Fluid supply device

Abstract

The fluid supply device includes: a base; a fluid supply line extending along its long side and facing the base; a connecting pipe extending along its long side and disposed between the base and the fluid supply line; a branch pipe disposed between the connecting pipe and the fluid supply line to supply fluid from the connecting pipe to the fluid supply line; a lower bracket supporting the connecting pipe and fixed to the base; and an upper bracket connected to the lower bracket in a manner that engages with the connecting pipe and maintains the branch pipe.

Description

[Technical Field]

[0001] This invention relates to a fluid supply device. [Previous Technology]

[0002] JP2021-032399A discloses a fluid supply device with a fluid supply line. [Summary of the Invention]

[0003] In the fluid supply device described in JP2021-032399A, the connecting pipe is clamped by upper and lower supports. However, during the assembly of the fluid supply device, since the branch pipe connecting the connecting pipe and the fluid supply line is not supported, the workability of the assembly will be reduced due to the tilting of the branch pipe.

[0004] Therefore, the present invention is aimed at addressing this problem and its object is to provide a fluid supply device that can improve the workability of assembly.

[0005] According to one embodiment of the present invention, a fluid supply device is provided, comprising: a base; a fluid supply line extending along its long side and disposed opposite to the base; a connecting pipe extending along its long side and disposed between the base and the fluid supply line; a branch pipe supplying fluid from the connecting pipe to the fluid supply line and disposed between the connecting pipe and the fluid supply line; a first bracket supporting the connecting pipe and fixed to the base; and a second bracket engaging with the connecting pipe and connected to the first bracket to hold the branch pipe in place.

[0006] This state should improve the operability of the fluid supply device assembly.

Implementation Method

[0008] Embodiments of the present invention (hereinafter referred to as "the embodiments") will be described below with reference to the accompanying drawings. In this specification, the same reference numerals are used to denote the same constituent elements throughout the entire content.

[0009] (Fluid supply device) The fluid supply device 100 of this embodiment is described with reference to Figures 1 and 2.

[0010] Figure 1 is a perspective view of the fluid supply device 100 of this embodiment. For ease of explanation, only one line of fluid supply line 2 is shown. Figure 2 is a side view of the fluid supply device 100 of this embodiment. For ease of explanation, only one line of fluid supply line 2 is shown. Also, in Figures 1 and 2, the longitudinal, width, and height directions of the mutually orthogonal fluid supply devices 100 are along the X-axis, Y-axis, and Z-axis, respectively. Hereinafter, for ease of explanation, the longitudinal, width, and height directions of the fluid supply devices 100 will also be simply referred to as the longitudinal, width, and height directions.

[0011] The fluid supply device 100 of this embodiment is used as a means of supplying process gases and other fluids to a semiconductor manufacturing apparatus (CVD (chemical vapor deposition) apparatus, sputtering apparatus, etching apparatus, etc., not shown) from a fluid supply source not shown.

[0012] As shown in Figures 1 and 2, the fluid supply device 100 includes a base 1 that extends along both the long side direction and the width direction, a plurality of fluid supply lines 2 arranged side by side along the width direction and facing the base 1 along the long side direction, a plurality of connecting pipes 3 that extend along the long side direction and are disposed between the base 1 and the plurality of fluid supply lines 2, a branch pipe 4 that supplies process gases, etc., from the connecting pipes 3 to the fluid supply lines 2 and is disposed between the connecting pipes 3 and the fluid supply lines 2, and a support portion 5 that supports the connecting pipes 3 and holds the branch pipes 4.

[0013] The base 1 is, for example, a base for housing (not shown) that accommodates multiple fluid supply lines 2, connecting pipes 3, branch pipes 4 and support parts 5.

[0014] The plurality of fluid supply lines 2, for example, appropriately control the flow rate of process gas and supply the process gas to the semiconductor manufacturing apparatus. Each fluid supply line 2 has a plurality of fluid machines 21 and a flow path block 22 that connects adjacent fluid machines 21 by bolts. The plurality of fluid machines 21 include, for example, on / off valves, regulators, pressure gauges and mass flow controllers.

[0015] Specifically, the connecting pipe 3 supported by the support portion 5 is located between the upper side of the base 1 and the lower side of the flow path block 22.

[0016] The branch pipe 4 is connected to the end side of the connecting pipe 3 as one end (lower end), and is connected to the valve 211 located at the upstream side of the fluid supply line 2 via the connector block 6 as the other end (upper end). In this embodiment, the branch pipe 4 is arranged to extend in the height direction, but this is not a limitation; for example, it may also be arranged to extend at an angle relative to the height direction.

