Ultrasonic generating device and ultrasonic generating system

Abstract

By focusing on the shape of the through-hole that connects the ultrasonic focusing section and the waveguide, a novel function is given to the object within the through-hole. The ultrasonic focusing section (12) and the waveguide (13) have a through-hole (20) that connects the ultrasonic focusing section (12) and the waveguide (13) in the front-rear direction. The inner peripheral surface (20A) forming the through-hole (20) has a first inner peripheral surface (21) and a deformable portion (23) disposed on the front end side of the first inner peripheral surface (21). The cross-sectional shape of the first inner peripheral surface (21) cut in the front-rear direction is formed into a shape that extends in a straight line in the front-rear direction. The deformable portion (23) is formed in a cross-section cut along the front-back direction, in at least one of the portion disposed inside the first inner circumferential surface (21) and in the portion disposed outside the first inner circumferential surface (21) (in the example shown in FIG1, the portion disposed inside the first inner circumferential surface (21)), and covers a part or the entire circumference of the inner circumferential surface (20A) (in the example shown in FIG1, the entire circumference).

Description

Ultrasonic generating device and ultrasonic generating system This invention relates to an ultrasonic wave generating device and an ultrasonic wave generating system. Non-Patent Document 1 discloses a technique for focusing a plane wave generated by the vibration of a piezoelectric ceramic through an ultrasonic focusing section and transmitting it to a narrow-diameter waveguide, from which it is output (see Figure 2(a) of p7 "2. Proposed Structure"). Furthermore, Non-Patent Document 1 discloses a configuration in which a through-hole is formed in both the ultrasonic focusing section and the waveguide (see Figures 2(b) and (c) of p7 "2. Proposed Structure"). Regarding the utilization of the through-hole, it can be assumed to function as, for example, imparting ultrasound to a liquid flowing through the through-hole, sensing near the waveguide front end using a sensor, and attracting fragmented tissue pulverized by the ultrasound output from the waveguide front end. [Prior Art Documents] [Non-Patent Documents] [Non-Patent Literature 1] Kyohei Yamada, Kang Chen, Kyosuke Irie, Takashi Iijima, Kanade Miyake, Tsuyoshi Morita, "A Cylindrical Waveguide with a Dual Reflector Structure for High-Power Ultrasonic Wave Induction (Tube Type DPLUS)", IEICE Technical Report US2021-9 (2021-06). [The problem the invention aims to solve] The technology in Non-Patent Document 1 is not good enough in terms of the shape of the through hole, and there is room for improvement in this regard. The purpose of this invention is to provide a technique that, by manipulating the shape of the through-hole penetrating the ultrasonic focusing section and the waveguide, can impart novel effects to objects within the through-hole. [Means for solving the problem] [1] The ultrasound generating apparatus of the present invention comprises: an ultrasound generating source for generating ultrasound; an ultrasound focusing section for focusing the ultrasound generated from the ultrasound generating source; and a waveguide for transmitting the ultrasound focused by the ultrasound focusing section. The ultrasound generating apparatus is arranged from the rear end side in the order of the ultrasound generating source, the ultrasound focusing section, and the waveguide. The ultrasound focusing section and the waveguide have a through hole that extends through the ultrasound focusing section and the waveguide in the front-rear direction. The inner peripheral surface forming the through hole has a first inner peripheral surface and a deformable portion disposed at a front end side of the first inner peripheral surface. The cross-sectional shape of the first inner peripheral surface cut along the front-rear direction is formed into a shape that extends linearly along the front-rear direction. The aforementioned deformable portion is formed in a cross-section cut along the aforementioned front-back direction, in at least one of the portion disposed inside the aforementioned first inner circumferential surface and in a portion disposed outside the aforementioned first inner circumferential surface, and covers a portion or the entire circumference of the aforementioned inner circumferential surface. According to the aforementioned ultrasonic generating device, by means of the deformable portion provided on the inner peripheral surface of the through hole, a novel function can be applied to the object inside the through hole. [2] In the ultrasonic generating device of [1], the above-mentioned through hole can also form a flow path for liquid flow. When ultrasound waves transmitted through at least one of the ultrasound focusing section and the waveguide are applied to the liquid flowing through the through-hole via the inner circumferential surface, the range that the ultrasound waves can reach tends to be biased towards the liquid near the inner circumferential surface of the through-hole. Regarding this, according to the aforementioned ultrasound generating apparatus, since turbulence can be generated in the flow of the liquid within the through-hole by means of the deformation section, the ultrasound system entering through the inner circumferential surface of the through-hole can more easily reach the entire liquid system. [3] In the ultrasonic generating device of [2], the inner peripheral surface may have a second inner peripheral surface disposed on the front end side of