probe

Abstract

This invention provides a probe with high contact reliability. The probe includes: an elastic portion; a first connecting portion connected to one end of the elastic portion in a first direction, i.e., a first end; and a second connecting portion connected to the other end, i.e., a second end. The elastic portion has: a first portion extending from the first end along a second direction intersecting the first direction; a second portion extending from the second end toward the same side in the second direction as the first portion; and a curved portion of a bent shape connecting the end of the first portion in the second direction that is away from the first end to the end of the second portion that is away from the second end. The length along the first direction between the end of the first connecting portion connected to the first end and the end of the second connecting portion connected to the second end is longer than the inner diameter of the bend of the elastic portion.

Description

Probe The present disclosure relates to a probe. In Patent Document 1, a probe used for conduction inspection, characteristic measurement, etc. of an electronic module is described. [Prior Art Documents] [Patent Documents] [Patent Document 1] Japanese Patent Application Laid-Open No. 2022-135106 [Problems to be Solved by the Invention] Generally, a probe including the probe of Patent Document 1 has an elastic portion. However, if the stroke of the probe generated by the expansion and contraction of the elastic portion is short, contact failure may sometimes occur during inspection. An object of the present disclosure is to provide a probe with high contact reliability. [Means for Solving the Problems] A probe according to an aspect of the present disclosure includes: an elastic portion; a first connection portion connected to one end portion, i.e., the first end portion, of both end portions of the elastic portion in a first direction; and a second connection portion connected to the other end portion, i.e., the second end portion, of both end portions of the elastic portion in the first direction. The elastic portion has: a first portion extending from the first end portion in a second direction intersecting the first direction; a second portion extending from the second end portion toward the same side as the first portion in the second direction; and a bent portion having a bent shape connecting an end portion of the first portion in the second direction that is far from the first end portion to an end portion of the second portion in the second direction that is far from the second end portion. The length along the first direction between the end portion of the first connection portion connected to the first end portion and the end portion of the second connection portion connected to the second end portion is longer than the inner diameter of the bend of the elastic portion. [Effects of the Invention] According to the present disclosure, a probe with high contact reliability can be provided. Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. The following description is merely an example in nature and is not intended to limit the present disclosure, the applications of the present disclosure, or the uses of the present disclosure. The drawings are schematic, and the ratios of the respective dimensions etc. are not necessarily the same as the actual situation. In addition, in the following description, terms indicating specific directions or positions (for example, terms including "upper", "lower", "right", "left", "front", "rear") are used as needed. However, the use of the terms indicating specific directions or positions is for facilitating the understanding of the present disclosure with reference to the drawings, and does not limit the technical scope of the present disclosure by the meanings of these terms. As shown in FIGS. 1 and 2, an inspection socket 1 according to an embodiment of the present disclosure includes a housing 2, a housing 3, a housing 4, a housing 5, a housing 6, and a plurality of plate-shaped probes 7 housed inside the housing 2, the housing 3, the housing 4, the housing 5, and the housing 6. As shown in FIG. 2, the housing 2 has through holes 2A and 2B that penetrate the housing 2 in the vertical direction (e.g., the Z direction shown in each figure). The vertical direction and the Z direction are examples of the first direction. In the present embodiment, in the vertical direction, the side where the housing 2 is located is the upper side, and the side where the housing 6 is located is the lower side. The housing 3 has a base portion 31 and a protruding portion 32 that protrudes upward from the base portion 31. Here, the so-called "protruding upward" means "protruding in the direction from the housing 6 toward the housing 2 along the first direction". The protruding portion 32 has a recessed portion 3A that is recessed downward. Here, the so-called "recessed downward" means "recessed in the direction from the housing 2 toward the housing 6 along the first direction". The protruding portion 32 has a plurality of through holes 3B that penetrate the protruding portion 32 in the vertical direction on the bottom surface constituting the recessed portion 3A. Each of the plurality of through holes 3B corresponds to each of the plurality of probes 7. The housing 4 has through holes 4A and 4B that penetrate the housing 4 in the vertical direction. The housing 5 holds the plurality of probes 7 in an array as shown in FIG. 2. The housing 6 has: a pin 61 that protrudes upward; and a recessed portion 6A that is recessed downward from the upper surface (in other words, the surface of the outer surface of the housing 6 that faces the housing 4). The housing 6 has a plurality of through holes 6B that penetrate the housing 6 in the vertical direction on the bottom surface constituting the recessed portion 6A. Each of the plurality of through holes 6B corresponds to each of the plurality of probes 7. The lower portion of the housing 5 that holds the probe 7 is housed in the recessed portion 6A of the housing 6. The lower portion of the housing 5 is the portion of the housing 5 that is closer to the housing 6 in the first direction. At this time, the second contact points 121, 122, 752, and 762 (refer to FIG. 3) of each probe 7 are exposed to the outside of the inspection socket 1 through the through holes 6B. The housing 2, the housing 3, and the housing 4 are assembled above the housing 6 that houses the housing 5. The housing 2, the housing 3, and the housing 4 are assembled to the housing 6 in the order of the housing 4, the housing 3, and the housing 2 from below. The pin 61 of the housing 6 penetrates the through hole 4B of the housing 4 and the through hole 2B of the housing 2. Thereby, the housing 2 and the housing 4 are positioned with respect to the housing 6. The protruding portion 32 of the housing 3 penetrates the through hole 2A of the housing 2 from below. Thereby, the protruding portion 32 is exposed to the outside of the inspection socket 1, and the housing 3 is positioned with respect to the housing 2. The first connection portion 11 (refer to FIGS. 5 and 6) of each probe 7 penetrates the through hole 4A of the housing 4 from below. The first contact points 111, 751, and 761 (refer to FIG. 3) of each probe 7 are exposed to the outside of the inspection socket 1 through the through hole 3B of the housing 3. The inspection socket 1 is connected to an inspection device (not shown), and the contact object 8 (refer to FIGS. 4, 5, and 6) is connected to the inspection socket 1. In the connected state, the continuity between the contact object 8 and the inspection device is inspected. The inspection socket 1 is placed on the substrate included in the inspection device. Thereby, the