Drive device, optical system and lithography apparatus

Abstract

The present invention discloses a driving device (100) for driving an actuator (200) of an optical system (300), comprising: a switching amplifier (110) for generating an amplified signal (aPWM) according to a modulation signal; a filter unit (120) connected between the actuator (200) and the switching amplifier (110) and having at least one inductor (121); a supply unit (130) for providing a supply voltage; and a two-quadrant controller (140) having feedback capability and coupled between the supply unit (130) and the switching amplifier (110).

Description

Technical Field

[0001] The present invention relates to a driving device for an actuator for driving an optical system, an optical system containing the driving device, and a lithography apparatus containing the optical system.

[0002] The contents of priority application DE 10 2020 205 044.9 are incorporated herein by reference. Prior Technology

[0003] For example, lithography apparatuses with actuable optical elements such as micromirror arrays are known. Lithography is used to produce microstructural components, such as integrated circuits. This lithography process is performed using a lithography apparatus with an illumination system and a projection system. In this case, the image of the photomask (reduced photomask) illuminated by the illumination system is projected onto a substrate (e.g., a silicon wafer) by the projection system. This substrate is coated with a photosensitive layer (photoresist) and positioned within the imaging plane of the projection system to transfer the photomask structure to the photosensitive coating of the substrate. The imaging of the photomask on the substrate can be improved by actuable optical elements. For example, wavefront aberrations that cause magnification and / or unclear imaging during exposure can be compensated.

[0004] This correction using optical elements requires wavefront detection and signal processing to determine the individual position of the optical elements, allowing the wavefront to be corrected as needed. In the final step, the drive signal for the individual optical elements needs to be amplified and output to the actuators of the optical elements. For example, the drive signal is represented by a digitally encoded deflection of the actuator, where the deflection coefficient is, for example, proportional to the drive voltage. For instance, the digital signal is amplified using a switching amplifier, which is internally controlled by modulation of the drive signal. Patent US 7,746,935 B2 discloses a set of devices configured to drive a capacitive load via such a switching amplifier based on a digital input signal.

[0005] A switching amplifier constitutes an efficient implementation for driving an optical system to charge and discharge a large number of capacitor-type actuators with high capacitance within a finite time. In one example of this configuration, the actuator discharges at 0 V and charges at 100 V. However, the switching amplifier can also be set to any charging state between the maximum and minimum voltages. Energy is added to the actuator during charging and removed from it during discharging. A larger charging difference (i.e., voltage difference) at the actuator or actuator capacitor implies a higher charging reverse current and a shorter charging reverse duration.

[0006] After the charging process, energy is stored in the capacitor-type actuator. To discharge the actuator, the energy from the actuator must be consumed, and this consumed energy is typically converted into heat. A drawback is that this heat cannot be utilized. Due to the heat, especially without adequate cooling, adjacent optical and / or mechanical components may be adversely affected by the heating. Summary of the Invention

[0007] In this context, the purpose of this invention is to improve the driving of the actuator in an optical system.

[0008] According to a first state, a driving device for driving an actuator of an optical system is proposed. The driving device includes a switching amplifier for generating an amplified signal according to a modulation signal; a filter unit connected between the actuator and the switching amplifier and having at least one inductor; a supply unit for providing a supply voltage; and a two-quadrant controller having feedback capability and coupled between the supply unit and the switching amplifier.

[0009] Furthermore, the drive device preferably includes a modulation device for generating a modulation signal based on the input signal. For example, the modulation signal is generated at a frequency of 1 MHz. The actuator is particularly a capacitor actuator or an electromagnetic actuator.

[0010] The two-quadrant controller with feedback capability is advantageous for implementing two functions in this drive device. First, during the discharge process of the actuator, energy can be transferred out from the actuator. Second, due to the feedback capability of the two-quadrant controller, the transferred energy can be reused. For example, if a supply unit with feedback capability is used, the energy fed back from the actuator can be transferred from the entire system of the drive device and can be provided to other devices, such as in an optical system. Alternatively or further, via the two-quadrant controller, the energy fed back from the actuator can be buffered and stored in the storage element of the drive device, such as in a capacitor, for subsequent charging of the actuator.

[0011] Since the energy stored in the actuator is transferred out from the latter, it is advantageous that it does not need to be converted into heat. Therefore, it is advantageous to omit the discharge circuit in the drive unit. Consequently, the entire system of this drive unit also needs to be cooled to a less extent compared to conventional drive units.

