Alignment platform

Abstract

This invention relates to an alignment platform, comprising: a main body including a base, a slide, and a moving mechanism connected to the slide, the moving mechanism being capable of moving the slide relative to the base along an X-axis and a Y-axis; at least one gas supply channel disposed on one of the base and the slide, allowing gas to enter and exit to form a non-contact gap between the base and the slide; and a measuring device including a position information reading unit and a position information carrier, one of the position information reading unit and the position information carrier being disposed on the side of the base facing the slide and the other on the side of the slide facing the base, the position information reading unit being able to detect the position markings on the position information carrier.

Claims

1. A positioning platform, comprising: A main body includes a base, a slide, and a moving mechanism. The moving mechanism is connected to the slide and can drive the slide to move relative to the base along an X-axis and a Y-axis. At least one gas supply channel is provided on one of the base and the slide, allowing gas to enter and exit, creating a non-contact gap between the base and the slide. A measuring device includes a position information reading unit and a position information carrier. One of the position information reading unit and the position information carrier is located on the side of the base facing the slide, and the other is located on the side of the slide facing the base. The position information reading unit can detect the position marking on the position information carrier. The moving mechanism includes a first moving unit, a second moving unit, and a connecting mechanism. The second moving unit is connected to the first moving unit. One of the first and second moving units can drive the slide to move along the X-axis, and the other can drive the slide to move along the Y-axis. The connecting mechanism connects the second moving unit and the slide.

2. The alignment platform as described in claim 1, wherein the position information carrier is disposed on the slide and moves in tandem with the slide, and the position information reading unit is disposed on the base.

3. The alignment platform as described in claim 2, wherein the position information carrying system is positioned on the slide via an adhesive.

4. The alignment platform as described in claim 3, wherein the slide is recessed in a groove, and the adhesive and the position information carrier are respectively accommodated in the groove.

5. The alignment platform as described in claim 4, wherein the position information reading unit extends into the receiving slot.

6. A positioning platform, comprising: A main body includes a base, a slide, and a moving mechanism connected to the slide. The moving mechanism can drive the slide to move relative to the base along an X-axis and a Y-axis. At least one gas supply channel is provided on one of the base and the slide, allowing gas to enter and exit, creating a non-contact gap between the base and the slide. A measuring device includes a position information reading unit and a position information carrier, one of which is located on the side of the base facing the slide, and the other on the side of the slide facing the base. The position information reading unit can detect the position markings on the position information carrier. At least one adsorption part is provided on one of the base and the slide, each adsorption part providing an attractive force towards the base, causing the slide to be attracted by the attractive force and move towards the base. The at least one adsorption part and the at least one gas supply channel are respectively located around the position information carrier.

7. The alignment platform as claimed in claim 6, wherein each of the adsorption units includes an air intake channel that can draw in gas to create a negative pressure between the base and the slide.

8. The alignment platform as claimed in claim 6, wherein each of the adsorption portions includes at least one magnetic adsorption unit.

9. The alignment platform as described in claim 5, further comprising at least one adsorption portion disposed on the slide, each adsorption portion providing an attractive force toward the base, causing the slide to be attracted by the attractive force to move toward the base; the at least one adsorption portion and the at least one gas supply channel are respectively disposed around the periphery of the position information carrier; the alignment platform includes a plurality of gas supply channels and a plurality of adsorption portions, the plurality of gas supply channels and the plurality of adsorption portions being alternately arranged around the position information carrier; each adsorption portion further includes a groove. Each groove opens toward the base; in the direction perpendicular to the X-axis and the Y-axis, each groove is closer to the base than the position information carrier; in the direction perpendicular to the X-axis and the Y-axis, the depth dimension of one of the grooves is greater than the thickness dimension of one of the position information carriers and less than the thickness dimension of one of the slides; the connecting mechanism includes a first joint, a second joint, and a flexible section, the first joint connecting the second moving unit, the second joint connecting the slide, and the flexible section being disposed between the first joint and the second joint.

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