Method, system, and media related to system drift verification

Abstract

A method, system, and medium related to system drift verification are provided. In the method, a first measurement is performed with one or more modified measurement parameters to produce a first measurement result for the modified measurement parameters. In response to the measurement with the modified measurement parameters, a second measurement is performed with one or more modified measurement parameters to produce a second measurement result for the modified measurement parameters. The second measurement result is compared with the first measurement result. The modified measurement parameters differ from the original measurement parameters. The comparison between the first and second measurement results is used to verify system drift.

Description

[Technical Field]

[0001] This invention relates to a testing technique, and more particularly to a method, system, and medium related to system drift verification. [Previous Technology]

[0002] A network analyzer is an essential instrument for characterizing the behavior of electronic or semiconductor devices and components in radio frequency (RF), microwave, or other fields. The analyzer measures S-parameters, which describe how the device under test (DUT) reflects and transmits signals. To ensure measurement accuracy, the analyzer requires a calibration process for faulty networks. After calibration, the user can measure the DUT. However, after a period of measurement, failed measurement results may occur. Failed measurement results can have many causes, such as poor contact, device damage, operator error, or system drift.

[0003] In most cases, failed measurement results are relatively likely to be caused by "system drift," so users usually want to check for "system drift" first. However, traditional drift verification techniques can be time-consuming, requiring periodic repetition of measurements and system drift compensation of the measurement data. A more efficient and automated drift verification method is needed to minimize the time and effort required while maintaining measurement accuracy. [Summary of the Invention]

[0004] This invention provides a method, system, and media related to system drift verification.

[0005] According to one or more example embodiments of this disclosure, a system drift verification method in a probe system is implemented by a controller connectable to a signal generation and analysis component, and the signal generation and analysis component is connectable to the device under test (DUT) through a probe component. The method includes: performing a first measurement with at least one modified measurement parameter to generate a first measurement result with at least one modified measurement parameter; reacting to the measurement with at least one modified measurement parameter, performing a second measurement with at least one modified measurement parameter to generate a second measurement result with at least one modified measurement parameter; and comparing the second measurement result with the first measurement result. The at least one modified measurement parameter differs from at least one original measurement parameter, and at least one original measurement parameter is pre-configured in the signal generation and analysis component. The comparison result of the first measurement result and the second measurement result is used to verify drift.

[0006] According to one or more example embodiments of this disclosure, the operation method of the probe system is applicable to a controller that can connect to a signal generation and analysis component, and the signal generation and analysis component can be connected to a device under test (DUT) through the probe component. The operation method includes: receiving a selection operation; presenting a comparison result of a first measurement result and a second measurement result; and providing configured boundaries to verify the comparison result. A first measurement is performed with at least one modified measurement parameter, and the selection operation is used to replace at least one original measurement parameter with at least one modified measurement parameter, and the at least one modified measurement parameter is different from at least one original measurement parameter. At least one original measurement parameter is pre-configured in the signal generation and analysis component. The first measurement result is generated in response to the first measurement with at least one modified measurement parameter, and the second measurement result is generated in response to the second measurement with at least one modified measurement parameter, and the comparison result of the first measurement result and the second measurement result is used to verify drift. The configured boundaries are displayed on a display.

[0007] According to one or more example embodiments of this disclosure, a probe system configured to test a device under test (DUT) located on a wafer is provided. The probe system includes system drift verification. The probe system includes a chuck, a probe assembly, a signal generation and analysis assembly, and a controller. The chuck is defined and configured to support a support surface of the wafer including the DUT. The probe assembly, defining the probe tip, is configured to physically contact the surface of the DUT. The signal generation and analysis assembly is configured to provide at least one of a test signal to the DUT or receive a result signal from the DUT. The controller is connected to the signal generation and analysis assembly and programmed to perform the above-described system drift verification method.

[0008] According to one or more example embodiments of the present disclosure, a non-transitory computer-readable storage medium includes computer-readable instructions that, when executed, instruct a probe system to perform the method.