[0012] The providing unit may be, for example, a voltage source, an energy storage device such as a battery, an interface, or a plug.

[0013] The supply voltage can be an AC voltage, such as mains voltage, or a DC voltage.

[0014] According to one specific embodiment, the two-quadrant controller is configured to convert an input voltage present on the voltage source side into an output voltage present on the switching amplifier side (especially boosting); and to convert an input voltage present on the switching amplifier side into an output voltage present on the voltage source side (especially reducing).

[0015] According to a further specific embodiment, the providing unit has a feedback capability.

[0016] In this specific embodiment, with the supply unit (having feedback capability), it is advantageous to output the energy stored in the actuator from the entire system of the drive device via the two-quadrant controller with feedback capability and the supply unit, and make it available to other devices of the optical system.

[0017] According to a further specific embodiment, the two-quadrant controller and the switching amplifier are connected via a first node, wherein a link circuit capacitor is connected between the first node and ground.

[0018] The capacitor in this linked circuit is advantageous for storing energy in the drive device, especially the energy output from the actuator.

[0019] According to a further specific embodiment, the two-quadrant controller is specifically implemented as a synchronous boost controller, wherein the providing unit and the synchronous boost controller are connected via a second node.

[0020] According to a further specific embodiment, the two-quadrant controller is specifically implemented as a synchronous buck controller.

[0021] The synchronous boost controller is configured to convert energy in both directions. For example, the synchronous boost controller boosts the 24 V input voltage on the voltage source side to the 120 V output voltage on the switching amplifier side, and correspondingly converts the 120 V input voltage on the switching amplifier side into the 24 V output voltage on the voltage source side.

[0022] According to a further specific embodiment, the two-quadrant controller has a parallel connection of a boost controller for feeding energy to a switching amplifier and a synchronous boost controller for feeding back energy to a feed-in unit with feedback capability; and a linear voltage regulator connected downstream of the parallel connection and coupled to the switching amplifier.

[0023] For example, a boost controller converts a 24 V input voltage to a 130 V output voltage. A synchronous boost controller, for instance, converts an input voltage from 24 V to 110 V. A voltage regulator connected downstream corrects the voltage received at the input side to prevent voltage ripple.

[0024] According to a further specific embodiment, the two-quadrant controller has a parallel connection of a boost controller for feeding energy to a switching amplifier and a synchronous buck controller for feeding back energy to a feed-in unit with feedback capability; and a linear regulator connected downstream of the parallel connection and coupled to the switching amplifier.

[0025] In this specific embodiment, the buck controller constitutes an alternative to the synchronous boost controller described in the previous specific embodiments.

[0026] According to a further specific embodiment, the providing unit is specifically implemented as a buck controller, wherein a boost controller is preferably connected between the buck controller and the two-quadrant controller.

[0027] For example, a buck controller is suitable for converting a 230 V AC voltage received at the input side into a 24 V DC voltage. The provided 24 V DC voltage can then be boosted to 150 V by a boost controller. A two-quadrant controller located downstream of the boost controller is then configured to convert, for example, between 150 V DC voltage and 120 V DC voltage.

[0028] According to a further specific embodiment, the boost controller is coupled to the two-quadrant controller via a third node, wherein a storage element for feeding back energy from the actuator is connected between the third node and ground.

[0029] The storage element is implemented, for example, as a capacitor or a circuit containing a plurality of capacitors.

[0030] According to a further specific embodiment, an electronic component that allows current to flow in one direction and prevents current from flowing in another direction is connected between the boost controller and the third node. This electronic component is, for example, a diode.

[0031] The diode effectively prevents current from flowing from the two-quadrant controller to the boost controller, thus storing the feedback energy in the aforementioned storage element.

[0032] According to a further specific embodiment, the switching amplifier includes a half H-bridge. This switching amplifier is also called a D-stage amplifier. This amplifier has discontinuous output voltage levels. For example, this amplifier may have two levels, such as 0 V and 48 V, or -24 V and +24 V. Furthermore, the switching amplifier may also have more than two levels. The individual voltage levels that can be output by the switching amplifier depend particularly on the supply unit used by the switching amplifier. Therefore, the voltage levels can be freely selected by appropriately selecting the supply unit according to the specific application. Preferably, one of these voltage levels is ground potential. The voltage values ​​between these voltage levels are output as rectangular signals with corresponding RMS values, i.e., by fast switching, particularly by hybrid pulse width modulation. Subsequent filtering produces a DC voltage signal with RMS values, where relatively small fluctuations may still exist in the filtered signal depending on the filter Q factor.

