Grabbing mechanism and transport apparatus

Abstract

[The technical problem to be solved] It prevents interference with other adjacent objects and can strongly hold objects in place. Technical means to solve the problem The gripping mechanism of the present invention is a gripping mechanism for holding an object, comprising: at least two or more rotating fixing parts that can contact the object, and a rotation control part that controls the rotational movement of each rotating fixing part. By rotating at least two or more rotating fixing parts, the rotated rotating fixing parts come into contact with the object, thereby gripping the object. Furthermore, the conveying device of the present invention includes the gripping mechanism of the first invention, and moves the object held by the gripping mechanism.

Description

Technical Field

[0001] The present invention relates to a gripping mechanism and a conveying device, and can be applied to, for example, a gripping mechanism that grips an object with two or more gripping parts, and a conveying device that conveys the object gripped by the aforementioned gripping mechanism. Prior Art

[0002] For example, a probe substrate of a probe card has a plurality of probes (electrical contacts), and when the probes are mounted on or removed from the probe substrate, a conveying device equipped with a gripping mechanism is used.

[0003] FIG. 3(A) is an explanatory diagram showing the gripping mechanism in the gripping state, and FIG. 3(B) is an explanatory diagram showing the gripping mechanism in the released gripping state.

[0004] In this example, it is explained that the gripping mechanism 90 has two gripping pieces 91 and 92, and the case where the two gripping pieces 91 and 92 grip the probe as the object 2.

[0005] As illustrated in FIG. 3(A), when mounting the probe as the object 2, the two gripping pieces 91 and 92 are moved while being spaced apart from each other, and are moved in such a way that there is a probe between the two gripping pieces 91 and 92. Moreover, the position of one gripping piece 91 is moved so that one gripping piece 91 approaches the other gripping piece 92, and the probe is clamped between the two gripping pieces 91 and 92. Thus, the gripping mechanism 90 can grip the probe.

[0006] Thereafter, in the state gripped by the gripping mechanism 90, the probe is moved to the position of the mounting hole 31 on the probe substrate 3. And the probe is inserted into the mounting hole 31 provided on the probe substrate 3.

[0007] And when the mounting is completed, as illustrated in FIG. 3(B), by moving the position of one gripping piece 91 so that one gripping piece 91 moves away from the other gripping piece 92, the gripping is released. [Prior Art Documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-050321 Summary of the Invention

[0009] [Problems to be Solved by the Invention]

[0010] However, a large number of probes are arranged in the probe substrate 3. Therefore, the interval between adjacent probes is very narrow. When one holding piece 92 is moved, the one holding piece 91 interferes with the adjacent probe (refer to FIG. 4).

[0011] Also, although the object is exemplified as a plate-shaped probe, the object is not limited to the probe. Even when other plate-shaped members are held, the same problem will occur.

[0012] Therefore, for the holding mechanism and the transfer device including the holding mechanism, there is a strong need for the holding mechanism to prevent interference with adjacent objects and to strongly hold the object as a plate-shaped member. [Technical means for solving the problem]

[0013] In order to solve such a problem, the holding mechanism of the first invention is a holding mechanism for holding an object, and includes: (1) at least two or more rotation fixing parts that can contact the object, and (2) a rotation control part that controls the rotation actions of the respective rotation fixing parts. By rotating at least two or more rotation fixing parts and bringing the rotated rotation fixing parts into contact with the object, the object is held.

[0014] The transfer device of the second invention has the holding mechanism of the first invention, and the transfer device moves the object held by the holding mechanism. [Effects of the invention]

[0015] According to the present invention, interference with adjacent objects can be prevented, and an object composed of a plate-shaped member can be strongly held. Brief description of the drawings

[0016] [FIG. 1] is a configuration diagram showing the detailed configurations of the first holding part and the second holding part of the embodiment. [FIG. 2] is a configuration diagram showing the configuration of the transfer device of the embodiment. [FIG. 3] is a configuration diagram showing the configuration of a conventional holding mechanism. [FIG. 4] is an explanatory diagram for explaining the problem of a conventional holding mechanism. [FIG. 5] is an explanatory diagram for explaining the holding action of the holding mechanism of the embodiment. [Fig. 6] shows a configuration diagram (Part 1) of a gripping portion of a gripping mechanism according to a modified embodiment. [Fig. 7] shows a configuration diagram (Part 2) of a gripping portion of a gripping mechanism according to a modified embodiment. [Fig. 8] is an explanatory diagram for explaining gripping when a through hole is provided in an object in a modified embodiment. [Fig. 9] shows a configuration diagram (Part 3) of a gripping portion of a gripping mechanism according to a modified embodiment. [Fig. 10] shows a configuration diagram (Part 4) of a gripping portion of a gripping mechanism according to a modified embodiment. Embodiment

[0017] (A) Main embodiment

[0018] Hereinafter, embodiments of the gripping mechanism and the transport device of the present invention will be described in detail with reference to the drawings.

