Stripping equipment with cleaning function and its stripping method

Abstract

The peeling device with cleaning function provided by the present invention includes a carrying device, a conveying device, a first dust collection device, and a second dust collection device. The carrying device includes a base and at least one platform disposed on the base. The conveying device is disposed on the base of the carrying device and includes a moving module and a pick-and-place module. The moving module is connected to the pick-and-place module and is used to move the pick-and-place module to the at least one platform. The first dust collection device is disposed on the pick-and-place module of the conveying device and includes a dust collection ring. The dust collection ring has a hollow structure and surrounds the lateral periphery of the pick-and-place module, and is used to generate suction force on the hollow area of ​​the dust collection ring. The second dust collection device is disposed on the base of the carrying device and is lower than the pick-and-place module, and is used to generate downward suction force on the pick-and-place module.

Claims

1. A stripping device with a cleaning function, comprising: A support device includes a base and at least one platform disposed on the base; A conveying device is disposed on the base of the supporting device and includes a moving module and a picking and placing module. The moving module is connected to the picking and placing module and is used to move the picking and placing module to the at least one platform. A first dust collection device is disposed on the picking and placing module of the conveying device and includes a dust collection ring. The dust collection ring is a hollow structure and surrounds the lateral periphery of the picking and placing module, and is used to generate suction force on the hollow area of ​​the dust collection ring. And a second vacuuming device, disposed on the base of the support device and lower than the pick-up and put-down module, and used to generate downward suction force on the pick-up and put-down module.

2. The stripping device with cleaning function as described in claim 1, wherein, The dust collection ring of the first dust collection device further includes at least one side dust collection port and at least one bottom dust collection port. The at least one side dust collection port is used to generate suction within the hollow area of ​​the dust collection ring, and the at least one bottom dust collection port is used to generate suction below the hollow area of ​​the dust collection ring.

3. A stripping device with a cleaning function as described in claim 1 or 2, wherein, The first vacuuming device also includes a lifting unit connected to the dust collection ring and used to adjust the position of the dust collection ring relative to the pick-up and drop-off module.

4. A stripping device with a cleaning function as described in claim 1, wherein, The second vacuuming device is located on the path of the pick-and-place module as it leaves the at least one platform.

5. A stripping device with a cleaning function as described in claim 1, wherein, The first vacuum cleaner and the second vacuum cleaner each include a disturbance unit. The disturbance unit of the first vacuum cleaner is used to provide positive pressure airflow downwards, and the disturbance unit of the second vacuum cleaner is used to provide positive pressure airflow upwards.

6. A stripping device with a cleaning function as described in claim 1, wherein, The first and second vacuuming devices each include a perturbation unit, which is an ultrasonic generator. The perturbation unit of the first vacuuming device is used to transmit ultrasonic waves downward, and the perturbation unit of the second vacuuming device is used to transmit ultrasonic waves upward.

7. A stripping method using a stripping device, comprising: An object is provided, including a carrier substrate, a product, and a release structure temporarily connecting the carrier substrate and the product; Provide a peeling device as described in any one of claims 1 to 6, wherein the carrier substrate of the object is supported by the platform of the carrier device and the pick-and-place module of the conveying device picks up the product; the dust collection ring of the first dust collection device generates suction on the object; and the pick-and-place module peels off the product and moves toward the second dust collection device so that the second dust collection device generates suction on the product.

8. The stripping method of the stripping equipment as described in claim 7, wherein, The first vacuuming device generates suction on the object by moving from a first position to a second position, wherein in the first position the dust collection ring of the first vacuuming device is positioned above the product, and in the second position the dust collection ring of the first vacuuming device surrounds the product.

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