Multilayer inductor structure

Abstract

A multilayer inductor structure is disposed within an interconnect structure, the interconnect structure comprising multiple metal layers. The multilayer inductor structure includes multiple coils. Each metal layer contains two coils. The inner endpoints of the coils in different layers are aligned with each other. The coils in the first and second metal layers are electrically coupled through conductive vias, and the coils in the third and fourth metal layers are also electrically coupled through conductive vias. One coil in the first metal layer can be coupled to a coil in the third metal layer via a connection structure, and the other coil in the first metal layer can be coupled to a coil in the fourth metal layer via another connection structure.

Claims

1. A multilayer inductor structure disposed in an interconnect structure, the interconnect structure comprising multiple metal layers, the multilayer inductor structure comprising: The first coil and the second coil are the first metal layer in the multilayer metal layer; The third and fourth coils are the second metal layer in the multilayer metal layers, which is located above the first metal layer. The inner endpoint of the third coil partially overlaps with the inner endpoint of the first coil and is electrically coupled via a first conductive via. The inner endpoint of the fourth coil partially overlaps with the inner endpoint of the second coil and is electrically coupled via a second conductive via. The fifth and sixth coils are the third metal layer in the multilayer metal layers, which is located above the second metal layer. The seventh and eighth coils are the fourth metal layer in the multilayer metal layers, which is located above the third metal layer. The inner endpoint of the seventh coil partially overlaps with the inner endpoint of the fifth coil and is electrically coupled via a third conductive via. The inner endpoint of the eighth coil partially overlaps with the inner endpoint of the sixth coil and is electrically coupled via a fourth conductive via. A first connection structure couples the outer endpoint of the second coil to the outer endpoint of the seventh coil. A second connection structure couples the outer endpoint of the first coil to the outer endpoint of the sixth coil.

2. The multilayer inductor structure as claimed in claim 1, wherein the outer end point of the third coil partially overlaps with the outer end point of the fifth coil, the outer end point of the fourth coil is connected to the input terminal, and the outer end point of the eighth coil is connected to the output terminal.

3. The multilayer inductor structure as described in claim 2 further includes a fifth conductive via coupled to the third coil and the fifth coil.

4. The multilayer inductor structure as claimed in claim 1, wherein the outer end of the third coil is connected to the negative input terminal, the outer end of the eighth coil is connected to the negative output terminal, the outer end of the fourth coil is connected to the positive input terminal, and the outer end of the fifth coil is connected to the positive output terminal.

5. The multilayer inductor structure as claimed in claim 1, wherein the outer endpoint of the third coil and the outer endpoint of the fifth coil are connected to a center tap.

6. The multilayer inductor structure as claimed in claim 1, wherein the first coil and the third coil have different winding directions, and the second coil and the fourth coil have different winding directions.

7. The multilayer inductor structure as claimed in claim 1, wherein the fifth coil and the seventh coil have different winding directions, and the sixth coil and the eighth coil have different winding directions.

8. The multilayer inductor structure as claimed in claim 1, wherein the first coil further includes a first extension extending outward from the outer end point of the first coil; the sixth coil further includes a third extension extending outward from the outer end point of the sixth coil; and the second connection structure couples the first extension and the third extension.

9. The multilayer inductor structure as claimed in claim 8, wherein the first extension and the third extension have the same direction of extension.

10. The multilayer inductor structure as described in claim 1, further comprising: The second coil further includes a second extension that extends outward from the outer end point of the second coil; The seventh coil further includes a fourth extension extending outward from the outer end of the seventh coil; and a first connection structure coupling the second extension and the fourth extension.

11. The multilayer inductor structure as claimed in claim 10, wherein the second extension and the fourth extension have the same direction of extension.

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