Image sensor including dual vertical gate
TWI939529BActive Publication Date: 2026-09-21SAMSUNG ELECTRONICS CO LTD
Patent Information
- Application Number
- TW111127012
- Authority / Receiving Office
- TW · TW
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2021-07-21
- Filing Date
- 2022-07-19
- Publication Date
- 2026-09-21
- Estimated Expiration
- 2042-07-18
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Abstract
This invention provides an image sensor comprising dual vertical gates. The dual vertical gates include: two vertically extending portions spaced apart from each other in a first direction and extending vertically into a substrate in a second direction perpendicular to the first direction; and a connecting portion connecting the two vertically extending portions to each other. An element isolation layer is disposed adjacent to the side surfaces of the two vertically extending portions in the first direction. The two vertically extending portions are separated by a separation region extending in the second direction, and the top surface of the separation region is lower than the top surface of the element isolation layer.
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Citation Information
Patent Citations
Vertical gate structure and layout in a CMOS image sensor
TW202121674A
Methods for fabricating solid state image sensor devices having non-planar transistors
US20060084195A1
Solid-state imaging device
US20130076934A1
