Apparatus for processing substrate

Abstract

This invention relates to a substrate processing apparatus capable of discharging liquefied liquid, comprising: a reaction tube section having a reaction space inside which a plurality of substrates are processed and an open lower portion; a carrier section having a carrier section formed inside the reaction tube section and wherein the plurality of substrates are stacked vertically; a carrier support section supporting the carrier section and raising and lowering the carrier section such that the carrier section is located in the reaction space of the reaction tube section; the carrier support section having an inclined portion on at least a portion of any one side thereon, so as to discharge the liquefied liquid in the reaction space downwards.

Description

[Technical Field]

[0001] The present invention relates to a substrate processing apparatus, and more specifically, to a substrate processing apparatus for improving emission performance. [Previous Technology]

[0002] A substrate processing apparatus is used to process substrates such as wafers, wherein a crystal boat is raised in a loading area to load a predetermined number of substrates in order to perform substrate processing, or the crystal boat is lowered to the loading area in order to unload substrates that have undergone substrate processing.

[0003] More specifically, the substrate processing apparatus includes: a processing unit that forms a reaction space that contains the substrate and is isolated from the outside; a gas supply unit that supplies process gases such as raw material gas, reaction gas and carrier gas into the internal space of the processing unit to regulate the pressure inside the processing unit; and an exhaust unit that discharges the supplied process gases to regulate the pressure inside the processing unit.

[0004] On the other hand, during the substrate processing process of the substrate processing apparatus described above, residues on the surface of the substrate or film may cause a decrease in yield, so there is a need for the development of a method to remove residues from the surface of the substrate or film.

[0005] As a method for removing residues from the surface of such substrates or films, a method is being used to remove residues and process substrates by rapidly changing the temperature and pressure in the reaction space inside the processing unit. This conventional substrate processing apparatus has a vertical length. In order to insulate the loading area and the reaction space under the condition of relatively low temperature at the lower end, a heat insulation barrel or heat insulation plate is arranged at the lower part of the crystal boat. As the crystal boat rises, the temperature of the cover flange side that seals the reaction space drops sharply, thereby causing a problem of partial liquefaction of the process gas.

[0006] In particular, conventional substrate processing apparatus uses water vapor (H2O) during the process. As a result of the low temperature on the lower end cover flange side, water liquefies on the cover flange and accumulates. Because the water generated at this time may cause corrosion of the internal structure or flow into the drain tank, it may damage the drain tank. [Summary of the Invention]

[0007] Problems to be Solved: The present invention is intended to solve various problems including those described above, and its object is to provide a substrate processing apparatus that, through structural improvements, prevents condensation inside the reaction space and the inside of the cover flange side, effectively handles liquids such as condensation, and prevents corrosion of the internal structure. However, such problems are exemplary and should not be construed as limiting the scope of the present invention.

[0008] Means for Solving the Problem A substrate processing apparatus according to the present invention for solving the above-mentioned problem includes: a reaction tube section having a reaction space for processing a plurality of substrates formed inside and an open lower part; a carrier section having a carrier section formed inside the reaction tube section and having the plurality of substrates stacked vertically; and a carrier support section supporting the carrier section and raising and lowering the carrier section so that the carrier section is located in the reaction space of the reaction tube section; wherein at least a portion of any side of the carrier support section may be formed with an inclined portion to discharge liquid liquefied in the reaction space downward.

[0009] According to an embodiment of the present invention, the boat support portion may include: a heat-insulating cover formed in the lower part of the boat portion and forming a heat-insulating area inside to prevent heat loss in the lower region of the reaction space near the outside of the boat support portion in the reaction space; a rotating flange disposed in the lower part of the heat-insulating cover and connected to a drive portion formed on the lower side of the boat support portion, rotating through the power of the drive portion and transmitting the rotational power of the drive portion to the heat-insulating cover and the boat portion; a cover flange formed below the rotating flange, engaging the drive portion at the center and supporting the entire boat support portion for lifting and lowering drive; and a sealing plate engaged on the upper part of the cover flange to protect the upper surface of the cover flange from corrosive gases.

[0010] According to an embodiment of the present invention, the boat support includes a heat insulation cover, which is formed in the lower part of the boat and forms a heat insulation area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support in the reaction space; wherein the heat insulation cover may be formed to gradually decrease from the center of the lower part of the heat insulation cover to the edge.