the deformed part, and the cross-sectional shape of the second inner peripheral surface cut along the front-rear direction is formed into a shape that extends in a straight line along the front-rear direction. According to the aforementioned ultrasonic generating device, liquid flowing into the through hole from the rear end side and generating turbulence in the deformed part can be formed as laminar or nearly laminar flow on the second inner circumferential surface. [4] In the ultrasonic generating device of [2] or [3], the aforementioned deformable part may also be provided in the portion of the through hole that penetrates the waveguide. According to the above-mentioned ultrasonic generating device, a small-amplitude ultrasonic wave can be applied to the liquid flowing in the part of the through waveguide in the through hole. [5] In any of the ultrasonic generating devices in [2] to [4], the aforementioned deformable portion may also be provided in the portion of the through hole that passes through the ultrasonic focusing portion. According to the aforementioned ultrasonic generating device, a large-amplitude ultrasonic wave can be imparted to the liquid flowing in the ultrasonic focusing section of the through-hole. [Effects of the Invention] According to the present invention, by focusing on the shape of the through hole that penetrates the ultrasonic focusing part and the waveguide, a novel function can be given to the object inside the through hole. [The form in which the invention is carried out] 1. First Embodiment 1-1. Configuration of the Ultrasonic Generating Device 10 As shown in FIG. 1, the ultrasonic generating device 10 includes: an ultrasonic generating source 11; an ultrasonic focusing section 12; and a waveguide 13. The ultrasonic generating source 11 generates ultrasonic waves. The ultrasonic focusing section 12 focuses the ultrasonic waves generated from the ultrasonic generating source 11. The waveguide 13 transmits the ultrasonic waves focused by the ultrasonic focusing section 12. The ultrasonic generating device 10 is configured from the rear end side in the order of ultrasonic generating source 11, ultrasonic focusing section 12, and waveguide 13. The ultrasonic source 11 is, for example, a piezoelectric element made of piezoelectric ceramic. The ultrasonic source 11 is formed into a plate shape having thickness in the front-to-back direction. The ultrasonic source 11 is formed into a ring shape (more specifically, a circular ring shape). The ultrasonic source 11 generates ultrasound when supplied with an electrical signal from the power supply device 100 (described later). The ultrasonic source 11 has a radiating surface 15 for generating ultrasound. The radiating surface 15 is disposed at the front end of the ultrasonic source 11 and is configured to face forward. The radiating surface 15 is a flat surface that extends in a direction orthogonal to the front-back direction of the ultrasonic generating device 10. As shown in FIG1, the ultrasound generated from the ultrasonic source 11 is a plane wave traveling straight forward. The ultrasonic source 11 generates ultrasound at a frequency of, for example, 30 kHz or higher and 3 MHz or lower. The ultrasonic focusing section 12 is formed of metal (e.g., duralumin). The rear end of the ultrasonic focusing section 12 is joined to the radiating surface 15 of the ultrasonic source 11. The ultrasonic focusing section 12 has a first reflecting surface 16 and a second reflecting surface 17. The first reflecting surface 16 is arranged opposite to the radiating surface 15 of the ultrasonic source 11. The relative direction between the first reflecting surface 16 and the radiating surface 15 of the ultrasonic source 11 is parallel to the front-rear direction. When viewed from the outside of the ultrasonic focusing section 12, the first reflecting surface 16 is a curved surface (e.g., a parabola) convex forward (opposite to the ultrasonic source 11). When viewed from the inside of the ultrasonic focusing section 12, the first reflecting surface 16 is concave. The center of the first reflecting surface 16 is located further forward than the outer periphery of the first reflecting surface 16. The first reflecting surface 16 is a paraboloid of rotation formed about axis A. Furthermore, axis A extends along the front-to-back direction through the center of the ultrasound source 11. The ultrasound focusing section 12 is formed in a ring shape with axis A as the central axis. The second reflecting surface 17 is arranged opposite to the first reflecting surface 16. When viewed from the outside of the ultrasonic focusing unit 12, the second reflecting surface 17 is a curved surface (e.g., a parabola) that convexes rearward (opposite to the first reflecting surface 16). When viewed from the inside of the ultrasonic focusing unit 12, the second reflecting surface 17 is concave. The center of the second reflecting surface 17 is located further forward than the outer periphery of the second reflecting surface 17. The second reflecting surface 17 is formed into a curved shape that extends rearward. The waveguide 13 is formed as a cylindrical shape extending forward from the front end of the ultrasound focusing section 12. Although the waveguide 13 is described in this embodiment as a different component from the ultrasound focusing section 12, it can also be the same component as the ultrasound focusing section 12. The waveguide 13 is preferably formed of a material with high ultrasound transmission performance, such as aluminum alloy or metallic glass. Alternatively, the waveguide 13 can also be formed of, for example, a shape memory alloy composed of titanium and nickel. The waveguide 13 is elastically deformable. The