Vibration conveying device and multi-track vibration conveying system equipped with the device

Abstract

The objective of this invention is to suppress the lateral shaking of a long groove having a linear transport surface when lateral forces act on it. The vibration transport device of this invention is a device that transports an object on a linear transport surface by vibration. It is characterized by comprising: a first mass having a linear transport surface; a second mass vibrating at an opposite phase to the first mass; a driving elastic body connecting the first and second mass bodies; a base; a support surface disposed above the center portion of the vibrating body in the height direction, on both the upstream and downstream sides of the transport direction, relative to the vibrating body comprising the first mass, the second mass, and the driving elastic body; and a vibration damping elastic body connecting the vibrating body to the support surface.

Description

[Technical Field]

[0001] The present invention relates to a vibratory conveying device capable of conveying an object to be transported in a predetermined direction, and a multi-row vibratory conveying system having the device. [Previous Technology]

[0002] It is known in the past that vibration transport devices transport workpieces and other transportable objects along a transport surface to a predetermined transport destination by means of vibration. A vibration transport device includes: an inertial mass fixed to the upper surface of a transversely arranged vibrating body (hereinafter referred to as the vibrating body), a vibrating body mounting member fixed to the lower surface of the vibrating body, and a transport body connected to the vibrating body mounting member via a first connecting structural member erected at an angle (see, for example, Patent Document 1). In this vibration transport device, the first connecting structural member is induced to flexurally vibrate by displacement vibration caused by the vibrating body. This flexural vibration is transmitted to the transport body, causing the workpiece to be transported along the transport surface in a predetermined direction. Here, the aforementioned flexural vibration includes vibration components in both the horizontal and vertical directions. Furthermore, in this vibration transport device, a connecting structural member support plate is fixed to the middle portion of the long side of the first connecting structural member, and the connecting structural member support plate is connected to a base via a second connecting structural member. In this way, by fixing the connecting structural member support plate to the location of the first connecting structural member at the middle part (the joint of vibration amplitude) in the long side direction, the vibration transmitted from the base to the mounting surface can be greatly reduced.

[0003] Furthermore, as described in Patent Document 1, in order to reduce vibrations transmitted from the base to the mounting surface, vibration-absorbing materials such as aluminum alloys based on aluminum and zinc, nickel alloys based on nickel and cobalt, and iron alloys based on iron and chromium are considered as the second connecting structural member. With the configuration of Patent Document 1, a vibration-damping effect that significantly reduces horizontal vibrations transmitted from the base to the mounting surface can be achieved. [Prior Art Documents] [Patent Documents]

[0004] Patent Document 1: Japanese Patent Application Publication No. 11-91928 [Summary of the Invention]

[0005] [Problem to be Solved by the Invention] As described above, the vibration in such a vibrating conveying device has separate vibration components in the horizontal and vertical directions. Therefore, in order to further improve the vibration damping effect, it is desirable to reduce both the horizontal and vertical vibration components. For example, in Patent Document 1, it is conceived to construct a connecting member support sheet with an elastic body, and at the same time, reduce the vertical vibration component by thinning the thickness of the connecting member support sheet.

[0006] However, by thinning the thickness of the connecting member support plate, the rigidity in the rotational direction centered on the connection point between the base and the second connecting member becomes weaker. Generally, since the transporter used to transport the object is in a state accessible to the operator at the upper end of the device, as described above, when the thickness of the connecting member support plate is thinned, for example, when the operator presses down on the side of the transporter from the side during operation, the transporter will wobble in the lateral direction about the connection point between the base and the second connecting member as the axis of rotation.

[0007] This problem is particularly pronounced in the aforementioned multi-row vibratory conveying system, where multiple rows of vibratory conveying devices are arranged in the width direction, resulting in multiple linear conveying surfaces being configured approximately in parallel. Here, we take Patent Document 1 as an example, which arranges multiple rows of vibratory bodies consisting of an inertial mass, a vibrating body mounting member, a conveying body, and a first connecting structural member (multi-row vibratory conveying system). In this multi-row vibratory conveying system, the problem exists not only when all vibratory bodies are driven, but also when only a portion of the vibratory bodies are driven. Generally, the vibratory bodies used in vibratory conveying devices are made to vibrate at or near their resonant frequency in order to obtain a large amplitude. The vibration in such a vibratory conveying device, as described above, has both horizontal and vertical components. If these components cannot be attenuated together, the vibration damping effect preventing transmission from the base to the mounting surface cannot be fully realized. Especially in multi-stage vibrating transport systems, since the resonant frequencies of the various vibrating bodies are the same, the vibrational components of the vibrating body will be transmitted to other vibrating bodies that are stopped or must be stopped, which will be amplified under resonance and cause unpredictable transport problems.

[0008] The object of the present invention is to provide a vibratory conveying device and a multi-row vibratory conveying system equipped with the device, which can exert a vibration damping effect on the vertical component and suppress lateral shaking of the conveying component even when lateral forces act on the conveying component that is conveying the object. [Technical Means for Solving the Problem]

[0009] That is, the vibration transport device of the present invention comprises: a structure consisting of a mass body that is elastically supported, and an application vibration unit that vibrates the mass body, wherein the vibrating mass body is vibrated by the application vibration unit to transport the transport object, characterized in that: at least a portion of the connection wiring for connecting the connecting object member provided inside the structure body to the connecting member provided outside the structure body is formed using a flexible substrate, and at least a portion of the flexible substrate is disposed along the surface of the mass body.

[0010] Based on this configuration, there is no need to provide deep grooves on the surface of the mass body to reduce vibration caused by the connecting wiring. Therefore, the weight of the mass body will not be affected. That is, the aforementioned dilemma is resolved, and the situation where the handling performance is impaired due to the connecting wiring can be avoided.

[0011] Preferably, in the above-mentioned vibration conveying device, the flexible substrate has a spanning portion which is disposed spanning between the components that move relative to each other by applying vibration, and the spanning portion is provided with a relaxation portion that allows relative movement between the components, as its feature.

[0012] According to this configuration, when relative movement between components is generated by applying vibration, the flexible substrate will not produce a damping effect that reduces vibration.

[0013] Preferably, in the above-mentioned vibration conveying device, the structure has a plurality of the above-mentioned mass bodies, and the above-mentioned crossing portion is provided between the plurality of the above-mentioned mass bodies as its feature.

[0014] According to this configuration, when multiple masses move relative to each other by applying vibration, the flexible substrate will not produce a damping effect that reduces vibration.

[0015] Preferably, the vibrating conveying device is characterized by providing the crossing portion between the mass body and the connected object component.

[0016] According to this configuration, when the mass body and the connected object component move relative to each other by applying vibration, the flexible substrate will not produce a damping effect that reduces vibration.

[0017] Preferably, in the above-mentioned vibration conveying device, the structure has an elastic body provided on the mass body; the vibration application part includes: a piezoelectric element for applying vibration provided on the elastic body, and a vibration application control part for applying a driving voltage to the piezoelectric element; the connected object part is the piezoelectric element for applying vibration; and the connected part is the vibration application control part, as its features.

[0018] According to this configuration, the piezoelectric element for applying vibration can be connected to the vibration control unit without impairing transport performance. Preferably, in the above-described vibration transport device, the structure has an elastic body provided on the mass body; the vibration application unit includes: a piezoelectric element for detection provided on the elastic body, and a vibration control unit that obtains a detection voltage from the piezoelectric element; the connection target component is the piezoelectric element for detection; and the connected component is the vibration control unit, as its characteristic. According to this configuration, the piezoelectric element for detection can be connected to the vibration control unit without impairing transport performance. [Effects of the Invention]

[0019] According to the present invention, a wiring structure that does not easily damage the handling performance of the vibration handling device can be realized.

Implementation Method

[0021] Hereinafter, embodiments of the present invention will be described with reference to drawings.

[0022] (First Reference Example) The multi-row vibratory conveying system of this reference example, as shown in Figure 1, has a plurality of vibratory conveying devices 1. The plurality of vibratory conveying devices 1 are arranged side by side, with a plurality of rows of elongated grooves 8 (linear conveying surfaces 8t) arranged substantially parallel to each other. The vibratory conveying device 1 is, for example, a linear feeder that moves workpieces such as electronic components along a straight linear conveying surface 8t towards a predetermined conveying destination by means of vibration.

[0023] Furthermore, the upper rear surface of the linear conveying surface 8t is equipped with a funnel or similar device to keep the workpiece in a state of accumulation at all times (illustration omitted). Therefore, when the vibrating conveying device 1 starts conveying, it can convey the workpiece to the end of the linear conveying surface 8t to supply it to the predetermined conveying destination.

[0024] Hereinafter, although only one vibratory conveying device 1 will be described, multiple vibratory conveying devices 1 will have substantially the same configuration. Figure 2 is a side view of the vibratory conveying device. Figure 3 shows the connecting plate on the front side of the paper being removed from the vibratory conveying device in Figure 2.

[0025] The vibration conveying device 1, as shown in Figures 2 and 3, includes: a base 2 fixed to the floor surface, a movable part 5 disposed above the base 2, a fixed part 6 disposed above the movable part 5, and a long groove 8 having a linear conveying surface 8t for conveying workpieces above the fixed part 6.

[0026] The base 2 has: a horizontal base portion 2a extending along the linear transport surface 8t, and two vertical base portions 2b respectively installed at the upstream end and downstream end of the horizontal base portion 2a in the transport direction. The horizontal base portion 2a is a member extending in the horizontal direction, while the two vertical base portions 2b are members extending in the vertical direction.

[0027] Two vertical base portions 2b are connected at their lower ends to the upstream and downstream ends of the horizontal base portion 2a in the transport direction, and their upper ends are disposed near the lower surface of the elongated groove 8. Each of the two vertical base portions 2b has a flat support surface 2c disposed at its upper end. The support surface 2c is for mounting the anti-vibration spring 50, and is inclined such that its upstream end in the transport direction is positioned lower than its downstream end in the transport direction.

[0028] The movable part 5 and the fixed part 6 are connected in the front-rear direction 2 by a pair of drive springs 10 using leaf springs. The pair of drive springs 10 are fixed at the lower end to the front-rear end face of the movable part 5 by locking bolts 10a, and at the upper end to the front-rear end face of the fixed part 6 by locking bolts 10b.

