Processing device, processing system, management device, display method, program, manufacturing method of semiconductor device

Abstract

This invention provides a technique for informing a user of the status of components in a substrate processing apparatus and the replacement period for those components. The technique includes a control unit that displays time information and quality information on a display unit at each point in time when the quality information is determined and associated with the time information. The time information represents information related to the usage time of at least one of the processing components, flow control components, and transport control components that are operational. The quality information determines that the components are in a predetermined quality state. The processing components are processing units used to process substrates, the flow control components are environmental gas control units equipped with a gas supply system or a gas exhaust system and capable of controlling the ambient gas within the processing unit, and the transport control components are transport units used to transport substrates.

Description

Technical Field

[0001] This invention relates to a processing device, a processing system, a management device, a display method, a program, and a method for manufacturing a semiconductor device. Prior Technology

[0002] It is known that there are technologies that display the replacement period of components, as described in Patent Documents 1 and 2. [Previous Technical Documents] [Patent Literature]

[0003] [Patent Document 1] International Publication No. 2017 / 158682 [Patent Document 2] Japanese Patent Application Publication No. 5-243111 Summary of the Invention

[0004] (The problem the invention aims to solve) However, if only the replacement period of the components is displayed, sometimes users cannot know the status of the components and therefore cannot grasp the appropriate replacement period.

[0005] The present invention provides a technology that can inform users of the status of components in a substrate processing device and the replacement period of the components. (Technical means to solve the problem)

[0006] According to one aspect of the present invention, a technology is provided, comprising a control unit that displays time information and quality information on a display unit at each time point in which the quality information is determined and associated with the time information; the time information is information related to the usage time of at least one of the processing components, flow control components, and transport control components that can operate; the quality information is information determining that the components are in a predetermined quality state; the processing components are processing units for processing substrates; the flow control components are environmental gas control units equipped with a gas supply system or a gas exhaust system and capable of controlling the environmental gas within the processing unit; and the transport control components are transport units for transporting substrates. (Compared to the effectiveness of previous technologies)

[0007] According to the present invention, the status of components in the processing device and the replacement period of the components can be informed to the user. Simple Explanation of the Diagram

[0008] Figure 1 is a schematic diagram of one example of the processing system in the first embodiment. Figure 2 is a perspective view of the substrate processing apparatus in the first embodiment. Figure 3 is a schematic side sectional view of the substrate processing apparatus of the first embodiment. Figure 4 is a schematic side sectional view of the processing furnace in the first embodiment. Figure 5 is a block diagram showing an example of the functional configuration of the control device and management device included in the substrate processing apparatus of the first embodiment. Figure 6 is a diagram showing one example of the general information of the components in the first embodiment. Figure 7 is a schematic diagram illustrating one example of the functional configuration of the control device in the first embodiment. Figure 8 is an explanatory diagram illustrating the situation where the service life of the constituent components of the first embodiment is shortened. Figure 9 is a schematic diagram showing one example of the display screen of the display unit in the first embodiment. Figure 10 is a schematic diagram showing an example of a variation of the display screen of the display unit in the first embodiment. Figure 11 is a schematic diagram showing an example of a variation of the display screen of the display unit in the first embodiment. Figure 12 is a schematic diagram showing an example of a variation of the display screen of the display unit in the first embodiment. Figure 13 is a flowchart illustrating one example of the memory processing process in the first implementation. Figure 14 is a flowchart illustrating one example of the display processing flow in the first embodiment. Figure 15 is a flowchart illustrating one example of the memory processing process in the second implementation. Implementation

[0009] The embodiments of the present invention will now be described with reference to the drawings. Furthermore, the drawings are merely illustrative, and the sizes of the parts shown and the ratios between them may not reflect the actual device. Also, common symbols appearing in the drawings indicate common configurations even when not mentioned in the description of the drawings. Moreover, the present invention is not limited to any of the following embodiments and can be implemented with appropriate modifications within the scope of the present invention.

[0010] [First Implementation Form] (Processing System) Figure 1 is a schematic diagram of one example of the processing system 90 in the first embodiment.

[0011] As shown in Figure 1, the processing system 90 of this embodiment is composed of a management device 70 and a plurality of substrate processing devices 1. Furthermore, the management device 70 and the plurality of substrate processing devices 1 each have a control device 100 serving as a control unit. The control device 100 controls each of the management device 70 and the substrate processing devices 1.

[0012] The management device 70 is connected via communication lines to a plurality of substrate processing devices 1, such as chemical vapor deposition (CVD) vapor deposition devices or diffusion devices. The management device 70 has the function of collecting device data transmitted from the substrate processing devices 1. Furthermore, it is sufficient to connect to at least one substrate processing device 1.

[0013] (Substrate processing apparatus) Next, the configuration of the substrate processing apparatus 1, which is the processing apparatus of this embodiment, will be described with reference to FIGS. 2 to 4. Furthermore, as shown in FIGS. 2 and 3, a control device 100 is provided in the substrate processing apparatus 1. The control device 100 is electrically connected to each of the constituent components within the substrate processing apparatus 1. Each constituent component, which is at least operable, operates according to the instructions of the control device 100.

[0014] The substrate processing apparatus 1 includes a frame 2, and a front maintenance opening 4 is provided at the lower part of the front wall 3 of the frame 2 as an opening. The front maintenance opening 4 is configured to be available for maintenance and is opened and closed by a front maintenance door 5.

[0015] On the front wall 3 of the frame 2, a box loading and unloading outlet 6 is provided in a manner that connects the inside and outside of the frame 2. The box loading and unloading outlet 6 is opened and closed by a front baffle (loading and unloading outlet opening and closing mechanism) 7. A loading port (substrate transport container transfer platform) 8 is provided on the front side of the box loading and unloading outlet 6. The loading port 8 is configured to align the box 9 placed thereon.

[0016] The box 9 is a sealed substrate transport container, which is transported into the loading port 8 by a transport device (not shown) and then removed from the loading port 8.

[0017] A rotating box rack (substrate transport container storage rack) 11 is provided on the upper part of the approximately central part in the front-back direction inside the frame 2. The rotating box rack 11 is configured to store a plurality of boxes 9.

[0018] The rotating case rack 11 includes: a support column 12, which is vertically erected and rotates intermittently; and a plurality of shelf plates (substrate transport container racks) 13, which are radially supported at various positions in the upper, middle and lower sections of the support column 12; the shelf plates 13 are configured to store the case 9 in a state of holding a plurality of case 9.

[0019] Below the rotating box holder 11, there is a box opener (substrate transport container lid opening and closing mechanism) 14, which has the structure of holding the box 9 and being able to open and close the lid of the box 9.

[0020] A box conveying mechanism (container conveying mechanism) 15 is provided between the loading port 8 and the rotating box frame 11 and the box opener 14. The box conveying mechanism 15 is configured to hold the box 9 and lift it up and down, and to move forward and backward in the horizontal direction, and to convey the box 9 between the loading port 8, the rotating box frame 11 and the box opener 14.

[0021] A sub-frame 16 is provided at the lower part of the approximate center in the front-to-back direction of the frame 2, extending all the way to the rear end. On the front wall 17 of the sub-frame 16, a pair of substrate loading and unloading outlets 19 are provided in parallel in the vertical direction, divided into upper and lower sections, for loading and unloading substrates 18 into and out of the sub-frame 16, and a box opener 14 is provided for the upper and lower sections of the substrate loading and unloading outlets 19 respectively.

[0022] The box opener 14 includes a mounting platform 21 for holding the box 9 and an opening and closing mechanism 22 for opening and closing the lid of the box 9. The box opener 14 is configured such that the lid of the box 9 placed on the mounting platform 21 is opened and closed by the opening and closing mechanism 22, thereby opening and closing the substrate inlet and outlet of the box 9.

[0023] The sub-frame 16 forms an airtight transfer chamber 23 relative to the space (cassette transfer space) where the cassette conveying mechanism 15 and the rotating cassette rack 11 are located. A substrate transfer mechanism 24, serving as a transfer robotic arm, is provided in the front region of the transfer chamber 23. This substrate transfer mechanism 24 has multiple axes (not shown) serving as a drive unit, and a substrate mounting plate 25 for holding the required number of substrates 18 (5 in the figure). The substrate mounting plate 25 can move linearly in the horizontal direction, rotate in the horizontal direction, and move up and down. The substrate transfer mechanism 24 is configured to load and deliver substrates 18 relative to the crystal boat (substrate holder) 26.

[0024] In the region behind the transfer chamber 23, a standby section 27 is formed to house the crystal boat 26 and keep it in standby mode. A vertical processing furnace 28 is arranged above the standby section 27. The processing furnace 28 forms a processing chamber 29 inside, and the lower end of the processing chamber 29 is a furnace opening, which is opened and closed by a furnace opening baffle (furnace opening and closing mechanism) 31. The processing furnace 28 will be described in detail in Figure 4 later.

[0025] A crystal boat lift (substrate holding lifting mechanism) 32 is provided between the right end of the frame 2 and the right end of the standby section 27 of the sub-frame 16 for raising and lowering the crystal boat 26. A sealing cover 34, which serves as a cover, is horizontally mounted on the lifting platform arm 33 connected to the crystal boat lift 32. The sealing cover 34 vertically supports the crystal boat 26 and can airtightly seal the furnace opening when the crystal boat 26 is placed in the processing chamber 29.