ultrasonic focusing section 12 and the waveguide 13 have a through hole 20 that extends through the ultrasonic focusing section 12 and the waveguide 13 in the front-rear direction. The through hole 20 is formed by the space forming the inner side of the annular ultrasonic focusing section 12 and the space forming the inner side of the cylindrical waveguide 13. The rear end of the inner peripheral surface 20A forming the through hole 20 is connected to the front end of the second reflecting surface 17 mentioned above. The ultrasonic source 11 is configured in a manner that does not obstruct the through-hole 20. The ultrasonic source 11 is positioned further outward than the outer periphery of the second reflecting surface 17 in a radial direction (hereinafter referred to simply as "radial") orthogonal to the front-back direction. The ultrasonic source 11 is formed in an annular shape (more specifically, a circular ring) surrounding the outer periphery of the second reflecting surface 17. The through-hole 20 is open behind the ultrasonic source 11 through the space inside the ultrasonic source 11. The inner circumferential surface 20A forming the through hole 20 has a first inner circumferential surface 21, a second inner circumferential surface 22, and a deformable part 23. The first inner peripheral surface 21 is positioned further forward than the second reflecting surface 17. The rear end of the first inner peripheral surface 21 is connected to the front end of the second reflecting surface 17. The cross-sectional shape of the first inner peripheral surface 21 cut along the front-rear direction forms a shape that extends in a straight line along the front-rear direction. The first inner peripheral surface 21 has a predetermined first cross-sectional shape that extends in a straight line along the front-rear direction. The first cross-section is formed by cutting the first inner peripheral surface 21 along a direction orthogonal to the front-rear direction. The shape and size of the first cross-section of the first inner peripheral surface 21 are fixed in the front-rear direction. The shape of the first cross-section of the first inner peripheral surface 21 is circular. The second inner circumferential surface 22 is positioned further forward than the first inner circumferential surface 21. The second inner circumferential surface 22 forms the front end of the inner circumferential surface 20A. The cross-sectional shape of the second inner circumferential surface 22 cut in the front-rear direction is a straight line extending in that direction. The second inner circumferential surface 22 has a predetermined second cross-sectional shape extending in a straight line along the front-rear direction. The second cross-section is formed by cutting the second inner circumferential surface 22 in a direction orthogonal to the front-rear direction. The shape and size of the second cross-section of the second inner circumferential surface 22 are fixed in the front-rear direction. The shape of the second cross-section of the second inner circumferential surface 22 is circular. The shape and size of the second cross-section of the second inner circumferential surface 22 are the same as the shape and size of the first cross-section of the first inner circumferential surface 21. That is, the shape of the second cross-section is the same as the shape of the first cross-section. The deformable portion 23 is disposed between the first inner circumferential surface 21 and the second inner circumferential surface 22 in the front-rear direction, and is connected to the first inner circumferential surface 21 and the second inner circumferential surface 22. As shown in Figures 1 and 2, the deformable portion 23 is positioned further inward than the first inner circumferential surface 21 in a cross-section cut along the front-rear direction. The deformable portion 23 is formed to protrude radially inward more than the first inner circumferential surface 21 and the second inner circumferential surface 22. The deformable portion 23 is bent such that it protrudes radially inward from the center portion in the front-rear direction. The deformable portion 23 is formed to cover the entire circumference of the inner circumferential surface 20A. The cross-section formed by cutting the deformable portion 23 in a direction orthogonal to the front-rear direction is circular. 1-2. The structure of the ultrasound generation system is shown in Figure 4. The ultrasound generation system includes an ultrasound generating device 10 and a power supply device 100. The power supply device 100 outputs electrical signals to the electrodes of the ultrasound generating device 10, thereby driving the ultrasound generating device 10. The power supply unit 100 includes: a signal generator 101; a power amplifier 102; and a measuring device 103. The signal generator 101 generates any vibration signal. The signal generator 101 can also be, for example, a frequency response analyzer. The power amplifier 102 amplifies the signal output from the signal generator 101 and applies it to the ultrasound generating device 10. The power amplifier 102 can also be, for example, a known power amplifier. The measuring device 103 monitors the signal amplified by the power amplifier 102. The measuring device 103 can also be, for example, an oscilloscope. The power supply unit 100 supplies the amplified signal to the ultrasound generating device 10 and monitors the applied voltage. In this embodiment, the ultrasonic focusing section 12 is made of metal and is conductive. Therefore, the power supply device 100 is connected to the ultrasonic focusing section 12 and electrically connected to the ultrasonic source 11 via the ultrasonic focusing section 12. If the ultrasonic focusing section 12 is an insulator, the power supply device 100 and the ultrasonic source 11 can also be connected directly or through other conductive components. 