Substrate processing apparatus and substrate processing method

Abstract

This invention provides a technique for improving the separation efficiency of a separation membrane. The substrate processing apparatus 100 of this invention includes: a recovery tank 60 storing a mixed fluid comprising water recovered after being supplied to substrate W and an organic solvent recovered after being supplied to substrate W; a circulation pipe 62 connected to the recovery tank 60; a dehydrator 621 disposed in the circulation pipe 62, having a separation membrane 51 that allows water to pass through but not the organic solvent; a pump 622 disposed in the circulation pipe 62; and a heater 624 disposed downstream of the recovery tank 60 and upstream of the dehydrator 621 in the circulation pipe 62, heating the mixed fluid to above the boiling point of water.

Description

Technical Field

[0001] This invention relates to a substrate processing apparatus and a substrate processing method. Prior Technology

[0002] In substrate processing apparatus used in the manufacturing process of semiconductor devices, for example, a rinsing solution is used to clean the substrate after it has been treated with a chemical solution. In Patent Document 1, isopropyl alcohol (IPA) is supplied to a substrate that has already been cleaned with a rinsing solution (i.e., a substrate covered by a rinsing solution (typically water)) to replace the rinsing solution on the substrate. Then, the substrate is rotated at high speed to blow away the IPA adhering to it, thereby drying the substrate. When the substrate is rotated at high speed to blow away the adhering liquid, the surface tension of the adhering liquid may cause pattern collapse. By replacing the water adhering to the substrate with IPA, which has a lower surface tension than water, pattern collapse can be suppressed. Furthermore, since IPA is bipolar, it can be uniformly wetted even if the substrate surface is hydrophobic. Therefore, watermarks are less likely to form on the dried substrate. [Previous Technical Documents] [Patent Literature]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2017-41505 Summary of the Invention

[0004] [The problem the invention aims to solve] Patent Document 1 describes the recovery of IPA supplied to a substrate. Since the IPA is supplied to a substrate that is covered with water, the recovered IPA is diluted with water (i.e., the IPA is recovered as a mixture with water). Therefore, in order to reuse the recovered IPA, it is necessary to separate the water from the mixture.

[0005] When separating water from a mixture of organic solvents such as IPA and water, a separation membrane that allows water molecules to pass through but prevents organic solvent molecules from passing through can be considered. To shorten the time required for water separation, it is necessary to improve the separation efficiency of the membrane.

[0006] Therefore, the object of the present invention is to provide a technique that can improve the separation efficiency of a separation membrane. [Technical means to solve the problem]

[0007] The first embodiment is a substrate processing apparatus comprising: a rinsing liquid supply unit that supplies a rinsing liquid containing water to the substrate; an organic solvent supply unit that supplies an organic solvent to the substrate; a recovery tank that stores a mixed fluid comprising the water recovered after being supplied to the substrate and the organic solvent recovered after being supplied to the substrate; a circulation pipe connected to the recovery tank; a dehydrator disposed in the circulation pipe and having a separation membrane that allows the water to pass through but not the organic solvent; a pump disposed in the circulation pipe; and a heater disposed downstream of the recovery tank and upstream of the dehydrator in the circulation pipe, for heating the mixed fluid to above the boiling point of the water.

[0008] The second state sample is a substrate processing apparatus like the first state sample, which includes a cooler located downstream of the dehydrator in the circulation piping and upstream of the recovery tank.

[0009] The third state sample is a substrate processing apparatus similar to the second state sample, wherein the cooler cools the mixed fluid to a temperature lower than the boiling point of the organic solvent and higher than room temperature.

[0010] The fourth state sample is a substrate processing apparatus like the second or third state sample, wherein the pressure resistance of the piping section in the circulating piping that is downstream of the cooler and upstream of the heater is lower than the pressure resistance of the piping section in the circulating piping that is downstream of the heater and upstream of the cooler.

[0011] The fifth state is a substrate processing apparatus like any of the second to fourth states, which includes a pressure reducer installed in the circulation piping to reduce the pressure of the mixed fluid after it has been cooled by the cooler.

[0012] The sixth state sample is a substrate processing apparatus as described in any of the first to fifth states, comprising: a purification tank connected to the recovery tank via a liquid delivery pipe, for storing a concentrated fluid obtained by separating the water from the mixed fluid; and a filter provided in the pipe connected to the purification tank for capturing the target substance contained in the concentrated fluid flowing through the pipe.

[0013] The seventh state sample is a substrate processing apparatus similar to the sixth state sample, wherein the concentrated fluid stored in the purification tank is transported to the organic solvent supply unit after passing through the filter and is supplied to the substrate.

[0014] The eighth state is a substrate processing apparatus like any of the first to seventh states, wherein the circulation piping has a plurality of branch portions disposed between the branch position and the confluence position, and the recycling tank is disposed in each of the plurality of branch portions.

[0015] The ninth state is a substrate processing apparatus as described in any of the first to eighth states, wherein the dehydrator is arranged with a channel extending vertically, the channel becoming a flow path for the mixed fluid within the separation membrane, and the mixed fluid flowing through the circulation pipe flows in from the opening on the vertically lower side of the channel.

[0016] The 10th state sample is a substrate processing apparatus like the 9th state sample, wherein the dehydrator and the heater are arranged in the vertical direction.

[0017] The 11th embodiment is a substrate processing method, comprising: a rinsing liquid supply step, which supplies a rinsing liquid containing water to the substrate; an organic solvent supply step, which supplies an organic solvent to the substrate; a storage step, which stores a mixed fluid in a recovery tank, the mixed fluid comprising the water recovered after being supplied to the substrate and the organic solvent recovered after being supplied to the substrate; a circulation step, which circulates the mixed fluid stored in the recovery tank in a circulation pipe connected to the recovery tank; a heating step, which heats the mixed fluid to above the boiling point of water using a heater provided in the circulation pipe; and a separation step, which allows the heated mixed fluid to flow into a dehydrator to separate the water from the mixed fluid, the dehydrator being provided downstream of the heater in the circulation pipe and upstream of the recovery tank, and having a separation membrane that allows the water to pass through but not the organic solvent. [Effects of the Invention]

[0018] According to the first and eleventh states, the water contained in the mixed fluid can flow into the dehydrator in a vapor state. This improves the separation efficiency of the separation membrane.

[0019] According to the second state, by using a cooler to cool the heated mixed fluid, the pressure of the mixed fluid can be reduced.

[0020] According to the third state, by using a cooler for cooling, the organic solvent contained in the mixed fluid returns from a vapor state to a liquid state, thus enabling a sufficient decrease in the pressure of the mixed fluid. On the other hand, the cooler only cools the mixed fluid to a temperature higher than room temperature, thus reducing the load on both the heater and the cooler.

[0021] According to the fourth state, the pressure resistance of one part of the circulation piping (the piping section that is more downstream of the cooler and more upstream of the heater) is lower than that of other parts of the circulation piping (the piping section that is more downstream of the heater and more upstream of the cooler). Therefore, compared with the case where the circulation piping as a whole has relatively high pressure resistance, the device can be miniaturized.

[0022] According to the fifth state, a pressure reducer can be used to further reduce the pressure of the mixed fluid after it has been reduced by the cooler.

[0023] According to the sixth state sample, it is possible to remove the target substance from the concentrated fluid obtained by separating water from the mixed fluid, thereby improving the cleanliness of the concentrated fluid.

[0024] According to the seventh state sample, a concentrated fluid obtained by separating water from a mixed fluid containing water recovered after being supplied to the substrate and organic solvent recovered after being supplied to the substrate is supplied to the substrate again after its cleanliness is improved. Therefore, it is possible to reduce the amount of organic solvent used and discharged.

[0025] According to the 8th state sample, multiple recovery tanks are provided in the circulation piping. Therefore, by switching the recovery tank as the destination of liquid delivery, it is possible to continuously deliver water and organic solvents that are recovered after being supplied to the substrate.

[0026] According to the ninth state, the mixed fluid flowing into the channel from the circulation pipe flows upward within the vertically extending channel. Therefore, the mixed fluid flowing into the channel remains sufficiently within the channel and comes into full contact with the separation membrane. This further improves the separation efficiency.

[0027] According to the 10th state, the heat loss of the mixed fluid heated by the heater before flowing into the dehydrator is reduced. Consequently, the load on the heater is reduced. Simple Explanation of the Diagram

[0028] Figure 1 is a top view showing a schematic example of the configuration of a substrate processing apparatus. Figure 2 is a side view showing a schematic example of the configuration of a processing unit. Figure 3 is a schematic diagram illustrating an example of the structure of an organic solvent recovery unit. Figure 4 is a side sectional view that schematically shows an example of the configuration of a dehydrator. Figure 5 is a diagram illustrating one example of the processing flow in the organic solvent recovery section. Figure 6 is a diagram illustrating one example of a process for separating water from a mixed fluid. Figure 7 is a diagram used to illustrate step S1. Figure 8 is a diagram used to illustrate step S201. Figure 9 is a diagram used to illustrate step S203. Figure 10 is a diagram used to illustrate step S207. Figure 11 is a diagram used to illustrate step S3. Figure 12 is a diagram used to illustrate step S4. Figure 13 is a schematic diagram showing an example of the structure of the organic solvent recovery unit in a modified example. Implementation

[0029] The embodiments will now be described with reference to the accompanying drawings. Furthermore, the constituent elements described in these embodiments are merely illustrative and are not intended to limit the scope of the invention. Also, the accompanying drawings are schematic representations; for ease of explanation, appropriate omissions, exaggerations or simplifications of components, dimensions, numbers, and structures may be made. Furthermore, the positional relationships of the components shown in the accompanying drawings are not necessarily accurate.

[0030] Expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) unless otherwise specified, not only strictly represent the positional relationship, but also include the state after relative displacement in terms of angle or distance within the tolerance range or range that can achieve equivalent functionality. Expressions indicating equal states (e.g., "same," "equal," "homogeneous," etc.) unless otherwise specified, not only strictly represent the state of equality quantitatively, but also include the state of having tolerances or differences that can achieve equivalent functionality. Expressions indicating shapes (e.g., "circular," "elliptical," "quadrilateral," "cylindrical," etc.) unless otherwise specified, not only strictly represent the shape geometrically, but may also include shapes within the range that can achieve equivalent effects, such as those with concavity, convexity, or chamfers. The expressions "possess," "have," "equip," "include," and "have" are not exclusive expressions that exclude the existence of other constituent elements. The expression "at least one of A, B, and C" includes "only A," "only B," "only C," "any two of A, B, and C," and "all of A, B, and C." When using ordinal numbers such as "first" or "second," these terms are used arbitrarily for ease of understanding of the implementation method and are not limited to the possible order in which these ordinal numbers may be generated.

[0031] <1. Substrate Processing Apparatus> The substrate processing apparatus 100 of the embodiment will be described with reference to FIG1. ​​FIG1 is a top view showing a schematic configuration example of the substrate processing apparatus 100.

