Substrate transport robot and control method of substrate transport robot

Abstract

This substrate transport robot includes: a hand that holds the substrate; a detection unit that is disposed on the hand to detect the substrate in a state that mimics the substrate being placed on the substrate placement section; and a control unit that teaches the hand the coordinates of the substrate placement section based on the detection results of the detection unit.

Description

[Technical Field]

[0001] This invention relates to a substrate transport robot and a control method for the substrate transport robot. [Previous Technology]

[0002] Conventionally, substrate transport robot systems are known. For example, Japanese Patent No. 6966913 discloses a substrate transport robot. This substrate transport robot includes a substrate transporter that transports a substrate in a manner that holds a substrate mounted on a substrate mounting section. The substrate mounting section has a plurality of supports arranged in the same circumferential shape and rotates about a rotation axis. The substrate transport robot detects the plurality of supports of the substrate mounting section by means of an object detection sensor provided on the substrate transporter, and automatically teaches the direction of the rotation axis of the substrate mounting section.

[0003] However, the substrate transport robot described in Japanese Patent No. 6966913 can only automatically teach the direction of the rotation axis of the substrate mounting section, but cannot automatically teach the coordinates of the substrate holding hand in the substrate mounting section. Therefore, it is desirable to be able to automatically and accurately teach the coordinates of the substrate holding hand in the substrate mounting section. [Summary of the Invention]

[0004] The present invention was developed to solve the above-mentioned problems. One object of the present invention is to provide a substrate transport robot and a control method for the substrate transport robot. The substrate transport robot system and the control method for the substrate transport robot can automatically and accurately teach the coordinates of the hand on the substrate mounting part.

[0005] The substrate transport robot disclosed in the first aspect of the present invention comprises: a hand for holding a substrate; a detection unit disposed on the hand and a teaching detection fixture for detecting the aforementioned substrate in a state that mimics being placed on a substrate placement section; and a control unit for teaching the coordinates of the hand on the substrate placement section based on the detection results of the teaching detection fixture made by the detection unit.

[0006] The substrate transport robot disclosed in the first aspect of the present invention, as described above, has a control unit that teaches the coordinates of the hand on the substrate mounting section based on the detection results of a teaching detection fixture provided by the detection unit. In this way, the teaching of the hand's coordinates on the substrate mounting section can be performed automatically by the control unit. Furthermore, since the teaching of the hand's coordinates on the substrate mounting section can be performed based on the detection results of a teaching detection fixture located at the actual substrate receiving position, compared to the case where the hand's coordinates are taught based on detection results of the substrate mounting section obtained at a position separate from the substrate receiving position, the teaching of the hand's coordinates on the substrate mounting section can be performed with high accuracy. These results enable the automatic and highly accurate teaching of the hand's coordinates on the substrate mounting section.

[0007] The control method of the substrate transport robot according to the second point of view disclosed in this invention includes a hand for holding the substrate. The control method includes: a teaching detection fixture for detecting the aforementioned substrate in a state that mimics being placed on a substrate mounting section; and teaching the coordinates of the hand on the substrate mounting section based on the detection result of the teaching detection fixture.

[0008] The control method for the substrate transport robot disclosed in the first aspect of the present invention, as described above, includes teaching the coordinates of the hand on the substrate mounting section based on the detection results of a teaching detection fixture. This allows the control unit to automatically teach the coordinates of the hand on the substrate mounting section. Furthermore, since the teaching of the hand's coordinates on the substrate mounting section can be based on the detection results of a teaching detection fixture located at the actual substrate receiving position, compared to the case where the hand's coordinates are taught based on detection results of the substrate mounting section obtained at a position separate from the substrate receiving position, the teaching of the hand's coordinates on the substrate mounting section can be performed with high accuracy. These results provide a control method for a substrate transport robot that can automatically and accurately teach the coordinates of the hand on the substrate mounting section.

[0009] According to the present invention, the coordinates of the hand on the substrate mounting portion can be taught automatically and with good accuracy.

Implementation Method

[0011] The following describes an embodiment of the present invention as embodied in the present invention, based on the accompanying drawings.

[0012] The configuration of a substrate transport robot 100 according to one embodiment will be described with reference to Figures 1 to 13. Hereinafter, the two mutually orthogonal directions in the horizontal plane will be designated as the X direction and the Y direction, respectively. Furthermore, the vertical direction orthogonal to the horizontal plane (X-Y plane) will be designated as the Z direction.

[0013] (Configuration of the substrate transport robot) As shown in FIG1, the substrate transport robot 100 is disposed in the heat treatment apparatus 101. The substrate transport robot 100 performs substrate transport operations between the FOUP 102 (Front Opening Unified Pod) and the wafer boat 103 in the heat treatment apparatus 101.

[0014] FOUP102 is a substrate storage container for holding a plurality of substrates W for mounting. A boat 103 is disposed in a heat treatment apparatus 101 for mounting the plurality of substrates W. The heat treatment apparatus 101 can perform heat treatment on the plurality of substrates W mounted in the boat 103. The boat 103 has columnar holding members 103a that hold the plurality of substrates W in a manner that arranges them along the Z direction, which is the vertical direction. Three holding members 103a are disposed in the boat 103 extending along the Z direction. The plurality of substrates W are held by the peripheral portions of each of the plurality of claw portions of the holding members 103a, so that the plurality of substrates W are arranged in the boat 103 with their main surfaces facing each other along the Z direction. The substrate W is a semiconductor wafer having a circular plate shape. The substrate W is formed of, for example, silicon, germanium, or quartz glass.

[0015] The substrate transport robot 100 includes a substrate holding hand 10, a drive mechanism 20, and a control unit 50. The drive mechanism 20 includes a blade holding part 21, a horizontal movement mechanism 22, a rotation mechanism 23, a mounting part 24, and a lifting mechanism 25. Furthermore, the substrate transport robot 100 configured according to this embodiment has a tilting mechanism 30 disposed in the drive mechanism 20. In addition, the substrate holding hand 10 and the tilting mechanism 3 are examples of a hand and a tilt adjustment mechanism, respectively.

[0016] The substrate holder 10 has a plurality of blade members 11 in a double-forked shape with two front ends. The substrate holder 10 holds the substrate W by means of the plurality of double-forked blade members 11. In the substrate holder 10, the blade members 11 are arranged in a Z-direction belonging to the vertical direction. The plurality of blade members 11 are arranged in, for example, two, five, six, thirteen, or N pieces. N is an integer greater than or equal to 2. Each of the plurality of blade members 11 individually holds one substrate W. The substrate holder 10 is a passive hand that holds the substrate W by placing the substrate W on the upper side of the plate-like blade members 11 in the Z-direction. The substrate holder 10 is moved by the action of the drive mechanism 20.

[0017] A base end is connected to the blade holding portion 21 on the opposite side of the two front ends of the plurality of blade members 11. The horizontal moving mechanism 22 has a support body 22a extending in the horizontal direction. The blade holding portion 21 is mounted on the support body 22a of the horizontal moving mechanism 22 and moves in the horizontal direction relative to the support body 22a. The horizontal moving mechanism 22 moves the blade holding portion 21 and the substrate holding hand 10 together in the horizontal direction. In addition, the horizontal moving mechanism 22 switches between moving the plurality of blade members 11 of the substrate holding hand 10 together in the horizontal direction and moving the lowermost blade member 11 among the plurality of blade members 11 in the horizontal direction. The rotating mechanism 23 has a rotating shaft portion 23a extending in the Z direction. The support body 22a is mounted on the rotating shaft portion 23a. The rotating mechanism 23 rotates the support body 22a, the blade holding portion 21, and the substrate holding hand 10 together in a rotational direction about the Z direction around the rotating shaft portion 23a. The rotating shaft 23a is rotated by the motor 23b, which will be described later.

[0018] The tilting mechanism 30 indirectly adjusts the tilt of the substrate holder 10. The tilting mechanism 30 is disposed between the support 22a and the mounting portion 24. The tilting mechanism 30 tilts the posture of the substrate holder 10 by changing the tilt of the support 22a, the blade holder 21, and the substrate holder 10 relative to the horizontal moving mechanism 22 of the mounting portion 24. That is, the tilting mechanism 30 changes the tilt of the substrate holder 10 by changing the tilt of the support 22a and the blade holder 21. Furthermore, a rotating shaft portion 23a is mounted on the tilting mechanism 30. The lifting mechanism 25 has a support 25a extending in the Z direction, and a mounting portion 24 is mounted on the support 25a. The lifting mechanism 25 moves the mounting portion 24 in the Z direction. That is, the lifting mechanism 25 causes the mounting portion 24, the tilting mechanism 30, the rotating mechanism 23, the horizontal moving mechanism 22, the blade holder 21, and the substrate holder 10 to move up and down together in the Z direction.