[0011] According to an embodiment of the present invention, the boat support includes a heat-insulating cover, which is formed in the lower part of the boat and forms a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support in the reaction space; wherein the heat-insulating cover may form the inclined portion, which is formed by at least a portion of the lower part of the heat-insulating cover having a first inclination.

[0012] According to an embodiment of the present invention, the boat support includes a rotating flange, which is connected to a drive portion formed on the lower side of the boat support. The rotating flange is rotated by the power of the drive portion and the rotational power of the drive portion is transmitted to the boat support. The rotating flange may include: an upper flange portion, which is formed by gradually decreasing from the center of the upper surface of the rotating flange to the edge portion; a plurality of through portions, which are formed radially and equally spaced through the upper and lower portions with reference to the center of the rotating flange; and a side discharge portion, which is formed by penetrating the sidewall portion of the flange from the inner side portion to the outer side portion and is formed at a position corresponding to the upper flange portion. The sidewall portion of the flange surrounds the periphery of the rotating flange and is higher than the upper flange portion.

[0013] According to an embodiment of the present invention, the boat support includes a rotating flange, which is connected to a drive unit formed on the lower side of the boat support. The rotating flange is rotated by electricity from the drive unit and the rotational power of the drive unit is transmitted to the boat support. The rotating flange may form the inclined portion, which is formed by at least a portion of the upper surface of the rotating flange having a second inclination.

[0014] According to one embodiment of the present invention, the boat support includes a sealing plate, which is coupled to the upper surface of the cover flange of the boat support to protect the upper surface of the cover flange from corrosive gases and to support and drive its lifting and lowering. The sealing plate includes: a sealing upper portion, at least a portion of which is formed by having the inclined portion on the upper surface of the sealing plate; and a sealing through portion formed at a point spaced a predetermined distance from the center of the sealing plate and penetrating through the sealing plate.

[0015] According to an embodiment of the present invention, the sealing through portion may be formed as a hole portion or a slit portion, wherein the hole portion is a hole shape formed with the center of the sealing plate as a reference and radially through the upper and lower portions at equal intervals, and the slit portion is a through portion formed as a slit shape.

[0016] According to an embodiment of the present invention, the sealing upper part may be formed by gradually lowering from the center of the sealing upper part to the sealing through part, and by gradually lowering from the edge of the sealing upper part to the sealing through part.

[0017] According to an embodiment of the present invention, the sealing plate may form the inclined portion, wherein at least a portion of the sealing surface of the sealing plate has a third inclination and another portion has at least a fourth inclination.

[0018] According to an embodiment of the present invention, the boat support includes a cover flange, which is joined at its center to the drive portion formed on the lower side of the boat support, and supports and drives the boat support to move up and down. The cover flange may include: a sealing mounting portion, on which a sealing plate of the boat support is mounted on the upper surface of the cover flange; a drive joining portion, formed vertically through the center of the cover flange to engage the drive portion; a discharge guide groove portion, a ring-shaped groove portion formed with the center of the cover flange as the center point and a predetermined distance as the radius; and a lower discharge portion, formed vertically through the cover flange at at least one point of the discharge guide groove portion.

[0019] Effects of the Invention According to a portion of the embodiments of the present invention configured as described above, the following effects are achieved: The formation of an inclined portion for downward flow of liquid in at least a portion prevents corrosion of the internal structure due to the generated liquid, and the flow of liquefied liquid to the washer prevents damage to the drain tank during the cleaning process. Of course, the scope of the invention should not be limited by these effects.

Implementation Method

[0021] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0022] The embodiments of the present invention are provided to more fully explain the invention to those skilled in the art. Various variations are possible with respect to the following embodiments, and the scope of the invention is not limited to these embodiments. Rather, these embodiments are provided to more fully and completely convey the spirit of the invention to those skilled in the art. Furthermore, for ease of explanation and clarity, the thickness or size of each layer is exaggerated in the accompanying drawings.

[0023] Hereinafter, embodiments of the invention will be described with reference to the accompanying drawings, which schematically show ideal embodiments of the invention. In the drawings, deformations of the shapes shown can be predicted, for example, based on manufacturing techniques and / or tolerances. Therefore, embodiments based on the concept of the invention should not be interpreted as limited to the specific shape in the area shown in the invention, but should include, for example, shape variations caused during the manufacturing process.