[0026] The crystal boat 26 is configured to hold multiple segments of substrates 18 (e.g., about 50 to 125) in a horizontal position with their centers aligned.

[0027] A cleaning unit 35 is provided opposite to the crystal boat elevator 32. The cleaning unit 35 consists of a supply fan and a dust filter to supply purified ambient gas or inert gas, i.e., clean air 36. Between the substrate transfer mechanism 24 and the cleaning unit 35, a notch alignment device (not shown) is provided as a substrate integration device in the circumferential direction of the integrated substrate 18.

[0028] The cleaning air 36 blown out from the cleaning unit 35 flows to the notch alignment device (not shown) and the substrate transfer mechanism 24 and the crystal boat 26, and is then drawn in by the pipe (not shown) and discharged to the outside of the frame 2, or blown out into the transfer chamber 23 by the cleaning unit 35.

[0029] (Processing furnace) As shown in Figure 4, the processing furnace 28 is equipped with a reaction tube 50. The reaction tube 50 is made of heat-resistant non-metallic materials such as quartz (SiO2) and silicon carbide (SiC), and is a cylindrical shape with a closed upper end and an open lower end.

[0030] Inside the reaction tube 50, for example, a processing chamber 29 is formed to process the substrate 18. In other words, the substrate processing apparatus 1 has a processing chamber 29. The substrate 18, held horizontally by the crystal boat 26, is inserted into the processing chamber 29 from below and arranged in multiple segments along the vertical direction. The crystal boat 26 housed in the processing chamber 29 is configured to rotate while maintaining the airtightness of the processing chamber 29 by rotating the rotation axis 44 using the rotation mechanism 43.

[0031] Below the reaction tube 50, a manifold 45 is arranged concentrically with the reaction tube 50. The manifold 45 is made of a metal material such as stainless steel and is a cylindrical shape with open upper and lower ends. The reaction tube 50 is longitudinally supported from the lower end side by the manifold 45. That is, the reaction tube 50 forming the processing chamber 29 is erected vertically through the manifold 45 to form the processing furnace 28. The lower end of the manifold 45 is configured to be airtightly sealed by a sealing cover 34, which serves as a sealing part, when the crystal boat elevator 32 rises. Between the lower end of the manifold 45 and the sealing cover 34, a sealing member 46a, such as an O-ring, is provided to airtightly seal the processing chamber 29.

[0032] Furthermore, a gas inlet pipe 47 for introducing raw material gas, flushing gas, etc., into the processing chamber 29, and an exhaust pipe 48 for discharging gas from the processing chamber 29 are respectively connected to the manifold 45. The configuration adjusts the APC valve 41 and controls the pressure of the processing chamber 29 based on the detection results of a pressure sensor (not shown). Also, a mass flow controller (MFC) and valves (on / off valves) for flow control are sequentially arranged from upstream on the gas inlet pipe 47. The MFCs installed in the gas inlet pipe 47 of this embodiment include MFCs 51, 53, 55, and 57, and the valves include valves 52, 54, 56, and 58. The gas inlet pipe 47 of this embodiment consists of two gas inlet pipes, which are formed by the confluence of four upstream pipes. One gas inlet pipe is formed by the confluence of two of the four upstream pipes, and the other gas inlet pipe is formed by the confluence of the remaining two pipes. One gas inlet pipe is, for example, a pipe with MFC 51 and valve 52 sequentially installed from upstream, and a pipe with MFC 53 and valve 54 sequentially installed from upstream, which are combined together. Another gas inlet pipe is, for example, a pipe with MFC 55 and valve 56 sequentially installed from upstream, and a pipe with MFC 57 and valve 58 sequentially installed from upstream, which are combined together.

[0033] A heater unit 49 (heating mechanism) is arranged concentrically with the reaction tube 50 around the outer periphery of the reaction tube 50. The heater unit 49 is configured to heat the processing chamber 29 so that the entire processing chamber 29 has a uniform or predetermined temperature distribution.

[0034] Next, the operation of the substrate processing apparatus 1 will be explained.

[0035] (Operation of the substrate processing device) When a box 9 is supplied to loading port 8, the box inlet / outlet 6 is opened by the front baffle 7. The box 9 on loading port 8 is moved into the interior of frame 2 by the box inlet / outlet 6 via the box transport mechanism 15 and placed on the designated shelf 13 of the rotating box rack 11. After being temporarily stored in the rotating box rack 11, the box 9 is transported from shelf 13 to any box opener 14 by the box transport mechanism 15 and then transferred to the loading platform 21, or directly transferred from loading port 8 to loading platform 21.

[0036] At this time, the substrate loading / unloading outlet 19 is closed by the opening / closing mechanism 22, and clean air 36 flows through and fills the transfer chamber 23. For example, by filling the transfer chamber 23 with nitrogen as clean air 36, the oxygen concentration is set to below 20 ppm, which is much lower than the oxygen concentration inside the frame 2 (atmospheric environment gas).

[0037] For the box 9 placed on the mounting platform 21, the open side end face of the box is pressed against the front wall 17 of the sub-frame 16 and the substrate is moved into the opening edge of the loading port 19. The cover is removed by the opening and closing mechanism 22, thereby opening the substrate loading port.

[0038] When the box 9 is opened by the box opener 14, the substrate 18 is taken out from the box 9 by the substrate transfer mechanism 24 and transferred to the notch alignment device (not shown). After the substrate 18 is integrated by the notch alignment device, the substrate transfer mechanism 24 moves the substrate 18 into the standby section 27 located behind the transfer chamber 23 and charges it into the crystal boat 26.

[0039] After the substrate 18 is transferred to the crystal boat 26, the substrate transfer mechanism 24 returns to the box 9 and loads the next substrate 18 into the crystal boat 26.

[0040] During the process of loading substrate 18 into crystal boat 26 by substrate transfer mechanism 24 in one (upper or lower) box opener 14, at the same time, another box 9 is transported by the box conveying mechanism 15 from the rotating box frame 11 to another (lower or upper) box opener 14 and the box 9 is opened by the other box opener 14.

[0041] When a predetermined number of substrates 18 are loaded into the crystal boat 26, the furnace opening of the processing furnace 28, which was closed by the furnace opening baffle 31, is opened. Then, the crystal boat 26 is raised by the crystal boat elevator 32 and moved (loaded) into the processing chamber 29.

[0042] After loading, the furnace opening is airtightly sealed by the sealing cap 34. Furthermore, in this embodiment, at that point in time (after loading), there is a rinsing step (pre-rinsing step) to replace the processing chamber 29 with inert gas.

[0043] Vacuum exhaust is performed by APC valve 41 to bring the processing chamber 29 to the desired pressure (vacuum level). Furthermore, the heating unit 49 heats the chamber to a predetermined temperature to bring the processing chamber 29 to the desired temperature distribution.

[0044] Furthermore, a processing gas, controlled to a predetermined flow rate, is supplied via a gas supply mechanism. As the processing gas flows through the processing chamber 29, it comes into contact with the surface of the substrate 18, performing a predetermined treatment on the surface of the substrate 18. Subsequently, the processed gas after the reaction is discharged from the processing chamber 29 via a gas discharge mechanism.

[0045] After a preset processing time has elapsed, inert gas is supplied from an inert gas supply source (not shown) via a gas supply mechanism to replace the inert gas in the processing chamber 29, and the pressure in the processing chamber 29 is restored to normal pressure (post-rinse step). Then, the crystal boat 26 is lowered via the crystal boat elevator 32 through the sealing cover 34.

[0046] Regarding the removal of the processed substrate 18, the substrate 18 and the cassette 9 are sent to the outside of the frame 2 in the reverse order of the above description. Then, unprocessed substrates 18 are loaded into the crystal boat 26, and the batch processing of substrates 18 is repeated.

[0047] (Composition of the control device) Next, referring to Figures 5 to 7, the control device 100, which controls the processing furnace 28 (processing unit), the conveying mechanism (transfer unit), the gas supply mechanism (gas supply system of the ambient gas control unit), the gas exhaust mechanism (gas exhaust system of the ambient gas control unit), and the heating mechanism (processing unit), will be described. Here, the conveying mechanism includes at least a substrate conveying mechanism, namely a cassette conveying mechanism 15, a substrate transfer mechanism 24, a crystal boat elevator 32, a rotating mechanism 43, and a rotating shaft 44 as a component for conveying control. The gas supply mechanism includes a gas inlet pipe 47 as a component for controlling the flow rate of processing gases supplied to the processing furnace 28. The gas exhaust mechanism includes an exhaust pipe 48, an APC valve 41, and a vacuum pump (not shown) as components for controlling the flow rate of exhaust gases from the processing furnace 28. The heating mechanism includes a heater unit 49 as a component for heating the processing furnace 28.

[0048] Figure 5 is a block diagram showing an example of the functional configuration of the control device 100 provided in the substrate processing apparatus 1 and the management device 70 in the first embodiment. Furthermore, since the control device 100 of the substrate processing apparatus 1 and the control device 100 of the management device 70 have the same configuration in this embodiment, the description will be based on the control device 100 of the substrate processing apparatus 1.