1-3. Function and Effect of Ultrasonic Generator 10 When an electrical signal is supplied from the power supply device 100, the ultrasonic generator 11 generates ultrasonic waves forward from the radiating surface 15. The ultrasonic waves radiated by the radiating surface 15 are reflected by the first reflecting surface 16 and focused towards the focal point of the first reflecting surface 16. The focal point of the first reflecting surface 16 is the same as the focal point of the second reflecting surface 17. Therefore, the ultrasonic waves passing through the focal point of the first reflecting surface 16 are reflected by the second reflecting surface 17 and guided as plane waves into the interior of the waveguide 13. The ultrasonic waves guided into the interior of the waveguide 13 propagate within the waveguide 13 and are radiated from the front end of the waveguide 13. As shown in Figure 3, the through-hole 20, which connects the ultrasonic focusing section 12 and the waveguide 13, forms a flow path for the liquid 91 to flow through. Within the through-hole 20, the liquid 91, supplied from the rear by the liquid supply section 90, flows forward. The liquid 91 flowing within the through-hole 20 receives the ultrasound waves transmitted to the ultrasonic focusing section 12 and the waveguide 13 by contacting the inner circumferential surface 20A forming the through-hole 20. The effect of imparting ultrasound waves to the liquid 91 is, for example, the generation of microbubbles within the liquid 91. In the region inside the first inner circumferential surface 21, because the flow of liquid 91 tends to form laminar flow, although ultrasound can easily reach the liquid 91 near the radially outer side of the first inner circumferential surface 21, it is not easy for ultrasound to reach the liquid 91 far from the radially inner side of the first inner circumferential surface 21. Regarding this, because the deformable portion 23 of the ultrasound generating device 10 is positioned further forward than the first inner circumferential surface 21, the flow of liquid 91 from the first inner circumferential surface 21 towards the deformable portion 23 easily forms turbulence. Therefore, the liquid 91 alternates between the radially inner and outer sides, making it easier for ultrasound to reach the entire liquid 91. In particular, because the flow path inside the deformable portion 23 of the ultrasound generating device 10 is narrower than the flow path inside the first inner circumferential surface 21, from this point of view, it also constitutes a configuration that makes it easy for ultrasound to reach the entire liquid 91. Furthermore, the deformable portion 23 is disposed within the through-hole 20 and the through-waveguide 13. The ultrasound waves transmitted to the ultrasound focusing portion 12 and the waveguide 13 attenuate as they move forward. Therefore, a smaller amplitude ultrasound wave can be imparted to the liquid 91 flowing inside the deformable portion 23. Furthermore, a second inner circumferential surface 22 is provided further forward than the deformable section 23. Therefore, the flow system of the liquid 91, which becomes turbulent in the deformable section 23, returns to a laminar or near-laminar state in the second inner circumferential surface 22. Then, the liquid 91 that has returned to a laminar or near-laminar state is discharged from the front end of the ultrasonic generating device 10. 2. Second Embodiment While the ultrasonic generating apparatus of the first embodiment is configured such that a deformable portion is disposed within a through-hole in a through-waveguide, it is not limited to this configuration. In the second embodiment, an example will be described where the deformable portion is disposed within a through-hole in a through-ultrasonic focusing section. Furthermore, in the description of the second embodiment, the same reference numerals are used for configurations identical to those of the first embodiment, and detailed descriptions are omitted. As shown in Figure 5, the ultrasonic generating apparatus 210 of the second embodiment includes an ultrasonic generating source 11, an ultrasonic focusing section 212, and a waveguide 213. The ultrasonic focusing section 212 and the waveguide 213 have a through hole 220 that extends through the ultrasonic focusing section 212 and the waveguide 213 in the front-rear direction. The inner peripheral surface 220A forming the through hole 220 has a first inner peripheral surface 221, a second inner peripheral surface 222, and a deformable portion 23. The ultrasonic focusing section 212 differs from the ultrasonic focusing section 12 of the first embodiment in that it has the deformable section 23, but is otherwise common. The waveguide 213 differs from the waveguide 13 of the first embodiment in that it does not have the deformable section 23, but is otherwise common. The first inner circumferential surface 221 differs from the first inner circumferential surface 21 of the first embodiment in that it is shorter in the front-to-back direction, but is otherwise common. The second inner circumferential surface 222 differs from the second inner circumferential surface 22 of the first embodiment in that it is longer in the front-to-back direction, but is otherwise common. The deformable portion 23 is provided in the through hole 220 at the location of the through ultrasonic focusing portion 212. Therefore, the ultrasonic generating device 210 of the second embodiment can impart ultrasonic waves with a large amplitude to the liquid 91 flowing inside the deformable portion 23. 