[0033] A half-H-bridge corresponds to half of an H-bridge circuit. For example, the latter includes two switching transistors, one configured to switch a first voltage level and the second configured to switch a second voltage level, wherein these switching transistors switch alternately such that only one transistor is on in each case. The switching transistors are switched specifically according to the pulse-width modulation signal of the modulation device. It should be noted that a switching amplifier can also have a full-bridge circuit or an H-bridge.

[0034] According to a further specific embodiment, the filter unit includes the inductor, a resistor, and a capacitor.

[0035] The filter unit specifically forms a low-pass filter that smooths the amplified signal over time. The filtered signal preferably matches the time average of the amplified signal. The filter unit can be specifically implemented as a multi-stage filter and includes both multiple inductors and multiple capacitors. The filter unit is preferably configured to filter the amplified signal such that the remaining AC component in the filtered signal has an amplitude of less than 0.1%. This filter unit is also referred to as a demodulator.

[0036] The filter unit is preferably implemented as at least a second-order filter. More preferably, the filter unit is implemented as a higher-order, particularly a fourth-order, filter. For example, a higher-order filter can be implemented by cascading lower-order filters. In this case, the filter unit is particularly implemented as a passive filter. For example, the cutoff frequency range of the filter unit is 1 kHz – 10 kHz. The slope and type of the filter unit are specifically selected for individual applications, particularly whether the filter unit is implemented as a Butterworth filter, a Chebyshev filter, a Bessel filter, a Salten-key filter, or another type of filter.

[0037] Some boost controllers are also called boost converters, boost controllers, or boost converters. Some buck controllers are also called buck converters, buck controllers, or buck converters.

[0038] According to a second embodiment, an optical system comprising a plurality of actuable optical elements is proposed. According to a first embodiment or one of a plurality of specific embodiments of the first embodiment, each of the actuable optical elements is assigned a driving device to drive the actuator.

[0039] The optical system specifically includes a micromirror array and / or a microlens array, which are among a plurality of optical elements that can be independently actuated.

[0040] In several specific embodiments, a group of drive devices can be defined, wherein all drive devices in one group have the same switching time, but each in a different group has a different switching time.

[0041] According to a specific embodiment of the optical system, one of the actuators includes a capacitor and / or an inductive load.

[0042] According to a specific embodiment of the filter unit of the drive device, power losses generated in individual actuators can be reduced, which can provide benefits in terms of cooling the optical system. This can be achieved in particular if the filter unit has a capacitor connected in parallel with the actuator.

[0043] According to a third state sample, a lithography device is proposed that includes an optical system according to a second state sample or one of a plurality of specific embodiments of the second state sample.

[0044] For example, a lithography apparatus includes an illumination system and an imaging system. The illumination system specifically includes a light source and a beam-shaping optics unit. The imaging system specifically includes an imaging optics unit for imaging a photomask onto a substrate.

[0045] This optical system can be used in illumination systems, beamforming optical units, and imaging systems. In a preferred embodiment, the optical system is specifically implemented as a microlens array or a micromirror array, and is used for wavefront correction, for example, in an imaging system.

[0046] The lithography equipment is, for example, an EUV lithography equipment with an operating wavelength range of 0.1 nm to 30 nm; or a DUV lithography equipment with an operating wavelength range of 30 nm to 250 nm.

[0047] Preferably, the lithography device further includes a measurement system configured to detect a wavefront and configured to output a correction signal via an optical system to correct the wavefront. The correction signal can specifically be used as an input signal for a drive device.

[0048] Furthermore, a further example of a driving device for driving an actuator in an optical system is provided. The driving device includes: a switching amplifier for generating an amplified signal based on a modulation signal; a filter unit connected between the actuator and the switching amplifier, and having at least one inductor; a supply unit for providing a supply voltage, the supply unit being connected to the switching amplifier via a node, and preferably having a buck controller and a boost controller, wherein a chopper circuit for feeding back energy from the actuator is connected between the node and ground.

