-thermal plasma discharge zone; a gas input pipe is connected to the non-thermal plasma discharge zone for inputting gas; and a plasma output pipe is connected to the non-thermal plasma discharge zone for outputting plasma; wherein, by adjusting the number of the plurality of grounding electrodes that are connected or grounded, the discharge intensity in the discharge zone and the concentration of active species in the output plasma can be adjusted.
2. The non-thermal plasma generating apparatus as described in claim 1, wherein, The number of the plurality of grounding electrodes is proportional to the concentration of active species in the output plasma.
3. The non-thermal plasma generating apparatus as described in claim 1, wherein, The radial distance from the high-voltage electrode to each of the grounding electrodes is the same.
4. The non-thermal plasma generating apparatus as described in claim 1, wherein, The distance between adjacent grounding electrodes is the same.
5. The non-thermal plasma generating apparatus as described in claim 1, wherein, The cavity is cylindrical.
6. The non-thermal plasma generating apparatus as described in claim 1, wherein, The high-voltage electrode system is cylindrical.
7. The non-thermal plasma generating apparatus as described in claim 1, wherein, The grounding electrode is cylindrical.
8. The non-thermal plasma generating apparatus as described in claim 1, wherein, The plasma output tube is connected to a microbubble tube.
9. The non-thermal plasma generating apparatus as described in claim 8, wherein, The pore size on the microbubble tube is 10⁻³ to 10⁻⁸ meters.
Citation Information
Patent Citations
Plasma activated water
CN107406280A
Atmospheric pressure plasma for substrate annealing
TW202507811A
Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device
US20060189168A1
Low temperature plasma reaction device and hydrogen sulfide decomposition method
US20200398245A1
Plasma activated fluid processing system
WO2020209723A1