Substrate transport robot

Abstract

The substrate transport robot of the present invention comprises: a manipulator for holding the substrate; a manipulator rotating part for rotating the manipulator about a rotation axis extending in the horizontal direction; a horizontal moving part for moving the manipulator in the horizontal direction; and a support part connected to the horizontal moving part, wherein the rotation axis supporting the manipulator as the manipulator rotating part is arranged at a position at a predetermined distance from the horizontal moving part.

Description

[Technical Field]

[0001] This invention relates to a substrate transport robot. [Previous Technology]

[0002] To date, substrate handling robots have been disclosed. The substrate handling robot disclosed in WO2022 / 049789 includes a substrate holding manipulator for holding the substrate and a robotic arm for moving the substrate holding manipulator. This robotic arm is a horizontal multi-joint robotic arm, comprising a first robotic arm and a second robotic arm that rotate in a horizontal plane. The substrate holding manipulator is related to the rotation of the robotic arm in the horizontal plane.

[0003] Here, as described in WO2022 / 049789 above, the substrate transport robot may have a manipulator that rotates around a rotation axis extending horizontally. Since the substrate transport robot described in WO2022 / 049789 has a horizontally articulated manipulator that allows the manipulator to move in the horizontal plane, in order for the manipulator to rotate around the rotation axis extending horizontally, the manipulator must be horizontally offset from the manipulator to avoid physical interference between them. That is, in the folded state of the manipulator, it is difficult to make the manipulator rotate around the rotation axis extending horizontally; therefore, the manipulator must be configured so that it does not overlap with the manipulator to rotate around the rotation axis extending horizontally. Thus, in order for the manipulator to rotate around the rotation axis extending horizontally, there must be space where the manipulator and manipulator can be configured to not overlap, thereby increasing the space occupied by the substrate transport robot. Therefore, in a substrate transport robot with a horizontal moving part, it is desirable to minimize the space occupied by the substrate transport robot so that the robot arm can rotate around a rotation axis extending in the horizontal direction. [Summary of the Invention]

[0004] The present invention was developed to solve the problems mentioned above. One object is to provide a substrate transport robot that can reduce the space occupied by the substrate transport robot when the robot arm rotates around a rotation axis extending in the horizontal direction.

[0005] One aspect of the substrate transport robot of the present invention includes: a manipulator that holds the substrate; a manipulator rotating part that rotates the manipulator about a rotation axis extending in the horizontal direction; a horizontal moving part that moves the manipulator in the horizontal direction; and a support part connected to the horizontal moving part, and whose rotation axis supporting the manipulator as the manipulator rotating part is positioned at a predetermined distance from the horizontal moving part. Here, the rotation axis extending in the horizontal direction refers not only to a rotation axis extending in the horizontal direction, but also includes a broader concept of a rotation axis slightly inclined relative to the horizontal direction. For example, "inclination relative to the horizontal direction" can include inclination caused by the weight of the substrate, inclination caused by the weight of the manipulator itself, inclination of the substrate transport robot itself, or inclination of the device for mounting the substrate transport robot. Furthermore, the term "horizontal direction" includes a broader concept such as a direction parallel to the mounting surface of the substrate transport robot, a direction parallel to the mounting surface of the substrate mounting part for mounting the substrate, or a direction parallel to a horizontal plane perpendicular to the direction of gravity (i.e., the vertical direction).

[0006] As described above, one aspect of the substrate transport robot of the present invention includes a support section connected to the horizontal moving part and positioned at a predetermined distance from the horizontal moving part, with the rotation axis of the manipulator rotating part arranged around it. Because the manipulator is supported by the support section and its rotation axis is positioned at a predetermined distance from the horizontal moving part, physical interference between the manipulator and the horizontal moving part can be suppressed when the manipulator needs to rotate around the rotation axis extending in the horizontal direction. Therefore, it is not necessary to horizontally offset the manipulator relative to the horizontal moving part to allow it to rotate, thus suppressing the enlargement of the space occupied by the substrate transport robot. As a result, for a substrate transport robot with a horizontal moving part, the space occupied by the substrate transport robot can be reduced when the manipulator needs to rotate around the rotation axis extending in the horizontal direction.

[0007] According to the present invention, in a substrate transport robot having a horizontal moving part, when the manipulator is to rotate around a rotation axis extending in the horizontal direction, the space occupied by the substrate transport robot can be miniaturized.

Implementation Method

[0009] [First Embodiment] Hereinafter, the first embodiment of the present invention will be embodied in the description of the drawings.

[0010] The substrate transport robot 100 of the first embodiment will be described with reference to Figures 1 to 5.

[0011] (Substrate Processing System) As shown in FIG1, a substrate transfer robot 100 is disposed in a substrate processing system 102. The substrate processing system 102 includes the substrate transfer robot 100 and a processing device 103. The substrate transfer robot 100 performs both loading and unloading operations of the substrate 101 into and out of the substrate mounting section 104 of the processing device 103. The processing device 103 includes a plurality of substrate mounting sections 104. The substrate transfer robot 100 includes a robotic arm 11 and a robotic arm 12. The robotic arm 11 and the robotic arm 12 are arranged separately along the vertical direction shown in the Z direction, and respectively hold the substrate 101. The substrate 101 is, for example, a wafer used to manufacture semiconductors. The substrate 101 has a circular plate shape. The substrate 101 includes, for example, silicon wafers, gallium nitride wafers, sapphire wafers, etc. The processing device 103 is, for example, an apparatus for performing processes such as grinding, etching, or heat treatment on the substrate 101. Here, robotic arm 11 and robotic arm 12 are examples of the first robotic arm and the second robotic arm, respectively.

[0012] As shown in FIG2, the substrate transport robot 100 includes a robotic arm rotating section 21 and a robotic arm rotating section 22, a support section 31 and a support section 32, a horizontal moving section 41 and a horizontal moving section 42, a horizontal rotation mechanism section 50, a lifting section 60, and a control section 70. Here, the support section 31 and the support section 32 are examples of a first support section and a second support section, respectively, and the horizontal moving section 41 and the horizontal moving section 42 are examples of a first horizontal moving section and a second horizontal moving section, respectively.

[0013] As shown in FIG3, the robot arm 11 has a bifurcated shape with a forked front end. The robot arm 11 has a holding mechanism 11a. The holding mechanism 11a moves along the direction from the base end of the robot arm 11 toward the front end, thereby pressing against the periphery of the substrate 101 held by the robot arm 11. The robot arm 11 has claws 11b respectively disposed at the two front ends of the fork. As the holding mechanism 11a moves from the base end of the robot arm 11 toward the front end, the periphery of the substrate 101 is held by the holding mechanism 11a and the two claws 11b. That is, the robot arm 11 is an active substrate holding robot arm that fixes and holds the substrate 101 by clamping the edge. FIG3 only shows the robot arm 11, but the structure of the robot arm 12 is the same as that of the robot arm 11. As shown in FIG2, the robot arm 12, like the robot arm 11, has a holding mechanism 12a that moves along the direction from the base end of the robot arm 12 toward the front end. Holding mechanism 11a and holding mechanism 12a, for example, have a cylinder as a drive source. Robotic arm 11 and robotic arm 12 each hold a substrate 101.

[0014] The robotic arm rotating parts 21 and 22 rotate the robotic arms 11 and 12 respectively around a rotation axis extending in the horizontal direction. The robotic arm rotating parts 21 and 22 rotate the robotic arms 11 and 12 respectively around a flipping axis that causes the held substrate 101 to tilt and deflect. The robotic arm rotating parts 21 and 22 use the horizontal direction as the rotation axis, causing the robotic arms 11 and 12 to rotate relative to the horizontal plane. Specifically, the robotic arm rotating part 21 is connected to the base end of the robotic arm 11, and uses the direction from the base end of the robotic arm 11 towards the front end as the rotation axis, causing the robotic arm 11 to rotate. The robotic arm rotating part 22 is connected to the base end of the robotic arm 12, and uses the direction from the base end of the robotic arm 12 towards the front end as the rotation axis, causing the robotic arm 12 to rotate. In detail, the rotating parts 21 and 22 of the robotic arms are oriented with a rotation axis passing through the center of the substrate 101 and extending from the base to the front end of the robotic arms 11 and 12, respectively, causing the robotic arms 11 and 12 to rotate. By rotating the robotic arms 11 and 12, the substrate 101 held by the robotic arms 11 and 12 is flipped, allowing the back and front surfaces to be interchanged. For example, as shown in FIG3, the rotating part 21 can rotate the robotic arm 11 180 degrees about the rotation axis A10. Similarly, the rotating part 22 can rotate the robotic arm 12 180 degrees.

