Electroplating tank device with spray plate

Abstract

This invention provides an electroplating tank device with a spray plate, comprising an outer tank, an inner tank, a spray plate, a reciprocating drive mechanism, and a circulating spray pump. The spray plate includes multiple spray pipes, each with a plurality of spray holes facing the electroplating rack. The reciprocating drive mechanism drives the spray plate to reciprocate in a horizontal direction parallel to the electroplating rack. The spray plate allows the electroplating solution to be directly sprayed vertically onto the surface of the object to be plated, significantly enhancing the flow and diffusion of metal ions in that direction and effectively alleviating the problem of ion accumulation and stagnation on the surface of the object. Simultaneously, the reciprocating drive mechanism drives the spray plate to move horizontally, resulting in a more comprehensive and uniform spray coverage, avoiding insufficient or excessive ion supply in localized areas, and significantly improving the thickness uniformity and deposition quality of the electroplated layer.

Claims

1. An electroplating tank apparatus with a spray plate, comprising: An outer tank; an inner tank disposed inside the outer tank, with an overflow pool between the inner wall of the outer tank and the outer wall of the inner tank for receiving electroplating solution overflowing from the inner tank; the inner tank has space for vertically mounting electroplating racks and anode plate assemblies, the object to be electroplated being mounted on the electroplating racks; a spray disc movably disposed inside the inner tank, the spray disc being located between the electroplating racks and the anode plate assemblies, the spray disc including multiple spray pipes, the spray pipes having a plurality of spray holes facing the electroplating racks; a reciprocating drive mechanism for driving the spray disc to reciprocate in a horizontal direction parallel to the electroplating racks; a circulating spray pump for pumping the electroplating solution from the overflow pool to the spray disc. When the electroplating solution in the inner tank exceeds the liquid level limit, it overflows into the overflow tank, and is then pumped to the spray plate by the circulating spray pump. It is sprayed from the spray holes onto the surface of the electroplating object on the electroplating rack and returns to the inner tank, forming a circulating spray of the electroplating solution onto the surface of the electroplating object. Multiple spray pipes are arranged vertically at equal intervals. With the diameter of the spray pipe as 'a', the distance between adjacent spray pipes is 'a'. The maximum horizontal stroke of the reciprocating drive mechanism driving the spray plate to reciprocate is 'a', where 'a' = 9-11 mm. The horizontal speed of the reciprocating movement of the spray plate is 0.5-2 m / min, and the flow rate of the spray plate is 10-80 L / min.

2. The electroplating bath apparatus with spray plate according to claim 1, wherein, The reciprocating drive mechanism drives the spray disc to reciprocate at more than four reversing positions.

3. The electroplating bath apparatus with spray plate according to claim 2, wherein, The reversing position points of the reciprocating drive mechanism that drive the spray disc to move back and forth are evenly distributed along the entire maximum stroke path.

4. The electroplating bath apparatus with spray plate according to claim 1, wherein, The reciprocating drive mechanism uses a linear motor.

5. The electroplating bath apparatus with spray plate according to claim 1, wherein, A filter is installed on the outlet pipe of the circulating spray pump.

6. The electroplating bath apparatus with spray plate according to claim 1, wherein, The outlet pipe of the circulating spray pump is equipped with a defoamer.

7. The electroplating bath apparatus with spray plate according to claim 1, wherein, The inner tank body has a first slot for inserting and installing the electroplating fixture and a second slot for inserting and installing the anode plate assembly on its side wall.

8. The electroplating bath apparatus with spray plate according to claim 1, wherein, The bottom of the spray disc is provided with rollers, and the bottom inner side of the inner pool is provided with guide grooves, with the rollers cooperating with the guide grooves.

9. The electroplating bath apparatus with a spray plate according to claim 8, wherein, An overhead space is provided between the bottom surface of the inner pool and the bottom of the inner side of the outer pool, and the bottom surface of the guide groove is provided with a liquid drop hole that runs vertically through the bottom.

10. The electroplating bath apparatus with spray plate according to claim 9, wherein, It also includes a lifting drive mechanism, which is used to drive the spray disc to move up and down along the inner pool.

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