[0032] The substrate processing apparatus 100 is a so-called monolithic processing apparatus that processes substrates W one by one as the processing target. The substrate W, which is the processing target of the substrate processing apparatus 100, is, for example, a semiconductor substrate. Furthermore, the shape of the substrate W, which is the processing target, is, for example, a circular plate shape.

[0033] The substrate processing apparatus 100 includes a loading port 1, a transfer robot 2, a main transport robot 3, a processing unit 4, an organic solvent recovery unit 5, and a control unit 6.

[0034] Loading port 1 is an interface for loading and unloading substrates W into a container, i.e., a carrier C, that holds a plurality of substrates W. For example, a plurality of loading ports 1 are provided (three in the illustrated example). The plurality of loading ports 1 are arranged, for example, in a horizontal row. The carrier C can be a type that houses the substrates W in a closed space (e.g., FOUP (Front Opening Unified Pod), SMIF (Standard Mechanical Interface) wafer cassette, etc.), or a type that exposes the substrates W to the external atmosphere (e.g., OC (Open Cassette), etc.).

[0035] The transfer robot 2 is a transport device for conveying substrate W. As an example, the transfer robot 2 is a horizontal articulated robot, equipped with hands 21, 21 holding the substrate W and arms 22 connected to each hand 21. Furthermore, the transfer robot 2 has a drive mechanism (not shown) for rotating each hand 21 and extending, rotating, and lifting each arm 22. The transfer robot 2 transports substrate W between a carrier C placed on loading port 1 and the main transport robot 3. That is, the transfer robot 2 moves in and out of the carrier C placed on loading port 1, performing a take-out action (i.e., taking the substrate W held by the hand 21 out of the carrier C) and a take-in action (i.e., receiving the substrate W held by the hand 21 into the carrier C). Additionally, the transfer robot 2 moves in and out of the handover position to hand over the substrate W to the main transport robot 3.

[0036] The main transport robot 3 is a transport device for transporting substrate W. As an example, the main transport robot 3 is a horizontal multi-joint robot, equipped with one hand 31, 31 holding the substrate W and an arm 32 connected to each hand 31. Furthermore, the main transport robot 3 has a drive mechanism (not shown) for rotating each hand 31 and extending, rotating, and lifting each arm 32. The main transport robot 3 transports substrate W between the transfer robot 2 and each processing unit 4. That is, the main transport robot 3 moves in and out to the handover position to hand over substrate W with the transfer robot 2. Also, the main transport robot 3 moves in and out of the processing unit 4, performing a loading action (i.e., loading the substrate W held by the hand 31 into the processing unit 4) and a loading action (i.e., removing the substrate W from the processing unit 4 by means of the hand 31).

[0037] Processing unit 4 uses a processing liquid (e.g., a chemical solution, rinsing solution, and organic solvent) to perform a specified treatment on substrate W. Here, for example, a plurality of processing units 4 stacked in the vertical direction (e.g., 3) constitute a tower, and a plurality of towers are arranged to surround the main transport robot 3 (4 in the illustrated example). The specific configuration of processing unit 4 will be described below.

[0038] The organic solvent recovery unit 5 recovers the organic solvents used for processing in the processing unit 4 and supplies them back to the processing unit 4. Here, for example, the number of organic solvent recovery units 5 is the same as the number of towers. Each organic solvent recovery unit 5 corresponds to one tower, recovering the organic solvents used for processing in each processing unit 4 contained in the corresponding tower and supplying them back to each processing unit 4. The specific structure of the organic solvent recovery unit 5 will be described below.

[0039] The control unit 6 controls the operation of each component (loading port 1, transfer robot 2, main transfer robot 3, processing unit 4, and organic solvent recovery unit 5) of the board processing device 100. The control unit 6 may be configured as, for example, a general-purpose computer with electrical circuits. As an example, the control unit 6 includes a CPU (Central Processing Unit) which performs various arithmetic operations (data processing), a ROM (Read Only Memory) storing basic programs, RAM (Random Access Memory) used as a working area when the CPU performs specified processing (data processing), memory devices (specifically, non-volatile memory devices such as flash memory and hard disk drives), and buses connecting these components. The memory devices or RAM may store programs specifying the processing to be performed by the control unit 6. In this situation, for example, the CPU can execute the program, causing the various parts of the board processing device 100 to be controlled by the control unit 6, thereby executing the processing specified by the program in the board processing device 100. That is, the CPU can execute the program, and the circuitry that executes the processing specified by the program can be implemented in the control unit 6. However, part or all of the control performed by the control unit 6 (part or all of the circuitry implemented in the control unit 6) can also be executed (implemented) by hardware such as dedicated logic circuits.

[0040] <2. Processing Unit> <2-1. Composition of the Processing Unit> The configuration of the processing unit 4 will be described with reference to FIG2. FIG2 is a side view showing a schematic example of the configuration of the processing unit 4.

[0041] The processing unit 4 uses a processing liquid (e.g., a chemical solution, a rinsing solution, and an organic solvent) to perform a specified treatment on the substrate W. The processing unit 4 includes, for example, a rotating chuck 41, a cup 42, and a nozzle 43. The rotating chuck 41, the cup 42, and the nozzle 43 are housed in the processing chamber 44.

[0042] The rotating chuck 41 holds the substrate W in a horizontal position (the thickness direction of the substrate W is along the vertical direction), while simultaneously rotating the substrate W about an axis (rotation axis) A that passes through the center of its main surface and extends vertically. Specifically, the rotating chuck 41 includes, for example, a rotating base 411. The rotating base 411 is a circular plate-shaped component, arranged in a position where the thickness direction is along the vertical direction. A plurality of chuck pins 412 are provided on the upper surface of the rotating base 411. The plurality of chuck pins 412 are arranged at equal intervals along a circumference corresponding to the periphery of the substrate W. A linkage mechanism (not shown) is connected to the plurality of chuck pins 412, allowing them to move between an abutting position and a released position. The "abutting position" refers to the position where the chuck pin 412 abuts against the periphery of the substrate W. The "released position" refers to the position where the chuck pin 412 leaves the periphery of the substrate W. When all of the plurality of chuck pins 412 are in the abutting position, the substrate W is held horizontally above the rotating base 411. When all of the plurality of chuck pins 412 are in the released position, the holding of the substrate W is released. The linkage mechanism switches the positions of the chuck pins 412 according to instructions from the control unit 6. That is, the timing of holding the substrate W and the timing of releasing the holding of the substrate W are controlled by the control unit 6. Furthermore, the rotating base 411 is connected to the rotary motor 414 via a shaft 413 coaxially arranged with the rotation axis A. The shaft 413 and the rotary motor 414 are housed in a protective cover 415. The rotary motor 414 rotates the shaft 413 about the rotation axis A. This causes the rotating base 411, and even the substrate W held above it, to rotate about the rotation axis A. The rotary motor 414 rotates the rotating base 411 according to instructions from the control unit 6. That is, the rotation speed, rotation start timing, and rotation end timing of the rotating base 411 (and even the substrate W) are controlled by the control unit 6.

[0043] The cup 42 receives the processing liquid discharged from the substrate W, which is held and rotated by the rotary chuck 41. Specifically, the cup 42 includes, for example, a cylindrical guide portion 421 coaxially arranged with the rotation axis A, an inclined portion 422 connected to the upper end of the guide portion 421 and tapering upwards, and a liquid receiving portion 423 connected to the lower end of the guide portion 421 and forming an upwardly opening annular groove. A cup-side recovery tube is provided in the liquid receiving portion 423 to recover the liquid received therein. Here, for example, a cup-side recovery tube for pharmaceutical solutions (not shown) and a cup-side recovery tube 424 for organic solvents are provided. Furthermore, a cup lifting mechanism 425 is connected to the cup 42 to raise and lower it between a lower position and an upper position. The "lower position" refers to a position where the upper end of the cup 42 (specifically, the upper end of the inclined portion 422) is positioned lower than the substrate W held by the rotary chuck 41. "Upper position" refers to the position where the upper end of the cup 42 is positioned above the base plate W held by the rotating chuck 41. The cup lifting mechanism 425 raises and lowers the cup 42 according to the instruction from the control unit 6. That is, the position of the cup 42 is controlled by the control unit 6.

[0044] The nozzle 43 sprays a processing liquid onto the upper surface of the substrate W held by the rotating chuck 41. Here, for example, nozzles 43 are provided according to the type of processing liquid. That is, nozzles 43 for spraying medicine (hereinafter also referred to as "medicine nozzle 43a"), nozzles 43 for spraying rinsing liquid (hereinafter also referred to as "rinsing liquid nozzle 43b"), and nozzles 43 for spraying organic solvent (hereinafter also referred to as "organic solvent nozzle 43c") are provided.

[0045] The liquid sprayer 43a sprays liquid onto the upper surface of the substrate W held by the rotating chuck 41. The liquid sprayer 43a is connected to the liquid supply source 433a via a liquid pipe 432a through which a liquid valve 431a is inserted. When the liquid valve 431a is open, the liquid is supplied to the liquid sprayer 43a through the liquid pipe 432a, and then the liquid is sprayed out from the liquid sprayer 43a. The liquid valve 431a is opened and closed according to the instruction from the control unit 6. That is, the timing of the liquid being sprayed from the liquid sprayer 43a is controlled by the control unit 6. The liquid is, for example, hydrofluoric acid. However, the liquid is not limited to hydrofluoric acid, and may also be a liquid containing at least one of sulfuric acid, acetic acid, nitric acid, hydrochloric acid, hydrofluoric acid, phosphoric acid, ammonia, hydrogen peroxide, organic acid (e.g., citric acid, oxalic acid, etc.), organic base (e.g., TMAH: tetramethylammonium hydroxide, etc.), surfactant, and preservative.

[0046] The rinsing fluid nozzle 43b sprays rinsing fluid onto the upper surface of the substrate W held by the rotating chuck 41. That is, here, the rinsing fluid nozzle 43b functions as a rinsing fluid supply unit for supplying rinsing fluid to the substrate W. The rinsing fluid nozzle 43b is connected to the rinsing fluid supply source 433b via a rinsing fluid pipe 432b through which a rinsing fluid valve 431b is inserted. When the rinsing fluid valve 431b is open, rinsing fluid is supplied to the rinsing fluid nozzle 43b through the rinsing fluid pipe 432b and sprayed from the rinsing fluid nozzle 43b. The rinsing fluid valve 431b opens and closes according to an instruction from the control unit 6. That is, the timing of rinsing fluid spraying from the rinsing fluid nozzle 43b is controlled by the control unit 6. Here, the rinsing fluid is water (specifically, for example, pure water (deionized water)).