[0049] The chopping circuit preferably includes a series connection of a resistor and a transistor, which is connected between the node and the ground. A linkage capacitor is preferably connected in parallel with the chopping circuit and the switching amplifier.

[0050] In the present context, "a" or "one" does not necessarily imply limitation to a single element. Rather, multiple elements may be provided, such as, for example, two, three, or more. Any other quantities used in this specification should not be considered as precisely limiting the number of listed elements. Rather, unless otherwise stated, there may be variations in the number of elements, both more and less.

[0051] Other possible embodiments of the invention include combinations of features or specific embodiments not described above or below with respect to the exemplary embodiments. In such cases, those skilled in the art may add individual variations, improve or supplement individual basic forms of the invention.

[0052] Further advantageous configurations and patterns of the present invention are the subject of the following claims and exemplary embodiments of the invention. The invention will now be explained in more detail with reference to preferred embodiments and the accompanying drawings. Simple Explanation of the Diagram

[0053] Figure 1 shows a schematic block diagram of a first specific embodiment of a driving device for an actuator used to drive an optical system;

[0054] Figure 2 shows a schematic block diagram of a second specific embodiment of a driving device for an actuator used to drive an optical system;

[0055] Figure 3 shows a schematic block diagram of a third embodiment of a driving device for an actuator used to drive an optical system;

[0056] Figure 4 shows a schematic block diagram of a fourth embodiment of a driving device for an actuator used to drive an optical system;

[0057] Figure 5 shows a schematic block diagram of a specific embodiment of the optical system;

[0058] Figure 6A shows a schematic diagram of a specific embodiment of an EUV lithography device;

[0059] Figure 6B shows a schematic diagram of a specific embodiment of a DUV lithography device; and

[0060] Figure 7 shows a block diagram of a further example of a drive device for driving an actuator of an optical system. Implementation

[0061] Unless otherwise stated, identical elements or elements with the same function in the diagrams have the same reference numerals. Also note that the legends within the diagrams are not necessarily to scale.

[0062] Figure 1 shows a schematic block diagram of a first embodiment of a drive device 100 for driving an actuator 200 in an optical system 300. Figures 5, 6A, and 6B illustrate examples of the optical system 300.

[0063] The actuator 200 may be specifically implemented as, for example, a capacitor-type actuator. Further possible actuators 200 include electric actuators, magnetic actuators, electromagnetic actuators, thermal actuators, etc.

[0064] The drive unit 100 in Figure 1 includes a switching amplifier 110, a filter unit 120 connected between the switching amplifier 110 and the actuator 200, a supply unit 130, and a two-quadrant controller 140 connected between the supply unit 130 and the switching amplifier 110. In the figure, the supply unit 130 is specifically implemented as a voltage source. The supply unit 130 may also be specifically implemented as an energy storage device, such as a battery, an interface, or a plug.

[0065] Switching amplifier 110 is configured to generate an amplified signal aPWM based on a modulation signal (not shown). In this case, the capacitor of switching amplifier 110 is driven by the modulation signal (not shown). The modulation signal is provided by a modulation device and a gate driver connected between the modulation device and the transistor gate terminals of switching amplifier 110. This modulation device and this gate driver are disclosed in patent application DE 10 2019 211 447.6, the entire contents of which are incorporated herein by reference.

[0066] In this configuration, the switching amplifier 110 is specifically implemented as a half-H bridge. In this configuration, the transistors of the switching amplifier 110 are specifically implemented as multiple n-channel MOSFETs.

[0067] Alternatively, multiple transistors can be specifically implemented as multiple p-channel MOSFETs, one p-channel and one n-channel MOSFET, multiple silicon MOSFETs, multiple GaN FETs, multiple IGBTs, and / or multiple bipolar transistors.

[0068] Voltage source 130 is suitable for converting, for example, 230 V AC voltage into 24 V DC voltage. In this case, voltage source 130 in Figure 1 has feedback capability.

[0069] The feedback capability characteristics of voltage source 130 are shown by the double arrows in Figure 1.

[0070] The two-quadrant controller 140 in Figure 1 has a synchronous boost controller 141. The synchronous boost controller 141 in Figure 1 is configured to boost the 24 V input voltage present on the voltage source side to the 120 V output voltage present on the switching amplifier side, and depress the 120 V input voltage present on the switching amplifier side to the 24 V output voltage present on the voltage source side.