3. The shape of the modified part in the third embodiment is not limited to the configuration of the first embodiment. In the third embodiment, other examples of the modified part will be described. Furthermore, in the description of the third embodiment, the same symbols are used for configurations identical to those in the first embodiment, and detailed explanations are omitted. As shown in Figure 6, the ultrasound generating apparatus 310 of the third embodiment includes an ultrasound generating source 11, an ultrasound focusing section 12, and a waveguide 313. The ultrasound focusing section 12 and the waveguide 313 have a through hole 320 that extends through the ultrasound focusing section 12 and the waveguide 313 in the front-rear direction. The inner peripheral surface 320A forming the through hole 320 has a first inner peripheral surface 21, a second inner peripheral surface 22, and a deformable portion 323. The waveguide 313 differs from the waveguide 13 of the first embodiment in that it is provided with a deformable part 323 to replace the deformable part 23 of the first embodiment, but they are common in other aspects. As shown in Figures 6 and 7, the deformable portion 323 is positioned further outward than the first inner circumferential surface 21 in a cross-section cut along the front-rear direction. The deformable portion 323 is configured as a recess formed in the inner circumferential surface 320A. The deformable portion 323 is formed in a shape that is further radially outward than both the first inner circumferential surface 21 and the second inner circumferential surface 22. The deformable portion 323 is curved such that the central recess in the front-rear direction becomes larger. The deformable portion 323 is formed covering the entire circumference of the inner circumferential surface 320A. The ultrasonic generating device 310 in the third embodiment can generate turbulence in the flow of liquid 91 flowing in the through hole 320 through the deformable part 323. 4. Fourth Embodiment In the fourth embodiment, a third example of the shape of the modified part will be described. Furthermore, in the description of the fourth embodiment, the same symbols are used for the same configuration as in the first embodiment, and detailed explanations are omitted. As shown in Figure 8, the fourth embodiment of the ultrasonic generating apparatus 410 includes an ultrasonic generating source 11, an ultrasonic focusing section 12, and a waveguide 413. The ultrasonic focusing section 12 and the waveguide 413 have a through hole 420 that extends through the ultrasonic focusing section 12 and the waveguide 413 in the front-rear direction. The inner peripheral surface 420A forming the through hole 420 has a first inner peripheral surface 421, a second inner peripheral surface 422, and a deformable portion 423. The first inner circumferential surface 421 is positioned further forward than the second reflecting surface 17. The rear end of the first inner circumferential surface 421 is connected to the front end of the second reflecting surface 17. The cross-sectional shape of the first inner circumferential surface 421, when cut along the front-rear direction, forms a shape that extends linearly along the front-rear direction. The first cross-sectional shape of the first inner circumferential surface 421 is a predetermined shape that extends linearly along the front-rear direction. The shape and size of the first cross-section of the first inner circumferential surface 421 are fixed in the front-rear direction. The shape of the first cross-section of the first inner circumferential surface 421 is circular. The second inner circumferential surface 422 is positioned further forward than the first inner circumferential surface 421. The second inner circumferential surface 422 forms the front end of the inner circumferential surface 420A. The cross-sectional shape of the second inner circumferential surface 422, when cut along the front-rear direction, forms a shape that extends linearly along the front-rear direction. The shape and size of the second cross-section of the second inner circumferential surface 422 are fixed in the front-rear direction. The shape of the second cross-section of the second inner circumferential surface 422 is circular. The size of the second cross-section of the second inner circumferential surface 422 is larger than the size of the first cross-section of the first inner circumferential surface 421. That is, in this embodiment, the shape of the second cross-section is larger than the shape of the first cross-section. The deformable portion 423 is disposed between the first inner circumferential surface 421 and the second inner circumferential surface 422 in the front-rear direction, and is connected to the first inner circumferential surface 421 and the second inner circumferential surface 422. The deformable portion 423 is formed into a curved surface shape with an increased diameter towards the front. Therefore, the ultrasonic generating device 410 of the fourth embodiment, through the deformable portion 423, causes turbulence in the flow of liquid 91 flowing in the through hole 420, and can return to a laminar or near-laminar state through the second inner circumferential surface 422. As a result, the ultrasonic waves transmitted in the waveguide 413 can easily reach the entire liquid 91 flowing in the through hole 420. 