[0015] As shown in FIG. 2, the robot arm rotating part 21 has a rotating mechanism part 21a for rotating the robot arm 11. Similarly, the robot arm rotating part 22 has a rotating mechanism part 22a for rotating the robot arm 12. The rotating mechanism parts 21a and 22a have a drive source for rotating the robot arm 11 and the robot arm 12. The rotating mechanism parts 21a and 22a have, for example, a servo motor as a drive source.

[0016] Additionally, as shown in FIG3, the rotating part 21 of the robot arm includes a sealing member 21b that seals the rotating mechanism part 21a to the outside. The sealing member 21b has an annular shape for sealing any gaps in the rotating mechanism part 21a to the outside. The sealing member 21b is, for example, an elastic member such as flexible rubber. In one example, the sealing member 21b includes an O-ring. Only the rotating part 21 of the robot arm is shown in FIG3, but the rotating part 22 of the robot arm also includes a sealing member that seals the rotating mechanism part 22a to the outside, similar to the rotating part 21 of the robot arm.

[0017] As shown in FIG. 4, support parts 31 and 32 support the robot arm 11 and robot arm 12 at positions separated by the vertical direction shown in the Z direction, respectively, on the horizontal moving parts 41 and 42. Specifically, support part 31 is connected to the horizontal moving part 41 and supports the robot arm 11 at a position separated from the horizontal moving part 41 in the Z1 direction. Support part 31 supports the robot arm 11 by supporting the robot arm rotating part 21. Support part 32 is connected to the horizontal moving part 42 and supports the robot arm 12 at a position separated from the horizontal moving part 42 in the Z2 direction. Support part 32 supports the robot arm 12 by supporting the robot arm rotating part 22. The detailed configuration of support parts 31 and 32 will be explained later.

[0018] As shown in FIG. 2, the horizontal moving part 41 and the horizontal moving part 42 respectively include a linear moving mechanism 41a and a linear moving mechanism 42a for moving the robot arm 11 and the robot arm 12 linearly in the horizontal direction. The linear moving mechanism 41a and the linear moving mechanism 42a each include, for example, a servo motor as a drive source. In addition, the linear moving mechanism 41a and the linear moving mechanism 42a each include, for example, a timing belt for transmitting the driving force of the motor and a linear slide rail as a guide for linear movement.

[0019] As shown in FIG. 4, the horizontal moving part 41 moves the support part 31 supporting the robot 11, thereby moving the robot 11 in the horizontal direction. The horizontal moving part 42 moves the support part 32 supporting the robot 12, thereby moving the robot 12 in the horizontal direction. The horizontal moving parts 41 and 42 are configured independently and operate individually. The horizontal moving parts 41 and 42 move the support parts 31 and 32 respectively in a direction from the base end of the robot 11 and the front end of the robot 12, thereby moving the robot 11 and the robot 12. The horizontal moving part 41 has an opening 41b for connecting to the support part 31. The opening 41b is arranged on the side of the horizontal moving part 41 and extends along the moving direction of the robot 11. The horizontal moving part 42 has an opening 42b for connecting to the support part 32. The opening 42b is arranged on the bottom surface side of the horizontal moving part 42 in the Z2 direction and extends along the moving direction of the robot 12.

[0020] Horizontal moving parts 41 and 42 are respectively connected to the horizontal rotating mechanism 50. Horizontal moving part 41 is connected to the upper side of the horizontal rotating mechanism 50 in the Z1 direction, and horizontal moving part 42 is connected to the lower side of the horizontal rotating mechanism 50. That is, in the substrate transport robot 100, the horizontal moving part 41, the support part 31, and the robot rotating part 21 are sequentially arranged upwards in the Z1 direction from above the horizontal rotating mechanism 50. Furthermore, the horizontal moving part 42, the support part 32, and the robot rotating part 22 are sequentially arranged downwards in the Z2 direction from below the horizontal rotating mechanism 50. Horizontal moving parts 41 and 42 rotate individually relative to the horizontal rotating mechanism 50 along a horizontal plane formed by the XY plane. As shown in FIG2, the horizontal rotating mechanism 50 includes a drive part 50a. The drive part 50a includes, for example, a servo motor. The horizontal rotation mechanism 50, driven by the drive unit 50a, individually rotates the horizontal moving parts 41 and 42. The horizontal rotation mechanism 50 rotates the horizontal moving parts 41 and 42 around a common rotation axis A1 shown in FIG. 4. The rotation axis A1 is configured to extend along the vertical direction shown in the Z direction.

[0021] As shown in FIG. 4, the lifting unit 60 is connected to the horizontal moving units 41 and 42, causing the robotic arms 11 and 12 to move vertically along the Z-direction. Specifically, the lifting unit 60 is connected to the horizontal moving units 41 and 42 via the horizontal rotating mechanism unit 50. The lifting unit 60 causes the horizontal rotating mechanism unit 50 to move vertically, thereby causing the robotic arms 11 and 12 to move vertically in conjunction. The lifting unit 60 has a cylindrical housing extending vertically along the Z-direction. As shown in FIG. 2, the lifting unit 60 includes a drive unit 60a. The drive unit 60a includes, for example, a servo motor as a drive source. In addition, the drive unit 60a includes, for example, a ball screw mechanism and a linear guide rail. The lifting unit 60 is connected to the horizontal rotating mechanism unit 50 on the X1 direction side, and the horizontal rotating mechanism unit 50 moves vertically along the Z-direction by the driving force of the drive unit 60a. The lifting unit 60 has an opening 60b for connection to the horizontal rotation mechanism 50. The opening 60b is arranged on the side of the columnar housing of the lifting unit 60 and extends along the vertical movement direction of the horizontal rotation mechanism 50.

[0022] The control unit 70 is a robot controller that controls the actions of each part of the board transport robot 100. The control unit 70 includes a computing device such as a CPU (Central Processing Unit). In addition, the control unit 70 includes memory such as RAM (Random Access Memory) and ROM (Read Only Memory) and a memory device such as a hard disk. The control unit 70 performs control processing by means of the computing device based on the programs and parameters stored in the memory device. Specifically, the control unit 70 controls the actions of the holding mechanism 11a and holding mechanism 12a of each of the robotic arms 11 and 12. In addition, the control unit 70 controls the actions of the rotation mechanism 21a and rotation mechanism 22a of the robotic arm rotation unit 21 and robotic arm rotation unit 22, the actions of the linear movement mechanism 41a and linear movement mechanism 42a of the horizontal movement unit 41 and horizontal movement unit 42, the actions of the drive unit 50a of the horizontal rotation mechanism unit 50, and the actions of the drive unit 60a of the lifting unit 60. For example, the control unit 70 has a main CPU and a servo CPU. The main CPU controls the entire substrate transport robot 100, while the servo CPU controls the power supplied to the servo motors of each of the rotating mechanism units 21a and 22a, linear motion mechanisms 41a and 42a, drive units 50a and 60a. The control unit 70 is independently configured, for example, with the robotic arms 11 and 12, the robotic arm rotating units 21 and 22, the horizontal motion units 41 and 42, the horizontal rotating mechanism unit 50, and the lifting unit 60, and is connected to the cylindrical housing of the lifting unit 60 via cable members. The control unit 70 outputs signals to control the actions of each unit via the cable members connected to the lifting unit 60.

[0023] The control unit 70 controls the conveying operation of the substrate 101 according to the control variables preset by pre-learning. For example, the control unit 70 causes the robot 11 or robot 12 to hold the substrate 101 supplied to the substrate processing system 102, thereby performing a conveying operation to transfer the substrate from the supply position to the substrate mounting section 104. In addition, the control unit 70 causes the robot 11 or robot 12 to hold the substrate 101 placed on the substrate mounting section 104 of the processing device 103, thereby performing a conveying operation to transfer the substrate 101 from the substrate mounting section 104 to the removal position. Here, the supply position and the removal position may be the same position or different positions. In addition, the control unit 70 can also enable the robot arm 11 or the robot arm 12 to hold the substrate 101 placed in one of the plurality of substrate placement sections 104 of the processing device 103, and perform a transfer operation to move the held substrate 101 to the same substrate placement section 104 or to another substrate placement section 104 different from that substrate placement section 104.

[0024] As shown in FIG. 4, the control unit 70 moves the robotic arms 11 and 12, which hold the substrate 101, to a position overlapping with the horizontal moving parts 41 and 42 when viewed from the vertical direction shown in the Z direction, and then moves the robotic arms 11 and 12 up and down via the lifting unit 60. That is, the control unit 70 moves the robotic arms 11 and 12 to the side of the lifting unit 60 via the horizontal moving parts 41 and 42, and then moves the lifting unit 60 up and down. In the example shown in FIG. 4, the horizontal moving parts 41 and 42 are configured to move the robotic arms 11 and 12 parallel to each other along the X direction. At this time, the control unit 70 moves the robot arm 11 and robot arm 12 closer to the lifting unit 60 and moves them to the X2 direction side by means of the horizontal moving unit 41 and the horizontal moving unit 42, and then moves the robot arm 11 and robot arm 12 up and down along the Z direction by means of the lifting unit 60.