[0047] Organic solvent nozzle 43c sprays organic solvent onto the upper surface of the substrate W held by the rotating chuck 41. That is, here, organic solvent nozzle 43c functions as an organic solvent supply unit to supply organic solvent to the substrate W. Organic solvent nozzle 43c is connected to organic solvent recovery unit 5 via organic solvent piping 432c, which intersects organic solvent valve 431c. When organic solvent valve 431c is open, organic solvent (a sufficiently high purity organic solvent, specifically, for example, an organic solvent with a purity of 99 wt% or higher) is supplied to organic solvent nozzle 43c through organic solvent piping 432c, and then the organic solvent is sprayed from organic solvent nozzle 43c. Organic solvent valve 431c opens and closes according to instructions from control unit 6. That is, the timing of organic solvent spraying from organic solvent nozzle 43c is controlled by control unit 6. The organic solvent is, for example, a water-soluble organic solvent. Here, the organic solvent is isopropyl alcohol (IPA).

[0048] Furthermore, a nozzle moving mechanism can be connected to at least one of the liquid nozzle 43a, the rinsing liquid nozzle 43b, and the organic solvent nozzle 43c, enabling it to move between a processing position and a retracted position. The "processing position" refers to the position where the processing liquid ejected from nozzles 43a, 43b, and 43c is supplied to the substrate W held in the rotating chuck 41. The "retracted position" refers to the position where, when viewed from above, nozzles 43a, 43b, and 43c are located further outward (radially outward) than the periphery of the substrate W held by the rotating chuck 41. In this case, the nozzle moving mechanism moves nozzles 43a, 43b, and 43c according to instructions from the control unit 6. That is, the positions of nozzles 43a, 43b, and 43c are controlled by the control unit 6.

[0049] <2-2. Actions of the Processing Unit> The operation of processing unit 4 will be described again with reference to Figure 2.

[0050] The actions performed in the processing unit 4 are carried out under the control of the control unit 6. That is, the control unit 6 controls the chuck pin 412, the rotary motor 414, the cup lifting mechanism 425, the medicine valve 431a, the rinsing liquid valve 431b, the organic solvent valve 431c, etc., to perform a series of actions in the processing unit 4.

[0051] After the main transport robot 3 moves the substrate W into the processing chamber 44, the substrate W is held by the rotating chuck 41. Then, the rotating chuck 41 begins to rotate.

[0052] In this state, the liquid valve 431a is opened. The liquid is then sprayed from the liquid nozzle 43a onto the upper surface of the substrate W, which is held in the rotating chuck 41 and rotated. This supplies the liquid to the entire upper surface of the substrate W, and the substrate W is treated with the liquid (liquid supply process). For example, when hydrofluoric acid is used as the liquid, it is used to remove foreign matter such as particles from the substrate W. During the liquid supply process, the receiving cup 42 is positioned in the upper position. Therefore, the liquid that spills around the substrate W is caught by the receiving cup 42. That is, the liquid that spills around the substrate W is caught by the inclined portion 422 and guided downwards by the guide portion 421, converging into the liquid receiving portion 423. The liquid caught by the receiving cup 42 (i.e., the liquid that converges into the liquid receiving portion 423) is recovered through the liquid receiving cup-side recovery pipe (not shown).

[0053] At a specified time elapsed since the start of liquid spraying, the liquid valve 431a is closed. This stops the spraying of liquid from the liquid nozzle 43a. Then, the rinsing liquid valve 431b is opened. Rinsing liquid is then sprayed from the rinsing liquid nozzle 43b onto the upper surface of the substrate W, which is held in the rotating chuck 41. This supplies rinsing liquid to the entire upper surface of the substrate W, and any liquid adhering to the substrate W is washed away by the rinsing liquid (rinsing liquid supply process). During the rinsing liquid supply process, the receiving cup 42 is also positioned in the above position. Therefore, any liquid and rinsing liquid scattered around the substrate W are caught by the receiving cup 42. The liquid and rinsing liquid caught by the receiving cup 42 are recovered through a receiving cup-side recovery pipe (not shown).

[0054] At a specified time elapsed since the start of rinsing fluid spraying, the rinsing fluid valve 431b is closed. This stops the spraying of rinsing fluid from the rinsing fluid nozzle 43b. Then, the organic solvent valve 431c is opened. IPA is then sprayed from the organic solvent nozzle 43c onto the upper surface of the substrate W, which is held in the rotating chuck 41. In this way, IPA is supplied to the entire upper surface of the substrate W, and the rinsing fluid adhering to the substrate W is replaced by IPA (organic solvent supply process). During the organic solvent supply process, the receiving cup 42 is also positioned in the above position. Therefore, rinsing fluid and IPA scattered around the substrate W are caught by the receiving cup 42. The rinsing fluid and IPA caught by the receiving cup 42 are recovered through the organic solvent receiving cup side recovery pipe 424.

[0055] At a specified time elapsed since the start of IPA supply, the organic solvent valve 431c is closed. This stops the ejection of IPA from the organic solvent nozzle 43c. During this stage, the rinsing liquid on the substrate W is completely replaced by IPA, forming a liquid film of IPA covering the entire upper surface of the substrate W. Subsequently, the rotary chuck 41 begins to rotate at high speed. As a result, the substrate W rotates at high speed, and the IPA on the substrate W is flung around the substrate W due to centrifugal force (rotary drying process). During the high-speed rotation of the substrate W, the receiving cup 42 is also positioned above it. Therefore, the IPA scattered around the substrate W is caught by the receiving cup 42. The IPA caught by the receiving cup 42 is recovered through the organic solvent receiving cup side recovery pipe 424.

[0056] After a specified time has elapsed since the rotating chuck 41 begins high-speed rotation, the rotation of the rotating chuck 41 stops. During this stage, the IPA has been removed from the substrate W, and the substrate W has dried. The dried substrate W is then removed from the processing chamber 44 by the main transport robot 3.

[0057] This completes the series of processes for one substrate W. In processing unit 4, by repeatedly performing the above series of actions, substrate W will be processed one by one.

[0058] <3. Organic Solvent Recovery Department> <3-1. Composition> The structure of the organic solvent recovery unit 5 will be described with reference to FIG3. FIG3 is a schematic diagram showing an example of the structure of the organic solvent recovery unit 5.

[0059] The organic solvent recovery unit 5 includes a recovery tank 60, a purification tank 70, and a supply tank 80. As an example, the recovery tank 60 and the purification tank 70 are housed in a first housing 50a, and the supply tank 80 is housed in a second housing 50b. Furthermore, as an example, the first housing 50a is disposed outside the outer wall 100a of the substrate processing apparatus 100 (for example, below the cleanroom where the substrate processing apparatus 100 is installed (underground)), and the second housing 50b is disposed inside the outer wall 100a of the substrate processing apparatus 100 (Fig. 1).

[0060] (a) Recycling tank 60 The recovery tank 60 is connected to the receiving cup 42 via a recovery pipe 61. That is, one end of the recovery pipe 61 is connected to the recovery tank 60, and the other end is connected to the receiving cup 42 (specifically, the receiving cup-side recovery pipe 424 connected to the receiving cup 42). Here, for example, the recovery pipe 61 is connected to the receiving cup 42 of each of the plurality of processing units 4 belonging to the same tower. A recovery valve 611 is provided on the recovery pipe 61. When the recovery valve 611 is opened, the organic solvent (here, IPA) that has gathered in the receiving cup 42 during the organic solvent supply process and the rotary drying process is guided by the recovery pipe 61 into the recovery tank 60 and stored there. However, the IPA recovered in the rotary drying process is IPA (IPA with sufficiently high purity, specifically, for example, IPA with a purity of 99 wt% or higher), while in the organic solvent supply process, the IPA is recovered in a mixed state with the rinsing liquid (here, water) (i.e., after dilution with water). Therefore, a mixed fluid is stored in the recovery tank 60, which includes water that is recovered after being supplied to the substrate W in the processing unit 4 and IPA that is recovered after being supplied to the substrate W in the processing unit 4.

[0061] A circulation pipe (dehydration circulation pipe) 62 is connected to the recovery tank 60. Specifically, one end of the dehydration circulation pipe 62 is connected to the recovery tank 60. The dehydration circulation pipe 62 forms a circulation path in which the mixed fluid stored in the recovery tank 60 circulates by flowing out of the recovery tank 60 and returning to the recovery tank 60.

[0062] A dehydrator (separator) 621 is provided in the dehydration circulation piping 62. The dehydrator 621 separates water from the mixed fluid flowing into it for dehydration. The configuration of the dehydrator 621 will be described below.

[0063] A pump (dehydration-side delivery pump) 622 and a pair of on / off valves 623a and 623b are provided in the dehydration circulation piping 62. As an example, the dehydration-side delivery pump 622 is located downstream of the recovery tank 60 and upstream of the dehydrator 621. One on / off valve 623a is located upstream of the recovery tank 60, and the other on / off valve 623b is located downstream of the recovery tank 60. The dehydration-side delivery pump 622 delivers the mixed fluid within the dehydration circulation piping 62 at the required circulation pressure (circulation pressure). With both on / off valves 623a and 623b open, the dehydration-side delivery pump 622 delivers the mixed fluid at circulation pressure, thereby circulating the mixed fluid stored in the recovery tank 60 within the dehydration circulation piping 62.

[0064] A heater 624 is provided in the dehydration circulation piping 62. The heater 624 is located downstream of the recovery tank 60 and upstream of the dehydrator 621. In the illustrated example, the heater 624 is located downstream of the dehydration-side delivery pump 622. The heater 624 heats the mixed fluid to a specified temperature (heating temperature) T1. Here, the heating temperature T1 is set to a temperature above the boiling point of water. That is, the heater 624 heats the mixed fluid above the boiling point of water. Strictly speaking, the "boiling point of water" mentioned here refers to the boiling point of water under circulation pressure. However, since the circulation pressure is sufficiently low, the boiling point of water under circulation pressure can be considered the same as the boiling point of water under atmospheric pressure (100°C). The specific configuration of the heater 624 can be arbitrary. As an example, the heater 624 can be formed using a heater that covers the perimeter of the piping to heat the fluid flowing therein (i.e., a so-called jacketed heater). When the heater 624 is formed using a jacketed heater, even if the pressure of the mixed fluid in the piping increases due to heating, it is not likely to affect the operation of the heater 624. Furthermore, when the heater 624 is formed using a jacketed heater, by setting it in a manner that, for example, covers the area around a metal piping with excellent thermal conductivity, the mixed fluid in the piping can be effectively heated.

[0065] A cooler 625 is provided in the dehydration circulation piping 62. The cooler 625 is located downstream of the dehydrator 621 and upstream of the recovery tank 60. The cooler 625 cools the mixed fluid to a specified temperature (cooling temperature) T2. Here, the cooling temperature T2 is set to a temperature lower than the boiling point of the organic solvent (here, IPA). That is, the cooler 625 cools the mixed fluid to a temperature lower than the boiling point of the organic solvent. Strictly speaking, the "boiling point of the organic solvent" mentioned here refers to the boiling point of the organic solvent under circulation pressure. However, as mentioned above, since the circulation pressure is sufficiently low, the boiling point of the organic solvent under circulation pressure can be considered the same as the boiling point of the organic solvent under atmospheric pressure (82.3°C in the case of IPA). The specific configuration of the cooler 625 can be arbitrary. As an example, cooler 625 may also be a device that allows a cooling medium to circulate in cooling pipes located around the piping to carry away the heat of the fluid flowing through the piping and thus cool it (i.e., a so-called heat exchanger).