[0071] In Figure 1, the two-quadrant controller 140 and the switching amplifier 110 are connected via a first node K1. A link circuit capacitor 150 is connected between the first node K1 and ground GND. The synchronous boost controller 141 and the voltage source 130 are connected via a second node K2.

[0072] The filter unit 120 is configured to filter the amplified signal aPWM provided by the switching amplifier 110 on the input side, and based on the signal, provide a filtered signal fPWM to the actuator 200 on the output side.

[0073] The filter unit 120 specifically includes an inductor 121, such as a coil, connected in series with the actuator 200; a resistor 122, particularly an ohmic resistor; and a capacitor 123 connected in parallel with the actuator 200. The specific values ​​of the inductor 121, resistor 122, and capacitor 123 are chosen based on the actuator 200 to be driven and the required characteristics of the filtered signal fPWM.

[0074] It should be noted that the filter unit 120 does not necessarily have all the components shown, but may also have, for example, only an inductor 121 and a resistor 122, without a capacitor 123. Further configuration of the individual components is also possible, and is preferably selected depending on the actuator 200 to be driven and the required characteristics of the filtered signal fPWM.

[0075] It should be noted that any desired potential provided by a voltage source can be used instead of the ground potential GND.

[0076] Figure 2 shows a schematic block diagram of a second specific embodiment of a drive device 100 for driving an actuator 200 in an optical system 300.

[0077] The difference between the drive device 100 in Figure 2 and the drive device 100 in Figure 1 lies in the configuration of the two-quadrant controller 140.

[0078] The two-quadrant controller 140 in Figure 2 has a parallel connection of a boost controller 142 for feeding energy to the switching amplifier 110 and a synchronous boost controller 143 for feeding back energy to the feedback-capable supply unit 130; and a linear regulator 144 connected downstream of the parallel connection. The linear regulator 144 is connected to the switching amplifier 110 via a first node K1.

[0079] Figure 3 shows a schematic block diagram of a third embodiment of a drive device 100 for driving an actuator 200 in an optical system 300. The drive device 100 in Figure 3 is based on the first embodiment of the drive device 100 in Figure 1, but differs in the configuration of the two-quadrant controller 140. The two-quadrant controller 140 in Figure 3 has a parallel connection of a boost controller 142 for feeding energy to a switching amplifier 110 and a buck controller 145 for feeding energy back to a voltage source 130 with feedback capability; and a linear regulator 144 connected downstream of the parallel connection and connected to the switching amplifier 110 via a first node K1.

[0080] If we compare the specific embodiment of the two-quadrant controller 140 in Figure 2 with the embodiment of the two-quadrant controller 140 in Figure 3, we can determine that the specific embodiment in Figure 3 has a buck controller 145 instead of a synchronous boost controller 143.

[0081] Figure 4 shows a schematic block diagram of a fourth embodiment of a drive device 100 for driving an actuator 200 in an optical system 300.

[0082] In the fourth embodiment according to FIG4, the voltage source is specifically implemented as a buck controller 131. A boost controller 160 is configured between the buck controller 131 and the two-quadrant controller 140 in FIG4. For example, the buck controller 131 converts a 230 V input AC voltage into a 24 V output DC voltage. The boost controller 160 is configured to boost the 24 V DC voltage provided by the buck controller 131 to a 150 V DC voltage. The boost controller 160 and the two-quadrant controller 140 are coupled via a third node K3. A storage element 170 for feeding energy back from the actuator 200, such as a capacitor, is connected between the third node K3 and ground GND. Furthermore, a diode 180 is connected between the boost controller 160 and the third node K3.

[0083] Figure 5 shows a schematic block diagram of a specific embodiment of an optical system 300 containing a plurality of actuable optical elements 310. The optical system 300 is specifically implemented in this specification as a micromirror array, wherein the optical elements 310 are micromirrors. Each micromirror 310 can be actuated by a designated actuator 200. For example, another micromirror 310 can be tilted about two axes and / or displaced on one, two, or three spatial axes by a designated actuator 200. For clarity, only the reference numerals of the topmost column of these elements are shown.

[0084] The optical system 300 includes a correction unit 320 configured to generate a drive signal A or an input signal I to each of the micromirrors 310. For example, the optical system 300 is configured to correct the wavefront of light in lithography devices 600A, 600B (see Figures 6A and 6B), wherein the correction unit 320, for example, depends on the measured shape of the wavefront and the target shape of the wavefront to determine the target position of each of the micromirrors 310 and outputs a corresponding drive signal A or input signal I.

