Temperature-regulating fluid circulation device and temperature-regulating fluid circulation system

Abstract

One embodiment of a temperature-controlled fluid circulation includes: a flow path that circulates fluid, after being temperature-controlled by a temperature-regulating unit, through a fluid supply object; a three-way valve disposed in the flow path downstream of the fluid supply object and upstream of the temperature-regulating position of the temperature-regulating unit, and comprising a portion between two of the three ports of the flow path; and a bypass flow path branching from the downstream position of the temperature-regulating unit and upstream of the fluid supply object in the flow path and connecting to the remaining port of the three-way valve. The fluid pressure flowing downstream of the fluid supply object and upstream of the three-way valve in the flow path is detected by a pressure sensor. Furthermore, the opening degree of the three-way valve is controlled so that the fluid pressure detected by the pressure sensor becomes a specified target pressure.

Description

Technical Field

[0001] One embodiment of the present invention relates to a temperature-regulating fluid circulation device and a temperature-regulating fluid circulation system, wherein the fluid after temperature regulation is sent to a fluid supply object or a temperature control object, and the fluid that has passed through the fluid supply object or the temperature control object is re-temperature regulated. Prior Technology

[0002] Known fluid circulation devices send fluids such as brine, which have been conditioned by a refrigeration unit having a compressor, condenser, expansion valve, and evaporator, toward the temperature-controlled object, and then conditioned the fluid that has passed through the temperature-controlled object again by the refrigeration unit (e.g., JP2014-145565A).

[0003] Furthermore, JP2013-105359A discloses a system having a plurality of fluid circulation devices as described above. In the system of JP2013-105359A, the temperatures of the fluids after being regulated by the two fluid circulation devices are different from each other, and the fluids sent from the two fluid circulation devices toward the temperature control target can be mixed before reaching the temperature control target. Therefore, the temperature of the fluid sent toward the temperature control target can be rapidly adjusted to the desired temperature. Summary of the Invention

[0004] In the fluid circulation device described above, the temperature of the fluid returning from the temperature-controlled object side varies significantly depending on, for example, the state of the temperature-controlled object. As a result, the fluid pressure downstream of the temperature-controlled object also varies significantly. This pressure variation affects the flow state of the fluid upstream of the temperature-controlled object. This effect can disrupt the flow state of the fluid and potentially reduce the temperature control accuracy.

[0005] Furthermore, in the system described in Patent Document 2, two fluid circulation devices are configured, each capable of adjusting the temperature of the fluid returning from the temperature-controlled object to a different temperature. In this case, the pressure of the fluid returning from the temperature-controlled object can have different effects on the two fluid circulation devices. Because the ratio of the fluid mixed before the temperature-controlled object may deviate significantly from the target value, the temperature control accuracy may decrease significantly.

[0006] The present invention takes into account the above-mentioned situation and aims to provide a temperature-regulating fluid circulation device and a temperature-regulating fluid circulation system, which can improve the temperature regulation accuracy of the fluid by improving the stability of the fluid circulation state.

[0007] An embodiment of the temperature-controlled fluid circulation device of the present invention comprises: a flow path for circulating fluid, after being temperature-controlled by a temperature-regulating unit, through a fluid supply object; a three-way valve disposed downstream of the fluid supply object and upstream of the temperature-regulating position of the temperature-regulating unit in the flow path, and having a portion between two of the three ports forming part of the flow path; a bypass flow path branching from the downstream position of the temperature-regulating unit and upstream of the fluid supply object in the flow path, and connecting to the remaining port, which is different from the two ports of the three-way valve forming part of the flow path; a pressure sensor for detecting the fluid pressure flowing downstream of the fluid supply object and upstream of the three-way valve in the flow path; and a controller for controlling the three-way valve. Furthermore, the controller controls the opening degree of the three-way valve so that the fluid pressure detected by the pressure sensor becomes a specified target pressure.

[0008] Furthermore, an embodiment of the temperature-regulating fluid circulation system of the present invention includes: a valve assembly; and a first temperature-regulating fluid circulation device, comprising: a first-side flow path, a first-side three-way valve, a first-side bypass flow path, and a first-side pressure sensor. The first-side flow path circulates fluid that has been temperature-regulated by the first-side temperature-regulating unit through the aforementioned valve assembly. The first-side three-way valve is disposed downstream of the aforementioned valve assembly in the aforementioned first-side flow path and upstream of the temperature-regulating position of the aforementioned first-side temperature-regulating unit, and has two of its three ports. The portion between the ports constitutes part of the aforementioned first-side flow path. The aforementioned first-side bypass flow path branches off from the downstream side of the temperature adjustment position of the aforementioned first-side temperature adjustment unit and the upstream side of the aforementioned valve assembly in the aforementioned first-side flow path, and connects to the remaining port, which is different from the two ports that constitute part of the aforementioned first-side flow path among the three ports of the aforementioned first-side three-way valve. The aforementioned first-side pressure sensor detects the fluid pressure flowing at the downstream side of the aforementioned valve assembly and the upstream side of the aforementioned first-side three-way valve in the aforementioned first-side flow path. The second temperature-regulating fluid circulation device includes: a second-side flow path, a second-side three-way valve, a second-side bypass flow path, and a second-side pressure sensor. The second-side flow path circulates fluid that has been temperature-regulated by the second-side temperature-regulating unit through the aforementioned valve assembly. The second-side bypass flow path is located downstream of the aforementioned valve assembly and upstream of the temperature-regulating position of the second-side temperature-regulating unit within the second-side flow path, and is part of the second-side flow path formed by the portion between two of the three ports. The second-side bypass... The flow path is a branch from the downstream side of the temperature adjustment position of the aforementioned second-side temperature adjustment unit and the upstream side of the aforementioned valve assembly in the aforementioned second-side flow path, and connects to the remaining 1 port that is different from the 2 ports that constitute part of the aforementioned second-side flow path among the 3 ports of the aforementioned second-side three-way valve. The aforementioned second-side pressure sensor is a device that detects the fluid pressure flowing at the downstream side of the aforementioned valve assembly and the upstream side of the aforementioned second-side three-way valve in the aforementioned second-side flow path. The device is also a controller that controls the aforementioned first-side three-way valve and the aforementioned second-side three-way valve. The aforementioned valve assembly delivers fluid received from the first temperature-controlled fluid circulation device, fluid received from the second temperature-controlled fluid circulation device, or a mixture of fluids received from both devices, toward the temperature-controlled object, and returns the fluid that has passed through the temperature-controlled object to the first-side flow path and / or the second-side flow path. Furthermore, the aforementioned controller controls the opening of the first-side three-way valve to make the fluid pressure detected by the first-side pressure sensor a designated first-side target pressure, and controls the opening of the second-side three-way valve to make the fluid pressure detected by the second-side pressure sensor a designated second-side target pressure.