5. Fifth Embodiment While embodiments one through four have described a method of utilizing the through-hole as a flow path for liquid flow, other methods may also be employed. In the fifth embodiment, an example of another method of utilization is illustrated using the ultrasonic generating device described in embodiment two. As shown in Figure 9, the sensor probe 80 is inserted into the through hole 220 of the ultrasound generating device 210 from the rear. A sensor 81 is fixed at the front end of the sensor probe 80. The sensor 81 receives, for example, ultrasound waves emitted from the waveguide 213 and reflected from an object (not shown). When the sensor probe 80 contacts the inner peripheral surface 220A forming the through hole 220, there is a concern that ultrasound waves may leak from the contact area to the sensor probe 80. Regarding this, since the ultrasound generating device 210 shown in FIG. 9 has a deformable portion 23 protruding inward on the inner peripheral surface 220A, the contact area between the sensor probe 80 and the inner peripheral surface 220A can be suppressed to a large extent, thereby preventing ultrasound leakage through the sensor probe 80. Furthermore, when the sensor probe 80 contacts the second reflecting surface 17, there is a concern that the ultrasound waves reflected by the first reflecting surface 16 may not be reflected by the second reflecting surface 17 and may leak from the sensor probe 80. However, as shown in FIG. 9, the deformable portion 23 is provided on the side of the ultrasound focusing portion 212, which is close to the second reflecting surface 17, within the ultrasound focusing portion 212 and the waveguide 213. With this configuration, contact between the sensor probe 80 and the second reflecting surface 17 can be more reliably prevented. Furthermore, the sensor probe 80 is preferably not easily bent. <Other Embodiments> The present invention is not limited to the embodiments described above and illustrated. For example, the following embodiments are also included within the scope of the present invention. Furthermore, the various features of the above embodiments or the embodiments described below can be combined in any way as long as they are not contradictory. (1) In the first embodiment described above, the convex deformable portion 23 is integral with the cylinder constituting the waveguide 13, but it can also be provided separately. In the second and fifth embodiments described above, the convex deformable portion 23 is integral with the components constituting the ultrasonic focusing portions 12 and 212, but it can also be provided separately. (2) In the first embodiment described above, the convex deformable portion 23 is formed to cover the entire circumference of the inner circumferential surface 20A forming the through hole 20, but it can also be formed only in a portion of the circumferential direction of the inner circumferential surface 20A, as shown in FIG10. That is, as shown in FIG10, the deformed portion 23A can also be a form that protrudes radially inward from a portion of the circumferential direction in the inner peripheral surface 20A. Also, the deformed portion 23 in the second embodiment described above is the same. (3) In the third embodiment described above, although the concave deformed portion 323 is formed covering the entire circumferential direction in the inner peripheral surface 320A that forms the through hole 320, it can also be a form that is formed only in a portion of the circumferential direction in the inner peripheral surface 320A, as shown in the modified example 23B in FIG11. That is, as shown in FIG11, the deformed portion 23B can also be a form that is recessed radially outward from a portion of the circumferential direction in the inner peripheral surface 20A. (4) In the first embodiment described above, although the cross-sectional shape of the deformed portion is circular, it may not be circular. For example, as shown in the deformed portion 23C in FIG12, the cross-sectional shape may also be elliptical. If the cross-sectional shape of the deformed part 23C is made into an elliptical shape, the waveguide 13 can also be compressed radially and made into an elliptical shape together with the waveguide. Also, as shown in the deformed part 23D in Figure 13, the cross-sectional shape can also be cross-shaped. Also, as shown in the deformed part 23E in Figure 14, the cross-sectional shape can also be star-shaped. As shown in the deformed parts 23C, 23D, and 23E in Figures 12 to 14, if the cross-sectional shape of the deformed parts 23C, 23D, and 23E is different from the cross-sectional shape of the first inner peripheral surface 21, the deformed parts 23C, 23D, and 23E can also be arranged in a position that is radially inward from the first inner peripheral surface 21, or in a position that is radially outward from the first inner peripheral surface 21, or in a position formed by both. (5) As shown in the deformed part 23F in Figure 15, the central axis can also be offset from the central axis of the first inner peripheral surface 21. (6) As shown in FIG16, the ultrasonic generating device 610 may also be configured such that the deformable parts 23G, 23H, and 23I are spaced apart in the front-back direction and a plurality of them are provided. For example, as shown in FIG16, the deformable parts 23G, 23H, and 23I may also be provided on both the ultrasonic focusing part 612 side and the waveguide 613 side.Furthermore, as shown in FIG16, it is also possible to have both the convex deformable portion 23G illustrated in the first and second embodiments and the concave deformable portions 23H and 23I illustrated in the third embodiment. Moreover, although the deformable portions 23G, 23H, and 23I in FIG16 are arranged with a gap in the front-back direction, they may also be arranged continuously without gaps. Furthermore, although the convex deformable portion 23G and the concave deformable portions 23H