Optical module and inspection device

Abstract

This invention provides an optical module mounted on an inspection device that can suppress the reduction of inspection accuracy. The optical module is mounted on an inspection device disposed in a space surrounding an object to be inspected, and inspects the inner circumferential surface of the object by irradiating it with an annular beam of light. The optical module includes: a collimating light output section that outputs collimated light along the axial direction of the object to be inspected; a reflector disposed at the position where the collimated light output from the collimating light output section enters, reflecting the collimated light to form an annular beam of light diffused in a circumferential direction on the inner circumferential surface of the object to be inspected; and a reflector fixing member that fixes the position of the reflector relative to the collimating light output section. The reflector fixing member is configured such that the light reflected by the reflector directly reaches the inner circumferential surface of the object to be inspected within at least a portion of the circumferential direction.

Description

Technical Field

[0001] This invention relates to an optical module and an inspection device. Prior Technology

[0002] A known inspection device obtains an optically cut-off image from an annular laser beam image obtained by simultaneously moving along the axial direction of a tubular object to be inspected and irradiating the inner surface of the object, thereby inspecting the inner surface (Patent Document 1). This inspection device uses an annular laser beam that diffuses circumferentially in the radial direction from a point on the central axis of the object's inner space. The annular laser beam enters the inner circumferential surface of the object, and a camera positioned on the central axis of the object acquires the annular laser beam image. By analyzing this annular laser beam image, information related to the object's inner diameter, surface shape, and the presence or absence of defects on the inner circumferential surface is obtained. [Previous Technical Documents] [Patent Literature]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-60722 Summary of the Invention

[0004] [The problem the invention aims to solve] A ring-shaped beam is obtained by directing a laser beam from a laser source into the apex of a conical mirror with a conical reflective surface, where the beam is reflected. For example, a cylindrical glass tube is used to fix the conical mirror relative to the laser source. In this structure, the ring-shaped beam reflected by the conical mirror passes through the glass tube and enters the inner circumferential surface of the object being inspected.

[0005] Because the ring-shaped beam passes through the glass tube, phenomena such as deviation of the incident point due to refraction, ghosting (reflection) caused by reflection from the glass tube surface, and flare caused by the cord may occur. Therefore, inspection accuracy can sometimes be reduced. The purpose of this invention is to provide an optical module and inspection device capable of suppressing the reduction in inspection accuracy. [Technical means to solve the problem]

[0006] According to one aspect of the present invention, a light module is provided, which is mounted on an inspection device. The inspection device is disposed in the space surrounding the object to be inspected, and irradiates the inner peripheral surface of the object with an annular light beam to inspect the inner peripheral surface; wherein, The aforementioned optical module has: The collimating light output unit outputs collimated light along the axial direction of the object being inspected. A reflector, positioned at the point where the collimated light output from the aforementioned collimated light output section enters, reflects the collimated light to form a ring-shaped beam diffused in the circumferential direction on the aforementioned inner circumferential surface; and The reflector fixing component is used to fix the position of the aforementioned reflector relative to the aforementioned collimating light output section; The aforementioned mirror fixing member is configured to allow light reflected by the aforementioned mirror to directly reach the aforementioned inner circumferential surface within at least a portion of the aforementioned circumferential direction.

[0007] According to another aspect of the present invention, an inspection device is provided, comprising: The aforementioned optical module; The imaging device generates image data by receiving reflected light from the aforementioned annular beam radiated from the aforementioned optical module and diffused and reflected at the aforementioned inner peripheral surface; and The optical module fixing component is used to fix the position of the aforementioned optical module relative to the aforementioned camera device. The aforementioned optical module fixing member blocks the reflected light from the reflection part of the aforementioned inner circumferential surface to the aforementioned camera device within a certain range of the aforementioned circumferential direction, while allowing the reflected light to directly reach the aforementioned camera device from the reflection part of the aforementioned inner circumferential surface within other ranges of the aforementioned circumferential direction.