[0009] According to one embodiment of the present invention, the accuracy of temperature regulation by the fluid can be improved by increasing the stability of the fluid circulation state. Simple Explanation of the Diagram

[0010] [Figure 1] shows a schematic configuration of the temperature-regulating fluid circulation device according to the first embodiment of the present invention. [Figure 2] is a flowchart illustrating an example of the operation of the temperature-regulating fluid circulation device of the first embodiment. [Figure 3] shows a schematic diagram of the temperature-regulating fluid circulation system according to the second embodiment of the present invention. [Figure 4] is a flowchart illustrating an example of the operation of the temperature-controlled fluid circulation system of the second embodiment. [Figure 5] shows a schematic diagram of the configuration of the temperature-regulating fluid circulation system according to the third embodiment of the present invention. Implementation

[0011] The following describes the various embodiments of the present invention.

[0012] <First Embodiment> Figure 1 is a schematic diagram showing the configuration of the temperature-regulating fluid circulation device 1 according to the first embodiment of the present invention. The temperature-regulating fluid circulation device 1 includes a flow path 3, through which fluid, after being temperature-regulated by the temperature-regulating unit 2, is circulated to the fluid supply object, i.e., the temperature-controlled object T. While the temperature-regulating unit 2 is, in one example, an evaporator of a refrigerator, other cooling machines may also be used. Furthermore, when heating the temperature-controlled object T, the temperature-regulating unit 2 may be, for example, an electric heater.

[0013] The fluid circulating in flow path 3 may be, for example, brine, but other fluids such as water may also be used. In this embodiment, flow path 3 has an upstream end 3U and a downstream end 3D, each connected to the temperature control object T. The fluid, after being conditioned by the temperature control unit 2, is supplied to the temperature control object T from the downstream end 3D of flow path 3, and the fluid that has passed through the temperature control object T returns to flow path 3 from the upstream end 3U.

[0014] A three-way valve 4 is disposed downstream of the temperature control object T in the flow path 3 and upstream of the temperature adjustment position of the temperature adjustment unit 2. The three-way valve 4 has a first port 4A, a second port 4B and a third port 4C, and the portion between the first port 4A and the third port 4C constitutes part of the flow path 3.

[0015] A bypass flow path 5 is connected to the second port 4B of the three-way valve 4. The bypass flow path 5 branches off from the downstream side of the temperature adjustment position of the temperature adjustment section 2 in the flow path 3 and the upstream side of the temperature control object T.

[0016] The three-way valve 4 is a proportional three-way valve with a stepper motor 4M, which can be used as an actuator to drive the valve body. The three-way valve 4 adjusts the position of the valve body (not shown) by means of the stepper motor 4M, and changes the ratio of the fluid flow rate from the first port 4A to the third port 4C to the fluid flow rate from the second port 4B to the third port 4C corresponding to the position of the valve body.

[0017] When the first port 4A and the third port 4C are fully open, the fluid that has been temperature-regulated by the temperature regulating unit 2 flows entirely toward the temperature-controlled object T, that is, it passes through the temperature-controlled object T without passing through the bypass flow path 5. On the other hand, when the second port 4B and the third port 4C are fully open, the fluid that has been temperature-regulated by the temperature regulating unit 2 does not flow into the temperature-controlled object T, that is, it only passes through the bypass flow path 5 and does not pass through the temperature-controlled object T.

[0018] A tank 6 is disposed downstream of the three-way valve 4 in the flow path 3 and upstream of the temperature adjustment position of the temperature control unit 2. The tank 6 also forms part of the flow path 3. The tank 6 can store a fixed amount of fluid. In this embodiment, a pump 7 is disposed in the tank 6 to provide driving force to the fluid, causing the fluid to circulate in the flow path 3. In this embodiment, when the operation of the temperature-controlled fluid circulation device 1 starts, the pump 7 is driven by a fixed driving force.

[0019] In this embodiment, the fluid is a liquid. A liquid level maintaining mechanism 8 is connected to the tank 6 to maintain the height of the stored liquid (i.e., the fluid) at a fixed height. In this embodiment, the liquid level maintaining mechanism 8 is a container that stores a fixed amount of liquid (the same as the circulating fluid), and a piping component connected to the liquid level storage position in this container is connected to the liquid level storage position in the tank 6. Furthermore, the liquid level storage position is a position lower than the height of the liquid level when a fixed amount of liquid is stored in the tank 6 or the aforementioned container. The amount of liquid stored in the tank 6 or the aforementioned container is predetermined.

[0020] The liquid level maintaining mechanism 8 works as follows: when the liquid level in tank 6 rises due to an increase in fluid pressure upstream of the tank 6, liquid is discharged from the tank 6 towards the liquid level maintaining mechanism 8; conversely, when the liquid level in tank 6 drops due to a decrease in fluid pressure upstream of the tank 6, liquid flows from the liquid level maintaining mechanism 8 into the tank 6. Thus, by maintaining the liquid level in tank 6 at a fixed height, the liquid level maintaining mechanism 8 can mitigate pressure fluctuations on the upstream side of tank 6 in the flow path 3.

[0021] The temperature-controlled fluid circulation device 1 includes a pressure sensor 9P, a temperature sensor 9T, and a controller 100 electrically connected to these sensors. The pressure sensor 9P detects the fluid pressure flowing downstream of the temperature-controlled object T and upstream of the three-way valve 4 in the flow path 3. The temperature sensor 9T detects the temperature of the temperature-controlled object T.

[0022] The controller 100 may be constructed from a computer, for example, a CPU, ROM, etc. In this case, various processes are performed by a program stored in the ROM. Alternatively, the controller 100 may be constructed from other processors and circuits (such as FPGAs (Field Programmable Gate Arrays)).

[0023] The controller 100 receives information about fluid pressure from the pressure sensor 9P and information about the temperature of the object under temperature control, T, from the temperature sensor 9T. Based on the received information, it controls the opening of the three-way valve 4 so that the fluid pressure detected by the pressure sensor 9P becomes the specified target pressure. Here, the target pressure is input to the controller 100 by the user.