[0029] The drive spring 10 is a flat spring (leaf spring). A piezoelectric element 11 is attached to the drive spring 10 to function as a vibration source. By applying a charge to the piezoelectric element 11, the drive spring 10 is elastically deformed and vibrates. The movable part 5 and the fixed part 6 vibrate in opposite phases.

[0030] In this reference example, the drive spring 10 is installed in a tilted position relative to the vertical direction, in its normal posture without elastic deformation. A pair of drive springs 10 are fixed to the movable part 5 and the fixed part 6 in a manner that is substantially parallel to each other. The spring constant formed by the drive spring 10 and the piezoelectric element 11 can be appropriately selected according to the conditions of any resonant frequency determined by the weight and size of the parts being transported, as well as the weight of the long slot 8.

[0031] Furthermore, inside the fixed part 6, there is a drive part (not shown) that causes a pair of drive springs 10 to vibrate. The drive part is equipped with a drive source such as a piezoelectric element 11, which enables the movable part 5 and the fixed part 6 to vibrate relative to each other.

[0032] The long slot 8 is connected to the long slot support platform 12 disposed above the fixed part 6. The long slot support platform 12 is connected to the movable part 5 via the connecting plate 16 and vibrates synchronously with the movable part 5. The connecting plate 16 is connected to the long slot support platform 12 via the locking bolt 16a and to the movable part 5 via the connecting bolt 16b.

[0033] As shown in Figure 4, a locking portion 30 (hook portion) is formed on the lower surface of the front end side portion of the long groove 8. The locking portion 30 has a protrusion 31 that protrudes downward from the lower surface of the long groove 8, and a front end protrusion 32 that extends upstream from the front end of the protrusion 31 in the transport direction.

[0034] A locking recess 12a is formed at the front end of the long slot support 12 to lock the front end protrusion 32 of the locking portion 30 of the long slot 8. Therefore, by locking the front end protrusion 32 of the locking portion 30 into the locking recess 12a of the long slot support 12, the front end portion of the long slot 8 is fixed to the front end of the long slot support 12. The rear end of the long slot 8 is fixed to the rear end of the long slot support 12 by bolts 8a while the locking portion 30 is locked to the front end of the long slot support 12.

[0035] A support portion 33 protruding downward is formed at the rear end of the lower surface of the long groove 8, and a support portion 34 protruding downward is formed on the upstream side of the transport direction, which is further upstream than the locking portion 30. When the long groove 8 is installed on the long groove support platform 12, the lower surfaces of the support portions 33 and 34 are in contact with the upper surface of the long groove support platform 12.

[0036] A hard rubber 35 is disposed between the lower surface of the elongated groove 8 and the upper surface of the elongated groove support platform 12. The hard rubber 35 is disposed in the approximately central portion between the support portion 33 and the support portion 34. The hard rubber 35 is a plate-shaped member having a generally rectangular shape with a width approximately the same as that of the elongated groove 8. The predetermined thickness of the hard rubber 35 is approximately the same as the protrusion of the support portion 33 and the support portion 34.

[0037] With the long groove 8 installed on the long groove support platform 12, gaps are formed between the support part 33 and the hard rubber 35, and between the support part 34 and the hard rubber 35. Therefore, the lower surface of the long groove 8 is supported by the support part 33, the hard rubber 35, and the support part 34 relative to the upper surface of the long groove support platform 12.

[0038] In this reference example, the movable part 5, the connecting plate 16, the long slot support platform 12, and the long slot 8 constitute the first mass body of the present invention; the fixed part 6 constitutes the second mass body of the present invention; the drive spring 10 constitutes the drive elastic body of the present invention; and the anti-vibration spring 50 constitutes the anti-vibration elastic body of the present invention. Therefore, the vibrating body T comprises the movable part 5, the connecting plate 16, the long slot support platform 12, the long slot 8, the fixed part 6, and the drive spring 10.

[0039] The vibrating body T is supported on the support surface 2c of the vertical portion 2b of the two bases by means of a pair of anti-vibration springs 50, which are leaf springs. The anti-vibration spring 50 has a first arm 51 mounted on the support surface 2c and attenuating the vibration of the vertical component, and a second arm 52 arranged perpendicularly to the first arm 51. The first arm 51 and the second arm 52 are integrally formed, and the anti-vibration spring 50 is a flat L-shaped elastic member (L-shaped spring).

[0040] The vibration damping spring 50 is fixed to the support surface 2c by means of a locking bolt 51a for its first arm 51, and fixed to the drive spring 10 by means of a locking bolt 52a for its second arm 52. Here, the first arms 51 of the pair of vibration damping springs 50 are mounted on the support surface 2c in a parallel configuration, and the second arms 52 are mounted on the pair of drive springs 10 in a parallel configuration.

[0041] Furthermore, the first arm 51 of the anti-vibration spring 50 is vertically disposed on the drive spring 10, and the second arm 52 is parallel disposed on the drive spring 10. Therefore, the first arm 51 of the anti-vibration spring 50 is parallel to the elastic axis of the drive spring 10, and the second arm 52 is vertically disposed on the elastic axis of the drive spring 10. Furthermore, in this reference example, the direction of the elastic main axis of the drive spring 10 is defined by the installation angle of the drive spring 10. The phrase "the first arm 51 of the anti-vibration spring 50 is arranged parallel to the elastic main axis of the drive spring 10" means that the first arm 51 of the anti-vibration spring 50 is arranged in a direction that is parallel or substantially parallel to the elastic main axis of the drive spring 10. The phrase "the second arm 52 of the anti-vibration spring 50 is arranged perpendicular to the elastic main axis of the drive spring 10" means that the second arm 52 of the anti-vibration spring 50 is arranged in a direction that is orthogonal or substantially orthogonal to the elastic main axis of the drive spring 10 (relative to the normal direction of the elastic main axis).

[0042] In this reference example, for each of the pair of drive springs 10, a protrusion 53 is provided in the section where there is no displacement in the horizontal or vertical direction, and the front end of the second arm 52 of the anti-vibration spring 50 is fixed to the protrusion 53. Furthermore, since the drive spring 10 has its two ends (upper end and lower end) fixed to the fixed part 6 and the movable part 5 (with fixed ends), the section is the central part in the long side direction of the drive spring 10.

[0043] Although the segment of the drive spring 10 can be interpreted as a point, the area in the drive spring 10 where the protrusion 53 is provided is a predetermined area including the segment of the drive spring 10 (the segment and the area adjacent to the segment). A female threaded hole is provided in the protrusion 53 (not shown in the figure).

[0044] A bolt insertion hole (not shown) is formed in the second arm 52 of the anti-vibration spring 50, which communicates with the female threaded hole of the protrusion 53. By screwing the bolt 52a inserted through the bolt insertion hole into the female threaded hole of the protrusion 53, the second arm 52 of the anti-vibration spring 50 can be fixed to the protrusion 53 of the drive spring 10.

[0045] The support surfaces 2c arranged at the upper ends of the vertical portions 2b of the two bases are positioned above the center portion in the height direction of the vibrating body T. Therefore, when a lateral force acts on the side portion of the long groove 8, although it is intended to rock it using the straight line passing through the two support surfaces 2c as the axis of rotation in Figure 2, the torque acting on the long groove 8 from the side is smaller than when the support surfaces 2c are positioned below the center portion in the height direction of the vibrating body T because the distance between the point of application of the force and the axis of rotation is smaller. In this reference example, the height of the vibrating body T refers to the vertical distance between the upper end of the long groove 8 and the lower end of the movable portion 5.

[0046] When the vibrator T is supported by the support surfaces 2c of the two vertical portions 2b of the base by a pair of anti-vibration springs 50, the second arm 52 of the anti-vibration spring 50 extends downward from the end of the first arm 51. The first fixing portion A1 of the vibrator T and the second arm 52 is positioned below the support surface 2c and the second fixing portion A2 of the first arm 51.

[0047] Therefore, the two support surfaces 2c are respectively arranged on the upstream side and the downstream side of the transport direction relative to the vibrator T. The vibrator T is supported by a pair of anti-vibration springs 50 in a manner that suspends it from the support surfaces 2c of the vertical portions 2b of the two bases. Furthermore, in order to prevent lateral forces from acting on the side portion below the elongated groove 8 of the vibrator T, an outer cover member is installed on the side of the base 2, which can be configured to cover the side portion below the elongated groove 8 of the vibrator T.

[0048] The main function of the vibratory conveying device 1 will be explained below. With the vibratory conveying device 1 fixed to the floor, a workpiece is placed on the upper surface of a long groove 8 that is set to be approximately horizontal. In this state, the movable part 5 and the fixed part 6 vibrate by vibrating the drive spring 10. Here, the movable part 5 and the fixed part 6 vibrate by tilting the drive spring 10, which is connected to each other, in the conveying direction, and thus vibrate with a component in the conveying direction and a vertical component perpendicular to the conveying direction, corresponding to the tilt angle. Moreover, this vibration is transmitted to the long groove 8 through the connecting plate 16, and by transmitting it from the long groove 8 to the workpiece, the workpiece is conveyed on the upper surface of the long groove 8.

[0049] At this time, the center of gravity of the fixed part 6 is approximately near the center of the fixed part 6. Furthermore, the combined center of gravity of the movable part 5, the connecting plate 16 which vibrates integrally with the movable part 5, and the long groove 8 is located near the center of gravity of the fixed part 6 because the movable part 5 and the long groove 8 are integrated across the fixed part 6. Therefore, the vibrations of both are eliminated, and this, combined with the effect of the anti-vibration spring 10, effectively attenuates the vibrations transmitted to the base 2 and the floor surface.

[0050] In the multi-row vibratory conveying system of this reference example, since the long slots 8 of the plurality of vibratory conveying devices 1 are arranged side by side, the width of the long slots 8 is very small, making it difficult to fix the front end portion and the rear end portion of the long slot 8 to the long slot support table 12 from above using bolts. Therefore, here, the front end portion of the long slot 8 is fixed to the long slot support table 12 by means of the locking part 30.

[0051] For example, if the front end of the long slot 8 is fixed to the lower front end of the long slot support 12 by bolts, the thickness of the long slot 8 will increase because a threaded portion must be formed in the long slot 8, resulting in an increase in the weight of the long slot 8 and a reduction in handling capacity. In contrast, in this reference example, since the front end of the long slot 8 is fixed to the long slot support 12 by the locking portion 30, it is not necessary to form a threaded portion in the long slot 8.