[0066] As described above, heater 624 heats the mixed fluid to a heating temperature T1 above the boiling point of water, and cooler 625 cools the mixed fluid to a cooling temperature T2 below the boiling point of IPA. Therefore, the mixed fluid circulates in the dehydration circulation piping 62 while changing its state. That is, the mixed fluid circulating in the dehydration circulation piping 62 becomes vapor (i.e., both water and IPA contained in the mixed fluid are in vapor state) during its flow through the piping section further downstream of heater 624 and further upstream of cooler 625 (hereinafter referred to as "first piping section 62a"), and becomes liquid (i.e., both water and IPA contained in the mixed fluid are in liquid state) during its flow through the section further downstream of cooler 625 and further upstream of heater 624 (hereinafter referred to as "second piping section 62b").

[0067] Therefore, the first piping section 62a, the machinery installed therein (e.g., dehydrator 621), heater 624, and cooler 625 have pressure resistance capable of withstanding the pressure of the mixed fluid in a vapor state and heat resistance capable of withstanding the heating temperature T1. On the other hand, the second piping section 62b and the machinery installed therein (e.g., recovery tank 60, dehydration-side liquid delivery pump 622, a pair of on / off valves 623a, 623b) may not have pressure resistance capable of withstanding the pressure of the mixed fluid in a vapor state and heat resistance capable of withstanding the heating temperature T1. That is, compared with the first piping section 62a and the machinery installed therein, the second piping section 62b and the machinery installed therein may have lower pressure resistance and lower heat resistance. As an example, the first piping section 62a is formed of pressure-resistant piping (e.g., metal piping), and the second piping section 62b is formed of non-pressure-resistant piping (e.g., resin piping). Furthermore, the recovery tank 60 does not need to be a pressure vessel (pressure tank); for example, it can be formed of an atmospheric pressure tank.

[0068] Here, heater 624 and cooler 625 are connected to the same dehydration circulation piping 62. Therefore, the mixed fluid cooled to cooling temperature T2 flows into heater 624, and the mixed fluid heated to heating temperature T1 flows into cooler 625. That is, heater 624 must heat the mixed fluid from cooling temperature T2 to heating temperature T1, and cooler 625 must cool the mixed fluid from heating temperature T1 to cooling temperature T2. To reduce the load on heater 624 and cooler 625, the difference between heating temperature T1 and cooling temperature T2 should be as small as possible. That is, the heating temperature T1 should be as low as possible within the range above the boiling point of water. As an example, heating temperature T1 is set to a temperature approximately 5-10°C higher than the boiling point of water (105-110°C). Furthermore, cooling temperature T2 should be as high as possible within the range below the boiling point of the organic solvent (here, IPA). For example, cooling temperature T2 is set to a temperature lower than the boiling point of IPA and higher than room temperature. In particular, the cooling temperature T2 is preferably a temperature that is about 5 to 10°C lower than the boiling point of IPA (i.e., 77.3 to 72.3°C).

[0069] A pressure reducer 626 can also be installed in the dehydration circulation piping 62. The pressure reducer 626, for example, is installed downstream of the cooler 625 and upstream of the recovery tank 60, to reduce the pressure of the mixed fluid cooled by the cooler 625. The pressure reducer 626 can reduce the pressure of the mixed fluid flowing to the secondary side to a lower value than the pressure of the mixed fluid flowing into the primary side by narrowing the flow path, thereby causing a pressure loss in the fluid flowing through the piping. As an example, the pressure reducer 626 can be formed using a restriction valve, relief valve, or reducing valve. By installing the pressure reducer 626, the pressure on the piping section downstream of the pressure reducer 626 in the second piping section 62b and on the machinery installed there (e.g., the recovery tank 60, the dehydration side pump 622, and a pair of on / off valves 623a and 623b) can be suppressed to a sufficiently low level.

[0070] Various sensors can be installed in the dehydration circulation piping 62. For example, a concentration sensor 627 for measuring the concentration of IPA contained in the mixed fluid circulating in the dehydration circulation piping 62, a pressure sensor 628 for detecting the pressure of the mixed fluid circulating in the dehydration circulation piping 62, a temperature sensor 629 for detecting the temperature of the mixed fluid circulating in the dehydration circulation piping 62, and a flow sensor (flow meter) 630 for measuring the flow rate of the mixed fluid circulating in the dehydration circulation piping 62, etc. It is preferable that each of the sensors 627, 628, 629, and 630 is installed in the second piping section 62b. In the illustrated example, the concentration sensor 627 is located downstream of the pressure reducer 626 and upstream of the recovery tank 60, the pressure sensor 628 is located near the downstream side of the dehydration side delivery pump 622, the temperature sensor 629 is located near the upstream side of the heater 624, and the flow sensor 630 is located near the upstream side of the dehydration side delivery pump 622.

[0071] (b) Dehydrator 621 Next, the dehydrator 621 will be described with reference to Figures 3 and 4. Figure 4 is a side sectional view schematically showing an example of the configuration of the dehydrator 621.

[0072] The dehydrator 621 has a separation membrane 51 and a housing 52.

[0073] The separation membrane 51 is a membrane that allows water to pass through but prevents organic solvents (here, IPA) from passing through (blocks the passage of organic solvents). Specifically, the separation membrane 51 is, for example, a zeolite membrane formed of zeolite. Zeolite has a crystal structure in which basic units (e.g., including at least one of (SiO4)4- and (AlO4)5-) are linked together. Specifically, the separation membrane 51 has, for example, the following configuration: a plurality of channels 512 are provided in a cylindrical substrate 511, extending through it along the axial direction. The channels 512 serve as flow paths for the mixed fluid within the separation membrane 51. Furthermore, in this case, the entire substrate 511 can be formed of zeolite, or only the inner circumferential surface of each channel 512 can be formed of zeolite.

[0074] The housing 52 is a hollow cylindrical component that houses the separation membrane 51. A pair of sealing members 520 are provided between the housing 52 and the separation membrane 51 to seal them. Each sealing member 520 is, for example, annular and is respectively disposed on one end and the other end of the separation membrane 51 along its axial direction. The internal space of the housing 52 is divided by the separation membrane 51 into the internal space of the separation membrane 51 (i.e., the internal space of each channel 512), namely the channel space V1, and the external space of the separation membrane 51, namely the separation space V2. Furthermore, the housing 52 is provided with an inlet 521, a first outlet 522, and a second outlet 523. The inlet 521 is located on one end face of the housing 52 along its axial direction and communicates with the channel space V1 through one opening of each channel 512. The first outlet 522 is located on the other end face of the housing 52 along its axial direction and communicates with the channel space V1 through the other opening of each channel 512. The second outlet 523 is located on the side (circumferential surface) of the housing 52 and communicates with the separation space V2.

[0075] A dehydration circulation pipe 62 is connected to the inlet 521 and the first outlet 522. On the other hand, a separation pipe 53, equipped with a vacuum pump 531, is connected to the second outlet 523. The mixed fluid flowing in the dehydration circulation pipe 62 flows from the inlet 521 into the dehydrator 621 (specifically, the pore space V1) and flows within the pore space V1. In this state, when the vacuum pump 531 installed in the separation pipe 53 is activated, the separation space V2 is depressurized, thereby creating a pressure difference between the pore space V1 and the separation space V2. The separation membrane 51, which separates the pore space V1 and the separation space V2, is a membrane through which water can pass but IPA cannot. Therefore, when a pressure difference exists between the pore space V1 and the separation space V2, the water (water molecules) contained in the mixed fluid flowing into the pore space V1 passes through the separation membrane 51, reaches the separation space V2, and flows into the separation pipe 53 through the second outlet 523. In this way, water is separated from the mixed fluid. On the other hand, since the IPA (IPA molecules) contained in the mixed fluid flowing into the pore space V1 cannot pass through the separation membrane 51, it flows within the pore space V1 and flows into the dehydration circulation pipe 62 through the first outlet 522. Thus, the mixed fluid flows out of the dehydrator 621 with a higher IPA concentration than when it flowed into the dehydrator 621. With repeated passage through the dehydrator 621, the IPA concentration in the mixed fluid increases each time it passes through.

[0076] Here, a heater 624 located upstream of the dehydrator 621 heats the mixed fluid to a heating temperature T1 above the boiling point of water. Therefore, the mixed fluid flowing into the dehydrator 621 becomes a vapor state (i.e., the water and IPA contained in the mixed fluid are both in a vapor state). Water in a vapor state (water vapor) has a larger intermolecular distance, weaker intermolecular forces, and higher average molecular kinetic energy compared to water in a liquid state, making it easier to pass through the separation membrane 51. Therefore, by converting the water contained in the mixed fluid flowing into the dehydrator 621 into a vapor state, the separation efficiency (dehydration efficiency) is improved. The method of supplying the fluid to the separation membrane 51 after it has become a vapor state is also called VP (Vapor permeation), etc.

[0077] Furthermore, the configuration of the side of the separation pipe 53 that receives water separated from the mixed fluid can be appropriately specified. For example, a condenser 532 is provided in the separation pipe 53 upstream of the vacuum pump 531. A drain pipe 54 is connected to the condenser 532 to guide the condensed water. A decomposer 541 is provided in the drain pipe 54 to decompose trace amounts of organic solvents (here, IPA) contained in the water flowing through it, thereby increasing the water's purity. The decomposer 541 can also be, for example, a device for electrolyzing IPA contained in the water to increase its purity. In this case, the decomposer 541 may include, for example, a tank for temporarily storing the water flowing through the drain pipe 54, a pair of electrodes immersed in the water stored in the tank, and a power supply unit that supplies power to the pair of electrodes to create a potential difference between them. The drain pipe 54 can be connected, for example, to the flushing fluid supply source 433b of the treatment unit 4 (Fig. 2), or to the plant's water recycling pipeline. For example, when the drain pipe 54 is connected to the flushing fluid supply source 433b, the water separated from the mixed fluid and flowing into the separation pipe 53 is condensed in the condenser 532 and then flows into the drain pipe 54. After the water purity is improved by the decomposer 541, it is guided to the flushing fluid supply source 433b and then sprayed out from the flushing fluid nozzle 43b as flushing fluid. That is, in this case, the water separated from the mixed fluid will be reused as flushing fluid.