[0024] In this embodiment, the controller 100, more specifically, controls the opening of the three-way valve 4 based on the difference between the pressure detected by the pressure sensor 9P and the target pressure, so that the fluid pressure detected by the pressure sensor 9P becomes the specified target pressure, and feeds forward to control the opening of the three-way valve 4 based on the temperature information from the temperature sensor 9T.

[0025] The aforementioned feedforward control is implemented when the absolute value of the rate of change of the temperature control object T is determined to be above a threshold value. In this feedforward control, the opening degree of the three-way valve 4 is changed by the operation quantity corresponding to the magnitude of the absolute value of the aforementioned rate of change.

[0026] More specifically, when the absolute value of the temperature change rate of the temperature-controlled object T exceeds the threshold value for the temperature rise side, the opening of the three-way valve 4 is changed by an operation amount proportional to the magnitude of the absolute value of the change rate, thereby increasing the opening of the first port 4A and the third port 4C. On the other hand, when the absolute value of the temperature change rate of the temperature-controlled object T exceeds the threshold value for the temperature fall side, the three-way valve 4 is operated by an operation amount proportional to the magnitude of the absolute value of the change rate, thereby decreasing the opening of the first port 4A and the third port 4C.

[0027] The aforementioned temperature change rate refers to the amount of temperature change per unit time. The temperature change rate is calculated by taking the moving average of the temperature over each unit time, and then dividing the difference between the latest moving average and the previously calculated moving average by the unit time. The time range for calculating the moving average can be, for example, a time range traversed from the point in time where the rate of change is calculated. Furthermore, it is preferable that the temperature sensor 9T detects at least five temperatures within the time range used to calculate the moving average.

[0028] Furthermore, while there is no particular limitation on the length of the aforementioned unit time, if it is too short, the accuracy of the rate of change calculation may decrease due to the influence of noise components; if it is too long, feedforward control may not be effective. Therefore, the time interval (unit time) for defining the rate of change can be set to, for example, between 0.5 seconds and 3 seconds.

[0029] Figure 2 is a flowchart illustrating an example of the operation of the temperature-regulating fluid circulation device 1. Hereinafter, an example of the operation of the temperature-regulating fluid circulation device 1 will be described with reference to Figure 2.

[0030] One example of the operation described here is that it begins only after the temperature-controlled fluid circulation device 1 has started operating and the temperature of the controlled object T has reached the target temperature. At this time, the three-way valve 4 is controlled at a pre-determined reference opening, which is an intermediate opening between fully closed and fully open. Furthermore, if, for example, the temperature sensor 9T has detected that the temperature of the controlled object T has reached the target temperature, in step 101, the controller 100 first monitors whether the absolute value of the temperature change rate (hereinafter, temperature change rate) of the controlled object T has reached a threshold value based on the information from the temperature sensor 9T.

[0031] If, in step S101, the absolute value of the temperature change rate is determined to be above a threshold value, the controller 100 changes the opening degree of the three-way valve 4 in step S102 by an operation amount corresponding to the magnitude of the absolute value of the temperature change rate, and then moves the process to step S103. On the other hand, if, in step S101, the absolute value of the temperature change rate is not determined to be above a threshold value, the process moves to step S103.

[0032] Furthermore, in step S103, the controller 100 controls the opening of the three-way valve 4 based on the difference between the pressure detected by the pressure sensor 9P and the target pressure, so that the fluid pressure detected by the pressure sensor 9P becomes the specified target pressure. Next, in step S104, it is detected whether the controller 100 has generated an operation stop command. If it is detected, the operation of the temperature regulating fluid circulation device 1 is stopped; if it is not detected, the process returns to step S101.

[0033] In the embodiment described above, the pressure of the fluid flowing out of the temperature-controlled object T can be maintained at the desired value. Therefore, by improving the stability of the fluid circulation state in the flow path 3, the accuracy of temperature control performed by the fluid can be improved.

[0034] By combining feedback control based on the pressure sensor 9P towards the target pressure and feedforward control based on the temperature change rate of the temperature-controlled object T, the reliability and speed of target pressure control can be improved. Furthermore, since the liquid level in tank 6 is maintained by the liquid level maintenance mechanism 8, pressure fluctuations in the upstream portion of tank 6 in flow path 3, i.e., pressure fluctuations in the fluid flowing out of the temperature-controlled object T, can be mitigated. Therefore, because the stability of the fluid circulation state can be improved using a simple mechanical configuration, the reliability of the device can be enhanced.

[0035] <Second Embodiment> Next, the temperature-regulating fluid circulation system S1 of the second embodiment will be described. Figure 3 is a schematic diagram of the temperature-regulating fluid circulation system S1. The same reference numerals are used for the parts that are the same as in the first embodiment.

[0036] The temperature-regulating fluid circulation system S1 includes: a first temperature-regulating fluid circulation device 10, a second temperature-regulating fluid circulation device 20, a valve assembly 50, and a controller 100.

[0037] In Figure 3, the main parts of the first temperature-regulating fluid circulation device 10 and the second temperature-regulating fluid circulation device 20 are each surrounded by two dashed lines. The configuration of the first temperature-regulating fluid circulation device 10 and the second temperature-regulating fluid circulation device 20 is basically the same as that of the temperature-regulating fluid circulation device 1 in the first embodiment. Hereinafter, the first temperature-regulating fluid circulation device 10 and the second temperature-regulating fluid circulation device 20 will be described first.

[0038] First, the first temperature-regulating fluid circulation device 10 has a first-side flow path 13, which circulates the fluid that has been temperature-regulated by the first-side temperature-regulating unit 12 through the fluid supply object, namely the valve assembly 50. The first-side temperature-regulating unit 12 is, in one example, the evaporator of a refrigerator, but it can also be other cooling machines.

[0039] Although the fluid circulating in the first side flow path 13 is, for example, brine, other fluids such as water can also be used. In this embodiment, the first side flow path 13 has an upstream end 13U and a downstream end 13D respectively connected to the valve assembly 50. The fluid, after being temperature-regulated by the first side temperature regulating unit 12, is supplied to the valve assembly 50 from the downstream end 13D of the first side flow path 13. As will be described in detail later, the valve assembly 50 supplies the received fluid to the temperature-controlled object T. In this embodiment, the fluid flowing out of the temperature-controlled object T can return to the first side flow path 13 from the upstream end 13U through the valve assembly 50. However, in this example, if the fluid from the first temperature-regulated fluid circulation device 10 does not flow into the temperature-controlled object T through the valve assembly 50, the fluid from the temperature-controlled object T will not return to the first side flow path 13 through the valve assembly 50.