[0019] In this embodiment, the object to be gripped is exemplified as a plate-like member.

[0020] (A-1) Configuration of the embodiment (A-1-1) Configuration of the transport device 1 Fig. 2 is a configuration diagram showing the configuration of the transport device of the embodiment. In Fig. 2, the transport device 1 of the embodiment includes: an arm portion 14, a control portion 15, a base portion 16, and a gripping mechanism 10.

[0021] The transport device 1 transports the object 2 gripped by the gripping mechanism 10. In the example of Fig. 2, although the transport device 1 is exemplified as a multi-joint type device having a plurality of joints, as long as the device has a gripping mechanism 10, it is not limited to the structure exemplified in Fig. 2 and can be widely applied.

[0022] The control portion 15 is used to control the operations of the arm portion 14 and the gripping mechanism 10 respectively. The control portion 15 includes, for example, a CPU, a ROM, a RAM, an EEPROM, etc., and controls the operation of the arm portion 14 and the operation of the gripping mechanism 10 provided in the transport device 1 by the CPU executing a processing program. That is, the function of the control portion 15 has: a transport control portion 151 for controlling the operation of the arm portion 14, and a gripping control portion 152 for controlling the operation of the gripping mechanism 10.

[0023] The arm 14 includes: a first link 181, a second link 182, a third link 183, a fourth link 184, a first joint portion 171, a second joint portion 172, and a third joint portion 173.

[0024] The first link 181 is a member that connects between the base portion 16 and the first joint portion 171. The second link 182 is a member that connects between the first joint portion 171 and the second joint portion 172. The third link 183 is a member that connects between the second joint portion 172 and the third joint portion 173.

[0025] The fourth link 184 is a member connected to the third joint portion 173, and a gripping mechanism 10 is provided at one front end of the fourth link 184.

[0026] The first joint portion 171, the second joint portion 172, and the third joint portion 173 each receive control generated by the transfer control unit 151 of the control unit 15 and operate, causing the links (the first link 181, the second link 182, the third link 183, the fourth link 184) connected to each of the first joint portion 171, the second joint portion 172, and the third joint portion 173 to operate.

[0027] The gripping mechanism 10 is provided at the front end of the fourth link 184, receives control from the gripping control unit 152 of the control unit 15, and grips the object 2 by the first gripping portion 11 and the second gripping portion 12 described later.

[0028] Here, the object 2 is, for example, a plate-shaped object, and has a first side surface 21 and a second side surface 22 as shown in FIG. 1. The material of the object 2 is not particularly limited. For example, an object 2 with a thin plate thickness, a plate-shaped probe (electrical contact point) installed on a probe card can be applied. Moreover, the object 2 is not limited to a plate shape, and it may be made into a rod-shaped and elongated one.

[0029] (A-1-2) Configuration of the gripping mechanism 10 In FIG. 2, the gripping mechanism 10 of the embodiment includes: a main body portion 130, a first rotation driving portion 120A, a second rotation driving portion 120B, a first gripping portion 110A, and a second gripping portion 110B.

[0030] The body part 130 is the part that serves as the base of the gripping mechanism 10. On one side of the body part 130, a first rotary drive part 120A and a second rotary drive part 120B are provided, and the other side of the body part 130 (the side where the first gripping part 110A and the second gripping part 110B are not provided) is mounted on the front end part of the fourth link 184.

[0031] The first rotary drive part 120A and the second rotary drive part 120B are basically of the same configuration. When describing the common configuration, they are not distinguished and are only described as the rotary drive part 120.

[0032] The first rotary drive part 120A supports the first gripping part 110A having a substantially cylindrical shape. The first gripping part 110A rotates the first gripping part 110A by receiving the control of the gripping control part 152 to clamp and fix or release the object 2.

[0033] The second rotary drive part 120B also supports the second gripping part 110B having a substantially cylindrical shape in the same manner as the first rotary drive part 120A. The second gripping part 110B rotates the second gripping part 110B by receiving the control of the gripping control part 152 to clamp and fix or release the object 2.

[0034] The first gripping part 110A and the second gripping part 110B rotate under the control of the first rotary drive part 120A and the second rotary drive part 120B to clamp and fix the object 2.

