Positioning mechanism, processing device, and positioning method

Abstract

This invention relates to a positioning mechanism, a processing device, and a positioning method. The positioning mechanism includes a positioning body and multiple elastic positioning units. The positioning body has a receiving space for accommodating a positioned part. An entrance / exit for the positioned part to enter and exit is formed on one side of the receiving body. Multiple elastic positioning units are symmetrically arranged in the receiving space on both sides of the entrance / exit direction. Each elastic positioning unit includes a sliding part and an elastic part. The sliding part is reciprocally slidably disposed in the receiving space. The elastic part is disposed between the sliding part and the positioning body. When the elastic part applies a force to the sliding part, the sliding parts of the symmetrically arranged elastic positioning units move towards each other to clamp the positioned part and adjust its position.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing equipment, and in particular to a positioning mechanism, a processing device, and a positioning method. Prior Art

[0002] Semiconductor processing often involves processing equipment such as wafer saws and wafer splitters. These processing devices typically employ positioning mechanisms to position wafers or other objects prior to processing. Currently, existing positioning mechanisms consist of a support frame and a motor. The support frame is equipped with a slide rail, which slidably connects two sets of clamping arms that move in opposite directions. The motor output is connected to a drive belt, to which the two sets of clamping arms are connected. This allows for mechanical positioning of objects such as wafers using the two sets of clamping arms. However, this positioning method requires a motor and other drive equipment, making it costly and space-consuming. Summary of the Invention

[0003] The first object of the present invention is to provide a positioning mechanism to simplify its structure, avoid the use of electrical equipment for positioning, and reduce costs and space occupation.

[0004] A second object of the present invention is to provide a processing device including the above-mentioned positioning mechanism and a positioning method based on the processing device.

[0005] To achieve the above object, the present invention provides the following technical solutions: A positioning mechanism includes a positioning body and a plurality of elastic positioning units, the positioning body having an accommodating space for accommodating a positioned part, the accommodating space forming an entrance and exit for the positioned part on one side of the positioning body, the plurality of elastic positioning units being symmetrically arranged in the accommodating space on both sides of the entrance and exit opening direction, each of the elastic positioning units including a sliding portion and an elastic portion, the sliding portion being slidable reciprocatingly arranged in the accommodating space, the elastic portion being arranged between the sliding portion and the positioning body, and when the elastic portion is used to apply a force to the sliding portion, the sliding portions of the symmetrically arranged elastic positioning units are moved toward each other to clamp the positioned part and adjust the position of the positioned part.

[0006] Optionally, the sliding portion includes a guiding device and a positioning device, the guiding device is fixedly arranged in the accommodating space positioning body, the positioning device and the guiding device are slidably matched, the positioning device is used to contact and cooperate with the positioned part, and the elastic portion is arranged on the guiding device and is located between the positioning device and the positioning body.

[0007] Optionally, the positioning device includes a support block and a positioning bearing, the support block is slidingly matched with the guide device, the positioning bearing is rotatably arranged on the support block, and the circumferential outer side surface of the positioning bearing is used to contact and cooperate with the positioned part.

[0008] Optionally, the locating bearing is arranged on the upper surface or the lower surface of the support block, the inner ring of the locating bearing is fixedly connected to the support block, and the surface of the inner ring of the locating bearing facing the support block protrudes beyond the outer ring of the locating bearing, and / or the surface of the support block facing the locating bearing is provided with a boss to form a gap between the outer ring of the locating bearing and the support block.

[0009] Optionally, the guide device is a guide rod, which is fixedly arranged on the positioning body, and the support block is provided with a guide hole, which passes through the support block, and the guide rod passes through the guide hole of the positioning device and slides with the support block.

[0010] Optionally, the elastic part is a compression spring, the compression spring is sleeved on the guide rod, and the two ends of the compression spring are respectively in contact with the positioning body and the support block.

[0011] Optionally, the positioning body includes two positioning seats, the positioning seats are provided with a slide groove, one end of the positioning seat is provided with an opening connected to the slide groove, the notches of the slide grooves of the two positioning seats are arranged relative to each other to form the accommodating space, the openings of the two positioning seats form the entrance and exit, and the elastic positioning unit is arranged in the slide groove.