[0085] Individual drive signals A or input signals I are fed to a drive unit 100 assigned to an individual actuator 200. The drive unit 100 drives the individual actuator 200 with a filtered, amplified modulated signal fPWM. The filtered signal fPWM is generated specifically as described with reference to any of Figures 1 to 4. The position of the individual micromirror 310 is thus set.

[0086] Figure 6A shows a schematic diagram of an EUV lithography apparatus 600A containing a beam shaping and illumination system 602 and a projection system 604. In this case, EUV stands for "extreme ultraviolet," indicating that the working light wavelength is between 0.1 nm and 30 nm. The beam shaping and illumination system 602 and the projection system 604 are each housed within a vacuum chamber (not shown), wherein each vacuum chamber is evacuated by means of an exhaust device (not shown). The vacuum chamber is surrounded by a mechanical chamber (not shown), which contains a drive device for mechanical movement or setting optical elements. Furthermore, an electrical controller, etc., may also be housed in this mechanical chamber.

[0087] The EUV lithography apparatus 600A includes an EUV light source 606A. A plasma source (or a synchrotron radiation source) emits radiation 608A within the EUV range (ultra-high ultraviolet range), that is, a wavelength range of, for example, 5 nm to 20 nm, serving as the EUV light source 606A. In the beam shaping and illumination system 602, the EUV radiation 608A is focused and the desired operating wavelength is filtered out from the EUV radiation 608A. The EUV radiation 608A generated by the EUV light source 606A has a relatively low air transmittance because the air in the beam guiding space within the beam shaping and illumination system 602 and the projection system 604 is removed.

[0088] The beam shaping and illumination system 602 shown in Figure 6A has five imaging mirrors 610, 612, 614, 616, and 618. After passing through the beam shaping and illumination system 602, EUV radiation 608A is guided onto a photomask (reticle) 620. The photomask 620 may be implemented as a reflective optical element and may be configured outside of systems 602 and 604. Furthermore, EUV radiation 608A can be guided onto the photomask 620 via an imaging mirror 622. The photomask 620 has a structure that projects a reduced image onto a wafer 624, etc., via a projection system 604.

[0089] The projection system 604 (also called a projection lens) has five imaging mirrors M1 to M5 for imaging the photomask 620 onto the wafer 624. In this case, the imaging mirrors M1 to M5 of the projection system 604 can be symmetrically arranged about the optical axis 626 of the projection system 604. Note that the number of imaging mirrors M1 to M6 of the EUV lithography apparatus 600A is not limited to the number of images projected. A larger or smaller number of imaging mirrors M1 to M5 can also be provided. Furthermore, the front surfaces of these imaging mirrors M1 to M5 are typically curved for beam shaping.

[0090] Furthermore, the projection system 604 includes an optical system 300 having a plurality of actuable optical elements 310, such as the micromirror array described with reference to FIG. 5. The optical system 300 is specifically configured to correct dynamic imaging aberrations. The projection system 604 containing the optical system 300 can be referred to as an adaptive optics unit. This can improve the resolution of the lithography device 600A. For example, based on the wavefront measurement of the projected light, a correction unit 320 generates an input signal I, which may contain a separate signal particularly suitable for each individual micromirror 310. The input signal I is converted by the drive device 100 into an amplified and filtered modulation signal fPWM for another optical element 310 and output to an individual actuator 200 to actuate the optical element 310. The individual actuator 200 actuates the assigned micromirror 310. It should be noted that the drive device 100 is selectively configured within the projection system 604.

[0091] Figure 6B shows a schematic diagram of a DUV lithography apparatus 600B containing a beam shaping and illumination system 602 and a projection system 604. In this case, DUV stands for "deep ultraviolet," indicating that the operating light wavelength is between 30 nm and 250 nm. As described with reference to Figure 6A, the beam shaping and illumination system 602 and the projection system 604 can be configured in a vacuum housing and / or surrounded by a mechanical chamber with corresponding drive mechanisms.

[0092] The DUV lithography equipment 600B has a DUV light source 606B. For example, an ArF excimer laser that can provide radiation 608B in the DUV range of 193 nm can be used as the DUV light source 606B.