[0035] The configurations of the first gripping part 110A and the second gripping part 110B will be described in detail with reference to FIG. 1. Also, the first gripping part 110A and the second gripping part 110B are basically of the same configuration. When describing the common configuration, they are not distinguished and are only described as the gripping part 110.

[0036] FIG. 1 is a configuration diagram showing the detailed configurations of the first gripping part 110A and the second gripping part 110B of the embodiment.

[0037] FIG. 1(A) is a diagram showing the state where the object 2 is gripped by the first gripping part 110A and the second gripping part 110B. FIG. 1(B) is a configuration diagram of the second gripping part 110B when viewed from the arrow B in FIG. 1(A), and FIG. 1(C) is a configuration diagram of the second gripping part 110B when viewed from the arrow C in FIG. 1(A).

[0038] As shown in FIGS. 1(A) to 1(C), the gripping part 110 (110A, 110B) of the embodiment includes: a main body part 113 (113A, 113B), and a first rotation fixing part 111 (111A, 111B) and a second rotation fixing part 112 (112A, 112B) provided on one end face 114 of the main body part 113.

[0039] That is, in the first end face 114 of the main body part 113 of the gripping part 110, a pair of rotation fixing parts 111 and 112 are provided.

[0040] The main body part 113 of the gripping part 110 is a substantially cylindrical rod-shaped member, and is formed of a material such as metal (such as copper, copper alloy, etc.) or synthetic resin whose hardness will not damage the surface of the object 2. In the main body part 113 of the gripping part 110, the other end is supported by the rotation driving part 120.

[0041] When receiving a driving force from the rotation driving part 120 (refer to FIG. 2), the main body part 113 rotates in two directions, namely the first direction (for example, clockwise) or the second direction (for example, counterclockwise) around the axis of the main body part 113 (around the axis substantially parallel to the Z axis). Along with this, a pair of rotation fixing parts 111 and 112 supported on the main body part 113 rotate in conjunction with the main body part 113. In this way, the entire gripping part 110 rotates by the driving force from the rotation driving part 120.

[0042] That is, the rotation driving part 120 can apply a rotation driving force to each of the rotation fixing parts 111 and 112 according to an instruction from the conveyance control part 151. Also, although the main body part 113 is described as a substantially cylindrical member, members such as a polygonal prism with three or more sides or an elliptical cylinder can also be used.

[0043] The first rotation fixing part 111 and the second rotation fixing part 112 are each a plate-shaped member of a substantially elliptical cylinder with a substantially elliptical cross-section. As shown in FIGS. 1(A) to 1(C), the plate-shaped members, that is, the first rotation fixing part 111 and the second rotation fixing part 112, are respectively arranged to face each other with a prescribed distance therebetween. In the gripping part 110, the object 2 is positioned between the pair of rotation fixing parts 111 and 112. By rotating the entire gripping part 110, the first rotation fixing part 111 and the second rotation fixing part 112 contact the object 2 with the object 2 clamped therebetween, and by further rotating, a force in the rotation direction is applied to the object 2, so that the object 2 can be fixed. The gripping operation will be described later.

[0044] Further, the cross-section of each of the first rotation fixing portion 111 and the second rotation fixing portion 112 of the plate-like member is not limited to an elliptical shape. For example, a rectangular shape, a semi-circular shape, a semi-elliptical shape, a crescent shape, etc. may also be used.

[0045] The distance length between the separated first rotation fixing portion 111 and the second rotation fixing portion 112 is slightly larger than the thickness (plate thickness length) of the object 2 of the plate-like member. The lengths of the first rotation fixing portion 111 and the second rotation fixing portion 112 (the lengths in the Z-axis direction) are determined corresponding to the size of the object 2 that can be held (especially the length in the Z-axis direction).

[0046] In addition, the dimension in the length direction of the pair of rotation fixing portions 111 and 112 can be selected according to the dimension in the height direction of the object 2.

[0047] Moreover, the dimension in the direction perpendicular to the length direction of the first rotation fixing portion 111 and the second rotation fixing portion 112 is set to be within the range of the surface of the first end face 114 of the main body portion 113. In other words, when the holding portion 110 rotates, the dimension of the first end face 114 of the main body portion 113 is set so that the movable range of the holding portion 110 that holds the object 2 becomes the maximum movable range.

[0048] Furthermore, as shown in FIGS. 1(B) and 1(C), in the case where a plurality of objects 2 are arranged, in order to hold a certain object 2, when the corresponding object 2 is provided between the first rotation fixing portion 111 and the second rotation fixing portion 112, it is ensured that the first rotation fixing portion 111 or the second rotation fixing portion 112 does not contact another object 2 adjacent to the corresponding object 2.