[0019] <Details of the tilting mechanism> As shown in Figure 2, the tilting mechanism 30 includes: a plate-shaped lower member 31 disposed on the lower side in the Z direction where the mounting portion 24 is disposed; and an upper member 32 disposed opposite to the lower member 31 in the Z direction belonging to the vertical direction. The lower member 31 is mounted on the mounting portion 24. The support body 22a is mounted on the upper member 32 via a rotating shaft portion 23a. The support body 22a rotates about the rotating shaft portion 23a as the rotation axis. Furthermore, the tilting mechanism 30 has three spherical sliding bearings 33, 34, and 35 disposed between the lower member 31 and the upper member 32 at locations that are different from each other in the Z direction belonging to the vertical direction.

[0020] The spherical sliding bearing 35 is positioned at the front end of an imaginary centerline L extending from the base end to the front end along the X-direction, which belongs to the width direction of the tilting mechanism 30. Spherical sliding bearings 33 and 34 are each positioned closer to the base end of the substrate transport robot 100 than the spherical sliding bearing 35. Furthermore, viewed from the Z-direction, the spherical sliding bearings 33 and 34 are arranged in a linearly symmetrical manner about the imaginary centerline L as an axis of symmetry. Additionally, the spherical sliding bearings 33 and 34 are positioned higher than the spherical sliding bearing 35 and at the same height.

[0021] As shown in Figure 3, the spherical sliding bearing 35 has an inner ring 35a and an outer ring 35b. The outer ring 35b of the spherical sliding bearing 35 is mounted on the lower member 31 through the intermediate member 35c, and the inner ring 35a is mounted on the upper member 32 through the balls 35d. Furthermore, the tilting mechanism 30 has two height position adjustment mechanisms 36 and 37, each corresponding to two of the three spherical sliding bearings 33 and 34. However, no height position adjustment mechanism is provided for the spherical sliding bearing 35.

[0022] The spherical sliding bearing 33 has an inner ring 33a and an outer ring 33b. The inner ring 33a of the spherical sliding bearing 33 is mounted on the lower member 31 via an intermediate member 33c and a height position adjustment mechanism 36, and the outer ring 33b is mounted on the upper member 32. The height position adjustment mechanism 36 has a male screw member 36a and a female screw member 36b. The male screw member 36a is screwed into the female screw member 36b and is rotated by a motor 36c (described later). The female screw member 36b moves in the Z direction due to the rotation of the male screw member 36a. Furthermore, the female screw member 36b is fitted into the inner hole of the inner ring 33a and is mounted on the upper member 32 via the spherical sliding bearing 33. The height position of the upper member 32 can be changed by moving the female screw member 36b in the Z direction.

[0023] The spherical sliding bearing 34 has the same configuration as the spherical sliding bearing 33. That is, the spherical sliding bearing 34 has an inner ring 34a and an outer ring 34b. The inner ring 34a of the spherical sliding bearing 34 is mounted on the lower member 31 through the intermediate member 34c and the height position adjustment mechanism 37, and the outer ring 34b is mounted on the upper member 32. The height position adjustment mechanism 37 has the same configuration as the height position adjustment mechanism 36. That is, the height position adjustment mechanism 37 has a male screw member 37a and a female screw member 37b. The male screw member 37a is screwed into the female screw member 37b and is rotated by the motor 37c described later. The female screw member 37b moves in the Z direction by the rotation of the male screw member 37a. Furthermore, the female screw member 37b is fitted into the inner hole of the inner ring 34a and is mounted on the upper member 32 through the spherical sliding bearing 34. The height position of the upper component 32 can be changed by moving the female screw component 37b along the Z direction.

[0024] The height position of the upper member 32 is changed by at least one of the height position adjustment mechanisms 36 and 37, thereby changing the tilt of the upper member 32 relative to the lower member 31. By changing the tilt of the upper member 32 relative to the lower member 31, the tilt of the support 22a relative to the mounting portion 24 can be changed, so that the substrate can be tilted while holding the hand 10 in a tilted position. Furthermore, when the height position of the upper member 32 is changed to tilt the upper member 32, since the outer ring of the spherical sliding bearing 33, 34 or 35 slides on the surface of the inner ring while tilting the upper member 32, the upper member 32 can be tilted without twisting (tilting) it.

[0025] <Composition of Detection Unit and Control Unit> As shown in FIG4, the substrate transport robot 100 includes a detection unit 40. The detection unit 40 is disposed in the substrate holding hand 10 and is a photoelectric sensor including an irradiation unit 41 that irradiates the detection light LT and a light receiving unit 42 that detects the detection light LT irradiated by the irradiation unit 41. The irradiation unit 41 has a light-emitting element such as a laser diode or an LED (Light-Emitting Diode). The light receiving unit 42 has a light-receiving element such as a CCD (Charge Coupled Device) image sensor, a CMOS (Complementary Metal Oxide Semiconductor) image sensor, or a photodiode. The irradiation unit 41 and the light receiving unit 42 of the detection unit 40 are each disposed in the substrate holding hand 10 at the front end of the blade member 11 which has two forks. The detection unit 40 uses a mapping sensor to detect whether the detection light LT, emitted from the two front ends of the double-forked blade member 11 in the substrate holder 10, is blocked. The detection unit 40 detects the substrate W during the transport operation of the substrate W, when both the FOUP 102 and the crystal boat 103 are mounted. Furthermore, in this embodiment, the detection unit 40 detects the detection fixture 200, which will be described later, when both the FOUP 102 and the crystal boat 103 are mounted. The detection unit 40 is positioned on the lowermost blade member 11 among the plurality of blade members 11 arranged vertically in the substrate holder 10. Furthermore, only the lowermost blade member 11 among the plurality of blade members 11 in the substrate holder 10 is shown in FIG. 4. The detection unit 40 outputs a detection signal, indicating whether the detection light LT is blocked, to the control unit 50.

[0026] As shown in FIG. 5, the control unit 50 controls the operation of each part of the substrate transport robot 100. Specifically, the control unit 50 controls the transport operation of the substrate transport robot 100 by controlling the horizontal movement mechanism 22, the rotation mechanism 23, the lifting mechanism 25, and the tilting mechanism 30. Specifically, motors 22b, 23b, 25b, 36c, and 37c, which serve as drive sources, are respectively arranged in the horizontal movement mechanism 22, the rotation mechanism 23, the lifting mechanism 25, the height position adjustment mechanism 36, and the height position adjustment mechanism 37. The control unit 50 controls the transport operation of the substrate W performed by the substrate transport robot 100 by controlling the motors 22b, 23b, 25b, 36c, and 37c. Each of the motors 22b, 23b, 25b, 36c, and 37c is a servo motor. Furthermore, the control unit 50 receives detection signals from the detection unit 40. Furthermore, the control unit 50 can be configured as a single controller to control various parts of the substrate transport robot 100 (control of the transport action of the substrate transport robot 100, control of the tilting mechanism 30, and control of the detection unit 40, etc.), or it can be configured as multiple separate controllers to control various parts of the substrate transport robot 100. When the control unit 50 is configured as multiple separate controllers to control various parts of the substrate transport robot 100, communication can also be performed between the multiple controllers.

[0027] The control unit 50 includes computing devices such as a CPU (Central Processing Unit), memory such as RAM (Random Access Memory) and ROM (Read Only Memory), and memory devices such as a hard disk. The control unit 50 executes control processing based on the computing devices according to the programs and parameters stored in the memory devices. Furthermore, the control unit 50 has a main CPU that controls the overall movement of the board transport robot 100, and a servo CPU that controls the current supplied to the drive sources including motors 22b, 23b, 25b, 36c, and 37c.

[0028] The control unit 50 uses the substrate transfer robot 100 to transfer the substrate W between the FOUP 102 and the crystal boat 103. For example, the control unit 50 uses the substrate transfer robot 100 to transfer the substrate W from the FOUP 102 to the crystal boat 103 before processing. Furthermore, for example, the control unit 50 uses the substrate transfer robot 100 to transfer the substrate W from the crystal boat 103 to the FOUP 102 after processing. At this time, as shown in FIG6, the control unit 50 causes the substrate holding hand 10 to enter the substrate placement section 110, which is the FOUP 102 or the crystal boat 103, and to be positioned at the substrate receiving position P1, so as to perform the transfer of the substrate W to the substrate placement section 110 or the acceptance of the substrate W from the substrate placement section 110. The substrate receiving position P1 is a position for handing over the substrate W to the substrate mounting section 110 or for receiving the substrate W from the substrate mounting section 110, and is located below the substrate W in the state where the substrate mounting section 110 is mounted.

[0029] (Tilting Adjustment) Here, during the transport of the substrate W, if there is a relative tilt between the substrate W, which is being carried by the FOUP 102 or the crystal boat 103, and the substrate holding hand 10, the substrate W may not be properly held by the substrate holding hand 10 due to the relative tilt. Therefore, it is desirable to be able to adjust the relative tilt between the substrate W and the substrate holding hand 10.