second contact points 121, 122, 752, 762 (refer to FIG. 3) of the respective probes 7 exposed to the outside of the inspection socket 1 through the through holes 6B are electrically connected to the conductive pads formed on the substrate. The contact object 8 shown in FIGS. 4, 5, and 6 is inserted into the recess 3A of the housing 3. As shown in FIGS. 5 and 6, the contact object 8 includes a plurality of terminals 81. When the contact object 8 is inserted into the recess 3A of the housing 3, each terminal 81 is electrically connected to the first contact points 111, 751, 761 (refer to FIG. 3) of the respective probes 7 exposed to the outside of the inspection socket 1 through the through holes 3B. As shown in FIGS. 3 and 4, the probe 7 includes a first probe 71, a second probe 72, a third probe 73, a fourth probe 74, a fifth probe 75, and a sixth probe 76. At least one of each of the first probe 71, the second probe 72, the third probe 73, the fourth probe 74, the fifth probe 75, and the sixth probe 76 is provided. In the present embodiment, the probe 7 has thirteen first probes 71, thirteen second probes 72, thirteen third probes 73, thirteen fourth probes 74, two fifth probes 75, and two sixth probes 76. In the present embodiment, the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 are signal terminals, and the fifth probe 75 and the sixth probe 76 are power supply terminals or ground terminals. However, the type of each probe is not limited to this. The respective first probes 71, the respective second probes 72, the respective third probes 73, the respective fourth probes 74, the respective fifth probes 75, and the respective sixth probes 76 are arranged at intervals. That is, the respective first probes 71, the respective second probes 72, the respective third probes 73, the respective fourth probes 74, the respective fifth probes 75, and the respective sixth probes 76 are electrically insulated from each other. The first probe 71, the third probe 73, and the fifth probe 75 are arranged at intervals along the front-rear direction (for example, the Y direction shown in each figure) that intersects (orthogonal in the present embodiment) the up-down direction of the inspection socket 1. The front-rear direction and the Y direction are the plate thickness direction of the probe 7 and are an example of the third direction. The first probe 71 and the third probe 73 are alternately arranged in the front-rear direction. The two fifth probes 75 sandwich the thirteen first probes 71 and the thirteen third probes 73 in the front-rear direction. That is, the two fifth probes 75 are arranged at the foremost and the rearmost of the first probe 71, the third probe 73, and the fifth probe 75. The second probe 72, the fourth probe 74, and the sixth probe 76 are arranged at intervals along the front-rear direction of the inspection socket 1. The second probe 72 and the fourth probe 74 are alternately arranged in the front-rear direction. Two sixth probes 76 sandwich thirteen second probes 72 and thirteen fourth probes 74 in the front-rear direction. That is, the two sixth probes 76 are arranged at the foremost and rearmost positions among the second probe 72, the fourth probe 74, and the sixth probe 76. As shown in FIG. 5, each first probe 71 and each second probe 72 are arranged facing each other at intervals in the left-right direction (for example, the X direction shown in each figure) that intersects both the up-down direction and the front-rear direction (orthogonal to both the up-down direction and the front-rear direction in this embodiment). The left-right direction and the X direction are an example of the second direction. As shown in FIG. 6, each third probe 73 and each fourth probe 74 are arranged facing each other at intervals in the left-right direction. In this embodiment, the first probe 71 and the fourth probe 74 have the same structure (in other words, the same size and the same shape). The fourth probe 74 is a member arranged in the opposite direction to the first probe 71 in the left-right direction. In this embodiment, the second probe 72 and the third probe 73 have the same structure (in other words, the same size and the same shape). The third probe 73 is a member arranged in the opposite direction to the second probe 72 in the left-right direction. Based on the above, in this embodiment, the inspection socket 1 includes two types of probes 7 instead of four types of probes 7 having different structures respectively. One of the two types of probes 7 is the probe 71 and the probe 74, and the other of the two types of probes 7 is the probe 72 and the probe 73. As shown in FIG. 3, each fifth probe 75 and each sixth probe 76 are arranged facing each other at intervals in the left-right direction. In this embodiment, the fifth probe 75 and the sixth probe 76 have the same structure (in other words, the same size and the same shape). In this embodiment, the fifth probe 75 and the sixth probe 76 are arranged in the opposite direction in the left-right direction. The fifth probe 75 and the sixth probe 76 are arranged to be line-symmetric with respect to an imaginary line L1 extending in the up-down direction between the fifth probe 75 and the sixth probe 76. Hereinafter, the structure of each probe 7 will be described. In the present embodiment, each of the first probe 71, the second probe 72, the third probe 73, the fourth probe 74, the probe 75, and the probe 76 has substantially the same structure. Therefore, hereinafter, the structure of the first probe 71 will be described, and the description of the structures of the other probes will be omitted in principle. Furthermore, in each figure, the same reference numerals are assigned to the common points of the structures. Among them, the structures different from the first probe 71 in the other probes will be described. In the following description, the "left side" and "right side" in the left-right direction have the following meanings. That is, in the first probe 71 and the third probe 73, in the left-right direction, the side of the bending portion 133 is the "left side", and the side opposite to the bending portion 133 is the "right side". On the other hand, in the second probe 72 and the fourth probe 74, in the left-right direction, the side opposite to the bending portion 133 is the "left side", and the side of the bending portion 133 is the "right side". As shown in FIG. 5, the first probe 71 includes a first connection portion 11, a second connection portion 12, and an elastic portion 13. The first connection portion 11 is connected to one of the upper and lower ends of the elastic portion 13 in the up-down direction (in the present embodiment, it is the upper end portion of the elastic portion 13), that is, the first end portion 13A. In other words, the lower end portion of the first connection portion 11 (in the present embodiment, it is the end portion closer to the elastic portion 13 in the up-down direction) is connected to the upper end portion of the elastic portion 13. The second connection portion 12 is connected to the other end of the elastic portion 13 in the up-down direction (in the present embodiment, it is the lower end portion of the elastic portion 13), that is, the second end portion 13B. In other words, the upper end portion of the second connection portion 12 (in the present embodiment, it is the end portion closer to the elastic portion 13 in the up-down direction) is connected to the lower end portion of the elastic portion 13. The first connection portion 11 includes a first contact point 111, and the first contact point 111 is provided at the upper end portion of the first connection portion 11 (in the present embodiment, it is the end portion farther from the second connection portion 12 in the up-down direction). The