[0025] Furthermore, the control unit 70 controls the operation of the robot arm rotation unit 21 and robot arm rotation unit 22, thereby performing an operation to reverse the surface and back surface of the substrate 101 held by the robot arms 11 and 12. At this time, the control unit 70 rotates the robot arms 11 and 12 by means of the robot arm rotation units 21 and 22, respectively, to a position where the robot arms 11 and 12 overlap when viewed from the vertical direction shown in the Z direction. Here, the control unit 70 performs the operation of rotating the robot arms 11 and 12 by means of the robot arm rotation units 21 and 22 and the operation of moving the robot arms 11 and 12 by means of the robot arm rotation units 41 and 42 at different times. Therefore, when the robot 11 and robot 12 are moved to a wider space by the horizontal moving parts 41 and 42, the robot 11 and robot 12 can be rotated by the robot rotating parts 21 and 22. Thus, when the robot 11 and robot 12 rotate around a rotation axis extending horizontally, physical interference between the robot 11 and robot 12 themselves, or the substrate 101 held by the robot 11 and robot 12, and surrounding components can be suppressed. Furthermore, when the rotation and movement of the robot 11 and robot 12 occur simultaneously, vibration may occur. Therefore, by performing the rotation and movement of the robot 11 and robot 12 at different times, abnormal operation of the robot 11 and robot 12 caused by vibration can be suppressed. Similarly, the control unit 70 performs the actions of rotating the robot arm 11 and robot arm 12 by means of the robot arm rotating part 21 and robot arm rotating part 22, and moving the robot arm 11 and robot arm 12 up and down by means of the lifting part 60 at different times.

[0026] For example, the control unit 70 holds the substrate 101 placed on the substrate mounting section 104 of the processing device 103 with the Z1 direction side surface of the robot arm 11. The control unit 70 activates the holding mechanism 11a of the robot arm 11 to fix the substrate 101 to the Z1 direction side surface of the robot arm 11, and holds the substrate 101 in this state. The control unit 70 moves the robot arm 11, which holds the substrate 101, toward the lifting section 60 by means of the horizontal movement section 41. Furthermore, when the robot arm 11 is positioned to overlap with the horizontal movement section 41 when viewed from the vertical direction shown in the Z direction, the control unit 70 rotates the robot arm 11 by 180 degrees by means of the robot arm rotation section 21. The control unit 70, while the substrate 101 is held in the Z2 direction side of the reversed robot arm 11, places the substrate 101, with its surface and back reversed, into a different substrate placement section 104 in the processing device 103 than the original substrate placement section 104, or into the same substrate placement section 104. That is, while the robot arm 11 is moved to the lifting section 60 side by the horizontal movement section 41, the control unit 70 rotates the robot arm 11 by the robot arm rotation section 21, and then moves the robot arm 11 to the position of the substrate placement section 104 by the horizontal movement section 41. Furthermore, the control unit 70 can also actuate the robot arm rotation section 21 to deflect the substrate 101 by 90 degrees, thereby placing the substrate 101 into the substrate placement section 104 with its main surface perpendicular to the horizontal plane after being deflected by 90 degrees. Here, Figure 4 shows an example where the substrate 101 held by the robot arm 11 and the robot arm 12 is deflected by 90 degrees, represented by two-point chain lines.

[0027] The control unit 70 individually controls the actions of the robot arm 11 and the robot arm 12 in transporting the substrate 101. The actions of the robot arm 11 in holding and transporting the substrate 101 and the actions of the robot arm 12 in transporting the substrate 101 can be performed independently at individual times, or the other robot arm 12 can be combined to perform the transporting action when one of the robot arms 11 and the robot arm 12 is performing the transporting action. For example, after both the robot arm 11 and the robot arm 12 have completed the holding action of the substrate 101, the control unit 70 can sequentially perform the actions of placing the substrate 101 held by the robot arm 11 onto the substrate placement unit 104 and the actions of placing the substrate 101 held by the robot arm 12 onto the substrate placement unit 104.

[0028] <Details of the configuration of the support section> As shown in FIG5, the support section 31 has an L-shaped shape, which includes an upper and lower portion 31a extending in the vertical direction shown in the Z direction and a horizontal portion 31b extending from the upper and lower portion 31a along a horizontal plane. In the support section 31, the lower end of the Z2 direction side end of the upper and lower portion 31a is connected to a side of the horizontal moving part 41, and the upper end of the Z1 direction side end of the upper and lower portion 31a is connected to one end of the horizontal portion 31b. The side of the horizontal moving part 41 to which the upper and lower portion 31a of the support section 31 is connected is perpendicular to the direction in which the robot arm 11 is moved by the horizontal moving part 41 in the horizontal plane. The horizontal portion 31b extends in the horizontal plane in a direction perpendicular to the direction of movement of the robot arm 11. In the example of FIG5, the robot arm 11 moves horizontally in the X direction. The horizontal portion 31b is configured to extend in the Y direction perpendicular to the direction of movement of the robot arm 11 toward the Y2 direction side and overlap the horizontal moving part 41. The Z1 direction side of the horizontal portion 31b supports the lower side surface of the robot rotating part 21 connected to the robot arm 11.

[0029] Similarly, the support portion 32 also has an L-shaped shape, which includes an upper and lower portion 32a extending in the vertical direction shown in the Z direction and a horizontal portion 32b extending from the upper and lower portion 32a along a horizontal plane. In the support portion 32, the upper end of the Z1 direction side end of the upper and lower portion 32a is connected to the Z2 direction side surface of the horizontal moving portion 42. The lower end of the Z2 direction side end of the upper and lower portion 32a is connected to one end of the horizontal portion 32b. The horizontal portion 32b extends in a direction perpendicular to the direction of movement of the robot arm 12 in the horizontal plane. The upper side surface of the robot arm rotating portion 22 connected to the robot arm 12 is connected to the Z2 direction side of the horizontal portion 32b.

[0030] In this embodiment, the support unit 31 supports the robot arm 11 so that the rotation axis of the robot arm rotating part 21 is positioned at a predetermined distance from the horizontal moving part 41, and the support unit 32 supports the robot arm 12 so that the rotation axis of the robot arm rotating part 22 is positioned at a predetermined distance from the horizontal moving part 42. When the predetermined distance is defined as the distance corresponding to the rotation amplitude of the robot arm rotating part 21 and the robot arm rotating part 22, the support unit 31 and the support unit 32 support the robot arm 11 and the robot arm 12 respectively at positions separated from the horizontal moving part 41 and the horizontal moving part 42 by the rotation axes of the robot arm rotating part 21 and the robot arm rotating part 22 by the predetermined distance. Specifically, the support unit 31 is positioned such that the upper side of the robot arm 11, whose rotation axis is arranged in the Z1 direction (upper direction), is separated from the horizontal moving part 41 by a predetermined distance equal to or greater than the radius of the circular substrate 101 to be supported by the robot arm 11. Similarly, the support unit 32 is positioned such that the lower side of the robot arm 12, whose rotation axis is arranged in the Z2 direction (lower direction), is separated from the horizontal moving part 42 by a predetermined distance equal to or greater than the radius of the circular substrate 101 to be supported by the robot arm 12. Here, in Figure 5, a two-point chain line indicates the area that the substrate 101 held by the robot arm 11 and robot arm 12 will pass through when rotating. Furthermore, when the distance between the position corresponding to the center of the substrate 101 on the rotation axis of the rotating parts 21 and 22 of the robotic arm and the outer surface of the horizontal moving parts 41 and 42 is used as the separation distance between the rotation axis of the rotating parts 21 and 22 of the robotic arm and the horizontal moving parts 41 and 42, the support parts 31 and 32 support the robotic arms 11 and 12 such that the separation distance reaches a predetermined distance. That is, the support parts 31 and 32 support the robotic arms 11 and 12 in a state separated from the horizontal moving parts 41 and 42, so that the distance between the position on the rotation axis of the substrate 101 held by the robotic arms 11 and 12 and the horizontal moving parts 41 and 42 is a predetermined distance or more. For example, when the diameter of the substrate 101 is 300 mm, the predetermined distance is 150 mm or more of the radius and 300 mm or less. Here, the separation distance between the vertical manipulator 11 and the vertical manipulator 12 is, for example, 500 mm or less. In one example, the separation distance between the vertical manipulator 11 and the horizontal moving part 41 and the separation distance between the vertical manipulator 12 and the horizontal moving part 42 are both 150 mm, and the total length of the vertical horizontal moving part 41, the horizontal moving part 42 and the horizontal rotating mechanism part 50 is 200 mm.At this time, the separation distance between the vertical robotic arm 11 and robotic arm 12, that is, the distance between the robotic arms, is 150+200+150=500mm.