[0078] (c) Cleaning tank 70 Referring again to Figure 3, the purification tank 70 is connected to the recovery tank 60 via a first liquid delivery pipe 71 and a dehydration circulation pipe 62. Specifically, one end of the first liquid delivery pipe 71 is connected to the purification tank 70, and the other end is connected to the dehydration circulation pipe 62. As an example, the other end of the first liquid delivery pipe 71 is connected to the second pipe section 62b of the dehydration circulation pipe 62 (e.g., a position upstream of the heater 624 and downstream of the dehydration-side liquid delivery pump 622). However, the other end of the first liquid delivery pipe 71 may also be directly connected to the recovery tank 60 without going through the dehydration circulation pipe 62. A first liquid delivery valve 711 is provided on the first liquid delivery pipe 71. When the IPA concentration (purity) is sufficiently increased (to the point that it can be supplied to the substrate W) in the recovery tank 60 by separating water from the mixed fluid (hereinafter also referred to as "concentrated fluid"), when the first liquid delivery valve 711 is opened, the concentrated fluid is guided to the first liquid delivery pipe 71 and flows into the purification tank 70 and is stored there.

[0079] A circulation piping (purification circulation piping) 72 is connected to the purification tank 70. Specifically, one end of the purification circulation piping 72 is connected to the purification tank 70. The purification circulation piping 72 forms a circulation path in which the concentrated fluid stored in the purification tank 70 circulates by flowing out of the purification tank 70 and then returning to the purification tank 70.

[0080] A pump (purification-side liquid delivery pump) 721 and an on / off valve 722 are provided in the purification circulation piping 72. As an example, the on / off valve 722 is located downstream of the purification-side liquid delivery pump 721 and upstream of the purification tank 70. The purification-side liquid delivery pump 721 delivers concentrated fluid into the purification circulation piping 72 at the pressure required for circulation. When the on / off valve 722 is open, the purification-side liquid delivery pump 721 delivers concentrated fluid at the pressure required for circulation, thereby circulating the concentrated fluid stored in the purification tank 70 within the purification circulation piping 72.

[0081] A filter 723 and a temperature regulator 724 are provided in the purification circulation piping 72. For example, the filter 723 is located downstream of the purification-side delivery pump 721 and upstream of the purification tank 70, while the temperature regulator 724 is located downstream of the purification-side delivery pump 721 and upstream of the filter 723. The filter 723 captures the target substances (e.g., particles, metals, etc.) contained in the concentrated fluid flowing through the purification circulation piping 72. By allowing the concentrated fluid to pass through the filter 723, the target substances contained in the concentrated fluid are removed from the concentrated fluid, thereby improving the cleanliness of the concentrated fluid. An exhaust piping 7231 can also be connected to the filter 723. The temperature regulator 724 is a machine with both cooling and heating capabilities; for example, it is an electronic cooler / heater using Peltier elements for electronic cooling and heating. When a high-temperature fluid passes through the filter 723, the performance of the filter 723 may decrease due to thermal expansion, etc. Therefore, here, the temperature regulator 724 cools the concentrated fluid circulating in the purification circulation piping 72 to a specified temperature (e.g., room temperature) as needed. This helps to prevent a decline in the performance of the filter 723.

[0082] Various sensors can also be installed on the purification circulation piping 72. For example, a pressure sensor 725 that detects the pressure of the concentrated fluid circulating in the purification circulation piping 72, a temperature sensor 726 that detects the temperature of the concentrated fluid circulating in the purification circulation piping 72, and a particle counter (not shown) that counts the number of particles contained in the concentrated fluid circulating in the purification circulation piping 72 can also be installed on the purification circulation piping 72. In the illustrated example, a pressure sensor 725 is installed near the downstream side of the purification-side liquid delivery pump 721, and a temperature sensor 726 is installed near the downstream side of the temperature regulator 724.

[0083] (d) Supply tank 80 The supply tank 80 is connected to the purification tank 70 via a second liquid delivery pipe 81 and a purification circulation pipe 72. Specifically, one end of the second liquid delivery pipe 81 is connected to the supply tank 80, and the other end is connected to the purification circulation pipe 72. As an example, the other end of the second liquid delivery pipe 81 is connected to a position in the purification circulation pipe 72 that is upstream of the filter 723 and downstream of the purification-side liquid delivery pump 721. However, the other end of the second liquid delivery pipe 81 may also be directly connected to the purification tank 70 without going through the purification circulation pipe 72. A second liquid delivery valve 811 is provided on the second liquid delivery pipe 81. When the purified fluid (hereinafter referred to as "purified fluid") has been obtained in the purification tank 70 with a sufficiently improved cleanliness (to the extent that it can be supplied to the substrate W), when the second liquid delivery valve 811 is opened, the purified fluid is guided to the second liquid delivery pipe 81 and flows into the supply tank 80 and is stored there.

[0084] The supply tank 80 can also be connected to the new liquid supply source 821 via a new liquid piping 82. In this case, one end of the new liquid piping 82 is connected to the supply tank 80, and the other end is connected to the new liquid supply source 821. The new liquid supply source 821 is a supply source of unused IPA (IPA with sufficiently high purity, specifically, for example, IPA with a purity of 99 wt% or higher) that has never been supplied to the substrate W. A new liquid valve 822 is provided in the new liquid piping 82. When the new liquid valve 822 is opened, the unused IPA is guided to the new liquid piping 82 and flows into the supply tank 80 for storage.

[0085] The supply tank 80 is connected to the organic solvent nozzle 43c via a third liquid delivery pipe 83. Specifically, one end of the third liquid delivery pipe 83 is connected to the supply tank 80, and the other end is connected to the organic solvent nozzle 43c (specifically, the organic solvent pipe 432c connected to the organic solvent nozzle 43c). Here, for example, the third liquid delivery pipe 83 is connected to the organic solvent nozzle 43c of each of the plurality of processing units 4 belonging to the same tower. A pump (supply-side liquid delivery pump) 831 is installed in the third liquid delivery pipe 83. When the organic solvent valve 431c is opened, the purified fluid stored in the supply tank 80 is transported to the side of the organic solvent nozzle 43c by the supply-side liquid delivery pump 831 and ejected from the organic solvent nozzle 43c.

[0086] The third liquid delivery pipe 83 may also be equipped with a filter 832 to capture the target substances contained in the purified fluid transported in the third liquid delivery pipe 83, and a temperature regulator 833 to regulate the temperature of the purified fluid transported in the third liquid delivery pipe 83 (i.e., to heat or cool the purified fluid to a specified temperature). In the illustrated example, a temperature regulator 833 is provided downstream of the supply-side liquid delivery pump 831, and a filter 832 is provided downstream of the temperature regulator 833. Furthermore, various sensors may also be provided in the third liquid delivery pipe 83. For example, a pressure sensor 834 to detect the pressure of the purified fluid transported in the third liquid delivery pipe 83 and a temperature sensor 835 to detect the temperature of the purified fluid transported in the third liquid delivery pipe 83 may also be provided in the third liquid delivery pipe 83. In the example shown, a pressure sensor 834 is provided near the downstream side of the supply-side liquid pump 831, and a temperature sensor 835 is provided near the downstream side of the temperature regulator 833.

[0087] <3-2. Action> Referring to Figures 5-12, the process flow of the treatment performed in the organic solvent recovery unit 5 will be explained. Figure 5 is a diagram showing an example of the process flow of the treatment performed in the organic solvent recovery unit 5. Figure 6 is a diagram showing an example of the process flow of separating water from the mixed fluid. Figures 7-12 are schematic diagrams showing the state of the organic solvent recovery unit 5 in each process. In Figures 7-12, for ease of explanation, solid lines represent piping with fluid flow, and dashed lines represent piping without fluid flow.

[0088] The operation of the organic solvent recovery unit 5 is performed under the control of the control unit 6. That is, the control unit 6 performs a series of operations in the organic solvent recovery unit 5 by controlling the pumps (dehydration side liquid delivery pump 622, vacuum pump 531, purification side liquid delivery pump 721 and supply side liquid delivery pump 831), valves (recovery valve 611, a pair of on / off valves 623a, 623b, first liquid delivery valve 711, on / off valve 722, second liquid delivery valve 811 and fresh liquid valve 822, etc.), heater 624, cooler 625, pressure reducer 626, condenser 532, decomposer 541, temperature regulators 724, 833, etc., based on input information from sensors (concentration sensor 627, pressure sensors 628, 725, 834, temperature sensors 629, 726, 833, etc.).

[0089] Step S1 First, with the recovery tank 60 empty, the recovery valve 611 is opened. The liquid that has collected in the receiving cup 42 during the organic solvent supply and rotary drying processes is then guided to the recovery pipe 61 and flows into the recovery tank 60. Here, a mixed fluid comprising water recovered after being supplied to the substrate W and IPA recovered after being supplied to the substrate W (Fig. 7) is stored in the recovery tank 60 (storage process). When a specified amount of the mixed fluid has been stored in the recovery tank 60, the recovery valve 611 is closed.

[0090] Step S2 Next, water is separated from the mixed fluid stored in the recovery tank 60. This process will be described in detail with reference to Figures 6 and 8-10.

[0091] First, a pair of on / off valves 623a and 623b are opened simultaneously, and the mixed fluid is delivered at circulating pressure by the dehydration side pump 622. In this way, the mixed fluid stored in the recovery tank 60 is changed to a state of circulation in the dehydration circulation piping 62 (step S201: circulation process) (Figure 8).

[0092] Next, heating of the mixed fluid begins (step S202a: heating process). Specifically, heater 624 heats the mixed fluid circulating in the dehydration circulation pipe 62 to a heating temperature T1 above the boiling point of water. Simultaneously with the heating of the mixed fluid, cooling of the mixed fluid also begins (step S202b: cooling process). Specifically, cooler 625 cools the mixed fluid circulating in the dehydration circulation pipe 62 to a cooling temperature T2 lower than the boiling point of IPA. Through heating and cooling, the mixed fluid changes state while circulating in the dehydration circulation pipe 62. That is, in this state, the mixed fluid circulating in the dehydration circulation pipe 62 becomes a vapor state while flowing through the first pipe section 62a, and a liquid state while flowing through the second pipe section 62b.

[0093] Subsequently, while continuing the heating and cooling of the mixed fluid, the vacuum pump 531 is activated. By activating the vacuum pump 531, the pressure in the separation space V2 is reduced, creating a pressure difference between the channel space V1 and the separation space V2. This pressure difference causes water contained in the mixed fluid flowing into the channel space V1 to pass through the separation membrane 51 and reach the separation space V2, flowing into the separation pipe 53. That is, when the mixed fluid circulating in the dehydration circulation pipe 62 passes through the dehydrator 621, the water contained in the mixed fluid is separated (step S203: separation process) (Figure 9). Here, the mixed fluid flowing into the dehydrator 621 is heated to a vapor state (i.e., both the water and IPA contained in the mixed fluid become vapor). By changing the water contained in the mixed fluid flowing into the dehydrator 621 to a vapor state, water can be efficiently separated from the mixed fluid.