[0093] The beam shaping and illumination system 602 shown in Figure 6B guides DUV radiation 608B onto a photomask 620. The photomask 620 is specifically implemented as a transmissive optical element and can be configured outside of systems 602 and 604. The photomask 620 has a structure that allows it to be imaged onto a wafer 624 or the like in a reduced manner via a projection system 604.

[0094] The projection system 604 has a plurality of lens elements 628 and / or imaging mirrors 630 for imaging the photomask 620 onto the wafer 624. In this case, the individual lens elements 628 and / or imaging mirrors 630 of the projection system 604 can be symmetrically arranged about the optical axis 626 of the projection system 604. Note that the number of lens elements 628 and imaging mirrors 630 in the DUV lithography device 600B is not limited to the number of images projected. A larger or smaller number of lens elements 628 and / or imaging mirrors 630 can also be provided. Furthermore, the front surface of these imaging mirrors 630 is typically curved for beam shaping.

[0095] Furthermore, the projection system 604 includes an optical system 300 having a plurality of actuable optical elements 310 (e.g., an array of microlens elements), which may be specifically configured according to the micromirror array described with reference to FIG. 5, wherein a plurality of microlens elements are used in place of a plurality of micromirrors. The optical system 300 is specifically configured to correct dynamic imaging aberrations. The projection system 604 containing the optical system 300 may be referred to as an adaptive optics unit. This improves the resolution of the lithography device 600B. To improve imaging performance, in the present case, a drive signal A is predefined from an external source. This drive signal A specifically includes a separate signal for each of the plurality of microlens elements 310 in the optical system 300. For example, the drive signal A may be generated by an external computing device. The drive device 100 converts the signal contained in the drive signal A for the individual microlens element 310 into an amplified, filtered modulation signal fPWM, and outputs the latter to the individual actuator 200. The individual actuator 200 thus actuates the assigned microlens element 310.

[0096] Finally, the air gap between the lens element 628 and the wafer 624 can be replaced by a liquid medium 632 with a refractive index greater than 1. The liquid medium 632 can be, for example, high-purity water. This configuration is also called immersion lithography and has improved optical lithography resolution. The liquid medium 632 is also called an immersion liquid.

[0097] Figure 7 shows a block diagram of a further example of a drive device 700 for driving the actuator 200 in the optical system 300.

[0098] The drive unit 700 in Figure 7 includes a supply unit comprising a buck controller 710 and a boost controller 720 connected downstream, a switching amplifier 750, and a filter unit 760. A diode 730 is connected between the boost controller 720 and the switching amplifier 750. The diode 730 and the switching amplifier 750 are interconnected via a node K7. A chopping circuit 740 for feeding energy from the actuator 200 is connected between node K7 and ground GND. The chopping circuit 740 has a resistor 741 and a transistor 742 connected in series. A link circuit inductor 770 is connected in parallel with the chopping circuit 740.

[0099] Although the invention has been described with reference to exemplary embodiments, it can be modified in various ways.

[0100] 100: Drive unit 110: Switching Amplifier 120: Filter Unit 121: Inductor 122: Resistor 123: Capacitor 130: Control Unit 131: Step-down controller 140: Two-quadrant controller 141: Synchronous boost controller 142: Boost Controller 143: Synchronous boost controller 144: Voltage Regulator 145: Step-down controller 150: Linkage circuit capacitor 160: Boost Controller 170: Storage element 180: Diode 200: Actuator 300: Optical System 310: Optical Components 320: Correction Unit 600A: EUV lithography equipment 600B: DUV lithography equipment 602: Beam shaping and illumination systems 604: Projection System 606A: EUV light source 606B: DUV light source 608A: EUV radiation 608B: DUV radiation 610: Imaging Mirror 612: Imaging Mirror 614: Imaging Mirror 616: Imaging Mirror 618: Imaging Mirror 620: Photomask 622: Imaging Mirror 624: Wafer 626: Optical Axis 628: Lens element 630: Imaging Mirror 632: Middle 700: Drive unit 710: Step-down controller 720: Boost Controller 730: Diode 740: Cutoff Circuit 741: Resistor 742: Transistor 750: Switching Amplifier 760: Filter Unit 761: Inductor 762: Resistor 770: Linkage circuit capacitor aPWM: Amplify signal A: Drive signal fPWM: Filtered signal GND: Grounding potential I: Input signal K1: Node K2: Node K3: Node K7: Node M1: Imaging Mirror M2: Imaging Mirror M3: Imaging Mirror M4: Imaging Mirror M5: Imaging Mirror