[0052] Furthermore, if the long groove 8 is fixed to the long groove support platform 12 at two points, namely the front end and the rear end, the distance between the fixing points increases, and the portion of the long groove 8 between the fixing points is no longer supported by the long groove support platform 12. This results in a decrease in the resonant frequency of the long groove 8 between the fixing points, causing uneven vibration distribution. In contrast, in this reference example, the long groove 8 is fixed to the long groove support platform 12 at both the front end and the rear end, and the portion between the front end and the rear end of the long groove 8 is fixed to the long groove support platform 12 by means of hard rubber 35. Therefore, there is no problem of reduced handling capacity or uneven vibration distribution. Furthermore, in this reference example, when one hard rubber 35 is disposed between the front end and the rear end of the long groove 8, the lower surface of the long groove 8 is supported on the long groove support platform 12 at point 3. When two hard rubbers 35 are disposed between the front end and the rear end of the long groove 8, the lower surface of the long groove 8 is supported on the long groove support platform 12 at point 4. In either case, there is no problem of uneven vibration distribution.

[0053] As described above, the vibration transport device 1 of this reference example is a vibration transport device that transports an object on a linear transport surface 8t by vibration. It includes: a first mass body (movable part 5, connecting plate 16, long groove support platform 12, and long groove 8) having a linear transport surface 8t; a second mass body (fixed part 6) that vibrates in the opposite phase to the first mass body; a driving elastic body (a pair of driving springs 10) connecting the first mass body and the second mass body; a base 2 having a support surface 2c disposed above the center part in the height direction of the vibrating body T on the upstream side and the downstream side in the transport direction relative to the vibrating body T including the first mass body, the second mass body, and the driving elastic body; and a vibration damping elastic body (a pair of vibration damping springs 50) connected to the vibrating body T relative to the support surface 2c.

[0054] Therefore, in the vibration conveying device 1 of this reference example, since the support surface 2c supporting the vibrating body T (the second fixing point A2 of the vibrating body T and the base 2) is positioned above the center of the vibrating body T in the height direction, when the damping spring 50 of the vertical component is softened to maximize the attenuation rate, even when a lateral force acts on the side portion of the long groove 8, the distance between the point of application of the force and the fixing point (rotation axis) of the vibrating body T and the base 2 will be smaller. This reduces the torque acting laterally on the long groove 8, suppressing the lateral shaking of the long groove 8. Therefore, in a multi-row vibration conveying system having multiple rows of vibration conveying devices 1, the occurrence of collisions between the long groove 8 and surrounding parts can be reduced, and when the long grooves 8 are arranged side by side, the gap size between the long grooves 8 can be reduced.

[0055] In the vibration transport device 1 of this reference example, the vibration damping spring 50 has a first arm 51 mounted on the support surface 2c to attenuate the vibration of the vertical component, and a second arm 52 vertically disposed on the first arm 51 and mounted on the vibrating body T.

[0056] Accordingly, in the vibration conveying device 1 of this reference example, in order to further reduce the vibration transmitted from the base 2 to the installation surface, the elastic coefficient of the anti-vibration spring 50 can be adjusted independently in either the parallel direction or the perpendicular direction.

[0057] In the vibration conveying device 1 of this reference example, the vibrating body T and the first fixing part A1 of the anti-vibration spring 50 are disposed below the support surface 2c and the second fixing part A2 of the anti-vibration spring 50.

[0058] Therefore, in the vibration conveying device 1 of this reference example, since the vibrating body T is supported by hanging relative to the vertical part 2b of the base 2, the vibration of the vibrating body T can still be stabilized even if the vibrating body T is large.

[0059] The multi-row vibratory conveying system of this reference example has a plurality of vibratory conveying devices 1 and a plurality of linear conveying surfaces 8t arranged in approximately parallel order.

[0060] Therefore, in the multi-row vibratory conveying system of this reference example, even when a lateral force acts on the long groove 8 of the vibratory conveying device 1, the swaying of the long groove 8 in the lateral direction is suppressed, so it is possible to prevent collision with adjacent long grooves 8 and damage to parts.

[0061] (Second Reference Example) The difference between the vibration transport device 101 of this reference example and the vibration transport device 1 of the first reference example is that in the first reference example, the first fixing part A1 of the vibrating body T and the second arm 52 of the anti-vibration spring 50 is located below the second fixing part A2 of the first arm 51 of the anti-vibration spring 50 on the support surface 2c. In contrast, in this reference example, the first fixing part A1 of the vibrating body T and the second arm 152 of the anti-vibration spring 150 is located above the second fixing part A2 of the first arm 151 of the anti-vibration spring 150 on the support surface 2c. Furthermore, in the vibration transport device 101 of this reference example, the description of the parts with the same structure as the vibration transport device 1 of the first reference example is omitted.

[0062] The vibration conveying device 101, as shown in Figure 5, comprises: a base 2 fixed to the floor surface, a movable part 5 disposed above the base 2, a fixed part 6 disposed above the movable part 5, and a long groove 8 having a linear conveying surface 8t for conveying workpieces above the fixed part 6.

[0063] In this reference example, the movable part 5, the connecting plate 16, the long slot support platform 12, and the long slot 8 constitute the first mass body of the present invention; the fixed part 6 constitutes the second mass body of the present invention; the drive spring 10 constitutes the drive elastic body of the present invention; and the anti-vibration spring 150 constitutes the anti-vibration elastic body of the present invention. Therefore, the vibrating body T comprises: the movable part 5, the connecting plate 16, the long slot support platform 12, the long slot 8, the fixed part 6, and the drive spring 10.

[0064] The vibrating body T is supported on the support surface 2c of the vertical portion 2b of two bases by a pair of anti-vibration springs 150, which are leaf springs. The anti-vibration spring 150 has a first arm 151 and a second arm 152 arranged perpendicularly to the first arm 151. The first arm 151 and the second arm 152 are integrally formed, and the anti-vibration spring 150 is a flat L-shaped elastic member (L-shaped spring).

[0065] The vibration damping spring 150 is fixed to the support surface 2c by means of a locking bolt 51a for its first arm 151, and fixed to the fixing part 6 by means of a locking bolt 10b for its second arm 152. A pair of vibration damping springs 150 are mounted on the support surface 2c with their first arms 151 arranged in parallel, and their second arms 152 are mounted on the fixing part 6 with their second arms 152 arranged in parallel.

[0066] When the vibrating body T is supported on the support surface 2c of the vertical portion 2b of the two bases by means of a pair of anti-vibration springs 150, the second arm 152 of the anti-vibration spring 150 extends upward from the end of the first arm 151. Therefore, the first fixing part A1 of the vibrating body T and the second arm 152 of the anti-vibration spring 150 is positioned above the support surface 2c and the second fixing part A2 of the first arm 151 of the anti-vibration spring 150.

[0067] The support surface 2c disposed at the upper end of the vertical portion 2b of the two bases is disposed above the center portion of the vibrating body T in the transport direction, both upstream and downstream of the transport direction.

[0068] As described above, the same effect as the vibration transport device 1 of the present reference example can be achieved in the vibration transport device 1 of the present reference example in the vibration transport device 1.

[0069] (Third Reference Example) The difference between the vibration transport device 201 of this reference example and the vibration transport device 1 of the first reference example is that in the first reference example, the vibrating body T has a first mass body, a second mass body, and a driving elastic body, while in this reference example, the vibrating body T has a first mass body, a second mass body, and a driving elastic body, and has a third mass body connected to the second mass body by the driving elastic body. Furthermore, in the vibration transport device 201 of this reference example, the description of the same configuration as in the vibration transport device 1 of the first reference example is omitted.

[0070] The vibration conveying device 201, as shown in Figure 6, comprises: a base 2 fixed to the floor surface, a main block 213a and a secondary block 213b disposed above the base 2, a main block 212a and a secondary block 212b disposed above the base 2, and a long groove 8 having a linear conveying surface 8t for conveying workpieces above the groove.

[0071] The main block 212a and the secondary block 212b are fixed together as a whole, and the main block 213a and the secondary block 213b are fixed together as a whole.

[0072] The long slot support platform 12, which is connected to the long slot 8, and the main block 212a are connected in the front-rear direction at two points by a pair of drive springs 10 using leaf springs. The pair of drive springs 10 are fixed at the lower end to the front-rear end face of the main block 212a by locking bolts 10a, and at the upper end to the front-rear end face of the long slot support platform 12 by locking bolts 10b.

[0073] Sub-blocks 212b and 213b are connected in two locations in the front-rear direction by a pair of drive springs 210 using leaf springs. The pair of drive springs 210 are fixed at their lower ends to the front-rear end faces of sub-block 213b by locking bolts 210a, and at their upper ends to the front-rear end faces of sub-block 212b by locking bolts 210b.

[0074] The drive spring 10 and drive spring 210 are flat springs (leaf springs). A piezoelectric element (not shown) is attached to the drive spring 10 and drive spring 210 to function as a vibration source. By applying a charge to the piezoelectric element, the drive spring 10 and drive spring 210 are elastically deformed to generate vibration.

[0075] In this reference example, the long slot 8 and the long slot support platform 12 are the first mass bodies of the present invention, the main block 212a and the secondary block 212b are the second mass bodies of the present invention, the drive spring 10 is the drive elastic body of the present invention, and the anti-vibration spring 50 is the anti-vibration elastic body of the present invention.

[0076] The vibration conveying device 201 of this reference example is based on the second mass body of the present invention, and has a main block 213a and a secondary block 213b (the third mass body) connected by a pair of drive springs 210. Therefore, the vibrating body T is composed of: a long groove 8, a long groove support platform 12, a main block 212a, a secondary block 212b, a main block 213a, a secondary block 213b, a drive spring 10, and a drive spring 210.

[0077] The vibrating body T is similar to that in the first reference example, and is supported on the support surface 2c of the vertical part 2b of the two bases by a pair of anti-vibration springs 50, which are leaf springs.

[0078] The support surface 2c disposed at the upper end of the vertical portion 2b of the two bases is disposed above the center portion of the vibrating body T in the transport direction, on the upstream side and the downstream side of the transport direction.

