Adsorption columns for capturing acidic or alkaline components in gases and their applications

Abstract

An adsorption column for capturing acidic or alkaline components in a gas is provided, which can quantitatively measure the acid or alkaline components in a gas in a short time with high sensitivity. This adsorption column, used for capturing acidic or alkaline components in a gas, is filled with a non-porous substrate that retains the alkaline adsorbent used to adsorb acidic components or the acidic adsorbent used to adsorb alkaline components, and the pressure loss when the internal gas is drawn at a suction rate of 2.0 L / min is less than 10 kPa.

Description

Technical Field

[0001] This invention relates to an adsorption column for capturing acidic or alkaline components in a gas and its use. Specifically, the use includes a method for capturing acidic or alkaline components in a gas, a quantitative method for determining the concentration of acidic or alkaline components in the gas using the capture method, and a method for managing the cleanliness of a cleanroom using the quantitative method. Prior Technology

[0002] In the environment where semiconductor wafers, liquid crystal substrates, magnetic disks, and other electronic substrates (hereinafter referred to as substrates) are manufactured, contaminants such as acidic substances (acidic components) and alkaline substances (alkaline components) in the manufacturing space can adhere to the substrates, leading to a decrease in product yield or quality. Therefore, to prevent such a decrease in yield or quality, the manufacturing process of such substrates is carried out in a cleanroom. Next, the contamination status caused by the aforementioned acidic and alkaline substances in the cleanroom during each manufacturing process must be evaluated; in other words, the cleanliness level must be evaluated. If the cleanliness level deteriorates, the causes of contamination must be eliminated to manage the cleanroom's cleanliness. Furthermore, in recent years, there has been a pursuit of ensuring a high level of cleanliness in cleanrooms. Consequently, there has been a demand for methods that can more sensitively evaluate the contamination status caused by acidic or alkaline components in the cleanroom, i.e., cleanliness. Moreover, in recent years, to simplify the management of cleanroom cleanliness, there has been a pursuit of minimizing the time required for the aforementioned evaluation.

[0003] As a highly sensitive and short-time method for evaluating the aforementioned cleanliness, examples include: using the gas adsorption column described in Patent Documents 1 and 2, or the method without a liquid trap described in Patent Document 3 to quantify contaminants. Here, the aforementioned contaminants refer to acidic and / or alkaline components in the air. Specifically, the method for quantifying the aforementioned contaminants involves passing air from the cleanroom through the aforementioned gas adsorption column or the method without a liquid trap, adsorbing the aforementioned contaminants in the air, and then quantifying the amount of the adsorbed contaminants.

[0004] [Previous Technical Documents] [Patent Document 1] Japanese Patent Application Publication No. 2009-14522 [Patent Document 2] International Publication No. 2010 / 067464 [Patent Document 3] Japanese Patent No. 6563396. Summary of the Invention

[0005] [The problem that the invention aims to solve] However, the evaluation methods using gas adsorption columns in Patent Documents 1 and 2 could be improved in terms of evaluation time. Furthermore, the evaluation method without a liquid trap described in Patent Document 3 could be improved in terms of sensitivity.

[0006] This invention was made in view of the foregoing. The object of this invention is to provide an adsorption column for capturing acidic or alkaline components in a gas with high sensitivity and short time, as well as a method for capturing and quantifying the acidic or alkaline components. Furthermore, another object of this invention is to provide a simple management method for ensuring the cleanliness of highly clean spaces.

[0007] [Technical means to solve the problem] To achieve the aforementioned objectives, the present invention provides an adsorption column for capturing acidic or alkaline components in a gas, which is related to the morphology of the present invention. It is filled with a non-porous substrate; The aforementioned non-porous substrate retains either an alkaline adsorbent for adsorbing acidic components or an acidic adsorbent for adsorbing alkaline components; The pressure loss of the aforementioned adsorption column for trapping gas is less than 10 kPa when the adsorption column for trapping gas is attracted at an adsorption rate of 2.0 L / min.

[0008] Furthermore, in order to achieve the aforementioned objective, one embodiment of the present invention relates to a trapping method that involves circulating gas through an adsorption column for trapping according to one embodiment of the present invention to trap acidic or alkaline components in the aforementioned gas.

[0009] Furthermore, in order to achieve the aforementioned objective, an embodiment of the present invention-related quantitative method uses an embodiment of the present invention-related capture method, comprising: a capture step, which captures the acid or alkali components in the aforementioned gas; The dissolution step involves passing a solvent through an adsorption column used for trapping the aforementioned acidic or alkaline components, causing the trapped acidic or alkaline components to dissolve in the solvent to obtain a dissolution solution; and The determination procedure involves measuring the concentration of the aforementioned acidic or alkaline components in the aforementioned dissolution solution.

[0010] Furthermore, to achieve the aforementioned other objectives, one embodiment of the present invention is a form-dependent management method for managing space cleanliness, comprising: a quantitative step, which uses the form-dependent quantitative method of the present invention to quantify the concentration of acidic or alkaline components in the gas within the space; and The elimination step involves identifying and eliminating the source of the acid or alkali component in the gas inside the space when the concentration of the aforementioned acid or alkali component exceeds a threshold as determined in the aforementioned quantitative step.

[0011] [The effects of the invention] By employing the form-dependent adsorption column for trapping, the form-dependent trapping method, and the form-dependent quantitative method of this invention, acidic or alkaline components in gases can be quantified quickly and with high sensitivity. Furthermore, by employing the form-dependent space cleanliness management method of this invention, a highly clean space can be easily ensured. Simple Explanation of the Diagram

[0012] Figure 1 is a schematic diagram showing the configuration of the metering device used in Examples 4 and 5. Implementation

[0013] The following describes one embodiment of the present invention, but the present invention is not limited to the embodiments described below. Various modifications may be made to the present invention within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included within the technical scope of the present invention.

[0014] [Implementation Form 1: Adsorption Column for Collection] The adsorption column for capturing acid or alkali components in a gas according to one embodiment of the present invention (hereinafter also referred to as "the adsorption column for capturing") is filled with a non-porous substrate. The non-porous substrate is used to hold an alkaline adsorbent for adsorbing acid components or an acidic adsorbent for adsorbing alkali components. The pressure loss of the adsorption column for capturing gas is less than 10 kPa when the gas in the adsorption column is attracted at an attraction rate of 2.0 L / min.

[0015] The adsorption column for gas collection described below, filled with a non-porous substrate containing an alkaline adsorbent, is used to collect acidic components in gases and is therefore also referred to as an "acid component adsorption column." Similarly, the adsorption column for gas collection described below, filled with a non-porous substrate containing an acidic adsorbent, is used to collect alkaline components in gases and is therefore also referred to as an "alkaline component adsorption column." This adsorption column for gas collection is either an acid component adsorption column or an alkaline component adsorption column.