[0009] In order to make the above features and advantages of the present invention more apparent and understandable, specific embodiments are described below, and detailed descriptions are given in conjunction with the accompanying drawings.

Implementation Method

[0011] Reference will now be made in detail to the existing preferred embodiments disclosed herein, examples of which are illustrated in the accompanying drawings. Where possible, the same reference numerals are used in the figures and description to refer to the same or similar parts.

[0012] FIG1 is a schematic diagram illustrating a probe system 10 according to an exemplary embodiment of the present disclosure. Referring to FIG1, the probe system 10 includes (but is not limited to) one or more probe assemblies 20, a clamp 30, a positioning assembly 50, a controller 60, a signal generation and analysis assembly 70, and an optical imaging device 80.

[0013] The probe assembly 20 includes (but is not limited to) probes 22. Probes 22 have one or more probe tips 24 for probing a device under test (DUT) 44. In one embodiment, the DUT 44 is a test semiconductor device, such as a wafer, integrated circuit (IC), or printed circuit board (PCB). The test semiconductor device includes an unpackaged semiconductor device having one or more pads 48 configured to be mechanically and electrically contacted by the probe tips 24. In one embodiment, the DUT 44 may be a calibration standard (circuit), another circuit, component, or device. In one embodiment, the probe tips 24 are configured to physically contact the surface of the DUT 44.

[0014] The positioning component 50 may be a robotic arm, a height adjustment table, a slide rail, a rotary table, a screw, or a combination of various types of mechanical components, capable of driving the connecting element (such as the probe component 20) mounted thereon to lift, lower, move, or rotate, thereby enabling the probe 22 to lift, lower, move, and / or rotate. In one embodiment, the positioning component 50 is electrically driven by a controller 60. For example, the controller 60 transmits a command, which drives the positioning component 50 to lift, lower, move, or rotate the probe component 24 or the probe 22.

[0015] The chuck 30 has and defines a support surface 32, allowing the substrate 40 embedded with the device under test 44 to be placed directly on the chuck 30. In one embodiment, the support surface of the chuck 30 is configured to support a wafer including the device under test 44.

[0016] The controller 60 (e.g., having processing circuitry) may be hardware or circuitry, such as a computer, workstation, tablet computer, smartphone, server, wearable device, smart assistive device, central processing unit (CPU), microcontroller, programmable controller, application-specific integrated circuit (ASIC), chip, or other similar components or combinations thereof. The controller 60 may call and execute one or more pieces of code or computer-readable instructions from memory (not shown) to implement the methods in the embodiments of this disclosure.

[0017] In one embodiment, the probe assembly 20 is used to establish a connection with the controller 60 to communicate test information.

[0018] In one embodiment, the memory may include a computer-readable storage medium in a volatile or non-volatile form. The memory may be removable, non-removable, or a combination of both. Example memories include solid-state memory, hard disks, optical disk drives, etc. The controller 60 may call and execute one or more pieces of code or computer-readable instructions from the memory to implement the methods in the embodiments of this disclosure.

[0019] The signal generation and analysis component 70 is connected to the probe component 20 and the controller 60. The signal generation and analysis component 70 may be a vector network analyzer (VNA) or other instruments used to verify parameters, such as scattering parameters (S-parameters), admittance parameters (Y-parameters), mixing parameters (h-parameters / g-parameters), transmission parameters (ABCD parameters), impedance parameters (Z-parameters), or scattering-transmission parameters (T-parameters). The signal generation and analysis component 70 may be connected to the device under test 44 via one or more probe components 20 through cables or connectors. In one embodiment, the signal generation and analysis component 70 is configured to transmit test signals and receive measurement signals through one or more probes 22.

[0020] In one embodiment, the controller 60 may transmit one or more commands or instructions to the signal generation and analysis component 70, which are related to driving or triggering one or more functions of the signal generation and analysis component 70 and / or transmitting one or more parameters to configure the signal generation and analysis component 70. In one embodiment, these commands or instructions are implemented by running or executing corresponding program code or computer-readable instructions.