[0008] According to another aspect of the present invention, an inspection device is provided, comprising: The light module is positioned in the space surrounding the object being inspected, irradiating the inner circumferential surface of the object with a ring-shaped beam that diffuses in a circumferential direction; The imaging device generates image data by receiving reflected light from the aforementioned annular beam radiated from the aforementioned optical module and diffused and reflected at the aforementioned inner peripheral surface; and The optical module fixing component is used to fix the position of the aforementioned optical module relative to the aforementioned camera device; The aforementioned optical module fixing member is configured to intersect the optical path until the reflected light diffused and reflected on the aforementioned inner peripheral surface enters the aforementioned camera device. It is formed of a material that is transparent in the wavelength region of the aforementioned annular beam radiated from the aforementioned optical module. The portion of the reflected light diffused and reflected on the aforementioned inner peripheral surface that passes through the aforementioned optical module fixing member has a shape that prevents light refraction from becoming a problem. [Effects of the Invention]

[0009] Within at least a portion of the circumferential direction, the light reflected by the mirror directly reaches the inner circumferential surface of the object being inspected, thus suppressing the reduction in inspection accuracy caused by refraction or reflection. The portion of the reflected light diffused and reflected from the inner circumferential surface of the object being inspected by the optical module fixing member has a shape that prevents light refraction from becoming a problem, thus suppressing the reduction in inspection accuracy caused by refraction. Simple Explanation of the Diagram

[0010] [Figure 1] is a schematic cross-sectional view of the inspection device based on the first embodiment. [Figure 2] A schematic three-dimensional view of the optical probe 30 (part of which is a schematic diagram). In [Figure 3], Figure 3A is a side view of the optical module 10, and Figure 3B is a cross-sectional view taken along a link line 3B-3B at a point in Figure 3A. In [Figure 4], Figures 4A and 4B are schematic perspective views of the optical module fixing component 21. In [Figure 5], Figures 5A and 5B are side views of the optical module 10 of a modified example based on the first embodiment. [Figure 6] is a schematic cross-sectional view of the inspection device based on the second embodiment. [Figure 7] is a schematic cross-sectional view of the optical probe 30 of the inspection device based on the third embodiment. Implementation

[0011] [First Embodiment] Referring to Figures 1 to 4B, the optical module and inspection device based on the first embodiment will be described. Figure 1 is a schematic cross-sectional view of the inspection apparatus based on the first embodiment. The inspection apparatus based on the first embodiment inspects the inner peripheral surface of the object to be inspected by irradiating an annular beam of light.

[0012] A support plate 51 is disposed inside the housing 50. The support plate 51 divides the space into upper and lower spaces. The lower space is referred to as the inspection chamber 50A, and the upper space is referred to as the standby chamber 50B. Furthermore, in the first embodiment, the inspection chamber 50A and the standby chamber 50B are positioned vertically, but not necessarily vertically. For example, they can also be arranged horizontally. Alternatively, the vertical relationship between the standby chamber 50B and the inspection chamber 50A can be reversed. A workpiece setting part 52 is fixed on the support plate 51, and a workpiece object 60, for example, in a tubular shape, is held on the workpiece setting part 52. The workpiece object 60 is fixed in an orientation in which its central axis is parallel to the vertical direction. An opening penetrating the support plate 51 and the workpiece setting part 52 in the vertical direction is provided directly below the internal space of the workpiece object 60. The optical probe 30 is vertically supported above the workpiece object 60 by means of a linear motion mechanism 24. During inspection, the optical probe 30 descends and enters the internal space of the workpiece object 60 along its central axis. When inspecting the area near the lower end of the object to be inspected 60, the tip (lower end) of the optical probe 30 descends to the vicinity of the lower end of the object to be inspected 60. At this time, the openings provided in the support plate 51 and the workpiece setting part 52 serve as escape holes to avoid interference with the optical probe 30. In addition, the support plate 51 and the workpiece setting part 52 are only required to support the object to be inspected 60, and are not limited to having openings.