[0030] Therefore, as shown in FIG7, the control unit 50 uses the detection unit 40 to detect the detection fixture 200, which mimics the state of the substrate W placed on the substrate mounting section 110 of the FOUP 102 or the crystal boat 103. Furthermore, based on the detection results of the detection fixture 200 by the detection unit 40, the control unit 50 adjusts the relative tilt between the substrate W and the substrate holding hand 10 by actuating the tilting mechanism 30. In this way, the relative tilt between the substrate W and the substrate holding hand 10 can be adjusted. For example, during the installation of the substrate transport robot 100 or during periodic maintenance, the control unit 50 uses the detection unit 40 to detect the detection fixture 200 to adjust the relative tilt between the detection fixture 200 and the substrate holding hand 10. The detection fixture 200 is an example of a teaching detection fixture.

[0031] The control unit 50, when the substrate holding hand 10 is positioned near the substrate receiving position P1 within the substrate mounting section 110, uses the detection unit 40 to detect the mounting state of the substrate mounting section 110. The state of positioning the substrate holding hand 10 near the substrate receiving position P1 refers to, for example, a state where the substrate holding hand 10 is offset from the substrate receiving position P1 within a predetermined distance (e.g., the radius of the substrate W (150 mm, etc.)) in the vertical direction. Furthermore, the control unit 50 uses the detection unit 40 to detect the mounting state of the substrate mounting section 110 after adjusting its rotational position about the Z direction (vertical direction). The detection fixture 200 is positioned in the substrate mounting section 110 such that its long side direction is aligned along the A direction (front-back direction of the substrate holding hand 10), and its rotational position about the Z direction is adjusted. The inspection fixture 200 may also include a positioning part for positioning the rotational position around the Z-direction. The positioning part can be an elastomer such as rubber, a protrusion, or a notch. In this case, when the user places the inspection fixture 200 on the substrate mounting portion 110, the positioning part abuts against the substrate mounting portion 110 to position the rotational position around the Z-direction. This allows the user to place the inspection fixture 200 on the substrate mounting portion 110 with the rotational position around the Z-direction already adjusted. Furthermore, if an alignment device is present, it can also be used to adjust the rotational position around the Z-direction. In this case, the alignment device is used to transfer the inspection fixture 200, with its rotational position adjusted around the Z-direction, to the substrate mounting portion 110 by the substrate transfer robot 100. This allows the inspection fixture 200 to be placed on the substrate mounting portion 110 by the substrate transfer robot 100 with its rotational position adjusted around the Z-direction.

[0032] The control unit 50 adjusts the tilt of the upper member 32 relative to the lower member 31 by means of the height position adjustment mechanisms 36 and 37 based on the detection results of the detection fixture 200 provided by the detection unit 40, thereby adjusting the relative tilt between the detection fixture 200 and the substrate holder 10. Furthermore, the control unit 50 adjusts the tilt of the blade holder 21 by means of the tilt mechanism 30 based on the detection results of the detection fixture 200 provided by the detection unit 40, thereby adjusting the relative tilt between the detection fixture 200 and the substrate holder 10. Furthermore, the control unit 50 adjusts the relative tilt between the detection fixture 200 and the substrate holder 10 in the following directions (i.e., the rolling direction around the substrate holder 10, i.e., the R direction) and the following directions (i.e., the pitch direction around the substrate holder 10, i.e., the B direction) based on the detection results of the detection fixture 200 provided by the detection unit 40, i.e., the detection fixture 200 provided by the detection unit 40, by means of the tilt mechanism 30, in accordance with the rolling direction around the substrate holder 10 (i.e., the A direction) and the following directions (i.e., the P direction).

[0033] As shown in FIG8, the testing fixture 200 includes a thin plate-shaped testing fixture body 201 that mimics the substrate W, a rolling tilt testing section 202, and a pitch tilt testing section 203. The rolling tilt testing section 202 is disposed on the testing fixture body 201 to adjust the rolling direction of the substrate holding hand 10, i.e., the tilt in the R direction. The rolling tilt testing section 202 is flat and plate-shaped along the Z direction and has a predetermined thickness along the Z direction. The upper and lower surfaces of the rolling tilt testing section 202 are parallel to the mounting surface belonging to the lower surface of the testing fixture body 201.

[0034] The pitch tilt detection unit 203 is disposed on the detection fixture body 201 to adjust the pitch direction of the substrate holding hand 10, i.e., the tilt in the P direction. The pitch tilt detection unit 203, in a state where its rotational position around the Z direction (which belongs to the vertical direction) has been adjusted, is flattened in the B direction and extends in the A direction. The pitch tilt detection unit 203 is disposed at the center of the detection fixture body 201 in the B direction. Furthermore, the upper surface of the pitch tilt detection unit 203 is parallel to the mounting surface belonging to the lower surface of the detection fixture body 201. The pitch tilt detection unit 203 has a first plate-shaped portion 203a, a second plate-shaped portion 203b, and a third plate-shaped portion 203c. The first plate-shaped portion 203a, the second plate-shaped portion 203b, and the third plate-shaped portion 203c are arranged in a sequence from rear to front in the A direction. The rolling tilt detection part 202 is arranged across the upper surfaces of both the second plate-shaped part 203b and the third plate-shaped part 203c. Furthermore, an opening 203d is formed at a position between the second plate-shaped part 203b and the third plate-shaped part 203c in the A direction and overlapping the rolling tilt detection part 202 in the Z direction, such that the detection light LT can pass through it. Additionally, a transparent component that allows the detection light LT to pass through may be installed in the opening 203d.

[0035] Furthermore, the testing fixture 200 includes a vertical coordinate teaching test section 204 and a front-back and left-right coordinate teaching test section 205 for teaching the coordinates of the substrate holding hand 10 described later. The vertical coordinate teaching test section 204 is provided for teaching the coordinates in the Z direction, which belongs to the vertical direction of the substrate holding hand 10. The vertical coordinate teaching test section 204 is formed from the front end of the testing fixture body 201. The front-back and left-right coordinate teaching test section 205 is disposed on the testing fixture body 201 for teaching the coordinates in the A direction, which belongs to the front-back direction of the substrate holding hand 10, and the B direction, which belongs to the left-right direction. The front-back and left-right coordinate teaching test section 205 is pin-shaped and extends along the Z direction. The front-back and left-right coordinate teaching test section 205 is disposed at the center of the testing fixture body 201. Furthermore, the detailed instructions on the coordinates of the substrate holding hand 10 will be described later.

[0036] (Tilt adjustment in the rolling direction) As shown in FIG9, the control unit 50 adjusts the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the rolling direction by actuating the tilt mechanism 30 based on the detection result of the rolling tilt detection unit 202 made by the detection unit 40.

[0037] As shown in FIG9(A), firstly, the control unit 50 detects the front end of the detection fixture body 201 by means of the detection unit 40. Specifically, the control unit 50 moves the detection unit 40 along the Z direction, which belongs to the vertical direction, while illuminating the detection light LT through the detection unit 40. When the detection light LT passes the height of the front end of the detection fixture body 201, the detection light LT is blocked by the front end of the detection fixture body 201. Therefore, the control unit 50 obtains the height of the front end of the detection fixture body 201 based on the timing of the blocking of the detection light LT.

[0038] When the front end of the detection fixture body 201 is not detected even when the detection unit 40 is irradiated with the detection light LT while moving the detection unit 40 in the Z direction (which belongs to the vertical direction), the control unit 50 moves the detection unit 40 forward in the A direction. Furthermore, while the detection unit 40 is moved forward in the A direction, the control unit 50 irradiates the detection unit 40 with the detection light LT while moving the detection unit 40 in the Z direction (which belongs to the vertical direction). These actions are repeated until the front end of the detection fixture body 201 is detected.

[0039] Next, as shown in FIG9(B), the control unit 50 detects the opening 203d by the detection unit 40. Specifically, the control unit 50 moves the detection unit 40 to the height of the pitch-tilt detection unit 203 based on the height of the front end of the detection fixture body drive mechanism 20. Furthermore, the control unit 50 moves the detection unit 40 towards the front end in the A direction while irradiating the detection light LT by the detection unit 40. The detection light LT is detected continuously within a certain time range when it passes the position of the opening 203d. Therefore, the control unit 50 specifies the position of the opening 203d based on the timing of the detection of the detection light LT. Since the position of the opening 203d represents the position of the roll-tilt detection unit 202, the position of the roll-tilt detection unit 202 can be specified by specifying the position of the opening 203d. In this way, the pitch-tilt detection unit 203 functions as a specifying unit for specifying the position of the roll-tilt detection unit 202.