[0094] Subsequently, the vacuum pump 531 continues to operate for a specified time. During this period, heating and cooling of the mixed fluid also continue. During this period, the mixed fluid circulating in the dehydration circulation pipe 62 repeatedly passes through the dehydrator 621, thereby gradually increasing the concentration of IPA in the mixed fluid. Here, by measurement, calculation, etc., the time required for the concentration of IPA in the mixed fluid stored in the recovery tank 60 to sufficiently increase (to the point that it can be supplied to the substrate W) is predetermined and specified as a specified time. Therefore, after a specified time has elapsed since the start of the operation of the vacuum pump 531, the recovery tank 60 is in a state where concentrated fluid is stored. If a specified time has elapsed since the start of the operation of the vacuum pump 531 (yes in step S204), the operation of the vacuum pump 531 is stopped. Thereby, the separation of water in the dehydrator 621 is substantially stopped (step S205). Then, the heating of the mixed fluid is stopped (step S206a), and the cooling of the mixed fluid is stopped (step S206b).

[0095] Subsequently, the first liquid delivery valve 711 is opened. The concentrated fluid stored in the recovery tank 60 is then transported to the purification tank 70 via the first liquid delivery pipe 71. The concentrated fluid is thus stored in the purification tank 70 (step S207) (Figure 10). When all the concentrated fluid stored in the recovery tank 60 has been transported to the purification tank 70, the first liquid delivery valve 711 is closed.

[0096] Step S3 Next, a process is performed to improve the cleanliness of the concentrated fluid stored in the purification tank 70. Specifically, while the on / off valve 722 is opened, the concentrated fluid is delivered by the purification-side liquid pump 721 at the pressure required for circulation. This causes the concentrated fluid stored in the purification tank 70 to circulate in the purification circulation piping 72 (Figure 11). This state is maintained for a specified time. During this period, the concentrated fluid circulating in the purification circulation piping 72 repeatedly passes through the filter 723, thereby gradually improving the cleanliness of the concentrated fluid. Here, by measurement, calculation, etc., the time required until the cleanliness of the concentrated fluid circulating in the purification circulation piping 72 is sufficiently improved (to the point where it can be supplied to the substrate W) is predetermined and designated as a specified time. Therefore, after a specified time has elapsed since the start of circulation, the purification tank 70 is in a state where purified fluid is stored. After the specified time has elapsed since the start of circulation, the on / off valve 722 is closed.

[0097] Step S4 Next, the second liquid delivery valve 811 is opened. The purified fluid in the purification tank 70 is then transported to the supply tank 80 via the second liquid delivery pipe 81. The purified fluid is thus stored in the supply tank 80 (Fig. 12). For example, when all the purified fluid in the purification tank 70 has been transported to the supply tank 80, the second liquid delivery valve 811 is closed. Subsequently, if the organic solvent valve 431c is opened, the purified fluid stored in the supply tank 80 is transported to the side of the organic solvent nozzle 43c by the supply-side liquid delivery pump 831 and ejected from the organic solvent nozzle 43c. That is, the purified fluid is supplied to the substrate W. Furthermore, the purified fluid, while passing through the third liquid delivery pipe 83, can pass through the filter 832 to improve cleanliness, and the temperature can also be adjusted as needed using the temperature regulator 833. Furthermore, if the amount of purified fluid stored in the supply tank 80 becomes less than the specified amount, the new liquid valve 822 can be opened to replenish the unused IPA to the supply tank 80.

[0098] In the organic solvent recovery unit 5, this series of processes (steps S1 to S4) are repeated. However, the next step S1 can also begin before the end of the process in step S4 (for example, during the period after the end of the process in step S3).

[0099] <4. Effects> The substrate processing apparatus 100 of the above embodiment includes: a rinsing liquid supply unit (rinsing liquid nozzle) 43b, which supplies a rinsing liquid containing water to the substrate W; an organic solvent supply unit (organic solvent nozzle) 43c, which supplies an organic solvent (e.g., IPA) to the substrate W; a recovery tank 60, which stores a mixed fluid, the mixed fluid including water recovered after being supplied to the substrate W and organic solvent recovered after being supplied to the substrate W; a circulation pipe (dehydration circulation pipe) 62, which is connected to the recovery tank 60; a dehydrator 621, which is provided in the dehydration circulation pipe 62 and has a separation membrane 51 that allows water to pass through but not organic solvent; a pump (dehydration-side liquid delivery pump) 622, which is provided in the dehydration circulation pipe 62; and a heater 624, which is provided downstream of the recovery tank 60 and upstream of the dehydrator 621 in the dehydration circulation pipe 62, to heat the mixed fluid to above the boiling point of water. According to this configuration, water contained in the mixed fluid can flow into the dehydrator 621 in a vapor state. This improves the separation efficiency of the separation membrane 51.

[0100] Furthermore, the substrate processing apparatus 100 of the above embodiment includes a cooler 625, which is disposed downstream of the dehydrator 621 and upstream of the recovery tank 60 in the dehydration circulation piping 62. According to this configuration, by cooling the heated mixed fluid using the cooler 625, the pressure of the mixed fluid can be reduced. Also, the mixed fluid circulating in the dehydration circulation piping 62 encounters resistance when passing through the cooler 625. Therefore, the vaporized mixed fluid tends to remain downstream of the cooler 625 (i.e., the first piping section 62a). This allows for sufficient contact between the mixed fluid and the separation membrane 51, further improving the separation efficiency of the separation membrane 51.

[0101] Furthermore, in the above embodiment, the cooler 625 cools the mixed fluid to a temperature lower than the boiling point of the organic solvent (e.g., IPA) and higher than room temperature. According to this configuration, by using the cooler 625 for cooling, the IPA contained in the mixed fluid returns from a vapor state to a liquid state, thus sufficiently reducing the pressure of the mixed fluid. On the other hand, since the cooler 625 only cools the mixed fluid to a temperature higher than room temperature, the load on both the heater 624 and the cooler 625 decreases. As a result, for example, miniaturization of the heater 624 and the cooler 625 can be achieved.

[0102] Furthermore, in the above embodiment, the pressure resistance of the second piping section 62b (the piping section further downstream of the cooler 625 and further upstream of the heater 624) of the dehydration circulation piping 62 is lower than that of the first piping section 62a (the piping section further downstream of the heater 624 and further upstream of the cooler 625). With this configuration, compared to the case where the entire dehydration circulation piping 62 has relatively high pressure resistance, the device can be miniaturized.

[0103] Furthermore, the substrate processing apparatus 100 of the above embodiment includes a pressure reducer 626, which is installed in the dehydration circulation piping 62 to reduce the pressure of the mixed fluid after it has been cooled by the cooler 625. With this configuration, the pressure of the mixed fluid, which has decreased due to the cooler 625, can be further reduced using the pressure reducer 626. Therefore, the pressure borne by the piping section downstream of the pressure reducer 626 in the second piping section 62b and by the machinery installed there can be suppressed to a sufficiently low level.

[0104] Furthermore, the substrate processing apparatus 100 of the above embodiment includes: a purification tank 70, which is connected to a recovery tank 60 via a liquid delivery pipe (first liquid delivery pipe) 71, for storing concentrated fluid obtained by separating water from a mixed fluid; and a filter 723, which is provided in a pipe (purification circulation pipe) 72 connected to the purification tank 70, for capturing the target substances contained in the concentrated fluid flowing through the purification circulation pipe 72. According to this configuration, the target substances can be removed from the concentrated fluid obtained by separating water from a mixed fluid, thereby improving the cleanliness of the concentrated fluid.

[0105] Furthermore, in the above embodiment, the concentrated fluid stored in the purification tank 70, after passing through the filter 723, is conveyed to the organic solvent nozzle 43c and supplied to the substrate W. That is, the concentrated fluid obtained by separating water from the mixed fluid containing water recovered after being supplied to the substrate W and organic solvent recovered after being supplied to the substrate W, is supplied to the substrate W again after its cleanliness is improved. Therefore, the amount of organic solvent used and discharged can be reduced (liquefaction reduction). IPA is a volatile organic compound (VOC), and by reducing its use and discharge, the environmental burden can be reduced.

[0106] <5. Examples of Variation> The configuration and operation of the substrate processing apparatus 100 in the above embodiments can be modified appropriately. In the following description, elements that are the same as those described in the above embodiments are marked with the same symbols, and their descriptions are omitted.

[0107] <5-1. Example of the first variation> The configuration of the organic solvent recovery unit 5t in the first variation will be described with reference to Figure 13. Figure 13 is a schematic diagram showing one example of the organic solvent recovery unit 5t.

[0108] The organic solvent recovery unit 5t has a plurality of (two in the example shown) recovery tanks 60A and 60B, a plurality of (two in the example shown) purification tanks 70A and 70B, and a supply tank 80 (see Figure 3).

[0109] Recovery tanks 60A and 60B are connected to the receiving cup 42 via recovery pipes 61t. Specifically, one end of the recovery pipe 61t branches, with one branch 61A connected to the first recovery tank 60A and the other branch 61B connected to the second recovery tank 60B. The other end of the recovery pipe 61t is connected to the receiving cup 42 (specifically, to the receiving cup-side recovery pipe 424 connected to the receiving cup 42). Recovery valves 611A and 611B are provided at each branch 61A and 611B. When a recovery valve 611A is opened, the liquid that has collected in the receiving cup 42 during the organic solvent supply and rotary drying processes is guided to the recovery pipe 61t and flows into the first recovery tank 60A for storage. In other words, the mixed fluid is stored in the first recovery tank 60A. Similarly, when another recovery valve 611B is opened, the liquid that has gathered in the receiving cup 42 during the organic solvent supply process and the rotary drying process is guided to the recovery pipe 61t and flows into the second recovery tank 60B for storage. That is, the mixed fluid is stored in the second recovery tank 60B.

[0110] A circulation pipe (for dewatering) 62t is connected to the recovery tanks 60A and 60B. The dewatering circulation pipe 62t has a designated branch position R1 and a confluence position R2, and a plurality of branch pipes 620A and 620B (the same number as the recovery tanks 60A and 60B) are provided between them. Furthermore, a recovery tank 60A or 60B is provided on each of the plurality of branch pipes 620A and 620B. That is, a first recovery tank 60A is provided on one branch pipe 620A, and a second recovery tank 60B is provided on another branch pipe 620B. Also, a pair of first valves 621A and 621A are provided on one branch pipe 620A, separated from the first recovery tank 60A, and a pair of second valves 621B and 621B are provided on another branch pipe 620B, separated from the second recovery tank 60B. When a pair of first valves 621A and 621B are open and a pair of second valves 621B are closed, the following circulation path is formed: the mixed fluid stored in the first recovery tank 60A circulates by flowing out of the first recovery tank 60A and returning to the first recovery tank 60A. Conversely, when a pair of first valves 621A and 621B are closed and a pair of second valves 621B are open, the following circulation path is formed: the mixed fluid stored in the second recovery tank 60B circulates by flowing out of the second recovery tank 60B and returning to the second recovery tank 60B.

[0111] Similar to the above embodiment, the dehydration circulation piping 62t is equipped with a dehydrator 621, a dehydration-side liquid delivery pump 622, a pair of on / off valves 623a and 623b, a heater 624, a cooler 625, a pressure reducer 626, and various sensors 627, 628, 629, and 630. These components are located upstream of the branch position R1 and downstream of the confluence position R2.