[0024] FIG1 is a cross-sectional view showing a substrate processing apparatus 1000 according to an embodiment of the present invention; FIG2 is a cross-sectional view showing a carrier support portion 300 of the substrate processing apparatus 1000 according to an embodiment of the present invention; FIG3 is an exploded perspective view showing the components of the carrier support portion 300; FIG4 is an exploded sectional view showing the components of the carrier support portion 300.

[0025] First, as shown in FIG1, the substrate processing apparatus 1000 according to a portion of the present invention may generally include: a reaction tube portion 100, a carrier portion 200, and a carrier support portion 300.

[0026] As shown in FIG1, the reaction tube section 100 may be a structure in which a reaction space A for processing a plurality of substrates is formed inside and the lower part is open. For example, the interior of the reaction tube section 100 may form a receiving space that can accommodate a plurality of substrates or a carrier section 200 for placing substrates, and may form a gas supply device or an exhaust device, etc., to supply or discharge process gas or cleaning gas to such receiving space.

[0027] Accordingly, the accommodating space may be the reaction space A.

[0028] Here, the plurality of substrates or substrates that are the substrates to be processed may include semiconductor substrates, substrates used in display devices such as LEDs or LCDs, solar cell substrates, glass substrates, etc. In addition, various kinds of target substrates may also be applied.

[0029] The reaction tube section 100 may be a furnace or a tube-shaped structure containing a furnace, which is formed in the lower part to load and unload a plurality of substrates arranged in a boat section 200.

[0030] A heater may be provided around the reaction tube section 100, and at least a portion of it may be made of heat-resistant materials such as quartz, metal, or ceramic, thereby maintaining the high-temperature environment caused by the heater. Preferably, the reaction tube section 100 may be formed of quartz.

[0031] The reaction tube section 100 can form two layers by means of a pressing process.

[0032] As shown in FIG1, the carrier portion 200 may be a structure in which a plurality of substrates are formed inside the reaction tube portion 100 and stacked vertically.

[0033] For example, before the boat portion 200 enters the interior of the reaction tube portion 100, a plurality of substrates are respectively loaded into a plurality of placement portions formed in the boat portion 200, and the plurality of substrates can be placed in a stacked shape.

[0034] The boat-carrying part 200 can be a structure formed of quartz.

[0035] According to a partial embodiment of the present invention, a temperature sensor may be formed on the side of the carrier portion 200. The temperature sensor measures the temperature of the reaction space A and can uniformly control the temperature of the reaction space A. For example, the temperature sensor may be a Pro-type thermocouple (T / C).

[0036] The boat support 300 may be a structure that supports the boat 200 and raises and lowers the boat 200 so that the boat 200 is located in the reaction space A of the reaction tube 100.

[0037] Specifically, before the carrier section 200 enters the interior of the reaction tube section 100, a plurality of substrates are placed in the carrier section 200. In order to process the plurality of substrates placed in the carrier section 200, the carrier section 200 can be raised or lowered to be located inside the reaction tube section 100.

[0038] In addition, after processing a plurality of substrates in the reaction space A of the reaction tube section 100, the carrier section 200 can be lowered below the reaction tube section 100 to transport the plurality of substrates out from the carrier section 200.

[0039] At this time, as the boat support 300 rises into the reaction space A, it connects to the lower part of the reaction tube 100, thereby sealing the lower part of the reaction tube 100. That is, the boat support 300 can function as a cover for the reaction tube 100.

[0040] The substrate processing apparatus of the present invention is applicable to substrate processing processes that utilize process gases such as H2, NH3, O2, H2O, and F. More specifically, H2O can be utilized in the substrate processing process.

[0041] At this time, in order to prevent the venting performance from being reduced due to water accumulation caused by liquefaction inside the boat support 300, the boat support 300 may be configured to discharge liquids such as condensation.

[0042] For example, the boat support 300 may have an inclined portion formed on at least a portion of any side of the boat support 300 so that the liquid liquefied in the reaction space A is discharged downward.

[0043] Specifically, as shown in Figures 2 to 4, the boat support 300 may include: an insulation cover 310, a rotating flange 320, a sealing plate 330, and a cover flange 340.