[0079] When the vibrator T is supported on the support surface 2c of the vertical part 2b of the two bases by means of a pair of anti-vibration springs 50, the first fixing part A1 of the second arm 52 of the vibrator T and the anti-vibration spring 50 is arranged below the support surface 2c and the second fixing part A2 of the first arm 51 of the anti-vibration spring 50.

[0080] Therefore, the two support surfaces 2c are respectively arranged on the upstream side and the downstream side of the transport direction relative to the vibrating body T. The vibrating body T is supported on the support surfaces 2c of the two base vertical parts 2b by means of a pair of anti-vibration springs 50.

[0081] As described above, the same effect as the vibration transport device 1 of the present reference example can be achieved in the vibration transport device 201 of this reference example.

[0082] The vibration conveying device 201 of this reference example is configured such that the resonant frequencies of the drive spring 10 and the drive spring 210 are different from each other, so that the drive unit (not shown) can switch between the applied vibration state of the drive spring 10 and the applied vibration state of the drive spring 210.

[0083] In the vibration conveying device 201 of this reference example, the tilting posture (orientation, angle) of the drive spring 10 is different from that of the drive spring 210. In particular, in this reference example, the tilting direction of the drive spring 210 is set in the opposite direction to the tilting direction of the drive spring 10 (the direction in which the upper end of the drive spring 10 faces). In the vibration conveying device 201 of this reference example, the vibration angle of the drive spring 10 and the vibration angle of the drive spring 210 are different from each other, so that the conveying direction of the conveyed object on the linear conveying surface when the drive spring 10 vibrates is reversed (forward direction and backward direction) from the conveying direction of the workpiece on the linear conveying surface when the drive spring 210 vibrates.

[0084] Furthermore, the specific composition is not limited to the above-mentioned reference example.

[0085] For example, in the first to third reference examples described above, although the anti-vibration springs 50 and 150 are flat L-shaped elastic members (L-shaped springs), the shape (length, area, thickness, etc.) of the anti-vibration springs 50 and 150 is arbitrary. The first arm 51, 151 and the second arm 52, 152 of the anti-vibration springs 50 and 150 are not limited to being formed as one piece.

[0086] For example, the first arms 51, 151 and the second arms 52, 152 may also be connected via elastic members other than those mentioned above. The vibration damping springs 50, 150 are not limited to having the first arms 51, 151 arranged parallel to the elastic main axis of the drive spring 10 and the second arms 52, 152 arranged perpendicular to the elastic main axis of the drive spring 10. The vibration damping springs 50, 150 may also be springs other than L-shaped springs (e.g., springs that connect the base ends of I-shaped springs to each other, or T-shaped springs, etc.) or elastic bodies other than springs (such as rubber).

[0087] For example, as shown in Figure 7, the anti-vibration spring 350 may also have: a first arm 351 mounted on the support surface 2c to attenuate the vibration of the vertical component, a second arm 352 disposed perpendicular to the first arm 351 and mounted on the vibrating body T, and a curved portion 353 connecting the first arm 351 and the second arm 352 and bent into a convex shape.

[0088] Accordingly, in the vibration conveying device of this modified example, the elastic coefficient of the anti-vibration spring 350, which is parallel to the ground or perpendicular to the ground, can be independently adjusted to further reduce the vibration transmitted from the base 2 to the mounting surface. Furthermore, when a lateral force acts on the side portion of the long groove 8, the swaying of the long groove 8 in the lateral direction can be effectively suppressed.

[0089] Although examples of vibrating bodies have been shown in the first to third reference examples above, the configuration of the vibrating body is not limited thereto. Therefore, the vibrating body of the present invention includes: a first mass body, a second mass body, and a driving elastic body, and may also include other components.

[0090] In the first to third reference examples described above, although the support surfaces 2c of the two vertical portions 2b of the base are arranged above the center portion in the height direction of the vibrator T, the effects of the present invention can be achieved even if the support surfaces 2c of the two vertical portions 2b of the base are arranged above the center of gravity of the vibrator T.

[0091] In the first to third reference examples above, although the vibration source of the drive spring 10 is a piezoelectric element, the vibration source may also be something other than a piezoelectric element. Furthermore, the object to be transported by the vibration transport device may be various LEDs such as LEDs, or electronic components other than LEDs, or things other than electronic components such as food.

[0092] In the first reference example described above, instead of disposing one or two hard rubbers 35 between the front end portion and the rear end portion of the long groove 8, one or two protrusions protruding downward from the lower surface of the long groove 8 may also be formed between the front end portion and the rear end portion of the long groove 8. Alternatively, one or two protrusions protruding upward from the upper surface of the long groove support 12 may be formed between the front end portion and the rear end portion of the long groove 8.

[0093] In the first reference example above, instead of fixing the front end of the long groove 8 to the long groove support 12 by means of the locking part 30, it is also possible to fix it to the long groove support 12 by means of bolts, just like the rear end of the long groove 8.

[0094] In addition, the specific configuration of each part is not limited to the above-mentioned reference examples, and various modifications are possible without departing from the purpose of the present invention.

[0095] Hereinafter, embodiments of the present invention will be described.

[0096] Vibration handling devices are known to come in various forms. For example, the device disclosed in document 1 (Japanese Patent Application Laid-Open No. 2016-160099) is constructed in a manner that allows an object to be transported on a transport surface to be transported by vibrating an elastically supported mass (movable body) relative to a base. Another example is the device disclosed in document 2 (Japanese Patent Application Laid-Open No. 2007-168936), which is constructed in a manner that allows an object to be transported on a transport surface to be transported by having a pair of mass bodies (movable part and load-bearing part) connected by an elastic member and vibrating them in opposite phases.

[0097] In such vibration transport devices, the vibration application part for causing the mass to vibrate is composed of a piezoelectric element or an electromagnet. By applying a predetermined driving voltage to the piezoelectric element or electromagnet from a control drive circuit, a predetermined vibration is excited to the mass, thereby achieving a predetermined transport state.

[0098] In the vibration conveying device described above, it is necessary to form a drive circuit for control and a wiring structure for electrically connecting the piezoelectric element or electromagnet. However, the drive circuit for control is usually located in a structure (the main body of the device) that is different from the mass or base. Therefore, the wiring structure is such that one end is connected to the piezoelectric element or electromagnet located inside the structure and is laid along the surface of the mass. It can be inserted into the insertion hole in the mass and then pulled out to the outside of the structure as needed. The other end is connected to the drive circuit.

[0099] In conventional vibratory handling devices, round cables are used to form such a wiring structure. Furthermore, to facilitate the laying of the round cables or to protect them from damage or breakage, grooves for wiring can be formed on the surface of the mass body, and the round cables can be laid along these grooves. Also, since it would be dangerous to expose the round cables directly along the surface of the mass body, an outer cover can be installed on them.

[0100] In such a configuration, when the mass is subjected to vibration, the round cable will rub against the trench or outer casing, causing pull-out and creating a damping effect similar to reducing vibration. To avoid this problem, it is necessary to increase the depth and width of the trench for wiring in advance, relative to the outer diameter of the round cable to be laid.

[0101] On the other hand, in a vibratory conveying device, in order to ensure sufficient amplitude for stable conveying, it is essential to ensure the weight of the mass body, especially the mass body that functions as a load. However, as the depth or width of the wiring trench formed on the surface of the mass body increases, the weight of the mass body lost due to the trench (loss of mass) also increases, making it difficult to ensure the weight of the mass body.

[0102] Thus, if the grooves formed on the surface of the mass are enlarged to prevent the vibration from being weakened by the round cable, the weight of the mass cannot be guaranteed, resulting in a decrease in amplitude. Manufacturers of vibratory handling devices are always troubled by this dilemma. In particular, in recent years, with the increasing functionality of vibratory handling devices, there has been a trend of increasing number of piezoelectric elements, etc., installed. That is, the number of wiring is increasing. Therefore, this dilemma has become more serious.

[0103] The present invention aims to achieve a wiring structure in a vibration conveying device that does not easily impair the conveying performance.

[0104] In order to achieve the above-mentioned objectives, the present invention adopts the following means.

[0105] That is, the present invention comprises: a structure consisting of a mass body that is elastically supported, and a vibration application part that vibrates the mass body, wherein the mass body is vibrated by the vibration application part to transport the transport object, characterized in that: at least a portion of the connection wiring for connecting the connecting object member provided inside the structure body to the connecting member provided outside the structure body is formed using a flexible substrate, and at least a portion of the flexible substrate is disposed along the surface of the mass body.

[0106] Based on this configuration, there is no need to provide deep grooves on the surface of the mass body in order to reduce vibration caused by the connection wiring. Therefore, the weight of the mass body will not be affected. That is, the aforementioned dilemma is resolved, and the situation where the handling performance is impaired due to the connection wiring can be avoided.

[0107] Preferably, in the above-mentioned vibration conveying device, the flexible substrate has a spanning portion which is disposed spanning between the components that move relative to each other by applying vibration, and the spanning portion is provided with a relaxation portion that allows relative movement between the components, as its feature.

[0108] According to this configuration, when relative movement between components is generated by applying vibration, the flexible substrate will not produce a damping effect that reduces vibration.

[0109] Preferably, in the above-mentioned vibration conveying device, the structure has a plurality of the above-mentioned mass bodies, and the above-mentioned crossing portion is provided between the plurality of the above-mentioned mass bodies as its feature.

[0110] According to this configuration, when multiple mass bodies move relative to each other by applying vibration, the flexible substrate will not produce a damping effect that reduces vibration.

[0111] Preferably, the vibrating conveying device is characterized by providing the crossing portion between the mass body and the connected object component.

[0112] According to this configuration, when the mass body and the connected object component move relative to each other by applying vibration, the flexible substrate will not produce a damping effect that reduces vibration.

[0113] Preferably, in the above-mentioned vibration conveying device, the structure has an elastic body provided on the mass body; the vibration application part includes: a piezoelectric element for applying vibration provided on the elastic body, and a vibration application control part for applying a driving voltage to the piezoelectric element; the connected object part is the piezoelectric element for applying vibration; and the connected part is the vibration application control part, as its features.

[0114] Based on this configuration, the piezoelectric element for applying vibration can be connected to the vibration control unit without impairing transport performance.