[0013] The optical probe 30 includes an optical module 10, a camera device 20, and an optical module fixing member 21. The optical module 10 is supported directly below the camera device 20 by the optical module fixing member 21, and its position relative to the camera device 20 is fixed.

[0014] The housing 50 houses a laser light source 22 and a control unit 25. The laser light source 22 is, for example, a laser diode that outputs a laser beam with a wavelength in the range of 370 nm to 1100 nm. Laser light is guided from the laser light source 22 to the optical module 10 via an optical fiber 23. The control unit 25 controls the laser light source 22 and the linear motion mechanism 24 according to instructions from the host controller 40. Images captured by the camera device 20 are input to the analysis unit 41 of the host controller 40, where the analysis unit 41 analyzes the images. Based on the image analysis results, the inner diameter of the object 60 being inspected can be measured.

[0015] The housing 50 is able to move on the ground by means of wheels 53.

[0016] Next, referring to Figure 2, the positional relationship between the optical module 10, the object under inspection 60, and the camera device 20, as well as the function of the optical probe 30, will be explained.

[0017] Figure 2 is a schematic perspective view of the optical probe 30 (partially a schematic diagram). The optical probe 30 includes an optical module 10 and an imaging device 20. The optical module 10 includes a collimating light output section 11, a reflector 12, and a reflector fixing member 14.

[0018] The collimated light output section 11 includes a collimating lens 11A. Laser light is introduced into the optical module 10 from the laser source 22 via the optical fiber 23. The laser light output from the output end of the optical fiber 23 is collimated by the collimating lens 11A.

[0019] The collimating light output unit 11 outputs collimated light along the axial direction of the object under inspection 60. A reflector 12 is positioned at the point where the collimated light output from the collimating light output unit 11 enters. The reflector 12 has a conical reflecting surface. The axis of rotation of this conical surface coincides with the optical axis of the collimated light (the optical axis of the collimating lens 11A). The reflector 12 reflects the collimated light, generating an annular beam 62 that diffuses in the circumferential direction along the inner circumferential surface of the object under inspection 60. The reflector fixing member 14 fixes the position of the reflector 12 relative to the collimating light output unit 11. The reflector fixing member 14 is configured such that the light reflected by the reflector 12 directly reaches the inner circumferential surface of the object under inspection 60 within at least a portion of the circumferential direction. The specific configuration of the reflector fixing member 14 will be explained later with reference to Figures 3A and 3B.

[0020] With the apex angle of the reflector 12 at 90°, the annular beam 62 diffuses into a disk-like (sheet-like) shape. The inner circumferential surface of the object under inspection 60 is a rough surface with unevenness and a size equal to or greater than the wavelength of the annular beam 62. When the annular beam 62 enters the inner circumferential surface of the object under inspection 60, diffuse reflection occurs. The part that produces diffuse reflection is called the diffuse reflection part 63. The diffuse reflection part 63 is located along the intersection line of a plane orthogonal to the central axis of the object under inspection 60 and the inner circumferential surface of the object under inspection 60. When the inner circumferential surface is cylindrical, the diffuse reflection part 63 is circular. A portion of the reflected light 64 diffused and reflected at the diffuse reflection part 63 enters the imaging device 20. The imaging device 20 receives the reflected light 64 and generates image data.

[0021] The optical module fixing member 21 fixes the position of the optical module 10 relative to the imaging device 20. The optical module fixing member 21 (FIG. 1) includes a plurality (e.g., four) of pillars discretely arranged in the circumferential direction around the optical axis of the collimated light. The optical module fixing member 21 blocks the reflected light 64 from the diffuse reflection portion 63 (FIG. 2) of the inner circumferential surface of the object under inspection 60 to the imaging device 20 within a certain range of the circumferential direction. In other ranges of the circumferential direction, the reflected light 64 reaches the imaging device 20 directly from the diffuse reflection portion 63 of the inner circumferential surface of the object under inspection 60. In this specification, "direct arrival" means that the light travels straight from the starting point to the ending point without reflection or refraction. In addition, light passing through the area near the blocking object may be affected by diffraction, but by excluding the image of the area affected by diffraction from the image processing object, the diffraction effect can be eliminated for image analysis. Therefore, the shape of light traveling from the starting point to the ending point under the influence of diffraction can also be included in "direct arrival".