[0017] In this embodiment, the support portion 5 is positioned further to the end of the connecting pipe 3 than the branch pipe 4, but this is not a limitation; for example, it may be positioned to clamp the branch pipe 4 together with the end of the connecting pipe 3. Furthermore, the support portion 5 is described in detail below.

[0018] (Support section) Next, referring to Figures 1 to 5, the support section 5 (featured part) used in the fluid supply device 100 of this embodiment will be described in detail.

[0019] Figure 3 is a schematic diagram showing the connection state of the lower support 51 and the upper support 52, omitting the base 1 and the fluid supply line 2. Figure 4 is a perspective view of the upper support 52. Figure 5 shows the lower support 51, the upper support 52 and the bolt 53 in the connection state of the lower support 51 and the upper support 52. (a) is a side view of the lower support 51, the upper support 52 and the bolt 53, and (b) is a top view of the lower support 51, the upper support 52 and the bolt 53.

[0020] As shown in Figure 3, the bracket part 5 has a lower bracket 51 as a first bracket, an upper bracket 52 as a second bracket, and a bolt 53 for locking the upper bracket 52 to the lower bracket 51.

[0021] The lower support 51 has an assembly part 511 fixed to the base 1 and a long plate-shaped support plate 512 extending in the width direction and assembled to the assembly part 511 to support the connecting pipe 3. In this embodiment, the lower support 51 is composed of the assembly part 511 and the support plate 512, but this is not a limitation and it may be composed of a single part.

[0022] The assembly part 511 has a long plate-shaped upright plate 511a that extends in the width direction and is formed in the height direction in a side view, a pair of assembly pieces 511b that are provided at both ends of the upright plate 511a that protrude from the upper side of one side of the upright plate 511a in the long side direction, and a fixing plate 511c that extends in the width direction and protrudes from the lower side of the other side of the upright plate 511a in the long side direction.

[0023] Furthermore, the upright plate 511a, the pair of assembly pieces 511b, and the fixing plate 511c are formed, for example, by bending a metal plate. In other words, the upright plate 511a, the pair of assembly pieces 511b, and the fixing plate 511c are integrally formed. Moreover, the pair of assembly pieces 511b and the fixing plate 511c are arranged such that they protrude from the upright plate 511a to the opposite side in the long side direction. Each assembly piece 511b has a threaded hole that extends through the thickness direction of the assembly piece 511b and engages with the bolt 53. The fixing plate 511c is fixed to the base 1 by bolts or the like.

[0024] In this embodiment, the assembly piece 511b has a threaded hole, but this is not a limitation; for example, a through hole may also be formed. In this case, a nut that engages with the bolt 53 will be required.

[0025] On the support plate 512 (specifically, on the upper side of the support plate 512), a plurality of semi-circular grooves 512 are arranged at intervals along the width direction. The plurality of grooves 512 are grooves used to support the lower outer circumferential surface of the plurality of connecting pipes 3. Furthermore, the support plate 512 is connected to the assembly part 511 (specifically, the upright plate 511a) by bolts or the like.

[0026] As shown in FIG3, the upper bracket 52 is connected to the lower bracket 51 (specifically, a pair of assembly pieces 511b) by bolts 53 in a manner that engages with the connecting pipe 3 and holds the branch pipe 4. As shown in FIG3 and FIG4, the upper bracket 52 has an engaging plate 521 formed in the height direction in a side view in a manner that extends in the width direction, a retaining plate 522 formed in a manner that extends in the width direction and protrudes from the upper side of one side of the engaging plate 521 to the long side direction, and a pair of clamping pieces 523 provided at both ends of the engaging plate 521 as clamping parts in a manner that protrudes from the lower side of the other side of the engaging plate 521 to the long side direction.

[0027] Furthermore, the locking plate 521, the retaining plate 522, and the pair of clamping pieces 523 are formed, for example, from a bent metal plate. In other words, the locking plate 521, the retaining plate 522, and the pair of clamping pieces 523 are integrally formed. Moreover, the retaining plate 522 and the pair of clamping pieces 523 are arranged such that they protrude from the locking plate 521 to the same side in the long side direction.

[0028] On the lower side of the locking plate 521, a plurality of semi-circular locking notches 521a are arranged at intervals along the width direction. The plurality of semi-circular locking notches 521a are notches used to engage with a plurality of connecting pipes 3 (specifically, the upper outer peripheral surface of the connecting pipe 3). When the lower support 51 and the upper support 52 are connected, the lower support 51 and the upper support 52 (specifically, the locking plate 521) clamp the connecting pipe 3 from above and below.