[0115] Preferably, in the above-mentioned vibration conveying device, the structure has an elastic body provided on the mass body; the vibration application part includes: a piezoelectric element for detection provided on the elastic body, and a vibration application control part for obtaining a detection voltage from the piezoelectric element; the connection target part is the piezoelectric element for detection; and the connected part is the vibration application control part, as its features.

[0116] Based on this configuration, the piezoelectric element for detection can be connected to the vibration control unit without impairing transport performance.

[0117] According to the present invention, a wiring structure that does not easily damage the handling performance of the vibration handling device can be realized.

[0118] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0119] <1. Structure of the Vibration Transport Device> The structure of the vibration transport device of this embodiment will be described with reference to Figures 8 to 10. Figure 8 is a perspective view showing the structure of the vibration transport device 1100 of this embodiment. Figure 9 is a side view of the vibration transport device 1100. Figure 10 is an exploded view of the vibration transport device 1100.

[0120] Vibration conveying device 1100 is a device that uses vibration to move and transport objects (specifically, various workpieces such as IC chips, tiny coils, etc.).

[0121] The vibration conveying device 1100 comprises: a structure X consisting of mass bodies 1001a, 1001b, 1001c, elastic bodies 1002a, 1002b, a base 1003, and an outer cover member 1004; and a vibration application unit Y consisting of piezoelectric elements 1005p, 1005q, a vibration application control unit 1006, and connecting wiring 1007. The vibration application unit Y moves the conveying object by vibrating the mass bodies 1001a, 1001b, and 1001c having the structure X.

[0122] As shown in Figure 10, the first mass body 1001a has an upper block portion 1011a and a lower block portion 1012a. The upper block portion 1011a is a long, block-shaped component. On the other hand, the lower block portion 1012a is a block-shaped component shorter than the upper block portion 1011a, and its upper surface is fixed to the lower surface of the upper block portion 1011a. The lower block portion 1012a can be fixed to the upper block portion 1011a by means of bolts or the like, or it can be integrally formed with the upper block portion 1011a.

[0123] The upper surface of the first mass body 1001a (that is, the upper surface of the upper block portion 1011a) is formed as a straight conveying surface (linear conveying surface) L, and the linear conveying surface L of the vibrating conveying device 1100 is provided in such a way that it is a horizontal plane. Hereinafter, the extension direction (long side direction) of the linear conveying surface L will be referred to as the "front-back direction", and the direction orthogonal to the front-back direction in the horizontal plane (that is, the width direction (short side direction) of the linear conveying surface L) will be referred to as the "left-right direction".

[0124] The second mass body 1001b comprises a block-shaped portion (front block portion) 1011b disposed at the front and a block-shaped portion (rear block portion) 1012b disposed at the rear, and is connected at their respective upper ends by a connecting portion 1013b extending forward and backward to form a gate-shaped main block as a whole. Furthermore, the second mass body 1001b also includes a sub-block portion 1014b that is fixed to the lower surface of the connecting portion 1013b by bolts.

[0125] The third mass body 1001c comprises a block-shaped portion (front block portion) 1011c disposed at the front and a block-shaped portion (rear block portion) 1012c disposed at the rear, and is connected at their respective lower ends by a connecting portion 1013c extending forward and backward to form an inverted door-shaped main block as a whole. Furthermore, the third mass body 1001c includes a sub-block portion 1014c that is fixed to the upper surface of the connecting portion 1013c by bolts.

[0126] As shown in Figure 9, the first mass 1001a is connected to the second mass 1001b via a pair of first elastic bodies 1002a, 1002a arranged in parallel to each other at the front and back, thereby elastically supported on the second mass 1001b. The second mass 1001b is connected to the third mass 1001c via a pair of second elastic bodies 1002b, 1002b arranged in parallel to each other at the front and back, thereby elastically supported on the third mass 1001c. Furthermore, the third mass 1001c is connected to the base 1003 via a pair of anti-vibration springs 1030, 1030 arranged in parallel to each other at the front and back, thereby elastically supported on the base 1003. However, here, the first elastic body 1002a, the second elastic body, and the vibration damping spring 1030 are all flat elastic members, and are constructed by leaf springs, etc. In addition, the base 1003 is a long strip block-shaped member facing forward and backward, and is arranged on the floor surface of the site where the vibration conveying device 1100 is to be installed.

[0127] The connection configuration of the first elastic body 1002a will be described in more detail below. As shown in Figure 10, upper bolt holes H1001a are provided on the front and rear end faces of the block portion 1012a below the first mass body 1001a. Lower bolt holes H1002a are also provided near the lower front end of the block portion 1011b before the second mass body 1001b and near the lower rear end of the block portion 1012b after the second mass body 1001b. Furthermore, the first elastic body 1002a is bolted at its upper end to the front of the block portion 1012a below the first mass body 1001a, and bolted at its lower end to the front of the block portion 1011b before the second mass body 1001b. Furthermore, the first elastic body 1002a of the other party is bolted at its upper end to the rear of the lower block portion 1012a of the first mass body 1001a, and bolted at its lower end to the rear of the block portion 1012b of the second mass body 1001b. In this way, the first mass body 1001a is connected to the second mass body 1001b via a pair of first elastic bodies 1002a.

[0128] The connection configuration of the second elastic body 1002b will be described in more detail below. As shown in Figure 10, an upper bolt hole H1001b is provided near the upper rear end of the front block portion 1011b of the second mass body 1001b and near the upper front end of the rear block portion 1012b. Furthermore, a lower bolt hole H1002b is provided near the lower rear end of the front block portion 1011c of the third mass body 1001c and near the lower front end of the rear block portion 1012c. Moreover, one of the second elastic bodies 1002b is bolted at its upper end to the rear of the front block portion 1011b of the second mass body 1001b, and bolted at its lower end to the rear of the front block portion 1011c of the third mass body 1001c. Furthermore, the second elastic body 1002b is bolted at its upper end to the front of the block portion 1012b following the second mass body 1001b, and bolted at its lower end to the front of the block portion 1012c following the third mass body 1001c. In this way, the second mass body 1001b is connected to the third mass body 1001c via a pair of second elastic bodies 1002b, 1002b.

[0129] The connection configuration of the anti-vibration spring 1030 is described in more detail below. As shown in Figure 10, upper bolt holes H1301 are provided at the front of the block portion 1011c before the third mass 1001c and at the rear of the rear block portion 1012c. Lower bolt holes H1302 are provided on the front and rear end faces of the base 1003. Furthermore, one anti-vibration spring 1030 is bolted to the front of the third mass 1001c at its upper end and to the front of the base 1003 at its lower end. The other anti-vibration spring 1030 is bolted to the rear of the third mass 1001c at its upper end and to the rear of the base 1003 at its lower end. Thus, the third mass 1001c is connected to the base 1003 via a pair of anti-vibration springs 1030.

[0130] Thus, the vibration conveying device 1100 is mounted on a third mass body 1001c, which is set on a base 1003 via a vibration damping spring 1030. A second mass body 1001b, which is elastically supported by a second elastic body 1002b, is disposed on top of the third mass body 1001c, which is elastically supported by a first elastic body 1002a. If this is likened to a building, the second mass body 1001a, which is the first floor portion, is disposed on top of the third mass body 1001c, which is the foundation portion, and the first mass body 1001a, which is the second floor portion, is disposed on top of the third mass body 1001c, thus forming a so-called two-story building structure.

[0131] However, here, the first elastic body 1002a and the second elastic body 1002b are set in opposite tilting postures. That is, as shown in Figure 9, the first elastic body 1002a set between the first mass body 1001a and the second mass body 1001b is set in a tilting posture that is more forward as it goes down, and the second elastic body 1002b set between the second mass body 1001b and the third mass body 1001c is set in a tilting posture that is more backward as it goes down.

[0132] Furthermore, the first elastic body 1002a and the second elastic body 1002b are configured to have different resonant frequencies. As an example, the resonant frequency of the first elastic body 1002a is set to 500Hz, and the resonant frequency of the second elastic body 1002b is set to 200Hz.

[0133] The first elastic body 1002a and the second elastic body 1002b serve as vibration springs for vibrating the masses 1001a, 1001b, and 1001c. Each elastic body 1002a and 1002b is provided with a piezoelectric element (vibration-applying piezoelectric element) 1005p for elastically deforming and vibrating. Furthermore, each elastic body 1002a and 1002b is provided with a piezoelectric element (detection piezoelectric element) 1005q for detecting the degree of elastic deformation. The vibration-applying piezoelectric elements 1005p are provided on both sides of each of the two first elastic bodies 1002a and 1002b and the two second elastic bodies 1002b and 1002b. That is, a total of eight vibration-applying piezoelectric elements 1005p are provided. On the other hand, the detection piezoelectric element 1005q is disposed on one side of the first elastic body 1002a disposed at the rear and the second elastic body 1002b disposed at the front. That is, a total of two detection piezoelectric elements 1005q are provided.

[0134] As shown in Figure 17, a wiring component 1050 is installed on each vibration-applying piezoelectric element 1005p and each detection piezoelectric element 1005q. The wiring component 1050 has: a portion in which the elastomers 1002a, 1002b and two vibration-applying piezoelectric elements 1005p (or one detection piezoelectric element 1005q on one side) are wound into one piece, and a U-shaped portion extending from the portion. In the U-shaped portion of the wiring component 1050, guide wires extending from the piezoelectric elements 1005p, 1005q are laid, and one end of the connecting wiring 1007 is connected to this portion. The other end of the connection wiring 1007 is connected to the vibration control unit 1006, thereby making each piezoelectric element 1005p, 1005q electrically connected to the vibration control unit 1006.

[0135] The vibration control unit 1006 is a functional unit that applies vibration control to cause the mass bodies 1001a, 1001b, and 1001c to vibrate so that the transport object on the linear transport surface L is transported in a predetermined transport state. It can be implemented by a drive circuit or the like.

[0136] <2. Operation of the Vibration Transport Device> Next, referring to Figures 8 to 10, the transport mode achieved by the vibration transport device 1100 will be described.

[0137] In the vibratory conveying device 1100, it is possible to switch between a conveying mode in which the workpiece on the linear conveying surface L is conveyed forward (outward conveying) and a conveying mode in which the workpiece is conveyed backward (return conveying).