[0049] For example, as illustrated in FIG. 1(C), the interval length between another object 2 adjacent to a certain object 2 is set to "L1", and in the diameter of the first end face 114 of the main body portion 113, the length from the position of the second side face 22 of the object 2 to the end point position of the first end face 114 of the main body portion 113 is set to "L2". In the case of this embodiment, in order not to contact another adjacent object 2, it is set that L1 > L2. By doing so, since the cross-sectional dimension of the main body portion 113 of the holding portion 110 is set so that the movable range of the rotational holding becomes the maximum movable range, interference with the adjacent object 2 can be avoided.

[0050] The first rotation fixing part 111 and the second rotation fixing part 112 are each formed of a material such as a metal (e.g., copper, copper alloy, etc.) or a synthetic resin whose hardness will not damage the surface of the object 2. Also, the main body part 113, the first rotation fixing part 111, and the second rotation fixing part 112 may be of the same material or may be of different materials respectively.

[0051] Also, the first rotation fixing part 111 and the second rotation fixing part 112 may be fixed to the first end face 114 of the main body part 113 of the holding part 110. They may be physically integrated with the main body part 113 or may be detachable.

[0052] (A-2) Operations of the Embodiment (A-2-1) Operations of the Holding Mechanism Next, the holding operation performed by the holding mechanism 10 of the embodiment will be described in detail with reference to the drawings.

[0053] The holding part 110 is movable in the vertical direction along the Z axis. And, for example, by providing a sensor (not shown) for detecting the contact between the first end face 114 of the main body part 113 of the holding part 110 and the object 2, the position of the holding part 110 in the Z-axis direction can be maintained (refer to Fig. 1(B)). In other words, after detecting the contact between the first end face 114 of the main body part 113 and the object 2, the position of the holding part 110 in the Z-axis direction is maintained, and then the rotation control described later is performed.

[0054] Also, in a state where the holding part 110 is positioned above the object 2, after the holding part 110 is lowered by a predetermined distance to position the object 2 between the pair of rotation fixing parts 111 and 112, the rotation control described later may be performed on the object 2.

[0055] Fig. 5 is an explanatory diagram for explaining the holding operation of the holding mechanism 10 of the embodiment.

[0056] Fig. 5(A) shows a state where the two first holding parts 110A and the second holding part 110B rotate the object 2 in the same direction in conjunction with each other, and the object 2 is held by the two first holding parts 110A and the second holding part 110B.

[0057] On the other hand, FIG. 5(B) shows a state in which the two first gripping portions 110A and 110B that grip the object 2 rotate in opposite directions to release the grip on the object 2.

[0058] As illustrated in FIG. 5(A), by rotating the first gripping portion 110A in the first direction, the front ends of the first rotation fixing portion 111A and the second rotation fixing portion 112A contact the object 2 at two points, i.e., the contact point CA1 on the first side surface 21 of the object 2 and CA2 on the second side surface 22, and by further rotating, the front ends of the first rotation fixing portion 111A and the second rotation fixing portion 112A can hold and support the object 2.

[0059] Similarly, the second gripping portion 110B also rotates in the first direction while being interlocked, and the front ends of the first rotation fixing portion 111B and the second rotation fixing portion 112B can contact the object 2 at two points, i.e., the contact point CB1 on the first side surface 21 and CB2 on the second side surface 22, and by further rotating, the front ends of the first rotation fixing portion 111B and the second rotation fixing portion 112B can hold and support the object 2.

[0060] Moreover, the two first gripping portions 110A and 110B can support the object 2 at four points, i.e., the contact points CA1, CA2, CB1, and CB2.

[0061] As illustrated in FIG. 5(A), for the object 2, the second rotation fixing portion 112A supports the object 2 from the right side at the contact point CA2, the first rotation fixing portion 111A supports the object 2 from the left side at the contact point CA1, then the second rotation fixing portion 112B supports the object 2 from the right side at the contact point CB2, and the first rotation fixing portion 111B supports the object 2 from the left side at the contact point CB1. That is, by rotating the first gripping portion 110A and the second gripping portion 110B in the same direction, the contact points for supporting the object 2 can be alternately arranged on the left and right, so that the object 2 can be supported in a balanced manner.

[0062] Also, in the example of this embodiment, although the case where the two first gripping portions 110A and 110B rotate in the same direction is illustrated, the first gripping portion 110A may rotate in the first direction and the second gripping portion 110B may rotate in the second direction, etc., and they may rotate in different directions respectively.