[0040] Finally, as shown in FIG9(C), the control unit 50 detects the rolling tilt detection unit 202 by means of the detection unit 40. Specifically, the control unit 50 illuminates the detection light LT by means of the detection unit 40 while moving the detection unit 40 upward in the Z direction from the position of the opening 203d. When the detection light LT passes the height of the rolling tilt detection unit 202, the detection light LT is blocked by the rolling tilt detection unit 202. Therefore, the control unit 50 obtains the thickness of the rolling tilt detection unit 202 in the Z direction according to the timing of the blocking of the detection light LT.

[0041] Furthermore, the control unit 50 repeatedly changes the tilt of the substrate holding hand 10 in the R direction (which belongs to the rolling direction) using the tilting mechanism 30 while detecting the rolling tilt detection part 202 using the detection unit 40. That is, the control unit 50 repeatedly changes the tilt of the substrate holding hand 10 in the R direction using the tilting mechanism 30 while moving the detection unit 40 in the Z direction to obtain the thickness of the rolling tilt detection part 202 in the Z direction. In this way, the control unit 50 adjusts the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the R direction according to the detection result of the rolling tilt detection part 202 by the detection unit 40, so that the obtained thickness of the rolling tilt detection part 202 becomes a predetermined thickness.

[0042] In the R direction, when the substrate holding hand 10 is not parallel to the detection fixture 200, the thickness of the rolling tilt detection portion 202 is obtained as a thickness greater than the original thickness of the rolling tilt detection portion 202, that is, a thickness greater than a predetermined thickness. Conversely, in the R direction, when the substrate holding hand 10 is parallel to the detection fixture 200, the thickness of the rolling tilt detection portion 202 is obtained as the original thickness of the rolling tilt detection portion 202, that is, a predetermined thickness. Therefore, if the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the R direction is adjusted so that the thickness of the rolling tilt detection portion 202 is a predetermined thickness, the substrate holding hand 10 and the detection fixture 200 can be made parallel in the R direction.

[0043] During the detection of the rolling tilt detection unit 202, the control unit 50 may repeatedly change the tilt of the substrate holding hand 10 in the R direction to a predetermined plurality of positions using the tilting mechanism 30, while the detection unit 40 detects the rolling tilt detection unit 202. Furthermore, the control unit 50 may estimate the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the R direction based on the detection results of the rolling tilt detection unit 202 performed by the detection unit 40, and change the tilt of the substrate holding hand 10 in the R direction using the tilting mechanism 30 based on the estimated relative tilt between the detection fixture 200 and the substrate holding hand 10 in the R direction. That is, the control unit 50 may repeatedly change the tilt of the substrate holding hand 10 in the R direction to the estimated tilt position using the tilting mechanism 30, while the detection unit 40 detects the rolling tilt detection unit 202.

[0044] Furthermore, for example, when the control unit 50 cannot grasp the position of the detection fixture 200 because the coordinates of the substrate holding hand 10 have not been taught, the position of the rolling tilting detection part 202 can be specified by performing the actions shown in FIG9(A) and (B). However, it is also possible that when the control unit 50 can grasp the position of the detection fixture 200, the position of the rolling tilting detection part 202 can be specified by performing the action shown in FIG9(C) without performing the actions shown in FIG9(A) and (B).

[0045] (Tilt adjustment in pitch direction) As shown in FIG10, the control unit 50 adjusts the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the P direction, which belongs to the pitch direction, by actuating the tilt mechanism 30 based on the detection result of the pitch tilt detection unit 203 made by the detection unit 40.

[0046] As shown in Figure 10(A), firstly, the control unit 50 detects the front end of the detection fixture body 201 via the detection unit 40. Since this operation is the same as that shown in Figure 9(A), detailed explanation is omitted. The control unit 50 obtains the height of the front end of the detection fixture body 201 in the same manner as shown in Figure 9.

[0047] Next, as shown in FIG10(B), the control unit 50 detects the front end and rear end of the pitch tilt detection unit 203 by means of the detection unit 40. The front end of the pitch tilt detection unit 203 refers to the front end of the third plate-shaped part 203c, and the rear end of the pitch tilt detection unit 203 refers to the rear end of the first plate-shaped part 203a. Specifically, the control unit 50 moves the detection unit 40 to the height of the pitch tilt detection unit 203 according to the height of the front end of the detection fixture body 201. Furthermore, the control unit 50 moves the detection unit 40 forward in the A direction while irradiating the detection light LT by means of the detection unit 40. When the detection light LT passes the position of the rear end of the pitch tilt detection unit 203, the detection light LT is blocked by the rear end of the pitch tilt detection unit 203. Therefore, the control unit 50 specifies the position of the rear end of the pitch tilt detection unit 203 according to the timing of the blocking of the detection light LT. Furthermore, the detection light LT is detected in a timing system that determines the position of the front end of the detection unit 203 when it passes through the position of the detection light LT. Therefore, the control unit 50 specifies the position of the front end of the detection unit 203 based on the timing of the detection of the detection light LT.

[0048] Finally, as shown in FIG10(C), the control unit 50 detects at least two portions of the pitch tilt detection unit 203 that are separated from each other in the A direction, which belongs to the front-rear direction, by means of the detection unit 40. Furthermore, FIG10(C) shows an example of detecting two portions: one slightly forward from the rear end of the pitch tilt detection unit 203, and the other slightly backward from the front end of the pitch tilt detection unit 203. The control unit 50 specifies the positions of the at least two portions of the pitch tilt detection unit 203 to be detected based on the positions of the front and rear ends of the pitch tilt detection unit 203. Furthermore, the control unit 50 illuminates the detection light LT onto the at least two portions of the pitch tilt detection unit 203 by means of the detection unit 40, while moving the detection unit 40 downward in the Z direction. During the time the detection light LT passes through the upper surface of the pitch tilt detection unit 203, the detection light LT is blocked by the rolling tilt detection unit 202. Therefore, the control unit 50 obtains the height of at least two parts of the pitch and tilt detection unit 203 based on the timing of the detection light LT being blocked.

[0049] Next, the control unit 50 repeatedly changes the tilt of the substrate holding hand 10 in the P direction (which belongs to the pitch direction) using the tilting mechanism 30, while detecting the pitch tilt detection part 203 at at least two locations using the detection unit 40. That is, it repeatedly changes the tilt of the substrate holding hand 10 in the P direction (which belongs to the pitch direction) using the tilting mechanism 30, while obtaining the height of at least two locations of the pitch tilt detection part 203. In this way, the control unit 50 adjusts the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the P direction so that the heights of at least two locations obtained from the detection results of the pitch tilt detection part 203 by the detection unit 40 are the same.

[0050] In the P direction, when the substrate holding hand 10 and the detection fixture 200 are not parallel, different heights are obtained as the heights of at least two portions of the tilting detection portion 203. Conversely, in the P direction, when the substrate holding hand 10 and the detection fixture 200 are parallel, the same height is obtained as the height of at least two portions of the tilting detection portion 203. Therefore, if the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the R direction is adjusted so that the heights of at least two portions of the tilting detection portion 203 are the same, then the substrate holding hand 10 and the detection fixture 200 can be made parallel in the P direction.

[0051] During the detection of the pitch tilt detection unit 203, the control unit 50 may repeatedly change the tilt of the substrate holding hand 10 in the P direction to a predetermined plurality of positions using the tilting mechanism 30, while the detection unit 40 detects the pitch tilt detection unit 203. Furthermore, the control unit 50 may estimate the relative tilt between the detection fixture 200 and the substrate holding hand 10 in the P direction based on the detection results of the pitch tilt detection unit 203 performed by the detection unit 40, and change the tilt of the substrate holding hand 10 in the P direction using the tilting mechanism 30 based on the estimated relative tilt between the detection fixture 200 and the substrate holding hand 10 in the P direction. That is, the control unit 50 may repeatedly change the tilt of the substrate holding hand 10 in the P direction to the estimated tilt position using the tilting mechanism 30, while the detection unit 40 detects the pitch tilt detection unit 203.

[0052] Furthermore, for example, when the control unit 50 cannot grasp the position of the detection fixture 200 because the coordinates of the substrate holding hand 10 have not been taught, the position of the probe 203 can be specified by performing the actions shown in (A) and (B) of FIG10. However, it is also possible that when the control unit 50 can grasp the position of the detection fixture 200, the position of the probe 203 can be specified by performing the actions shown in (C) of FIG10 without performing the actions shown in (A) and (B) of FIG10.

[0053] (Teaching the coordinates of the substrate holding hand) As shown in Figures 11 and 12, the control unit 50 teaches the coordinates of the substrate holding hand 10 in the substrate mounting section 110 based on the detection results of the detection fixture 200 provided by the detection unit 40. Specifically, the control unit 50 teaches the coordinates of the substrate holding hand 10 at the substrate receiving position P1 of the substrate mounting section 110. That is, the control unit 50 teaches the coordinates of the substrate holding hand 10 when the substrate W is picked up and when the substrate W is placed in the substrate mounting section 110. Furthermore, after adjusting the relative tilt between the detection fixture 200 and the substrate holding hand 10, the control unit 50 uses the detection unit 40 to detect the detection fixture 200 to teach the coordinates of the substrate holding hand 10 in the substrate mounting section 110. Furthermore, the control unit 50 teaches the coordinates of the substrate holding hand 10 in the Z direction (vertical direction), the A direction (front-back direction), and the B direction (left-right direction) of the substrate holding hand 10 based on the detection results of the detection fixture 200 made by the detection unit 40.