Claims

1. A driving device (100) for driving an actuator (200) of an optical system (300), comprising: a switching amplifier (110) for generating an amplified signal (aPWM) according to a modulation signal; a filter unit (120) connected between the actuator (200) and the switching amplifier (110) and having at least one inductor (121); a supply unit (130) for providing a supply voltage, wherein the supply unit (130) has feedback capability; and a two-quadrant controller (140) having feedback capability and coupled between the supply unit (130) and the switching amplifier (110), the two-quadrant controller (140) comprising: a boost controller (142) for feeding energy to the switching amplifier (110); For feeding energy back to one of the providing units (130) a synchronous boost controller (143), wherein the synchronous boost controller (143) is connected in parallel to the boost controller (142); and a linear regulator (144) connected downstream of the parallel connection and coupled to the switching amplifier (110).

2. The drive device of claim 1, wherein the two-quadrant controller (140) is configured to convert, in particular boost, an input voltage present on the supply unit side into an output voltage present on the switching amplifier side; and to convert, in particular depress, an input voltage present on the switching amplifier side into an output voltage present on the supply unit side.

3. The drive device of any one of claims 1 to 2 further includes a link circuit capacitor (150), wherein the two-quadrant controller (140) and the switching amplifier (110) are connected via a first node (K1), wherein the link circuit capacitor (150) is connected between the first node (K1) and ground (GND).

4. The drive device of any one of the requests 1 to 2, wherein the supply unit (130) and the synchronous boost controller (140) are connected via a second node (K2).

5. The drive device as requested in item 1 or 2, wherein the two-quadrant controller (140) has a step-down controller (145) for feeding back energy to one of the supply units (130).

6. The drive device of any one of claims 1 to 2, wherein the providing unit (130) includes a buck controller (131), wherein a boost controller (160) is preferably connected between the buck controller (131) and the two-quadrant controller (140).

7. The drive device of claim 6 further includes a storage element (170), wherein the boost controller (160) and the two-quadrant controller (140) are coupled via a third node (K3), wherein the storage element (170) for feeding back energy from the actuator (200) is connected between the third node (K3) and ground (GND).

8. The drive device of claim 7 further includes a diode (180) connected between the boost controller (160) and the third node (K3).

9. The drive device of any one of claims 1 to 2, wherein the switching amplifier (110) includes a half H bridge.

10. The driving device of any one of claims 1 to 2, wherein the filter unit (120) includes a resistor (122) and a capacitor (123).

11. A drive device (100) for driving an actuator (200) of an optical system (300), comprising: a switching amplifier (110) for generating an amplified signal (aPWM) according to a modulation signal; a filter unit (120) connected between the actuator (200) and the switching amplifier (110) and having at least one inductor (121); a supply unit (130) for providing a supply voltage, wherein the supply unit (130) has feedback capability; and a two-quadrant controller (140) having feedback capability and coupled between the supply unit (130) and the switching amplifier (110), the two-quadrant controller (140) comprising: a boost controller (142) for feeding energy to the switching amplifier (110); A step-down controller (145) for feeding back energy to one of the supply units (130), wherein the step-down controller (145) is connected in parallel to the boost controller (142); and a linear regulator (144) connected downstream of the parallel connection and coupled to the switching amplifier (110).

12. A drive device (100) for driving an actuator (200) of an optical system (300), comprising: a switching amplifier (110) for generating an amplified signal (aPWM) according to a modulation signal; a filter unit (120) connected between the actuator (200) and the switching amplifier (110) and having at least one inductor (121); a supply unit (130) for providing a supply voltage; and a two-quadrant controller (140) having feedback capability and coupled between the supply unit (130) and the switching amplifier (110); wherein the supply unit (130) includes a buck controller (145) and a boost controller (142) connected between the buck controller (145) and the two-quadrant controller (140).

13. An optical system (300) comprising a plurality of actuable optical elements (310), wherein each of the actuable optical elements (310) is assigned an actuator (200), wherein each actuator (200) is assigned a drive device (100) as claimed in any one of claims 1 to 12 for driving the actuator (200).

14. The optical system of claim 13, wherein one of the actuators (200) comprises a capacitive load and / or an inductor.

15. A lithography device (600A, 600B) comprising an optical system (300) as claimed in claim 13 or 14.

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