[0012] Optionally, a guiding slope is provided between the opening and the slide groove so that the positioned member can enter the slide groove.

[0013] Optionally, the positioning body further comprises a positioning platform, and at least one of the two positioning seats is adjustably arranged on the positioning platform so that the two positioning seats can be moved closer to or farther away from each other.

[0014] Optionally, the positioning seat and the positioning platform are detachably connected via threaded fasteners, one of the positioning seat and the positioning platform is provided with a strip hole, and the other of the positioning seat and the positioning platform is provided with a mounting hole, and the threaded fasteners respectively cooperate with the strip hole and the mounting hole to fix the positioning seat to the positioning platform in an adjustable position.

[0015] Optionally, a surface light source is provided on the positioning platform between the two positioning seats.

[0016] Optionally, at least one of the two oppositely arranged groove walls of the slide groove is provided with a limiting protrusion at the end away from the opening, and the limiting protrusion protrudes into the slide groove in a direction perpendicular to the direction in which the positioned part enters and exits the slide groove, and the limiting protrusion is used to cooperate with the positioned part to prevent the positioned part from tilting up.

[0017] A processing device comprises a positioning mechanism as described in any one of the above items.

[0018] Optionally, the processing device further includes a material taking mechanism for conveying the positioned parts to the positioning mechanism.

[0019] Optionally, the processing device further includes an image acquisition device, and the center of the field of view of the image acquisition device is the positioning position of the positioning mechanism.

[0020] A positioning method for a processing device as described above, wherein the processing device further comprises a material taking mechanism for conveying the positioned part to the positioning mechanism, and the positioning method comprises the following steps: Grabbing the positioned part and transporting it to a positioning preparation position close to the positioning mechanism, where the positioned part is aligned with the entrance and exit of the positioning mechanism at the positioning preparation position; The positioned member is sent into the accommodation space of the positioning mechanism until it reaches the final positioning position. During this process, the positioned member applies a force to each elastic positioning unit of the positioning mechanism, causing the sliding parts of the symmetrically arranged elastic positioning units to move away from each other; The positioned piece is released, and under the action of the elastic positioning units symmetrically arranged on both sides, the positioned piece is automatically centered and positioned in the middle position of the elastic positioning units on both sides.

[0021] It can be seen from the above technical solution that the present invention discloses a positioning mechanism, which includes a positioning body and an elastic positioning unit, wherein the positioning body has a accommodating space for accommodating the positioned part, and the accommodating space forms an entrance and exit for the positioned part to enter and exit on one side of the positioning body, and multiple elastic positioning units are symmetrically arranged in the accommodating space on both sides of the direction in which the entrance and exit are opened. The elastic positioning unit includes a sliding part and an elastic part, and the sliding part can be reciprocatingly slidably arranged in the accommodating space, and the elastic part is arranged between the sliding part and the positioning body. The elastic part is used to apply a force to the sliding part to make the sliding parts of the symmetrically arranged elastic positioning units move toward each other to clamp the positioned part.

[0022] During application, the wafer or other positioned parts are sent into the accommodating space from the entrance and exit. At this time, the elastic positioning units on both sides are subjected to force respectively, and since the positioned part may be biased to one side, the elastic potential energy generated by the elastic positioning unit on that side is greater than the elastic potential energy generated by the elastic positioning unit on the other side. After the positioned part is in place, the positioned part is released, and the elastic positioning units on both sides are released. Since the elastic positioning units on both sides are symmetrically arranged, after the external force is lost, the elastic positioning units on both sides will tend to balance after oscillating for a period of time, and the positioned part will automatically be centered, thereby realizing the function of centering positioning. It can be seen that the above-mentioned positioning mechanism does not require the aid of electrical equipment such as motors, and uses the symmetrical elastic force of the elastic positioning units on both sides to realize the centering positioning of the positioned part. Since the motor and its accessories are omitted, the structure of the above-mentioned positioning mechanism is simpler, the cost is lower, and the space occupied is also smaller. In particular, when multiple elastic positioning units are arranged on both sides, the positioning accuracy can also be improved, avoiding the positioning accuracy being affected by the accuracy of the electrical equipment such as motors. Simple diagram description

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following briefly introduces the diagrams required for use in the embodiments or the prior art descriptions. Obviously, the diagrams described below are only some embodiments of the present invention. For ordinary technicians in this field, other diagrams can be obtained based on these diagrams without any creative work.