and 23I in FIG16 are formed without a step difference, they may also be formed with a step difference. (7) In each of the above embodiments, the first reflecting surface 16 and the second reflecting surface 17 are parabolic surfaces. However, it is not limited to this, either the first reflecting surface 16 or the second reflecting surface 17 may not be strictly parabolic, as long as they are considered to be approximately parabolic shapes. In other words, it is acceptable as long as either or both of the first reflecting surface 16 and the second reflecting surface 17 are curved surfaces that allow the ultrasound generated from the ultrasound source 11 to reach the waveguides 13, 213, 313, and 413 via the first reflecting surface 16 and the second reflecting surface 17. The first reflecting surface 16 and the second reflecting surface 17 can also be composed of multiple micro-planes. (8) The shape of the second reflecting surface 17 is not limited to the shape of the first embodiment shown in FIG1. ​​It can also be, for example, a shape that protrudes backward as shown by the second reflecting surface 717 of the ultrasound focusing part 712 in the ultrasound generating device 710 shown in FIG17. (9) The ultrasound source 11 in the above embodiment is a piezoelectric element made of piezoelectric ceramic. However, it is not limited to this, and other piezoelectric materials can be used for the ultrasound source 11. The ultrasound source 11 can also be, for example, a piezoelectric laminate made of piezoelectric ceramic. (10) In each of the above embodiments, although the ultrasonic generating devices 10, 210, 310 and 410 are configured to have a second inner peripheral surface 22, 222 and 422, they may also be configured not to have a second inner peripheral surface 22, 222 and 422. Furthermore, the embodiments disclosed herein should be considered illustrative and not restrictive in all respects. The scope of this invention is not limited to the embodiments disclosed herein, but is intended to include all modifications within the scope shown in the claims or equivalent to the claims. 10: Ultrasonic generating device; 11: Ultrasonic generating source; 12: Ultrasonic focusing part; 13: Waveguide; 15: Radiation surface; 16: First reflecting surface; 17: Second reflecting surface; 20: Through hole; 20A: Inner peripheral surface; 21: First inner peripheral surface; 22: Second inner peripheral surface; 23: Deformable part; 23A: Deformable part; 23B: Deformable part; 23C: Deformable part; 23D: Deformable part; 23E: Deformable part; 23F: Deformable part; 23G: Deformable part; 23H: Deformable part; 23I: Deformable part; 80: Sensor probe; 81: Sensor; 90: Liquid supply part; 91: Liquid; 100: Power supply device; 101: Signal generator; 102: Power amplifier; 103: Measuring device; 2 10: Ultrasonic generating device 212: Ultrasonic focusing part 213: Waveguide 220: Through hole 220A: Inner peripheral surface 221: First inner peripheral surface 222: Second inner peripheral surface 310: Ultrasonic generating device 313: Waveguide 320: Through hole 320A: Inner peripheral surface 323: Deformable part 410: Ultrasonic generating device 413: Waveguide 420: Through hole 420A: Inner peripheral surface 421: First inner peripheral surface 422: Second inner peripheral surface 423: Deformable part 610: Ultrasonic generating device 612: Ultrasonic focusing part 613: Waveguide 710: Ultrasonic generating device 712: Ultrasonic focusing part 717: Second reflecting surface A: Axis Figure 1 is a cross-sectional view of the ultrasound generating device according to the first embodiment. Figure 2 is a cross-sectional view along line XX of Figure 1. Figure 3 is an explanatory diagram showing the state of liquid being supplied into the through hole. Figure 4 is a diagram showing the configuration of the ultrasound generating system. Figure 5 is a cross-sectional view of the ultrasound generating device according to the second embodiment. Figure 6 is a cross-sectional view of the ultrasound generating device according to the third embodiment. Figure 7 is a cross-sectional view along line YY of Figure 6. Figure 8 is a cross-sectional view of the ultrasound generating device according to the fourth embodiment. Figure 9 is a cross-sectional view of the ultrasound generating device according to the fifth embodiment. Figure 10 is a diagram corresponding to Embodiment 2, where the convex deformable part is only provided in a circumferential portion of the inner peripheral surface. Figure 11 is a diagram corresponding to Embodiment 7, where the concave deformable part is only provided in a circumferential portion of the inner peripheral surface. Figure 12 is a diagram corresponding to Embodiment 2, which has an elliptical deformable part. Figure 13 is a diagram corresponding to Embodiment 2, which has a cross-shaped deformable part. Figure 14 is a diagram corresponding to Embodiment 2, showing a star-shaped deformable portion. Figure 15 is a diagram corresponding to Embodiment 2, showing a deformable portion with its central axis offset from the central axis of the first inner circumferential surface. Figure 16 is a cross-sectional view of an ultrasonic generating device with a plurality of deformable portions. Figure 17 is a cross-sectional view of an ultrasonic generating device with a second reflecting surface of a different shape from the first embodiment. 10: Ultrasonic generating device 11: Ultrasonic wave generation source 12: Ultrasonic Focusing Unit 13: Waveguide 15: Radial surface 16: First reflecting surface 17: Second reflecting surface 20: Through hole 20A: Inner circumferential surface 21: First inner circumferential surface 22: Second inner circumferential surface 23: Deformation section A: Axis