[0040] A first-side three-way valve 14 is disposed downstream of the valve assembly 50 in the first-side flow path 13 and upstream of the temperature adjustment position of the first-side temperature adjustment unit 12. The first-side three-way valve 14 has a first-side first port 14A, a first-side second port 14B, and a first-side third port 14C, and the portion between the first-side first port 14A and the first-side third port 14C constitutes a part of the first-side flow path 13.

[0041] In the first side second port 14B of the first side three-way valve 14, a first side bypass flow path 15 is connected. The first side bypass flow path 15 is a branch from the position downstream of the temperature adjustment position of the first side temperature adjustment section 12 in the first side flow path 13 and upstream of the valve assembly 50.

[0042] The first-side three-way valve 14 is a proportional three-way valve, with a first-side stepper motor 14M as an actuator to drive the valve body. The first-side three-way valve 14 adjusts the position of the valve body (not shown) by means of the first-side stepper motor 14M, and changes the ratio of the fluid flow rate from the first-side port 14A to the first-side port 14C to the fluid flow rate from the first-side port 2B to the first-side port 3C in relation to the valve body position.

[0043] Furthermore, a first-side tank 16 is disposed downstream of the first-side three-way valve 14 and upstream of the temperature-adjusting position of the first-side temperature-adjusting unit 12 in the first-side flow path 13. The first-side tank 16 also constitutes part of the first-side flow path 13. The first-side tank 16 stores only a fixed amount of liquid, i.e., fluid. In this embodiment, a first-side pump 17 is disposed in the first-side tank 16, which can provide driving force to the fluid, causing the fluid to circulate in the first-side flow path 13. In this embodiment, when the temperature-adjusting fluid circulation system S1 starts operating, the first-side pump 17 is driven by a fixed driving force.

[0044] Furthermore, the first temperature-controlled fluid circulation device 10 is equipped with a first-side pressure sensor 19P, which is electrically connected to the controller 100. The first-side pressure sensor 19P detects the fluid pressure flowing downstream of the valve assembly 50 in the first-side flow path 13 and upstream of the first-side three-way valve 14.

[0045] Next, the second temperature-regulating fluid circulation device 20 also includes a second-side flow path 23, which allows the fluid, after being temperature-regulated by the second-side temperature-regulating unit 22, to circulate through the fluid supply object, namely the valve assembly 50. The second-side temperature-regulating unit 22, in one example, is the evaporator of a refrigerator, but other cooling machines can also be used. However, the second-side temperature-regulating unit 22 cools the fluid to a lower temperature than the first-side temperature-regulating unit 12. That is, in this embodiment, the operation of the temperature-regulating fluid circulation system S1 ensures that the temperature of the fluid after being temperature-regulated by the first temperature-regulating fluid circulation device 10 is higher than the temperature of the fluid after being temperature-regulated by the second temperature-regulating fluid circulation device 20.

[0046] The fluid circulating in the second side flow path 23 is the same as the fluid circulating in the first side flow path 13, such as brine, but other fluids such as water may also be used. In this embodiment, the second side flow path 23 also has an upstream end 23U and a downstream end 23D, each connected to the valve assembly 50. The fluid, after being temperature-regulated by the second side temperature regulating unit 22, is supplied to the valve assembly 50 from the downstream end 23D of the second side flow path 23. Furthermore, as described above, in this embodiment, the valve assembly 50 supplies the received fluid to the temperature-controlled object T. Also, similarly, the fluid flowing out of the temperature-controlled object T can return to the second side flow path 23 from the upstream end 23U via the valve assembly 50. However, if the fluid from the second temperature-regulating fluid circulation device 20 does not flow into the temperature-controlled object T through the valve assembly 50, the fluid from the temperature-controlled object T will not return to the second side flow path 23 from the valve assembly 50.

[0047] A second-side three-way valve 24 is also disposed downstream of the valve assembly 50 in the second-side flow path 23 and upstream of the temperature adjustment position of the second-side temperature adjustment section 22. The second-side three-way valve 24 has a second-side first port 24A, a second-side second port 24B and a second-side third port 24C, and the portion between the second-side first port 24A and the second-side third port 24C constitutes part of the second-side flow path 23.

[0048] The second port 24B of the second side of the third valve 24 is connected to a second side bypass flow path 25. The second side bypass flow path 25 is a branch from the position downstream of the temperature adjustment position of the second side temperature adjustment section 22 in the second side flow path 23 and upstream of the valve assembly 50.

[0049] The second-side three-way valve 24 is a proportional three-way valve with a second-side stepper motor 24M, which can be used as an actuator to drive the valve body. The second-side three-way valve 24 adjusts the position of the valve body (not shown) by means of the second-side stepper motor 24M, and changes the ratio of the fluid flow rate from the second-side first port 24A to the second-side third port 24C to the fluid flow rate from the second-side second port 24B to the second-side third port 24C in relation to the valve body position.

[0050] Furthermore, a second-side tank 26 is positioned downstream of the second-side three-way valve 24 and upstream of the temperature-adjusting position of the second-side temperature-adjusting unit 22 in the second-side flow path 23. The second-side tank 26 also constitutes part of the second-side flow path 23. The second-side tank 26 stores only a fixed amount of liquid, i.e., fluid. A second-side pump 27 is installed inside the second-side tank 26, which can provide driving force to the fluid, causing the fluid to circulate in the second-side flow path 23. When the temperature-adjusting fluid circulation system S1 starts operating, the second-side pump 27 is also driven by a fixed driving force.

[0051] Furthermore, the second temperature-controlled fluid circulation device 20 is equipped with a second-side pressure sensor 29P, which is electrically connected to the controller 100. The second-side pressure sensor 29P detects the fluid pressure flowing downstream of the valve assembly 50 in the second-side flow path 23 and upstream of the second-side three-way valve 24.

[0052] In this embodiment, the first temperature-controlled fluid circulation device 10 and the second temperature-controlled fluid circulation device 20 circulate the same liquid. The liquid storage positions of the first side tank 16 and the second side tank 26 are connected by a piping component 30. The liquid level storage position is located below the liquid level when a fixed amount of liquid is stored in the tank. The amount of liquid stored in the tank is predetermined.

[0053] The piping assembly 30 allows liquid to flow between the first side tank 16 and the second side tank 26. This ensures that the liquid levels in the first side tank 16 and the second side tank 26 are equal, and that the pressures of the stored liquids are also equal. In this embodiment, the liquid from the first temperature-controlled fluid circulation device 10 and the liquid from the second temperature-controlled fluid circulation device 20 can be mixed by the valve assembly 50 and then supplied to the temperature-controlled object T. Here, by equalizing the pressures of the two liquids through the piping assembly 30, the temperature of the mixed liquid can be easily controlled to the desired temperature.