[0112] Similar to the above embodiment, heater 624 heats the mixed fluid to a heating temperature T1 above the boiling point of water. Cooler 625 cools the mixed fluid to a cooling temperature T2 below the boiling point of IPA. Therefore, similar to the above embodiment, the mixed fluid circulating in the dehydration circulation piping 62t becomes vapor in the first piping section 62a, which is downstream of heater 624 and upstream of cooler 625, and becomes liquid in the second piping section 62b, which is downstream of cooler 625 and upstream of heater 624. Therefore, similar to the above embodiment, the first piping section 62a, the machine located therein (e.g., dehydrator 621), heater 624, and cooler 625 have pressure resistance to withstand the pressure of the vaporized mixed fluid and heat resistance to withstand the heating temperature T1. On the other hand, the second piping section 62b and the machinery installed therein (e.g., the first recovery tank 60A, the second recovery tank 60B, the dehydration side liquid delivery pump 622, and a pair of on / off valves 623a and 623b) may not have pressure resistance to withstand the pressure of a mixed fluid in a vapor state, nor heat resistance to withstand a heating temperature T1. As an example, both the first recovery tank 60A and the second recovery tank 60B are formed by atmospheric pressure tanks.

[0113] Purification tanks 70A and 70B are connected to recovery tanks 60A and 60B via a first liquid delivery pipe 71t and a dehydration circulation pipe 62t. Specifically, one end of the first liquid delivery pipe 71t branches, with one branch 71A connected to the first purification tank 70A and the other branch 71B connected to the second purification tank 70B. The other end of the first liquid delivery pipe 71t is connected to the second pipe section 62b of the dehydration circulation pipe 62t. A first liquid delivery valve 711A or 711B is provided at each branch 71A or 71B. When concentrated fluid is obtained in the first recovery tank 60A or the second recovery tank 60B, when the first liquid delivery valve 711A on the first purification tank 70A side is opened, the concentrated fluid is guided to the first liquid delivery pipe 71t and flows into the first purification tank 70A for storage. Similarly, when concentrated fluid is obtained in the first recovery tank 60A or the second recovery tank 60B, when the first liquid delivery valve 711B on the side of the second purification tank 70B is opened, the concentrated fluid is guided to the first liquid delivery pipe 71t and flows into the second purification tank 70B and is stored there.

[0114] Each of the first purification tank 70A and the second purification tank 70B is connected to a circulation pipe (purification circulation pipe) 72A and 72B. Similar to the purification circulation pipe 72 in the above embodiment, each purification circulation pipe 72A and 72B is equipped with a purification-side liquid delivery pump 721, an on / off valve 722, a filter 723, a temperature regulator 724, and various sensors 725 and 726.

[0115] Each of the first purification tank 70A and the second purification tank 70B is connected to the supply tank 80 (Fig. 3) via purification circulation pipes 72A and 72B and a second liquid delivery pipe 81t. Specifically, one end of the second liquid delivery pipe 81t branches off, with one branch 81A connected to the purification circulation pipe 72A on the side of the first purification tank 70A, and the other branch 81B connected to the purification circulation pipe 72B on the side of the second purification tank 70B. The other end of the second liquid delivery pipe 81t is connected to the supply tank 80. A second liquid delivery valve 811A and 811B are provided at each branch 81A and 81B. When purified fluid is obtained in the first purification tank 70A, and the second liquid delivery valve 811A on the side of the first purification tank 70A is opened, the purified fluid in the first purification tank 70A is guided to the second liquid delivery pipe 81t and flows into the supply tank 80 for storage. Similarly, when purified fluid is obtained in the second purification tank 70B, and the second liquid delivery valve 811B on the side of the second purification tank 70B is opened, the purified fluid in the second purification tank 70B is guided to the second liquid delivery pipe 81t and flows into the supply tank 80 for storage.

[0116] In the organic solvent recovery unit 5t, the same series of processes as in the above embodiment (steps S1 to S4) are also performed (Figure 5).

[0117] That is, similar to the above embodiment, in the organic solvent recovery unit 5t, the liquid collected in the receiving cup 42 is first transported to a recovery tank (e.g., the first recovery tank 60A), and the mixed fluid is stored there (step S1). Then, a process is performed to separate water from the mixed fluid stored in the first recovery tank 60A (step S2). However, in the organic solvent recovery unit 5t, in parallel with this process, the liquid collected in the receiving cup 42 is transported to another recovery tank (the second recovery tank 60B), and the mixed fluid is stored there. That is, after the liquid collected in the receiving cup 42 is transported to the first recovery tank 60A, it is not necessary to wait for the recovery tank 60A to be emptied (i.e., it is not necessary to wait for the process of separating water from the mixed fluid stored in the recovery tank 60A to end), and it is then transported to the other recovery tank 60B.

[0118] Similarly, in the above embodiment, in the organic solvent recovery unit 5t, the concentrated fluid obtained by separating water from the mixed fluid is also transported from the first recovery tank 60A or the second recovery tank 60B to the first purification tank 70A or the second purification tank 70B and stored there. If concentrated fluid is stored in either the first purification tank 70A or the second purification tank 70B, a process to improve the cleanliness of the concentrated fluid is performed (step S3), and the resulting purified fluid is transported to the supply tank 80 (step S4). Here, since a plurality of purification tanks 70A and 70B are provided, the concentrated fluid can be transported to another purification tank 70B while the process to improve the cleanliness of the concentrated fluid is being performed in one purification tank 70A.

[0119] Thus, the organic solvent recovery unit 5t is equipped with multiple recovery tanks 60A and 60B. By switching between the recovery tanks 60A and 60B that serve as the liquid delivery destination, the liquid collected in the receiving cup 42 (i.e., water recovered after being supplied to the substrate W, and organic solvent recovered after being supplied to the substrate W) can be continuously transported. Furthermore, the organic solvent recovery unit 5t is equipped with multiple purification tanks 70A and 70B. Therefore, by switching between the purification tanks 70A and 70B that serve as the liquid delivery destination, the concentrated fluid obtained by separating water from the mixed fluid can be continuously transported. This shortens the cycle time from recovering the organic solvent supplied to the substrate W to supplying it back to the substrate W. As a result, the amount of organic solvent used and discharged can be effectively reduced.

[0120] <5-2. Second Variation Example> In the organic solvent recovery unit 5 of the above embodiment, the dehydrator 621 can also be configured with the following posture and orientation: the channel 512 extends vertically, and the inlet 521 is disposed on the vertically lower side (therefore, the first outlet 522 is disposed on the vertically upper side). In this case, the mixed fluid flowing through the dehydration circulation pipe 62 becomes to flow in from the opening on the vertically lower side of the channel 512.

[0121] According to this variation, the mixed fluid flowing from the dehydration circulation pipe 62 into the channel 512 flows upward within the vertically extending channel 512 (channel inner space V1). Therefore, for example, even if a portion of the mixed fluid flowing into the channel inner space V1 condenses into a liquid (e.g., droplets) while passing through the channel inner space V1, the mixed fluid will remain sufficiently within the channel inner space V1 due to gravity, thus ensuring sufficient contact with the separation membrane 51. Therefore, the likelihood of water contained in the liquid being separated increases. That is, the separation efficiency is further improved. Furthermore, according to this variation, due to head pressure, the pressure of the mixed fluid on the secondary side of the dehydrator 621 becomes lower than the pressure of the mixed fluid on the primary side. That is, the pressure of the mixed fluid after passing through the dehydrator 621 can be reduced.

[0122] <5-3. Example of Variation 3> In the case where the dehydrator 621 is arranged with the channel 512 extending vertically, as in the organic solvent recovery unit 5 of the second variation, the dehydrator 621 and the heater 624 can be arranged vertically. Specifically, for example, when the dehydrator 621 is arranged with the channel 512 extending vertically, a vertically extending piping section (vertical piping section) can be provided in and around the portion of the dehydration circulation piping 62 that connects to the inlet 521, and the heater 624 can be provided in this vertical piping section. As an example, the heater 624 formed using a jacketed heater can be configured to at least cover the area around the vertical piping section. By providing the heater 624 in the vertical piping section, the heat loss generated by the mixed fluid heated by the heater 624 before flowing into the dehydrator 621 is reduced. Furthermore, the load on the heater 624 is reduced.

[0123] <5-4. Other variations> In the above embodiments, it is more effective to reduce the heat loss of the mixed fluid heated by the heater 624 before it flows into the dehydrator 621 in order to reduce the load on the heater 624. To reduce this heat loss, the distance between the heater 624 and the dehydrator 621 should be as small as possible. For example, the heater 624 is preferably located at the minimum design distance from the dehydrator 621. To further reduce the distance between the heater 624 and the dehydrator 621, it is also preferable that no other machinery is installed between the heater 624 and the dehydrator 621.

[0124] In the above embodiments, the first piping section 62a needs to have relatively high pressure resistance and relatively high heat resistance. Therefore, in order to miniaturize the device, the ratio of the length occupied by the first piping section 62a in the dehydration circulation piping 62 should be as short as possible. For this purpose, the distance between the heater 624 and the cooler 625 should be as small as possible. In view of this, the heater 624 is also preferably located at the minimum design distance from the dehydrator 621, as described above. Similarly, the cooler 625 is also preferably located at the minimum design distance from the dehydrator 621. To reduce the distance between the cooler 625 and the dehydrator 621, it is also preferable that no other machinery is installed between the cooler 625 and the dehydrator 621.

[0125] In the above embodiment, since a pressure reducer 626 is provided in the dehydration circulation piping 62, the pressure borne by the piping section downstream of the pressure reducer 626 and the machinery installed there is suppressed to be less than the pressure borne by the piping section upstream of the pressure reducer 626 and the machinery installed there. Therefore, in order to effectively reduce the load borne by the piping, etc., the pressure reducer 626 is preferably located as upstream as possible. For this purpose, the distance between the pressure reducer 626 and the cooler 625 should be as small as possible. For example, the pressure reducer 626 is preferably located at a position where the distance between it and the cooler 625 reaches the minimum value designed for it. Furthermore, in order to reduce the distance between the pressure reducer 626 and the cooler 625, it is also preferable that no other machinery is installed between the pressure reducer 626 and the cooler 625. Furthermore, the pressure resistance of the piping section downstream of the pressure reducer 626 in the second piping section 62b and the machinery installed therein may be lower than that of the piping section upstream of the pressure reducer 626 in the second piping section 62b and the machinery installed therein.

[0126] In the organic solvent recovery unit 5 of the above embodiment, one or both of the cooler 625 and the pressure reducer 626 may be omitted. For example, when the second piping section 62b and the machine installed therein can have pressure resistance to withstand the pressure of a mixed fluid in a vapor state and heat resistance to withstand a heating temperature T1, the cooler 625 and the pressure reducer 626 may also be omitted.