[0022] Next, referring to Figures 3A and 3B, the configuration of the optical module 10 will be described. Figure 3A is a side view of the optical module 10, and Figure 3B is a cross-sectional view taken along a link line 3B-3B in Figure 3A. The collimating lens 11A of the collimating light output section 11 is supported inside the lens barrel 15. An optical fiber 23 is inserted from one end of the lens barrel 15, and its output end is fixed opposite to the collimating light output section 11.

[0023] The reflector 12 is supported by the reflector support 13, which is fixed to the lens barrel 15 via the reflector fixing member 14. That is, the reflector fixing member 14 fixes the position of the reflector 12 relative to the collimating light output section 11. The reflector fixing member 14 intersects the path of the annular light beam 62 (FIG. 2) reflected by the reflector 12 toward the inner circumferential surface of the object under inspection 60 (FIG. 2) within at least a portion of the circumferential direction. The annular light beam 62, passing through a portion that does not intersect with the reflector fixing member 14, directly reaches the inner circumferential surface of the object under inspection 60.

[0024] For example, when viewed along the optical axis of the collimated light, the mirror fixing member 14 consists of four support members arranged at equal intervals in the circumferential direction. Each of the four support members has a columnar shape extending parallel to the optical axis of the collimated light. A portion of the four support members in the circumferential direction intersects the path of the annular beam 62 reflected in the mirror 12. The annular beam 62, propagating on a path that does not intersect with the four support members, directly reaches the inner circumferential surface of the object under inspection 60.

[0025] Each of the four support members has a smaller circumferential dimension than its radial dimension. Furthermore, the circumferential dimension of each of the four support members decreases as it approaches the reflector 12. By adopting this shape, the range of the circumferentially shielding annular beam 62 (Fig. 2) can be reduced, thus obtaining sufficient mechanical support.

[0026] Next, referring to Figures 4A and 4B, the structure of the optical module fixing member 21 will be described. Figures 4A and 4B are schematic perspective views of the optical module fixing member 21. As shown in Figure 4A, the imaging device 20 is supported by the imaging device support member 20A. The imaging device support member 20A has an opening facing the optical module 10. The optical module fixing member 21 is composed of four rod-shaped members arranged at equal intervals in the circumferential direction. Each of these rod-shaped members connects the edge of the opening of the imaging device support member 20A to the lens barrel 15 of the optical module 10.

[0027] The spacing between the ends of the multiple rod-shaped optical modules 10 is narrower than the spacing between the ends of the camera device support member 20A. Therefore, by using the optical module fixing member 21 containing four rod-shaped members and the camera device support member 20A, a structure approximating a truss structure can be obtained. Thus, even with thinner rod-shaped members, sufficient strength can be achieved. A portion of the reflected light 64 (Fig. 2) incident on the camera device 20 from the diffuse reflection portion 63 (Fig. 2) is blocked by the rod-shaped members. By thinning the rod-shaped members, the area of ​​the reflected light 64 that is blocked can be reduced. Furthermore, the four rod-shaped members are not positioned near the aperture stop of the camera device 20, so the main light rays passing through the area not blocked by the rod-shaped members and the light rays passing through its vicinity are not blocked by the rod-shaped members. This reduces the occurrence of image position deviation (i.e., distortion).

[0028] As shown in Figure 4B, each of the four rod-shaped members constituting the optical module fixing member 21 can be designed to be bent or curved towards the central axis of the optical module 10. If designed in this way, the optical module 10 can be inserted deep into the object 60 from the end of the object 60 even when the inner diameter of the object being inspected is small.