[0049] As shown in Figure 5, the substrate processing apparatus 1 includes a main controller, i.e., a control device 100, an external communication unit 201, an external memory unit 210, an operation unit 212, a display unit 204, a process control unit 205, a transport control unit 206, and a sensor unit 207 as a detection unit.

[0050] The control device 100 includes a device control unit 101, a memory unit 104, and an I / O (Input / Output) port 105.

[0051] The device control unit 101 includes a central processing unit (CPU) 102 and random access memory (RAM) 103.

[0052] The CPU 102 is the central processing unit, which executes various programs and controls various parts. The RAM 103 serves as a working area to temporarily store programs or data. The memory unit 104 stores various programs and various data. That is, the CPU 102 of the control device 100 in this embodiment functions as the device control unit 101 by writing the programs stored in the memory unit 104 into the RAM 103 and executing them.

[0053] The memory unit 104 may be a hard disk drive (HDD), a solid-state drive (SSD), or flash memory. The memory unit 104 stores various recipe files, such as recipes defining processing conditions and procedures; control program files for executing these recipe files; parameter data (set value files) for setting processing conditions and procedures; and error handling program files and error handling parameter data. In addition, it stores various screen files (not shown) containing input screens for inputting process parameters. In this embodiment, the memory unit 104 stores a component management program 104A, component data 104B, sensor standard data 104C, and sensor measurement data 104D for managing the constituent components of the substrate processing device 1.

[0054] The component management program 104A is a program used to execute processing including memory processing and display processing, which will be described later. Furthermore, the program can be pre-installed in the board processing device 1, for example. The program can be implemented by recording on a non-volatile recording medium or distributing it via a network and then appropriately installing it in the board processing device 1. Furthermore, examples of non-volatile recording media include CD-ROMs, magneto-optical discs, HDDs, DVD-ROMs, flash memory, memory cards, and USB drives.

[0055] Figure 6 is a schematic diagram of one example of component data 104B in the first embodiment.

[0056] As shown in Figure 6, Component Data 104B is a collection of information related to the components. Component Data 104B consists of items including item number, component name, type, testing method, location, association, standard service life, and predicted service life. Furthermore, Component Data 104B includes warning levels as predetermined grades and judgment points (hereinafter also referred to as warning points). The warning level indicates the quality status of the component as determined by the data judgment unit 100B (described later) (illustration omitted).

[0057] The item number field reads the component management program in the order described later. In principle, it is displayed on the display unit 204 according to the item number sequence. The component name field indicates the name of the component that is subject to maintenance management. The type field indicates the type of component. The detection method field indicates whether an abnormality is detected by any of the sensors in the sensor unit 207 described later. The location field indicates the location where each component exists. The associated field indicates the type of gas used, the mechanism used, etc. The standard service life field indicates the standard service life of each component, such as the service life appropriately set according to the component manufacturer's recommended value or the component's specification value. The predicted service life field indicates the service life of each component as the expected service life calculated by the data calculation unit 100C described later (see Figure 7). Furthermore, Figure 6 is only one embodiment, and the items are configured to be added or deleted at will.

[0058] The sensor standard data 104C in Figure 5 stores standard data (hereinafter also referred to as standard data) for each component as comparison information. The standard data is data compared with the detection data acquired by the sensor unit 207 during the operation of each component. The standard data and detection data include sound data, image data, temperature data, odor data, and pressure data, etc. Furthermore, the standard data and detection data are represented as time-series data such as waveforms, physical quantities such as averages and extreme values, and image information such as pixel data and color depth. For example, the standard data stores a standard service life period, i.e., the detection data when each component operates according to the component manufacturer's recommended values ​​or the component's specifications. Furthermore, the standard data can also be set as the average value of the detection data of each component during normal operation of the substrate processing device 1. Additionally, the sensor measured data 104D stores the detection data (hereinafter also referred to as measured data) of each component as status information actually detected by the sensor unit 207 (described later).

[0059] The control device 100 is connected to the operation unit 212, and is also connected to the process control unit 205, the transport control unit 206, and the sensor unit 207 via I / O 105. The control device 100 is electrically connected to each of the process control unit 205, the transport control unit 206, and the sensor unit 207 via I / O 105, thus enabling it to transmit and receive data, download and upload files, etc.

[0060] The control device 100 is connected to the management device 70 and an external host computer (not shown) via an external communication unit 201. For example, the control device 100 uses the external communication unit 201 to connect to networks such as the Internet, Local Area Network (LAN), and Wide Area Network (WAN), thereby enabling communication with external machines via the network. Therefore, even if the board processing device 1 is installed in a cleanroom, the management device 70, host computer, etc., can be placed in an office outside the cleanroom. Furthermore, an external memory unit 210, serving as a mounting unit, is connected to the control device 100. This external memory unit 210 allows for the insertion and removal of recording media such as Universal Serial Bus (USB) memory.

[0061] The operation unit 212 is a so-called touch panel, which integrally incorporates the display unit 204 or is connected to the display unit 204 via a video cable or the like. The operation unit 212 causes the display unit 204 to display information generated within the board processing device 1 via an operation screen. Furthermore, the operation unit 212 can output, for example, the information displayed on the display unit 204 to a device such as a USB memory inserted into the external memory unit 210. The operation unit 212 receives input data (input instructions) from the operation screen displayed on the display unit 204 and sends the input data to the control device 100.

[0062] The display unit 204 is configured to display information about the constituent components of the substrate processing apparatus 1. Furthermore, the display unit 204 is configured to display various operation screens for operating the substrate processing apparatus 1. These operation screens include displays for confirming the status of the substrate processing system controlled by the process control unit 205 and the substrate transport system controlled by the transport control unit 206. The display unit 204 may also be equipped with operation buttons as inputs for inputting action instructions to the substrate processing system and the substrate transport system. Here, the operation unit 212 and the display unit 204 are either separate from the control device 100 or can be integrated into the control device 100.

[0063] The process control unit 205 includes a temperature control unit, a gas flow control unit (serving as an ambient gas control unit), a pressure control unit, and a sequencer (illustrations omitted here). These temperature control unit, gas flow control unit, pressure control unit, and sequencer each constitute a sub-controller, which is electrically connected to the process control unit 205, thus enabling the transmission and reception of various data, and the downloading and uploading of various files. Furthermore, the process control unit 205 and each sub-controller (i.e., the temperature control unit, gas flow control unit, pressure control unit, and sequencer) can be configured separately or as a single unit.

[0064] The temperature control unit is connected to a heating mechanism mainly composed of a temperature sensor and a heater unit 49. At this time, based on the temperature information detected by the temperature sensor, which acts as a temperature detector, feedback control is performed on the power supply of the heater unit 49 so that the temperature inside the processing chamber 29 becomes a predetermined temperature (film formation temperature).

[0065] The pressure control unit is connected to a gas discharge mechanism mainly composed of a pressure sensor, an APC valve 41 acting as a pressure valve, and a vacuum pump. The pressure controller is configured to control the opening degree of the APC valve 41 and the switching (opening and closing) of the vacuum pump based on the pressure value detected by the pressure sensor, so that the pressure in the processing chamber 29 reaches the desired pressure at the desired time point.

[0066] The gas flow control unit is composed of MFCs (MFCs 51, 53, 55, 57, etc.) as flow control components. The sequencer is configured to control the supply and stop of gas from the gas inlet pipe 47 by opening and closing valves (valve 52, 54, 56, 58, etc.). Furthermore, the process control unit 205 is configured to control the MFCs and the sequencer so that the flow rate of gas supplied to the processing chamber 29 reaches the desired flow rate at the desired time point.

[0067] The transport control unit 206 includes a mechanism control unit, which is not shown in the figure here. This mechanism control unit is configured to control the drive system, the rotation system, and the lifting system of the substrate processing apparatus 1. For example, the transport control unit 206 is configured to control the transport operations of the transport mechanisms, including the cassette transport mechanism 15, the substrate transfer mechanism 24, the crystal boat elevator 32, the rotation mechanism 43, and the rotation shaft 44.

[0068] The sensor unit 207 includes various sensors for detecting the state of each constituent component used in the substrate processing apparatus 1, which are not shown in the figure here. The sensor unit 207 includes, for example, a sound sensor (e.g., a microphone) for detecting the operating sound of each constituent component during the operation of the substrate processing apparatus 1, an image sensor (e.g., a camera) for detecting the color, expansion, etc. of each constituent component, a temperature sensor for detecting the temperature of each constituent component, an odor sensor for detecting the odor of each constituent component, and a pressure sensor for detecting the pressure of each constituent component.

[0069] Furthermore, the functions of the device control unit 71, CPU 72, RAM 73, memory unit 74, and I / O 75 of the management device 70 are the same as those of the device control unit 101, CPU 102, RAM 103, memory unit 104, and I / O 105 of the control device 100. Also, the functions of the external communication unit 81, external memory unit 80, operation unit 82, and display unit 84 electrically connected to the management device 70 are the same as those of the external communication unit 201, external memory unit 210, operation unit 212, and display unit 204.

[0070] (Function of the control device) Figure 7 is a schematic diagram illustrating one example of the functional configuration of the control device 100 in the first embodiment. The control device 100 of this embodiment functions as a data acquisition unit 100A, a data determination unit 100B, a data calculation unit 100C, a data update unit 100D, a data display unit 100E, and a data transmission unit 100F by executing a component management program 104A on a CPU 102.