[0021] The optical imaging device 80 may be an optical inspection device. The optical imaging device 80 is configured to collect optical images of one or more regions of the probe system 10. In one embodiment, the optical imaging device 80 is configured to detect defects on the device under test 44. The optical imaging device 80 may use various optical techniques to identify various defects that may affect the function and performance of the device under test 44.

[0022] The circuitry can also be organized to create a complete system with the device under test (DUT) 44 to evaluate the DUT 44. For example, if the DUT 44 is a microprocessor, the probe system 10 may include supporting circuitry from a personal computer motherboard. Upon power-up, the DUT 44 will experience an electrical environment similar to its end-use environment. This allows system drift testing to be performed on the unpackaged DUT device. Using a probe system with such programmable modes in a wafer fabrication test environment allows for self-testing.

[0023] To facilitate understanding of the operation process of the embodiments disclosed herein, several embodiments will be provided below to describe the usage flow of the probe system 10 in the embodiments disclosed herein. The methods described in the embodiments of this disclosure will be described together with each device, element, and module in the probe system 10. Each step of the method may be adjusted according to the actual implementation scenario, and this disclosure is not limited thereto.

[0024] FIG2 is a flowchart illustrating a drift verification method according to an exemplary embodiment of the present disclosure. Referring to FIG2, the controller 60 performs a first measurement via the signal generation and analysis component 70 and the probe component 20 with at least one modified measurement parameter to generate a first measurement result of at least one modified measurement parameter (step S210). Specifically, the probe component 20 may contact the device under test to perform the measurement of the modified measurement parameter. Alternatively, the measurement of the modified measurement parameter may be performed over-the-air (OTA). The measurement in step S210 is a baseline measurement, serving as a reference or golden sample for future or subsequent measurements. The type of modified measurement parameter may include any or a combination of frequency range, start frequency of the frequency range, stop frequency of the frequency range, frequency point, number of frequency points, and enabling or disabling drift correction. The frequency point is located within the frequency range. That is, the frequency of the frequency point is not less than the start frequency and not greater than the stop frequency. The first measurement result of the modified measurement parameter may be, for example, one or more S-parameters. In one embodiment, the first measurement result may be stored as a drift reference dataset. The drift reference dataset may also include modified measurement parameters.

[0025] However, at least one modified measurement parameter differs from at least one original measurement parameter. One or more original measurement parameters are pre-configured in the signal generation and analysis component 70. That is, the original measurement parameters are preset measurement parameters of the signal generation and analysis component 70.

[0026] In one embodiment, the controller 60 may perform measurements using one or more original measurement parameters during the calibration process of the signal generation and analysis component 70. The calibration process is used to eliminate errors in vector network analyzers, cables, connectors, and / or adapters. This ensures that measurements using the original measurement parameters are error-free. That is, after the calibration process, the original measurement parameters are pre-configured in the signal generation and analysis component 70. During the calibration process, the device under test 44 may be one or more calibration standards (circuits). Typical calibration kits include short circuit, open circuit, load, and pass-through (Thru). The calibration method may be SOLT (Short-Open-Load-Pass-Thru) or TRL (Pass-Reflection-Path). The controller 60 or the signal generation and analysis component 70 may detect the termination of the calibration process and perform measurements using one or more modified measurement parameters after the calibration process has terminated. That is, one or more measurement parameters used in step S210 are different from one or more measurement parameters configured in the signal generation and analysis component 70 after the calibration process, and the calibration process is the process prior to the measurement in step S210.