[0044] FIG5 is a perspective view showing the heat insulation cover 310 of the boat support 300 according to an embodiment of the present invention; FIG6 is a cross-sectional view showing the heat insulation cover 310.

[0045] As shown in Figures 5 and 6, the heat-insulating cover 310 is formed in the lower part of the boat portion 200 and can be formed into a tank shape that forms a heat-insulating area 312 inside.

[0046] The heat insulation area 312 can be formed of heat insulation material, which can block the heat movement in the upper and lower parts of the heat insulation cover 310, and can be formed as an air layer to prevent convection through the space formed by only air.

[0047] A boat-carrying part 200 may be provided on the upper part of the heat insulation cover 310. When the boat-carrying support part 300 rises and the boat-carrying part 200 enters the reaction tube part 100, at least a part of the upper part of the heat insulation cover 310 may be located inside the reaction tube part 100.

[0048] That is, in order to process the substrate in the reaction space A inside the reaction tube section 100, a high-temperature environment is required. At this time, the heat-insulating cover 310 in the shape of a can enters the inner side of the reaction tube section 100, which can prevent heat loss in the lower part of the reaction space A that is close to the outer side of the boat support section 300.

[0049] A liquid formed by the liquefaction of H2O that vaporizes and rises in the lower region of the boat support 300 can condense below the insulation cover 310 (i.e., the lower part 311 of the insulation cover). At this time, in order to discharge the liquid condensed in the lower part 311 of the insulation cover, the inclined part for the downward flow of liquid can be formed in the lower part 311 of the insulation cover.

[0050] Specifically, at least a portion of the lower part 311 of the heat insulation cover 310 has the inclined portion formed with a first inclination T1.

[0051] For example, as shown in FIG6, the heat insulation cover 310 may be formed such that it gradually decreases from the center of the lower part 311 of the heat insulation cover 310 to the edge. Accordingly, the liquid that vaporizes and condenses in the lower part 311 of the heat insulation cover in the boat support 300 flows along the first inclination T1 of the lower part 311 of the heat insulation cover towards the edge, and may fall downward.

[0052] The heat insulation cover 310 can be made of quartz.

[0053] FIG7 is a perspective view showing the rotating flange 320 of the boat support 300 according to an embodiment of the present invention; FIG8 is a cross-sectional view showing a cross section cut in the B-B' direction of FIG7; FIG9 is a cross-sectional view showing a cross section cut in the C-C' direction of FIG7.

[0054] As shown in Figures 2 to 4, the rotating flange 320 can be located at the lower part of the heat preservation cover 310.

[0055] The rotating flange 320 is connected to the drive part 370 formed on the lower side of the boat support part 300, and can be rotated by the power of the drive part 370.

[0056] That is, the rotating flange 320 can be rotated by the rotational power of the drive unit 370. As the rotating flange 320 rotates, the rotational power of the drive unit 370 is transmitted to the heat insulation cover 310 and the carrier part 200, thereby rotating the heat insulation cover 310 on the upper part of the rotating flange 320.

[0057] As shown in FIG8, the rotating flange 320 may be formed on at least a portion of the upper surface 321 of the flange by having the inclined portion formed by the second inclination T2, so that the liquefied H2O can flow downward.

[0058] More specifically, the rotating flange 320 may include: a flange upper portion 321, a flange sidewall portion 322, a plurality of through portions 323, and a side discharge portion 324.

[0059] As shown in Figures 7 and 8, the upper part 321 of the flange may be the upper surface of the main body of the circular rotating flange 320, excluding the plurality of through portions 323.

[0060] The upper part of the flange 321 may be formed to gradually decrease from the center of the upper part of the rotating flange 320 to the edge. Accordingly, liquid falling from the heat preservation cover 310 may flow from the upper part of the flange 321 along the second inclination T2 to the edge of the upper part of the flange 321.

[0061] As shown in Figures 7 and 8, the flange sidewall portion 322 may be formed to surround the periphery of the rotating flange 320 and be higher than the flange upper portion 321. Specifically, the flange upper portion 321 may be formed along the second inclination T2 and the edge portion of the flange upper portion 321 may be lower than the center portion, while the flange sidewall portion 322, which is relatively higher than the edge portion of the flange upper portion 321, may be formed in a shape such as a wall.