[0138] During the outgoing transport process, the vibration control unit 1006 applies a driving voltage to each vibration-applying piezoelectric element 1005p provided in each of the first elastic bodies 1002a, causing each of the first elastic bodies 1002a to vibrate at its resonant frequency. In this way, the first mass body 1001a and the second mass body 1001b vibrate in opposite phases. However, since the first elastic body 1002a is designed to tilt further forward as it descends, the linear transport surface L vibrates in the opposite direction to its upward and forward tilt. This allows the workpiece on the linear transport surface L to be transported forward.

[0139] On the other hand, during the return transport, the vibration control unit 1006 applies a driving voltage to each vibration-applying piezoelectric element 1005p provided in each of the second elastic bodies 1002b, causing each second elastic body 1002b to vibrate at its resonant frequency. In this way, the second mass body 1001b and the third mass body 1001c vibrate in opposite phases. However, since the second elastic body 1002b is designed to tilt further backward as it descends, the linear transport surface L vibrates in the opposite direction to its upward and backward tilt. This allows the workpiece on the linear transport surface L to be transported backward.

[0140] Thus, in the vibration conveying device 1100, by switching the vibration control unit 1006 to apply the driving voltage to the piezoelectric element 1005p for vibration, the state in which the first elastic body 1002a vibrates and the state in which the second elastic body 1002b vibrates are switched. This allows the vibration states of the mass bodies 1001a, 1001b, and 1001c to be switched, enabling them to be switched between outgoing conveying and return conveying.

[0141] Furthermore, the vibration control unit 1006, in addition to applying a driving voltage to the vibration-applying piezoelectric element 1005p through the connection wiring 1007, also obtains a detection voltage from the detection piezoelectric element 1005q through the connection wiring 1007. That is, the detection piezoelectric element 1005q outputs a detection voltage as the voltage generated corresponding to the deformation of each elastic body 1002a, 1002b, so that the vibration control unit 1006 obtains such a detection voltage. The vibration control unit 1006 then adjusts the driving voltage applied to the vibration-applying piezoelectric element 1005p based on the obtained detection voltage.

[0142] As described above, the resonant frequencies of the first elastic body 1002a and the second elastic body 1002b are set to different values. Therefore, when one of the first elastic body 1002a and the second elastic body 1002b is vibrating at the resonant frequency and is being transported in a predetermined direction, the other elastic body will not become an obstacle to the transport.

[0143] That is, when the first elastic body 1002a is vibrating at its resonant frequency, the elastic deformation of the second elastic body 1002b is not as large as that of the first elastic body 1002a, so it will not hinder the forward transport of the workpiece. Since the second elastic body 1002b does not have a large elastic deformation, the second mass body 1001b and the third mass body 1001c connected by the second elastic body 1002b vibrate like a rigid body. At this time, the second mass body 1001b functions as a load-bearing element, and the second elastic body 1002b functions as an auxiliary anti-vibration spring.

[0144] Furthermore, when the second elastic body 1002b is vibrating at its resonant frequency, the elastic deformation of the first elastic body 1002a is not as large as that of the second elastic body 1002b, so it does not hinder the rearward transport of the workpiece. Since the first elastic body 1002a does not undergo large elastic deformation, the first mass body 1001a and the second mass body 1001b1 connected by the first elastic body 1002a vibrate as a single rigid body. At this time, the third mass body 1001c functions as a load-bearing element, and the first mass body 1001a and the second mass body 1001b can be considered as a single unit, vibrating in a manner that transports the workpiece rearward.

[0145] As a specific example of the application of the vibratory conveying device 1100, it can be assumed that the configuration is such that the bowl-shaped feeder is connected to the rear end of the linear conveying surface L. In this case, the workpiece supplied from the bowl-shaped feeder can be conveyed forward by the outgoing conveyor. On the other hand, for example, the lower block portion 1012a of the first mass body 1001a functions as a slide table, and the workpiece falling on this slide table can be returned to the bowl-shaped feeder by the return conveyor.

[0146] In conventional vibratory conveying devices, in order to switch between outgoing and return conveying, for example, two device units consisting of a structure including a mass body with a linear conveying surface and a vibration application unit for applying vibration to the structure are arranged side by side. Furthermore, outgoing conveying is performed by applying vibration to the linear conveying surface of one structure using one vibration application unit, and return conveying is performed by applying vibration to the linear conveying surface of the other structure using the other vibration application unit. Thus, compared to conventional vibratory conveying devices, the vibratory conveying device 1100 in this embodiment is configured with only one structure X and one vibration application unit Y, while simultaneously enabling both outgoing and return conveying. Therefore, compared to conventional vibratory conveying devices, the size of the device (especially the width) can be reduced by approximately half. Therefore, it can be easily implemented even in spaces with limited space. Furthermore, when multiple vibratory conveying devices 1100 are arranged in multiple rows for use, the conveying efficiency can be doubled compared to conventional vibratory conveying devices, since twice the number of vibratory conveying devices 1100 can be configured.

[0147] <3. Connection Wiring> Next, referring to Figures 11 and 12, the connection wiring 1007 of the vibration conveying device 1100 will be described. Figure 11 is a perspective view of the vibration conveying device 1100 with the outer cover member 1004 removed. Figure 12 is a side view of the vibration conveying device 1100 with the outer cover member 1004 removed. Furthermore, in the following, unless a distinction is made between the piezoelectric element 1005p for applying vibration and the piezoelectric element 1005q for detection, it will simply be referred to as "piezoelectric element 1005".

[0148] The connecting wiring 1007 uses each piezoelectric element 1005 as the connection object and the vibration application control unit 1006 as the connecting member to connect the wiring of the two 1005 and 1006. As described above, the vibration conveying device 1100 includes mass bodies 1001a, 1001b, 1001c, elastic bodies 1002a, 1002b, base 1003, outer cover member 1004, etc., to form a structure X, but the vibration application control unit 1006 is provided outside the structure X. On the other hand, each piezoelectric element 1005, as described above, is installed in the elastic bodies 1002a, 1002b. That is, it is provided inside the structure X. That is, the connecting wiring 1007 is connected at one end to the piezoelectric element 1005 located inside the structure X and pulled out to the outside of the structure X, and at the other end to the vibration control unit 1006.

[0149] A portion of the connecting wiring 1007 is constructed using a flexible substrate F. That is, the terminal 1060 of the cable extending from the vibration control unit 1006 is pulled to the upper surface of the base 1003 via the insertion portion 1031 formed on the base 1003 (Figure 10), and the portion of the connecting wiring 1007 that connects to the terminal 1060 and each piezoelectric element 1005 is constructed using a flexible substrate F.

[0150] Except for Figures 11 and 12, the flexible substrate F constituting a part of the connecting wiring 1007 will be described below with reference to Figures 13 and 14. Figure 13 shows the flexible substrate F before three-dimensional bending. Figure 14 shows the flexible substrate F after three-dimensional bending.

[0151] This flexible substrate F is different from a rigid substrate. It is formed by creating wiring patterns on a thin, flexible substrate (substrate film). Flexible printed circuit boards are also called FPCs (Flexible Printed Circuits). Here, a flexible substrate F, which forms wiring patterns on both sides of a substrate film made of insulating materials such as polyimide, is used to form a part of the connecting wiring 1007 by using copper foil or the like. The flexible substrate used to form wiring (cables) is also called a flexible cable.

[0152] The flexible substrate F is shaped to branch from a pair of base ends F1 toward six front ends F2. Terminal portions 1070 are provided at each end F1, F2. On the front and back surfaces of the substrate, a wiring pattern is formed in such a way that the terminal portions 1070 on the base end F1 side are connected to the terminal portions 1070 on the front end F2 side.

[0153] The flexible substrate F, having bendability, is formed from a planar shape as shown in Figure 13 into a three-dimensional shape (Figure 14) that corresponds to the shape of the structure X by bending at predetermined positions and folding at predetermined positions, and is then mounted on the structure X (Figures 11 and 12). At this time, the terminal portion 1070 provided at each base end F1 is connected to the terminal 1060 of the vibration control unit 1006, and the terminal portion 1070 provided at each front end F2 is connected to the piezoelectric element 1005. After the flexible substrate F is mounted, an outer cover member 1004 (Figure 11) is provided to cover the flexible substrate F.

[0154] In the state where the structure X is installed, portions 1711, 712, and 1713 of the flexible substrate F are arranged along the side surfaces of the mass bodies 1001b and 1001c (hereinafter referred to as "alongside portions"). Furthermore, portions 1721, 1722, and 1723 are provided across the space between members that move relative to each other by applying vibration (hereinafter referred to as "crossing portions"). The extended portions and crossing portions will be described below.

[0155] (Extended portion) The flexible substrate F is provided with: an extension portion (lower extension portion) 1711 disposed along the side of the third mass body 1001c, an extension portion (front extension portion) 1712 disposed along the side of the block portion 1011b before the second mass body 1001b, and an extension portion (rear extension portion) 1713 disposed along the side of the block portion 1012b after the second mass body 1001b.

[0156] Each extension portion 1711, 1712, 1713 is shaped to be accommodated in the side surface of the mass bodies 1001c, 1001b, and is disposed along the side surface and fixed to the side surface using double-sided tape or the like.

[0157] (First spanning portion) The flexible substrate F has two spanning portions (first spanning portions) 1721 disposed between the second mass body 1001b and the third mass body 1001c. One of the first spanning portions 1721 is disposed between the lower side extension portion 1711 and the front side extension portion 1712 in the flexible substrate F (Figures 13 and 14), and is disposed between the front block portion 1011b of the third mass body 1001c and the second mass body 1001b when it is installed in the structure X (Figure 12). Furthermore, the first spanning portion 1721 of the other side is provided between the lower side extension portion 1711 and the rear side extension portion 1713 in the flexible substrate F (Figures 13 and 14), and when it is installed in the structure X, it is disposed between the rear block portion 1012b of the third mass body 1001c and the second mass body 1001b (Figure 12).

[0158] The first spanning portion 1721 will be described with reference to Figure 15. Although Figure 15 shows the first spanning portion 1721 located on the rear side, the first spanning portion 1721 located on the front side also has the same configuration.