[0054] <Teaching the coordinates in the vertical direction> As shown in Figure 11(A), the control unit 50 teaches the substrate holding hand 10 in the Z-direction coordinates (vertical direction) based on the detection result of the detection unit 40 for teaching the vertical coordinates of the detected part 204. Specifically, the control unit 50 uses the detection unit 40 to detect the vertical coordinate teaching part 204. This operation is the same as that shown in Figure 9(A). That is, the control unit 50 moves the detection unit 40 relative to the vertical coordinate teaching part 204 in the Z-direction while detecting the vertical coordinate teaching part 204. In this way, the control unit 50 obtains the height of the vertical coordinate teaching part 204 and teaches the substrate holding hand 10 in the Z-direction coordinates based on the obtained height of the vertical coordinate teaching part 204. For example, the control unit 50 decides to use the Z-direction coordinate obtained by adding the upper and lower coordinates to the height of the detection unit 204 as the Z-direction teaching coordinate of the substrate holding hand 10.

[0055] <Teaching the coordinates of the front-back and left-right directions> As shown in Figure 11(B) and Figure 12, the control unit 50 teaches the coordinates of the substrate holding hand 10 in the front-back and left-right directions based on the detection results of the detection unit 205, which is taught by the detection unit 40.

[0056] As shown in Figure 11(B), firstly, the control unit 50 detects the front-back, left-right coordinate teaching detection unit 205 using the detection unit 40. Specifically, the control unit 50 moves the detection unit 40 to the height of the front-back, left-right coordinate teaching detection unit 205 based on the height of the up-down coordinate teaching detection unit 204. Furthermore, the control unit 50 illuminates the detection light LT through the detection unit 40 while moving the detection unit 40 forward in the A direction. When the detection light LT passes the position of the front-back, left-right coordinate teaching detection unit 205, the detection light LT is blocked by the front-back, left-right coordinate teaching detection unit 205. Therefore, the control unit 50 specifies the position of the front-back, left-right coordinate teaching detection unit 205 based on the timing of the blocking of the detection light LT.

[0057] Next, as shown in FIG12(A), the control unit 50 obtains the height of the front-back, left-right coordinate teaching test unit 205. Specifically, the control unit 50 moves the detection unit 40 along the Z direction, which belongs to the vertical direction, while illuminating the detection light LT by the detection unit 40 and positioning it at the position of the front-back, left-right coordinate teaching test unit 205. The detection state of the detection light LT changes as the detection light LT passes over the upper surface of the front-back, left-right coordinate teaching test unit 205. Therefore, the control unit 50 obtains the height of the front-back, left-right coordinate teaching test unit 205 according to the timing of the change in the detection state of the detection light LT.

[0058] More specifically, in a first state in which the substrate holding hand 10 is arranged parallel to the detection fixture 200, the control unit 50 moves the detection unit 40 relative to the front-back left-right coordinate teaching detection unit 205 in the Z direction which belongs to the up-down direction by means of the substrate holding hand 10, and detects the front-back left-right coordinate teaching detection unit 205 by means of the detection unit 40, thereby obtaining the height of the front-back left-right coordinate teaching detection unit 205 in the first state.

[0059] Next, as shown in FIG12(B), the control unit 50 tilts the substrate holding hand 10 along the R direction, which belongs to the rolling direction, by means of the tilting mechanism 30. Specifically, the control unit 50 tilts the substrate holding hand 10 along the R direction by adjusting the tilt of the upper member 32 relative to the lower member 31 using the height position adjustment mechanisms 36 and 37. Finally, as shown in FIG12(C), in the second state in which the control unit 50 is configured to tilt the substrate holding hand 10 along the R direction by means of the tilting mechanism 30, the detection unit 40 is moved along the B direction, which belongs to the left-right direction. Specifically, the control unit 50 moves the detection unit 40 along the B direction, which belongs to the left-right direction, by rotating it in the rotation direction RO around the Z direction, which belongs to the up-down direction. Furthermore, the control unit 50 moves the detection unit 40 relative to the front-back left-right coordinate teaching detection unit 205 along the Z direction, which belongs to the up-down direction, at each position after the movement, while detecting the front-back left-right coordinate teaching detection unit 205 by means of the detection unit 40. In this way, the control unit 50 obtains the coordinates of the front-back, left-right coordinate teaching detection unit 205 so that the height of the front-back, left-right coordinate teaching detection unit 205 in the first state and the height of the front-back, left-right coordinate teaching detection unit 205 in the second state are the same coordinates. Furthermore, the control unit 50 teaches the coordinates of the substrate holding hand 10 in the front-back direction (A direction) and the left-right direction (B direction) based on the obtained coordinates of the front-back, left-right coordinate teaching detection unit 205. For example, the control unit 50 decides to use the coordinates of the front-back, left-right coordinate teaching detection unit 205 obtained by adding a predetermined amount to the coordinates of the front-back, left-right coordinate teaching detection unit 205 in the A direction as the teaching coordinate of the substrate holding hand 10 in the A direction. Furthermore, for example, the control unit 50 decides to use the coordinates of the front-back, left-right coordinate teaching detection unit 205 in the B direction as the teaching coordinate of the substrate holding hand 10 in the B direction.

[0060] In the first state where the substrate holding hand 10 is arranged parallel to the detection fixture 200, since the detection light LT is parallel to the detection fixture 200, a certain height can be obtained as the height of the front-back left-right coordinate teaching detection part 205 regardless of the position of the detection light LT in the B direction blocked by the front-back left-right coordinate teaching detection part 205. In contrast, as shown in FIG13, in the second state where the substrate holding hand 10 is arranged tilted in the R direction by the tilting mechanism 30, since the detection light LT is tilted relative to the detection fixture 200, the height of the front-back left-right coordinate teaching detection part 205 changes according to the position of the detection light LT in the B direction blocked by the front-back left-right coordinate teaching detection part 205. Specifically, when the detection light LT is blocked at the center position CE of the detection light LT, the same height as the front-back left-right coordinate teaching detection part 205 in the first state is obtained as the height of the front-back left-right coordinate teaching detection part 205. In contrast, when the detection light LT is blocked at a position other than the center position CE of the detection light LT, the height of the detection unit 205 for teaching the front, back, left and right coordinates is obtained as a height different from the height of the front, back, left and right coordinates teaching unit 205 in the first state.

[0061] Furthermore, the situation where the detection light LT is blocked at the center position CE of the detection light LT refers to the situation where the center position of the substrate holding hand 10 in the B direction is consistent with the position of the front-back and left-right coordinate teaching detection unit 205. Therefore, if the height of the front-back and left-right coordinate teaching detection unit 205 is obtained as the same as the height of the front-back and left-right coordinate teaching detection unit 205 in the first state and the height of the front-back and left-right coordinate teaching detection unit 205 in the second state, then the coordinates of the front-back and left-right coordinate teaching detection unit 205 can be obtained in a state where the center position of the substrate holding hand 10 in the B direction is consistent with the position of the front-back and left-right coordinate teaching detection unit 205. That is, the correct coordinates of the front-back and left-right coordinate teaching detection unit 205 can be obtained.

[0062] [Effects of this embodiment] The substrate transport robot 100 has a control unit 50, which teaches the coordinates of the substrate holding hand 10 on the substrate mounting section 110 based on the detection results of the detection fixture 200 provided by the detection unit 40. Therefore, based on the detection results of the detection fixture 200, the control unit 50 can automatically teach the coordinates of the substrate holding hand 10 on the substrate mounting section 110. Furthermore, since the coordinates of the substrate holding hand 10 on the substrate mounting section 110 can be taught based on the detection results of the detection fixture 200 located at the actual receiving position of the substrate W, compared to the case where the coordinates of the substrate holding hand 10 are taught based on the detection results of the substrate mounting section 110 obtained at a position separate from the receiving position of the substrate W, the coordinates of the substrate holding hand 10 on the substrate mounting section 110 can be taught with high accuracy. These results enable the automatic and accurate instruction of the coordinates of the substrate holding hand 10 in the substrate mounting section 110.

[0063] The control unit 50 teaches the coordinates of the substrate holder 10 in the vertical direction, the front-back direction, and the left-right direction based on the detection results of the detection fixture 200 provided by the detection unit 40. This enables the automatic and accurate teaching of the coordinates of the substrate holder 10 in these directions.