[0016] (Non-porous substrate) The adsorption column for this trapping is filled with a non-porous substrate, which holds either an alkaline adsorbent for adsorbing acidic components or an acidic adsorbent for adsorbing alkaline components.

[0017] Here, the constituent material of the adsorbent component generally used as the filling material in the trapping adsorption column is, from the viewpoint of ensuring adsorption force on the target substance, a porous material with a large surface area and the characteristic of easily drawing the target substance into the interior. However, when quantifying the substance adsorbed in the trapping adsorption column, the adsorbed substance is detached and dissolved in a solvent to prepare a leachate, which is then used as the target for quantification. When the adsorbent component composed of a porous material has a strong adsorption force on the target substance but adsorbs a very small amount of the substance, it is difficult to detach the substance from the solvent. Therefore, it is considered that in the quantification method using a trapping adsorption column filled with an adsorbent component composed of a porous material, it is impossible to quantify very small amounts of the substance.

[0018] Furthermore, adsorbents composed of porous materials can also attract substances other than the target adsorbent. Therefore, quantitative methods using adsorption columns filled with porous materials trap substances other than the target adsorbent within the column. Consequently, the presence of these other substances becomes noise, making it impossible to quantify even minute quantities of the substance.

[0019] On the other hand, the aforementioned non-porous substrate has a weaker adsorption capacity for the target substance compared to the aforementioned porous material. Even when adsorbing a very small amount of substance, the adsorbed substance can be easily released into the solvent. Therefore, the quantitative method using this adsorption column for collection can quantify very small amounts of substance.

[0020] Furthermore, the adsorption column used for this collection is filled with a non-porous substrate, and the aforementioned other substances are not absorbed by this non-porous substrate. This prevents the inability to quantify minute amounts of substances due to the presence of the aforementioned other substances. Here, in one embodiment of the invention, the substance targeted for quantification is the acid or alkali component of the gas.

[0021] The above describes how this adsorption column for trapping can capture and quantify acidic or alkaline components in gases with high sensitivity. Furthermore, in this specification, "capture and quantify with high sensitivity" means, for example, capturing and quantifying the concentration of acidic or alkaline components in the gas at a level of approximately 10⁻² μg / m³.

[0022] The aforementioned non-porous substrate can be any shape without pores, and its material is not particularly limited. Examples of materials for the aforementioned non-porous substrate include: quartz, glass, polycarbonate, polystyrene resin, polyamide resin, silicon carbide (SiC), alumina (Al2O3), silicon nitride (SiN), etc. From the viewpoint of better preventing contamination of the aforementioned non-porous substrate during the use of this adsorption column for collection, the aforementioned non-porous substrate is preferably made of quartz or glass, and particularly preferably quartz.

[0023] The shape of the aforementioned non-porous substrate is not particularly limited, but from the viewpoint of the adsorption column for trapping acid or alkali components in the gas, a shape with a large surface area is preferred. Examples of such a shape with a large surface area include particulate and fibrous forms. The shape of the aforementioned non-porous substrate is more preferably particulate.

[0024] From the viewpoint of improving the aeration efficiency of the adsorption column for trapping the aforementioned non-porous substrate, the lower limit of the average particle size or average cross-sectional diameter of the aforementioned non-porous substrate is preferably 300 μm or more, more preferably 400 μm or more, further preferably 450 μm or more, further preferably 500 μm or more, and most preferably 600 μm or more. From the viewpoint of improving the trapping efficiency of the aforementioned acidic or alkaline components in the adsorption column for trapping the aforementioned non-porous substrate, the upper limit of the average particle size or average cross-sectional diameter of the aforementioned non-porous substrate is preferably 1200 μm or less, more preferably 1100 μm or less, further preferably 1050 μm or less, further preferably 1000 μm or less, and most preferably 850 μm or less. Furthermore, the method for determining the average particle size and average cross-sectional diameter at this time follows JIS K0069 "Screening Test Methods for Chemical Products".

[0025] The aforementioned alkaline adsorbent is used to adsorb acidic components. Specifically, it may be composed of alkaline substances or contain alkaline substances. Similarly, the aforementioned acidic adsorbent is used to adsorb alkaline components. Specifically, it may be composed of acidic substances or contain acidic substances.

[0026] In one embodiment of the present invention, the acid component is not particularly limited. Examples of the aforementioned acid components include: hydrogen chloride, nitric acid, sulfuric acid, phosphoric acid, hydrofluoric acid, formic acid, acetic acid, bromic acid, iodine, lactic acid, propionic acid, butyric acid, valeric acid, and other acids themselves, as well as ammonium fluoride, ammonium formate, and ammonium acetate. Furthermore, in one embodiment of the present invention, the base component is not particularly limited. Examples of the aforementioned base components include: ammonia, trimethylamine, triethylamine, alkanolamine, dimethylamine, diethylamine, and other bases themselves, as well as ammonium fluoride, ammonium formate, and ammonium acetate.

[0027] The amount of the aforementioned alkaline or acidic adsorbent in the adsorption column for gas collection is preferably 0.4 μeq or more, more preferably 0.7 μeq or more, and even more preferably 0.8 μeq or more. Adjusting the amount of the aforementioned alkaline or acidic adsorbent to 0.4 μeq or more is advantageous in preventing column breakage after collecting high concentrations of gas. On the other hand, the amount of the aforementioned alkaline or acidic adsorbent is preferably 50 μeq or less, more preferably 30 μeq or less, and even more preferably 20 μeq or less. Adjusting the amount of the aforementioned alkaline or acidic adsorbent to 50 μeq or less is advantageous in preventing measurement obstruction caused by excessive adsorbent components. The amount of the aforementioned alkaline or acidic adsorbent is expressed in equivalents and can be determined using the method described in the examples.

[0028] As alkaline adsorbents, examples include inorganic and organic bases. Examples of inorganic bases include alkali metal carbonates and alkali metal hydroxides. Examples of organic bases include amines and ammonium compounds.

[0029] Of the compounds listed above, the aforementioned alkaline adsorbent is preferably at least one compound selected from the group consisting of alkali metal carbonates, alkali metal hydroxides, amines, and ammonium compounds.

[0030] Examples of alkali metal carbonates include sodium carbonate, potassium carbonate, and potassium bicarbonate. Examples of alkali metal hydroxides include strontium hydroxide, potassium hydroxide, and sodium hydroxide. Examples of amines include triethanolamine. Examples of ammonium compounds include tetramethylammonium hydroxide and tetrabutylammonium hydroxide.

