Electrode, forming method thereof, and supercapacitor

Abstract

This disclosure provides an electrode and a supercapacitor. The electrode includes a conductive substrate, a carbon nanotube array, and a plurality of ruthenium-based nanoparticles. The carbon nanotube array is disposed on the conductive substrate, wherein the carbon nanotube array includes a plurality of carbon nanotubes, and the carbon nanotubes are doped with a plurality of N-type dopants. The ruthenium-based nanoparticles are attached to a plurality of surfaces of the carbon nanotubes. A supercapacitor includes a first electrode, a second electrode, a liquid electrolyte, and a separator. The first electrode and the second electrode are immersed in the liquid electrolyte. The separator is in the liquid electrolyte and lies between the first electrode and the second electrode.

Claims

1. An electrode, comprising: A conductive substrate; A carbon nanotube array is disposed on the conductive substrate, wherein the carbon nanotube array includes a plurality of carbon nanotubes, the carbon nanotubes being doped with a plurality of N-type dopants; and a plurality of ruthenium-based nanoparticles are attached to a plurality of surfaces of the carbon nanotubes, wherein the ruthenium-based nanoparticles include a plurality of ruthenium compounds.

2. The electrode as claimed in claim 1, wherein the ruthenium-based nanoparticles comprise a plurality of ruthenium nitride nanoparticles, a plurality of ruthenium oxide nanoparticles, or combinations thereof.

3. The electrode as claimed in claim 1, wherein a plurality of the ruthenium-based nanoparticles have a particle size of less than or equal to 30 nanometers.

4. The electrode as claimed in claim 1, wherein the plurality of carbon nanotubes have a diameter of less than or equal to 30 nanometers.

5. The electrode as claimed in claim 1, wherein a plurality of the carbon nanotubes have a height of less than or equal to 1 micrometer.

6. The electrode as claimed in claim 1, wherein the content of the N-type dopants in the carbon nanotubes is from 3 atomic% to 10 atoms.

7. The electrode as claimed in claim 1, wherein the N-type dopants comprise a plurality of nitrogen atoms.

8. The electrode as claimed in claim 1, wherein the ruthenium-based nanoparticles are attached to the N-type dopant.

9. The electrode as claimed in claim 1, wherein the conductive substrate comprises: A silicon substrate; A metal silicate layer is disposed on the silicon substrate.

10. A supercapacitor, comprising: A first electrode, comprising the electrode as described in claim 1; A second electrode; A liquid electrolyte, wherein the first electrode and the second electrode are immersed in the liquid electrolyte; and a separating membrane, in the liquid electrolyte and between the first electrode and the second electrode.

11. The supercapacitor as claimed in claim 10, wherein the second electrode comprises the electrode as claimed in claim 1.

12. A method for forming an electrode, comprising: A carbon nanotube array is formed on a conductive substrate, wherein the carbon nanotube array includes a plurality of carbon nanotubes, the carbon nanotubes being doped with a plurality of N-type dopants; and a plurality of ruthenium-based nanoparticles are formed on a plurality of surfaces of the carbon nanotubes, wherein the ruthenium-based nanoparticles include a plurality of ruthenium compounds.

13. The method as described in claim 12, wherein the ruthenium-based nanoparticles comprise a plurality of ruthenium nitride nanoparticles, a plurality of ruthenium oxide nanoparticles, or combinations thereof.

14. The method as described in claim 12, wherein forming the ruthenium-based nanoparticles on the surfaces of the carbon nanotubes includes sputtering a ruthenium target on the surfaces of the carbon nanotubes in a nitrogen atmosphere.

15. The method as described in claim 12, wherein forming the carbon nanotube array on the conductive substrate comprises: A plurality of catalyst particles are formed on the conductive substrate; and the carbon nanotubes are grown through the catalyst particles in a carbon-containing gas and a nitrogen-containing gas.

16. The method as described in claim 15, wherein the carbon-containing gas includes methane gas, ethane gas, acetylene gas, or combinations thereof.

17. The method as described in claim 15, wherein the nitrogen-containing gas includes nitrogen, ammonia, or a combination thereof.

18. The method as described in claim 15, wherein the catalyst particles comprise a magnetic material comprising iron, cobalt, nickel, or a combination thereof.

19. The method as described in claim 12, further comprising forming the conductive substrate before forming the carbon nanotube array on the conductive substrate, wherein forming the conductive substrate includes: Deposit a metal layer on a silicon substrate; And transform the metal layer into a metal silicate layer.

20. The method of claim 19, wherein converting the metal layer into the metal silicate layer includes fusing the metal layer with a portion of the silicon substrate to form the metal silicate layer.

Images