[0029] Next, the superior effects of the first embodiment will be explained. In the configuration where the reflector 12 is fixed to the collimating light output section 11 using a transparent component such as a glass tube, the annular beam 62 passes through the glass tube to reach the inner peripheral surface of the object being inspected 60. Therefore, positional deviations or ghosting caused by refraction may sometimes occur. In contrast, in the first embodiment, the annular beam 62 reflected by the reflector 12 directly reaches the inner peripheral surface of the object being inspected 60, thus preventing positional deviations or ghosting caused by refraction. Therefore, it is possible to suppress the reduction in inspection accuracy.

[0030] Furthermore, in the first embodiment, within the circumferential direction from the diffuse reflection portion 63 (FIG. 2) to the imaging device 20, where the light module fixing member 21 is not located, the reflected light 64 directly reaches the imaging device 20. Therefore, it is possible to suppress the reduction in inspection accuracy caused by the refraction or reflection of the reflected light 64.

[0031] Furthermore, within the circumferential range where the annular beam 62 is blocked by the mirror fixing member 14, inspection result information cannot be obtained. Similarly, within the range where the reflected light 64 (FIG. 2) is blocked by the light module fixing member 21 (FIG. 1), inspection result information cannot be obtained. In order to obtain inspection result information over the widest possible range, it is preferable that the range where the annular beam 62 is blocked by the mirror fixing member 14 and the range where the reflected light 64 is blocked by the light module fixing member 21 at least partially overlap, and it is even more preferable that one range is included in the other range.

[0032] Next, referring to Figures 5A and 5B, a modified optical module based on the first embodiment will be described. Figures 5A and 5B are side views of the modified optical module 10 based on the first embodiment. In the first embodiment (Figures 3A and 3B), the mirror fixing member 14 is composed of a plurality of columnar support members extending parallel to the optical axis of the collimated light. In the modified example shown in Figure 5A, the mirror fixing member 14 is composed of a single helical member. The central axis of the helix coincides with the optical axis of the collimated light. In the modified example shown in Figure 5B, the mirror fixing member 14 has a double-helix structure.

[0033] The mirror fixing member 14 does not necessarily have to be a member extending parallel to the optical axis of the collimated light. As shown in the modified examples of Figures 5A and 5B, it can also be spiral-shaped. Furthermore, the number of turns of the spiral can be set to less than 1 turn, for example, about 0.5 turns.

[0034] [Second Embodiment] Next, referring to FIG6, the inspection apparatus based on the second embodiment will be described. Hereinafter, descriptions of the same configuration as the inspection apparatus of the first embodiment (FIGs 1 to 4B) will be omitted. FIG6 is a schematic cross-sectional view of the inspection apparatus based on the second embodiment. In the first embodiment (FIG 1), the optical probe 30 can move up and down in a direction parallel to the optical axis of the collimated light; however, in the second embodiment, the optical probe 30 can move up and down while simultaneously rotating around the optical axis of the collimated light as its rotation center.

[0035] The rotation mechanism 26 changes the position (posture) of the light module 10 and the position (posture) of the imaging device 20 in the rotation direction centered on the optical axis of the collimated light output from the collimated light output unit 11 (Fig. 2). Alternatively, it can be configured such that either the position (posture) of the light module 10 or the position (posture) of the imaging device 20 changes. The analysis unit 41 obtains inspection result information based on at least two image data generated by the imaging device 20 when the position of the light module 10 in different rotation directions is different.

[0036] Next, the superior effects of the second embodiment will be explained. In the first embodiment, it is impossible to obtain inspection result information on the area of ​​the annular beam 62 (FIG. 2) that is blocked by the reflector fixing member 14 (FIG. 3A, FIG. 3B). In contrast, in the second embodiment, by changing the position of the rotation direction of the optical module 10, inspection result information can be obtained on the area that was blocked by the reflector fixing member 14 before the position change, even after the position change.