[0031] The aforementioned alkaline adsorbent is preferably at least one compound selected from the group consisting of sodium carbonate, sodium hydroxide, and triethanolamine.

[0032] Both inorganic acids and organic acids can be listed as acidic adsorbents.

[0033] Examples of inorganic acids mentioned above include sulfuric acid and phosphoric acid. Examples of organic acids mentioned above include methanesulfonic acid, maleic acid, and malonic acid.

[0034] Of the compounds listed above, the aforementioned acidic adsorbent is preferably at least one compound selected from the group consisting of sulfuric acid, phosphoric acid, and methanesulfonic acid.

[0035] In one embodiment of the present invention, there is no particular limitation on whether the aforementioned non-porous substrate retains the form of the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent. This form may, for example, be a solid form of the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent attached to the surface of the aforementioned non-porous substrate, or it may be a form in which the aforementioned non-porous substrate is coated with a liquid phase containing the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent.

[0036] The aforementioned liquid phase is a liquid containing the aforementioned alkaline adsorbent or acidic adsorbent, and may contain a solvent as needed. In other words, when the aforementioned alkaline adsorbent or acidic adsorbent is a solid, the aforementioned liquid phase can be prepared by dissolving the alkaline adsorbent or acidic adsorbent in a solvent. There are no particular limitations on the aforementioned solvent; any solvent that can dissolve the aforementioned alkaline adsorbent or acidic adsorbent and will not negatively affect the aforementioned non-porous substrate can be used. Specific examples of the aforementioned solvent include: water, hydrogen peroxide solution, ethanol, acetonitrile, or mixtures thereof. Preferably, the aforementioned solvent is a water-containing solvent, such as a mixture of water and solvents other than water listed in the specific examples above; more preferably, it is a solvent composed solely of water. On the other hand, when the aforementioned alkaline adsorbent or acidic adsorbent is a liquid, the alkaline adsorbent or acidic adsorbent can be directly used as the aforementioned liquid phase.

[0037] In one embodiment of the present invention, the method for coating the aforementioned liquid phase onto the aforementioned non-porous substrate is not particularly limited. Examples of such methods include: a method of coating the aforementioned liquid phase onto the aforementioned non-porous substrate, and a method of immersing the non-porous substrate in the liquid phase, extracting the non-porous substrate, and drying it. A specific example of the method of coating the aforementioned liquid phase onto the aforementioned non-porous substrate is: a method of coating by passing the aforementioned liquid phase through the aforementioned porous substrate. Here, "passing through" refers to passing the aforementioned liquid phase through a container filled with the aforementioned porous substrate, such as a column. Furthermore, when the aforementioned drying conditions are set to high temperature and long duration, the solvent present in the aforementioned liquid phase may evaporate, and solids of the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent may precipitate on the surface of the aforementioned non-porous substrate. In this case, a non-porous substrate with a solid form of the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent adhering to its surface can be obtained.

[0038] In one embodiment of the present invention, the aforementioned non-porous substrate can further retain the humectant. Furthermore, in the aforementioned non-porous substrate that further retains the humectant, when the aforementioned alkaline adsorbent or acidic adsorbent is retained in the form of the aforementioned liquid phase, the aforementioned liquid phase can further contain the aforementioned humectant. Examples of the aforementioned humectant include: polyols such as ethylene glycol, propylene glycol, and glycerol; and polyalkylene glycols such as polyethylene glycol and polypropylene glycol. Moreover, the amount of the aforementioned humectant relative to the total weight of the non-porous substrate coated in the aforementioned liquid phase can be 0.01% by weight or more and 1.0% by weight or less, preferably 0.1% by weight or more and 0.5% by weight or less.

[0039] (Composition of the adsorption column for collection) This adsorption column for trapping can be constructed from a housing and a frit; the frit is a filter used to prevent the aforementioned non-porous substrate disposed inside the housing from flowing out to the outside. There are no particular limitations on the materials used for the housing and the frit, as long as they do not affect the acidic or alkaline components of the target being trapped, and are not subject to adverse effects such as corrosion caused by the aforementioned alkaline or acidic adsorbents. Examples of materials that can be used for the aforementioned outer shell include: polypropylene, glass, polyethylene (PE), polyetheretherketone (PEEK), polyvinyl chloride (PVC), polystyrene (PS), ABS resin (ABS), methacrylic resin, acrylic resin (PMMA), polyamide (PA), polyacetal (POM), polycarbonate (PC), modified polyphenylene ether (mPPE), polybutylene terephthalate (PBT), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polysulfone (PSU), polyarylate (PAR), fluoropolymer (PFA), and mixtures thereof. Examples of materials that can be used for the aforementioned frit include: polyethylene, polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), polyethersulfone (PES), fiber, glass fiber, carbon fiber, diatomaceous earth, polyethylene terephthalate (PET), nylon, and mixtures thereof. The aforementioned outer shell and the aforementioned fused block may be made of the same type or different types of materials.

[0040] There are no particular limitations on the shape of the adsorption column for this trapping process; a cylindrical shape is generally acceptable. Preferably, the adsorption column for this trapping process is composed of a column body, a molten metal, a sleeve, and end fittings, such as the one described in Japanese Patent Application Publication No. 2001-249120.

[0041] The internal volume of the adsorption column used for this collection (the internal volume of the aforementioned outer shell) should be appropriately sized to correspond to the analytical throughput. For example, the aforementioned volume is 0.6 ml to 5 ml, 0.6 ml to 3 ml, or 0.7 ml to 2 ml.

[0042] The pore volume of this adsorption column for gas trapping refers to the volume of the space between the non-porous substrate coated with the liquid phase that is not filled in the adsorption column. The aforementioned pore volume can be measured using, for example, the method described in the embodiments. The larger the pore volume, the greater the amount of gas passing through the adsorption column per unit time when trapping acidic or alkaline components in the gas, i.e., the gas flow rate. Here, when using this adsorption column for quantitative measurement, a specific amount of gas is drawn through the adsorption column to trap the acidic or alkaline components contained in that specific amount of gas. Therefore, the larger the pore volume, the shorter the time required for the specific amount of gas to pass through the adsorption column. Thus, in this adsorption column, the larger the pore volume, the faster the acidic or alkaline components in the gas can be trapped and quantified.

[0043] From the viewpoint of using this adsorption column for trapping to quantify the acid or alkali components in a gas in a shorter time, the aforementioned pore volume is preferably 200 μL or more, more preferably 300 μL or more, and even more preferably 400 μL or more.