[0062] As shown in Figures 7 and 9, the plurality of through portions 323 can be openings formed by passing through the upper and lower parts of the rotating flange 320. Accordingly, liquid falling from the heat preservation cover 310 can pass through the plurality of through portions 323 and then through the rotating flange 320.

[0063] The plurality of through portions 323 may be formed radially and equally spaced with respect to the center of the rotating flange 320. That is, the plurality of through portions 323 are formed radially and equally spaced on the rotating flange 320 which is formed in the shape of a circular plate, and the whole is formed in a shape similar to a bicycle or car wheel, so that stable airflow can be maintained inside the boat support 300.

[0064] The upper surface 321 of the flange surrounding the plurality of through portions 323 may be chamfered inward toward the plurality of through portions 323. Accordingly, liquid falling from the heat preservation cover 310 may flow toward the edge of the upper surface 321 of the flange or may flow toward the plurality of through portions 323.

[0065] As shown in Figures 7 and 8, the side discharge portion 324 may be formed by extending from the inner side portion to the outer side portion of the flange sidewall portion 322.

[0066] The side discharge portion 324 may be formed at a position corresponding to the upper portion 321 of the flange.

[0067] Accordingly, as shown in FIG8, the liquid flowing towards the edge along the second inclined T2 of the upper surface 321 of the flange is discharged to the outer side of the rotating flange 320 through the side discharge portion 324, thereby preventing the liquid from accumulating inside the side wall portion 322 of the flange.

[0068] The side discharge portion 324 can be formed into various shapes such as a hole or slit that passes through the flange sidewall portion 322.

[0069] According to a partial embodiment of the present invention, the rotating flange 320 may have a drive shaft coupling portion 325 formed at its center.

[0070] The drive shaft coupling portion 325 may be formed as a through hole extending through the upper and lower portions of the center portion of the rotating flange 320, and may be connected to the drive shaft of the drive portion 370 coupled to the lower portion of the boat support portion 300. Accordingly, the rotating flange 320 may be rotated as the drive portion 370 is driven.

[0071] FIG10 is a perspective view showing the sealing plate 330 of the boat support 300 according to an embodiment of the present invention; FIG11 is a cross-sectional view showing the sealing plate 330.

[0072] As shown in Figures 2 to 4, the sealing plate 330 can be attached to the top of the cover flange 340 to protect the upper surface of the cover flange 340 from corrosive gases.

[0073] Specifically, the sealing plate 330 is formed of quartz and covers the top of the cover flange 340 formed of bonding metal, thereby protecting the cover flange 340 from the process gas flowing inside the carrier support 300.

[0074] Specifically, the sealing plate 330 may include: a sealing upper part 331, a sealing lower part 332, and a sealing through part 334.

[0075] As shown in Figures 10 and 11, at least a portion of the upper sealing portion 331 has the inclined portion on the upper surface of the sealing plate 330, thereby collecting liquid falling from above for downward discharge, and the lower sealing portion 332 can be coupled to the cover flange 340 on the lower surface of the sealing plate 330.

[0076] The sealing upper part 331 may form at least a portion having a third inclination T3 and at least another portion having a fourth inclination T4.

[0077] For example, as shown in FIG10 and FIG11, the sealing upper part 331 is formed to gradually decrease from the center of the sealing upper part 331 to the sealing through part 334, and may be formed to gradually decrease from the edge of the sealing upper part 331 to the sealing through part 334.

[0078] Accordingly, liquid that falls directly from the heat insulation cover 310 through the plurality of through portions 323 of the rotating flange 320 or from the plurality of through portions 323 and the side discharge portion 324 of the rotating flange 320 can flow from the edge or center of the sealing upper part 331 to the sealing through portion 334.

[0079] As shown in Figures 10 and 11, the sealing through portion 334 is formed at a point spaced at a predetermined distance from the center of the sealing plate 330, and may be formed by extending from the upper sealing portion 331 to the lower sealing portion 332.

[0080] The sealing through part 334 can be formed as a hole or a slit. The hole is formed by radially penetrating the upper and lower parts at equal intervals with the center of the sealing plate 330 as a reference. The slit is formed by penetrating into a slit shape.