[0024] FIG1 is a schematic structural diagram of a positioning mechanism provided by an embodiment of the present invention.

[0025] FIG2 is a front view of the positioning mechanism provided by an embodiment of the present invention.

[0026] FIG3 is a side view of the positioning mechanism provided in an embodiment of the present invention.

[0027] FIG4 is a cross-sectional view taken along line A in FIG3 .

[0028] FIG5 is a partial enlarged schematic diagram of point B in FIG4 .

[0029] FIG6 is a schematic structural diagram of an elastic positioning unit of a positioning mechanism provided in an embodiment of the present invention.

[0030] FIG7 is a cross-sectional view of the elastic positioning unit of the positioning mechanism provided in an embodiment of the present invention. Implementation Method

[0031] One of the core aspects of the present invention is to provide a positioning mechanism whose structural design makes it simple, avoids the need for electrical equipment for positioning, and reduces costs and space occupation.

[0032] Another core of the present invention is to provide a processing device including the above-mentioned positioning mechanism and a positioning method based on the processing device.

[0033] The following will provide a clear and complete description of the technical solutions in the embodiments of the present invention, combined with the accompanying drawings. Obviously, the described embodiments are only a portion of the embodiments of the present invention, and not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are also within the scope of protection of the present invention.

[0034] It should be understood that the use of "system," "device," "unit," and / or "module" in this application is merely a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, they may be replaced by other expressions.

[0035] Please refer to Figures 1 to 5. Figure 1 is a structural schematic diagram of the positioning mechanism provided in an embodiment of the present invention, Figure 2 is a front view of the positioning mechanism provided in an embodiment of the present invention, Figure 3 is a side view of the positioning mechanism provided in an embodiment of the present invention, Figure 4 is a sectional view in the direction of A in Figure 3, and Figure 5 is a partial enlarged schematic diagram of point B in Figure 4.

[0036] Disclosed in an embodiment of the present invention is a positioning mechanism comprising a positioning body 1 and a plurality of elastic positioning units 2.

[0037] Among them, the positioning body 1 has a accommodating space for accommodating the positioned part 3, and the accommodating space has an entrance and exit for the positioned part 3 to enter and exit on one side of the positioning body 1. The entrance and exit is slightly larger than the width or diameter of the positioned part 3. The entrance and exit can be one or two, that is, entrances and exits can be set at both ends of the accommodating space, so that the positioned part 3 can enter and exit at both ends of the accommodating space. Multiple elastic positioning units 2 are symmetrically arranged in the accommodating space on both sides of the entry and exit direction. The multiple here refers to an even number, that is, the number in the elastic positioning unit 2 can be 2, 4, 6, etc. When the number of elastic positioning units 2 is small, such as only 2 or 4, the contact part between the elastic positioning unit 2 and the positioned part 3 can be designed to be longer along the opening direction of the entrance and exit to provide more stable support for the positioned part 3.

[0038] Each elastic positioning unit 2 includes a sliding portion and an elastic portion, and the sliding portion can be reciprocatingly slidably disposed within the accommodating space. In one embodiment, the accommodating space includes a first accommodating space and a second accommodating space, the positioned member is accommodated in the first accommodating space, and the sliding portion can be reciprocatingly slidably disposed within the accommodating space. In another embodiment, the first accommodating space and the second accommodating space are connected. The sliding portion is used to contact and cooperate with the positioned member 3. The sliding portions of the two symmetrically arranged elastic positioning units 2 can cooperate relative to each other to clamp the positioned member 3. The elastic portion is arranged between the sliding portion and the positioning body 1. When the elastic portion applies a force to the sliding portion, the sliding portions of the symmetrically arranged elastic positioning units 2 move toward each other to clamp the positioned member 3 and adjust the position of the positioned member 3.