[0044] On the other hand, when the aforementioned pore volume is below a certain value, the amount of non-porous substrate containing the aforementioned alkaline or acidic adsorbent in the adsorption column for trapping will be sufficiently large, thus ensuring the ability to trap the acidic or alkaline components in the aforementioned gas. In this way, using the adsorption column for trapping, the acidic or alkaline components in the gas can be trapped and quantified with higher sensitivity. From the viewpoint of being able to trap and quantify the acidic or alkaline components in the aforementioned gas with higher sensitivity, the aforementioned pore volume is preferably 5000 μL or less, more preferably 3000 μL or less, further preferably 600 μL or less, and particularly preferably 500 μL or less.

[0045] The porosity of this adsorption column for gas collection can be set using the formula: "Porosity (%) = Void volume ÷ Internal volume of this adsorption column for gas collection × 100". In this case, there is no limitation on the lower limit of the porosity of this adsorption column for gas collection; for example, it can be 10% or more, 20% or more, 30% or more, 40% or more, 50% or more, 60% or more, or 70% or more. On the other hand, there is no limitation on the upper limit of the porosity of this adsorption column for gas collection; for example, it can be 90% or less, 80% or less, or 70% or less. The above configuration is preferred in the following aspects: it prevents a decrease in the absorption rate when collecting gas at low porosity, while simultaneously maximizing the effect of not reducing the adsorption capacity of acidic or alkaline components of the adsorbent.

[0046] The pressure loss of this gas trap adsorption column at a suction rate of 2.0 L / min is capped at 10 kPa or less. Hereinafter, the pressure loss at a suction rate of 2.0 L / min will be referred to as "pressure loss A". As mentioned earlier, when using this gas trap adsorption column for quantitative analysis, a specific amount of gas must be drawn through the column to trap the acid or alkali components contained within that specific amount of gas. With a pressure loss A of 10 kPa or less, when the target gas is drawn through the column for quantitative analysis, the gas can be drawn at high speed without burdening the suction pump. This allows a specific amount of gas to be drawn through the column in a short time. Therefore, this gas trap adsorption column can be used to trap and quantify the acid or alkali components in a gas in a short time.

[0047] From the perspective of using this trapping adsorption column to quantify the acid or alkali components in a gas in a short time, the upper limit of the pressure loss A is preferably below 7 kPa, and more preferably below 5 kPa.

[0048] [Implementation Mode 2] The capture method related to one embodiment of the present invention (hereinafter also referred to as "this capture method") is a method for capturing acid or alkali components in a gas. It involves passing the gas through an adsorption column used for capture to capture the acid or alkali components in the gas.

[0049] This collection method utilizes the adsorption column for collection to capture acidic or alkaline components in a gas. As previously described, this adsorption column allows for the collection of trace amounts of acidic or alkaline components in a gas within a short time. Therefore, this collection method enables the rapid and highly sensitive collection and quantification of acidic or alkaline components in a gas.

[0050] Hereinafter, this collection method, which uses an acid adsorption column to determine the concentration of acid components in the collected gas, will also be referred to as the "acid component collection method." Similarly, this collection method, which uses an alkaline adsorption column to determine the concentration of alkaline components in the collected gas, will also be referred to as the "alkaline component collection method." This collection method is either an acid component collection method or an alkaline component collection method.

[0051] Regarding the composition of the adsorption column used in this collection method, the composition described in [Embodiment 1: Adsorption Column for Collection] will be referenced. Furthermore, the acid and base components that are the quantitative targets of this collection method are not particularly limited, and may be the acid and base components illustrated in the column of [Embodiment 1: Adsorption Column for Collection] above.

[0052] Here, by applying both acid and alkali component capture methods to the same gas, both acid and alkali components in the gas can be captured simultaneously.

[0053] In this capture method, the target gas is circulated through the capture adsorption column, causing the acidic or alkaline components in the gas to be adsorbed onto a non-porous substrate containing the aforementioned acidic or alkaline adsorbent. The aforementioned circulation is typically performed using a suction pump.

[0054] In this collection method, by passing the aforementioned gas through an adsorption column for collecting the acidic or alkaline components of the gas at a higher gas flow rate, the time required to collect the acidic or alkaline components in the collection step can be shortened. As a result, this collection method can collect and quantify the acidic or alkaline components in the gas in a short time. From the viewpoint of collecting and quantifying the acidic or alkaline components in the gas in a short time, the aforementioned gas flow rate is preferably 2.0 L / min or higher, more preferably 3.0 L / min or higher. On the other hand, if the aforementioned gas flow rate is excessively high, the pressure applied to the adsorption column for collection will increase when the gas passes through, potentially causing damage to the adsorption column. From the viewpoint of better preventing damage to the adsorption column for collection, the aforementioned gas flow rate is preferably 10 L / min or lower, more preferably 7 L / min or lower. From the perspective that both the aforementioned quantitative time requirement and the aforementioned prevention of breakage are excellent, the aforementioned airflow rate is particularly good at 5L / min.

[0055] The aforementioned aeration of the adsorption column for this trapping process is generally performed in a cleanroom or clean booth, or other evaluation target space. The adsorption column for this trapping process is transported in the following manner: the inlet of the adsorption column is sealed with a non-contaminating plug of the analyte, and / or the adsorption column is stored in a non-contaminating, sealed container of the analyte.

[0056] When both acid and alkali component collection methods are implemented simultaneously, an apparatus comprising an acid component adsorption column and an alkali component adsorption column connected in series can be used to perform the acid and alkali component collection methods continuously, respectively. That is, air can be drawn into the apparatus and continuously passed through both the acid and alkali component adsorption columns constituting the apparatus. More specifically, (i) air passing through the acid component adsorption column can then pass through the alkali component adsorption column, and (ii) air passing through the alkali component adsorption column can then pass through the acid component adsorption column. In this case, the acid and alkali component adsorption columns can be directly connected or connected via a connecting pipe. [Implementation Mode 3: Quantitative Method] The quantitative method related to one embodiment of the present invention (hereinafter also referred to as "this quantitative method") is a quantitative method for the concentration of acid or alkali components in a gas. It uses this trapping method and includes the following steps: a trapping step, which traps the acid or alkali components in the gas; a dissolution step, which involves passing a solvent through the trapping adsorption column containing the acid or alkali components, so that the trapped acid or alkali components dissolve in the solvent to obtain a dissolution solution; and a measurement step, which measures the concentration of the acid or alkali components in the dissolution solution.

[0057] This quantitative method utilizes the adsorption column for this purpose to capture and quantify acidic or alkaline components in a gas. As previously described, this adsorption column and method enable the capture and quantification of acidic or alkaline components in a gas with short time and high sensitivity. Therefore, this quantitative method can also capture and quantify acidic or alkaline components in a gas with short time and high sensitivity.