[0031] Furthermore, the separation distance D1 between the robot arm 11 supported by the support part 31 and the horizontal moving part 41 is greater than the separation distance D2 between the robot arm 12 supported by the support part 32 and the horizontal moving part 42. Here, the separation distance D1 is, for example, the distance between the mounting surface of the substrate 101 of the robot arm 11 and the upper side surface of the horizontal moving part 41, and the separation distance D2 is, for example, the distance between the mounting surface of the substrate 101 of the robot arm 12 and the lower side surface of the horizontal moving part 42. Since the separation distance D1 supported by the support part 31 is greater than the separation distance D2 supported by the support part 32, the robot arm 11 can be moved to a higher position. Here, the separation distance D1 between the robot arm 11 supported by the support part 31 and the horizontal moving part 41 and the separation distance D2 between the robot arm 12 supported by the support part 32 and the horizontal moving part 42 are less than the diameter of the substrate 101 to be held, and the vertical lengths of the support part 31 and the support part 32 are fixed.

[0032] [Effects of the First Embodiment] As described above, the substrate transport robot 100 includes a support section 31 and a support section 32. The support section 31 is connected to the horizontal moving section 41 and supports the robot arm 11 at a predetermined distance from the horizontal moving section 41, with the rotation axis of the robot arm rotating section 21 as the support. The support section 32 is connected to the horizontal moving section 42 and supports the robot arm 12 at a predetermined distance from the horizontal moving section 42, with the rotation axis of the robot arm rotating section 22 as the support. Therefore, since the support section 31 and the support section 32 support the robot arm 11 and the robot arm 12 at predetermined distances from the horizontal moving section 41 and the horizontal moving section 42, respectively, when the robot arm 11 and the robot arm 12 are rotated around a rotation axis extending in the horizontal direction, physical interference between the robot arm 11 and the robot arm 12 and the horizontal moving section 41 and the horizontal moving section 42 can be suppressed. Therefore, it is unnecessary to horizontally offset the manipulators 11 and 12 relative to the horizontal moving parts 41 and 42 in order to rotate them, thus preventing the substrate transport robot 100 from occupying a large space. As a result, even in the case where the manipulators 11 and 12 are to rotate around a rotation axis extending in the horizontal direction in the substrate transport robot 100 equipped with the horizontal moving parts 41 and 42, the space occupied by the substrate transport robot 100 can be reduced.

[0033] The substrate transport robot 100 includes a first robotic arm 11 and a second robotic arm 12, which are arranged vertically separated from each other and can hold substrates 101 respectively. The substrate transport robot 100 includes a support portion 31, which supports the first robotic arm 11 at a position separated from the horizontal moving portion 41 upwards, and a support portion 32, which supports the second robotic arm 12 at a position separated from the horizontal moving portion 42 downwards. In this way, since the robotic arms 11 and 12 can hold substrates 101 respectively, the work efficiency of transporting substrates 101 by the substrate transport robot 100 can be improved. In addition, since the support portion 31 and support portion 32 support the two robotic arms 11 and 12 respectively, even if both robotic arms 11 and 12 are to rotate around a rotation axis extending in the horizontal direction, the space occupied by the substrate transport robot 100 can be miniaturized.

[0034] The substrate transport robot 100 includes a horizontal moving part 41, which moves a first robotic arm 11 horizontally, and a horizontal moving part 42, which moves a second robotic arm 12 horizontally. A support part 31, which serves as a first support part, is connected to the horizontal moving part 41 and supports the robotic arm 11 at a position separated from the horizontal moving part 41 by an upward orientation. The support part 32, which serves as a second support part, is connected to the horizontal moving part 42 and supports the robotic arm 12 at a position separated from the horizontal moving part 42 by a downward orientation. Thus, the robotic arm 11 and the robotic arm 12 can move independently in the horizontal direction using the horizontal moving part 41 and the horizontal moving part 42. Therefore, the robotic arm 11 and the robotic arm 12 can reach different positions in the horizontal plane, thereby improving the operational efficiency of transporting the substrate 101 using the substrate transport robot 100. Furthermore, since the support part 31 supporting the robot arm 11 is connected to the horizontal moving part 41 and the support part 32 supporting the robot arm 12 is connected to the horizontal moving part 42, even when the robot arm 11 and the robot arm 12 move individually along the horizontal direction, the situation where the space occupied by the substrate transport robot 100 is enlarged due to the need to rotate the robot arm 11 and the robot arm 12 around a rotation axis extending along the horizontal direction can be prevented. As a result, the space occupied by the substrate transport robot 100 can be effectively reduced.

[0035] The substrate transport robot 100 includes a horizontal rotation mechanism 50 connected to both a horizontal moving part 41 (as a first horizontal moving part) and a horizontal moving part 42 (as a second horizontal moving part). The horizontal moving parts 41 and 42 rotate individually relative to the horizontal rotation mechanism 50 along a horizontal plane. This reduces the likelihood of large-scale device configuration compared to situations where the horizontal moving parts 41 and 42 are connected to different components.

[0036] The horizontal moving part 41, which is the first horizontal moving part, is connected to the upper part of the horizontal rotating mechanism part 50, and the horizontal moving part 42, which is the second horizontal moving part, is connected to the lower part of the horizontal rotating mechanism part 50. In this way, unlike the case where both the horizontal moving part 41 and the horizontal moving part 42 are arranged in the same direction in the vertical direction, the mutual interference between the operation of the horizontal moving part 41 and the operation of the horizontal moving part 42 can be easily suppressed.

[0037] The support units 31 and 32 support the robotic arms 11 and 12, positioning the rotation axes of the robotic arm rotating parts 21 and 22 at a predetermined distance from the horizontal moving parts 41 and 42, corresponding to the rotation amplitude of the robotic arm rotating parts 21 and 22. Therefore, since the rotation axes of the robotic arm rotating parts 21 and 22 are separated from the horizontal moving parts 41 and 42 by a rotation amplitude corresponding to the rotation axis extending horizontally, interference between the robotic arms 11 and 12 and the horizontal moving parts 41 and 42 can be appropriately suppressed.

[0038] The support units 31 and 32 support the robotic arms 11 and 12, and the rotation axes of the robotic arm rotation units 21 and 22 are arranged at a predetermined distance from the horizontal moving units 41 and 42, which is greater than or equal to the radius of the circular plate-shaped substrate 101 to be supported by the robotic arms 11 and 12. Therefore, even when the robotic arms 11 and 12 are holding the substrate 101 and need to rotate around the rotation axes extending in the horizontal direction, interference between the robotic arms 11 and 12 and the horizontal moving units 41 and 42 can be suppressed. Thus, even when the robotic arms 11 and 12 are rotated to reverse the surface and back of the substrate 101 held by the robotic arms 11 and 12, interference between the substrate 101 held by the robotic arms 11 and 12 and the horizontal moving units 41 and 42 can be suppressed, effectively miniaturizing the space occupied by the substrate transport robot 100.

[0039] The substrate transport robot 100 includes a control unit 70 that controls the movement of the robotic arm rotation unit 21 and 22, as well as the horizontal movement unit 41 and 42. The control unit 70 rotates the robotic arm 11 and 12 using the robotic arm rotation unit 21 and 22 when the robotic arm 11 and 12 are moved to a position overlapping with the horizontal movement unit 41 and 42 when viewed from above. Thus, by operating the control unit 70, the robotic arm 11 and 12 can be positioned so as not to interfere with the horizontal movement unit 41 and 42, and can rotate around a rotation axis extending horizontally. Therefore, while suppressing interference with the horizontal moving part 41 and the horizontal moving part 42, the robot arm 11 and the robot arm 12 can be easily rotated around the rotation axis extending in the horizontal direction by means of the robot arm rotating part 21 and the robot arm rotating part 22.

[0040] The substrate transport robot 100 includes a lifting section 60 connected to the horizontal moving section 41 and the horizontal moving section 42, which allows the robotic arms 11 and 12 to move vertically. Therefore, since the robotic arms 11 and 12 can move vertically via the lifting section 60, the vertical reach of the robotic arms 11 and 12 can be increased. Furthermore, since the robotic arms 11 and 12 are supported at positions vertically separated from the horizontal moving section 41 and the horizontal moving section 42 by the support section 31 and the support section 32, the vertical reach of the robotic arms 11 and 12 can be further increased by the combination of the lifting section 60 (which allows the horizontal moving section 41 and 42 to move vertically) and the support section 31 and the support section 32.