[0029] On the side of the retaining plate 522 opposite to the branch pipe 4, a plurality of semi-circular first notches 522a are formed at intervals along the width direction. The plurality of semi-circular first notches 522a are notches used to retain the plurality of branch pipes 4 respectively.

[0030] The clamping piece 523 is provided to protrude along its long side from the side of the engaging plate 521 opposite to the branch pipe 4. A U-shaped second notch is formed on the same side as one side of the retaining plate 522 (see Figure 5). Furthermore, a plurality of first notches 522a are located between a pair of clamping pieces 523 in top view. This avoids positional interference between the first notches 522a and the second notches.

[0031] As shown in Figure 5, when the upper bracket 52 and the lower bracket 51 are connected, the second notch engages with the threaded portion 531 of the bolt 53, and a portion of the clamping piece 523 is clamped between the head 532 of the bolt 53 and the assembly piece 511b. In this way, the upper bracket 52 can be positioned in all directions.

[0032] Next, with the lower bracket 51 and the upper bracket 52 connected by bolts, the engaging plate 521, which is part of the upper bracket 52, engages with the connecting pipe 3. On the other hand, the retaining plate 522, which is part of the upper bracket 52, retains the branch pipe 4.

[0033] Therefore, during the assembly of the fluid supply device 100, the reduction in workability caused by the rotation of the connecting pipe 3 or the branch pipe 4 can be suppressed. Furthermore, contact failures with other components or the base 1 caused by the rotation of the branch pipe 4 can be avoided. Moreover, since the locking plate 521 and the retaining plate 522 are integrally formed, the overall structure of the fluid supply device 100 can be simplified.

[0034] Furthermore, as described above, by forming a plurality of first notches 522a with extremely simple structure on the side of the retaining plate 522 facing the branch pipe 4, no other structure is required. Since the outer peripheral surface of the branch pipe 4 can be retained, the overall structure of the fluid supply device 100 can be simplified.

[0035] Furthermore, as described above, since the retaining plate 522 and the clamped piece 523 are respectively disposed on the upper side and the lower side of the engaging plate 521, the height difference between the first notch 522a formed in the retaining plate 522 and the second notch formed in the clamped piece 523 can be realized. As a result, the first notch 522a can engage with a location away from the lower end of the branch pipe 4, thereby more stably retaining the branch pipe 4.

[0036] (Assembly sequence of fluid supply device) Next, the assembly sequence of the fluid supply device 100 of this embodiment will be described.

[0037] The assembly sequence of the fluid supply device 100 in this embodiment includes the following steps. First, in step S1, the lower support 51 is fixed to the base 1, and the process proceeds to step S2. Next, in step S2, the connecting pipe 3 is placed in the groove 512a of the lower support 51, and the process proceeds to step S3. In step S3, the first notch 522a engages with the branch pipe 4, and the upper support 52 is placed on the lower support 51 (specifically, the assembly piece 511b) by clamping the connecting pipe 3 between the lower support 51 and the upper support 52, and the process proceeds to step S4. Next, in step S4, the upper support 52 is fixed to the lower support 51 via the locking bolt 53, and the process proceeds to step S5. Next, in step S5, the fluid supply line 2 is assembled.

[0038] (Effects and Effects) Next, the effects and effects of the above-described implementation will be explained.

[0039] The fluid supply device 100 of this embodiment includes a base 1, a fluid supply line 2 extending along the long side and facing the base 1, a connecting pipe 3 extending along the long side and disposed between the base 1 and the fluid supply line 2, a branch pipe 4 distributing process gas from the connecting pipe 3 to the fluid supply line 2, a lower bracket 51 supporting the connecting pipe 3 and fixed to the base 1, and an upper bracket 52 connected to the lower bracket 51 in a manner that engages with the connecting pipe 3 and holds the branch pipe 4.

[0040] As configured thus, the upper support 52 connected to the lower support 51 serves both to engage with the connecting pipe 3 and to hold the branch pipe 4. During the assembly of the fluid supply device 100, this configuration can suppress any reduction in workability caused by the rotation of the connecting pipe 3 or the branch pipe 4. As a result, the workability of assembling the fluid supply device 100 can be improved. Furthermore, contact failures with other components or the base 1 caused by the rotation of the branch pipe 4 can be avoided.

[0041] Furthermore, in this embodiment, a first notch 522a is formed on the side of the upper support 52 facing the branch pipe 4 to retain the outer peripheral surface of the branch pipe 4.