[0071] The data acquisition unit 100A has the function of acquiring data associated with the constituent components. For example, the data acquisition unit 100A acquires the detection data of each constituent component detected by the sensor unit 207 and stores it in the sensor measurement data 104D of the memory unit 104 (see Figure 5). In addition, the data acquisition unit 100A acquires the warning level determined by the data determination unit 100B (described later) and the warning time point as the determination time point.

[0072] The data determination unit 100B has the function of determining the quality status of constituent components. Specifically, the data determination unit 100B determines the warning level indicating the quality status of the constituent components by comparing measured data with standard data. For example, the data determination unit 100B compares the sound data stored in the sensor measured data 104D (see Figure 5) acquired by the data acquisition unit 100A with the sound data stored in the sensor standard data 104C (see Figure 5) of the memory unit 104, thereby determining the sound level (i.e., warning level) of the sound detected from the constituent components. More specifically, the data determination unit 100B compares the sound waveform measured from the constituent components with the standard data, and determines the sound level by the misalignment of the peak on the time axis, the misalignment of the peak size, etc. Furthermore, the determination based on sound data is only one embodiment; the data determination unit 100B can also determine the quality status of the constituent components using other types of detection data. The data determination unit 100B determines the quality status of the components based on various types of detection data detected by the sensor unit 207, such as odor, discoloration, shape change, and surface temperature of the components.

[0073] Furthermore, the data determination unit 100B can determine the warning level indicating the quality status of a component based on the number of times the wear and tear of the component may worsen. Moreover, the data determination unit 100B can determine the warning level indicating the quality status of a component by comparing measured data with each other.

[0074] The data calculation unit 100C has the function of calculating the predicted service life of each component based on the quality status of each component. For example, the data calculation unit 100C calculates the predicted service life of the component by shortening the corresponding period from the standard service life according to the sound level determined by the data determination unit 100B.

[0075] Figure 8 is an explanatory diagram illustrating the shortening of the service life of the constituent components in the first embodiment. As shown in Figure 8, in this embodiment, the sound level (i.e., warning level) is set from 0 to 3. As the sound level increases from 0 to 3, the difference between the sound waveform of the measured data and the sound waveform of the standard data becomes greater. Furthermore, as the sound level increases from 0 to 3, the possibility of increased wear and tear on the constituent components becomes higher, indicating a higher recommendation for replacement of the constituent components. Moreover, as the sound level increases from 0 to 3, the time for shortening the predicted service life of the constituent components is set longer. Here, the data acquisition unit 100A acquires, for example, the time point at which the sound level is determined to be 1 or higher and 3 or lower.

[0076] For example, when the sound level is determined to be 0, the difference rate of the measured data's sound waveform peaks relative to the standard data is extremely low (e.g., 0% or more but less than 10%), and the predicted service life of the component is not shortened. When the sound level is determined to be 1, the difference rate of the measured data's sound waveform peaks relative to the standard data is low but requires attention (e.g., 10% or more but less than 30%), and the predicted service life of the component is shortened by 2 weeks from the standard service life. When the sound level is determined to be 2, the difference rate of the measured data's sound waveform peaks relative to the standard data is relatively high (e.g., 30% or more but less than 50%), and the predicted service life of the component is shortened by 4 weeks from the standard service life. When the sound level is determined to be 3, the difference rate of the measured data's sound waveform peaks relative to the standard data is extremely high (e.g., 50% or more), and the predicted service life of the component is shortened by 10 weeks from the standard service life. That is, in the measured data of the components, when the warning level, which is determined to be a difference level, is 1 or higher than a predetermined value, the predicted service life of the components is calculated by shortening the standard service life to the period corresponding to the warning level.

[0077] Furthermore, each time such a warning level is determined, the predicted lifespan of the component can be shortened to the period corresponding to that warning level. Alternatively, the predicted lifespan of the component can be set according to the warning level. For example, when a warning level indicating the quality of a component is determined to be 1, the predicted lifespan of that component can be set to 40 weeks. When a warning level indicating the quality of a component is determined to be 2, the predicted lifespan of that component can be set to 30 weeks. And when a warning level indicating the quality of a component is determined to be 3, the predicted lifespan of that component can be set to 20 weeks.

[0078] The data updating unit 100D in Figure 7 has the function of updating the component data of each constituent component. Specifically, the data updating unit 100D updates the predicted service life, the determined warning level, and the warning time point of the constituent components. For example, the data updating unit 100D updates the value in the predicted service life column of the component data 104B in the memory unit 104 (see Figure 6) to the predicted service life calculated by the data calculation unit 100C. Furthermore, the data updating unit 100D stores the warning level and warning time point acquired by the data acquisition unit 100A in the component data 104B.

[0079] The data display unit 100E has the function of displaying the service life, warning level, and warning time of each component. For example, the data display unit 100E establishes a correlation between the warning level determined by the data determination unit 100B, the warning time acquired by the data acquisition unit 100A, and the predicted service life calculated by the data calculation unit 100C, and displays them on the display unit 204. Furthermore, the data display unit 100E can simultaneously display the predicted service life before and after the update performed by the data update unit 100D.

[0080] Furthermore, the data display unit 100E has the function of changing the color of the image for display. For example, based on the warning level determined by the data determination unit 100B, it changes the color of the image representing the warning time point for display.

[0081] The data transmission unit 100F has the function of transmitting component data of each constituent component to the management device 70, an external host computer, etc., via the external communication unit 201. Furthermore, the data transmission unit 100F can transmit data for display on the screen described later (see Figures 9 to 12) to the management device 70, an external host computer, etc. The management device 70, for example, displays the screen described later on the display unit 84 based on data received via the external communication unit 81.

[0082] (Screenshot displayed) Next, the display screen of the display unit 204 in this embodiment will be described with reference to FIG9.

[0083] Figure 9 is a schematic diagram showing one example of the display screen of the display unit 204 in the first embodiment. As shown in Figure 9, the display unit 204 displays time information indicating the service life of each constituent component, a service life image 600 as a bar graph, a warning image 602 indicating quality information indicating warning level and warning time, a scale image 604 indicating a time axis, and a date and time marker 606 indicating the current date and time. The service life image 600 of this embodiment includes a service life image 600A indicating the predicted service life after being updated by the data update unit 100D, and a service life image 600B indicating the predicted service life before being updated by the data update unit 100D. Furthermore, the warning image 602 of this embodiment includes a warning image 602Y corresponding to the case of warning level 1, a warning image 602O corresponding to the case of warning level 2, and a warning image 602R corresponding to the case of warning level 3. The quality information indicates information on the quality level of the component. Time information refers to information about the assumed lifespan of the components.

[0084] Here, the durability period image 600 is overlaid on the scale image 604. For example, the durability period image 600A is displayed as a blue rounded rectangle, overlaid on the durability period image 600B. Also, the durability period image 600B is displayed transparently as a dotted rounded rectangle. The durability period images 600 corresponding to each constituent component are displayed in the column corresponding to that constituent component. Furthermore, the durability period is represented by the length of the durability period image 600 in the left-right direction. Here, in the description of the display screen, "left direction" and "right direction" are consistent with the left and right directions of the display unit 204.

[0085] Warning image 602 is displayed superimposed on durability period image 600 at the positions representing the warning time points. For example, warning image 602Y is displayed as a yellow rectangle at the position representing the time point where warning level 1 is determined. Warning image 602O is displayed as an orange rectangle at the position representing the time point where warning level 2 is determined. Furthermore, warning image 602R is displayed as a red rectangle at the position representing the time point where warning level 3 is determined.

[0086] Scale image 604 represents a time scale image displaying the service life of the components. For example, scale image 604M represents a time scale image displayed by month, with the number representing the month displayed in each cell at the top. Furthermore, the names of each component are displayed column by column on the left. Alternatively, scale image 604 can also be an image representing a time scale in units such as minutes, hours, days, weeks, months, quarters, half-years, and years.

[0087] The date and time marker 606 is displayed overlapping the durability period image 600 and the warning image 602 at the position corresponding to the current date and time. For example, the date and time marker 606 is displayed as a black vertical solid line spanning multiple columns.

[0088] In this embodiment, as an example, as shown in Figure 9, the predicted service life, warning level, and warning time point of components A and B are displayed. In Figure 9, the scale image 604M is displayed, and the date and time marker 606 is displayed at a position indicating approximately late June. Furthermore, the display of information related to components A and B is only one embodiment, and its configuration allows for the addition or deletion of any constituent components. Also, constituent components can be displayed according to each categorized group. For example, constituent components can be categorized and displayed according to each item (e.g., type, testing method, location, related information, etc.) included in component data 104B. The display of the columns corresponding to components A and B will be explained below.

[0089] In the column corresponding to component A, the durability period image 600A is displayed from approximately early January to approximately late July. Furthermore, the durability period image 600B is displayed from approximately early January to approximately early September, and is superimposed on the durability period image 600A. Thus, the durability period image 600B is displayed without being obscured by the durability period image 600A from approximately late July to approximately early September. Additionally, warning images 602Y are displayed at positions indicating approximately late February, mid-March, and early April. Warning images 602O are displayed at positions indicating approximately late April and mid-May. Warning image 602R is displayed at a position indicating approximately early June.

[0090] In the column corresponding to component B, the durability period image 600A is displayed from a position indicating approximately mid-December to a position indicating approximately early September. Furthermore, warning image 602 is not displayed.