[0041] The substrate transport robot 100 includes a lifting section 60 connected to a horizontal moving section 41 (serving as a first horizontal moving section) and a horizontal moving section 42 (serving as a second horizontal moving section) via a horizontal rotation mechanism 50. The horizontal rotation mechanism 50 is moved up and down, thereby causing the robot arm 11 (serving as a first robot arm) and the robot arm 12 (serving as a second robot arm) to move up and down in conjunction. Because the lifting section 60 causes the robot arm 11 and robot arm 12 to move up and down in conjunction, the complexity of the device configuration can be reduced compared to a configuration where the robot arm 11 and robot arm 12 move up and down independently.

[0042] The robotic arm rotating parts 21 and 22 are connected to the base ends of the robotic arms 11 and 12. The support parts 31 and 32 support the robotic arm rotating parts 21 and 22 connected to the base ends of the robotic arms 11 and 12, thereby supporting the robotic arms 11 and 12. Since the robotic arm rotating parts 21 and 22 are connected to the base ends of the robotic arms 11 and 12, the rotational movements of the robotic arms 11 and 12 performed by the robotic arm rotating parts 21 and 22 can be simplified. Therefore, the space occupied by the substrate transport robot 100 can be reduced.

[0043] The robotic arm rotating parts 21 and 22 are connected to the base ends of the robotic arms 11 and 12. The support parts 31 and 32 are L-shaped, each L-shaped part including upper and lower portions 31a and 32a connected to the horizontal moving parts 41 and 42 and extending in the vertical direction, and horizontal portions 31b and 32b connected to the robotic arm rotating parts 21 and 22 and extending from the upper and lower portions 31a and 32a in the horizontal direction. The horizontal moving parts 41 and 42 move the support parts 31 and 32 that support the robotic arms 11 and 12, thereby moving the robotic arms 11 and 12 in the horizontal direction. Therefore, since the robotic arms 11 and 12 are supported by the L-shaped support parts 31 and 32, the robotic arms 11 and 12 can be positioned to overlap with the horizontal moving parts 41 and 42 in the vertical direction. Therefore, the robot arm 11 and robot arm 12 can be easily positioned to overlap with the horizontal moving parts 41 and 42 when viewed from above and below by the support parts 31 and 32, thus miniaturizing the area occupied by the substrate transport robot 100 when viewed from above and below. Furthermore, since the robot arm 11 and robot arm 12 are supported in a cantilever beam shape by the L-shaped support parts 31 and 32, compared to the case where the robot arm 11 and robot arm 12 are supported by support parts 31 and 32 in the form of beams at both ends, the number of connection points between the support parts 31 and 32 and the horizontal moving parts 41 and 42 can be reduced. Therefore, the number of parts at the connection points can be reduced, and the complexity of the device configuration can be suppressed.

[0044] The rotating part 21 of the robotic arm includes a sealing member 21b that seals the rotating mechanism part 21a relative to the outside, the rotating mechanism part 21a being used to rotate the robotic arm 11. The rotating part 22 of the robotic arm includes a sealing member that seals the rotating mechanism part 22a relative to the outside, the rotating mechanism part 22a being used to rotate the robotic arm 12. In this way, the sealing member can prevent foreign objects from entering the interior of the rotating mechanism parts 21a and 22a of the rotating parts 21 and 22 of the robotic arm, and can suppress the generation of particles from the interior of the rotating parts 21 and 22 of the robotic arm.

[0045] The horizontal moving part 41 includes a linear moving mechanism 41a that moves the robot arm 11 linearly in the horizontal direction. The support part 31 is connected to the horizontal moving part 41 that includes the linear moving mechanism 41a. The horizontal moving part 42 includes a linear moving mechanism 42a that moves the robot arm 12 linearly in the horizontal direction. The support part 32 is connected to the horizontal moving part 42 that includes the linear moving mechanism 42a. Therefore, generally speaking, the linear moving mechanisms 41a and 42a that move the robot arm 11 and the robot arm 12 linearly have higher structural rigidity than horizontal multi-joint robotic arms. Therefore, when the robot arm 11 and the robot arm 12 move linearly in the horizontal direction by means of the linear moving mechanisms 41a and 42a, the conveying operation of the substrate 101 held by the robot arm 11 and the robot arm 12 can be performed more stably.

[0046] [Second Embodiment] The substrate transport robot 200 of the second embodiment will be described with reference to FIGS. 6 and 7. Unlike the substrate transport robot 100 of the first embodiment, which includes horizontal movement units 41 and 42 comprising linear movement mechanisms 41a and 42a, the substrate transport robot 200 of the second embodiment includes horizontal movement units 241 and 242 comprising horizontally articulated robotic arms. Here, components that are the same as those in the first embodiment are marked with the same symbols in each figure and their descriptions are omitted.

[0047] As shown in FIG6, the substrate transport robot 200 of the second embodiment includes a support section 231, a support section 232, a horizontal moving section 241, a horizontal moving section 242, and a horizontal rotation mechanism section 250. Here, the support section 231 and the support section 232 are examples of a first support section and a second support section, respectively. The horizontal moving section 241 and the horizontal moving section 242 are examples of a first horizontal moving section and a second horizontal moving section, respectively.

[0048] Horizontal moving parts 241 and 242, like those in the first embodiment, move support parts 231 and 232, thereby moving robotic arms 11 and 12 horizontally. Similar to the first embodiment, horizontal moving part 241 is connected above horizontal rotating mechanism 250, and horizontal moving part 242 is connected below horizontal rotating mechanism 250. Horizontal rotating mechanism 250, like the horizontal rotating mechanism 50 in the first embodiment, allows horizontal moving parts 241 and 242 to rotate individually around a common rotation axis A201. Furthermore, horizontal rotating mechanism 250 is connected to lifting part 60 and moves up and down with the movement of lifting part 60.

[0049] In the second embodiment, the horizontal moving part 241 and the horizontal moving part 242 are horizontally multi-jointed robotic arms. Specifically, the horizontal moving part 241 includes a plurality of link members 241c and 241d that can rotate relative to each other along a horizontal plane formed by the XY plane. Similarly, the horizontal moving part 242 includes a plurality of link members 242c and 242d that can rotate relative to each other along a horizontal plane formed by the XY plane. The link members 241c and 241d of the horizontal moving part 241 and the link members 242c and 242d of the horizontal moving part 242 are configured as arm members of a robotic arm extending in the horizontal direction. In the horizontal moving part 241, the link members 241c and 241d are connected by joints to rotate relative to each other. In the horizontal moving part 242, the link members 242c and 242d are connected by joints to rotate relative to each other.

[0050] In detail, in the horizontal moving part 241, the connecting rod member 241c is connected to the surface of the horizontal rotating mechanism part 250 in the Z1 direction via a first joint on its lower side in the Z2 direction at its base end, so that it can rotate around the rotation axis A201. Furthermore, the connecting rod member 241d is connected to the surface of the connecting rod member 241c in the Z1 direction at its front end via a second joint, so that it can rotate around the rotation axis A212. Additionally, the support part 231 is connected to the surface of the connecting rod member 241d in the Z1 direction at its front end via a third joint, so that it can rotate around the rotation axis A213. Similarly, in the horizontal moving part 242, the connecting rod member 242c is connected via a first joint to the surface of the horizontal rotating mechanism part 250 in the Z2 direction, with its upper side in the Z1 direction at its base end, so that it can rotate around the rotation axis A201. The connecting rod member 242d is connected via a second joint to the surface of the connecting rod member 242c in the Z2 direction at its front end, so that it can rotate around the rotation axis A222. Furthermore, the support part 232 is connected via a third joint to the surface of the connecting rod member 242d in the Z2 direction at its front end, so that it can rotate around the rotation axis A223. The plurality of joints in the horizontal moving parts 241 and 242 are arranged so that the rotation axes A201, A212, A213, A222, and A223 are parallel to each other and arranged in a vertical direction (Z direction) perpendicular to the horizontal plane. The horizontal moving parts 241 and 242 are equipped with drive units that drive each joint to rotate. The drive units include, for example, servo motors.