[0058] Hereinafter, the method of using an acid adsorption column to quantify the concentration of acid components in a gas, as described in this quantitative method, will also be referred to as the "acid component quantitative method." Similarly, the method of using an alkali adsorption column to quantify the concentration of alkali components in a gas, as described in this quantitative method, will also be referred to as the "alkali component quantitative method." This quantitative method is either an acid component quantitative method or an alkali component quantitative method.

[0059] Regarding the composition of the adsorption column used in this quantitative method, the composition described in [Embodiment 1: Adsorption Column for Collection] is referenced. Furthermore, the acid and base components that are the quantitative targets of this quantitative method are not particularly limited, and may be the acid and base components illustrated in the above-mentioned [Embodiment 1: Adsorption Column for Collection] column.

[0060] Here, by performing both the acid component quantification method and the alkali component quantification method on the same gas, the acid and alkali components in the gas can be quantified simultaneously. Furthermore, this quantification method can be performed in the following steps of collection and dissolution even when the adsorption column for collection is not connected to the measuring device for measuring the concentration of acid or alkali components in the dissolution solution, that is, it can be performed offline.

[0061] (Capture steps) This quantitative method uses the trapping method, which includes a trapping step to trap acidic or alkaline components in the aforementioned gas. Furthermore, the structure of the trapping method used in the aforementioned trapping step is described in [Embodiment 2: Trapping Method].

[0062] When both the acid component quantification method and the alkali component quantification method are implemented simultaneously, the same method as when both the acid component trapping method and the alkali component trapping method are implemented simultaneously can be used to perform the trapping steps in the acid component quantification method and the alkali component quantification method respectively. That is, the aforementioned air can be drawn into a device equipped with an acid component adsorption column and an alkali component adsorption column arranged in series, so that the air is simultaneously circulated through both the acid component adsorption column and the alkali component adsorption column constituting the device. Then, the acid component adsorption column and the alkali component adsorption column are separated from each other by the device, and the dissolution step and the measurement step described later can be performed on them respectively.

[0063] (Dissolution step) This quantitative method includes a dissolution step, which involves passing a solvent through a pre-collected adsorption column containing the aforementioned acid or alkali components, thereby dissolving the pre-collected acid or alkali components in the solvent to obtain a dissolution solution.

[0064] In the aforementioned dissolution step, the acidic or alkaline components captured by the aforementioned adsorption column dissolve in the aforementioned solvent, resulting in a dissolution solution containing the aforementioned acidic or alkaline components. The aforementioned solvent is not particularly limited as long as it can dissolve the aforementioned acidic or alkaline components. From the perspective of the sensitivity of this quantitative method, it is preferable to use a solvent that does not contain impurities that would reduce the sensitivity, or a solvent containing very small amounts of such impurities. From this viewpoint, pure water is particularly preferred as the aforementioned solvent. Here, pure water refers to water with a resistivity in the range of 0.1 MΩ·cm or higher and 18 MΩ·cm or lower.

[0065] (Measurement Procedure) This quantitative method includes the step of determining the concentration of the aforementioned acidic component or the aforementioned alkaline component in the aforementioned dissolution solution.

[0066] The aforementioned acidic or alkaline components in the aforementioned leachate are the same as those in the aforementioned gas captured in the aforementioned trapping step. Therefore, the concentration of the aforementioned acidic or alkaline components in the aforementioned leachate measured in the aforementioned measurement step corresponds to the concentration of the aforementioned acidic or alkaline components in the aforementioned gas. Thus, the concentration of the aforementioned acidic or alkaline components in the aforementioned gas can be quantified by the aforementioned measurement step.

[0067] The method for determining the concentration of the aforementioned acidic or alkaline components in the aforementioned dissolution solution (hereinafter also referred to as "this determination method") can employ known methods and is not particularly limited. This determination method can be, for example, liquid chromatography. Examples of liquid chromatography methods include anion exchange chromatography using ion exchange columns, cation exchange chromatography, and suppressor-type ion chromatography using suppressors.

[0068] Furthermore, the aforementioned acidic component exists as an anion in the aforementioned dissolution solution, and the aforementioned alkaline component exists as a cation in the aforementioned dissolution solution. Therefore, by simply measuring the overall concentration of anions in the aforementioned dissolution solution using the aforementioned method, the measured concentration can be set as the concentration of the aforementioned acidic component. Similarly, by simply measuring the overall concentration of cations in the aforementioned dissolution solution using the aforementioned method, the measured concentration can be set as the concentration of the aforementioned alkaline component.

[0069] [Implementation Mode 4: Management Methods for Space Cleanliness] The space cleanliness management method (hereinafter also referred to as "this management method") of one embodiment of the present invention uses this quantitative method and includes the following steps: a quantitative step, which is to quantify the concentration of acid or alkali components in the gas within the space; and an elimination step, which is to identify and eliminate the source of the acid or alkali components in the gas within the space when the concentration of the acid or alkali components obtained by the aforementioned quantitative step exceeds a threshold.

[0070] Using this management method, the concentration of acidic or alkaline components of pollutants in a space can be quantified quickly and with high sensitivity in the aforementioned quantitative steps. Based on this, when the concentration of acidic or alkaline components obtained by the aforementioned quantitative method exceeds a certain threshold, the process moves to the step of locking down and eliminating the source of the acidic or alkaline components in the aforementioned gas inside the space.

[0071] Because the aforementioned quantification can be performed with high sensitivity, this management method allows the specific threshold to be set to a low value. Therefore, by setting the specific threshold to a low value, this management method can pinpoint and eliminate the source of contamination at a low level, ensuring a highly clean space. Furthermore, because the aforementioned quantification can be performed quickly, the time from the start of the quantification to the completion of source identification and elimination can be shortened, easily ensuring a highly clean space. Therefore, this management method easily ensures a highly clean space. Additionally, in this specification, "source of contamination" refers to "the origin of the acid or alkali components in the aforementioned gas within the aforementioned space."

[0072] (Quantitative steps) This management method includes a quantitative step of using this quantitative method to quantify the concentrations of acidic and alkaline components in the gas within a space. By implementing the aforementioned quantitative step, the concentrations of acidic and alkaline components of pollutants in the gas within a space can be easily quantified.

[0073] The space described in this specification refers to the space used for evaluation purposes, such as quantitative methods, where the adsorption column for collection is employed. For example, it could be a space where, in operations such as the manufacture of electronic substrates, the concentrations of the aforementioned acidic and alkaline components, which are considered contaminants, are required to be below a specific threshold. Furthermore, the space used in this management method can generally be a space with a specific volume formed by walls and beds. There are no particular limitations on the aforementioned space; examples include cleanrooms, clean areas, and spaces within manufacturing equipment.

[0074] The composition of the quantitative method in the aforementioned quantitative steps is based on the composition described in [Effect 3: Quantitative Method] above.