[0027] Referring to FIG. 2, the controller 60, via the signal generation and analysis component 70 and the probe component 20, performs a second measurement using at least one modified measurement parameter in response to the second measurement using at least one modified measurement parameter, thereby generating a second measurement result using at least one modified measurement parameter (step S220). Specifically, the probe component 20 may contact the same device under test as the device under test used in step S210 when measuring with the same modified measurement parameters. Alternatively, the measurement using the same modified measurement parameters may be performed over the air (OTA) as in step S210. After step S210, system drift may exist, and the same modified measurement parameters will be used for drift verification. The second measurement result using the modified measurement parameters may be, for example, one or more S-parameters. In one embodiment, the second measurement result may be stored as a drift dataset. The drift dataset may also include the modified measurement parameters.

[0028] In the first embodiment, the modified measurement parameters may include corrections that disable system drift verification, while the original measurement parameters may include corrections that enable system drift verification. Factors such as temperature variations, component aging, and mechanical interference can cause performance variations. These performance variations can cause measurement drift (referred to as system drift or drift), affecting the accuracy and reliability of the measurement. The signal generation and analysis component 70 provides a drift correction function. The controller 60 can calculate mathematical corrections to the measurement data of the signal generation and analysis component 70 to generate error terms or compensation data for drift compensation. The correction function will use the error terms or compensation data to correct the measurement data, thereby obtaining correction data corresponding to the measurement data. Drift-enabled correction means that the correction function of the signal generation and analysis component 70 will be applied, started, or triggered when drift is detected. On the other hand, drift-disabled correction means that the correction function of the signal generation and analysis component 70 is terminated, disabled, prohibited, or blocked, and will not be applied, started, or triggered when drift is detected.

[0029] Apart from the correction to prevent drift, the values ​​of other types of measurement parameters used in steps S210 and S220 may be the same as the values ​​of other types of original measurement parameters. For example, FIG3 is a schematic diagram illustrating measurement parameters according to an example embodiment of this disclosure. Referring to FIG3, the frequency range from the start frequency to the stop frequency used in steps S210 and S220 is the same as the frequency range from the start frequency to the stop frequency used in the original measurement parameters. The frequency points and the number of frequency points (e.g., N is a positive integer) used in steps S210 and S220 are the same as the frequency points and the number of frequency points (e.g., N is a positive integer) used in the original measurement parameters. However, due to the correction to prevent system drift verification, a certain number of scans will be reduced compared to the correction to enable system drift verification. For example, the signal generation and analysis component 70 may apply a dual-port error correction algorithm even on a single-port dataset. When the user wants to measure exactly S11 after dual-port calibration, the signal generation and analysis component 70 needs to measure all original S parameters to complete a corrected S11. This is how the calibration function works; even if only user requirement S11 is met, all four S-parameters should be measured. If calibration with system drift verification disabled is applied, the measurement time in steps S210 and S220 will be reduced by decreasing the number of measurement scans compared to calibration with system drift verification enabled.

[0030] In the second embodiment, the modified measurement parameters include one or more frequency points for measurement, wherein the number of frequency points in the modified measurement parameters is less than the number of frequency points in the original measurement parameters. For example, FIG4 is a schematic diagram illustrating measurement parameters according to an exemplary embodiment of the present disclosure. Referring to FIG4, the number of frequency points used in steps S210 and S220 (e.g., X is a positive integer less than N, where N is a positive integer) is less than the number of frequency points used in the original measurement parameters (e.g., N is a positive integer). Furthermore, one or more frequency points used in steps S210 and S220 may be different from one or more frequency points used in the original measurement parameters. Apart from the frequency points, the frequency range from the start frequency to the stop frequency used in steps S210 and S220 is the same as the frequency range from the start frequency to the stop frequency used in the original measurement parameters. In addition, a correction enabling system drift verification is applied in steps S210 and S220. However, due to the fewer frequency points, the measurement time will be reduced.