[0051] Support part 231, like support part 31 in the first embodiment, is connected to horizontal moving part 241 and supports manipulator 11 at a position separated from horizontal moving part 241 in the upper direction (Z1 direction). Support part 232, like support part 32 in the first embodiment, is connected to horizontal moving part 242 and supports manipulator 12 at a position separated from horizontal moving part 242 in the lower direction (Z2 direction). Support parts 231 and 232, like support parts 31 and 32 in the first embodiment, have an L-shape. Support part 231 is disposed on the upper side of the linkage member 241d of horizontal moving part 241 in the Z1 direction, and supports manipulator rotating part 21 connected to the base end of manipulator 11 from the lower side in the Z2 direction. The support portion 232 is disposed on the lower side of the linkage member 242d of the horizontal moving portion 242 in the Z2 direction, while the robot rotating portion 22, which is connected to the base end of the robot 12, is supported from the upper side in the Z1 direction. Therefore, in the second embodiment, starting from the upper part of the horizontal rotating mechanism portion 250 connected to the lifting portion 60, the linkage members 241c and 241d of the horizontal moving portion 241, the support portion 231, and the robot rotating portion 21 are arranged sequentially in the Z1 direction upward. In addition, starting from the lower part of the horizontal rotating mechanism portion 250, the linkage members 242c and 242d of the horizontal moving portion 242, the support portion 232, and the robot rotating portion 22 are arranged sequentially in the Z2 direction downward.

[0052] As shown in FIG. 7, similarly to the first embodiment, the control unit 70 performs the lifting and lowering movement by means of the lifting unit 60 when the robot arm 11 and robot arm 12 are located near the lifting unit 60. Additionally, when the robot arm 11 and robot arm 12 are located near the lifting unit 60, the control unit 70 performs the rotation of the robot arm 11 and robot arm 12 by means of the robot arm rotating unit 21 and robot arm rotating unit 22. For example, the control unit 70 performs the lifting and lowering movement and the rotation of the robot arm 11 when the linkage members 241c and 241d of the horizontal moving unit 241 are arranged in an overlapping manner. The control unit 70 performs the lifting and lowering movement and the rotation of the robot arm 11 when the robot arm 11 is moved to a position overlapping with the horizontal moving unit 241 when viewed from the vertical direction shown in the Z direction. Similarly, the control unit 70 performs lifting and lowering movements and rotation of the robot arm 12 when the linkage members 242c and 242d of the horizontal moving part 242 are arranged in an overlapping manner. The control unit 70 performs lifting and lowering movements and rotation of the robot arm 12 when the robot arm 12 is moved to a position overlapping with the horizontal moving part 242 when viewed from the vertical direction shown in the Z direction.

[0053] Support portions 231 and 232, similar to the first embodiment, respectively support the robot arm 11 and robot arm 12, such that the rotation axes of the robot arm rotating parts 21 and 22 are positioned at a distance from the horizontal moving parts 241 and 242 equivalent to the rotation amplitude of the robot arm rotating parts 21 and 22. Support portion 231 supports the robot arm 11 at an upper position in the Z1 direction, separated from the surface above the link member 241d of the horizontal moving part 241 by a distance corresponding to the radius of the substrate 101. Support portion 232 supports the robot arm 12 at a lower position in the Z2 direction, separated from the surface below the link member 242d of the horizontal moving part 242 by a distance corresponding to the radius of the substrate 101. The other configurations of the second embodiment are the same as those of the first embodiment.

[0054] [Effects of the Second Embodiment] The second embodiment is as described above. The horizontal moving part 241 includes a plurality of link members 241c and 241d that rotate relative to each other along a horizontal plane. The horizontal moving part 242 includes a plurality of link members 242c and 242d that rotate relative to each other along a horizontal plane. The support part 231 is connected to the horizontal moving part 241, which includes the plurality of link members 241c and 241d. The support part 232 is connected to the horizontal moving part 242, which includes the plurality of link members 242c and 242d. Therefore, since the plurality of link members 241c and 241d rotate relative to each other along a horizontal plane, the range of motion of the robot 11 can be increased by the horizontal moving part 241. Similarly, since the plurality of link members 242c and 242d rotate relative to each other along a horizontal plane, the range of motion of the robot 12 can be increased by the horizontal moving part 242. Therefore, the reach of the robotic arms 11 and 12 used to transport the substrate 101 can be increased. Furthermore, since the robotic arms 11 and 12 are positioned vertically separated from the horizontal moving parts 241 and 242 by the support parts 231 and 232, the space occupied by the substrate transport robot 100 can be miniaturized. Other advantages of the second embodiment are the same as those of the first embodiment.

[0055] [Examples of Variations] Here, the embodiments disclosed herein should be understood as illustrative rather than intended to limit the invention. The scope of the invention is based on the claims and not on the description of the embodiments above, and also includes all variations (examples of variations) that are equivalent in meaning and scope to the claims.

[0056] For example, the first and second embodiments described above illustrate a configuration of a robot arm 11 as a first robot arm and a robot arm 12 as a second robot arm, which are arranged vertically separated from each other; however, the present invention is not limited thereto. In the present invention, the robot arm holding the substrate may be a single unit or may be configured in three or more units. Furthermore, the plurality of robots arm may be configured at positions separated in the left-right direction or at positions further to the left and right in the vertical direction, rather than positions separated only in the vertical direction. Additionally, it is also possible to configure only a portion of the plurality of robots arm in a support portion separated from the horizontally moving portion.

[0057] Furthermore, the first and second embodiments described above illustrate that the holding mechanism portions 11a and 12a included in the robot arm 11 as the first robot arm and the robot arm 12 as the second robot arm have cylinders, but the present invention is not limited thereto. In the present invention, the holding mechanism portion in the robot arm may also be an actuator such as an electromagnetic coil or a motor other than a cylinder. In addition, it may also be an active type robot arm such as a vacuum suction type other than the edge clamping type.

[0058] Furthermore, the first and second embodiments described above illustrate how the robot arm 11, which is the first robot arm, and the robot arm 12, which is the second robot arm, are horizontally moved by the horizontal moving part 41 and the horizontal moving part 241, which are the first horizontal moving part, and the horizontal moving part 42 and the horizontal moving part 242, which are the second horizontal moving parts, respectively. However, the present invention is not limited to this. In the present invention, the first robot arm and the second robot arm can also be horizontally moved by a common horizontal moving part. For example, the first robot arm and the second robot arm can be configured on a single robot arm. In this case, the first support part supporting the first robot arm and the second support part supporting the second robot arm can be configured at the front end of the common robot arm, or only one of the first support part and the second support part can be configured. In addition, the first robot arm and the second robot arm can both be configured on either the upper or lower side of the common horizontal moving part, or one of the first robot arm and one of the second robot arm can be configured on the upper side and one on the lower side, respectively.

[0059] Furthermore, the first and second embodiments described above illustrate that the horizontal moving part 41 and the horizontal moving part 241, as first horizontal moving parts, are connected above the horizontal rotating mechanism part 50 and the horizontal rotating mechanism part 250, and the horizontal moving part 42 and the horizontal moving part 242, as second horizontal moving parts, are connected below the horizontal rotating mechanism part 50 and the horizontal rotating mechanism part 250. However, the present invention is not limited thereto. In the present invention, both the first horizontal moving part and the second horizontal moving part may be arranged above or below the horizontal rotating mechanism part. Furthermore, the first horizontal moving part and the second horizontal moving part may be arranged side by side.

[0060] Furthermore, the first and second embodiments described above exemplify a horizontal rotation mechanism 50 and a horizontal rotation mechanism 250 that individually rotate the horizontal moving parts 41 and 241 (which are first horizontal moving parts) and the horizontal moving parts 42 and 242 (which are second horizontal moving parts), but the present invention is not limited thereto. In the present invention, the horizontal rotation mechanism may also be configured to cause the first horizontal moving part and the second horizontal moving part to rotate together. Alternatively, it may be configured so that the first horizontal moving part and the second horizontal moving part rotate relative to the horizontal rotation mechanism by means of the movement of the first horizontal moving part and the second horizontal moving part, rather than the first horizontal moving part and the second horizontal moving part rotating relative to the horizontal rotation mechanism by means of the movement of the horizontal rotation mechanism.

[0061] Furthermore, the first and second embodiments described above illustrate that the support portions 31, 32, 231, and 232 support the robot 11 and robot 12 at positions that are separated from the horizontal moving portions 41, 42, 241, and 242 by a distance corresponding to the radius of the circular plate-shaped substrate 101 to be supported by the robot 11 and robot 12 in the vertical direction. However, the present invention is not limited to this. In the present invention, the support portion may also be configured such that the axis of rotation of the robot arm supporting the robot arm as a rotating part is positioned at a distance corresponding to the radius of rotation of the robot arm by the rotating part from the horizontal moving portion. In addition, the axis of rotation of the robot arm configured as a rotating part may be positioned at a distance from the horizontal moving portion that is less than the rotation radius of the robot arm. For example, when the robot arm is to be rotated by the rotating part without holding the substrate, the support portion may be configured to support the robot arm at a distance from the horizontal moving portion that is greater than or equal to the rotation radius of the robot arm itself. Alternatively, the support unit can be positioned such that the axis of rotation of the robot arm rotating part is separated from the horizontal moving part by a predetermined distance along a direction deviating from the vertical direction. For example, in the variation shown in FIG8, the support unit 331 supports the robot arm such that, when the robot arm is positioned to be rotated by the robot arm rotating part 321, the axis of rotation of the robot arm rotating part 321 is positioned such that the distance between the outer surface of the horizontal moving part 341 and the position on the axis of rotation of the robot arm rotating part 321 corresponding to the center of the substrate 101 is separated by a predetermined distance D300. In this case, the distance between the axis of rotation of the robot arm rotating part 321 and the vertical distance of the horizontal moving part 341 is less than the predetermined distance D300.