[0054] Next, the valve assembly 50 will be described. The valve assembly 50 is a fluid that receives fluid from the first temperature-controlled fluid circulation device 10, fluid from the second temperature-controlled fluid circulation device 20, or a mixture of fluid from the first temperature-controlled fluid circulation device 10 and fluid from the second temperature-controlled fluid circulation device 20, and sends the fluid that has passed through the temperature-controlled object T toward the temperature-controlled object T, and returns the fluid that has passed through the temperature-controlled object T to the first side flow path 13 and / or the second side flow path 23.

[0055] The valve assembly 50 in this embodiment includes a valve assembly-side supply three-way valve 51 and a valve assembly-side return three-way valve 52. The valve assembly-side supply three-way valve 51 includes a first receiving port 51A, a second receiving port 51B, and a supply port 51C. The first receiving port 51A is connected to the downstream end 13D of the first flow path 13 of the first temperature-controlled fluid circulation device 10, and the second receiving port 51B is connected to the downstream end 23D of the second flow path 23 of the second temperature-controlled fluid circulation device 20. The supply port 51C is connected to the temperature-controlled object T through the flow path.

[0056] The valve assembly side supply three-way valve 51 is a proportional three-way valve with a stepper motor 51M, which can be used as an actuator to drive the valve body. The valve assembly side supply three-way valve 51 adjusts the position of the valve body (not shown) by means of the stepper motor 51M. Corresponding to the position of the valve body, the mixing ratio of the fluid received from the first temperature-controlled fluid circulation device 10 by the first receiving port 51A and the fluid received from the second temperature-controlled fluid circulation device 20 by the second receiving port 51B is changed, and then flows out from the supply port 51C.

[0057] On the other hand, the valve assembly side return three-way valve 52 includes a return port 52A, a first distribution port 52B, and a second distribution port 52C. The return port 52A is connected to the temperature control object T through a flow path. Furthermore, the first distribution port 52B is connected to the upstream end 13U of the first side flow path 13 of the first temperature-regulating fluid circulation device 10, and the second distribution port 52C is connected to the upstream end 23U of the second side flow path 23 of the second temperature-regulating fluid circulation device 20.

[0058] The valve assembly-side return three-way valve 52 is also a proportional three-way valve, equipped with a stepper motor 52M, which can be used as an actuator to drive the valve body. The valve assembly-side return three-way valve 52 adjusts the position of the valve body (not shown) by means of the stepper motor 52M. Corresponding to the position of the valve body, the fluid received by the return port 52A is returned to the first temperature-controlled fluid circulation device 10 and the second temperature-controlled fluid circulation device 20 at a predetermined ratio.

[0059] In this embodiment, the supply three-way valve 51 and the return three-way valve 52 on the valve assembly side are of the same type and size. Furthermore, the opening degree of the supply three-way valve 51 and the return three-way valve 52 on the valve assembly side is controlled by the controller 100. Specifically, the supply three-way valve 51 and the return three-way valve 52 on the valve assembly side are controlled by the controller 100 to have the same opening degree.

[0060] Furthermore, the temperature-regulating fluid circulation system S1 in this embodiment includes: a valve assembly-side pressure sensor 54 that detects the fluid pressure supplied to the three-way valve 51 from the valve assembly side, specifically from the fluid pressure flowing out of the supply port 51C; and a temperature sensor 55 that detects the temperature of the temperature-controlled object T. The controller 100 receives information about the fluid from the first-side pressure sensor 19P, the second-side pressure sensor 29P, and the valve assembly-side pressure sensor 54, and receives information about the temperature of the temperature-controlled object T from the temperature sensor 55.

[0061] The controller 100 in this embodiment will now be described. The controller 100 controls the opening of the first-side three-way valve 14 so that the fluid pressure detected by the first-side pressure sensor 19P becomes a designated first-side target pressure, and controls the opening of the second-side three-way valve 24 so that the fluid pressure detected by the second-side pressure sensor 29P becomes a designated second-side target pressure. Here, each of these target pressures is input to the controller 100 by the user.

[0062] More specifically, in this embodiment, the controller 100 controls the opening of the first-side three-way valve 14 based on the difference between the fluid pressure detected by the first-side pressure sensor 19P and the first-side target pressure, so that the fluid pressure detected by the first-side pressure sensor 19P becomes the designated first-side target pressure. Similarly, based on the difference between the fluid pressure detected by the second-side pressure sensor 29P and the second-side target pressure, the controller controls the opening of the second-side three-way valve 24 based on the difference between the fluid pressure detected by the second-side pressure sensor 29P and the second-side target pressure, so that the fluid pressure detected by the second-side pressure sensor 29P becomes the designated second-side target pressure. Furthermore, the controller 100 feeds forward to control the opening of each of the first-side three-way valve 14 and the second-side three-way valve 24 based on fluid pressure information from the valve assembly-side pressure sensor 54.

[0063] The aforementioned feedforward control is implemented based on information from the valve assembly side pressure sensor 54. If the absolute value of the rate of change of the pressure supplied to the three-way valve 51 on the valve assembly side is determined to be above a threshold value, the opening degree of the first-side three-way valve 14 and the second-side three-way valve 24 is changed by the amount of operation corresponding to the magnitude of the absolute value of the aforementioned rate of change.

[0064] In detail, when the absolute value of the rate of change of pressure supplied to the three-way valve 51 on the valve assembly side is above the threshold value of the rising side, the opening degree of the first-side three-way valve 14 is changed by an operating amount that is proportional to the magnitude of the absolute value of the rate of change, thereby increasing the opening degree of the first port 14A and the third port 14C on the first side, and the opening degree of the second-side three-way valve 24 is changed, thereby increasing the opening degree of the first port 24A and the third port 24C on the second side. On the other hand, when the absolute value of the rate of change of pressure supplied to the three-way valve 51 on the valve assembly side is above the threshold value of the falling side, the opening of the first three-way valve 14 on the first side is changed by an operating amount that is proportional to the magnitude of the absolute value of the rate of change, so that the opening of the first port 14A and the third port 14C on the first side are reduced, and the opening of the second three-way valve 24 on the second side is changed, so that the opening of the first port 24A and the third port 24C on the second side are reduced.