[0037] Furthermore, by changing the position of the rotation direction of the camera device 20, the inspection result information can be obtained in the state after the position change, for the area that could not be obtained due to being blocked by the light module fixing member 21 before the position change.

[0038] Furthermore, by changing the rotation direction of both the light module 10 and the camera device 20, inspection result information can be obtained over the entire circumferential area.

[0039] [Embodiment 3] Next, referring to FIG7, the inspection apparatus based on the third embodiment will be described. Hereinafter, descriptions of the same configuration as the inspection apparatus based on the first embodiment (FIGs 1-3B) will be omitted. FIG7 is a schematic cross-sectional view of the optical probe 30 of the inspection apparatus based on the third embodiment. In the first embodiment (FIG 1), the optical module fixing member 21 is composed of a plurality of pillars discretely arranged in the circumferential direction around the optical axis of the collimated light. In contrast, in the third embodiment, the optical module fixing member 21 is composed of a cylindrical member surrounding the optical axis of the collimated light.

[0040] The camera device 20 is supported by the camera device support 27, and the optical module fixing component 21 is fixed to the camera device 20 through the camera device support 27.

[0041] The optical module fixing member 21 is configured to intersect the optical path of a portion of the reflected light 64 diffused and reflected at the diffuse reflection portion 63 on the inner peripheral surface of the object under inspection 60 until it enters the imaging device 20. Furthermore, the optical module fixing member 21 is formed of a material that is transparent in the wavelength region of the annular beam 62 radiated from the optical module 10. Moreover, the portion 21A where the reflected light 64 passes through the optical module fixing member 21 has a shape that prevents light refraction from becoming a problem.

[0042] Specifically, the portion 21A of the light module fixing member 21 through which the reflected light 64 passes is configured such that the incident angle of the reflected light 64 on the incident side surface and the incident side surface is approximately 0°.

[0043] Next, the superior effects of the third embodiment will be explained. In the third embodiment, since the optical module fixing member 21 is formed of a transparent material, it does not block the reflected light 64 throughout the entire circumferential direction. Therefore, the optical module fixing member 21 does not cause the loss of inspection result information.

[0044] Furthermore, since the portion 21A of the reflected light 64 passing through the light module fixing member 21 has a shape that prevents light refraction from becoming a problem, chromatic aberration caused by refraction can be suppressed. This helps to suppress a decrease in inspection accuracy. Moreover, it can be said that light refraction is not a problem when the incident angle is approximately 0° ± 5°. When the incident angle is close to 0° under the condition of the same glass member thickness, the optical path length within the glass member becomes shorter. Therefore, an excellent effect of reducing the influence of ripples can also be obtained. Furthermore, if the incident angle is close to 0°, the reflectivity on the glass member surfaces on both the incident and exit sides decreases. Reflected light sometimes appears as a ghost image in the image. Ghost images can hinder image analysis. In the third embodiment, an excellent effect of reducing the likelihood of ghost images is achieved by reducing reflectivity.

[0045] It is preferable to design the portion 21A through which the reflected light 64 passes in the optical module fixing member 21 to be shaped like a sphere centered on the entrance pupil of the lens of the imaging device 20. With this shape, the angle of incidence of the reflected light 64 onto the optical module fixing member 21 is almost 0°. Furthermore, when the angle between the direction of travel of the reflected light 64 and the optical axis of the lens of the imaging device 20 is small, the portion 21A through which the reflected light 64 passes in the optical module fixing member 21 can also be designed to be shaped like a plane perpendicular to the optical axis of the lens of the imaging device 20. With this shape, compared to designing the optical module fixing member 21 as a simple cylindrical shape, the angle of incidence of the reflected light 64 can be made close to 0°.

