Measuring device

Abstract

A measuring device suitable for measuring an object under test (DUT), having a first side and a second side opposite to each other, and comprising a carrier, a calibration platform, a first measuring platform, a second measuring platform, and a processor. The DUT is disposed on the carrier. The calibration platform is disposed on the carrier. The first measuring platform is disposed on the carrier and located between the DUT and the calibration platform. The first measuring platform has a first measuring unit and a calibration unit. The second measuring platform is disposed on the carrier and located on the opposite side of the DUT opposite to the first measuring platform. The second measuring platform has a second measuring unit. The processor is coupled to the first measuring unit, the calibration unit, and the second measuring unit.

Claims

1. A measuring device suitable for measuring an object to be measured, the object having a first side surface and a second side surface opposite to each other, the measuring device comprising: A support frame, on which the object to be tested is appropriately placed; A calibration platform is configured on the support frame. A first measurement platform is configured on the support frame and located between the object under test (DUT) and the calibration platform. The first measurement platform includes: a first measurement unit for measuring the first side of the DUT to obtain first data; and a calibration unit for emitting a calibration laser to the calibration platform to obtain calibration data; a second measurement platform is configured on the support frame and located on the other side of the DUT opposite to the first measurement platform. The second measurement platform includes a second measurement unit for measuring the second side of the DUT to obtain second data; and a processor coupled to the first measurement unit, the calibration unit, and the second measurement unit. The processor is used to determine the flatness of the first side of the DUT based on the first data and the calibration data, and to determine the flatness of the second side of the DUT based on the second data and the calibration data.

2. The measuring device as claimed in claim 1, wherein the calibration platform is composed of a plurality of reference plates arranged in a row.

3. The measuring device as claimed in claim 2, wherein the reference plates are made of granite.

4. The measuring device as claimed in claim 2, the calibration platform further includes a movable base movably configured in the support frame, the reference plates being arranged on a top surface of the movable base and facing the first measuring platform.

5. The measuring device as claimed in claim 4, wherein the movable base has two pulley sets and a brake, the two pulley sets being respectively disposed on opposite short sides of the movable base away from the reference plates, and the brake being vertically and flexibly disposed on a long side of the movable base away from the reference plates.

6. The measuring device as claimed in claim 1, wherein the first measuring platform further includes a first slide rail, a second slide rail and a first sliding seat, the first slide rail and the second slide rail being vertically disposed on the support frame, the first sliding seat being slidably disposed on the first slide rail and the second slide rail, and the first measuring unit and the calibration unit being connected to the first sliding seat.

7. The measuring device as claimed in claim 1, wherein the second measuring platform further includes a third slide rail, a fourth slide rail and a second sliding seat, the third slide rail and the fourth slide rail being vertically disposed on the support frame, the second sliding seat being slidably disposed on the third slide rail and the fourth slide rail, and the second measuring unit being connected to the second sliding seat.

8. The measuring apparatus as claimed in claim 1, wherein the calibration unit is adapted to measure the four corners of the calibration platform to obtain the calibration data.

9. The measuring apparatus of claim 1, wherein the first measuring unit is adapted to emit a first laser onto the first side of the object under test to obtain the first data.

10. The measuring apparatus of claim 1, wherein the second measuring unit is adapted to emit a second laser onto the second side of the object under test to obtain the second data.

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