[0064] The inspection fixture 200 includes a thin plate-shaped inspection fixture body 201 that mimics the substrate W. The inspection fixture body 201 has a coordinate teaching test section 204 at its front end for teaching the coordinates of the substrate holding hand 10 in the vertical direction. The control unit 50 teaches the coordinates of the substrate holding hand 10 in the vertical direction based on the detection results of the coordinate teaching test section 204 provided by the detection unit 40. In this way, since the coordinate teaching test section 204 is used to teach the coordinates of the substrate holding hand 10 in the vertical direction, the coordinates of the substrate holding hand 10 in the vertical direction can be taught easily and with good accuracy.

[0065] The control unit 50 moves the detection unit 40 relative to the upper and lower coordinate teaching test unit 204 in the vertical direction while detecting the upper and lower coordinate teaching test unit 204 to obtain the height of the upper and lower coordinate teaching test unit 204, and teaches the upper and lower coordinates of the substrate holding hand 10 based on the obtained height of the upper and lower coordinate teaching test unit 204. In this way, since the upper and lower coordinates of the substrate holding hand 10 can be easily obtained based on the height of the upper and lower coordinate teaching test unit 204, the upper and lower coordinates of the substrate holding hand 10 can be taught more easily and with good accuracy.

[0066] The inspection fixture 200 includes a thin plate-shaped inspection fixture body 201 that mimics the substrate W, and a front-back and left-right coordinate teaching inspection unit 205 disposed on the inspection fixture body 201 for teaching the front-back and left-right coordinates of the substrate holding hand 10. The control unit 50 teaches the front-back and up-down coordinates of the substrate holding hand 10 based on the detection results of the front-back and left-right coordinate teaching inspection unit 205 performed by the detection unit 40. In this way, since the front-back and left-right coordinate teaching inspection unit 205 is used to teach the front-back and left-right coordinates of the substrate holding hand 10, the front-back and left-right coordinates of the substrate holding hand 10 can be easily taught with good accuracy.

[0067] The front-back, left-right coordinate teaching test part 205 is pin-shaped and extends in the vertical direction. Furthermore, it is equipped with a tilting mechanism 30 for adjusting the tilt of the substrate holding hand 10. In a first state in which the substrate holding hand 10 is arranged parallel to the test fixture 200, the control unit 50 moves the detection unit 40 relative to the front-back, left-right coordinate teaching test part 205 in the vertical direction and detects the front-back, left-right coordinate teaching test part 205 by the detection unit 40. In this way, the height of the front-back, left-right coordinate teaching test part 205 in the first state is obtained. In a second state in which the substrate holding hand 10 is tilted in the rolling direction around the front-back direction by the tilting mechanism 30, the control unit 50 obtains the height of the front-back, left-right coordinate teaching test part 205. In the current state, the detection unit 40 moves in the left-right direction. At each position after the movement, the detection unit 40 moves in the up-down direction relative to the front-back, left-right coordinate teaching test unit 205 while detecting the front-back, left-right coordinate teaching test unit 205. This obtains the coordinates of the front-back, left-right coordinate teaching test unit 205, making the height of the front-back, left-right coordinate teaching test unit 205 in the first state the same as the height of the front-back, left-right coordinate teaching test unit 205 in the second state. Based on the obtained coordinates of the front-back, left-right coordinate teaching test unit 205, the coordinates of the substrate holding hand 10 in the front-back and left-right directions are taught. Therefore, since the coordinates of the front-back and left-right directions of the substrate holding hand 10 can be easily obtained based on the coordinates of the front-back, left-right coordinate teaching test unit 205, the coordinates of the front-back and left-right directions of the substrate holding hand 10 can be taught more easily and with good accuracy.

[0068] The tilting mechanism 30 includes: a lower member 31; an upper member 32 disposed opposite to the lower member 31 in the vertical direction; three spherical sliding bearings 33, 34, and 35 disposed between the lower member 31 and the upper member 32 and arranged at different locations when viewed from the vertical direction; and two height position adjustment mechanisms 36 and 37 disposed respectively corresponding to two of the three spherical sliding bearings 33, 34, and 35. The control unit 50 adjusts the tilt of the upper member 32 relative to the lower member 31 by means of the height position adjustment mechanisms 36 and 37, thereby tilting the substrate holding hand 10 in the rolling direction. In this way, by using the three spherical sliding bearings 33, 34, and 35 and the two height position adjustment mechanisms 36 and 37, the lower member 31 and the upper member 32 are not offset relative to each other, and the substrate holding hand 10 can be tilted in the rolling direction.

[0069] The detection unit 40 also serves as the detection unit for the detection substrate W. Therefore, since the detection fixture 200 can be detected using the detection unit 40 of the detection substrate W, there is no need to provide a dedicated detection unit 40. As a result, the complexity of the substrate transport robot 100's structure can be reduced.

[0070] The detection unit 40 detects the detection fixture 200 by irradiating the detection light LT. Since the detection unit 40, which has a relatively simple structure, can detect the detection fixture 200 by irradiating the detection light LT, it is possible to suppress the complexity of the structure of the substrate transport robot 100.

[0071] The substrate holding hand 10 has a plurality of blade members 11 in a double-forked shape with two front ends. The detection unit 40 includes an irradiation unit 41 for irradiating detection light LT and a light-receiving unit 42 for detecting the detection light LT irradiated by the irradiation unit 41. The irradiation unit 41 and the light-receiving unit 42 are each disposed at one of the two front ends of the blade member 11. In this way, by using the irradiation unit 41 and the light-receiving unit 42, which are each disposed at one of the two front ends of the blade member 11, the detection fixture 200 can be easily detected.

[0072] After the control unit 50 adjusts the relative tilt of the inspection fixture 200 and the substrate holding hand 10, the inspection unit 40 inspects the inspection fixture 200 and teaches the coordinates of the substrate holding hand 10 on the substrate mounting section 110. In this way, by adjusting the relative tilt of the inspection fixture 200 and the substrate holding hand 10, the coordinates of the substrate holding hand 10 on the substrate mounting section 110 can be taught with better accuracy.

[0073] [Modifications] Furthermore, it should be understood that all points of the embodiments disclosed herein are illustrative rather than limiting. The scope of this invention is indicated by the claims and not by the description of the embodiments described above, and includes all modifications (variations) within the same meaning and scope as the claims.

[0074] For example, the above embodiments illustrate an example of a substrate transport robot configured in a heat treatment apparatus; however, the present invention discloses that this is not the case. The present invention also discloses that a substrate transport robot can be configured in a processing apparatus for etching or other processing of substrates, other than heat treatment.

[0075] Furthermore, the above embodiments illustrate examples where the substrate mounting portion is a FOUP and a crystal boat; however, the present invention is not limited thereto. The present invention may also disclose substrate mounting portions other than FOUP and crystal boats.

[0076] Furthermore, the above embodiments illustrate an example where the substrate transport robot has a horizontal movement mechanism, a rotation mechanism, and a lifting mechanism as its drive mechanism; however, the present invention is not limited thereto. The present invention also discloses a substrate transport robot that has a robotic arm as its drive mechanism. In this case, the robotic arm can be a horizontal multi-joint type or a vertical multi-joint type.

[0077] Furthermore, the above embodiments illustrate an example where the detection unit is a mapping sensor; however, the present invention is not limited thereto. The present invention may also include other mapping sensors besides load sensors and cameras.

[0078] Furthermore, the above embodiments illustrate examples of teaching the coordinates of the substrate holding hand in the vertical direction, the front-back direction, and the left-right direction; however, the present invention is not limited thereto. The present invention may also teach at least one of the coordinates of the substrate holding hand in the vertical direction, the front-back direction, and the left-right direction.

[0079] Furthermore, the above embodiments illustrate an example where the detection unit also functions as a detection substrate; however, the present invention is not limited thereto. The present invention also discloses a detection unit specifically for detecting a detection fixture.

[0080] Furthermore, the above embodiments illustrate an example where the substrate holding hand includes a plurality of blade members; however, the present invention is not limited thereto. The present invention also discloses a substrate holding hand that includes only one blade member.

[0081] Furthermore, the above embodiments illustrate an example where the tilt adjustment mechanism has three spherical sliding bearings and two height position adjustment mechanisms; however, the present invention is not limited thereto. The present invention also discloses tilt adjustment mechanisms that do not have height position adjustment mechanisms. For example, the tilt adjustment mechanism may adjust tilt by configuring a rotating mechanism.

[0082] Furthermore, the above embodiments illustrate an example where the tilt mechanism, as a tilt adjustment mechanism, indirectly adjusts the tilt of the substrate holding hand; however, the present invention is not limited to this. The present invention also discloses that the tilt mechanism can directly adjust the tilt of the substrate holding hand. That is, the tilt adjustment mechanism can also be directly connected to the substrate holding hand.