[0091] Thus, by overlaying warning images 602Y, 602O, and 602R onto the durability period image 600A corresponding to component A, the time points at which the potential deterioration of component A is determined and the warning levels at those time points are displayed. Furthermore, by displaying the durability period image 600B corresponding to component A, it is shown that the predicted durability of component A has been shortened by 6 weeks. That is, there are time points at which warning level 2 and warning level 3 are determined for component A, thus showing that the predicted durability of component A has been shortened by 4 weeks from the standard durability, and then by another 6 weeks (i.e., shortened by 10 weeks from the standard durability). On the other hand, the durability period image 600A corresponding to component B does not display warning image 602. Also, the durability period image 600B corresponding to component B is not displayed. That is, there are no time points at which warning level 1 or higher is determined for component B, thus showing that the predicted durability of component B has not been shortened.

[0092] Furthermore, the information shown in the durability period image 600 and the warning image 602 can be displayed in text format. For example, the information shown in the durability period image 600 might be displayed as "January 1st to December 1st," and the information shown in the warning image 602 might be displayed as "Warning Level 1: February 1st, Warning Level 2: October 1st & October 5th, Warning Level 3: October 10th." Also, if a component is still in use after the predicted durability period has expired, it will display "Predicted durability period exceeded. Replacement of the component is strongly recommended." Furthermore, the number of times the wear and tear of each component may worsen can be displayed using a radar chart. For example, the radar chart might display the number of warnings up to the current time for components A through F.

[0093] Next, referring to Figures 10 to 12, examples of changes in the display screen of the display unit 204 in this embodiment, which differ from that in Figure 9, will be described. Other configurations are the same as the display screen shown in Figure 9, and elements that are substantially the same as those described in Figure 9 are marked with the same symbols and their descriptions are omitted.

[0094] (Example 1 of screen display changes) Figure 10 is a schematic diagram showing a variation (Variation 1) of the display screen of the display unit 204 in the first embodiment. As shown in Figure 10, the display unit 204 displays a durability period image 600, a scale image 604, a date and time marker 606, and a prediction marker 608 indicating the end of the predicted durability period of each constituent component as a lifespan indicator. In this variation, the durability period image 600B includes a durability period image 600BY corresponding to the case where the last measured warning level is 1, and a durability period image 600BO corresponding to the case where the last measured warning level is 2. For example, the durability period image 600BY is displayed in yellow, and the durability period image 600BO is displayed in orange.

[0095] Here, the prediction mark 608 is displayed overlapping the durability period image 600 at the position indicating the end of the predicted durability period for each component. The prediction mark 608 is displayed, for example, as a star-shaped image.

[0096] In this embodiment, as an example, Figure 10 shows the predicted service life and warning level of component A and component B. The following explanation details the display of the columns corresponding to component A and component B.

[0097] In the column corresponding to component A, the orange durability period image 600BO is displayed from a position indicating approximately early January to a position indicating approximately early October. Furthermore, the prediction marker 608 is displayed at a position indicating approximately early September.

[0098] In the column corresponding to component B, the yellow durability period image 600BY is displayed from a position indicating approximately mid-December to a position indicating approximately early September. Furthermore, the forecast marker 608 is displayed at a position indicating approximately late August.

[0099] Thus, by displaying the orange durability period image 600BO in the column corresponding to component A, it is shown that the latest warning level for component A is 2. Furthermore, by displaying the prediction mark 608 overlaid on the durability period image 600BO in the column corresponding to component A, it is shown that the predicted durability period of component A has been shortened by 4 weeks from the standard durability period. That is, there is a point in time when component A is judged to have a warning level of 2, therefore, it is shown that the predicted durability period of component A has been shortened by 4 weeks. On the other hand, by displaying the yellow durability period image 600BY in the column corresponding to component B, it is shown that the latest warning level for component B is 1. Furthermore, by displaying the prediction mark 608 overlaid on the durability period image 600BY in the column corresponding to component B, it is shown that the predicted durability period of component A has been shortened by 2 weeks. That is, there is a point in time when component B is judged to have a warning level of 1, therefore, it is shown that the predicted durability period of component B has been shortened by 2 weeks from the standard durability period. Furthermore, the durability period image 600 may also include a durability period image 600 indicating that the latest warning level is 3. In addition, the control device 100 of this embodiment can not only change the color of the durability period image 600, but also make the durability period image 600 flash or display messages (such as messages prompting the replacement of parts, the inventory of parts, the serial number of the replacement parts, etc.).

[0100] (Example 2 of screen display changes) Figure 11 schematically illustrates a variation of the display screen of the display unit 204 in the first embodiment (Variation Example 2). As shown in Figure 11, the display unit 204 displays a durability period image 600, a scale image 604, and date and time markers 606. In this variation, the durability period image 600A is displayed by changing its color. The color is changed from a light skin tone corresponding to the warning time point to a light skin tone corresponding to the warning level 1, and a red color corresponding to the warning level 2, starting from the position corresponding to each warning time point.

[0101] In this embodiment, as an example, Figure 11 shows the predicted service life, warning time point, and warning level of component A and component B. The following explanation will focus on the columns corresponding to component A. Furthermore, the columns corresponding to component B are the same as in Figure 9, therefore their explanation is omitted.

[0102] In the column corresponding to component A, the durability period image 600A is displayed in blue from approximately early January to approximately mid-February. Furthermore, the durability period image 600A is displayed in light skin tone from approximately mid-February to approximately mid-April. And, the durability period image 600A is displayed in red from approximately mid-April to approximately late July.

[0103] Thus, by displaying the durability period image 600A in a color-changing manner in the column corresponding to component A, the system displays the time points at which a warning level of 1 (first level) or 2 (second level) is determined for component A. Furthermore, around mid-February, when the durability period image 600A turns light skin tone, a time point at which a warning level of 1 is determined is indicated. And around mid-April, when the durability period image 600A turns red, a time point at which a warning level of 2 is determined is indicated. Moreover, if there are no warning time points within the predetermined period after the durability period image 600A turns light skin tone, the color of the durability period image 600 can be changed back to blue. By changing the color of the durability period image 600 back to blue, the user can be informed that an occasional noise has been detected. Additionally, the durability period image 600 can also be changed to the color corresponding to a warning level of 3 from the position corresponding to the time point at which a warning level of 3 is determined.

[0104] (Example 3 of screen display changes) Figure 12 is a schematic diagram showing a variation example (variation example 3) of the display screen of the display unit 204 in the first embodiment. As shown in Figure 12, the display unit 204 displays a durability period image 600, a warning image 602, a scale image 604, and a date and time marker 606.

[0105] The warning image 602, in a variation example, changes its width according to the frequency of the warning level and the warning time. Furthermore, the scale image 604 is a scale image 604W representing a time scale displayed in weeks, with the date of the start of the week displayed in each cell at the top. Additionally, the date and time marker 606 is displayed in the position indicating the current date. Moreover, in addition to changing its width, the warning image 602 can also have its color density changed.

[0106] In this embodiment, as an example, Figure 12 shows the predicted service life, warning time point, and warning level of component A and component B. The following explanation describes the display of the columns corresponding to component A. Furthermore, the column system corresponding to component B is the same as in Figure 9, therefore its description is omitted.

[0107] In the column corresponding to component A, the durability period image 600A is displayed from the left end, indicating the start of the week of March 1st, to the right end, indicating the end of the week of April 26th. Also, warning image 602Y is displayed from the position indicating March 11th to the position indicating March 14th, and at the position indicating March 12th. Warning image 602O is displayed from the position indicating March 27th to the position indicating March 31st. Warning image 602R is displayed from the position indicating April 6th to the position indicating April 7th.

[0108] Thus, by displaying warning images 602Y, 602O, and 602R overlapping with warning image 602 in the durability period image 600A corresponding to component A, the time points at which the potential deterioration of component A may occur and the warning levels at those time points are displayed. Furthermore, by changing the width of warning image 602Y, the frequency of time points where warning level 1 is determined is shown within the period indicated by that width. Similarly, by changing the width of warning image 602O, the frequency of time points where warning level 2 is determined is shown within the period indicated by that width. Finally, by changing the width of warning image 602R, the frequency of time points where warning level 3 is determined is shown within the period indicated by that width.

[0109] Furthermore, the results of detailed analysis of abnormal states can also be displayed on the display unit 204. For example, when sound is detected as an abnormal state, a scatter plot is displayed with the vertical axis set to volume and the horizontal axis set to frequency. In this case, markers corresponding to the warning level can be plotted on the scatter plot at the time point when the abnormality is detected. By plotting markers at each time point when the abnormality is detected, the distribution and density related to volume and frequency can be displayed, thus identifying which component is malfunctioning or the level of abnormality of the component. For example, when the frequencies of abnormal sounds in the lifting shaft and the rotating shaft are different, the abnormal state of each component can be determined separately using the frequency of the abnormal sound as a reference. Furthermore, for example, when a new marker appears at a frequency that deviates from the marker group distributed in a specific frequency band, the abnormal state of a component different from the component monitored in that specific frequency band can be determined.