[0159] The first spanning portion 1721, before being bent in three dimensions, is a straight, strip-shaped portion (Figure 13). In its three-dimensional shape, the junction 1730 with the extending portions 1711, 1713 (1712) is bent at approximately 90°, and the approximately central portion of the first spanning portion 1721 is bent into a U-shape (Figure 14). Moreover, the first spanning portion 1721, which is bent into a U-shape, is inserted between a pair of opposing surfaces S1, S2, that is, between the lower surface S1 of the second mass body 1001b and the upper surface S2 of the third mass body 1001c (Figure 15).

[0160] Therefore, the first spanning portion 1721 is provided along the lower surface S1 of the second mass body 1001b from one end to the bend, and along the upper surface S2 of the third mass body 1001c from the other end to the bend. Here, the two ends of the first spanning portion 1721 are clamped between the protruding piece 1041 provided on the outer cover member 1004 and each surface S1, S2, so that they will not detach from each surface S1, S2. However, apart from these parts, it is not fixed to each surface S1, S2, but is provided in a way that can be separated from each surface S1, S2.

[0161] Thus, the first spanning portion 1721 is not linearly disposed between the two masses 1001b and 1001c, but is disposed with a slack portion (i.e., clearance). Therefore, when the two masses 1001b and 1001c move relative to each other by applying vibration, the slack portion absorbs the displacement of the two masses 1001b and 1001c, allowing the relative movement of the two masses 1001b and 1001c. That is, the relative movement of the two masses 1001b and 1001c is not hindered by the flexible substrate F, so the flexible substrate F does not produce a damping effect like reducing vibration in this spanning portion.

[0162] In particular, when vibration is applied, the relative movement of the two masses 1001b and 1001c is basically limited to the front-back and vertical directions. The first spanning portion 1721 can be flexibly deformed in these directions, thereby allowing the two masses 1001b and 1001c to move relative to each other in these directions. That is, the first spanning portion 1721 is bent into a U-shape and arranged along the front-back direction, with its two ends overlapping vertically. Therefore, the first spanning portion 1721 can widely follow the relative movement of the two masses 1001b and 1001c in the front-back direction by deforming by changing the position of the bent portion, and it can also widely follow the relative movement of the two masses 1001b and 1001c in the vertical direction by deforming by changing the bending angle.

[0163] (Second Crossing Part) The flexible substrate F has two crossing parts (second crossing parts) 1722, 1722, which are arranged across the third mass body 1001c and the terminal 1060 of the vibration control unit 1006. Each second crossing part 1722 is provided between the base end F1 and the lower extension part 1711 in the flexible substrate F (Figures 13 and 14), and is arranged front and back between the third mass body 1001c and the base 1003 when it is installed in the structure X (Figure 12).

[0164] The second spanning portion 1722 will be explained with reference to Figure 16. Although Figure 16 shows the rear second spanning portion 1722, the front second spanning portion 1722 also has the same structure.

[0165] The second spanning portion 1722, before being three-dimensionally bent, is a straight, strip-shaped portion (Figure 13). In its three-dimensional shape, the junction 1730 with the lower extension portion 1711 is bent at approximately 90°, and the approximately central portion of the second spanning portion 1722 is bent into a U-shape (Figure 14). The second spanning portion 1722, bent into a U-shape, is inserted between a pair of opposing surfaces S1 and S2, that is, between the lower surface S1 of the third mass body 1001c and the upper surface S2 of the base 3 (Figure 16). Then, the terminal portion 1070 provided at the base end F1 is connected to the terminal 1060 of the vibration control unit 1006 that is pulled out to the upper surface of the base 1003.

[0166] Therefore, the second spanning portion 1722 is provided along the lower surface S1 of the third mass body 1001c from one end to the bent portion, and along the upper surface S2 of the base 1003 from the other end to the bent portion. Here, although the end of the second spanning portion 1722 that connects to the terminal 1060 is fixed to the upper surface S2 of the base 1003, it is not fixed to each surface S1, S2 except for these portions, but is provided in a way that allows it to be separated from each surface S1, S2.

[0167] Thus, the second spanning portion 1722 is not linearly disposed between the third mass 1001c and the base 1003, but is disposed with a slack portion. Therefore, when the third mass 1001c moves relative to the base 1003 by applying vibration, the slack portion absorbs the displacement of the third mass 1001c relative to the base 1003, allowing the relative movement of the third mass 1001c. That is, the relative movement of the third mass 1001c is not hindered by the flexible substrate F, and therefore, in this spanning portion, the flexible substrate F does not produce a damping effect like reducing vibration.

[0168] In particular, when vibration is applied, the direction in which the third mass body 1001c moves relative to the base 1003 is basically only composed of the front-back and vertical directions. The second spanning portion 1722, like the first spanning portion 1721, is bent into a U-shape and arranged along the front-back direction with its two ends overlapping vertically. Therefore, it can be flexibly deformed in all these directions. Thus, the second spanning portion 1722 can sufficiently allow the third mass body 1001c to move relative to the base 1003 in all these directions.

[0169] (Third spanning portion) The flexible substrate F has six spanning portions (third spanning portions) 1723 arranged across the second mass body 1001b or the third mass body 1001c and each piezoelectric element 1005. Each third spanning portion 1723 is provided between each front end portion F2 and each extension portion 1711, 1712, 1713 in the flexible substrate F (Figures 13 and 14), and is arranged between the mass bodies 1001b, 1001c and each piezoelectric element 1005 when it is installed in the structure X (Figure 12).

[0170] The third spanning portion 1723 will be described with reference to Figure 17. Although Figure 17 shows the third spanning portion 1723 disposed between the front block portion 1011c of the third mass body 1001c and the piezoelectric element 1005 (vibration-applying piezoelectric element 1005p) of the second elastic body 1002b located in front, the other third spanning portions 1723 have substantially the same configuration.

[0171] The third spanning portion 1723, in its unfolded state, is a straight, strip-shaped portion (Figure 13). In its three-dimensional shape, the junction 1730 with each of the extended portions 1711, 1712, and 1713 is bent at approximately 90°, and the approximately central portion of the third spanning portion 1723 is bent into a U-shape (Figure 14). Moreover, the third spanning portion 1723, which is bent into a U-shape, is inserted between a pair of opposing surfaces S1 and S2. That is, in the case of the third spanning portion 1723 shown in Figure 17, it is inserted between the rear S1 of the block portion 1011c before the third mass body 1001c and the front S2 of the wiring component 1050 provided on the piezoelectric element 1005 (Figure 17). Then, the terminal portion 1070 located at the front end F2 is connected to the wiring portion 1050 (and further to the piezoelectric element 1005).

[0172] Therefore, the third crossing portion 1723 is provided along the rear surface S1 of the third mass body 1001c from one end to the bend, and along the front surface S2 of the wiring component 1050 from the other end to the bend. Here, although the end of the third crossing portion 1723 that connects to the wiring component 1050 is fixed to the front surface S2 of the wiring component 1050, it is not fixed to each surface S1, S2 except for these portions, but is provided in a way that allows it to be separated from each surface S1, S2.

[0173] Thus, the third spanning portion 1723 is not linearly disposed between the second mass 1001b or the third mass 1001c and the piezoelectric element 1005, but is disposed with a slack portion. Therefore, when the elastic bodies 1002a and 1002b are deformed by applying vibration, and the piezoelectric element 1005 moves relative to the mass bodies 1001b and 1001c, the slack portion absorbs the displacement of the piezoelectric element 1005 relative to the mass bodies 1001b and 1001c, allowing the relative movement of the piezoelectric element 1005. That is, the deformation of the elastic bodies 1002a and 1002b is not hindered by the flexible substrate F, so the flexible substrate F does not produce a damping effect like reducing vibration in this spanning portion.

[0174] In particular, when vibration is applied, the direction in which the piezoelectric element 1005 moves relative to the masses 1001b and 1001c is basically limited to the front-back and vertical directions. The third spanning portion 1723 is designed to be flexible and deformable in these directions, thereby allowing sufficient relative movement of the piezoelectric element 1005 relative to the masses 1001b and 1001c in these directions. That is, the third spanning portion 1723 is bent into a U-shape and arranged in a generally vertical manner, with its two ends arranged in a generally horizontally overlapping manner. Therefore, the third spanning portion 1723 can widely follow the relative movement of the piezoelectric element 1005 in the vertical direction by deforming by changing the position of the bent portion, and can also widely follow the relative movement of the piezoelectric element 1005 in the horizontal direction by deforming by changing the bending angle.

[0175] <4. Effect> The vibration conveying device 1100 in the above embodiment includes: a structure X comprising elastically supported mass bodies 1001a, 1001b, and 1001c, and a vibration application part Y for vibrating the mass bodies 1001a, 1001b, and 1001c, and is configured such that the mass bodies 1001a, 1001b, and 1001c are vibrated by the vibration application part Y, thereby enabling the conveying object to be conveyed. At least a portion of the connection wiring 1007 between the piezoelectric element 1005, which is disposed inside the structure X and serves as the connected component, and the vibration application control part 1006, which is disposed outside the structure X and serves as the connected component, is formed using a flexible substrate F. At least a portion 1711, 1712, and 1713 of the flexible substrate F is disposed along the surface of the mass bodies 1001b and 1001c. With this configuration, vibrations are not weakened by the connecting wiring 1007, thus eliminating the need for deep grooves on the surfaces of the mass bodies 1001b and 1001c. Consequently, the weight of the mass bodies 1001b and 1001c is not affected. In other words, the possibility of impaired handling performance due to the connecting wiring 1007 can be avoided.

[0176] In particular, the portions of the connecting wiring 1007 arranged along the surfaces of the second mass body 1001b and the third mass body 1001c are made of a flexible substrate F. When the second mass body 1001b functions as a load during outgoing transport and the third mass body 1001c functions as a load during return transport, by sufficiently ensuring the mass of these two mass bodies 1001b and 1001c, the transport performance for both outgoing and return transport can be adequately guaranteed.

[0177] Furthermore, in the above-described embodiment of the vibration conveying device 1100, the flexible substrate F has spanning portions 1721, 1722, and 1723 that span between members that move relative to each other by applying vibration, and slack portions that allow relative movement between the members are provided in the spanning portions 1721, 1722, and 1723. Therefore, when relative movement between the members is generated by applying vibration, the flexible substrate F does not produce a damping effect like reducing vibration.

