Wafer box

Abstract

A wafer cassette includes a housing and a plurality of mounting frames. The housing includes a rear wall, two side walls, and a cavity. The side walls are respectively disposed on opposite sides of the rear wall. The mounting frames are spaced apart and disposed on the side walls of the housing. Each mounting frame includes a body and a first extension. The first extension extends from the body in an extension direction away from the rear wall, and the thickness of the body is greater than the thickness of the first extension. By providing bodies and first extensions of different thicknesses on the mounting frames, each mounting frame can provide at least two contact points on the bottom of the wafer, effectively improving the stability of the wafer placed on the mounting frame.

Claims

1. A wafer cassette, comprising: a housing including a rear wall, two side walls, and a cavity, the side walls being disposed on opposite sides of the rear wall, the cavity being located between the side walls and the rear wall, and the cavity being configured to accommodate a plurality of wafers; a plurality of mounting racks, the mounting racks being spaced apart on the side walls of the housing, wherein each mounting rack includes a body, a first extension, and a second extension, the first extension extending from the body in an extending direction away from the rear wall, and a thickness of the body being greater than a thickness of the first extension, the second extension extending from the first extension in the extending direction away from the rear wall, and a thickness of the first extension being greater than a thickness of the second extension; The body includes a body mounting surface, the first extension includes a first mounting surface, the second extension includes a second mounting surface, the connection between the body mounting surface and the first mounting surface forms a first slope, and the connection between the second mounting surface and the first mounting surface forms a second slope, such that each mounting frame can provide at least two contact points at a bottom of one of the plurality of wafers.

2. The wafer cassette as described in claim 1, wherein the body mounting surface and the first mounting surface are planar or conical.

3. The wafer cell as claimed in claim 2, wherein the angle formed by the first inclined surface and the first loading surface is greater than 90 degrees.

4. The wafer cell as described in claim 3, wherein the second loading surface is a plane or a cone.

5. The wafer cell as claimed in claim 4, wherein the angle formed by the second inclined plane and the second loading surface is greater than 90 degrees.

6. The wafer cassette as claimed in claim 5, wherein each mounting frame further includes a terminal extension that extends from the second extension in an extension direction away from the rear wall, and the thickness of the terminal extension tapers in the extension direction.

7. The wafer cassette as claimed in claim 6, wherein the bottom of the body, the bottom of the first extension, the bottom of the second extension, and the bottom of the final extension together form a continuous plane.

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