[0031] In a third embodiment, the modified measurement parameters may include a drift-disabling correction, while the original measurement parameters may include a drift-disabling correction. Furthermore, the modified measurement parameters also include one or more frequency points for measurement, wherein the number of frequency points in the modified measurement parameters is less than the number of frequency points in the original measurement parameters. For example, FIG4 is a schematic diagram illustrating measurement parameters according to an example embodiment of this disclosure. Referring to FIG4, the number of frequency points used in steps S210 and S220 (e.g., X is a positive integer less than N, where N is a positive integer) is less than the number of frequency points used in the original measurement parameters (e.g., N is a positive integer). Furthermore, one or more frequency points used in steps S210 and S220 may differ from one or more frequency points used in the original measurement parameters. Apart from the frequency points, the frequency range from the start frequency to the stop frequency used in steps S210 and S220 is the same as the frequency range from the start frequency to the stop frequency used in the original measurement parameters. Furthermore, a system drift-disabling verification correction is applied in steps S210 and S220. However, due to the fewer frequency points and the system drift-disabling verification correction, the measurement time will be reduced.

[0032] In the fourth embodiment, the modified measurement parameters may include disabling drift correction, while the original measurement parameters may include enabling drift correction. The modified measurement parameters also include one or more frequency points for measurement, wherein the number of frequency points for the modified measurement parameters is less than the number of frequency points for the original measurement parameters. Furthermore, the modified measurement parameters also include a first frequency range for measurement, wherein the first frequency range is less than the second frequency range of the original measurement parameters.

[0033] For example, FIG5 is a schematic diagram illustrating measurement parameters according to an exemplary embodiment of the present disclosure. Referring to FIG5, the frequency range (i.e., the first frequency range) of the measurement parameters used in steps S210 and S220 is different from the frequency range (i.e., the second frequency range) of the original measurement parameters. The starting frequency of the frequency range of the measurement parameters used in steps S210 and S220 is different from the starting frequency of the frequency range of the original measurement parameters, and the stopping frequency of the frequency range of the measurement parameters used in steps S210 and S220 is different from the stopping frequency of the frequency range of the original measurement parameters. Furthermore, the number of frequency points used in steps S210 and S220 (e.g., Y is a positive integer less than N, where N is a positive integer) is less than the number of frequency points used in the original measurement parameters (e.g., N is a positive integer). Furthermore, one or more frequency points used in steps S210 and S220 may be different from one or more frequency points used in the original measurement parameters. Furthermore, correction for system drift verification is prohibited in steps S210 and S220. Due to the smaller frequency range, fewer frequency points, and the prohibition of system drift verification correction, the measurement time will be reduced.

[0034] In one embodiment, the controller 60 may replicate a parameter set. The parameter set includes one or more original measurement parameters of the signal generation and analysis component 70. For example, the parameter set includes a frequency range, a start frequency of the frequency range, a stop frequency of the frequency range, frequency points, the number of frequency points, and any one or a combination of enabling or disabling drift correction. The controller 60 may replace the original measurement parameters in the parameter set with at least one modified measurement parameter to generate a new parameter set including the modified measurement parameters. For example, in a second or third embodiment, one or more frequency points will be replaced. For example, in a fourth embodiment, the start frequency or stop frequency will be replaced. The controller 60 may then transmit the new parameter set to the signal generation and analysis component 70. Therefore, the signal generation and analysis component 70 may perform measurements using the modified measurement parameters.

[0035] In one embodiment, the number of scans measured using at least one modified measurement parameter is reduced compared to the number of scans measured using at least one original measurement parameter. This reduction in the number of scans is achieved by disabling drift correction, reducing the number of frequency points, and / or reducing the frequency range.

[0036] Referring to FIG. 2, the controller 60 compares the second measurement result with the first measurement result (step S230). Specifically, the comparison result of the first measurement result and the second measurement result is used to verify drift. The controller 60 may check the difference between the first measurement result and the second measurement result. The comparison result may be the amplitude difference between the first measurement result and the second measurement result. The controller 60 may configure boundaries or thresholds for the difference to verify whether the system is drifting. For example, if the amplitude difference is within the configured boundaries, the controller 60 will determine that drift or system drift exists or has been detected. If the amplitude difference is not within the configured boundaries, the controller 60 will determine that drift or system drift does not exist or has not been detected. In one embodiment, the absolute value of the measurement result is used to determine the correctness of the first and second measurement results. If the first measurement result is incorrect, the amplitude difference will not be used for comparison with the configured boundaries.