Claims

1. An ultrasound generating apparatus comprising: an ultrasound source for generating ultrasound; an ultrasound focusing unit for focusing the ultrasound generated from the ultrasound source; and a waveguide for transmitting the ultrasound focused by the ultrasound focusing unit, arranged from a rear end side in the order of the ultrasound source, the ultrasound focusing unit, and the waveguide, wherein the ultrasound focusing unit and the waveguide have a through hole that extends through the ultrasound focusing unit and the waveguide in a front-rear direction, and the inner peripheral surface of the through hole has a first inner peripheral surface and a deformable portion disposed at a front end side of the first inner peripheral surface, wherein the cross-sectional shape of the first inner peripheral surface cut along the front-rear direction is a shape that extends linearly along the front-rear direction. The aforementioned deformable portion is formed in a cross-section cut along the aforementioned front-back direction, in at least one of the portions located inside the aforementioned first inner circumferential surface and in the portions located outside the aforementioned first inner circumferential surface, and covers a portion or the entire circumference of the aforementioned inner circumferential surface.

2. The ultrasonic generating apparatus of claim 1, wherein the aforementioned through hole constitutes a flow path for liquid flow.

3. The ultrasonic generating apparatus of claim 2, wherein the aforementioned inner peripheral surface has a second inner peripheral surface disposed on the front end side of the aforementioned deformed portion, and the cross-sectional shape of the aforementioned second inner peripheral surface cut along the aforementioned front-rear direction is formed into a shape that extends in a straight line along the aforementioned front-rear direction.

4. The ultrasonic generating apparatus of claim 2, wherein the aforementioned deformable portion is disposed in the portion of the aforementioned through hole that penetrates the aforementioned waveguide.

5. The ultrasonic generating apparatus of claim 2, wherein the aforementioned deformable portion is disposed in the portion of the aforementioned through hole that passes through the aforementioned ultrasonic focusing portion.

6. An ultrasound generating system comprising: an ultrasound generating device as claimed in any one of claims 1 to 5; and a power supply device for outputting an electrical signal to the aforementioned ultrasound generating device.

7. The ultrasound generating apparatus of claim 1, wherein the ultrasound focusing unit has a first reflecting surface and a second reflecting surface, the first reflecting surface is disposed opposite to the ultrasound generating source, the second reflecting surface is disposed opposite to the first reflecting surface, and the ultrasound focusing unit is configured to focus the ultrasound by reflecting the ultrasound generated by the ultrasound generating source through the first reflecting surface and the second reflecting surface.

8. The ultrasonic generating apparatus of claim 7, wherein the rear end of the aforementioned first inner peripheral surface is connected to the front end of the aforementioned second reflective surface.

9. The ultrasonic generating apparatus of claim 1, wherein the ultrasonic source is formed in a ring shape.

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