second connection portion 12 includes a second contact point 121, and the second contact point 121 is provided at the lower end portion of the second connection portion 12 (in the present embodiment, it is the end portion farther from the first connection portion 11 in the up-down direction). That is, the first probe 71 includes: a first contact point 111 provided at one end in the up-down direction (in the present embodiment, it is the upper end); and a second contact point 121 provided at the other end in the up-down direction (in the present embodiment, it is the lower end). The elastic portion 13 has a first portion 131, a second portion 132, and a bending portion 133. The first portion 131 extends in the left-right direction from the first end portion 13A. The second portion 132 extends in the left-right direction from the second end portion 13B. The second portion 132 extends in the same side as the first portion 131 in the left-right direction. In the example shown in FIG. 5, the first portion 131 extends to the left from the first end portion 13A, and the second portion 132 extends to the left from the second end portion 13B. The bent portion 133 is in a bent shape. The bent portion 133 connects the end portion (for example, the left end in FIG. 5) of the two ends of the first portion 131 in the left-right direction that is far from the first end portion 13A and the end portion (the left end in FIG. 5) of the two ends of the second portion 132 in the left-right direction that is far from the second end portion 13B. The first end portion 13A and the second end portion 13B, which are the two ends of the elastic portion 13, are connected to the first connection portion 11 and the second connection portion 12 from the same side (the left side in this embodiment) in the left-right direction. That is, the elastic portion 13 is located on the same side (the left side in this embodiment) with respect to one side surface (the left surface in this embodiment) of the first connection portion 11 in the left-right direction. The length L2 in the up-down direction between the end portion 11A of the first connection portion 11 to which the first end portion 13A is connected and the end portion 12A of the second connection portion 12 to which the second end portion 13B is connected is longer than the inner diameter R1 of the bend of the elastic portion 13. In this embodiment, the end portion 11A is the lower end portion of the first connection portion 11, and the end portion 12A is the upper end portion of the second connection portion 12. Additionally, in this embodiment, the inner diameter R1 of the bend of the elastic portion 13 is the inner diameter R1 of the bent portion 133. The elastic portion 13 includes a plurality of long plate portions 134 (three long plate portions 134A, 134B, and 134C in this embodiment). Each of the long plate portions 134A, 134B, and 134C extends over the first portion 131, the second portion 132, and the bent portion 133. Each of the long plate portions 134A, 134B, and 134C extends along the length direction of the elastic portion 13. The length direction of the elastic portion 13 is the direction in which the elastic portion 13 extends from the first portion 131 through the bent portion 133 to the second portion 132. That is, the length direction of the elastic portion 13 is the left-right direction in the first portion 131 and the second portion 132, and is the direction along the bent shape in the bent portion 133. Each of the long plate portions 134A, 134B, and 134C is arranged at intervals along the width direction of the elastic portion 13. The width direction of the elastic portion 13 is the direction orthogonal to both the front-rear direction (the plate thickness direction of the probe 7 in this embodiment) and the length direction of the elastic portion 13. The more the plurality of long plate portions 134 are located on the outer side of the bent shape of the bent portion 133, the longer they are in the width direction. In this embodiment, the long plate portion 134A is longer than the long plate portion 134B in the width direction, and the long plate portion 134B is longer than the long plate portion 134C in the width direction. The second part 132 extends on the plane of FIG. 5 in a manner that trends upward as it moves toward the right. That is, the second part 132 extends in a manner that approaches the first end 13A in the vertical direction as it approaches the second end 13B in the horizontal direction. That is, the surfaces that form the inner edge and the outer edge in the radial direction of the second part 132 are inclined surfaces that are inclined with respect to the horizontal direction. The upper edge portion 12B of the second connecting portion 12 extends on the plane of FIG. 5 in a manner that trends downward as it moves toward the right. That is, the edge portion 12B on the side of the first connecting portion 11 (the upper side in this embodiment) in the vertical direction of the second connecting portion 12 extends in a manner that moves away from the first connecting portion 11 in the vertical direction as it moves away from the elastic portion 13 in the horizontal direction. That is, the edge portion 12B is an inclined surface that is inclined with respect to the horizontal direction. Furthermore, the edge portion 12B may extend along the horizontal direction. Furthermore, as shown in FIG. 3, the edge portions 12B of the fifth probe 75 and the sixth probe 76 extend along the horizontal direction. As shown in FIG. 5, the first contact point 111 is in the shape of a protrusion and protrudes upward from the upper end portion of the first connecting portion 11 (in this embodiment, in the first direction away from the second connecting portion 12). The first contact point 111 includes an inclined surface 111A and a protrusion 111B. The inclined surface 111A is located on one side of the first contact point 111 in the horizontal direction. The inclined surface 111A is inclined in the vertical direction in a manner that moves away from the center line C as it moves away from the elastic portion 13. The center line C is a line that passes through the center of the first connecting portion 11 in the horizontal direction and extends in the vertical direction. The protrusion 111B protrudes upward (in this embodiment, in the first direction away from the second connecting portion 12). The protrusion 111B faces the inclined surface 111A with a gap in the horizontal direction. The protruding front end (the upper end in this embodiment) of the protrusion 111B is located below the upper end of the inclined surface 111A and above the lower end of the inclined surface 111A. That is, in the first direction, the protruding front end of the protrusion 111B is located between the end on the side of the inclined surface 111A that is away from the elastic portion 13 and the end on the side of the inclined surface 111A that is close to the elastic portion 13. The terminal 81 of the object 8 to be contacted can contact the inclined surface 111A and the protrusion 111B. When the object 8 to be contacted is inserted into the recess 3A of the housing 3, the terminal 81 has a U-shaped portion when observed from the side in the front-rear direction. That is, the terminal 81 has a downwardly convex curved portion 81A at the front end portion. The inclined surface 111A contacts the curved portion 81A of the terminal 81 from one side in the horizontal direction. In this embodiment, the first contact point 111 has only one inclined surface that can contact the object 8 to be contacted. That is, in this embodiment, among the first contact points 111, the inclined surface that can contact the object 8 to be contacted is only the inclined surface 111A. The second contact point 121 is in a