[0062] Furthermore, the first and second embodiments described above illustrate that when the control unit 70 moves the robotic arms 11 and 12 to a position overlapping with the horizontal moving parts 41, 42, 241, and 242 when viewed from the vertical direction, the robotic arms 11 and 12 are rotated by the robotic arm rotating part 21 and the robotic arm rotating part 22. However, the present invention is not limited to this. In the present invention, the robotic arm can also be rotated when it is not in a position overlapping with the horizontal moving parts. For example, the robotic arm can be rotated when it is positioned near the lifting part or in a position that does not protrude relative to the horizontal moving parts. In addition, when the horizontal moving part is a horizontally multi-jointed robotic arm with a plurality of linkage members, the robotic arm can be rotated by the robotic arm rotating part in a folded state rather than an extended state.

[0063] Furthermore, the first and second embodiments described above illustrate the use of a lifting section 60 to move the horizontal rotation mechanism section 50 and the horizontal rotation mechanism section 250 vertically, thereby enabling the robot arm 11, which serves as the first robot arm, and the robot arm 12, which serves as the second robot arm, to move vertically in conjunction. However, the present invention is not limited to this. In the present invention, the first robot arm and the second robot arm can also be moved vertically and vertically individually. In this case, the lifting section can be used to move the first horizontal moving section that moves the first robot arm and the second horizontal moving section that moves the second robot arm vertically and vertically individually.

[0064] Furthermore, the first and second embodiments described above illustrate that the support portions 31, 32, 231, and 232 have an L-shape and are connected to the horizontal moving portions 41, 42, 241, and 242 in a cantilever beam manner; however, the present invention is not limited thereto. In the present invention, the support portion may also be formed in a straight line shape instead of an L-shape. That is, the support portion may also be formed as a columnar member extending from the parallel moving portion in the vertical direction. In addition, the support portion may also be configured as a combination of two L-shaped members forming a support beam at both ends, connected to the horizontal moving portion. Furthermore, the support portion may also be integrally formed with the robot rotating portion at the base end to be connected to the robot.

[0065] Furthermore, the first and second embodiments described above illustrate that the rotating part 21 of the robot arm includes a sealing member 21b that seals the rotating mechanism part 21a relative to the outside; however, the present invention is not limited thereto. In the present invention, the rotating part of the robot arm may also be without a sealing member. In addition, sealing members may also be provided in parts other than the rotating part of the robot arm.

[0066] Furthermore, the first and second embodiments described above illustrate that the control unit 70 has a main CPU and a servo CPU. The main CPU performs overall control of the substrate transport robot 100 and the substrate transport robot 200, and the servo CPU controls the power supplied to the servo motor. However, the present invention is not limited to this. The present invention can also be configured such that the control unit has a single computing device such as a CPU. It can also be configured such that the operation of the holding mechanism of the robot arm, the rotation mechanism of the robot arm rotating part, the linear movement mechanism or drive part of the horizontal movement part, the drive part of the horizontal rotation mechanism part, and the drive part of the lifting part are executed by the control unit with different hardware. It can also be configured such that any of the above-mentioned operations are controlled by a common control unit.

[0067] The functions of the elements disclosed in this specification can be performed using circuits or processing circuits that include general-purpose processors, special-purpose processors, integrated circuits, application-specific integrated circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Since a processor includes transistors and other circuits, it can also be considered a processing circuit or circuit. In this invention, a circuit, unit, or means is hardware that performs the listed functions, or hardware that programs the listed functions into executable functionality. The hardware can be the hardware disclosed in this specification, or other conventional hardware that programs or configures the listed functions into executable functionality. When hardware is considered as a processor of a circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used in the configuration of the hardware and / or processor.

[0068] [State] Those skilled in the art will understand that the above-described embodiments are specific examples of the following states.

[0069] (Example 1) A substrate transport robot includes: a manipulator for holding a substrate; a manipulator rotation unit for rotating the manipulator about a rotation axis extending in a horizontal direction; a horizontal movement unit for moving the manipulator in a horizontal direction; and a support unit connected to the horizontal movement unit and supporting the manipulator such that the rotation axis of the manipulator rotation unit is positioned at a predetermined distance from the horizontal movement unit.

[0070] (State 2) In the substrate transport robot of State 1, the aforementioned manipulator includes a first manipulator and a second manipulator that are arranged vertically and separately and hold the aforementioned substrate respectively; the aforementioned support part includes: a first support part that supports the aforementioned first manipulator at a position that is separated from the aforementioned horizontal moving part upward; and a second support part that supports the aforementioned second manipulator at a position that is separated from the aforementioned horizontal moving part downward.

[0071] (State 3) In the substrate transport robot of State 2, the aforementioned horizontal moving part includes: a first horizontal moving part that moves the aforementioned first manipulator in a horizontal direction; and a second horizontal moving part that moves the aforementioned second manipulator in a horizontal direction; the aforementioned first support part is connected to the aforementioned first horizontal moving part and supports the aforementioned first manipulator at a position separated from the aforementioned first horizontal moving part upward; the aforementioned second support part is connected to the aforementioned second horizontal moving part and supports the aforementioned second manipulator at a position separated from the aforementioned second horizontal moving part downward.

[0072] (Sample 4) The substrate transport robot of Sample 3 further includes: a horizontal rotation mechanism, which is connected to each of the aforementioned first horizontal moving part and the aforementioned second horizontal moving part; the aforementioned first horizontal moving part and the aforementioned second horizontal moving part rotate individually relative to the aforementioned horizontal rotation mechanism along the horizontal plane.

[0073] (State 5) In the substrate transport robot of State 4, the aforementioned first horizontal moving part is connected above the aforementioned horizontal rotating mechanism part, and the aforementioned second horizontal moving part is connected below the aforementioned horizontal rotating mechanism part.

[0074] (State 6) In the substrate transport robot of any of the states 1 to 5, the aforementioned support part is in a state in which the axis of rotation of the aforementioned manipulator supporting the aforementioned manipulator is arranged at a position that is a predetermined distance away from the aforementioned horizontal moving part, which is equivalent to the rotation amplitude of the aforementioned manipulator.

[0075] (State 7) In the substrate transport robot of State 6, the aforementioned support part is in a state in which the axis of rotation of the aforementioned robot arm supporting the aforementioned robot arm is arranged at a position that is at or above the radius of the aforementioned substrate corresponding to the circular plate shape to be supported by the aforementioned robot arm, which is the aforementioned predetermined distance from the aforementioned horizontal moving part.

[0076] (State 8) The substrate transport robot of any of the states 1 to 7 further comprises: a control unit that controls the operation of the aforementioned manipulator rotation unit and the aforementioned horizontal movement unit; the aforementioned control unit rotates the aforementioned manipulator by means of the aforementioned manipulator rotation unit when the aforementioned manipulator is moved to a position that overlaps with the aforementioned horizontal movement unit when viewed from the top and bottom.

[0077] (State 9) The substrate transport robot of any of the states 1 to 8 further includes: a lifting unit connected to the aforementioned horizontal moving unit, which enables the aforementioned manipulator to move up and down.

[0078] (State 10) The substrate transport robot of State 4 or State 5 further includes: a lifting unit, which is connected to the aforementioned horizontal moving unit, which includes the aforementioned first horizontal moving unit and the aforementioned second horizontal moving unit, via the aforementioned horizontal rotating mechanism unit, so that the aforementioned horizontal rotating mechanism unit moves up and down, thereby causing the aforementioned first manipulator and the aforementioned second manipulator to move up and down in conjunction.

[0079] (State 11) In the substrate transport robot of any of the states 1 to 10, the aforementioned manipulator rotating part is connected to the base end of the aforementioned manipulator; the aforementioned support part supports the aforementioned manipulator rotating part connected to the base end of the aforementioned manipulator, thereby supporting the aforementioned manipulator.