[0110] (flow chart) Figure 13 is a flowchart illustrating an example of the memory processing flow in the first embodiment. The CPU 102 of the control device 100 reads the program from the memory unit 104 and executes it in the RAM 103, thereby performing the memory processing (see Figure 5). As an example, the memory processing shown in Figure 13 is repeatedly executed during the operation of the substrate processing device 1.

[0111] In step S100 of Figure 13, CPU 102 acquires the measured data. Specifically, CPU 102 acquires the measured data from sensor measured data 104D (see Figure 5).

[0112] In step S101, CPU 102 compares the acquired measured data with standard data. Specifically, CPU 102 compares the measured data acquired in step S100 with the standard data of sensor standard data 104C (see Figure 5) corresponding to the measured data.

[0113] In step S102, CPU 102 determines whether the difference between the measured data and the standard data exceeds a predetermined range. For example, CPU 102 determines whether the difference ratio of the peak of the sound waveform of the measured data relative to the standard data is greater than 10%. If CPU 102 determines that the difference exceeds the predetermined range (step S102: YES), it proceeds to step S103. If CPU 102 determines that the difference does not exceed the predetermined range (step S102: NO), it returns to step S100.

[0114] In step S103, CPU 102 obtains the time point when the difference exceeds the predetermined range, i.e., the warning time point. Specifically, CPU 102 obtains the time point in step S102 when the difference is determined to exceed the predetermined range.

[0115] In step S104, the CPU 102 determines the warning level of the component based on the difference between the measured data and the standard data. For example, the CPU 102 determines the warning level based on the magnitude of the difference ratio between the peak values ​​of the sound waveforms of the measured data and the standard data.

[0116] In step S105, CPU 102 memorizes the warning time point and the warning level of the component. Specifically, CPU 102 memorizes the warning time point obtained in step S103 and the warning level of the component determined in step S104 in component data 104B (see Figure 5). Then, CPU 102 ends the memorization process.

[0117] Figure 14 is a flowchart illustrating an example of the display processing flow in the first embodiment. The CPU 102 of the control device 100 reads the program from the memory unit 104 and executes the program in the RAM 103, thereby performing the display processing. As an example, the display processing shown in Figure 14 is executed when the user operates the operation unit 212.

[0118] In step S200 of Figure 14, CPU 102 obtains the standard service life, predicted service life, warning level, and warning time point of the constituent components. Specifically, CPU 102 obtains the standard service life, predicted service life, warning level, and warning time point from component data 104B.

[0119] In step S201, CPU 102 calculates the predicted durability of the component based on the acquired standard durability and warning level.

[0120] In step S202, CPU 102 updates the predicted durability of the constituent components. Specifically, CPU 102 updates the predicted durability stored in component data 104B to the predicted durability calculated in step S201.

[0121] In step S203, CPU 102 displays a durability period image 600 showing the predicted durability period of the constituent components before the update. For example, CPU 102 displays a durability period image 600B showing the predicted durability period obtained in step S200 on display unit 204.

[0122] In step S204, CPU 102 displays a durability period image 600 showing the predicted durability period of the updated constituent components. For example, CPU 102 displays a durability period image 600A showing the predicted durability period calculated in step S201 on display unit 204.

[0123] In step S205, the CPU 102 overlays the warning image 602, representing the warning time point, onto the durability period image 600 with a color corresponding to the warning level. For example, at the position representing the warning time point obtained in step S200, the CPU 102 overlays the warning images 602Y, 602O, and 602R, corresponding to the warning level, onto the durability period image 600 and displays them on the display unit 204. Then, the CPU 102 ends the display process. Furthermore, the display of each image can be summarized and displayed on the display unit 204.

[0124] (Summary of the first implementation mode) Based on this state, one or more of the following effects can be obtained.

[0125] The substrate processing apparatus 1 of the first embodiment displays a durability period image 600 and a warning image 602, respectively, at each warning time point where a warning level is determined, in a state that is correlated with the predicted durability period. The durability period image 600 indicates the predicted durability period of at least one of the processing components, flow control components, and transport control components that can operate. The warning image 602 indicates that the quality condition of the component is determined to be at a predetermined warning level. The processing components are used in the processing furnace, the flow control components are used in the gas supply mechanism or gas discharge mechanism, and the transport control components are used in the transport mechanism. Therefore, the substrate processing apparatus 1 of this embodiment can inform the user of the component status and the replacement period of the component. Furthermore, the substrate processing apparatus 1 of this embodiment can continuously inform the user of the deterioration status of the components over time by correlating and displaying a plurality of time points exceeding the predetermined level with the predicted durability period. Moreover, as a review of component replacement, it is possible to predict the time points of abnormality. Furthermore, the ability to display multiple warning images within a fixed period can raise users' awareness of component replacement.

[0126] In the first embodiment of the substrate processing apparatus 1, the warning level indicates the recommendation level for replacing the constituent components. Therefore, according to the substrate processing apparatus 1 of this embodiment, by establishing and displaying the quality information of the constituent components and the judgment time point, the user's awareness of component replacement can be further improved.

[0127] In the substrate processing apparatus 1 of the first embodiment, the conveying mechanism includes a substrate transfer mechanism 24 capable of conveying a substrate 18 and a plurality of axes, and the conveying control components include the plurality of axes. Therefore, according to the substrate processing apparatus 1 of this embodiment, abnormalities can be determined based on abnormal sounds from the axes.

[0128] In the substrate processing apparatus 1 of the first embodiment, the flow control component includes at least one of the following: valves (valve 52, 54, 56, 58 and APC valve 41, etc.) provided in the gas supply mechanism or gas discharge mechanism, MFC (MFC 51, 53, 55, 57, etc.), and vacuum pump. Therefore, the substrate processing apparatus 1 according to this embodiment can continuously detect the state of the valves that are switched at high speed.

[0129] In the substrate processing apparatus 1 of the first embodiment, the processing furnace 28 has a processing chamber 29 for storing substrates 18 and a sealing cover 34 adjacent to the processing chamber 29, and the processing component includes the sealing cover 34. Therefore, according to the substrate processing apparatus 1 of this embodiment, the quality status of the component can be determined by the sound emitted by the sealing cover 34.

[0130] In the substrate processing apparatus 1 of the first embodiment, the quality status of the constituent component is determined based on at least one of the measured data, including sound data, image data, temperature data, and odor data, obtained from the constituent component. Therefore, the substrate processing apparatus 1 of this embodiment determines the quality status based on at least one of the operating sound, image, video, heat, and odor of the detectable component, thus enabling the determination of a higher accuracy in quality status.

[0131] The substrate processing apparatus 1 of the first embodiment includes standard data for comparison with measured data. When the measured data is compared with the standard data and the warning level is 1 or higher (e.g., the difference ratio of the peak of the sound waveform is 10% or higher), a warning image 602 is displayed. Therefore, according to the substrate processing apparatus 1 of this embodiment, the warning level can be reliably determined by comparing the measured data with the standard data.

[0132] In the substrate processing apparatus 1 of the first embodiment, warning images 602 are displayed in different colors according to the warning level. For example, status information with an extremely high warning level (i.e., status information with an extremely high recommendation for component replacement) is displayed in red. Status information with a relatively high warning level (i.e., status information with a relatively high recommendation for component replacement) is displayed in orange. Furthermore, status information with a relatively low warning level (i.e., status information with a relatively low recommendation for component replacement) is displayed in yellow. Therefore, the substrate processing apparatus 1 according to this embodiment can indicate the recommendation level for component replacement to the user by using images representing the warning level.

[0133] In the substrate processing apparatus 1 of the first embodiment, the warning image 602 has a pattern representing a plurality of warning levels corresponding to the quality status of the constituent components, and the durability period image 600 is displayed by changing accordingly with the plurality of warning levels. Therefore, the substrate processing apparatus 1 according to this embodiment can suggest the degree of component replacement to the user by using an image representing the predicted durability period of the constituent components.

[0134] In the substrate processing apparatus 1 of the first embodiment, a durability period image 600 is overlaid on a scale image 604. If the warning level indicating the quality condition of a component is determined to be 1, the durability period image 600 after the determined time point is displayed in light skin tone. Furthermore, if the warning level indicating the quality condition of a component is determined to be 2, the durability period image 600 after the determined time point is displayed in red. Therefore, the substrate processing apparatus 1 of this embodiment can provide users with recommendations for component replacement by displaying images indicating the predicted durability period of a component.

[0135] In the substrate processing apparatus 1 of the first embodiment, the durability period image 600 represents the predicted durability period of the constituent components. The substrate processing apparatus 1 calculates the predicted durability period of the constituent components according to their quality condition and displays the calculation result on the display unit 204. Therefore, the substrate processing apparatus 1 of this embodiment can prompt users to replace components by recalculating the lifespan at any time according to the quality condition and displaying it flexibly.

[0136] In the substrate processing apparatus 1 of the first embodiment, the durability period image 600 is displayed on the display unit 204 by shortening the predicted durability period of the constituent component based on the warning level indicating the quality status of the constituent component, or by overlaying a prediction mark 608 on the durability period image 600 and displaying it on the display unit 204. Therefore, the substrate processing apparatus 1 of this embodiment can prompt the user with the predicted durability period of the constituent component.

[0137] In the substrate processing apparatus 1 of the first embodiment, a durability period image 600A showing the predicted durability period after being updated by the data update unit 100D, and a durability period image 600B showing the predicted durability period before being updated by the data update unit 100D, are jointly displayed on the display unit 204. Therefore, according to the substrate processing apparatus 1 of this embodiment, the user can visually understand the shortening of the predicted durability period of the constituent components.