[0081] According to a portion of the embodiments of the present invention, the sealing plate 330 may include a sealing center portion 333.

[0082] The sealing center portion 333 may be formed as a through hole that passes through the upper and lower portions of the center portion of the sealing plate 330, allowing a portion of the drive portion 370 to pass through, so that the drive portion 370 attached to the lower portion of the boat support portion 300 is connected to the upper rotating flange 320.

[0083] FIG12 is a perspective view showing the cover flange 340 of the boat support 300 according to an embodiment of the present invention; FIG13 is a cross-sectional view showing the cover flange 340.

[0084] As shown in Figures 2 to 4, the cover flange 340 is located below the rotating flange 320 and can fully support and drive the boat support 300 to rise and fall.

[0085] The cover flange 340 may include: a sealing mounting portion 341, a drive engagement portion 342, a discharge guide groove portion 343, and a lower discharge portion 344.

[0086] As shown in Figures 12 and 13, the sealing mounting part 341 may be the area on the cover flange 340 where the sealing plate 330 is mounted.

[0087] For example, the sealing mounting portion 341 is formed as a recessed circular groove in the area on the upper surface of the cover flange 340 except for the edge portion, and the sealing plate 330 can be installed in the circular groove.

[0088] The discharge guide groove 343 can be formed as a ring-shaped groove with the center of the cover flange 340 as the center point and a predetermined distance as the radius.

[0089] As shown in FIG4, a discharge guide groove 343 is formed in the sealing mounting portion 341, and an annular groove can be formed at a position corresponding to the sealing through portion 334 of the sealing plate 330. Accordingly, liquid discharged through the sealing through portion 334 can only flow into the discharge guide groove 343 of the cover flange 340.

[0090] The discharge guide groove 343 can be formed in the direction of the lower discharge portion 344 to form the inclined portion. Accordingly, the liquid discharged through the sealing through portion 334 can flow to the lower discharge portion 344.

[0091] The lower discharge portion 344 may be formed by extending the cover flange 340 through at least one point of the discharge guide groove portion 343.

[0092] Liquid flowing toward the discharge guide groove 343 can be discharged to the outside of the cover flange 340 through the lower discharge portion 344. At this time, the lower discharge portion 344 is connected to the discharge port 345 formed on the outside of the cover flange 340, so that the liquid can be easily discharged.

[0093] As shown in FIG2, a drive engagement portion 342 for engaging the drive portion 370 can be formed at the center of the cover flange 340. Specifically, the drive engagement portion 342 is formed as a through hole that extends vertically through the center of the cover flange 340, thereby engaging the drive portion 370.

[0094] At this time, the drive unit 370 can be formed as a sealed structure that is sealed inside the carrier support unit 300 so as to seal the reaction space A inside the reaction tube unit 100 from the outside.

[0095] FIG14 is an enlarged view showing liquid being discharged from a boat support 300 according to an embodiment of the present invention.

[0096] As shown in Figure 14, the liquid formed by the vaporization and rising H2O in the lower region of the boat support 300 can condense on the lower part 311 of the insulation cover 310.

[0097] At this time, the liquid flows from the lower part 311 of the heat insulation cover 310 along the first inclined T1 to the edge of the lower part 311 of the heat insulation cover, and then falls downward.

[0098] Liquid falling downwards flows from the upper flange portion 321 of the rotating flange 320 along the second inclination T2 to the edge of the upper flange portion 321, and then falls downwards through the side discharge portion 324 or directly to the sealing plate 330.

[0099] Liquid that falls onto the sealing plate 330 flows downhill along the third inclined section T3 or the fourth inclined section T4 and can then pass through the sealing through section 334.

[0100] Liquid flowing from the sealing plate 330 to the discharge guide groove 343 of the cover flange 340 can be discharged from the discharge guide groove 343 to the lower discharge section 344.

[0101] Then, the liquid discharged from the boat support 300 can be discharged into the drain tank through the scrubber.

[0102] The carrier support portion 300 of the substrate processing apparatus 1000 according to the present invention may include: a heat-insulating cover 310, a rotating flange 320, a sealing plate 330, and a cover flange 340, but is not limited thereto, and may be formed by combining one or more of the above structures. In addition, the inclined portion of the carrier support portion 300 may include at least one of a first inclined T1, a second inclined T2, a third inclined T3, and a fourth inclined T4.