[0037] It should be noted that when a system drift is detected, the signal generation and analysis component 70 executes a correction function because system drift verification correction is enabled. However, when a system drift is detected, the signal generation and analysis component 70 does not execute a correction function because system drift verification correction is disabled.

[0038] In a fifth embodiment, the controller 60 may transmit a movement command for the detection component 20 to the positioning component 50. The movement command may be related to lifting, lowering, or moving the design by a distance and / or rotating the design by an angle. The positioning component 50 will lift, lower, move, and / or rotate the detection component 20 according to the movement command. In one embodiment, the controller 60 may transmit a movement command for the chuck 30 to the chuck translation structure. The chuck translation structure will lift, lower, move, and / or rotate the chuck 30 according to the movement command. The chuck translation structure includes actuators, electric actuators, stepper motors, piezoelectric actuators, rack and pinion assemblies, ball screw and nut assemblies, linear actuators, linear motors, and / or rotary actuators.

[0039] For example, FIG6 is a schematic diagram illustrating a movement operation according to an exemplary embodiment of the present disclosure. Referring to FIG6, the device under test 44 may be a first die 441 and a second die 442. A movement command is used to move the probe assembly 20 from a position where the probe tip 24 contacts the first die 441 to a position where the probe tip 24 contacts the second die 442.

[0040] It should be noted that the movement of the probe component 20 is performed in response to measurements using modified measurement parameters. For example, measurements using modified measurement parameters are performed when a movement command is transmitted. Drift verification is performed when the probe 22 is raised in the air. Therefore, the movement time interval is used to check for system drift to save time. In one embodiment, the modified measurement parameters of the first, second, third, or fourth embodiment are applied during the movement of the probe component 20.

[0041] FIG7 is a flowchart illustrating the operation method of the probe system 10 according to an exemplary embodiment of the present disclosure. Referring to FIG7, the controller 60 receives a selection operation (step S710). Specifically, as described in step S210, a measurement is performed using modified measurement parameters. The selection operation is used to replace the original measurement parameters with modified measurement parameters, and the modified measurement parameters are different from the original measurement parameters. As described above, the system drift verification correction configuration, frequency range, start frequency, stop frequency, or frequency point of the modified measurement parameters are different from the original measurement parameters, and the original measurement parameters are pre-configured in the signal generation and analysis component 70. The controller 60 may provide verification options related to the foregoing first, second, third, fourth, and / or fifth embodiments on a user interface. The description of the modified measurement parameters of the first, second, third, fourth, and / or fifth embodiments will be omitted from the description of the foregoing first, second, third, fourth, and / or fifth embodiments by referring to the description of the foregoing first, second, third, fourth, and / or fifth embodiments.

[0042] An input device (not shown, for example, a keyboard, mouse, or touch panel) receives a selection of one of the verification options on the user interface. The selection operation may also include the selection of a modified measurement parameter value, such as a start frequency, stop frequency, or frequency point.

[0043] Then, based on the selection operation, the measurement is performed using the modified measurement parameters as described in steps S210 and S220.

[0044] The controller 60 presents a comparison of the first measurement result and the second measurement result (step S720). Specifically, the first measurement result is generated in response to measurement using modified measurement parameters, and the second measurement result is generated in response to measurement using modified measurement parameters. Furthermore, the comparison of the first and second measurement results is used to verify system drift. For example, the amplitude difference between the first and second measurement results will be presented, or the detection of system drift will be presented. In one embodiment, a display or speaker (not shown) may be used to present the comparison of the first and second measurement results.