[0138] The substrate processing apparatus 1 of the first embodiment includes a sensor unit 207 that detects measured data of at least one of a processing component, a flow control component, and a conveying control component, and determines the quality status of the component based on the measured data. Therefore, the substrate processing apparatus 1 of this embodiment can determine the quality status with higher accuracy.

[0139] [Second Implementation] The substrate processing apparatus 1 of the first embodiment determines the warning level by comparing measured data with standard data to assess the quality status of the constituent components, and displays a warning image 602 indicating the determined warning level. However, it is not limited to this; the substrate processing apparatus 1 of this embodiment may display the warning image 602 when the number of times a predetermined warning level is determined in the measured data within a unit time (e.g., 24 hours) exceeds a predetermined number of times per unit time. Furthermore, the substrate processing apparatus 1 of this embodiment may display the warning image 602 when the difference between the measured data of the constituent components in the detection within a unit time is greater than a predetermined difference.

[0140] (flow chart) Figure 15 is a flowchart illustrating an example of the memory processing flow in the second embodiment. As an example, the memory processing shown in Figure 15 is executed every set unit of time.

[0141] In step S300 of Figure 15, CPU 102 acquires measured data of the constituent components per unit time. For example, CPU 102 acquires measured data of the most recent 24 hours for the self-sensor measured data 104D (see Figure 5).

[0142] In step S301, CPU 102 determines whether the number of times a warning level is determined exceeds a predetermined number. For example, CPU 102 determines whether the number of times a warning level of 1 is determined exceeds 5 times. If CPU 102 determines that the number of times a warning level is determined exceeds the predetermined number (step S301: YES), it proceeds to step S302. On the other hand, if CPU 102 determines that the number of times a warning level is determined does not exceed the predetermined number (step S301: NO), it proceeds to step S305.

[0143] In step S302, CPU 102 acquires the time point when the number of warnings exceeds a predetermined number. For example, CPU 102 acquires the most recent 24 hours as the warning time point, which is a period divided into units of time.

[0144] In step S303, the CPU 102 determines the warning level of the component based on the number of times a predetermined warning level is determined. For example, if the number of times a warning level of 1 is determined is 5 or more but less than 10, the CPU 102 determines the warning level of the component to be 1. Furthermore, if the number of times a warning level of 1 is determined is 10 or more, the CPU 102 determines the warning level of the component to be 2.

[0145] In step S304, CPU 102 memorizes the warning time point and the warning level of the component. Specifically, CPU 102 memorizes the warning time point obtained in step S302 and the warning level of the component determined in step S303 in component data 104B.

[0146] In step S305, CPU 102 determines whether the difference between the measured data within a unit time exceeds a predetermined difference. For example, CPU 102 uses a peak in the waveform of the sound data from the most recent 24 hours as a benchmark and determines whether it has a difference of more than 10% from another peak, which is considered a predetermined difference. If CPU 102 determines that the difference between the measured data within a unit time exceeds the predetermined difference (step S305: YES), it proceeds to step S306. On the other hand, if CPU 102 determines that the difference between the measured data within a unit time does not exceed the predetermined difference (step S305: NO), it terminates the memory processing.

[0147] In step S306, the CPU 102 acquires the time point when the time exceeds a predetermined difference, which is the warning time point. For example, the CPU 102 acquires the time point of another peak in the waveform of the sound data as the warning time point. Alternatively, it can acquire a period divided into units of time (e.g., the most recent 24 hours) as the warning time point.

[0148] In step S307, the CPU 102 determines the warning level of the component based on the difference in measured data. For example, if the difference in peaks in the waveform of sound data within a unit time is greater than 10% but less than 30%, the CPU 102 determines the warning level to be 1.

[0149] In step S308, the CPU 102 memorizes the warning time point and the warning level of the component. Specifically, the CPU 102 memorizes the warning time point obtained in step S306 and the warning level of the component determined in step S307 in the component data 104B. Then, the CPU 102 ends the memorization process.

[0150] (Summary of the second implementation mode) The second embodiment also achieves the same effect as described above. Furthermore, the second embodiment further achieves one or more of the effects shown below.

[0151] The substrate processing apparatus 1 of the second embodiment determines the warning level and displays a warning image 602 on the display unit 204 when predetermined conditions related to the quality status of the constituent components are met during the operation of the constituent components and during the detection within a unit time. Therefore, the substrate processing apparatus 1 of this embodiment can comprehensively determine the quality status of the constituent components based on the detection data within a unit time.

[0152] In the substrate processing apparatus 1 of the second embodiment, when the number of times the warning level indicating the quality condition of a component is determined to be 1 or higher exceeds a predetermined number during the detection within a unit time, a warning image 602 is displayed. Therefore, the substrate processing apparatus 1 according to this embodiment can prompt the user to replace the component when the warning level indicating the quality condition of the component is determined to be 1 or higher occurs frequently.

[0153] In the substrate processing apparatus 1 of the second embodiment, when the difference between the measured data of the constituent components exceeds a predetermined difference during the detection within a unit time, a warning image 602 is displayed. Therefore, according to the substrate processing apparatus 1 of this embodiment, the quality status of the constituent components can be determined solely based on the measured data of the constituent components, prompting the user to replace the constituent components.

[0154] [Other Implementation Forms] The substrate processing apparatus 1 in the first embodiment displays the durability period image 600 and the warning image 602 on the display unit 204. However, it is not limited to this; the management device 70 in this embodiment can display the durability period image 600 and the warning image 602 on the display unit 84 of the management device 70. Furthermore, the same effect as described above is obtained in other embodiments.

[0155] The management device 70 of this embodiment receives measured data from the sensor unit 207 of the board processing device 1 via the external communication unit 81, which serves as the receiving unit. The device control unit 71, which serves as the control unit, then displays the durability period image 600 and the warning image 602 on the display unit 84. Therefore, according to the management device 70 of this embodiment, even if the user is in a location far from the board processing device 1, the status of the constituent components and the replacement period of those components can be communicated to the user.

[0156] Furthermore, the management device 70 can also acquire information such as the type of process used by each substrate processing device 1, usage time, number of uses, and replacement information of constituent components, and display maintenance information prompting the replacement of each constituent component on the display unit 204 of each substrate processing device 1. According to the management device 70 of this embodiment, it can collect information on the same type of components and components located in the same location from a plurality of substrate processing devices 1, and compare the component data by the management device. That is, according to the management device 70 of this embodiment, by comparing with a normally operating substrate processing device 1, it is easy to grasp the quality status of the components of a specific substrate processing device 1.

[0157] The above-described forms and variations can be used in appropriate combinations. The processing procedures and conditions in this case can be the same as those in the above-described forms and variations. Furthermore, the configuration of the processing system 90, management device 70, and substrate processing device 1 described in the above-described forms and variations is a single example, and can be modified as needed without departing from the main theme.

[0158] Furthermore, the processing flow of the program described in the above implementation is also an example. Unnecessary steps can be deleted, new steps can be added, or the processing order can be changed without deviating from the main idea.

[0159] Furthermore, the above-described implementation describes a scenario where the implementation is achieved using a computer in software configuration by executing a program, but it is not limited to this. The implementation may also be achieved using hardware configuration, or a combination of hardware and software configuration.

[0160] Furthermore, in the above embodiments, CPU refers to processors in a broad sense, such as general-purpose processors including CPUs (Central Processing Units), special-purpose processors such as graphics processing units (GPUs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), and programmable logic elements.

[0161] Furthermore, the actions of the processor in the above embodiments can be completed not only by a single processor, but also by multiple processors located in physically isolated positions working together. Also, the order of the processor's actions is not limited to the order described in the above embodiments and can be appropriately changed.

[0162] In the above embodiments, an example of forming a film using a batch substrate processing apparatus that processes multiple substrates at a time is described. The present invention is not limited to the above embodiments; for example, it can also be preferably applied to the case of forming a film using a single-sheet substrate processing apparatus that processes one or more substrates at a time. Furthermore, in the above embodiments, an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace is described. The present invention is not limited to the above embodiments; it can also be preferably applied to the case of forming a film using a substrate processing apparatus having a cold-wall type processing furnace.

[0163] When using such substrate processing apparatus, each processing can be performed using the same processing procedures and processing conditions as in the above embodiments, and the same effect as in the above embodiments can be obtained.