[0103] According to a portion of the embodiments of the present invention, the boat support 300 may include a boat flange 360 ​​located in the middle region of the heat insulation cover 310.

[0104] The carrier flange 360 ​​can form a reaction tube placement portion 361. When the carrier support portion 300 rises and is attached below the reaction tube portion 100, the reaction tube placement portion 361 can be placed at the lower part of the reaction tube portion 100. At this time, the carrier flange 360 ​​can be located in the middle region of the heat insulation cover 310, so that the upper region of the heat insulation cover 310 can be located in the reaction space of the reaction tube portion 100.

[0105] The boat-carrying flange 360 ​​can be joined to the cover flange 340 through the cylindrical cover frame 350. That is, the lower part of the heat-insulating cover 310 can be located inside the cover frame 350.

[0106] As shown in FIG2, the cover frame 350 is attached to the upper part of the cover flange 340 and can be formed to cover at least a portion of the edge of the sealing plate 330.

[0107] As shown in FIG2, according to a portion of the embodiments of the present invention, the boat support 300 may include: a side heating portion H1, a bottom heating portion H2, and a manifold M.

[0108] The side heating portion H1 may include a heater formed on the outside of the cover frame 350, and the lower heating portion H2 may include a heater formed on the lower part of the cover flange 340. The side heating portion H1 and the lower heating portion H2 increase the temperature inside the carrier support portion 300, promote the vaporization of H2O and mitigate liquefaction, and prevent heat loss from the lower part of the carrier support portion 300. Moreover, they prevent the manifold M formed inside the carrier support portion 300 from reacting and solidifying to form powder.

[0109] The manifold M is formed inside the cover frame 350 and may include a port for supplying process gas to the reaction space A or discharging processed gas.

[0110] The carrier support 300 of the substrate processing apparatus 1000 according to the present invention has at least a portion formed with an inclined portion for allowing liquid to flow downward, thereby preventing corrosion of the internal structure due to the generated liquid, and allowing the liquefied liquid to flow into the scrubber, thereby preventing damage to the drain tank during the cleaning process.

[0111] The present invention has been described with reference to embodiments shown in the accompanying drawings; however, these are merely illustrative, and it will be understood by those skilled in the art that various variations and equivalent embodiments can be achieved therefrom. Therefore, the true scope of protection of the present invention should be defined by the technical concept of the claims. [Simplified Explanation of the Diagram]

[0020] FIG1 is a cross-sectional view showing a substrate processing apparatus according to an embodiment of the present invention; FIG2 is a cross-sectional view showing a carrier support portion of a substrate processing apparatus according to an embodiment of the present invention; FIG3 is an exploded perspective view showing the components of the carrier support portion of a substrate processing apparatus according to an embodiment of the present invention; FIG4 is an exploded sectional view showing the components of the carrier support portion of FIG3; FIG5 is a perspective view showing the heat insulation cover of the carrier support portion according to an embodiment of the present invention; FIG6 is a cross-sectional view showing the heat insulation cover of the carrier support portion according to an embodiment of the present invention; FIG7 is a perspective view showing the rotating flange of the carrier support portion according to an embodiment of the present invention; FIG8 is a cross-sectional view showing a section cut along the B-B' direction of FIG7; FIG9 is a cross-sectional view showing a section cut along the C-C' direction of FIG7; FIG10 is a perspective view showing the sealing plate of the carrier support portion according to an embodiment of the present invention; FIG11 is a cross-sectional view showing the sealing plate of the carrier support portion according to an embodiment of the present invention; FIG12 is a perspective view showing the cover flange of the carrier support portion according to an embodiment of the present invention. Figure 13 is a cross-sectional view showing the cover flange of the boat support portion according to an embodiment of the present invention; and Figure 14 is an enlarged view showing liquid being discharged from the boat support portion according to an embodiment of the present invention.

Claims

1. A substrate processing apparatus, comprising: The reaction tube section forms a reaction space inside for processing a plurality of substrates and has an open lower part; a carrier section is formed inside the reaction tube section and the plurality of substrates are stacked vertically; and a carrier support section supports the carrier section and raises and lowers the carrier section so that the carrier section is located in the reaction space of the reaction tube section; wherein the carrier support section is formed such that at least a portion of any one side of the carrier support section has an inclined portion and at least one side of the carrier support section has a through portion, so that liquefied liquid in the reaction space is discharged downward.