protruding shape and protrudes downward from the lower end of the second connecting portion 12 (in this embodiment, in a direction away from the first connecting portion 11 in the first direction). The second contact point 121 has a notch 121C. The notch 121C is cut from the lower surface of the second contact point 121 upward (in this embodiment, toward the first connecting portion 11 side in the first direction). The second connecting portion 12 has a notch 12C. The notch 12C is provided between the second contact point 121 and the second part 132 of the elastic portion 13. The notch 12C is cut along the left - right direction from the end portion of the second connecting portion 12 in the left - right direction. The first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 have differences in terms of arrangement orientation, structure, etc. The following will be described in detail. As shown in FIG. 5, the first probe 71 and the second probe 72 are arranged facing each other in the left - right direction with the elastic portion 13 facing the outside in the left - right direction. As shown in FIG. 6, the third probe 73 and the fourth probe 74 are arranged facing each other in the left - right direction with the elastic portion 13 facing the outside in the left - right direction. As shown in FIGS. 5 and 6, the inclined surfaces 111A of the first probe 71 and the fourth probe 74 are located on the side of the bending portion 133 of the elastic portion 13 of the first contact point 111 in the left - right direction. The inclined surfaces 111A of the first probe 71 and the fourth probe 74 face the side opposite to the bending portion 133 of the elastic portion 13 in the left - right direction. The protrusions 111B of the first probe 71 and the fourth probe 74 are located on the side opposite to the bending portion 133 of the elastic portion 13 with respect to the inclined surfaces 111A in the left - right direction. The inclined surface 111A of the first probe 71 is located on the left part of the first contact point 111 on the paper surface of FIG. 5, extends in a manner that slopes downward as it goes rightward, and faces右上. The protrusion 111B of the first probe 71 is located on the right side of the inclined surface 111A of the first probe 71 on the paper surface of FIG. 5. The inclined surface 111A of the fourth probe 74 is located on the right part of the first contact point 111 on the paper surface of FIG. 6, extends in a manner that slopes downward as it goes leftward, and faces左上. The protrusion 111B of the fourth probe 74 is located on the left side of the inclined surface 111A of the fourth probe 74 on the paper surface of FIG. 6. As shown in FIGS. 5 and 6, the inclined surfaces 111A of the second probe 72 and the third probe 73 are located on the side opposite to the elastic portion 13 of the first contact point 111 in the left - right direction. The inclined surfaces 111A of the second probe 72 and the third probe 73 face the bending portion 133 side of the elastic portion 13 in the left - right direction. The protrusions 111B of the second probe 72 and the third probe 73 are located on the elastic portion 13 side with respect to the inclined surfaces 111A in the left - right direction. The inclined surface 111A of the second probe 72 is located on the left side of the first contact point 111 on the plane of FIG. 5, extends in a manner that slopes downward as it moves toward the right, and faces右上. The protrusion 111B of the second probe 72 is located on the right side of the inclined surface 111A of the second probe 72 on the plane of FIG. 5. The inclined surface 111A of the third probe 73 is located on the right side of the first contact point 111 on the plane of FIG. 6, extends in a manner that slopes downward as it moves toward the left, and faces左上. The protrusion 111B of the third probe 73 is located on the left side of the inclined surface 111A of the third probe 73 on the plane of FIG. 6. Based on the above, as shown in FIG. 5, the inclined surfaces 111A of the first contact points 111 of the first probe 71 and the second probe 72 face the same side (the right side in this embodiment) in the left-right direction. As shown in FIG. 6, the inclined surfaces 111A of the first contact points 111 of the third probe 73 and the fourth probe 74 face the same side (the left side in this embodiment) in the left-right direction. In addition, as shown in FIGS. 5 and 6, the inclined surface 111A (refer to FIG. 5) of the first contact point 111 of the first probe 71 and the inclined surface 111A (refer to FIG. 6) of the first contact point 111 of the third probe 73 face opposite sides in the left-right direction. The inclined surface 111A (refer to FIG. 5) of the first contact point 111 of the second probe 72 and the inclined surface 111A (refer to FIG. 6) of the first contact point 111 of the fourth probe 74 face opposite sides in the left-right direction. In addition, when observed along the front-back direction, the inclined surfaces 111A of the first contact points 111 of the first probe 71 and the third probe 73 face each other in the left-right direction. When observed along the front-back direction, the inclined surfaces 111A of the first contact points 111 of the second probe 72 and the fourth probe 74 face each other in the left-right direction. The first probe 71 and the fourth probe 74 include a second contact point 121 and a notch 121C. The second probe 72 and the third probe 73 include a second contact point 122 instead of the second contact point 121. The second contact point 122 does not include the notch 121C. The difference between the second contact point 122 and the second contact point 121 is that it does not have the notch 121C. In the first probe 71 and the fourth probe 74, when observed in the up-down direction, the second contact point 121 is located at a position deviated from the first contact point 111. In the first probe 71 and the fourth probe 74, when observed in the up-down direction, the second contact point 121 is located at a position deviated from the inclined surface 111A. In the first probe 71 and the fourth probe 74, when observed in the up-down direction, the portion of the second connection part 12 including the second contact point 121 overlaps with the elastic part 13. That is, in the first probe 71 and the fourth probe 74, in the left-right direction, at least a part of the portion of the second connection part 12 including the second contact point 121 and at least a part of the elastic part 13 are at the same position. In addition, in the first probe 71 and the fourth probe 74, the elastic part 13 and the second contact point 121 are located on the same side in the left-right direction with respect to the first connection part 11. In the second probe 72 and the third probe 73, when observed in the up-down direction, the second contact point 122 and the first contact point 111 are located at positions where at least a part of each other overlaps. That is, in the second probe 72 and the third probe 73, in the left-right direction, at least a part of the second contact point 122 and at least a part of the first contact point 111 are at the same position. In addition, in the second probe 72 and the third probe 73, the first contact point 111 and the second contact point 122 are located on the same side in the left-right direction with respect to the elastic part 13. In the second probe 72 and the third probe 73, when observed in the up-down direction, the second contact point 122 and the inclined surface 111A are located at positions where at least a part of each other overlaps. That is, in the second probe 72 and the third probe 73, in the left-right direction, at least a part of the second contact point 122 and at least a part of the inclined surface 111A are at