[0042] By forming a plurality of first notches 522a with extremely simple structure on the side of the upper support 52 opposite to the branch pipe 4, no other structure is required. Since the outer circumferential surface of the branch pipe 4 can be maintained, the overall structure of the fluid supply device 100 can be simplified.

[0043] Furthermore, in this embodiment, the lower support 51 and the upper support 52 are arranged to extend along the width direction, and the first notch 522a is formed by being spaced apart along the width direction.

[0044] By forming a plurality of first notches 522a spaced apart along the width direction by an upper support 52 extending along the width direction, since a plurality of branch pipes 4 can be held by a single upper support 52, the construction of the means of holding the branch pipes 4 can be simplified.

[0045] Furthermore, in this embodiment, the lower support 51 and the upper support 52 are connected by a bolt 53 whose axis extends along the height direction. One side of the upper support 52 has a clamping piece 523 that clamps between the head 532 of the bolt 53 and the lower support 51. The clamping piece 523 has a second notch that engages with the threaded portion 531 of the bolt 53.

[0046] As thus constructed, the upper support 52 can be positioned in all directions.

[0047] Furthermore, in this embodiment, a pair of clamped pieces 523 are formed at both ends of the upper support 52, and a plurality of first notches 522a are located between the pair of clamped pieces 523 in a top view.

[0048] By constructing it in this way, positional interference between the first notch 522a and the second notch can be avoided.

[0049] (Modified Example) Next, the fluid supply device 100 of the modified example will be described. Also, in the modified example, the points that are the same as those in the above embodiment are omitted, and the points that are different from those in the above embodiment will be mainly described.

[0050] In the above embodiment, the means of holding the branch pipe 4 is constituted by the first notch 522a formed in the holding plate 522, but this is not limiting. For example, the holding plate 522 may not be used, and it may be constituted by a holding claw (not shown) protruding from the locking plate 521 to the side of the branch pipe 4. In this case, the holding claw has the same function as the first notch 522a in the above embodiment, holding the outer peripheral surface of the branch pipe 4. Furthermore, a plurality of holding claws are formed by being spaced apart along the width direction.

[0051] The above describes the embodiments, but the above embodiments are only some applicable examples of the present invention, and are not intended to limit the technical scope of the present invention to the specific configuration of the aforementioned embodiments.

[0052] This case claims priority based on Japanese Patent Application No. 2024-0372477 filed with the Japan Patent Office on March 11, 2024, the entire contents of which are incorporated herein by reference. [Simplified Explanation of the Diagram]

[0007] Figure 1 is a perspective view of the fluid supply device of this embodiment. Figure 2 is a side view of the fluid supply device of this embodiment. Figure 3 is a schematic diagram showing the connection state of the first support and the second support. Figure 4 is a perspective view of the second support. Figure 5 shows the first support, the second support and the bolt in the connection state of the first support and the second support, (a) is a side view showing the first support, the second support and the bolt, and (b) is a top view showing the first support, the second support and the bolt.

Claims

1. A fluid supply device, comprising: a base; a fluid supply line extending along its long side and disposed opposite to the base; a connecting pipe extending along its long side and disposed between the base and the fluid supply line; a branch pipe supplying fluid from the connecting pipe to the fluid supply line and disposed between the connecting pipe and the fluid supply line; a first bracket supporting the connecting pipe and fixed to the base; and a second bracket connecting the branch pipe to the first bracket, the connecting pipe being clamped between the first bracket and the second bracket.

2. The fluid supply device as described in claim 1, wherein the side of the second support opposite to the branch pipe has a first notch for retaining the outer circumferential surface of the branch pipe.

3. The fluid supply device as described in claim 2, wherein the first support and the second support are arranged to extend in a width direction orthogonal to the long side direction, and the first notch is formed by being spaced apart along the width direction.

4. The fluid supply device as described in claim 2 or 3, wherein the first bracket and the second bracket are connected by bolts whose axes extend along a height direction orthogonal to the long side direction, and one side of the second bracket has a clamping portion that clamps between the head of the bolt and the first bracket, and the clamping portion has a second notch that engages with the threaded portion of the bolt.

5. The fluid supply device as described in claim 4, wherein a pair of the clamped portions are formed at both ends of the second support, and a plurality of the first notches are located between the pair of clamped portions in plan view.

6. The fluid supply device as described in claim 1, wherein the second support is provided with retaining claws on the side opposite to the branch pipe to retain the outer peripheral surface of the branch pipe.

7. The fluid supply device as described in claim 6, wherein the first support and the second support are arranged to extend in a width direction orthogonal to the long side direction, and the retaining claws are formed by being spaced apart in the width direction.

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