[0063] Here, since the sizes of the first rotation fixing part 111 and the second rotation fixing part 112 are smaller than the size of the first end face 114 of the main body part 113, even if the main body part 113 of the holding part 110 rotates, the first rotation fixing part 111 and the second rotation fixing part 112 can avoid interfering with the adjacent object 2. In other words, since the cross-sectional size of the main body part 113 of the holding part 110 is set to make the movable range of the rotational holding the maximum movable range, interference with the adjacent object 2 can be avoided.

[0064] Moreover, if the interval length between the separately provided first rotation fixing part 111 and the second rotation fixing part 112 is within the cross-sectional size of the main body part 113 of the holding part 110 (for example, in the case where the cross-section is circular, it is the diameter size), it can be adjusted according to the plate thickness length of the object 2.

[0065] Here, it is preferable that the first rotation fixing part 111 and the second rotation fixing part 112 contact the object 2 simultaneously by the rotational action. By making the first rotation fixing part 111 and the second 112 contact the object 2 simultaneously, deformation of the object 2 can be suppressed compared to the case where one of the rotation fixing parts 111 (112) contacts the object 2 first.

[0066] Next, the operation of releasing the hold will be described with reference to FIG. 5(B). As illustrated in FIG. 5(B), by rotating each of the two first holding parts 110A and the second holding parts 110B in the second direction (the rotational direction opposite to the first direction), the contact points CA1, CA2, CB1, and CB2 will not contact, and the hold can be released.

[0067] Here, the rotation control performed by the holding control unit 152 will be described. That is, it will be described how the holding control unit 152 controls the first rotation fixing part 111 and the second rotation fixing part 112 of the holding part 110 to rotate in the first direction and by how much.

[0068] One example of this rotation control method is, for example, a method of presetting the angles (such as 15° etc.) by which the first rotation fixing part 111 and the second rotation fixing part 112 can rotate. Thereby, rotation control for both holding and releasing the hold can be easily performed.

[0069] Moreover, other examples can be applied. For example, a sensor for detecting the pressure acting on the object 2 is provided, the first rotation fixing part 111 and the second rotation fixing part 112 are rotated, and when gripping, if the detected pressure value exceeds the detection gripping threshold value, the rotation is stopped. When the gripping is released, if the detected pressure value becomes equal to or less than the detection releasing gripping threshold value, the release is detected.

[0070] (A-2-2) Operation of the transfer device In the transfer device 1 shown in FIG. 2, the object 2 is gripped by the gripping mechanism 10, and the arm part 14 is controlled by the transfer control part 151 to move the object 2.

[0071] (A-3) Modified embodiment In the above-described configuration of the gripping mechanism, various modified examples have been described. Next, a modified embodiment for strengthening the gripping force or preventing deformation (such as bending, etc.) of the object to be transferred will be described.

[0072] (A-3-1) Configuration example for strengthening the gripping force FIG. 6 is a configuration diagram showing the configuration of the gripping part of the gripping mechanism of the modified embodiment.

[0073] The gripping mechanism of the modified embodiment shown in FIG. 6 has two gripping parts 210 including a first gripping part 210A and a second gripping part 210B.

[0074] Moreover, the first gripping part 210A and the second gripping part 210B have substantially the same configuration. When describing the common configuration, they are not distinguished and are only described as the gripping part 210.

[0075] The gripping part 210 has a main body part 213, a first rotation fixing part 211, and a second rotation fixing part 212. As shown in FIG. 6(B), each of the first rotation fixing part 211 and the second rotation fixing part 212 has a point where the lower support part 2111 supports the object 2 from below the object 2 upward, which is different from the gripping part 110 of the above-described embodiment.

[0076] As shown in FIG. 6(B), the first rotation fixing portion 211 and the second rotation fixing portion 212 are L-shaped plate-like members. The horizontal portions below the first rotation fixing portion 211 and the second rotation fixing portion 212 respectively form the lower support portions 2111 and 2121. One surface of each of the lower support portions 2111 and 2121 is referred to as the lower support surface 251 and 252. The lower support surfaces 251 and 252 are in contact with the lower surface of the object 2 to support the object 2.

[0077] As shown in FIG. 6(C), the dimensions of the L-shaped first rotation fixing portion 211 and the second rotation fixing portion 212 are also set within the cross-sectional dimensions of the main body portion 213 of the holding portion 210. Therefore, since the maximum movable range of the first rotation fixing portion 211 and the second rotation fixing portion 212 is within the cross-sectional range of the main body portion 213 of the holding portion 210, interference with the adjacent object 2 can be avoided (refer to FIGS. 6(D) and 6(E)).

[0078] In this way, the first rotation fixing portion 211 and the second rotation fixing portion 212 are provided with the lower support portion 2111. By supporting one surface of the lower support portion 2111, that is, the lower support surface 251, from the lower surface of the object 2, the holding force for the object 2 can be strengthened.