[0127] In the organic solvent recovery unit 5 of the above embodiment, the recovery tank 60 and the purification tank 70 can share a single tank. Specifically, for example, a dehydration circulation pipe 62 and a purification circulation pipe 72 can be connected to a single tank (recovery purification tank). In this case, the mixed fluid stored in the recovery purification tank is first circulated in the dehydration circulation pipe 62 to become a concentrated fluid, and then the concentrated fluid is circulated in the purification circulation pipe 72 to become a purified fluid.

[0128] In the organic solvent recovery unit 5 of the above embodiment, a filter can be installed in the dehydration circulation pipe 62. That is, water can be separated from the mixed fluid circulating in the dehydration circulation pipe 62 while the target substance is removed. In this case, the purification tank 70 can be omitted, and the recovery tank 60 can be directly connected to the supply tank 80 (without the purification tank 70).

[0129] In the organic solvent recovery unit 5 of the above embodiment, the composition of the dehydrator 621 can be appropriately modified. For example, the separation membrane 51 provided by the dehydrator 621 is not limited to a zeolite membrane. For example, the separation membrane 51 can also be an organic separation membrane. Organic separation membranes are, for example, organic membranes formed from polyvinyl alcohol, polyglucosamine, polyimide, etc. Alternatively, the separation membrane 51 can also be a CNT (carbon nanotube) separation membrane. CNT separation membranes are, for example, membranes obtained by adding carbon nanotubes to a membrane such as polyimide. Alternatively, the separation membrane 51 can also be formed from a two-dimensional material. Two-dimensional materials are materials composed of a single atomic layer, specifically, for example, molybdenum sulfide (MoS2), composite atomic layer compounds formed from a previous periodic transition metal (titanium, vanadium, etc.) and a light element (carbon or nitrogen), etc. Alternatively, the separation membrane 51 can be formed from MOF (Metal Organic Frameworks) materials, or from carbon materials (e.g., graphene, graphene oxide, etc.).

[0130] In the substrate processing apparatus 100 of the above embodiment, the processing unit 4 for which the organic solvent is recovered and supplied by the organic solvent recovery unit 5 may not necessarily be all processing units 4 contained in the same tower. That is, the organic solvent recovery unit 5 may recover and supply organic solvent to one or more arbitrarily selected processing units 4. Furthermore, the processing unit 4 for which the organic solvent is recovered by the organic solvent recovery unit 5 and the processing unit 4 for which the organic solvent is supplied with organic solvent by the organic solvent recovery unit 5 may also be different.

[0131] In the substrate processing apparatus 100 of the above embodiments, the organic solvent is not limited to IPA. For example, the organic solvent may be at least one of HFE (hydrofluoroether), methanol, ethanol, acetone, and trans-1,2-dichloroethylene. Furthermore, the organic solvent does not need to contain only a single component, and may be a liquid obtained by mixing multiple components.

[0132] In the substrate processing apparatus 100 of the above embodiments, the rinsing liquid can be any liquid containing water. For example, the rinsing liquid can be any one of carbonated water, electrolyzed ionized water, hydrogen water, ozone water, and hydrochloric acid water with a diluted concentration (for example, about 10 to 100 ppm).

[0133] In the substrate processing apparatus 100 of the above embodiments, the substrate W to be processed may not necessarily be a semiconductor substrate. For example, the substrate W to be processed may be a photomask glass substrate, a liquid crystal display glass substrate, a plasma display glass substrate, an FED (Field Emission Display) substrate, an optical disc substrate, a magnetic disk substrate, a magneto-optical disk substrate, etc. Furthermore, the substrate W to be processed may not be a complete circle, and may also have shaped portions such as cutouts or oriented planes.

[0134] As described above, the substrate processing apparatus and substrate processing method have been described in detail. However, the above description is illustrative in all embodiments and is not intended to limit the substrate processing apparatus and substrate processing method. It should be understood that numerous variations not illustrated can be conceived without departing from the scope of the present invention. The configurations described in the above embodiments and variations may be appropriately combined or omitted as long as they do not contradict each other.

[0135] 1: Loading Port 2: Transfer and Conveying Robot 3: Main transport robot 4: Processing Unit 5: Organic Solvent Recovery Department 5t: Organic Solvent Recovery Section 6: Control Department 21:Hand 22: Arm 31:Hand 32: Arm 41: Rotary Chuck 42: Cup 43: Nozzle 43a: Liquid spray nozzle 43b: Flushing fluid nozzle 43c: Organic solvent nozzle 44: Processing Chamber 50a: Containment Box 1 50b: Containment Box 2 51: Separation membrane 52: Shell 53: Separate piping 54: Drainage piping 60: Recycling Tank 60A: Recycling Tank 60B: Recycling Tank 61: Recycled Piping 61A: Branch Section 61B: Branch Section 61t: Recycled Piping 62: Circulation piping (circulation piping for dehydration) 62a: Section 1 Piping 62b: Second piping section 62t: Circulation piping (circulation piping for dehydration) 70: Purification tank 70A: Cleanroom 70B: Cleanroom 71: 1st liquid supply piping 71A: Branch Section 71B: Branch Section 71t: 1st liquid supply piping 72: Purification circulation piping 72A: Circulation piping (circulation piping for cleanroom use) 72B: Circulation piping (circulation piping for cleanroom use) 80: Supply tank 81: 2nd liquid supply piping 81A: Branch Section 81B: Branch Section 81t: 2nd liquid supply piping 82: New liquid piping 83: 3rd liquid supply piping 100: Substrate processing apparatus 100a:Outer wall 411: Rotating base 412: Chuck pin 413: Shaft 414: Rotary motor 415: Protective shield 421: Guidance Department 422: Inclined section 423: Liquid receiving section 424: Cup-side recovery pipe 425: Cup Lifting Mechanism 431a: Medicine Dispensing Valve 431b: Flushing fluid valve 431c: Organic solvent valve 432a: Chemical solution piping 432b: Flushing fluid piping 432c: Organic solvent piping 433a: Drug supply source 433b: Fluid supply source 511: Matrix 512: Confucian Channel 520: Sealing component 521: Inlet 522: First Stream Exit 523: Second Stream Exit 531: Vacuum pump 532: Condenser 541: Decomposer 611: Recovery Valve 611A: Recovery Valve 611B: Recovery Valve 620A: Distributor control pipe 620B: Distributor control pipe 621: Dehydrator 621A: Valve No. 1 621B: Valve No. 2 622: Pump (Dehydration Side Liquid Delivery Pump) 623a: On / off valve 623b: On / off valve 624: Heater 625: Cooler 626: Pressure Reducer 627: Concentration Sensor 628: Pressure Sensor 629: Temperature sensor 630: Flow sensor (flow meter) 711: 1st liquid delivery valve 711A: First liquid delivery valve 711B: First liquid delivery valve 721: Purification Side Liquid Delivery Pump 722: On / off valve 723: Filter 724: Temperature Regulator 725: Pressure Sensor 726: Temperature Sensor 811: 2nd liquid delivery valve 811A: Second liquid delivery valve 811B: Second liquid delivery valve 821: New liquid supply source 822: New Hydraulic Valve 831: Pump (Supply-side liquid delivery pump) 832: Filter 833: Temperature Regulator 834: Pressure Sensor 835: Temperature Sensor 7231:Piping A: Axis (axis of rotation) C: Vehicle R1: Branch position R2: Merging point S1: Steps S2: Steps S3: Steps S4: Steps S201: Steps S202a: Steps S202b: Steps S203: Steps S204: Steps S205: Steps S206a: Steps S206b: Steps S207: Steps V1: Space inside the channel V2: Separation Space W: substrate

Claims

1. A substrate processing apparatus comprising: a rinsing fluid supply unit for supplying a rinsing fluid containing water to a substrate; an organic solvent supply unit for supplying an organic solvent to the substrate; a recovery tank for storing a mixed fluid comprising the water recovered after being supplied to the substrate and the organic solvent recovered after being supplied to the substrate; a circulation pipe connected to the recovery tank; a dehydrator disposed in the circulation pipe and having a separation membrane that allows the water to pass through but not the organic solvent; a pump disposed in the circulation pipe; a heater disposed in the circulation pipe downstream of the recovery tank and upstream of the dehydrator, for heating the mixed fluid to above the boiling point of the water; and a cooler disposed in the circulation pipe downstream of the dehydrator and upstream of the recovery tank.

2. The substrate processing apparatus of claim 1, wherein the cooler cools the mixed fluid to a temperature lower than the boiling point of the organic solvent and higher than room temperature.

3. The substrate processing apparatus of claim 1 or 2, wherein the pressure resistance of the piping portion of the circulating piping that is downstream of the cooler and upstream of the heater is lower than the pressure resistance of the piping portion of the circulating piping that is downstream of the heater and upstream of the cooler.

4. The substrate processing apparatus of claim 1 or 2, which includes a pressure reducer, wherein the pressure reducer is provided in the circulation piping to reduce the pressure of the mixed fluid after it has been cooled by the cooler.

5. The substrate processing apparatus of claim 1 or 2, comprising: a purification tank connected to the recovery tank via a liquid delivery pipe for storing a concentrated fluid obtained by separating the water from the mixed fluid; and a filter provided in the pipe connected to the purification tank for capturing the target substance contained in the concentrated fluid flowing through the pipe.

6. The substrate processing apparatus of claim 5, wherein the concentrated fluid stored in the purification tank is conveyed to the organic solvent supply unit after passing through the filter and is supplied to the substrate.

7. The substrate processing apparatus of claim 1 or 2, wherein the circulation piping has a plurality of branch portions disposed between the branch position and the confluence position, and the recycling tank is provided in each of the plurality of branch portions.

8. The substrate processing apparatus of claim 1 or 2, wherein the dehydrator is configured with a channel extending vertically, the channel serving as a flow path for the mixed fluid within the separation membrane, and the mixed fluid flowing through the circulation piping flows in from the opening on the vertically lower side of the channel.

9. The substrate processing apparatus of claim 8, wherein the dehydrator and the heater are arranged in a vertical direction.

10. A substrate processing method, comprising: The process includes: a rinsing fluid supply step, which supplies a rinsing fluid containing water to the substrate; an organic solvent supply step, which supplies an organic solvent to the substrate; a storage step, which stores a mixed fluid in a recovery tank, the mixed fluid containing the water recovered after being supplied to the substrate and the organic solvent recovered after being supplied to the substrate; a circulation step, which circulates the mixed fluid stored in the recovery tank in a circulation pipe connected to the recovery tank; a heating step, which heats the mixed fluid to above the boiling point of water by means of a heater provided in the circulation pipe; a separation step, which separates the water from the heated mixed fluid by flowing it into a dehydrator, the dehydrator being provided downstream of the heater in the circulation pipe and upstream of the recovery tank, and having a separation membrane that allows the water to pass through but not the organic solvent; and a cooling step, which cools the mixed fluid by means of a cooler provided downstream of the dehydrator in the circulation pipe and upstream of the recovery tank.

Images