[0045] The controller 60 provides configured boundaries to verify the comparison results (step S730). Specifically, the configured boundaries are displayed on the display. As described above, the configured boundaries can be used to verify whether the system is drifting. For example, the comparison result is the amplitude difference between the first measurement result and the second measurement result, and if the amplitude difference is within the configured boundaries, system drift is detected. Furthermore, the comparison result and the configured boundaries can be displayed together on the display so that the user can see the verification result of system drift.

[0046] The implementation details of some steps in Figure 7 have been described in detail in the foregoing embodiments and implementation methods. Therefore, these details will not be repeated below. In addition to being implemented in circuit form, the steps and implementation details in the embodiments of this disclosure can also be implemented in software form by a processing unit. The embodiments of this disclosure are not limited thereto.

[0047] Referring to Figures 1 to 7. Based on the above description, this disclosure also provides a non-transitory computer-readable storage medium. A non-transitory computer-readable storage medium includes one or more computer-executable instructions. The computer-executable instructions are capable of directing the probe system 10 to perform the methods of any of the above embodiments. When present, a computer-readable storage medium may also be referred to herein as a non-transitory computer-readable storage medium. This non-transitory computer-readable storage medium may include, define, contain, and / or store computer-executable instructions, programs, and / or code. These computer-executable instructions may instruct the probe system 10 and / or its controller 60 to perform any suitable portion or subset of the methods of the above embodiments. Examples of such non-transitory computer-readable storage media include CD-ROMs, magnetic disks, hard disks, flash memory, etc.

[0048] Based on the above, the methods, systems, and media related to system drift verification provided in this disclosure replace measurement parameters, such as prohibiting system drift verification correction, start frequency, stop frequency, or frequency points, to reduce the number of scans, reduce frequency points, or use a shift time interval. Thus, the embodiments of this disclosure can effectively reduce the measurement time for drift verification and also improve the efficiency of the testing process.

[0049] Although the present invention has been disclosed above by way of embodiments, it is not intended to limit the present invention. Anyone skilled in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims. [Simplified Explanation of the Diagram]

[0010] Figure 1 is a schematic diagram illustrating a probe system according to an exemplary embodiment of the present disclosure. Figure 2 is a flowchart illustrating a system drift verification method according to an exemplary embodiment of the present disclosure. Figure 3 is a schematic diagram illustrating measurement parameters according to an exemplary embodiment of the present disclosure. Figure 4 is a schematic diagram illustrating measurement parameters according to an exemplary embodiment of the present disclosure. Figure 5 is a schematic diagram illustrating measurement parameters according to an exemplary embodiment of the present disclosure. Figure 6 is a schematic diagram illustrating a movement operation according to an exemplary embodiment of the present disclosure. Figure 7 is a flowchart illustrating an operation method according to an exemplary embodiment of the present disclosure.

Claims

1. A method for verifying system drift in a probe system, implemented by a controller (60) connectable to a signal generation and analysis assembly (70), the signal generation and analysis assembly (70) being connectable to a device under test (DUT) (44) via a probe assembly (20), the method comprising: A first measurement is performed with at least one modified measurement parameter to produce a first measurement result for the at least one modified measurement parameter, wherein the at least one modified measurement parameter is different from at least one original measurement parameter, and the at least one original measurement parameter is pre-configured in the signal generation and analysis component (70); in response to the measurement with the at least one modified measurement parameter, a second measurement is performed with the at least one modified measurement parameter to produce a second measurement result for the at least one modified measurement parameter; and the second measurement result is compared with the first measurement result, wherein the comparison result of the first measurement result and the second measurement result is used to verify a system drift.

2. The method as described in claim 1, wherein the at least one modified measurement parameter includes disabling corrections for a system drift verification, and the at least one original measurement parameter includes enabling corrections for the system drift verification.

3. The method as described in claim 2, wherein the at least one modified measurement parameter further includes at least one frequency point for measurement, wherein the number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter.

4. The method as described in claim 2, wherein the at least one modified measurement parameter further includes a first frequency range for measurement, wherein the first frequency range is smaller than a second frequency range of the at least one original measurement parameter.