the same position. In addition, in the second probe 72 and the third probe 73, the inclined surface 111A and the second contact point 122 are located on the same side in the left-right direction with respect to the elastic part 13. As shown in FIG. 5, in the first probe 71 and the second probe 72, the inclined surface 111A is provided on the left part of the first contact point 111. As shown in FIG. 6, in the third probe 73 and the fourth probe 74, the inclined surface 111A is provided on the right part of the first contact point 111. The left side in FIGS. 5 and 6 (and FIGS. 7 to 10 described later) is an example of one side in the left-right direction, and the right side in FIGS. 5 and 6 (and FIGS. 7 to 10 described later) is an example of the other side in the left-right direction. As shown in FIGS. 5 and 6, the second contact point 121 of the first probe 71 is located to the left of the second contact point 122 of the third probe 73. That is, when observed along the front-rear direction, the second contact point 121 of the first probe 71 does not overlap with the second contact point 122 of the third probe 73. That is, in the left-right direction, the second contact point 121 of the first probe 71 is located at a position different from that of the second contact point 122 of the third probe 73. Furthermore, when observed along the front-rear direction, the second contact point 121 of the first probe 71 may also overlap only a part of the second contact point 122 of the third probe 73. That is, in the left-right direction, the second contact point 121 of the first probe 71 may also be at a position partially the same as that of the second contact point 122 of the third probe 73. The second contact point 122 of the second probe 72 is located to the left of the second contact point 121 of the fourth probe 74. That is, when observed along the front-rear direction, the second contact point 122 of the second probe 72 does not overlap with the second contact point 121 of the fourth probe 74. That is, in the left-right direction, the second contact point 122 of the second probe 72 is located at a position different from that of the second contact point 121 of the fourth probe 74. Furthermore, when observed along the front-rear direction, the second contact point 122 of the second probe 72 may also overlap only a part of the second contact point 121 of the fourth probe 74. That is, in the left-right direction, the second contact point 122 of the second probe 72 may also be at a position partially the same as that of the second contact point 121 of the fourth probe 74. As described above, in the first probe 71 and the second probe 72, the inclined surface 111A is provided on the left part of the first contact point 111. In addition, the second contact point 121 of the first probe 71 is located to the left of the second contact point 122 of the third probe 73, and the second contact point 122 of the second probe 72 is located to the left of the second contact point 121 of the fourth probe 74. That is, the inclined surface 111A of the first contact point 111 of the first probe 71 is arranged in the left-right direction on the left side of the first contact point 111 of the first probe 71, which is the side where the second contact point 121 of the first probe 71 is arranged relative to the second contact point 122 of the third probe 73. In addition, the inclined surface 111A of the first contact point 111 of the second probe 72 is arranged in the left-right direction on the left side of the first contact point 111 of the second probe 72, which is the side where the second contact point 122 of the second probe 72 is arranged relative to the second contact point 121 of the fourth probe 74. As described above, in the third probe 73 and the fourth probe 74, the inclined surface 111A is provided on the right part of the first contact point 111. In addition, the second contact point 122 of the third probe 73 is located on the right side with respect to the second contact point 121 of the first probe 71, and the second contact point 121 of the fourth probe 74 is located on the right side with respect to the second contact point 122 of the second probe 72. That is, the inclined surface 111A of the first contact point 111 of the third probe 73 is arranged in the left-right direction on the right side of the first contact point 111 of the third probe 73, which is the side where the second contact point 122 of the third probe 73 is arranged with respect to the second contact point 121 of the first probe 71. In addition, the inclined surface 111A of the first contact point 111 of the fourth probe 74 is arranged in the left-right direction on the right side of the first contact point 111 of the fourth probe 74, which is the side where the second contact point 121 of the fourth probe 74 is arranged with respect to the second contact point 122 of the second probe 72. The first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 can exhibit the following effects. In the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74, the length L2 along the up-down direction between the end portion 11A and the end portion 12A is longer than the inner diameter R1 of the bend of the elastic portion 13. The edge portion 12B on the first connection portion 11 side in the up-down direction of the second connection portion 12 extends in such a manner that it moves away from the first connection portion 11 in the up-down direction as it moves away from the elastic portion 13 in the left-right direction. Therefore, on the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74, the stroke in the up-down direction generated by the elastic portion 13 can be increased. As a result, the contact reliability of the probe 7 can be improved. The second portion 132 extends in such a manner that it approaches the first end portion 13A in the up-down direction as it approaches the second end portion 13B in the left-right direction. Therefore, in each probe 7, the portion occupied by the elastic portion 13 can be reduced. The elastic portion 13 includes a plurality of long plate portions 134. The plurality of long plate portions 134 are longer in the width direction the more they are located on the outer side of the bent shape of the bent portion 133. Therefore, the elastic portion 13 can be easily bent. The first contact point 111 has an inclined surface 111A that can contact the object to be contacted 8. For example, when the terminal 81 of the object to be contacted 8 has a bent portion 81A at the front end portion, the inclined surface 111A contacts the bent portion 81A of the terminal 81 from one side in the left-right direction. When gold plating is applied only to one side of the bent portion 81A of the terminal 81 and tin plating is applied to the portions other than the one side, the inclined surface 111A can be made to contact the gold-plated portion. The first contact point 111 includes a protrusion 111B in addition to the inclined surface 111A. Therefore, the first contact point 111 can contact the object to be contacted 8 at multiple points. The first probe 71 and the fourth probe 74 can achieve the following effects. When observed in the vertical direction, the second contact points 121 of the first probe 71 and the fourth probe 74 are located at positions deviated from the inclined surface 111A. Therefore, in the structure where the first probe 71 and the third probe 73 are arranged in the front-rear direction, the positions of the second contact point 121 of the first probe 71 and the second contact point 122 of the third probe 73 in the left-right direction can be made different. Similarly, in the structure where the fourth probe 74 and the second probe 72 are arranged in the front-rear direction, the positions of the second contact point 121 of