[0164] 1: Substrate processing apparatus (processing device) 2: Frame 3: Front wall 4: Front maintenance port 5: Front maintenance door 6: Carton handling in and out 7: Front Baffle 8: Loading Port 9: Box 11: Rotating box rack 12: Pillar 13: Shelf 14: Box opener 15: Carton conveying mechanism 16: Subframe 17: Front Wall 18:Substrate 19:Substrate loading and unloading exit 21: Platform 22: Opening and closing mechanism 23: Transfer Chamber 24: Substrate transfer mechanism 25: Substrate mounting plate 26: Crystal Boat 27: Standby section 28: Processing Furnace (Processing Section) 29: Processing Room 31: Furnace opening baffle 32: Crystal Boat Elevator 33: Arm 34: Sealing cap 35: Cleaning Unit 36: Clean Air 41: APC valve 43: Rotating mechanism 44: Rotation axis 45: manifold 46a: Sealing component 47: Gas inlet tube 48: Exhaust pipe 49: Heater Unit 50: Reaction tube 51, 53, 55, 57: MFC 52, 54, 56, 58: Valves 70: Management device 71: Device Control Unit 72: CPU 73: RAM 74: Memory Department 75:I / O 80: External Memory Section 81:External Communications Department 82: Operations Department 84: Display Section 90: Processing System 100: Control device (control unit) 100A: Data Acquisition Department 100B: Data Judgment Department 100C: Data Calculation Department 100D: Data Update Department 100E: Data Display Department 100F: Data Dispatch Department 101: Device Control Unit 102: CPU 103: RAM 104: Memory Department 104A: Component Management Program 104B: Component Data 104C: Sensor Standard Data 104D: Sensor Measured Data 105:I / O 201:External Communications Department 204: Display Section 205: Process Control Department 206: Transport Control Department 207: Sensor Section 210: External Memory Section 212: Operations Department 600, 600A, 600B, 600BY, 600BO: Durability period images (time information) 602, 602Y, 602O, 602R: Warning Images (Quality Information) 604, 604M, 604W: Scaled Images 606: Date and Time Stamps 608: Prediction Marker A, B, F: Components

Claims

1. A display method comprising displaying time information and quality information at each point in time in which a quality status is determined, in a state associated with the time information; wherein the time information represents information relating to the usage time of at least one of a processing component, a flow control component, and a transport control component that is operable; the quality information represents information determining that the component is in a predetermined quality state, wherein the predetermined state indicates a level that prompts the replacement of the component; wherein the processing component is a processing unit for processing a substrate; the flow control component is an environmental gas control unit having a gas supply system or a gas exhaust system and capable of controlling the ambient gas within the processing unit; and the transport control component is a transport unit for transporting the substrate.

2. As in the display method of request item 1, where, Status information indicating the status of at least one of the aforementioned processing components, flow control components, and conveying control components is detected, and quality information of the aforementioned components is determined based on the aforementioned status information.

3. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the aforementioned time information; wherein the aforementioned time information represents information related to the usage time of at least one of the processing components, flow control components, and transport control components that is operable; and the aforementioned quality information represents information determining that the aforementioned components are in a predetermined quality state; wherein the aforementioned processing components are processing units for processing substrates; the aforementioned flow control components are environmental gas control units equipped with a gas supply system or a gas exhaust system and capable of controlling the environmental gas within the processing unit; and the aforementioned transport control components are transport units for transporting substrates, wherein... The aforementioned conveying unit includes a conveying robotic arm capable of conveying the aforementioned substrate and a drive unit for driving the aforementioned conveying robotic arm. The aforementioned conveying control component is the aforementioned drive unit.

4. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the aforementioned time information; wherein the aforementioned time information represents information related to the usage time of at least one of the processing components, flow control components, and transport control components that is operable; and the aforementioned quality information represents information determining that the aforementioned components are in a predetermined quality state; wherein the aforementioned processing components are processing units for processing substrates; the aforementioned flow control components are environmental gas control units equipped with a gas supply system or a gas exhaust system and capable of controlling the environmental gas within the processing unit; and the aforementioned transport control components are transport units for transporting substrates, wherein... The aforementioned flow control components are at least one of the valves, mass flow controllers, and pumps provided in the aforementioned gas supply system or the aforementioned gas discharge system.

5. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the aforementioned time information; wherein the aforementioned time information represents information related to the usage time of at least one of the processing components, flow control components, and transport control components that is operable; and the aforementioned quality information represents information determining that the aforementioned components are in a predetermined quality state; wherein the aforementioned processing components are processing units for processing substrates; the aforementioned flow control components are environmental gas control units equipped with a gas supply system or a gas exhaust system and capable of controlling the environmental gas within the processing unit; and the aforementioned transport control components are transport units for transporting substrates, wherein... The aforementioned processing unit has a processing chamber for storing a substrate and a sealing portion adjacent to the processing chamber, wherein the aforementioned processing component is the aforementioned sealing portion.

6. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the time information; wherein the time information represents information related to the usage time of at least one of the processing components, flow control components, and transport control components that is operable; and the quality information represents information determining that the component is in a predetermined quality state; wherein the processing components are processing units for processing substrates; the flow control components are environmental gas control units equipped with a gas supply system or a gas exhaust system and capable of controlling the environmental gas within the processing unit; and the transport control components are transport units for transporting substrates, wherein... The aforementioned quality status is determined based on status information, which indicates the status related to at least one of the following: sound, image, video, temperature, and odor of the aforementioned component.

7. As in the display method of request item 6, where, It has comparison information for comparison with the above-mentioned status information. When the detected status information is compared with the comparison information, the above-mentioned quality information is displayed when the difference in quality status is greater than or equal to a predetermined difference.

8. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the time information; wherein the time information represents information related to the usage time of at least one of a processing component, a flow control component, and a transport control component that is operable; and the quality information represents information determining that the component is in a predetermined quality state; wherein the processing component is a processing unit for processing a substrate, the flow control component is an environmental gas control unit equipped with a gas supply system or a gas exhaust system and capable of controlling the ambient gas within the processing unit, and the transport control component is a transport unit for transporting the substrate, wherein... During the operation of the aforementioned components, when the predetermined conditions related to the quality status of the aforementioned components are met during the detection within a unit of time, the components are judged to be of a predetermined quality level, and the aforementioned quality information is additionally displayed on the display unit.

9. As in request item 8, the display method, where, During the testing within a unit of time, if the number of times the quality status of the aforementioned components reaches the predetermined quality status exceeds a predetermined number, the aforementioned quality information will be additionally displayed.

10. As in the display method of request item 8, where, During the inspection within a unit of time, if the difference in the quality status of the aforementioned components exceeds a predetermined difference, the aforementioned quality information will be additionally displayed.

11. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the time information; wherein the time information represents information related to the usage time of at least one of a processing component, a flow control component, and a transport control component that is operable; and the quality information represents information determining that the component is in a predetermined quality state; wherein the processing component is a processing unit for processing a substrate, the flow control component is an ambient gas control unit equipped with a gas supply system or a gas exhaust system and capable of controlling the ambient gas within the processing unit, and the transport control component is a transport unit for transporting the substrate, wherein... The quality information is displayed in different colors according to the status of the aforementioned components.

12. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the time information; wherein the time information represents information related to the usage time of at least one of a processing component, a flow control component, and a transport control component that is operable; and the quality information represents information determining that the component is in a predetermined quality state; wherein the processing component is a processing unit for processing a substrate, the flow control component is an ambient gas control unit equipped with a gas supply system or a gas exhaust system and capable of controlling the ambient gas within the processing unit, and the transport control component is a transport unit for transporting the substrate, wherein... The aforementioned quality information has multiple levels corresponding to the quality status of the aforementioned components, and the aforementioned time information is displayed in a way that changes accordingly to the level of the aforementioned quality information.

13. As in the display method of request item 12, wherein, The aforementioned time information is displayed as a bar graph, and the overall display style of the bar graph changes according to the latest quality information level.

14. As in request item 12, the display method, where, The aforementioned time information is displayed on the timeline. If the quality information is determined to be at level one, the time information after the detection of level one will be changed to match the display of level one. If the quality information is determined to be at level two, the time information after the detection of level two will be changed to match the display of level two.

15. A display method comprising displaying time information and quality information at each time point in time for determining a quality state, in a state associated with the time information; wherein the time information represents information related to the usage time of at least one of a processing component, a flow control component, and a transport control component that is operable; and the quality information represents information determining that the component is in a predetermined quality state; wherein the processing component is a processing unit for processing a substrate, the flow control component is an environmental gas control unit equipped with a gas supply system or a gas exhaust system and capable of controlling the ambient gas within the processing unit, and the transport control component is a transport unit for transporting the substrate, wherein... The above time information represents the expected service life of the aforementioned components. Based on the quality condition of the aforementioned components, the expected service life of the aforementioned components is calculated, and the calculation result is reflected in the display unit.

16. As in request item 15, the display method, where, The aforementioned time information is displayed as a bar image. Based on the aforementioned calculation results, the length of the aforementioned bar image corresponding to the aforementioned expected usage period is adjusted and displayed on the aforementioned display unit, or the aforementioned bar image is overlaid with a lifespan indicator representing the aforementioned calculation results and displayed on the aforementioned display unit.

17. As in the display method of request item 15, wherein, The expected service life of the aforementioned component after reflecting the above calculation results, and the expected service life of the aforementioned component before reflecting the above calculation results, are both displayed on the aforementioned display unit.

18. A method for manufacturing a semiconductor device, comprising the display method of any one of claims 1, 3, 4, 5, 6, 8, 11, 12, and 15.

19. A program that enables a board processing apparatus to execute any one of the display methods in requests 1, 3, 4, 5, 6, 8, 11, 12, and 15 by means of a computer.

20. A processing apparatus capable of performing a display method according to any one of requests 1, 3, 4, 5, 6, 8, 11, 12, and 15.

21. A processing system capable of executing a display method for any one of request items 1, 3, 4, 5, 6, 8, 11, 12, and 15.

22. A management device capable of performing a display method for any one of request items 1, 3, 4, 5, 6, 8, 11, 12, and 15.

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