[0075] In this management method, to ensure a highly clean space, the amount (concentration) of the aforementioned acidic and / or alkaline components in the gas within the space is quantitatively determined. Then, based on this quantitatively obtained concentration, the source of contamination is identified and eliminated. Therefore, in the aforementioned quantitative step, either the aforementioned acidic component quantitative method or the aforementioned alkaline component quantitative method can be implemented, or both methods can be implemented simultaneously, but it is preferable to implement both methods simultaneously. To implement these simultaneously, it is preferable to use a device configured to connect the aforementioned acidic component adsorption column and alkaline component adsorption column in series. When using this device, since both the acidic component adsorption column and the alkaline component adsorption column can be ventilated by a single suction, the aforementioned quantitative step and this management method can be implemented easily.

[0076] (Steps to identify and eliminate the source of pollution) This management method includes an elimination step: when the concentration of the aforementioned acidic or alkaline components, as determined by the quantitative step, exceeds a threshold, the source of contamination is identified and eliminated. By implementing this step, the concentration of the acidic or alkaline components, which are contaminants, can be controlled below the threshold within the space, thereby ensuring a highly clean space.

[0077] The threshold values ​​in the aforementioned steps can be appropriately determined by the type of operation performed in the aforementioned space and the required quality of the product manufactured by that operation, and are not particularly limited. For example, when manufacturing a high-quality electronic substrate in the aforementioned space, the aforementioned threshold values ​​can be 1.0 μg / m3, 0.1 μg / m3, or 0.01 μg / m3, etc.

[0078] Locating and eliminating the aforementioned sources of pollution means: determining the concentrations of the aforementioned acidic and alkaline components, which are pollutants within the space, and taking corresponding actions. There are no particular limitations on the specific method used, and known methods can be employed.

[0079] One embodiment of the present invention may be the invention shown in [1] to [7] below. [1] An adsorption column for capturing acid or alkali components in a gas, which is filled with a non-porous substrate, wherein the non-porous substrate holds an alkaline adsorbent for adsorbing acid components or an acidic adsorbent for adsorbing alkali components; The pressure loss of the aforementioned adsorption column for trapping gas is less than 10 kPa when the adsorption column for trapping gas is aspirated at an aspiration rate of 2.0 L / min. [2] As in [1], the adsorption column for trapping has a void volume of 200 μL or more and 3000 μL or less. [3] The adsorption column for trapping, as in [1] or [2], wherein the amount of the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent is 0.4 μeq or more and 50 μeq or less. [4] A method for capturing acid or alkali components in a gas, wherein the gas is circulated through an adsorption column for capturing any of [1] to [3] to capture the acid or alkali components in the aforementioned gas. [5] The trapping method as described in [4] involves venting the aforementioned gas through the aforementioned trapping adsorption column at a flow rate of 2.0 L / min or higher. [6] A method for quantifying the concentration of an acidic or alkaline component in a gas, comprising the following steps: a trapping step, wherein the acidic or alkaline component in the gas is trapped using the trapping method of [4] or [5]; The dissolution step involves passing a solvent through an adsorption column containing the aforementioned acidic or alkaline components, causing the captured acidic or alkaline components to dissolve in the solvent to obtain a dissolution solution; and The determination procedure involves measuring the concentration of the aforementioned acidic or alkaline components in the aforementioned dissolution solution. [7] A method for managing the cleanliness of a space, comprising the following steps: a quantitative step, which uses the quantitative method of [6] to quantify the concentration of acid or alkali components in the gas within the space; and The elimination step is to identify and eliminate the source of the acid or alkali component in the gas inside the space when the concentration of the aforementioned acid or alkali component exceeds the threshold obtained from the quantitative step.

[0080] The present invention will be further described in detail below with reference to the embodiments, but the present invention is not limited to these embodiments.

[0081] [Determination Method] The method for determining the properties of the adsorption column used for trapping described in the examples is shown below.

[0082] (weight) In this embodiment, the weight of the adsorption column for collection is determined using a weighing scale (manufacturer: Mettler Toledo Ltd., product name: electronic non-automatic scale PB3003-L).

[0083] (Void volume) The adsorption column for trapping described in the example was dried by purging with compressed air at a flow rate of 2 L / min for 17 hours. The weight of the adsorption column for trapping after drying was measured. The measured value is set as W0 (g). Next, room temperature pure water was introduced into the interior of the aforementioned adsorption column for trapping after drying, filling the interior of the adsorption column for trapping with pure water. The weight of the adsorption column for trapping filled with the aforementioned pure water was measured. The measured value is set as W1 (g). Here, the density of the aforementioned pure water is set as 1 g / cm3 to calculate the pore volume of the aforementioned adsorption column for trapping. Specifically, the aforementioned pore volume is assumed to be the same as the weight W2 (g) of the pure water filled into the aforementioned adsorption column for trapping, and the pore volume is calculated based on the following formula (1). The void volume of the adsorption column for collection (cm3) = W2(g) = W1(g) - W0(g) …(1)

[0084] (Equivalent amounts of alkaline adsorbent in the acid adsorption column and acidic adsorbent in the alkaline adsorption column) In the acid adsorption column described in the examples, 10 mL of pure water was passed through to dissolve the basic adsorbent in the column, thus obtaining a first eluent. Next, after passing 10 mL of pure water through the same acid adsorption column, 40 mL of pure water was passed through to dissolve the basic adsorbent, thus obtaining a second eluent. Both the first and second eluents were subjected to ion-particle chromatography to determine the equivalent amount of basic adsorbent contained in each eluent. The sum of the measured equivalent amounts of basic adsorbent in each eluent was defined as the equivalent amount of basic adsorbent contained in the aforementioned acid adsorption column.

[0085] Similarly, in the alkaline adsorption column described in the examples, 10 mL of pure water was passed through to dissolve the acidic adsorbent in the column, thus obtaining a first eluent. Next, 40 mL of pure water was passed through the same alkaline adsorption column after passing through 10 mL of pure water to dissolve the acidic adsorbent, thus obtaining a second eluent. Both the first and second eluents were subjected to ion chromatography to determine the equivalent amount of acidic adsorbent contained in each eluent. The sum of the measured equivalent amounts of acidic adsorbent in each eluent was defined as the equivalent amount of acidic adsorbent contained in the aforementioned alkaline adsorption column.

[0086] (Pressure loss) A suction pump was connected to the adsorption column for trapping described in the examples, and suction was performed at a suction rate of 2.0 L / min. The pressure loss at this time was measured using a differential pressure gauge. In this example, the suction pump manufactured by Shibata Scientific Co., Ltd., with the product name Mini Pump-MP MP-Σ300, was used for the aforementioned pressure loss measurement and in Examples 3 to 5 described below.