[0039] Compared with the previous technology, when the positioning mechanism provided by the embodiment of the present invention is used, the wafer or other positioned parts 3 are sent into the accommodating space from the entrance and exit. At this time, the elastic positioning units 2 on both sides are respectively subjected to force, and since the positioned parts 3 may be biased to one side, the elastic potential energy generated by the elastic positioning units 2 on this side is greater than the elastic potential energy generated by the elastic positioning units 2 on the other side. After the positioned parts 3 are in place, the positioned parts 3 are released, and the elastic positioning units 2 on both sides are released. Since the elastic positioning units 2 on both sides are symmetrically arranged, after the external force is lost, the elastic positioning units 2 on both sides will tend to balance after oscillating for a period of time, and the positioned parts 3 will automatically be centered, thereby realizing the function of centering positioning.

[0040] It can be seen that the above-mentioned positioning mechanism does not require the help of electrical equipment such as motors, and uses the symmetrical elastic force of the elastic positioning units 2 on both sides to achieve the centering of the positioned part 3. Since the motor and its accessories are omitted, the structure of the above-mentioned positioning mechanism is simpler, the cost is lower, and the space occupied is also smaller. In particular, when multiple elastic positioning units are provided on both sides, the positioning accuracy can also be improved, avoiding the positioning accuracy being affected by the accuracy of the electrical equipment such as motors.

[0041] Preferably, in an embodiment of the present invention, in order to ensure that the sliding part can slide in an orderly manner according to a preset direction, the sliding part includes a guiding device and a positioning device 220. The guiding device is fixedly arranged on the positioning body 1. The guiding device can be a guiding groove, a guide rod 210, a guide rail, etc. One positioning device 220 can cooperate with multiple parallel guide grooves, guide rods 210, and guide rails. The positioning device 220 slides and cooperates with the guiding device. The positioning device 220 is used to contact and cooperate with the positioned part 3. The elastic part is arranged on the guiding device and is located between the positioning device 220 and the positioning body 1.

[0042] Specifically, as shown in Figure 6, in order to reduce the friction between the positioned part 3 and the positioning device 220, in an embodiment of the present invention, the above-mentioned positioning device 220 includes a support block 221 and a positioning bearing 222. The support block 221 is slidably matched with the guide device, and the positioning bearing 222 is rotatably arranged on the support block 221. The circumferential outer side surface of the positioning bearing 222 is used to contact and cooperate with the positioned part 3. The positioning bearing 222 can be set on the upper surface, lower surface of the support block 221 or the surface of the elastic positioning unit 2 facing the other side of the support block 221. The positioning bearing 222 can be directly set outside the support block 221, or can be set in a semi-embedded manner on the support block 221.

[0043] Preferably, as shown in Figure 6, in an embodiment of the present invention, the above-mentioned locating bearing 222 is arranged on the upper surface or the lower surface of the support block 221, and the inner ring of the locating bearing 222 is fixedly connected to the support block 221. In order to avoid friction between the outer ring of the locating bearing 222 and the support block 221, which affects the rotation of the locating bearing 222, the surface of the inner ring of the locating bearing 222 facing the support block 221 can be made to protrude from the surface of the outer ring of the locating bearing 222 facing the support block 221 to form a boss 223, so that a gap is formed between the outer ring of the locating bearing 222 and the support block 221.

[0044] Alternatively, a boss may be provided on the upper surface of the support block 221 facing the inner ring of the locating bearing 222, so that the boss can support the inner ring of the locating bearing 222, thereby forming a gap between the outer ring of the locating bearing 222 and the support block 221. Alternatively, the surface of the inner ring of the locating bearing 222 facing the support block 221 may be made to protrude beyond the surface of the outer ring of the locating bearing 222 facing the support block 221 to form the boss, and a boss may be provided on the upper surface of the support block 221 facing the inner ring of the locating bearing 222, with the two bosses abutting against each other to form a gap between the outer ring of the locating bearing 222 and the support block 221.