[0080] (Sample 12) In the substrate transport robot of any of the Samples 1 to 11, the aforementioned manipulator rotating part is connected to the base end of the aforementioned manipulator; the aforementioned support part has an L-shape, the L-shape comprising an upper and lower portion connected to the aforementioned horizontal moving part and extending in the vertical direction, and a horizontal portion connected to the aforementioned manipulator rotating part and extending from the aforementioned upper and lower portions in the horizontal plane; the aforementioned horizontal moving part moves the aforementioned support part supporting the aforementioned manipulator, thereby moving the aforementioned manipulator in the horizontal direction.

[0081] (State 13) In the substrate transport robot of any of the states 1 to 12, the aforementioned manipulator rotating part includes a sealing member that seals the rotating mechanism part relative to the outside, the rotating mechanism part being used to rotate the aforementioned manipulator.

[0082] (Patent 14) In the substrate transport robot of any of the presents 1 to 13, the aforementioned horizontal moving part includes a linear moving mechanism that causes the aforementioned manipulator to move linearly in the horizontal direction; the aforementioned support part is connected to the aforementioned horizontal moving part that includes the aforementioned linear moving mechanism.

[0083] (State 15) In the substrate transport robot of any of the states 1 to 13, the aforementioned horizontal moving part includes a plurality of linkage members that rotate relative to each other along a horizontal plane; the aforementioned support part is connected to the aforementioned horizontal moving part that includes the aforementioned plurality of linkage members. [Simplified Explanation of the Diagram]

[0008] FIG1 is a schematic diagram showing the configuration of a substrate processing system incorporating the substrate transport robot of the first embodiment of the present invention. FIG2 is a block diagram showing the configuration of the substrate transport robot. FIG3 is a perspective view illustrating the configuration of the manipulator in the substrate transport robot. FIG4 is a side view illustrating the configuration of the substrate transport robot. FIG5 is a front view illustrating the configuration of the support section. FIG6 is a side view illustrating the configuration of the substrate transport robot of the second embodiment. FIG7 is a side view illustrating the operation of the horizontal moving section in the substrate transport robot of the second embodiment. FIG8 is a diagram showing an example of the arrangement of the rotating section and the horizontal moving section of the manipulator in variations of the first and second embodiments.

Claims

1. A substrate handling robot comprising: a robotic arm for holding a substrate; a robotic arm rotation unit for rotating the robotic arm about a rotation axis extending in a horizontal direction; a horizontal movement unit for moving the robotic arm in a horizontal direction; and a support unit connected to the horizontal movement unit, which supports the robotic arm such that the rotation axis of the robotic arm rotation unit is positioned at a predetermined distance from the horizontal movement unit; wherein the support unit supports the robotic arm such that the rotation axis of the robotic arm rotation unit is positioned at a predetermined distance from the horizontal movement unit, the predetermined distance being equivalent to the rotation amplitude of the robotic arm rotation unit.

2. The substrate transport robot as described in claim 1, wherein, The aforementioned robotic arm includes a first robotic arm and a second robotic arm that are arranged vertically and separately hold the aforementioned substrate respectively; the aforementioned support portion includes: a first support portion that supports the aforementioned first robotic arm at a position separated from the aforementioned horizontal moving portion upward; and a second support portion that supports the aforementioned second robotic arm at a position separated from the aforementioned horizontal moving portion downward.

3. The substrate transport robot as described in claim 2, wherein, The aforementioned horizontal moving part includes: a first horizontal moving part for moving the aforementioned first robotic arm in a horizontal direction; and a second horizontal moving part for moving the aforementioned second robotic arm in a horizontal direction; the aforementioned first support part is connected to the aforementioned first horizontal moving part and supports the aforementioned first robotic arm at a position separated from the aforementioned first horizontal moving part by an upward orientation; the aforementioned second support part is connected to the aforementioned second horizontal moving part and supports the aforementioned second robotic arm at a position separated from the aforementioned second horizontal moving part by a downward orientation.

4. The substrate transport robot as described in claim 3 further comprises: a horizontal rotation mechanism connected to each of the aforementioned first horizontal moving part and the aforementioned second horizontal moving part; the aforementioned first horizontal moving part and the aforementioned second horizontal moving part rotate individually relative to the aforementioned horizontal rotation mechanism along a horizontal plane.

5. The substrate transport robot as described in claim 4, wherein, The aforementioned first horizontal moving part is connected above the aforementioned horizontal rotating mechanism part, and the aforementioned second horizontal moving part is connected below the aforementioned horizontal rotating mechanism part.

6. The substrate transport robot as described in claim 1, wherein, The aforementioned support section is configured such that the axis of rotation of the aforementioned robotic arm rotating part is positioned at a predetermined distance from the aforementioned horizontal moving part. The predetermined distance is greater than or equal to the radius of the aforementioned substrate with the circular plate shape to be supported by the aforementioned robotic arm.

7. The substrate transport robot as described in claim 1 further comprises: a control unit that controls the operation of the aforementioned robotic arm rotation unit and the aforementioned horizontal movement unit; wherein the control unit rotates the aforementioned robotic arm by means of the aforementioned robotic arm rotation unit when the aforementioned robotic arm is moved to a position overlapping with the aforementioned horizontal movement unit when viewed from the top and bottom.

8. The substrate transport robot as described in claim 1 further comprises: a lifting unit connected to the aforementioned horizontal moving unit, which enables the aforementioned robotic arm to move up and down.

9. The substrate transport robot as described in claim 4 further comprises: a lifting unit, which is connected to the aforementioned horizontal moving unit, which includes the aforementioned first horizontal moving unit and the aforementioned second horizontal moving unit, via the aforementioned horizontal rotating mechanism unit, so that the aforementioned horizontal rotating mechanism unit moves up and down, thereby causing the aforementioned first manipulator and the aforementioned second manipulator to move up and down in conjunction.

10. The substrate transport robot as described in claim 1, wherein, The aforementioned rotating part of the robotic arm is connected to the base end of the aforementioned robotic arm; the aforementioned support part supports the aforementioned rotating part of the robotic arm connected to the base end of the aforementioned robotic arm, thereby supporting the aforementioned robotic arm.

11. The substrate transport robot as described in claim 1, wherein, The aforementioned rotating part of the robotic arm is connected to the base end of the aforementioned robotic arm; the aforementioned support part has an L-shape, the L-shape comprising an upper and lower portion connected to the aforementioned horizontal moving part and extending in the vertical direction, and a horizontal portion connected to the aforementioned rotating part of the robotic arm and extending from the aforementioned upper and lower portions in the horizontal plane; the aforementioned horizontal moving part moves the aforementioned support part that supports the aforementioned robotic arm, thereby causing the aforementioned robotic arm to move in the horizontal direction.

12. The substrate transport robot as described in claim 1, wherein, The aforementioned robotic arm rotating part includes a sealing member that seals the rotating mechanism part relative to the outside, the rotating mechanism part being used to rotate the aforementioned robotic arm.

13. The substrate transport robot as described in claim 1, wherein, The aforementioned horizontal moving part includes a linear moving mechanism that causes the aforementioned robot to move linearly in the horizontal direction; the aforementioned support part is connected to the aforementioned horizontal moving part that includes the aforementioned linear moving mechanism.

14. The substrate transport robot as described in claim 1, wherein, The aforementioned horizontal moving part system includes a plurality of linkage members that rotate relative to each other along a horizontal plane; the aforementioned support part system is connected to the aforementioned horizontal moving part including the aforementioned plurality of linkage members.

15. A substrate handling robot comprising: a robotic arm for holding a substrate; a robotic arm rotation unit for rotating the robotic arm about a rotation axis extending in a horizontal direction; a horizontal movement unit for moving the robotic arm in a horizontal direction; and a support unit connected to the horizontal movement unit and supporting the robotic arm such that the rotation axis of the robotic arm rotation unit is positioned at a predetermined distance from the horizontal movement unit; the robotic arm includes a first robotic arm and a second robotic arm arranged vertically and respectively holding the substrate; the support unit includes: a first support unit for supporting the first robotic arm at a position separated from the horizontal movement unit upwards; and a second support unit for supporting the second robotic arm at a position separated from the horizontal movement unit downwards.

16. A substrate handling robot comprising: a robotic arm for holding a substrate; a robotic arm rotation unit for rotating the robotic arm about a rotation axis extending in a horizontal direction; a horizontal movement unit for moving the robotic arm in a horizontal direction; a support unit connected to the horizontal movement unit and supporting the robotic arm such that the rotation axis of the robotic arm rotation unit is positioned at a predetermined distance from the horizontal movement unit; and a control unit for controlling the operation of the robotic arm rotation unit and the horizontal movement unit; wherein the control unit rotates the robotic arm by means of the robotic arm rotation unit when the robotic arm is moved to a position overlapping with the horizontal movement unit when viewed from above.

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