[0079] Also, if the object 2 can be supported from below, the shapes of the first rotation fixing portion 211 and the second rotation fixing portion 212 are not limited to the L-shape, and a U-shape or the like is also possible.

[0080] FIG. 7 is a configuration diagram showing the configuration of the holding portion of the holding mechanism according to another modified embodiment.

[0081] In the holding mechanism of the modified embodiment shown in FIG. 7, the case where two first holding portions 310A and second holding portions 310B are provided is shown.

[0082] Also, the first holding portion 310A and the second holding portion 310B are basically of the same configuration. When explaining the common configuration, they are not distinguished and are only described as the holding portion 310.

[0083] The holding part 310 includes: a main body part 313, a first rotation fixing part 311, and a second rotation fixing part 312. As shown in FIG. 7(B), each of the first rotation fixing part 211 and the second rotation fixing part 212 includes: an upper support part 3112 that supports the upper surface of the object 2, and a lower support part 3111 that supports the lower surface of the object 2.

[0084] As shown in FIG. 7(B), the first rotation fixing part 311 and the second rotation fixing part 312 are U-shaped plate-like members. One surface of the lower support part 3111 is called the lower support surface 351, and one surface of the upper support part 3112 is called the upper support surface 352. These lower support surface 351 and upper support surface 352 support the object 2 in a manner that contacts the lower surface and the upper surface of the object 2.

[0085] In this modified embodiment, as shown in FIG. 7(C), the sizes of the first rotation fixing part 311 and the second rotation fixing part 312 are also set within the cross-sectional size of the main body part 313 of the holding part 310. Therefore, since the maximum movable range of the first rotation fixing part 311 and the second rotation fixing part 312 is located within the cross-section of the main body part 313 of the holding part 310, interference with adjacent objects 2 can be avoided (refer to FIGS. 7(D) and 7(E)).

[0086] Thus, each of the first rotation fixing part 311 and the second rotation fixing part 312 is provided with a lower support part 3111 and an upper support part 3112. By supporting from the lower surface and the upper surface of the object 2, the holding force for the object 2 can be strengthened.

[0087] Also, if the object 2 can be supported from below, the shapes of the first rotation fixing part 311 and the second rotation fixing part 312 are not limited to the shapes illustrated in FIG. 7.

[0088] When holding an object using the holding part 210 of FIG. 6(B) or the holding part 310 of FIG. 7(B), as illustrated in FIG. 8(A), it is also possible to provide two through holes 34 and 35 in the object 2.

[0089] Thus, when gripping the object 2 using the gripping portion 210 of FIG. 6(B), as illustrated in FIG. 8(B), by inserting the first rotation fixing portion 311 and the second rotation fixing portion 312 of the gripping portion 210 through each of the two through holes 34 and 35 in the object 2 and rotating the entire gripping portion 210, the supported portion 33 between the two through holes 34 and 35 can be supported by the lower support portions 2111 of the first rotation fixing portion 211 and the second rotation fixing portion 212.

[0090] Moreover, when gripping the object 2 using the gripping portion 310 of FIG. 7(B), as illustrated in FIG. 8(C), by inserting the first rotation fixing portion 311 and the second rotation fixing portion 312 of the gripping portion 310 through each of the two through holes 34 and 35 in the object 2 and rotating the entire gripping portion 310, the supported portion 33 between the two through holes 34 and 35 can be supported by the lower support portion 3111 and the upper support portion 3112 of the first rotation fixing portion 311 and the second rotation fixing portion 312.

[0091] (A-3-2) Prevention of deformation of the object 2 FIG. 9 is a configuration diagram showing the configuration of the gripping portion of the gripping mechanism according to a modified embodiment.

[0092] In the gripping mechanism according to the modified embodiment shown in FIG. 9, a total of three gripping portions 410 including a first gripping portion 410A, a second gripping portion 410B, and a third gripping portion 410C are provided.

[0093] In this example, the first gripping portion 410A has one rotation fixing portion 412A, the second gripping portion 410B has two first rotation fixing portions 411B and a second rotation fixing portion 412B, and the third gripping portion 410C has one rotation fixing portion 411C.

[0094] In the gripping mechanism according to this modified embodiment, as illustrated in FIG. 9(A), for the object 2, the rotation fixing portion 412A of the first gripping portion 410A contacts the object 2 at the contact point C1, and the first rotation fixing portion 411B of the second gripping portion 410B contacts the object 2 at the contact point C2. Further, for the object 2, the second rotation fixing portion 412B of the second gripping portion 410B contacts the object 2 at the contact point C3, and the rotation fixing portion 411C of the third gripping portion 410C contacts the object 2 at the contact point C4.