[0045] In order to prevent the locating bearing 222 from wearing the positioned part 3, in an embodiment of the present invention, an elastic cushion layer is provided on the circumferential outer surface of the outer ring of the locating bearing 222. The elastic cushion layer is made of a flexible or elastic material, such as felt, rubber, silicone, etc., which is not limited here.

[0046] To further optimize the above technical solution, in an embodiment of the present invention, the circumferential outer surface of the outer ring of the positioning bearing 222 is provided with a retaining ring groove for engaging with the edge of the positioned component 3. The width of the retaining ring groove should be greater than the thickness of the edge of the positioned component 3 to provide positional support for the positioned component 3 during positioning. The retaining ring groove is used to limit the position of the positioned component in the axial direction of the positioning bearing 222.

[0047] In an embodiment of the present invention, the above-mentioned guide device is a guide rod 210, which is fixedly arranged on the positioning body 1. The support block 221 is provided with a guide hole, which passes through the support block 221. The guide rod 210 slides through the guide hole and cooperates with the support block 221. The cross-section of the guide rod 210 can be circular, polygonal, elliptical or irregular. As shown in Figure 6, the support block 221 in the positioning device 220 cooperates with the guide rod 210.

[0048] As shown in Figure 6, in an embodiment of the present invention, the above-mentioned elastic part is a compression spring 230, which is sleeved on the guide rod 210. The two ends of the compression spring 230 are respectively in contact with the positioning body 1 and the support block 221. Of course, the elastic part can also be a tension spring or other forms of elastic parts, which are not limited here.

[0049] The positioning body 1 can adopt an integrated structure or a split structure, as shown in Figures 1 to 4. In an embodiment of the present invention, the above-mentioned positioning body 1 includes two positioning seats 120, and the positioning seat 120 is provided with a slide groove 150. One end of the positioning seat 120 is provided with an opening 170 connected to the slide groove 150. The notches of the slide grooves 150 of the two positioning seats 120 are arranged relative to each other to form an accommodating space. The openings 170 of the two positioning seats 120 form an entrance and exit, and the elastic positioning unit 2 is arranged in the slide groove 150.

[0050] Specifically, as shown in Figure 1, the above-mentioned positioning seat 120 includes a base plate 121, a cover plate 122 and a side plate 123. The base plate 121, the cover plate 122 and the side plate 123 form the above-mentioned slide groove 150. The side of the base plate 121 and the cover plate 122 away from the side plate 123 forms a notch of the slide groove 150, and one end of the guide rod 210 of the above-mentioned elastic positioning unit 2 is fixed to the side plate 123.

[0051] As shown in Figures 1 and 2, in order to facilitate the positioning member 3 to enter the slide groove 150, in an embodiment of the present invention, a guide slope 130 is set between the above-mentioned opening 170 and the slide groove 150. One or more guide slopes 130 can be set, and their function is to expand the size of the opening 170 so that the positioning member 3 can enter the slide groove 150.

[0052] To further optimize the above technical solution, in an embodiment of the present invention, the above positioning body 1 also includes a positioning platform 110, and at least one of the two positioning seats 120 is adjustably arranged on the positioning platform 110 so that the two positioning seats 120 are closer to or farther away from each other. In this way, the relative distance between the two positioning seats 120 can be adjusted according to the size of the positioned part 3 to adapt to the positioning requirements of different positioned parts 3, thereby improving the adaptability of the positioning mechanism.