the fourth probe 74 and the second contact point 122 of the second probe 72 in the left-right direction can be made different. The second connecting portions 12 of the first probe 71 and the fourth probe 74 have cutouts 12C. Thereby, the second contact points 121 can be bent in the vertical direction. The second probe 72 and the third probe 73 can achieve the following effects. When observed in the vertical direction, at least a part of the second contact points 122 of the second probe 72 and the third probe 73 overlaps with at least a part of the inclined surface 111A. Therefore, in the structure where the second probe 72 and the fourth probe 74 are arranged in the front-rear direction, the positions of the second contact point 122 of the second probe 72 and the second contact point 121 of the fourth probe 74 in the left-right direction can be made different. Similarly, in the structure where the third probe 73 and the first probe 71 are arranged in the front-rear direction, the positions of the second contact point 122 of the third probe 73 and the second contact point 121 of the first probe 71 in the left-right direction can be made different. The inspection socket 1 can achieve the following effects. The second contact point 121 of the first probe 71 is located to the left of the second contact point 122 of the third probe 73, and the second contact point 122 of the second probe 72 is located to the left of the second contact point 121 of the fourth probe 74. With such a structure, when the first probe 71 and the third probe 73 are alternately arranged in the front-rear direction, the distance between two adjacent second contact points in the front-rear direction can be increased. The following is a detailed description. Assume that when the positions of the second contact point 121 of the first probe 71 and the second contact point 122 of the third probe 73 in the left-right direction are the same, the second contact points 121 and 122 of the first probe 71 and the third probe 73 alternately arranged in the front-rear direction are adjacent to each other in the front-rear direction. On the other hand, when the second contact point 121 of the first probe 71 is located to the left of the second contact point 122 of the third probe 73, the second contact points 121 and 122 of the first probe 71 and the third probe 73 alternately arranged in the front-rear direction are not adjacent to each other in the front-rear direction. In this case, the second contact points 121 and 121 of the two first probes 71 are adjacent to each other in the front-rear direction. That is, corresponding to the third probe 73 not being located between the two first probes 71, the distance between two adjacent second contact points becomes larger. Similarly, when the second probe 72 and the fourth probe 74 are alternately arranged in the front-rear direction, the distance between two adjacent second contact points in the front-rear direction can also be increased. As a result, the contact reliability of the inspection socket 1 can be improved. When the intervals between the probes are narrow, the intervals between the solder pads on the substrate on which the inspection socket is mounted also become narrow, and there is a risk that it is difficult to form each solder pad. In the inspection socket 1 of the present embodiment, as described above, the distance between two adjacent second contact points in the front-rear direction can be increased. Thereby, the interval between the solder pads on the substrate can be increased, and thus it is easy to form each solder pad. When observing in the up-down direction, in the first probe 71 and the fourth probe 74, the first contact point 111 is located at a position deviated from the second contact point 121. When observing in the up-down direction, in the second probe 72 and the third probe 73, the first contact point 111 and the second contact point 122 are located at overlapping positions. Thereby, when the first probe 71 and the third probe 73 are alternately arranged in the front-rear direction, the positions of the second contact point 121 of the first probe 71 and the second contact point 122 of the third probe 73 in the left-right direction can be made different positions. In addition, when the second probe 72 and the fourth probe 74 are alternately arranged in the front-rear direction, the positions of the second contact point 122 of the second probe 72 and the second contact point 121 of the fourth probe 74 in the left-right direction can be made different positions. The third probe 73 has the same structure as the second probe 72 and is arranged in the opposite direction to the second probe 72 in the left-right direction. The fourth probe 74 has the same structure as the first probe 71 and is arranged in the opposite direction to the first probe 71 in the left-right direction. Thereby, the types of probes included in the inspection socket 1 can be reduced. The inclined surfaces 111A of the first probe 71 and the second probe 72 arranged to face each other in the left-right direction face the same side in the left-right direction. The inclined surfaces 111A of the third probe 73 and the fourth probe 74 arranged to face each other in the left-right direction face the same side in the left-right direction. Thereby, the inclined surfaces 111A of the two probes arranged to face each other in the left-right direction can contact the contact object 8 from the same side in the left-right direction. The inclined surfaces 111A of the first probe 71 and the third probe 73 arranged in the front-rear direction face opposite sides in the left-right direction. The inclined surfaces 111A of the second probe 72 and the fourth probe 74 arranged in the front-rear direction face opposite sides in the left-right direction. Thereby, the inclined surfaces 111A of the two probes arranged in the front-rear direction can contact the contact object 8 from opposite sides in the left-right direction. When observing in the front-rear direction, the inclined surfaces 111A of the first probe 71 and the third probe 73 arranged in the front-rear direction face each other in the left-right direction. When observing in the front-rear direction, the inclined surfaces 111A of the second probe 72 and the fourth probe 74 arranged in the front-rear direction face each other in the left-right direction. Thereby, the inclined surfaces 111A of the respective probes can contact the contact object 8 from the outer sides in the left-right direction. Each of the first contact points 111 of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 has only one inclined surface 111A that can contact the contact object 8. Assuming that there are two inclined surfaces at the first contact point 111 that can contact the contact object 8, when the contact object 8 is pressed against one of the inclined surfaces, the possibility that the contact object 8 deviates from the other inclined surface increases. However, according to the above structure, the possibility that the inclined surface 111A does not contact the desired position of the contact object 8 can be reduced. The inspection socket 1 can also be configured as follows. In the above embodiment, the structure of the inspection socket 1 including two types of probes 7 is described. One of the two types of probes 7 is the first probe 71 and the fourth probe 74 having the same structure as each other. The other of the two types of probes 7 is the second probe 72 and the third probe 73 having the same structure as each other. However, the types of probes 7 included in the inspection socket 1 are not limited to two types. FIG. 7 and FIG. 8 show the structure of the inspection socket 1 including four types of probes 7. In FIGS. 7 and 8, parts having the same structure as the probes shown in