[0083] Furthermore, the above embodiment illustrates an example where, after adjusting the relative tilt between the test fixture (which serves as a teaching test fixture) and the substrate holding hand, the test fixture is tested by the test unit to teach the coordinates of the substrate holding hand on the substrate mounting section. However, the present invention is not limited to this. The present invention also discloses that, when the relative tilt between the teaching test fixture and the substrate holding hand is not a problem, the relative tilt between the teaching test fixture and the substrate holding hand does not need to be adjusted before the coordinates of the substrate holding hand on the substrate mounting section are taught by the test unit. Furthermore, in order to adjust the relative tilt between the teaching test fixture and the substrate holding hand, the teaching test fixture may not be used. In this case, a test fixture other than the teaching test fixture may be used, and the relative tilt between the teaching test fixture and the substrate holding hand may be adjusted by other means such as indirectly adjusting the relative tilt between the teaching test fixture and the substrate holding hand.

[0084] Furthermore, the above embodiments illustrate an example where the test fixture, as a teaching test fixture, includes a rolling tilt detection portion and a pitch tilt detection portion; however, the present invention discloses that it is not limited thereto. The present invention also discloses a tilt test fixture that does not include a rolling tilt detection portion and a pitch tilt detection portion. The modified example shown in FIG14 is a test fixture 300 as a teaching test fixture, which includes a test fixture body 201, a vertical coordinate teaching test portion 204, and a front-back and left-right coordinate teaching test portion 205. On the other hand, the test fixture 300 does not include a rolling tilt detection portion and a pitch tilt detection portion.

[0085] The functions of the components disclosed in this specification can be executed using a general-purpose processor, a special-purpose processor, an integrated circuit, an ASIC (Application Specific Integrated Circuits), conventional circuits, and / or combinations of the above elements, configured or programmed in a manner that performs the disclosed functions. Since a processor includes transistors and other circuits, a processing circuit can be considered a circuit. In this invention, a circuit, unit, or means is hardware that performs the listed functions, or programmed hardware that performs the listed functions. Hardware can be the hardware disclosed in this specification, or a program that performs the listed functions, or other known hardware configured as such. When the hardware is conceived as a processor of a circuit, the circuit, means, or unit is a combination of hardware and software, with the software used in the configuration of the hardware and / or processor.

[0086] [State] The above implementation forms are specific examples of the following states.

[0087] (Example 1) A substrate transport robot comprising: a hand for holding a substrate; a detection unit disposed on the hand and a teaching detection fixture for detecting the substrate in a state simulating that it is placed on a substrate placement section; and a control unit for teaching the coordinates of the hand on the substrate placement section based on the detection result of the teaching detection fixture performed by the detection unit.

[0088] (Example 2) The substrate transport robot as described in Example 1, wherein the control unit teaches at least one of the coordinates of the hand in the up-down direction, the coordinates of the hand in the front-back direction, and the coordinates of the hand in the left-right direction based on the detection result of the teaching detection fixture made by the detection unit.

[0089] (Example 3) The substrate transport robot as described in Example 2, wherein the aforementioned teaching inspection fixture includes a thin plate-shaped teaching inspection fixture body that mimics the aforementioned substrate, the aforementioned teaching inspection fixture body has an upper and lower coordinate teaching inspection part at the front end for teaching the aforementioned upper and lower coordinates of the hand, and the aforementioned control unit teaches the aforementioned upper and lower coordinates of the hand based on the detection result of the aforementioned upper and lower coordinate teaching inspection part performed by the aforementioned detection unit.

[0090] (Example 4) The substrate transport robot as described in Example 3, wherein the control unit moves the detection unit relative to the detection unit for teaching the upper and lower coordinates in the upper and lower direction while detecting the detection unit for teaching the upper and lower coordinates, thereby obtaining the height of the detection unit for teaching the upper and lower coordinates, and teaching the coordinates of the hand in the upper and lower direction based on the obtained height of the detection unit for teaching the upper and lower coordinates.

[0091] (Example 5) The substrate transport robot as described in any one of Examples 2 to 4, wherein the aforementioned teaching inspection fixture includes: a thin plate-shaped teaching inspection fixture body that imitates the aforementioned substrate; and a front-back and left-right coordinate teaching inspection unit disposed on the aforementioned teaching inspection fixture body and used to teach the coordinates of the aforementioned hand in the front-back direction and left-right direction. The aforementioned control unit teaches the coordinates of the aforementioned hand in the front-back direction and left-right direction based on the detection results of the aforementioned front-back and left-right coordinate teaching inspection unit performed by the aforementioned detection unit.

[0092] (Example 6) The substrate transport robot as described in Example 5, wherein the aforementioned front-back, left-right coordinate teaching and detection part is pin-shaped and extends in the vertical direction, the substrate transport robot has a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the aforementioned hand, and the aforementioned control unit: in a first state in which the aforementioned hand is arranged parallel to the aforementioned teaching and detection fixture, while moving the aforementioned detection part in the vertical direction relative to the aforementioned front-back, left-right coordinate teaching and detection part, the aforementioned detection part detects the aforementioned front-back, left-right coordinate teaching and detection part, thereby obtaining the height of the aforementioned front-back, left-right coordinate teaching and detection part in the aforementioned first state. In the second state, where the hand is tilted along the rolling direction around the aforementioned front-back direction by means of the aforementioned tilt adjustment mechanism, the aforementioned detection unit is moved along the aforementioned left-right direction. At each position after the movement, the aforementioned detection unit moves in the up-down direction relative to the aforementioned front-back left-right coordinate teaching detection unit while detecting the aforementioned front-back left-right coordinate teaching detection unit. In this way, the coordinates of the aforementioned front-back left-right coordinate teaching detection unit are obtained as coordinates so that the height of the aforementioned front-back left-right coordinate teaching detection unit in the aforementioned first state is the same as the height of the aforementioned front-back left-right coordinate teaching detection unit in the aforementioned second state. And based on the obtained coordinates of the aforementioned front-back left-right coordinate teaching detection unit, the coordinates of the aforementioned hand in the front-back direction and the left-right direction are taught.

[0093] (Example 7) The substrate transport robot as described in Example 6, wherein the aforementioned tilting mechanism includes: a lower member; an upper member, which is arranged opposite to the aforementioned lower member in the vertical direction; three spherical sliding bearings, which are arranged between the aforementioned lower member and the aforementioned upper member and are positioned at different locations when viewed from the aforementioned vertical direction; and two height position adjustment mechanisms, which are each arranged corresponding to two of the three spherical sliding bearings. The aforementioned control unit adjusts the tilt of the aforementioned upper member relative to the aforementioned lower member by means of the aforementioned height position adjustment mechanisms, thereby tilting the aforementioned hand along the aforementioned rolling direction.

[0094] (Pattern 8) A substrate transport robot as described in any one of Patterns 1 to 7, wherein the aforementioned detection unit also serves as a detection unit for detecting the aforementioned substrate.

[0095] (Example 9) The substrate transport robot as described in any one of Examples 1 to 8, wherein the aforementioned detection unit detects the aforementioned teaching detection fixture by irradiating detection light.

[0096] (Example 10) The substrate transport robot as described in Example 9, wherein the aforementioned hand has a double-forked blade member with a front end divided into two, the aforementioned detection unit includes an irradiation unit for irradiating the aforementioned detection light and a light-receiving unit for detecting the aforementioned detection light irradiated by the aforementioned irradiation unit, the aforementioned irradiation unit and the aforementioned light-receiving unit are respectively disposed at each of the two front ends of the aforementioned blade member.

[0097] (Example 11) The substrate transport robot described in any one of Examples 1 to 10, wherein after the control unit adjusts the relative tilt of the teaching inspection fixture and the hand, the detection unit detects the teaching inspection fixture and teaches the coordinates of the hand in the substrate placement section.

[0098] (Example 12) A control method for a substrate transport robot, the substrate transport robot having a hand for holding a substrate, the control method comprising: detecting a teaching detection fixture for the substrate in a state that mimics being placed on a substrate mounting section; and teaching the coordinates of the hand on the substrate mounting section based on the detection result of the teaching detection fixture. [Simplified Explanation of the Diagram]

[0010] Figure 1 is a perspective view showing the overall structure of a substrate transport robot according to one embodiment. Figure 2 is a perspective view showing the tilting mechanism according to one embodiment. Figure 3 is a cross-sectional view along the vertical direction of the tilting mechanism according to one embodiment. Figure 4 is a perspective view illustrating the detection unit of the substrate holding hand according to one embodiment. Figure 5 is a block diagram showing the controllable structure of the substrate transport robot according to one embodiment. Figure 6 is a schematic diagram illustrating the substrate receiving position during substrate transport operations performed by the substrate transport robot according to one embodiment. Figure 7 is a perspective view illustrating the detection of the detection fixture, which is a detection unit according to one embodiment. Figure 8 is a perspective view showing the detection fixture according to one embodiment. Figure 9 is a schematic diagram illustrating the adjustment of the relative tilt of the detection fixture and the substrate holding hand in the rotation direction according to one embodiment. Figure 10 is a schematic diagram illustrating the adjustment of the relative tilt of the detection fixture and the substrate holding hand in the pitch direction according to an embodiment. Figure 11 is a schematic diagram (1) illustrating the coordinates of the substrate holding hand according to an embodiment. Figure 12 is a schematic diagram (2) illustrating the coordinates of the substrate holding hand according to an embodiment. Figure 13 is a schematic diagram (3) illustrating the coordinates of the substrate holding hand according to an embodiment. Figure 14 is a perspective view showing the detection fixture according to a modified example.