[0053] To further optimize the above technical solution, as shown in Figures 1 and 4, the positioning seat 120 and the positioning platform 110 are detachably connected by threaded fasteners, one of the positioning seat 120 and the positioning platform 110 is provided with a strip hole 140, and the other of the positioning seat 120 and the positioning platform 110 is provided with a mounting hole, and the threaded fasteners cooperate with the strip hole 140 and the mounting hole respectively to fix the positioning seat 120 to the positioning platform 110 in an adjustably position. The above-mentioned threaded fasteners can be bolts or bolts and nuts. When the threaded fasteners are bolts, the mounting holes are screw holes. When the threaded fasteners include bolts and nuts, the mounting holes are smooth holes. Of course, in addition to the above-mentioned position adjustment structure, other position adjustment structures can also be adopted. For example, a sliding groove for the positioning seat 120 to slide and a locking member for locking the positioning seat 120 relative to the positioning platform 110 can be provided on the table surface of the positioning platform 110.

[0054] In order to ensure that the centers of the two positioning seats 120 are maintained in the same position, the above-mentioned two positioning seats 120 are preferably set on the positioning platform 110 at the same time using a position-adjustable structure. In order to facilitate the synchronous adjustment of the two positioning seats 120, a structure in which a gear and two racks are matched can be adopted, that is, two identical racks are arranged according to a central symmetrical structure, and the gear is matched with the two racks in the center respectively, and the ends of the two racks away from the gear are connected to the two positioning seats 120 respectively. In this way, when the gear is rotated, the gear drives the two positioning seats 120 to move toward each other synchronously through the two racks, thereby ensuring that the positioning center is always in the same position.

[0055] In order to facilitate adaptation to positioned parts 3 of different specifications, a scale can be set on the positioning platform 110 to accurately display the distance between the two positioning seats 120, thereby helping the operator to quickly adjust the position of the positioning seat 120.

[0056] As shown in FIG1 , in an embodiment of the present invention, a surface light source is provided between two positioning seats 120 on the positioning platform 110 , and the surface light source can illuminate the back of the positioned part 3 so that the visual camera can capture the outline of the positioned part 3 .

[0057] Preferably, at least one of the two oppositely arranged groove walls of the above-mentioned slide groove 150 is provided with a limiting protrusion 160 at the end away from the opening 170, and the limiting protrusion 160 protrudes into the slide groove 150 in a direction perpendicular to the direction in which the positioned part 3 enters and exits the slide groove 150. The limiting protrusion 160 is used to cooperate with the positioned part 3 to prevent the positioned part 3 from tilting up. A roller can be provided at the end of the limiting protrusion 160 to reduce wear between the limiting protrusion 160 and the positioned part 3.

[0058] Specifically, the limiting protrusion 160 consists of a top plane and a guide slope connected to the end of the top plane close to the opening 170. The slope of the guide slope is relatively gentle, that is, the ratio of the vertical distance between the two ends of the guide slope to the horizontal distance between the two ends of the guide slope is small. It should be noted that the direction of the horizontal distance between the two ends of the guide slope is parallel to the direction of the top plane. It is foreseeable that the positioned part needs to contact and cooperate with the positioning bearings 222 of multiple elastic positioning units 2 at the same time. Therefore, how to ensure that the contact position of the positioned part and each positioning bearing 222 is consistent is very important for whether the movement path of the positioned part in the positioning mechanism can be consistent. Although a limiting ring groove is provided on the circumferential surface of the positioning bearing 222 in the above embodiment to limit the positioned part in the axial direction of the positioning bearing 222, in order to further improve the positioning effect of the positioned part, in the embodiment of the present invention, the above-mentioned limiting protrusion 160 is provided at the end of the slide groove 150 away from the opening 170 to achieve a better limiting effect on the positioned part.

[0059] An embodiment of the present invention further provides a processing device, which includes a positioning mechanism as described in the above embodiment. The processing device includes but is not limited to a wafer cutting machine and a wafer splitting machine. Since the processing device adopts the positioning mechanism in the above embodiment, the technical effects of the processing device please refer to the above embodiment.

[0060] Preferably, the above-mentioned processing device also includes a material picking mechanism for conveying the positioned part 3 to the positioning mechanism, and the material picking mechanism is used to grab the positioned part 3 and convey it to the positioning mechanism for positioning. The material picking mechanism includes but is not limited to a manipulator, a suction cup, etc.