[0087] (Ion chromatography) The determination methods for the equivalent amounts of alkaline and acidic adsorbents shown above, and for the determination of the amount of anions and cations attached as described in Examples 3-5 below, are as follows.

[0088] The ion chromatography system, equipped with electrolysis suppression and conductivity detection capabilities, was used to analyze the dissolution solution. The anion channel of this ion chromatography system utilizes a potassium hydroxide (KOH) gradient dissolution and inorganic and organic acid anion analysis columns. The cation channel of this ion chromatography system utilizes a methanesulfonic acid gradient dissolution and a cation analysis column.

[0089] [Example 1: Manufacturing of an acid adsorption column] 0.9 g of quartz particles with a diameter of 0.5 mm to 1.0 mm were packed into the outer shell of a cylindrical polypropylene column with an internal volume of 0.92 mL. After methanol was passed through the column, it was rinsed by passing ultrapure water (resistivity 18 MΩ·cm) through the column.

[0090] After the aforementioned cleaned column is circulated with a mixed aqueous solution of sodium carbonate and glycerol, it is then ventilated with clean air and dried to create an acid adsorption column.

[0091] The physical properties of the manufactured acid adsorption column were determined using the aforementioned method. The results showed that the pressure loss during adsorption in the aforementioned acid adsorption column, under the conditions of a pore volume of 0.44 cm3, an adsorbent equivalent of 1.80 μeq, and an adsorption rate of 2.0 L / min, was 2.73 kPa.

[0092] [Example 2: Manufacturing of an Alkali Adsorption Column] 0.9 g of quartz particles with a diameter of 0.5 mm to 1.0 mm were packed into the outer shell of a 0.92 mL polypropylene cylindrical column. After methanol was passed through the column, ultrapure water (resistivity 18 MΩ·cm) was passed through the column to clean it.

[0093] After the aforementioned cleaned column is circulated with a mixed aqueous solution of sulfuric acid and glycerol, clean air is circulated and the column is dried to create an alkaline adsorption column.

[0094] The physical properties of the manufactured alkaline adsorption column were determined using the aforementioned method. The results showed that the pressure loss during adsorption in the aforementioned alkaline adsorption column, under the conditions of a pore volume of 0.44 cm3, an adsorbent equivalent of 1.01 μeq, and an adsorption rate of 2.0 L / min, was 2.70 kPa.

[0095] [Example 3: Leaching of an adsorption column used for capturing air in a cleanroom] The acid adsorption column manufactured in Example 1 and the alkali adsorption column manufactured in Example 2 were respectively connected to air pumps, and the air in the laboratory clean room was ventilated for 5 hours at a suction rate of 2.0 L / min.

[0096] Following the aforementioned aeration, ultrapure water was passed through the aforementioned acid adsorption column and the aforementioned alkali adsorption column at a rate of 2 mL / min for 5 minutes to obtain a dissolution solution containing anions and cations, i.e., acid and alkali components. The obtained dissolution solution was then subjected to ion-donated chromatography to determine the concentrations (unit: ng / mL) of anions and cations, i.e., acid and alkali components. Furthermore, the lower limit of quantitation (LOQ) was determined by performing the same operation without air. The measured LQ and the concentrations of acid and alkali components in the dissolution solution are recorded in Table 1. In Table 1, the acid adsorption column is referred to as "Column A," and the alkali adsorption column is referred to as "Column B." The concentrations of acid and alkali components in the dissolution solution are simply recorded as "concentration in the dissolution solution." [Table 1] Measurement results of Example 3 (concentration of acid and alkali components in the dissolution solution) Types of adsorption columns for trapping Tube Column A tubular B Types of acidic or alkaline components F- acetic acid Formic acid Cl- NO2 - NO3 - Br- PO4 3- SO4 2- NH4+ Lower limit of quantitation [ng / mL] 0.5 2 2 0.5 0.5 0.5 0.5 1 0.5 1 Concentration in the dissolution solution [ng / mL] 0.429 147.3 214.6 2.664 85.19 2.640 Not detected Not detected 25.32 162.3 [Example 4: Analysis Results of Air in a Cleanroom] A quantitative device with the configuration shown in Figure 1 is manufactured. Specifically, the acid adsorption column 1 manufactured in Example 1 and the alkali adsorption column 2 manufactured in Example 2 are connected by a connecting tube 4, and the side opposite to the side of the alkali adsorption column 2 connected to the acid adsorption column 1 is connected to a suction pump 3 to manufacture the quantitative device.

[0097] The opposite side of the acid adsorption column 1 and the alkali adsorption column 2 of the aforementioned quantitative device was connected to a cleanroom equipped with chemical filter media. Next, a suction pump 3 was used to aspirate both the acid adsorption column 1 and the alkali adsorption column 2 at a flow rate of 2 L / min for 5 hours, followed by ventilation. After ventilation, 10 mL of pure water was passed through both the acid adsorption column 1 and the alkali adsorption column 2 to obtain a dissolution solution (4a) and a dissolution solution (4b). The dissolution solutions (4a) and (4b) were then subjected to ion chromatography to quantify the individual component concentrations of the anions (acid component) in the dissolution solution (4a) and the cations (alkali component) in the dissolution solution (4b). The individual concentrations of the acid and alkali components in the cleanroom air were calculated by multiplying the dissolution volume by the obtained quantitative concentrations in the dissolution solutions (4a) and (4b) and dividing by the air intake. Furthermore, the lower limit of quantitation (LQ) is calculated by performing the same operation without air intake. Additionally, the calculation of each concentration and LQ is repeated twice, and the average of the two calculated values ​​is taken as the aforementioned concentration and LQ.

[0098] The calculated lower limit of quantitation and the individual concentrations of acid and alkali components in the cleanroom are shown in Table 2 below. Similar to Table 1, the acid adsorption column is referred to as "Column A" and the alkali adsorption column is referred to as "Column B" in Table 2. Furthermore, the individual concentrations of acid and alkali components in the cleanroom are recorded only as "cleanroom concentration" in Table 2. [Table 2] Measurement results of Example 4 (concentration of acid and alkali components in the cleanroom) Types of adsorption columns for trapping Tube Column A tubular B Types of acidic or alkaline components F- acetic acid Formic acid Cl- NO2 - NO3 - Br- PO4 3- SO4 2- NH4+ Lower limit of quantitation [μg / m3] 0.01 0.04 0.04 0.01 0.01 0.01 0.01 0.02 0.01 0.02 Concentration in cleanroom [μg / m3] Not detected 2.4 3.1 Not detected 1.4 0.03 Not detected Not detected 0.42 2.4

[0099] [Example 5: Results of periodic air analysis in a cleanroom] The cleanrooms immediately after startup, and one month, two months, and three months after startup were set as targets. Using the same method as in Example 4, the individual concentrations and quantitative lower limits of acid and alkali components in the air of the cleanrooms were calculated.