2. The substrate processing apparatus according to claim 1, wherein, The boat support includes: a heat-insulating cover formed in the lower part of the boat and forming a heat-insulating area inside to prevent heat loss in the lower region of the reaction space near the outside of the boat support; a rotating flange disposed in the lower part of the heat-insulating cover and connected to a drive unit formed on the lower side of the boat support, rotating through the power of the drive unit and transmitting the rotational power of the drive unit to the heat-insulating cover and the boat; a cover flange formed below the rotating flange, engaging the drive unit at its center and supporting the entire boat support for lifting and lowering; and a sealing plate engaged on the upper part of the cover flange to protect the upper surface of the cover flange from corrosive gases.

3. The substrate processing apparatus according to claim 1, wherein, The boat support includes a heat-insulating cover formed in the lower part of the boat and forming a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support; wherein the heat-insulating cover is formed to gradually decrease from the center of the lower part of the heat-insulating cover to the edge.

4. The substrate processing apparatus according to claim 1, wherein, The boat support includes a heat-insulating cover formed in the lower part of the boat and forming a heat-insulating area inside to prevent heat loss in the lower part of the reaction space near the outside of the boat support in the reaction space; wherein the heat-insulating cover forms the inclined portion, the inclined portion being formed by at least a portion of the lower part of the heat-insulating cover having a first inclination.

5. The substrate processing apparatus according to claim 1, wherein, The boat support includes a rotating flange connected to a drive unit formed on the lower side of the boat support. The rotating flange rotates through the power of the drive unit and transmits the rotational power of the drive unit to the boat support. The rotating flange includes: an upper flange portion that gradually decreases from the center of the upper part of the rotating flange to the edge portion; a plurality of through portions that are radially spaced and equally spaced from the center of the rotating flange to the upper and lower portions; and a side discharge portion that extends from the inner side of the rotating flange to the outer side of the flange sidewall portion and is formed at a position corresponding to the upper flange portion. The flange sidewall portion surrounds the periphery of the rotating flange and is higher than the upper flange portion.

6. The substrate processing apparatus according to claim 1, wherein, The boat support includes a rotating flange connected to a drive unit formed on the lower side of the boat support. The rotating flange is rotated by electricity from the drive unit and the rotational power of the drive unit is transmitted to the boat support. The rotating flange forms the inclined portion, which is formed by at least a portion of the upper surface of the rotating flange having a second inclination.

7. The substrate processing apparatus according to claim 1, wherein, The boat support includes a sealing plate, which is attached to the upper surface of the cover flange of the boat support to protect the upper surface of the cover flange from corrosive gases and to drive its lifting and lowering. The sealing plate includes: a sealing upper portion, at least a portion of which is formed by having the inclined portion on the upper surface of the sealing plate; and a sealing through portion formed at a predetermined distance from the center of the sealing plate and penetrating through the sealing plate.

8. The substrate processing apparatus according to claim 7, wherein, The sealing through portion is formed as a hole or a slit. The hole is a hole shape formed by radially penetrating the upper and lower parts at equal intervals with the center of the sealing plate as a reference. The slit is a through portion formed as a slit shape.

9. The substrate processing apparatus according to claim 7, wherein, The sealing upper portion is formed by gradually decreasing from the center of the sealing upper portion to the sealing through portion, and by gradually decreasing from the edge of the sealing upper portion to the sealing through portion.

10. The substrate processing apparatus according to claim 7, wherein, The sealing plate forms the inclined portion, which is formed by at least a third inclination and at least a fourth inclination of the sealing surface of the sealing plate.

11. The substrate processing apparatus according to claim 1, wherein, The boat support includes a cover flange, which is joined at its center to the drive portion formed on the lower side of the boat support, and supports and drives the boat support to move up and down. The cover flange includes: a sealing mounting portion, on which a sealing plate of the boat support is mounted; a drive engagement portion, formed vertically through the center of the cover flange to engage the drive portion; a discharge guide groove portion, a ring-shaped groove portion centered on the center of the cover flange and with a radius of a predetermined distance; and a lower discharge portion, formed vertically through at least one point of the discharge guide groove portion.

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