[0061] Furthermore, in an embodiment of the present invention, the above-mentioned processing device also includes an image acquisition device, the center of the field of view of the image acquisition device is the positioning position of the positioning mechanism, so as to facilitate image acquisition. The image acquisition device is a visual camera, which uses a visual algorithm to obtain the outline of the positioned part 3.

[0062] An embodiment of the present invention further provides a positioning method for the above-mentioned processing device, wherein the above-mentioned processing device further includes a material taking mechanism for conveying the positioned part to the positioning mechanism, and the positioning method includes the following steps.

[0063] The positioned part 3 is grasped and transported to a positioning preparation position close to the positioning mechanism, where the positioned part 3 is aligned with the entrance and exit of the positioning mechanism at the positioning preparation position.

[0064] The picking mechanism grabs the positioned part 3 to transport the positioned part 3 to the positioning preparation position. The picking mechanism can be composed of a robotic arm and a suction cup, or a robotic arm and a clamping claw, which is not limited here.

[0065] The positioned member 3 is sent into the accommodation space of the positioning mechanism until it reaches the final positioning position. During this process, the positioned member 3 applies a force to each elastic positioning unit 2 of the positioning mechanism, causing the sliding parts of the symmetrically arranged elastic positioning units 2 to move away from each other.

[0066] After transporting the positioned part 3 to the positioning preparation position and aligning it with the entrance and exit of the positioning mechanism, the material picking mechanism continues to move the positioned part 3 toward the entrance and exit of the positioning mechanism until it is sent into the accommodating space of the positioning mechanism. After the positioned part 3 is sent into the positioning mechanism, the material picking mechanism detaches from the positioned part 3 so that the next material picking can be carried out.

[0067] The positioned member 3 is released, and the positioned member 3 is automatically centered and positioned in the middle position of the elastic positioning units 2 on both sides under the action of the elastic positioning units 2 symmetrically arranged on both sides.

[0068] After being released by the material-taking mechanism, the positioned member 3 is only affected by the elastic positioning units 2 on both sides of the positioning mechanism. Since the elastic positioning units 2 on both sides of the positioning mechanism are symmetrically arranged, the elastic positioning units 2 on both sides of the positioned member 3 are subjected to balanced forces and have the same deformation, thereby realizing the function of automatic centering positioning.

[0069] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same and similar parts between the various embodiments can be referenced to each other.

[0070] As used in this application and the claims, unless the context clearly indicates an exception, the terms "a," "an," "an," and / or "the" are not intended to refer to the singular but may include the plural. Generally speaking, the terms "comprise" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list; a method or apparatus may also include other steps or elements. The phrase "comprises a..." does not preclude the presence of other identical elements in the process, method, product, or apparatus that includes the elements.

[0071] It should also be noted that, in this document, terms such as "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that an article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of further limitations, elements defined by the phrase "comprising a..." do not exclude the presence of other identical elements in the article or device comprising the aforementioned elements.

[0072] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are intended only to facilitate understanding of the core concepts of the present invention. It should be noted that those skilled in the art may make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications are also within the scope of protection of the present invention.

[0073] 1: Position the subject 110: Positioning stage 120: Positioning seat 121: Bottom plate 122: Cover 123: Side panels 130: Guide slope 140: Strip hole 150: chute 160: Limiting protrusion 170: Opening 2: Elastic positioning unit 210: Guide rod 220: Positioning device 221: Support block 222: Locating bearing 223: Boss 230: Compression spring 3: Positioned parts

Claims

1. A positioning mechanism, characterized in that it comprises a positioning body and a plurality of elastic positioning units, the positioning body having a receiving space for accommodating a positioned component, the receiving space having an entrance / exit formed on one side of the positioning body for the positioned component to enter and exit, the plurality of elastic positioning units being symmetrically arranged on both sides of the entrance / exit direction within the receiving space and providing elastic support to the positioned component from both sides of the entrance / exit direction, each elastic positioning unit comprising a sliding part and an elastic part, the sliding part being reciprocally slidably disposed within the receiving space, the elastic part being disposed between the sliding part and the positioning body, and when the elastic part applies a force to the sliding part, the sliding parts of the symmetrically arranged elastic positioning units move towards each other to clamp the positioned component and adjust the position of the positioned component.