5. The method of claim 1, wherein the at least one modified measurement parameter includes at least one frequency point for measurement, wherein the number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter.

6. The method as described in claim 1, further comprising: A movement command is transmitted for the detection component (20), wherein the movement of the detection component (20) is performed in response to the measurement with the at least one modified measurement parameter according to the movement command.

7. The method as claimed in claim 1, wherein the first or second measurement with the at least one modified measurement parameter comprises: Copy a parameter set, wherein the parameter set includes the at least one original measurement parameter of the signal generation and analysis component (70); The measurement parameters in the parameter set are replaced with the at least one modified measurement parameter to generate a new parameter set including the at least one modified measurement parameter; and the new parameter set is transmitted.

8. The method of claim 1, wherein the comparison result of the first measurement result and the second measurement result is the amplitude difference between the first measurement result and the second measurement result, and the comparison of the second measurement result with the first measurement result includes: The system drift is determined to be detected based on the amplitude difference being within the configured boundaries; And in response to the amplitude difference not being within the configured boundaries, it was determined that no system drift was detected.

9. The method of claim 1, wherein the number of sweeps measured using the at least one modified measurement parameter is reduced relative to the number of sweeps measured using the at least one original measurement parameter.

10. A method of operating a probe system (10) suitable for a controller (60) connectable to a signal generation and analysis component (70), the signal generation and analysis component (70) being connectable to a device under test (44) via a probe component (20), and the method of operating comprising: The system receives a selection operation, wherein a measurement is performed with at least one modified measurement parameter, the selection operation being used to replace at least one original measurement parameter with the at least one modified measurement parameter, the at least one modified measurement parameter being different from the at least one original measurement parameter, and the at least one original measurement parameter being pre-configured in the signal generation and analysis component (70); presents a comparison result of a first measurement result and a second measurement result, wherein the first measurement result is generated in response to a first measurement with the at least one modified measurement parameter, the second measurement result is generated in response to a second measurement with the at least one modified measurement parameter, and the comparison result of the first measurement result and the second measurement result is used to verify a system drift; and provides a configured boundary to verify the comparison result, wherein the configured boundary is displayed on a display.

11. The method of operation as described in claim 10, wherein the at least one modified measurement parameter includes a correction that disables a system drift verification, and the at least one original measurement parameter includes a correction that enables the system drift verification.

12. The method of operation as described in claim 10, wherein the at least one modified measurement parameter further includes at least one frequency point for measurement, wherein the number of at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter; or the at least one modified measurement parameter further includes a first frequency range for measurement, wherein the first frequency range is less than the second frequency range of the at least one original measurement parameter.

13. The method of operation as described in claim 10, wherein the at least one modified measurement parameter includes at least one frequency point for measurement, wherein the number of at least one frequency points of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter.

14. The operating method as described in claim 10 further includes: A movement command is transmitted to a detection component (20), wherein the movement of the detection component (20) is performed in response to a measurement with at least one modified measurement parameter.

15. A probe system (10) configured to test a device under test (44) located on a wafer, the probe system (10) including a system drift verification and comprising: A chuck (30) is defined and configured to support a support surface of a wafer including the device under test (DUT) (44); a probe assembly (20) is defined and configured to physically contact a probe tip (24) on the surface of the device under test (44); and a signal generation and analysis assembly (70) is configured to supply at least one of a test signal to the device under test (44) and receive a result signal from the device under test (44). And a controller (60) connected to the signal generation and analysis component (70) and programmed to perform the method described in request 1.

16. The probe system (10) as claimed in claim 15, wherein the probe system (10) further comprises: A positioning component (50) configured to selectively change the relative orientation between a probe tip (24) and a clamp (30); and an optical imaging device (80) configured to collect an optical image of at least one region of the probe system (10); wherein the signal generation and analysis component (70) is a network analyzer (70).

17. A non-transitory computer-readable storage medium comprising a computer-readable instruction that, when executed, instructs a probe system (10) to perform the method as described in claim 1.

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