[0178] Furthermore, in the above-described embodiment of the vibration conveying device 1100, the structure X includes a plurality of mass bodies 1001b and 1001c, and a crossing portion (first crossing portion) 1721 is provided between the plurality of mass bodies 1001b and 1001c. Therefore, when the plurality of mass bodies 1001b and 1001c are moved relative to each other by applying vibration, the flexible substrate F does not produce a damping effect as if reducing vibration.

[0179] Furthermore, in the above-described embodiment of the vibration conveying device 1100, a crossing portion (third crossing portion) 1723 is provided between the mass bodies 1001b and 1001c and the piezoelectric element 1005, which is the connecting object. Therefore, when the mass bodies 1001b and 1001c and the piezoelectric element 1005 move relative to each other by applying vibration, the flexible substrate F does not produce a damping effect that reduces vibration.

[0180] Furthermore, in the above-described embodiment of the vibration conveying device 1100, its structure X includes elastic bodies 1002a and 1002b provided on the mass bodies 1001a, 1001b, and 1001c, and its vibration application part Y includes: a vibration application piezoelectric element 1005p provided on the elastic bodies 1002a and 1002b, and a vibration application control part 1006 that applies a driving voltage to these elements. Moreover, the connection target component in the connection wiring 1007 is the vibration application piezoelectric element 1005p, and the connected component is the vibration application control part 1006. Therefore, the vibration application piezoelectric element 1005p and the vibration application control part 1006 can be connected without compromising the conveying performance.

[0181] Furthermore, in the above-described embodiment of the vibration conveying device 1100, its structure X includes elastic bodies 1002a and 1002b provided on the mass bodies 1001a, 1001b, and 1001c, and its vibration application part Y includes a detection piezoelectric element 1005q provided on the elastic bodies 1002a and 1002b, and a vibration application control part 1006 that obtains detection voltage from these elements. Moreover, the connection target component in the connection wiring 1007 is the detection piezoelectric element 1005q, and the connected component is the vibration application control part 1006. Therefore, the detection piezoelectric element 1005q and the vibration application control part 1006 can be connected without compromising the conveying performance.

[0182] Furthermore, the flexible substrate F is formed by bending the substrate at a predetermined position and folding it at the predetermined position to create a three-dimensional shape, and the laying operation is completed simply by installing it on the structure X. Therefore, for example, compared with the laying operation of round cables, the workload during laying can be greatly reduced.

[0183] Furthermore, in the above embodiment, the portions 1711, 1712, and 1713 arranged along the surfaces of the mass bodies 1001b and 1001c in the connecting wiring 1007 are composed of a flexible substrate F with an exceptionally small thickness compared to round cables. For example, if a substrate film is formed from polyimide with excellent voltage resistance, the thickness of the substrate film can be reduced to approximately 25 μm. Alternatively, if the wiring pattern is formed from copper foil, the film thickness can be reduced to approximately 18 μm. For example, if the flexible substrate F is formed using this combination, the thickness can be made to approximately 127 μm. The portions 1711, 1712, and 1713 disposed along the surfaces of the mass bodies 1001b and 1001c in the connection wiring 1007 are formed by using a thin flexible substrate F in this way, which can suppress the increase in the device width dimension associated with laying the connection wiring 1007 to a particularly small extent compared to the case of using round cables.

[0184] In particular, the vibration conveying device 1100 in the above embodiment is configured to switch between outgoing and return conveying without increasing the size (especially the width). Therefore, when introduced to a space-constrained site, the advantages of the thin vibration conveying device 1100 with its compact width can be maximized by using the connection wiring 1007, which includes a flexible substrate F, while achieving higher conveying efficiency through multi-row configuration.

[0185] Furthermore, in order to avoid increasing the size of the device and to allow switching between outgoing and returning transport modes, the vibratory transport device 1100 in the above embodiment has a relatively large number of elastic bodies 1002a and 1002b in the structure X, and a relatively large number of piezoelectric elements 1005. That is, the number of connected components is relatively large. However, if at least a portion of the connecting wiring 1007 is formed using a flexible substrate F, the transport performance of the vibratory transport device 1100 can be preserved, and a large number of connected components can be connected without difficulty.

[0186] <5. Modification> In the vibration conveying device 1100 of the above embodiment, grooves corresponding to the shapes of each extension portion 1711, 1712, 1713 can be formed along the surfaces of the mass bodies 1001c and 1001b, so that each extension portion 1711, 1712, 1713 is disposed along each surface in such a way that it is received inside the corresponding groove. However, in this case, the depth of the groove is sufficient as long as it is comparable to the thickness of the flexible substrate F, and even a very shallow one of a few millimeters is acceptable. By forming such a groove shape in advance, the laying operation of the flexible substrate F can be simplified.

[0187] Furthermore, in the above embodiment, although part of the connection wiring 1007 used to connect the piezoelectric element 1005, which is the component to be connected, and the vibration control unit 1006, which is the component to be connected, is constructed by a flexible substrate F, the entire connection wiring 1007 can also be constructed by a flexible substrate F.

[0188] Furthermore, in the above embodiment, although the portion of the connection wiring 1007 used to connect the terminal 1060 of the cable extending from the vibration control unit 1006 to each piezoelectric element 1005 is constructed using a single flexible substrate F, this portion may, for example, contain a plurality of flexible substrates. For example, portions corresponding to each extension portion 1711, 1712, and 1713 may be constructed using individual flexible substrates, and portions corresponding to each crossing portion 1721, 1722, and 1723 may be constructed using round cables with slack portions.

[0189] The connection wiring 1007 in the above embodiment can be applied to various vibration transport devices. For example, in a vibration transport device, an electromagnet is used to vibrate a mass body that can be elastically supported relative to a base, thereby transporting an object to be transported on a transport surface formed on the upper surface of the mass body. The connection wiring 1007 in the above embodiment can also be applied to such a vibration transport device. In this case, for example, at least a portion of the connection wiring connecting the electromagnet and the vibration control unit can be formed by a flexible substrate, and at least a portion of the flexible substrate can be arranged along the surface of the mass body.

[0190] For example, in a vibration conveying device, there are two mass bodies (movable part and load-bearing part) connected by an elastic body, and a conveying table connected to one of the mass bodies. The two mass bodies vibrate in opposite phases by applying a driving voltage to a piezoelectric element attached to the elastic body, thereby conveying an object to be conveyed on the conveying surface of the conveying table. The connection wiring 1007 in the above embodiment can also be applied to such a vibration conveying device. In this case, for example, at least a portion of the connection wiring connecting the piezoelectric element and the vibration control part can be formed by a flexible substrate, and at least a portion of the flexible substrate can be arranged along the surface of one or both mass bodies.

[0191] In the above embodiment, although the connection object component in the connection wiring 1007 is a piezoelectric element 1005, the connection object component is not limited to the piezoelectric element 1005. For example, as in the above variation, it can be an electromagnet or various sensor components.

[0192] In the above embodiment, although the connected component in the connection wiring 1007 is the vibration control unit 1006, the connected component is not limited to this.

[0193] Furthermore, the substrate or wiring material of the flexible substrate F is not limited to those exemplified in the above embodiments.

[0194] Furthermore, the objects transported by the vibration transport device are not limited to workpieces such as IC chips and micro coils.

[0195] Other components can also be varied as long as they do not depart from the inventive spirit of this embodiment. [Industrial Applicability]

[0196] The present invention is applicable to a vibratory conveying device capable of conveying an object in a predetermined direction and a multi-row vibratory conveying system having the device. [Simplified Explanation of the Diagram]

[0020] [Figure 1] is a top view of a multi-row vibrating conveying system having the vibrating conveying device of the first reference example of the present invention. [Figure 2] is a side view of the vibrating conveying device of Figure 1. [Figure 3] is a view showing the connecting plate on the front side of the paper in Figure 2 after removal. [Figure 4] is a view showing the mounting portion of the trough and trough support platform of the vibrating conveying device of Figure 2. [Figure 5] is a side view of the vibrating conveying device of the second reference example of the present invention. [Figure 6] is a side view of the vibrating conveying device of the third reference example of the present invention. [Figure 7] is a side view showing a modified example of the vibrating conveying device of the first reference example of the present invention. [Figure 8] is a perspective view showing the structure of the vibrating conveying device according to an embodiment of the present invention. [Figure 9] is a side view of the vibrating conveying device. [Figure 10] is an exploded view of the vibrating conveying device. [Figure 11] is a perspective view of the vibrating conveying device after the outer cover component is removed. [Figure 12] is a side view of the vibratory conveying device after the outer casing component has been removed. [Figure 13] shows the flexible substrate before three-dimensional bending. [Figure 14] shows the flexible substrate after three-dimensional bending. [Figure 15] shows the first spanning section. [Figure 16] shows the second spanning section. [Figure 17] shows the third spanning section.

Claims

1. A vibration conveying device comprising: a structure including a mass body elastically supported, and an application vibration unit for vibrating the mass body, wherein the vibration conveying device is configured to convey a conveyed object by vibrating the mass body through the application vibration unit, characterized in that: at least a portion of the connecting wiring for connecting a connecting object member disposed inside the structure to a connecting member disposed outside the structure is formed using a flexible substrate, at least a portion of the flexible substrate is disposed along the surface of the mass body, the flexible substrate has a crossing portion which is disposed across between members that move relative to each other by applying vibration, and the crossing portion has a slack portion that allows relative movement between the members.

2. The vibratory conveying device as claimed in claim 1, wherein, The aforementioned spanning portion is provided between the aforementioned mass body and the connected object component.

3. The vibratory conveying device as described in claim 1 or 2, wherein, The structure described above has an elastic body provided on the mass body. The vibration application part includes: a piezoelectric element provided on the elastic body for applying vibration, and a vibration application control part for applying a driving voltage to the piezoelectric element. The connection target part is the piezoelectric element for applying vibration, and the connected part is the vibration application control part.

4. The vibratory conveying device as described in claim 1 or 2, wherein, The structure described above has an elastic body provided on the mass body. The vibration application part includes: a piezoelectric element for detection provided on the elastic body, and a vibration application control part that obtains a detection voltage from the piezoelectric element. The connection target part is the piezoelectric element for detection, and the connected part is the vibration application control part.

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