2. The positioning mechanism as described in claim 1, wherein, The sliding part includes a guide device and a positioning device. The guide device is fixedly disposed on the positioning body, and the positioning device slides with the guide device. The positioning device is used to contact and cooperate with the positioned part. The elastic part is disposed on the guide device and located between the positioning device and the positioning body.

3. The positioning mechanism as described in claim 2, wherein, The positioning device includes a support block and a positioning bearing. The support block is slidably engaged with the guide device. The positioning bearing is rotatably disposed on the support block. The circumferential outer surface of the positioning bearing is used to contact and engage with the positioned part.

4. The positioning mechanism as described in claim 3, wherein, The positioning bearing is disposed on the upper or lower surface of the support block. The inner ring of the positioning bearing is fixedly connected to the support block, and the inner ring of the positioning bearing protrudes from the outer ring of the positioning bearing onto the surface of the support block. Alternatively, the surface of the support block facing the positioning bearing is provided with a boss to create a gap between the outer ring of the positioning bearing and the support block.

5. The positioning mechanism as described in claim 3 or 4, wherein, The guiding device is a guide rod, which is fixedly installed on the positioning body. The support block is provided with a guide hole, which passes through the support block. The guide rod passes through the guide hole and slides with the support block.

6. The positioning mechanism as described in claim 5, wherein, The elastic part is a compression spring, which is sleeved on the guide rod, and the two ends of the compression spring abut against the positioning body and the support block, respectively.

7. The positioning mechanism as described in any one of claims 1 to 4, wherein, The positioning body includes two positioning seats, each with a groove. One end of each positioning seat has an opening communicating with the groove. The groove openings of the two positioning seats are arranged opposite each other to form the accommodating space. The openings of the two positioning seats form the entrance / exit. The elastic positioning unit is disposed within the groove.

8. The positioning mechanism as described in claim 7, wherein, A guide ramp is provided between the opening and the slide groove so that the positioned part can enter the slide groove.

9. The positioning mechanism as described in claim 7, wherein, The positioning body also includes a positioning platform, and at least one of the two positioning seats is adjustablely positioned on the positioning platform so that the two positioning seats are close to or far from each other.

10. The positioning mechanism as described in claim 9, wherein, The positioning seat and the positioning platform are detachably connected by threaded fasteners. One of the positioning seat and the positioning platform is provided with a strip hole, and the other of the positioning seat and the positioning platform is provided with a mounting hole. The threaded fasteners cooperate with the strip hole and the mounting hole respectively to adjustably fix the position of the positioning seat to the positioning platform.

11. The positioning mechanism as described in claim 7, wherein, At least one of the two opposing groove walls of the slide has a limiting protrusion at the end away from the opening. The limiting protrusion protrudes into the slide in a direction perpendicular to the direction in which the positioned part enters and exits the slide. The limiting protrusion is used to cooperate with the positioned part to prevent the positioned part from tilting up.

12. A processing apparatus, characterized in that it includes a positioning mechanism as described in any one of claims 1 to 11.

13. A positioning method for a processing apparatus as described in claim 12, characterized in that the processing apparatus further includes a material handling mechanism for conveying a workpiece to be positioned to the positioning mechanism, the positioning method comprising the following steps: grasping the workpiece to be positioned and transporting the workpiece to a positioning preparation position close to the positioning mechanism, wherein the workpiece to be positioned is aligned with the inlet / outlet of the positioning mechanism at the positioning preparation position; feeding the workpiece to be positioned into the receiving space of the positioning mechanism until it reaches the final positioning position, wherein during this process, the workpiece to be positioned applies a force to each elastic positioning unit of the positioning mechanism, causing the sliding portions of the symmetrically arranged elastic positioning units to move away from each other; and releasing the workpiece to be positioned, wherein the workpiece to be positioned automatically centered at the middle position of the elastic positioning units on both sides under the action of the symmetrically arranged elastic positioning units on both sides.

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