FIGS. 5 and 6 are labeled with the same symbols, and the description thereof is omitted. In the structure shown in FIGS. 7 and 8, each of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 includes a second contact having a mutually different structure. That is, the first probe 71 includes a second contact 123, the second probe 72 includes a second contact 124, the third probe 73 includes a second contact 125, and the fourth probe 74 includes a second contact 126. The number of cutouts included in the second contact 123, the second contact 124, the second contact 125, and the second contact 126 is different. The second contact 123 has three cutouts, the second contact 124 has two cutouts, the second contact 125 has no cutout, and the second contact 126 has one cutout. In the above-described embodiment, the structure in which the first contact 111 has only one inclined surface 111A capable of contacting the contact object 8 has been described. However, the first contact 111 may also have a plurality of inclined surfaces. FIG. 9 and FIG. 10 show the structure in which the first contact 111 has two inclined surfaces (the inclined surface 111A and the second inclined surface 111C). In FIGS. 9 and 10, parts having the same structure as the probes shown in FIGS. 5 and 6 are labeled with the same symbols, and the description thereof is omitted. In the structure shown in FIGS. 9 and 10, the first contact 111 of each probe 7 has a second inclined surface 111C in addition to the inclined surface 111A. The second inclined surface 111C faces the inclined surface 111A in the left-right direction. The second inclined surface 111C is inclined in the opposite direction with respect to the inclined surface 111A facing in the left-right direction. For example, when the inclined surface 111A is inclined upward to the right, the second inclined surface 111C is inclined upward to the left. Similarly to the inclined surface 111A, the second inclined surface 111C can contact the terminal 81 of the contact object 8. The inclined surface 111A contacts the bent portion of the terminal 81 from one side in the left-right direction. On the other hand, the second inclined surface 111C contacts the bent portion of the terminal 81 from the other side in the left-right direction. The shapes and structures of the housings 2, 3, 4, 5, and 6 can be arbitrarily changed according to the design of the inspection socket 1 or the like. For example, the shapes of the housings 2, 3, 4, 5, and 6 are not limited to a substantially quadrangular prism shape, and may be a substantially cylindrical shape, or a substantially polygonal shape other than a substantially quadrangular prism shape. The housing is not limited to the case of being composed of five members, and may be composed of one member, or may be composed of a plurality of members other than five. The number of probes 7 included in the inspection socket 1 can be arbitrarily changed according to the design of the inspection socket 1 or the like. For example, in the structures shown in FIGS. 3 and 4, the probe 7 includes thirteen first probes 71, thirteen second probes 72, thirteen third probes 73, thirteen fourth probes 74, two fifth probes 75, and two sixth probes 76. Here, a member formed by arranging a pair of probes 71, 72 facing each other in the left-right direction and a pair of probes 73, 74 facing each other in the left-right direction in the front-rear direction is defined as one probe set. In this case, in the structures shown in FIGS. 3 and 4, thirteen probe sets are arranged in the front-rear direction. By arranging them in this way, when observing in the up-down direction, the structure is such that the positions of the adjacent second contact points 121 and 122 in the left-right direction are different. The number of probe sets arranged in the front-rear direction may also be other than thirteen. As described above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally various aspects of the present disclosure will be described. Furthermore, in the following description, as an example, reference numerals are also added for description. The probe 7 according to the first aspect of the present disclosure includes: an elastic portion 13; a first connection portion 11 connected to one end portion, i.e., the first end portion 13A, of both end portions of the elastic portion 13 in a first direction; and a second connection portion 12 connected to the other end portion, i.e., the second end portion 13B, of both end portions of the elastic portion 13 in the first direction. The elastic portion 13 has: a first portion 131 extending from the first end portion in a second direction intersecting the first direction; a second portion 132 extending from the second end portion to the same side as the first portion in the second direction; and a bent portion 133 having a bent shape connecting an end portion of the first portion in the second direction that is far from the first end portion to an end portion of the second portion in the second direction that is far from the second end portion. The length L2 in the first direction between the end portion of the first connection portion connected to the first end portion and the end portion of the second connection portion connected to the second end portion is longer than the inner diameter R1 of the bend of the elastic portion 13. As in the probe 7 of the first aspect, in the probe 7 of the second aspect of the present disclosure, the second portion 132 extends in such a manner that it approaches the first end portion 13A in the first direction as it approaches the second end portion 13B in the second direction. As in the probe 7 of the first aspect or the second aspect, in the probe 7 of the third aspect of the present disclosure, the edge portion 12B on the side of the first connection portion 11 in the first direction in the second connection portion 12 extends along the second direction, or extends in such a manner that it moves away from the first connection portion 11 in the first direction as it moves away from the elastic portion 13 in the second direction. For the probe 7 according to any one of the first to third aspects, in the probe 7 according to the fourth aspect of the present disclosure, the elastic portion 13 includes a plurality of long plate portions 134. The plurality of long plate portions 134 extend respectively along the length direction in which the elastic portion 13 extends, and are arranged with gaps along the width direction of the elastic portion 13 orthogonal to the length direction. The further the plurality of long plate portions 134 are located on the outer side of the bending shape of the bending portion 133, the longer they are in the width direction. For the probe 7 according to any one of the first to fourth aspects, in the probe 7 according to the fifth aspect of the present disclosure, the first connection portion 11 includes a first contact point 111 provided at one end portion in the first direction away from the second connection portion 12. The first contact point 111 has an inclined surface 111A capable of contacting the contact object 8. For the probe 7 according to the fifth aspect, in the probe 7 according to the sixth aspect of the present disclosure, the first contact point 111 further includes a protrusion 111B. The protrusion 111B protrudes in the first direction and faces the inclined surface 111A with a gap in the second direction. For the probe 7 according to the fifth or sixth aspect, in the probe 7 according to the seventh aspect of the present disclosure, the second connection portion 12 includes a second contact point 122 provided at one end portion in the first direction away from the first connection portion 11. When observed in the first direction, at least a part of the second contact