Optical control component structure and method of manufacturing the same

Abstract

This invention provides a light control element structure comprising a liquid crystal layer and a reflective connecting layer located below it. The reflective connecting layer includes an annular dummy layer, a metal reflective layer, and at least one connecting structure. The annular dummy layer adopts a continuous closed or open structure, surrounding the metal reflective layer and the connecting structure, effectively reducing light transmittance and enhancing structural stability. Compared to traditional island-shaped dummy patterns, the annular dummy layer avoids the problem of missing parts caused by excessively small size through its continuous structure, while improving the uniformity of the chemical mechanical polishing process and reducing surface dishing. The reflective connecting layer may contain multiple connecting structures, such as two or four, forming a single or multi-unit structure, electrically connecting the liquid crystal units in the liquid crystal layer to achieve flexible optical control.

Claims

1. A light control element structure, comprising: a liquid crystal layer; a reflective connection layer located below the liquid crystal layer, wherein the reflective connection layer includes: an annular dummy layer made of an insulating material, wherein the annular dummy layer is a continuous structure and surrounds the metal reflective layer and the at least one connection structure; a metal reflective layer located within the annular dummy layer; at least one connection structure located within the annular dummy layer and within the metal reflective layer, the connection structure being electrically connected to the liquid crystal layer; and at least one second annular layer, each of the second annular layers being located around one of the connection structures and electrically isolating the connection structure and the metal reflective layer.

2. The light control element structure as claimed in claim 1, wherein the liquid crystal layer includes a plurality of liquid crystal cells, each liquid crystal cell corresponding to a connection structure in the reflective connection layer, wherein the connection structure in the reflective connection layer is electrically connected to the corresponding liquid crystal cell.

3. The optical control element structure as claimed in claim 1, wherein the metal reflective layer and the connecting structure are both made of copper, and the annular dummy layer and the second annular layer are both made of silicon oxide.

4. The optical control element structure as claimed in claim 1, wherein the annular dummy layer contains two or four of the connection structures.

5. The optical control element structure as claimed in claim 1, wherein, viewed from a top view, both the annular dummy layer and the second annular layer are rectangular, and the four corners of the rectangle are rounded.

6. The optical control element structure as claimed in claim 1, wherein, viewed from a top view, the annular dummy layer is rectangular with rounded corners, and the second annular layer is annular.

7. The optical control element structure as claimed in claim 1, wherein, viewed from a top view, both the annular dummy layer and the second annular layer are annular in shape.

8. The optical control element structure as claimed in claim 1, further comprising a circuit layer located below the reflective connection layer, the circuit layer containing a plurality of signal lines, and the connection structure in the reflective connection layer electrically connecting the signal lines.

9. The light control element structure as claimed in claim 1, wherein the liquid crystal layer includes a plurality of metal electrodes, a plurality of second contact structures, and a liquid crystal material located between the metal electrodes and the second contact structures.

10. The light control element structure as claimed in claim 1, wherein the transmittance of the metal reflective layer is less than 50% within the range of the annular dummy layer.

11. The optical control element structure as described in claim 1, wherein the annular dummy layer is a closed annular structure.

12. The optical control element structure as claimed in claim 1, wherein the annular dummy layer is a non-closed annular structure and includes at least one opening.

13. A method for fabricating a light control element structure, comprising: forming a reflective connection layer, wherein the reflective connection layer includes: an annular dummy layer made of an insulating material; a metal reflective layer located within the annular dummy layer; at least one connection structure located within the annular dummy layer and within the metal reflective layer; at least one second annular layer, each of the second annular layers being located around one of the connection structures and electrically isolating the connection structure and the metal reflective layer; and forming a liquid crystal layer located on the reflective connection layer, wherein the connection structure is electrically connected to the liquid crystal layer.

14. The method of fabricating the optical control element structure as claimed in claim 13, wherein the method of forming the reflective connection layer further comprises: defining the annular dummy layer and a second annular layer; filling a metal material layer into the gap between the annular dummy layer and the second annular layer, and performing a planarization step to remove excess metal material layer, wherein the metal material layer within the second annular layer is defined as the connection structure, and the metal material layer between the annular dummy layer and the second annular layer is defined as the metal reflective layer.

15. The method for fabricating the optical control element structure as claimed in claim 14, wherein after the planarization step, the surface area of ​​the metal material layer decreases by less than 1%.

16. A method for fabricating an optical control element structure as described in claim 14, wherein the annular dummy layer and the second annular layer are formed simultaneously.

17. A method for manufacturing a light control element structure as described in claim 13, wherein the liquid crystal layer comprises a plurality of liquid crystal cells, each liquid crystal cell corresponding to a connection structure in the reflective connection layer, wherein the connection structure in the reflective connection layer is electrically connected to the corresponding liquid crystal cell.

18. A method for fabricating an optical control element structure as described in claim 13, wherein the annular dummy layer contains two or four of the connection structures.

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