[0065] The aforementioned rate of change of pressure refers to the amount of pressure change per unit time. The rate of change of pressure is calculated by taking the moving average of the pressure per unit time, and dividing the difference between the latest moving average and the previously calculated moving average by the unit time. The time range for calculating the moving average can be, for example, a time range traversed from the point in time where the rate of change is calculated. Furthermore, it is preferable that the valve assembly-side pressure sensor 54 detects at least five pressure readings within the time range used to calculate the moving average.

[0066] Figure 4 is a flowchart illustrating an example of the operation of the temperature-regulating fluid circulation system S1. Hereinafter, an example of the operation of the temperature-regulating fluid circulation system S1 will be described with reference to Figure 4.

[0067] One example of the operation described here is that it begins only after the temperature-controlled fluid circulation system S1 starts operating and the temperature of the controlled object T reaches the target temperature. At this time, the first-side three-way valve 14 and the second-side three-way valve 24 are controlled at a predetermined reference opening degree, which is an intermediate opening degree between fully closed and fully open. Furthermore, for example, if the temperature sensor 55 detects that the temperature of the controlled object T has reached the target temperature, in step 201, the controller 100 monitors whether the absolute value of the rate of change of pressure (hereinafter, pressure change rate) supplied to the three-way valve 51 on the valve assembly side is above a threshold value based on information from the valve assembly side pressure sensor 54.

[0068] If, in step S201, the absolute value of the pressure change rate is determined to be above a threshold value, the controller 100, in step S202, changes the opening degree of the first-side three-way valve 14 and the second-side three-way valve 24 by an operation amount corresponding to the magnitude of the absolute value of the pressure change rate, and then moves the process to step S203. On the other hand, if, in step S201, the absolute value of the pressure change rate is not determined to be above a threshold value, the process moves to step S203.

[0069] Furthermore, in step S203, the controller 100, based on the difference between the fluid pressure detected by the first-side pressure sensor 19P and the first-side target pressure, controls the opening of the first-side three-way valve 14 to make the fluid pressure detected by the first-side pressure sensor 19P the designated first-side target pressure, and based on the difference between the fluid pressure detected by the second-side pressure sensor 29P and the second-side target pressure, controls the opening of the second-side three-way valve 24 to make the fluid pressure detected by the second-side pressure sensor 29P the designated second-side target pressure.

[0070] Next, in step S204, it is detected whether the controller 100 has generated a stop command. If it is detected, the operation of the temperature regulating fluid circulation system S1 will be stopped. If it is not detected, the process will return to step S201.

[0071] In the second embodiment described above, the fluid pressure flowing out of the temperature-controlled object T and returning to the first side flow path 13 and / or the second side flow path 23 can be maintained at the desired value. Therefore, by improving the stability of the fluid circulation state in the first side flow path 13 and / or the second side flow path 23, the accuracy of temperature control performed by the fluid can be improved.

[0072] By combining feedback control based on the first-side pressure sensor 19P and the second-side pressure sensor 29P toward the target pressure, and feedforward control based on the rate of change of fluid pressure on the valve assembly 50 side, the reliability and speed of control toward the target pressure can be improved.

[0073] Furthermore, in the second embodiment, although the feedforward control is based on the pressure information detected by the pressure sensor 54 on the valve assembly side, it can also be performed based on the absolute value of the rate of change of the load of the stepper motor 51M supplying the three-way valve 51 on the valve assembly side. That is, the controller 100 receives information about the load of the actuator, i.e., the stepper motor 51M, which provides driving force to the valve body. Based on the received load information, if the absolute value of the rate of change of the load of the stepper motor 51M is determined to be above a threshold value, feedforward control can be performed by changing the opening degree of the first-side three-way valve 14 and the second-side three-way valve 24 by an operation amount corresponding to the magnitude of the absolute value of the rate of change. In this case, from the viewpoint of simplification and processing speed, it is advantageous because the feedforward control can be implemented by a special sensor and the internal processing of the controller 100.

[0074] <Third Embodiment> Next, the temperature-regulating fluid circulation system S2 of the third embodiment will be described. Figure 5 is a schematic diagram of the temperature-regulating fluid circulation system S2. The same reference numerals are used for the same parts as in the first and second embodiments of this embodiment. In this embodiment, the configuration of the valve assembly 60 differs from that of the valve assembly 50 described in the second embodiment.

[0075] Valve assembly 60 includes a first slide valve 61 for switching fluid flow from the first temperature-regulating fluid circulation device 10 to the temperature-controlled object T and for shutting it off, and a second slide valve 62 for switching fluid flow from the second temperature-regulating fluid circulation device 20 to the temperature-controlled object T and for shutting it off. The first slide valve 61 is a proportional slide valve, and by switching fluid flow from the first temperature-regulating fluid circulation device 10 to the temperature-controlled object T and shutting it off, the flow rate of fluid flowing from the first temperature-regulating fluid circulation device 10 to the temperature-controlled object T can be adjusted. Similarly, the second slide valve 62 is also a proportional slide valve, and by switching fluid flow from the second temperature-regulating fluid circulation device 20 to the temperature-controlled object T and shutting it off, the flow rate of fluid flowing from the second temperature-regulating fluid circulation device 20 to the temperature-controlled object T can be adjusted.

[0076] Furthermore, the first circulation path 63 and the second circulation path 64 extend from the branch of the temperature control object T. The first circulation path 63 is connected to the first slide valve 61, and the second circulation path 64 is connected to the second slide valve 62. Thus, the fluid flowing out of the temperature control object T can flow into the first slide valve 61 through the first circulation path 63, and can flow into the second slide valve 62 through the second circulation path 64.

[0077] Furthermore, the first slide valve 61 has a port for returning fluid from the first circulation path 63 to the first temperature-regulating fluid circulation device 10, and is linked to the adjustment of the fluid flow rate flowing from the first temperature-regulating fluid circulation device 10 to the temperature-controlled object T, thereby adjusting the fluid flow rate returning from the first circulation path 63 to the first temperature-regulating fluid circulation device 10. Similarly, the second slide valve 62 also has a port for returning fluid from the second circulation path 64 to the second temperature-regulating fluid circulation device 20, and is linked to the adjustment of the fluid flow rate flowing from the second temperature-regulating fluid circulation device 20 to the temperature-controlled object T, thereby adjusting the fluid flow rate returning from the second circulation path 64 to the second temperature-regulating fluid circulation device 20.