[0100] The calculated lower limit of quantitation and the individual concentrations of acid and alkali components in the cleanroom are shown in Table 3 below. Similar to Table 2, Table 3 also refers to the acid adsorption column as "column A" and the alkali adsorption column as "column B", and the individual concentrations of acid and alkali components in the cleanroom are simply recorded as "concentration in cleanroom". [Table 3] Measurement results of Example 5 (concentration of acid and alkali components in the cleanroom from startup to after a specific period) Types of adsorption columns for trapping Tube Column A tubular B Types of acidic or alkaline components F- acetic acid Formic acid Cl- NO2 - NO3 - Br- PO4 3- SO4 2- NH4+ Lower limit of quantitation [μg / m3] 0.01 0.04 0.04 0.01 0.01 0.01 0.01 0.02 0.01 0.02 Concentration in cleanroom [μg / m3] At present Not detected 2.4 3.1 Not detected 1.4 0.03 Not detected Not detected 0.42 2.4 One month later Not detected 4.7 2.1 Not detected 0.85 0.10 Not detected Not detected 0.06 2.2 Two months later Not detected 4.7 2.1 Not detected 0.85 0.02 Not detected Not detected 0.06 3.0 3 months later Not detected 2.9 1.1 Not detected 0.64 0.02 Not detected Not detected 0.07 1.7 [result] As shown in Examples 1 and 2, the adsorption columns for trapping manufactured in Examples 1 and 2 meet the requirements of (i) to (iii) below, and therefore conform to the adsorption columns for trapping. (i) Filled with a non-porous substrate. (ii) The aforementioned non-porous substrate contains an alkaline adsorbent for adsorbing acidic components or an acidic adsorbent for adsorbing alkaline components. (iii) The pressure loss of the adsorption column for trapping gas is less than 10 kPa when the adsorption column for trapping gas attracts gas at an adsorption rate of 2.0 L / min.

[0101] Furthermore, according to the descriptions in Examples 4 and 5, the methods for capturing acid and alkali components in Examples 4 and 5 involve passing gas through the adsorption column used for capturing to capture the acid or alkali components in the aforementioned gas, thus conforming to the present capture method.

[0102] Furthermore, according to the descriptions in Examples 4 and 5, the quantitative methods for acid and alkali components in Examples 4 and 5 are methods for quantitatively determining the concentration of acid or alkali components in the gas by including the following steps (iv) to (vi), and therefore conform to this quantitative method. (iv) The capture step, which involves using this capture method to capture the acid or alkali components in the aforementioned gas. (v) The dissolution step involves passing a solvent through an adsorption column used for trapping the aforementioned acidic or alkaline components, thereby dissolving the trapped acidic or alkaline components in the solvent to obtain a dissolution solution. (vi) Determination steps, which involve determining the concentration of the aforementioned acidic or alkaline components in the aforementioned dissolution solution.

[0103] Furthermore, the descriptions in Examples 3-5 and Tables 1-3 demonstrate that, using the trapping and quantification methods of the adsorption columns manufactured in Examples 1 and 2, acidic and alkaline components can be captured with high sensitivity even during a short aeration time of 5 hours. Similarly, the descriptions in Examples 4 and 5 and Tables 2 and 3 demonstrate that, using the aforementioned trapping and quantification methods in Examples 4 and 5, acidic and alkaline components can be captured and quantified with high sensitivity even during a short aeration time of 5 hours.

[0104] Therefore, it can be seen that by using the adsorption column for trapping, the trapping method, and the quantitative method, acidic or alkaline components in gases can be captured quickly and with high sensitivity, and then quantified. Furthermore, it can be seen that by using the adsorption column for trapping and the quantitative method, this management method can quickly identify and eliminate the aforementioned pollution sources, starting from a low concentration stage, thus easily ensuring a highly clean space.

[0105] [Suitable for industrial use] By utilizing this adsorption column for trapping, this trapping method, and this quantitative method, acidic or alkaline components in gases can be trapped and quantified quickly and with high sensitivity. Furthermore, by employing this management method, which combines the adsorption column for trapping, this trapping method, and this quantitative method, the source of contaminants can be located and eliminated quickly, starting from a low concentration level, thus easily ensuring a highly clean environment. Therefore, this adsorption column for trapping, this trapping method, this quantitative method, and this management method can be used for managing spaces requiring highly clean environments, such as those used in the manufacture of electronic substrates.

[0106] 1: Acid component adsorption column 2: Alkali component adsorption column 3: Suction Pump 4: Connecting pipe

Claims

1. An adsorption column for capturing acidic or alkaline components in a gas, comprising a non-porous substrate; wherein the non-porous substrate holds an alkaline adsorbent for adsorbing acidic components or an acidic adsorbent for adsorbing alkaline components; wherein the pressure loss of the adsorption column for capturing gas is 10 kPa or less when the gas is drawn at a suction rate of 2.0 L / min; and wherein the pore volume of the adsorption column for capturing gas is 200 μL or more and 3000 μL or less.

2. As in request item 1, the adsorption column for collection, wherein, The amount of the aforementioned alkaline adsorbent or the aforementioned acidic adsorbent is 0.4 μeq or more and 50 μeq or less.

3. A method for capturing acidic or alkaline components in a gas, wherein the gas is passed through an adsorption column for capturing in claim 1 or 2 to capture the acidic or alkaline components in the gas.

4. The trapping method as described in claim 3, wherein the aforementioned gas is circulated through the aforementioned trapping adsorption column at a flow rate of 2.0 L / min or higher.

5. A method for quantitatively determining the concentration of an acidic or alkaline component in a gas, comprising the following steps: a trapping step, wherein the trapping method of claim 3 is used to trap the acidic or alkaline component in the gas; a dissolution step, wherein a solvent is passed through the trapping adsorption column containing the acidic or alkaline component to dissolve the trapped acidic or alkaline component in the solvent to obtain a dissolution solution; and a determination step, wherein the concentration of the acidic or alkaline component in the dissolution solution is determined.

6. A method for managing the cleanliness of a space, comprising the following steps: a quantitative step, which uses the quantitative method of claim 5 to quantify the concentration of an acidic or alkaline component in a gas within the space; and an elimination step, which, when the concentration of the aforementioned acidic or alkaline component obtained in the aforementioned quantitative step exceeds a threshold, identifies and eliminates the source of the acidic or alkaline component in the aforementioned gas within the aforementioned space.

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