[0095] As shown in FIG. 9(B), the line connecting the contact points C1 and C2 lies in the same plane, and the direction of this plane (the Y-axis direction) is perpendicular to the side surface of the object 2 which is a plate-shaped member standing upright. Therefore, with respect to the object 2, since the directions of the forces exerted on the object 2 by the rotation fixing portion 412 of the first gripping portion 410A and the direction of the force exerted on the object 2 by the first rotation fixing portion 411B of the second gripping portion 410B face each other on the same straight line, deformation of the object 2 can be suppressed.

[0096] Similarly, the line connecting the contact points C3 and C4 also lies in the same plane, and the direction of this plane (the Y-axis direction) is perpendicular to the side surface of the object 2. Therefore, with respect to the object 2, since the direction of the force exerted on the object 2 by the second rotation fixing portion 412B of the second gripping portion 410B and the direction of the force exerted on the object 2 by the rotation fixing portion 411C of the third gripping portion 410C face each other on the same straight line, deformation of the object 2 can be suppressed.

[0097] Also, for example, since the contact points C1 and C2 are on the same straight line, the front ends of the rotation fixing portions 411 or 412 of each gripping portion 410 in contact with the object 2 will exceed the range of the cross-sectional dimensions of the main body portion of each gripping portion.

[0098] And when gripping the object 2 with this gripping portion 410, for example, by rotating the gripping portion 410 by a predetermined angle, it is possible to prevent the portions that extend horizontally from the main body portion in the rotation fixing portions 411 and 412 from contacting the adjacent object.

[0099] Also, the gripping portion 410 is not limited to the configuration having only one rotation fixing portion 412 as shown in the figure, and it may have a pair of rotation fixing portions. Moreover, the gripping mechanism 10 may have three or more gripping portions 410.

[0100] (A-3-3) Deformation example of the shape of the rotation fixing portion FIG. 10 is a configuration diagram showing the configuration of the gripping portion of the gripping mechanism according to a modified embodiment.

[0101] The gripping mechanism according to the modified embodiment shown in FIG. 10 is a case where it includes three first gripping portions 510A, second gripping portions 510B, and third gripping portions 510C.

[0102] In this example, the first gripping part 510A has one rotation fixing part 512A, the second gripping part 510B has two first rotation fixing parts 511B and a second rotation fixing part 512B, and the third gripping part 510C has one rotation fixing part 511C.

[0103] In this modified embodiment, in order to widen the contact surface between the walls of the object 2 to strengthen the gripping force, the front ends of the rotation fixing parts 511 and 512 of each gripping part 510 are formed as inclined surfaces.

[0104] In FIG. 10(B), although only the configurations of the first rotation fixing part 511B and the second rotation fixing part 512B of the second gripping part 510B are illustrated, the rotation fixing parts 511 or 512 of the other gripping parts 510 (the first gripping part 510A or the third gripping part 510C) are the same.

[0105] Also, similar to the cases of FIGS. 9(A) and 9(B), for the object 2, the rotation fixing part 512A of the first gripping part 510A contacts the object 2 at the contact point C11, and the first rotation fixing part 511B of the second gripping part 510B contacts the object 2 at the contact point C12. Further, for the object 2, the second rotation fixing part 512B of the second gripping part 510B contacts the object 2 at the contact point C13, and the rotation fixing part 511C of the third gripping part 510C contacts the object 2 at the contact point C14.

[0106] Therefore, similar to the above cases, since the contact points C11 and C12, and the contact points 13 and 14 are respectively located at positions facing each other on the same straight line, deformation of the object 2 can be suppressed.

[0107] Furthermore, the first rotation fixing part 511B has an inclined surface 5111, and the second rotation fixing part 512B has an inclined surface 5121. Thereby, since the contact surface between the object 2 and the wall surface can be widened, the gripping force can be increased.

[0108] (A-4) Effects of the Embodiment As described above, according to the gripping mechanism having at least two or more rotation fixing parts, by rotating each rotatable rotation fixing part, the object is supported and fixed by the wall surface of a plate-like member to grip the object, and interference with adjacent objects can be suppressed.

[0109] (B) Other Embodiments In the above-described embodiments, various modified embodiments have been mentioned. However, the present invention can also be applied to the following modified embodiments.

[0110] (B-1) In the above-described embodiment, in order to suppress deformation (such as bending) of the object, when holding the object, although the case where at least two or more rotation fixing parts all rotate in the first direction has been exemplified, the rotation directions of each of the at least two or more rotation fixing parts may be different directions. That is, in addition to rotating in the first direction, it may also rotate in the second direction.