[0078] In this embodiment, a first sliding shaft internal pressure sensor 65 is provided to detect the fluid pressure inside the first slide valve 61, specifically detecting the fluid pressure in the port from which the fluid flows toward the temperature control target T. The controller 100 receives information about the fluid pressure inside the first slide valve 61 from the first sliding shaft internal pressure sensor 65. Furthermore, based on the received information, if the absolute value of the rate of change of the fluid pressure inside the first slide valve 61 is determined to be above a threshold value, the controller 100 performs feedforward control by adjusting the opening degree of the first-side three-way valve 14 and the second-side three-way valve 24 according to the magnitude of the absolute value of the rate of change. In the feedforward control, the same processing as in the second embodiment is performed.

[0079] Based on the third embodiment described above, the same effect as in the second embodiment can be obtained. Furthermore, in the third embodiment, although the pressure sensor 65 inside the first slide shaft detects the fluid pressure inside the port of the first slide valve 61, it could also detect the fluid pressure after it flows out of the port of the first slide valve 61 and before it flows into the temperature control object T. Moreover, the pressure sensor could also be located on the side of the second slide valve 62.

[0080] Furthermore, in this embodiment, although the feedforward control is based on the pressure information detected by the pressure sensor 65 inside the first slide shaft, it can also be performed based on the rate of change of the load of the electromagnetic coil that drives the first slide valve 61. That is, the controller 100 receives information about the load of the actuator, i.e., the electromagnetic coil, that applies driving force to the valve body. Based on the received load information, if the absolute value of the rate of change of the load of the electromagnetic coil is determined to be above a threshold value, feedforward control can be performed by changing the opening degree of the first-side three-way valve 14 and the opening degree of the second-side three-way valve 24 by an operation amount corresponding to the magnitude of the absolute value of the aforementioned rate of change.

[0081] While the above embodiments have been described, the present invention is not limited to the embodiments described above, and various modifications can be made to the embodiments described above. Such modifications are also included within the scope of the present invention. For example, in FIG5, although the first slide valve 61 and the second slide valve 62 are separate, the first slide valve 61 and the second slide valve 62 have a common slide valve, and they can also be integrated with each other.

[0082] 1: Temperature-regulating fluid circulation device 2: Temperature control section 3: Flow path 3D: Downstream end 3U: Upstream end 4: Three-way valve 4A: Port 1 4B: Second port 4C: Port 3 4M: Stepper motor 5: Bypass Flow Path 6: Tank 7: Pump 8: Liquid level maintenance mechanism 9P: Pressure sensor 9T: Temperature Sensor 10: First temperature-regulating fluid circulation device 12: First side temperature control unit 13: First side flow path 13D: Downstream end 13U: Upstream end 14: First side three-way valve 14A: First opening on the first side 14B: Second opening on the first side 14C: Third opening on the first side 14M: First side stepper motor 15: First side bypass flow path 16: First side tank 17: First side pump 19P: First-side pressure sensor 20: Second temperature-regulating fluid circulation device 22: Second side temperature control unit 23: Second side flow path 23D: Downstream end 23U: Upstream end 24: Second side three-way valve 24A: Second side, first opening 24B: Second side, second opening 24C: Second side, third opening 24M: Second side stepper motor 25: Second side bypass flow path 26: Second side tank 27: Second side pump 29P: Second-side pressure sensor 30: Piping components 50: Valve assembly 51: Valve assembly side supply three-way valve 51A: First receiving port 51B: Second receiving port 51C: Supply Port 51M: Stepper motor 52: Valve assembly side return three-way valve 52A: Return to port 52B: First Distribution Port 52C: Second Distribution Port 52M: Stepper motor 54: Valve assembly side pressure sensor 55: Temperature sensor 60: Valve assembly 61: 1st slide valve 62: 2nd slide valve 63: First Circular Flow Path 64: Second loop flow path 65: Pressure sensor inside the first sliding shaft 100: Controller S1: Temperature-regulating fluid circulation system S2: Temperature-regulating fluid circulation system T: Temperature control object

Claims

1. A temperature-controlled fluid circulation device comprising: a flow path for circulating fluid, after being temperature-controlled by a temperature-regulating unit, through a fluid supply object; a three-way valve disposed downstream of the fluid supply object and upstream of the temperature-regulating position of the temperature-regulating unit in the flow path, and comprising a portion between two of the three ports forming part of the flow path; a bypass flow path branching from the downstream position of the temperature-regulating unit and upstream of the fluid supply object in the flow path, and connected to a remaining port different from the two ports forming part of the flow path of the three-way valve; a pressure sensor for detecting the fluid pressure flowing downstream of the fluid supply object and upstream of the three-way valve in the flow path; and a controller for controlling the three-way valve; wherein the controller controls the opening degree of the three-way valve to make the fluid pressure detected by the pressure sensor a specified target pressure.

2. The temperature-regulating fluid circulation device as described in claim 1, wherein, Equipped with a pump, it can apply a driving force to the aforementioned fluid to circulate the fluid in the aforementioned flow path, and the pump is driven by a fixed driving force.

3. The temperature-regulating fluid circulation device as described in claim 1, wherein, The aforementioned fluid is a liquid, and further comprises: a tank located downstream of the aforementioned three-way valve and upstream of the temperature adjustment position of the aforementioned temperature control unit in the aforementioned flow path, constituting part of the aforementioned flow path; and a liquid level maintenance mechanism for maintaining the height of the liquid level stored in the aforementioned tank at a fixed height.

4. The temperature-regulating fluid circulation device as claimed in claim 1, wherein, The aforementioned controller receives information about the temperature of the aforementioned fluid supply object. Based on the aforementioned information, if the absolute value of the temperature change rate of the aforementioned fluid supply object is determined to be above a threshold value, the opening degree of the aforementioned three-way valve is changed by feedforward control using an operation quantity corresponding to the magnitude of the absolute value of the aforementioned change rate.