[0046] The above embodiments are illustrative examples, and partial substitutions or combinations of the configurations shown in different embodiments are possible. The same effects of the same configurations based on multiple embodiments will not be mentioned one by one according to the embodiments. Furthermore, the present invention is not limited to the above embodiments. For example, those skilled in the art should understand that various changes, improvements, combinations, etc., are possible. This application claims priority based on Japanese Patent Application No. 2024-122573, filed on July 29, 2024. The entire contents of that Japanese application are incorporated herein by reference.

[0047] 10: Optical Module 11: Collimated light output section 11A: Collimating Lens 12: Reflector 13: Mirror support 14: Mirror fixing components 15: Lens tube 20: Camera device 20A: Camera device support component 21: Fixing components for optical modules 21A: Part of reflected light that passes through 22: Laser Light Source 23: Fiber optic 24: Linear motion mechanism 25: Control Department 26: Rotating mechanism 27: Camera device support unit 30: Optical probe 40: Host controller 41: Analysis Department 50: Casing 51: Support plate 52: Workpiece Setting Section 53: Wheel 57: Gas Flow Adjustment Plate 60: Inspect the object 62: Ring-shaped beam 63: Diffuse reflection area 64: Reflected light

Claims

1. A light module mounted on an inspection device, the inspection device being disposed in a space surrounding an object to be inspected, and irradiating the inner peripheral surface of the object with an annular light beam to inspect the inner peripheral surface; wherein, The aforementioned optical module includes: a collimated light output section that outputs collimated light along the axial direction of the object being inspected; a reflector disposed at the position where the collimated light output from the collimated light output section enters, reflecting the collimated light to form an annular beam of light diffused in the circumferential direction of the aforementioned inner circumferential surface; and a reflector fixing member that fixes the position of the aforementioned reflector relative to the aforementioned collimated light output section; the aforementioned reflector fixing member is configured to allow the light reflected by the aforementioned reflector to directly reach the aforementioned inner circumferential surface within at least a portion of the aforementioned circumferential direction.

2. As in request item 1, the optical module, wherein, The aforementioned mirror fixing member includes a support member that intersects the path of the aforementioned annular beam in a portion of the aforementioned circumferential direction.

3. An inspection apparatus comprising: an optical module as claimed in claim 1 or 2; a camera device for generating image data by receiving reflected light from the aforementioned annular beam radiated from the optical module and diffused and reflected at the aforementioned inner peripheral surface; and an optical module fixing member for fixing the position of the optical module relative to the aforementioned camera device; wherein... The aforementioned optical module fixing member blocks the reflected light from the reflection portion of the aforementioned inner circumferential surface to the aforementioned camera device within a certain range of the aforementioned circumferential direction, while allowing the reflected light to directly reach the aforementioned camera device from the reflection portion of the aforementioned inner circumferential surface within other ranges of the aforementioned circumferential direction.

4. The inspection device according to claim 3, further comprising: a rotation mechanism that changes the position of the aforementioned optical module in a rotational direction centered on the optical axis of the collimated light output from the aforementioned collimated light output unit.

5. The inspection apparatus of claim 4, further comprising: an analysis unit that obtains inspection result information based on at least two image data generated by the aforementioned camera device, depending on the different positions of the rotation direction of the aforementioned optical module.

6. An inspection apparatus comprising: a light module disposed in a space surrounding an object to be inspected, which irradiates an annular light beam diffused in a circumferential direction onto the inner peripheral surface of the object to be inspected; an imaging device that receives reflected light diffused and reflected from the annular light beam radiated from the light module at the inner peripheral surface and generates image data; and a light module fixing member that fixes the position of the light module relative to the imaging device; wherein the light module fixing member is configured to intersect the optical path until the reflected light diffused and reflected at the inner peripheral surface enters the imaging device, and is formed of a material transparent in the wavelength region of the annular light beam radiated from the light module, and the portion of the reflected light diffused and reflected at the inner peripheral surface that passes through the light module fixing member has a shape that prevents light refraction from becoming a problem.

Images