point 122 overlaps at least a part of the inclined surface 111A. For the probe 7 according to the seventh aspect, in the probe 7 according to the eighth aspect of the present disclosure, the inclined surface 111A faces the bending portion 133 side of the elastic portion 13 in the second direction. For the probe 7 according to the fifth or sixth aspect, in the probe 7 according to the ninth aspect of the present disclosure, the second connection portion 12 includes a second contact point 121 provided at one end portion in the first direction away from the elastic portion 13. When observed along the first direction, the second contact point 121 is located at a position offset from the inclined surface 111A. For the probe 7 according to the ninth aspect, in the probe 7 according to the tenth aspect of the present disclosure, the inclined surface 111A faces the side opposite to the bending portion 133 of the elastic portion 13 in the second direction. For the probe 7 according to the ninth or tenth aspect, in the probe 7 according to the eleventh aspect of the present disclosure, when observed along the first direction, the portion of the second connection portion 12 including the second contact point 121 overlaps the elastic portion 13, and the second connection portion 12 has a cut 12C cut along the second direction between the second contact point 121 and the elastic portion 13. The present disclosure is fully described in connection with the accompanying drawings and preferred embodiments, and various modifications or corrections will be apparent to those skilled in the art. It should be understood that such modifications or corrections are included therein as long as they do not depart from the scope of the present disclosure based on the appended claims. [Industrial Applicability] The inspection socket of the present disclosure can be applied, for example, to an inspection device used in the inspection of electronic modules such as optical modules. 1: Inspection socket 2, 3, 4, 5, 6: Housing 2A, 2B, 3B, 4A, 4B, 6B: Through hole 3A, 6A: Recess 7: Probe 8: Object to be contacted 11: First connection part 11A, 12A: End part 12: Second connection part 12B: Edge part 12C, 121C: Cutout 13: Elastic part 13A: First end part 13B: Second end part 31: Base part 32: Protrusion 61: Pin 71: First probe / probe 72: Second probe / probe 73: Third probe / probe 74: Fourth probe / probe 75: Fifth probe / probe 76: Sixth probe / probe 81: Terminal 81A, 133: Bent part 111, 751, 761: First contact point 111A: Inclined surface 111B: Protrusion 111C: Second inclined surface 121, 122, 123, 124, 125, 126, 752, 762: Second contact point 131: First part 132: Second part 134, 134A, 134B, 134C: Long plate part C: Center line L1: Imaginary line L2: Length R1: Inner diameter X, Y, Z: Direction FIG. 1 is a perspective view of an inspection socket showing an implementation state of the present disclosure. FIG. 2 is an exploded perspective view of the inspection socket of FIG. 1. FIG. 3 is a perspective view of the probe. FIG. 4 is a plan view of the probe and the object to be contacted. FIG. 5 is a cross-sectional view taken along line A-A of FIG. 4. FIG. 6 is a cross-sectional view taken along line B-B of FIG. 4. FIG. 7 is a cross-sectional view showing a first modification example of the probe of FIG. 5. FIG. 8 is a cross-sectional view showing a first modification example of the probe of FIG. 6. FIG. 9 is a cross-sectional view showing a second modification example of the probe of FIG. 5. FIG. 10 is a cross-sectional view showing a second modification example of the probe of FIG. 6. 8: Object to be contacted 11: First connection part 11A, 12A: End part 12: Second connection part 12B: Edge part 12C, 121C: Cutout 13: Elastic part 13A: First end part 13B: Second end part 71: First probe / probe 72: Second probe / Probe 73: Third probe / Probe 74: Fourth probe / Probe 81: Terminal 81A, 133: Bending part 111: First contact 111A: Inclined surface 111B: Protrusion 121, 122: Second contact 131: First part 132: Second part 134, 134A, 134B, 134C: Long plate part C: Center line L2: Length R1: Inner diameter X, Y, Z: Direction

Claims

1. A probe, comprising: The elastic portion includes: a first connecting portion connected to one end of the elastic portion in a first direction, i.e., a first end; and a second connecting portion connected to the other end of the elastic portion in the first direction, i.e., a second end. The elastic portion has: a first portion extending from the first end along a second direction intersecting the first direction; and a second portion extending from the second end toward the same side in the second direction as the first portion. The first connecting portion has a curved portion, which connects the ends of the first portion in the second direction that are away from the first end to the ends of the second portion in the second direction that are away from the second end. The length along the first direction between the end of the first connecting portion connected to the first end and the end of the second connecting portion connected to the second end is longer than the inner diameter of the bend of the elastic portion. The first connecting portion includes a first contact point disposed at one end in the first direction away from the second connecting portion. The first contact point has an inclined surface capable of contacting an object. The second connecting portion includes a protruding second contact point that protrudes from one end in the first direction away from the elastic portion in a direction away from the first connecting portion. Viewed along the first direction, a portion of the second contact point is located between the first connecting portion and the curved portion. The entire second contact point is located off-center from the first connecting portion, a portion of the second contact point is located off-center from the curved portion, and another portion of the second contact point overlaps with the curved portion.

2. The probe as described in claim 1, wherein, The second portion extends in such a manner that it approaches the first end in the first direction as it approaches the second end in the second direction.

3. The probe as described in claim 1 or 2, wherein, The edge portion of the second connecting portion on the first connecting portion side in the first direction extends along the second direction, or extends away from the first connecting portion in the first direction as it moves away from the elastic portion in the second direction.

4. The probe as described in claim 1 or 2, wherein, The elastic portion includes a plurality of long plate portions, which extend along the length direction of the elastic portion and are arranged with gaps along the width direction of the elastic portion, which is orthogonal to the length direction. The longer the plurality of long plate portions are located on the outer side of the curved shape of the curved portion, the longer they are in the width direction.

5. The probe as described in claim 1 or 2, wherein, The first contact further includes a protrusion that protrudes in the first direction and has a gap in the second direction facing the inclined surface.

6. The probe as described in claim 1 or 2, wherein, The inclined surface of the first contact of the first connecting portion faces the side opposite to the curved portion of the elastic portion in the second direction.

7. The probe as described in claim 1 or 2, wherein, Viewed along the first direction, the portion of the second connecting part containing the second contact point overlaps with the elastic part, and the second connecting part has a cut along the second direction between the second contact point and the elastic part.

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