5. A temperature-controlled fluid circulation system comprising: a valve assembly; and a first temperature-controlled fluid circulation device comprising: a first-side flow path, a first-side three-way valve, a first-side bypass flow path, and a first-side pressure sensor, wherein the first-side flow path circulates fluid that has been temperature-controlled by a first-side temperature-controlled unit through the valve assembly, and the first-side three-way valve is disposed downstream of the valve assembly in the first-side flow path and upstream of the temperature-controlled position of the first-side temperature-controlled unit, and a portion of the first-side flow path is formed by the portion between two of the three ports. The aforementioned first-side bypass flow path branches off from the downstream side of the temperature-adjusting position of the aforementioned first-side temperature-adjusting unit and the upstream side of the aforementioned valve assembly in the aforementioned first-side flow path, and connects to the remaining port, which is different from the two ports that constitute part of the aforementioned first-side flow path among the three ports of the aforementioned first-side three-way valve. The aforementioned first-side pressure sensor detects the fluid pressure flowing at the downstream side of the aforementioned valve assembly and the upstream side of the aforementioned first-side three-way valve in the aforementioned first-side flow path; and the second temperature-adjusting fluid circulation device. It includes: a second-side flow path, a second-side three-way valve, a second-side bypass flow path, and a second-side pressure sensor. The second-side flow path circulates fluid that has been heated by the second-side temperature control unit through the aforementioned valve assembly. The second-side three-way valve is located downstream of the valve assembly in the second-side flow path and upstream of the temperature control position of the second-side temperature control unit, and is formed by the portion between two of the three ports. The second-side bypass flow path is for fluid that has been heated by the second-side temperature control unit through the aforementioned valve assembly. The second-side flow path is located downstream of the temperature-adjusting position of the aforementioned second-side temperature-adjusting unit and upstream of the aforementioned valve assembly, and connected to the remaining port, which is different from the two ports that constitute part of the aforementioned second-side flow path among the three ports of the aforementioned second-side three-way valve; the aforementioned second-side pressure sensor is a device that detects the fluid pressure flowing at the downstream position of the aforementioned valve assembly and upstream position of the aforementioned second-side three-way valve in the aforementioned second-side flow path; and a controller that controls the aforementioned first-side three-way valve and the aforementioned second-side three-way valve; The aforementioned valve assembly delivers fluid received from the aforementioned first temperature-controlled fluid circulation device, fluid received from the aforementioned second temperature-controlled fluid circulation device, or a mixture of fluid received from the aforementioned first temperature-controlled fluid circulation device and fluid received from the aforementioned second temperature-controlled fluid circulation device, toward the temperature-controlled object, and returns the fluid that has passed through the aforementioned temperature-controlled object to the aforementioned first-side flow path and / or the aforementioned second-side flow path. The aforementioned controller controls the opening of the aforementioned first-side three-way valve so that the fluid pressure detected by the aforementioned first-side pressure sensor becomes the designated first-side target pressure, and controls the opening of the aforementioned second-side three-way valve so that the fluid pressure detected by the aforementioned second-side pressure sensor becomes the designated second-side target pressure.

6. The temperature-controlled fluid circulation system as described in claim 5, wherein, The fluid circulating in the first temperature-regulating fluid circulation device and the fluid circulating in the second temperature-regulating fluid circulation device are the same liquid. The first temperature-regulating fluid circulation device has a first side tank and is located downstream of the first side three-way valve and upstream of the temperature-regulating position of the first side temperature-regulating part in the first side flow path, and constitutes part of the first side flow path. The second temperature-regulating fluid circulation device has a second side tank and is located downstream of the second side three-way valve and upstream of the temperature-regulating position of the second side temperature-regulating part in the second side flow path, and constitutes part of the second side flow path. The liquid storage positions of the first side tank and the second side tank are connected by piping components.

7. The temperature-controlled fluid circulation system as described in claim 5, wherein, The aforementioned valve assembly has a three-way valve on the valve assembly side, including a first receiving port, a second receiving port, and a supply port. The aforementioned three-way valve on the valve assembly side can change the mixing ratio of fluid received from the aforementioned first temperature-regulating fluid circulation device through the aforementioned first receiving port and fluid received from the aforementioned second temperature-regulating fluid circulation device through the aforementioned second receiving port, and then flow out from the aforementioned supply port. The aforementioned controller receives information about the fluid pressure in the aforementioned three-way valve on the valve assembly side. Based on the aforementioned information, if the absolute value of the rate of change of the fluid pressure in the aforementioned three-way valve on the valve assembly side is determined to be above a threshold value, the controller changes the opening degree of the aforementioned three-way valve on the first side and the opening degree of the aforementioned three-way valve on the second side by feedforward control according to the operation amount corresponding to the magnitude of the absolute value of the aforementioned rate of change.

8. The temperature-controlled fluid circulation system as requested in item 5 or 6, wherein, The aforementioned valve assembly has a three-way valve on the valve assembly side, including a first receiving port, a second receiving port, and a supply port. The aforementioned three-way valve on the valve assembly side can change the mixing ratio of fluid from the aforementioned first temperature-regulating fluid circulation device received by the aforementioned first receiving port and fluid from the aforementioned second temperature-regulating fluid circulation device received by the aforementioned second receiving port, and then flow out from the aforementioned supply port, depending on the position of the valve body. The aforementioned controller receives information about the load of the actuator that applies driving force to the aforementioned valve body. Based on the aforementioned information, if the absolute value of the rate of change of the load of the aforementioned actuator is determined to be above a threshold value, the controller changes the opening degree of the aforementioned first-side three-way valve and the opening degree of the aforementioned second-side three-way valve by feedforward control according to the operation amount corresponding to the magnitude of the absolute value of the aforementioned rate of change.

9. The temperature-controlled fluid circulation system as requested in item 5 or 6, wherein, The aforementioned valve assembly has a slide valve that can change the mixing ratio of the fluid received from the aforementioned first temperature-regulating fluid circulation device and the fluid received from the aforementioned second temperature-regulating fluid circulation device according to the position of the slide shaft, and then flow out towards the aforementioned temperature-controlled object. The aforementioned controller receives information about the pressure of the fluid in the aforementioned slide valve or the fluid flowing from the aforementioned slide valve towards the aforementioned temperature-controlled object. Based on the aforementioned information, if the absolute value of the rate of change of the fluid pressure in the aforementioned slide valve is determined to be above a threshold value, the controller changes the opening degree of the aforementioned first-side three-way valve and the aforementioned second-side three-way valve by feedforward control according to the operation amount corresponding to the magnitude of the absolute value of the aforementioned rate of change.

10. The temperature-controlled fluid circulation system as requested in item 5 or 6, wherein, The aforementioned valve assembly has a slide valve that can change the mixing ratio of the fluid received from the aforementioned first temperature-regulating fluid circulation device and the fluid received from the aforementioned second temperature-regulating fluid circulation device according to the position of the slide shaft, and then flow out towards the aforementioned temperature-controlled object side. The aforementioned controller receives information about the load of the actuator that applies driving force to the aforementioned slide shaft. Based on the aforementioned information, if the absolute value of the rate of change of the load of the aforementioned actuator is determined to be above a threshold value, the controller changes the opening degree of the aforementioned first-side three-way valve and the aforementioned second-side three-way valve by feedforward control according to the operation amount corresponding to the magnitude of the absolute value of the aforementioned rate of change.

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