Claims

1. A substrate transport robot comprising: a hand for holding a substrate; a detection unit disposed on the hand and a teaching detection fixture for detecting the substrate in a state simulating a substrate placed on a substrate mounting section; and a control unit for teaching at least one of the coordinates of the hand in the up-down direction, the coordinates of the hand in the front-back direction, and the coordinates of the hand in the left-right direction, based on the detection result of the teaching detection fixture performed by the detection unit, thereby teaching the coordinates of the hand in front of the substrate mounting section.

2. A substrate transport robot comprising: a hand for holding a substrate; a detection unit disposed on the hand and a teaching detection fixture for detecting the substrate in a state simulating that it is placed on a substrate placement section; a tilt adjustment mechanism for directly or indirectly adjusting the tilt of the hand; and a control unit for teaching the coordinates of the hand on the substrate placement section based on the detection result of the teaching detection fixture disposed on the hand by the detection unit after the tilt adjustment mechanism has adjusted the tilt state to a different tilt state.

3. The substrate transport robot as described in claim 1 or 2, wherein, The aforementioned teaching test fixture includes a thin plate-shaped teaching test fixture body that mimics the aforementioned substrate. The aforementioned teaching test fixture body has a vertical coordinate teaching test part at its front end for teaching the aforementioned vertical coordinates of the hand. The aforementioned control unit teaches the aforementioned vertical coordinates of the hand based on the detection result of the aforementioned vertical coordinate teaching test part performed by the aforementioned detection unit.

4. The substrate transport robot as described in claim 3, wherein, The aforementioned control unit moves the aforementioned detection unit relative to the aforementioned upper and lower coordinate teaching test unit in the aforementioned vertical direction while detecting the aforementioned upper and lower coordinate teaching test unit by the aforementioned detection unit, thereby obtaining the height of the aforementioned upper and lower coordinate teaching test unit, and teaching the aforementioned hand's upper and lower coordinates based on the obtained height of the aforementioned upper and lower coordinate teaching test unit.

5. The substrate transport robot as described in claim 1, wherein, The aforementioned teaching test fixture includes: a thin plate-shaped teaching test fixture body that mimics the aforementioned substrate; and a front-back and left-right coordinate teaching test unit disposed on the aforementioned teaching test fixture body and used to teach the aforementioned hand's front-back and left-right coordinates. The aforementioned control unit teaches the aforementioned hand's front-back and left-right coordinates based on the detection results of the aforementioned front-back and left-right coordinate teaching test unit performed by the aforementioned detection unit.

6. The substrate transport robot as described in claim 2, wherein, The aforementioned teaching test fixture includes: a thin plate-shaped teaching test fixture body that mimics the aforementioned substrate; and a front-back and left-right coordinate teaching test unit disposed on the aforementioned teaching test fixture body and used to teach the aforementioned hand's front-back and left-right coordinates. The aforementioned control unit teaches the aforementioned hand's front-back and left-right coordinates based on the detection results of the aforementioned front-back and left-right coordinate teaching test unit performed by the aforementioned detection unit.

7. The substrate transport robot as described in claim 5, wherein, The aforementioned front-back, left-right coordinate teaching and testing part is pin-shaped and extends vertically. The substrate conveying robot has a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the aforementioned hand. The aforementioned control unit, in a first state in which the aforementioned hand is arranged parallel to the aforementioned teaching and testing fixture, moves the aforementioned testing part vertically relative to the aforementioned front-back, left-right coordinate teaching and testing part while detecting the aforementioned front-back, left-right coordinate teaching and testing part by the aforementioned testing part, thereby obtaining the height of the aforementioned front-back, left-right coordinate teaching and testing part in the aforementioned first state. In the second state, where the hand is tilted along the rolling direction around the aforementioned front-back direction by means of the aforementioned tilt adjustment mechanism, the aforementioned detection unit is moved along the aforementioned left-right direction. At each position after the movement, the aforementioned detection unit moves in the up-down direction relative to the aforementioned front-back left-right coordinate teaching detection unit while detecting the aforementioned front-back left-right coordinate teaching detection unit. In this way, the coordinates of the aforementioned front-back left-right coordinate teaching detection unit are obtained as coordinates so that the height of the aforementioned front-back left-right coordinate teaching detection unit in the aforementioned first state is the same as the height of the aforementioned front-back left-right coordinate teaching detection unit in the aforementioned second state. And based on the obtained coordinates of the aforementioned front-back left-right coordinate teaching detection unit, the coordinates of the aforementioned hand in the front-back direction and left-right direction are taught.

8. The substrate transport robot as described in claim 6, wherein, The aforementioned front-back, left-right coordinate teaching and testing unit is pin-shaped and extends vertically. The aforementioned control unit, in a first state where the aforementioned hand is arranged parallel to the aforementioned teaching and testing fixture, moves the aforementioned testing unit relative to the aforementioned front-back, left-right coordinate teaching and testing unit in the vertical direction while detecting the aforementioned front-back, left-right coordinate teaching and testing unit, thereby obtaining the height of the aforementioned front-back, left-right coordinate teaching and testing unit in the aforementioned first state. In the second state, where the hand is tilted along the rolling direction around the aforementioned front-back direction by means of the aforementioned tilt adjustment mechanism, the aforementioned detection unit is moved along the aforementioned left-right direction. At each position after the movement, the aforementioned detection unit moves in the up-down direction relative to the aforementioned front-back left-right coordinate teaching detection unit while detecting the aforementioned front-back left-right coordinate teaching detection unit. In this way, the coordinates of the aforementioned front-back left-right coordinate teaching detection unit are obtained as coordinates so that the height of the aforementioned front-back left-right coordinate teaching detection unit in the aforementioned first state is the same as the height of the aforementioned front-back left-right coordinate teaching detection unit in the aforementioned second state. And based on the obtained coordinates of the aforementioned front-back left-right coordinate teaching detection unit, the coordinates of the aforementioned hand in the front-back direction and left-right direction are taught.

9. The substrate transport robot as described in claim 7 or 8, wherein, The aforementioned tilt adjustment mechanism includes: a lower member; an upper member, which is arranged opposite to the lower member in the vertical direction; three spherical sliding bearings, which are disposed between the lower member and the upper member and are arranged at different positions when viewed from the vertical direction; and two height position adjustment mechanisms, which are each arranged corresponding to two of the three spherical sliding bearings. The control unit adjusts the tilt of the upper member relative to the lower member by means of the aforementioned height position adjustment mechanisms, thereby tilting the hand along the aforementioned rolling direction.

10. The substrate transport robot as described in claim 1 or 2, wherein, The aforementioned testing unit also serves as a testing unit for the aforementioned substrate.

11. The substrate transport robot as described in claim 1 or 2, wherein, The aforementioned testing unit uses testing light to test the aforementioned instructional testing fixture.

12. The substrate transport robot as described in claim 11, wherein, The aforementioned hand has a double-forked blade member with two front ends. The aforementioned detection unit includes an irradiation unit that irradiates the aforementioned detection light and a light-receiving unit that detects the aforementioned detection light irradiated by the aforementioned irradiation unit. The aforementioned irradiation unit and the aforementioned light-receiving unit are respectively disposed at the two front ends of the aforementioned blade member.

13. The substrate transport robot as described in claim 1, wherein, After the control unit adjusts the relative tilt of the teaching test fixture and the hand, the testing unit tests the teaching test fixture and teaches the coordinates of the hand on the substrate mounting section.

14. A control method for a substrate transport robot, the substrate transport robot having a hand for holding a substrate, the control method comprising the steps of: detecting a teaching detection fixture that mimics the state of the substrate being placed on a substrate mounting section; and teaching at least one of the coordinates of the hand in the up-down direction, the coordinates of the hand in the front-back direction, and the coordinates of the hand in the left-right direction based on the detection result of the teaching detection fixture, thereby teaching the coordinates of the hand in front of the substrate mounting section.

15. A control method for a substrate transport robot, the substrate transport robot having a hand for holding a substrate, the control method comprising the steps of: detecting a teaching detection fixture for the substrate, which mimics a state of being placed on a substrate placement section, by means of a detection unit disposed on the aforementioned hand; and teaching the coordinates of the aforementioned hand on the substrate placement section based on the detection result of the teaching detection fixture disposed on the aforementioned hand in a different tilt state.

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