[0111] (B-2) In the above-described embodiment, although the case where the rotation fixing part in contact with the side surface of the object is formed in a surface (contact surface) manner has been exemplified, it is not limited thereto. In order to further strengthen the holding force, the contact surface in contact with the object may be formed in a manner having a fine serrated stopper.

[0112] 1: Transfer device 2: Object 21: First side surface 22: Second side surface 3: Probe substrate 10: Holding mechanism 11: First holding part 12: Second holding part 14: Arm part 15: Control part 16: Base part 31: Mounting hole 33: Supported part 34, 35: Through hole 90: Holding mechanism 91, 92: Holding piece 110(110A, 110B): Holding part 111(111A, 111B): Rotation fixing part 112(112A, 112B): Rotation fixing part 113: Main body part of the holding part 114: First end face 120(120A, 120B): Rotation driving part 130: Main body part 151: Transfer control part 152: Holding control part 171: First joint part 172: Second joint part 173: Third joint part 181: First connecting rod 182: Second connecting rod 183: Third connecting rod 184: Fourth connecting rod 210(210A, 210B): Gripping part 211(211A, 211B): Rotation fixing part 212: Rotation fixing part 213: Body part 2111: Lower support part 251: Lower support surface 310(310A, 310B): Gripping part 311(311A, 311B): Rotation fixing part 312: Rotation fixing part 313: Body part 351: Lower support surface 352: Upper support surface 410(410A, 410B, 410C): Gripping part 411(411B, 411C): Rotation fixing part 412(412A, 412B): Rotation fixing part 510(510A, 510B, 510C): Gripping part 511(511B, 511C): Rotation fixing part 512(512A, 512B): Rotation fixing part 3111: Lower support part 3112: Upper support part 5111 and 5112: Inclined plane CA1, CA2, CB1, CB2, C1, C2, C3, C4, C11, C12, C13, C14: Contact points

Claims

1. A gripping mechanism for holding an object, comprising: at least two or more rotating fixing parts that can contact the object, a rotation drive part that controls the rotational movement of each of the rotating fixing parts, and at least two gripping parts, wherein each of the at least two gripping parts is provided with a pair of rotating fixing parts that are separated from each other, and the object is gripped by rotating the at least two or more rotating fixing parts to bring the rotated rotating fixing parts into contact with the object, wherein the at least two gripping parts grip the object by clamping the object between the pair of rotating fixing parts and rotating the pair of rotating fixing parts.

2. As in the controlling body of request item 1, wherein, At least two of the aforementioned gripping portions include: a main body portion, and a plurality of gripping portions having the aforementioned rotating fixing portion on one end face of the aforementioned main body portion, wherein the size of a pair of the aforementioned rotating fixing portions is smaller than the size of the end face of the aforementioned main body portion.

3. As in the controlling body of request item 1, wherein, At least two of the aforementioned gripping parts, each of a pair of the aforementioned rotating fixing parts, grip the aforementioned object by rotating all of them in the same direction of rotation.

4. As in the controlling body of request item 1, wherein, The aforementioned rotary drive unit controls each of the aforementioned rotary fixing parts to rotate by a predetermined angle when the aforementioned object is held.

5. As in the controlling body of request item 1, wherein, It is equipped with a detection unit that detects the pressure acting on the object by the rotational movement of each of the aforementioned rotating fixed parts, and a rotation drive unit that controls the rotation of each of the aforementioned rotating fixed parts based on the detection signal from the aforementioned detection unit.

6. As in the controlling body of request item 1, wherein, When the pair of rotating fixing parts contact the aforementioned object and support it, the contact point between the pair of rotating fixing parts and the aforementioned object exists in a position facing each other.

7. As in the controlling body of request item 1, wherein, The aforementioned rotating fixing part is a component with an elliptical cross-section.

8. As in the controlling body of request item 1, wherein, The front end of the aforementioned rotating fixing part that supports the aforementioned object has an inclined surface.

9. A gripping mechanism for holding an object, comprising: at least two or more rotating fixing parts that can contact the object, a rotation drive part that controls the rotational movement of each of the rotating fixing parts, and at least two gripping parts, wherein each of the at least two gripping parts is provided with one of the rotating fixing parts, and the object is gripped by rotating the at least two or more rotating fixing parts to bring the rotated rotating fixing parts into contact with the object, and the object is gripped by rotating the at least two rotating fixing parts, wherein the gripping parts clamp the object from both sides and hold the object in a supportive manner.

10. A conveying device having a gripping mechanism as described in any one of claims 1 to 9, the conveying device being used to move an object gripped by the gripping mechanism.

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